WO2010027140A3 - 파장 가변 분광계 및 그 파장 가변 방법 - Google Patents

파장 가변 분광계 및 그 파장 가변 방법 Download PDF

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Publication number
WO2010027140A3
WO2010027140A3 PCT/KR2009/003062 KR2009003062W WO2010027140A3 WO 2010027140 A3 WO2010027140 A3 WO 2010027140A3 KR 2009003062 W KR2009003062 W KR 2009003062W WO 2010027140 A3 WO2010027140 A3 WO 2010027140A3
Authority
WO
WIPO (PCT)
Prior art keywords
wavelength
incident light
spectrometer
diffracting
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2009/003062
Other languages
English (en)
French (fr)
Other versions
WO2010027140A2 (ko
Inventor
정진섭
손영수
김병민
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANOBASE Inc
Original Assignee
NANOBASE Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANOBASE Inc filed Critical NANOBASE Inc
Priority to US13/062,167 priority Critical patent/US20120002198A1/en
Publication of WO2010027140A2 publication Critical patent/WO2010027140A2/ko
Publication of WO2010027140A3 publication Critical patent/WO2010027140A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1838—Holographic gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

본 발명은 회절 격자의 교체나 관측 부분의 동작 없이도 인가되는 광의 파장에 대해 최상의 효율을 제공하도록 한 파장 가변 분광계 및 그 파장 가변 방법에 관한 것으로, 이를 위하여 관측할 외부 광원의 파장에 대해 최적 효율을 제공하는 입사각을 제공하도록 투과형 회절판을 회전 가능하도록 구성하고, 투과형 회절판의 회전과 입사광의 파장에 따라 회절 각도가 변화되는 광을 회절판의 회전과 입사광의 파장 변화에 무관하게 항상 동일 출력 경로로 광을 제공하는 거울을 배치하도록 함으로써, 관측을 위한 카메라의 움직임이나 회절판의 교체 없이도 항상 입사광의 파장에 따른 최적 회절 효율로 입사광의 스펙트럼을 획득할 수 있어 분광계의 크기를 줄이고, 비용을 줄이며, 고장 가능성을 줄일 수 있는 효과가 있다.
PCT/KR2009/003062 2008-09-03 2009-06-08 파장 가변 분광계 및 그 파장 가변 방법 Ceased WO2010027140A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/062,167 US20120002198A1 (en) 2008-09-03 2009-06-08 Wavelength-tunable spectrometer and wavelength tuning method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080086985A KR100885537B1 (ko) 2008-09-03 2008-09-03 파장 가변 분광계 및 그 파장 가변 방법
KR10-2008-0086985 2008-09-03

Publications (2)

Publication Number Publication Date
WO2010027140A2 WO2010027140A2 (ko) 2010-03-11
WO2010027140A3 true WO2010027140A3 (ko) 2010-04-29

Family

ID=40682099

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/003062 Ceased WO2010027140A2 (ko) 2008-09-03 2009-06-08 파장 가변 분광계 및 그 파장 가변 방법

Country Status (3)

Country Link
US (1) US20120002198A1 (ko)
KR (1) KR100885537B1 (ko)
WO (1) WO2010027140A2 (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101045902B1 (ko) 2009-12-17 2011-07-04 주식회사 나노베이스 파장 가변 시스템을 위한 광원 모듈 장치 및 이를 적용한 시스템의 동작 방법
JP5945400B2 (ja) * 2011-11-18 2016-07-05 オリンパス株式会社 検出光学系および走査型顕微鏡
JP6278741B2 (ja) * 2014-02-27 2018-02-14 株式会社キーエンス 画像測定器
JP6290651B2 (ja) * 2014-02-27 2018-03-07 株式会社キーエンス 画像測定器
KR101619143B1 (ko) 2015-12-15 2016-05-10 동우옵트론 주식회사 콘케이브형 회절격자의 최적화 방법을 이용한 혼합시료 분석시스템
KR102130418B1 (ko) * 2019-05-29 2020-08-05 주식회사 신코 다소자 분광분석기
TR202010646A1 (tr) * 2020-07-06 2022-01-21 Orta Dogu Teknik Ueniversitesi Deği̇şken kirinim opti̇k elemanli opti̇k spektrometre
KR102488298B1 (ko) * 2020-08-21 2023-01-12 동아대학교 산학협력단 파장 선택 필터
CN112964692B (zh) * 2021-02-05 2022-12-27 上海新产业光电技术有限公司 拉曼光谱装置
CN121595029A (zh) * 2026-01-30 2026-03-03 华中科技大学 一种折反式体相全息光栅透射光谱仪

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004027493A1 (ja) * 2002-09-20 2004-04-01 Nippon Sheet Glass Company, Limited 回折格子を用いた分光装置
JP2005030933A (ja) * 2003-07-07 2005-02-03 Yokogawa Electric Corp 分光装置
JP2005337793A (ja) * 2004-05-25 2005-12-08 Olympus Corp 分光画像入力装置及びそれを備えた光学装置
JP2006234920A (ja) * 2005-02-22 2006-09-07 Nippon Sheet Glass Co Ltd 光学モジュール

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0644549B2 (ja) * 1989-03-17 1994-06-08 株式会社日立製作所 投影露光法及び装置
US6687007B1 (en) * 2000-12-14 2004-02-03 Kestrel Corporation Common path interferometer for spectral image generation
US20020105725A1 (en) * 2000-12-18 2002-08-08 Sweatt William C. Electrically-programmable optical processor with enhanced resolution
US7177340B2 (en) * 2002-11-05 2007-02-13 Jds Uniphase Corporation Extended cavity laser device with bulk transmission grating
US7538945B2 (en) * 2005-01-07 2009-05-26 Nippon Sheet Glass Company, Limited Optical path changing module
US20070160325A1 (en) * 2006-01-11 2007-07-12 Hyungbin Son Angle-tunable transmissive grating

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004027493A1 (ja) * 2002-09-20 2004-04-01 Nippon Sheet Glass Company, Limited 回折格子を用いた分光装置
JP2005030933A (ja) * 2003-07-07 2005-02-03 Yokogawa Electric Corp 分光装置
JP2005337793A (ja) * 2004-05-25 2005-12-08 Olympus Corp 分光画像入力装置及びそれを備えた光学装置
JP2006234920A (ja) * 2005-02-22 2006-09-07 Nippon Sheet Glass Co Ltd 光学モジュール

Also Published As

Publication number Publication date
WO2010027140A2 (ko) 2010-03-11
KR100885537B1 (ko) 2009-02-26
US20120002198A1 (en) 2012-01-05

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