WO2010058029A1 - Mécanisme d'entraînement pour le déplacement d'un objet sur un axe de déplacement et microvanne - Google Patents

Mécanisme d'entraînement pour le déplacement d'un objet sur un axe de déplacement et microvanne Download PDF

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Publication number
WO2010058029A1
WO2010058029A1 PCT/EP2009/065747 EP2009065747W WO2010058029A1 WO 2010058029 A1 WO2010058029 A1 WO 2010058029A1 EP 2009065747 W EP2009065747 W EP 2009065747W WO 2010058029 A1 WO2010058029 A1 WO 2010058029A1
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WIPO (PCT)
Prior art keywords
piston
clamping
drive mechanism
bore
elements
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Ceased
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PCT/EP2009/065747
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German (de)
English (en)
Inventor
Peter Hess
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Individual
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Individual
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Application filed by Individual filed Critical Individual
Priority to DE112009003682.1T priority Critical patent/DE112009003682B4/de
Priority to CH00869/11A priority patent/CH702561B1/de
Priority to US13/131,026 priority patent/US8777179B2/en
Publication of WO2010058029A1 publication Critical patent/WO2010058029A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means

Definitions

  • the invention relates to a drive mechanism for the movement of an object along a movement axis, d has the very small dimensions, which are in the millimeter or tenths of a millimeter range.
  • the object is in particular a piston or a hollow body.
  • the invention further relates to a microvalve with such a drive mechanism.
  • the invention has for its object to develop a drive mechanism with very small dimensions, which allows the movement of an object along a linear axis.
  • Another object of the invention is to develop a micro valve with very small dimensions.
  • An inventive drive mechanism for the movement of an object along a movement axis comprises two clamping elements and a drive element arranged between the two clamping elements, which enables a relative displacement of the two clamping elements along the movement axis.
  • Each clamping element comprises a base body and two jaws. At least one of the two clamping jaws is displaceable by means of a piezo actuator in order to generate a clamping force acting on the object, which is directed transversely to the movement axis.
  • the base bodies of the two clamping elements are connected by at least two expandable elements.
  • the drive element comprises a further piezoactuator, which enables the relative displacement of the two clamping elements along the movement axis.
  • a change in length of the piezo actuator of the first clamping element and / or of the piezoelectric actuator of the second clamping element and / or the further piezoelectric actuator is increased by means of an associated hydraulic amplifier.
  • the base body of the two clamping elements and the expandable elements are preferably formed from two half-shells.
  • the object is for example a piston and the two clamping elements are mounted with sliding fit on the piston.
  • the object may also be a hollow body, in which case the jaws of one of the two clamping elements are press-fitted and the clamping jaws of the other of the two clamping elements are mounted with a sliding fit on a piston.
  • a microvalve according to the invention comprises such a drive mechanism, a valve housing and, as an object moved by the drive mechanism, a piston.
  • the valve housing has a side wall and a head portion, wherein the side wall is parallel to the longitudinal axis of the piston runs.
  • the head portion has a first bore which is aligned with the longitudinal axis of the piston, receives a front end of the piston and forms a gap seal with the piston.
  • the drive mechanism is housed in a chamber in the valve housing.
  • the piston is hollow, for example, and has an opening which opens into the first bore of the valve housing.
  • Either the side wall of the valve housing has a further bore, which opens into the first bore and perpendicular or oblique to the first bore or the first bore opens into an outlet opening, wherein the cross-sectional area of the first bore is enlarged in a limited portion in front of the outlet opening.
  • the piezoelectric actuator of the drive element can be acted upon by an alternating voltage or alternating current whose frequency is in the ultrasonic range.
  • a microvalve can be built, which has a cylindrical valve housing whose diameter is less than 5 mm.
  • Fig. 1 shows a first embodiment of an inventive drive mechanism with two clamping elements and a drive element for the movement of a
  • FIG. 2 shows details of the drive mechanism
  • Fig. 4 shows a second embodiment of the clamping element
  • Fig. 5 shows a second embodiment of an inventive
  • FIG. 6 shows a third embodiment of an inventive
  • Figs. 8 to 10 show a clamping element with an integrated hydraulic booster
  • Figs. 11 to 17 show microvalves.
  • Piston is. 1 shows a drive mechanism according to the invention for the movement of a piston 1 along a movement axis 2 in a cutaway, three-dimensional representation, ie some portions of the individual elements of the drive mechanism have been cut and omitted for reasons of clarity of drawing.
  • the movement axis 2 is a linear axis and is equal to the longitudinal axis of the piston 1.
  • the drive mechanism comprises two clamping elements 3 and 4 and a drive element 5, which enables a relative displacement of the two clamping elements 3 and 4 along the movement axis 2.
  • the two clamping elements 3 and 4 serve to the piston
  • Each of the clamping elements 3 and 4 comprises a base body 6 and two clamping jaws 7 and 8.
  • the base bodies 6 of the two clamping elements 3 and 4 are connected by at least two expandable elements 9 (FIG. 2).
  • the base body 6 of the two clamping elements 3 and 4 and the expandable elements 9 are advantageously made of two equal parts, namely two half shells 10, which are put together, or from a single part.
  • Fig. 2 shows the two half-shells 10 before they are put together.
  • a total of four stretchable elements 9 connect the two base bodies 6.
  • the stretchable elements 9 here are webs that are tapered in the middle so that they allow a change in their length by a few micrometers.
  • the webs may also have two arms developed to each other or be formed meander-shaped, to allow an extension without much effort.
  • the drive mechanism is located in a housing 11, which is cylindrical here.
  • FIG. 3 shows a first embodiment of the clamping element 3 in a section running perpendicular to the movement axis 2, namely in the section indicated by the plane E in FIG. 1, in which the clamping jaw 7 is stationary and the clamping jaw 8 in the plane E in FIG in a direction transverse to the axis of movement
  • the jaw 7 is formed as a stationary part of the base body 6 or fixedly connected to the base body 6. Between the base body 6 and the movable clamping jaw 8, a piezoelectric actuator 13 is arranged.
  • the piezoactuator 13 is advantageously inserted loosely into the space between the base body 6 and the movable jaw 8 and secured against lateral displacements along the movement axis 2 by lateral stops mounted in the base body 6.
  • the piezoactuator 13 allows the displacement of the movable jaw 8 relative to the base body 6 and generates the clamping force with which the clamping jaw 8 presses on the piston 1.
  • FIG. 4 shows a second embodiment of the clamping element 3 in the section indicated by the plane E (FIG. 1).
  • both jaws 7 and 8 are movable and it is a first piezoelectric actuator 13.1 between the first jaw 7 and the base body 6 and a second piezoelectric actuator 13.2 between the second jaw 8 and the base body 6 is arranged.
  • the two piezo actuators 13.1 and 13.2 are driven so that the two jaws 7 and 8 either move towards or away from each other.
  • the drive element 5 comprises a piezoactuator 14, which enables a relative displacement of the base bodies 6 of the two clamping elements 3 and 4 along the movement axis 2.
  • the piezoactuator 14 is secured between the base bodies 6 of the two clamping elements 3 and 4 such that the expandable elements 9 bias the piezoactuator 14.
  • the expandable elements 9 are basically springs, which ensure that the clamping elements 3 and 4, the piezoelectric actuator
  • the piezoelectric actuator 14 comprises two stacks of piezoelectric elements, which are arranged on both sides of the piston 1.
  • the two stacks are preferably controlled electrically separately and calibrated by means of a single calibration so that they perform the same stroke.
  • the piston 1 may have any shape in cross-section, it may in particular be circular or rectangular.
  • the piston 1 may be hollow. It may be flat or pointed at one or both ends.
  • the piston 1 may also be an optical fiber or a wire.
  • the shape of the jaws 7 and 8 is adapted with advantage of the lateral surface of the piston 1 in order to achieve the best possible power transmission from the jaws 7 and 8 on the piston 1.
  • the drive mechanism further comprises a control 15 for the control of its operation.
  • the control element 15 is preferably fastened somewhere on the drive mechanism, but it can also be arranged outside the drive mechanism.
  • the control 15 is powered by electrical wires or wirelessly or by an integrated battery.
  • the control commands are also supplied via electrical lines or wirelessly.
  • 15 is preferably a single semiconductor chip, which is either incorporated as a bare semiconductor chip in the drive mechanism or which is protected in a conventional manner, for example by means of a so-called “glob top”, to protect it from harmful influences.
  • Each of the piezoactuators 13, 14 is controlled by the control 15 so that it occupies one of two states, namely either the state “stretched” or the state “contracted".
  • Each of the clamping elements 3, 4 then also assumes one of two states, namely either the state “terminals” or the state “non-terminals”.
  • the “clamped” state is assumed when the associated piezoactuator assumes the “stretched” state.
  • the state “non-clamping" is assumed when the associated piezo actuator assumes the state "contracted”.
  • the drive element 5 also assumes one of two states, namely either the state “stretched” when the piezo actuator 14 assumes the state “stretched”, or the state “contracted” when the piezo actuator 14 assumes the state “contracted”.
  • the movement of the piston 1 along the axis of movement 2 takes place with a plurality of successive motion cycles, wherein in each cycle of movement, the clamping elements 3, 4 alternately clamp and release and be moved between them relative to each other.
  • the clamping element 3 is arranged stationary with respect to the environment, ie it does not change its position relative to the housing 11.
  • the drive element 5 is in the state "contracted", so that the two clamping elements 3 and 4 occupy a predetermined distance A.
  • a movement cycle comprises the following four steps:
  • the clamping element 3 is brought into the state "non-terminals", the clamping element 4 in the state "terminals".
  • the drive element 5 is brought into the state "stretched.”
  • the clamping element 4 is shifted to the right by a predetermined distance ⁇ a, ie the distance between the two clamping elements 3 and 4 is increased to the distance A + ⁇ a the clamping element 4 pulls the piston 1 with it and thus shifts it to the right by the distance ⁇ a.
  • the clamping element 3 is brought into the state "terminals", the clamping element 4 in the state "non-terminals".
  • the drive element 5 is brought into the state "contracted", whereby the clamping element 4 is displaced to the left by the distance ⁇ a, i.e. the distance between the two clamping elements 3 and 4 is again reduced to the original distance A.
  • the drive mechanism can be realized in different sizes. In the smallest case, the linear dimensions are only a few tenths of a millimeter, for example, 0.3 millimeters. In this case, the piezoactuators having a size of typically 0.1 mm * 0.1 mm * 0.05 mm are very small and consequently allow only a small stroke, i. the difference in length between the "contracted" state and the "stretched” state is only a few microns, typically about one micron.
  • the drive mechanism may also have linear dimensions of a few millimeters.
  • the width of the piston 1 measured transversely to the movement axis 2 must therefore be adapted to the distance between the clamping jaws 7 and 8 with high precision, so that the clamping jaws 7 and 8 can pinch the piston 1 at all with this small stroke of the piezoactuator 13.
  • the construction of the base body 6 and the jaws 7 and 8 is therefore designed with advantage so that the jaws 7 and 8 are mounted with sliding fit on the piston 1.
  • the jaws 7 and 8 are an integral part of the base body 6, i. they are connected via solid joints with the base body 6.
  • a sensor is integrated into the drive mechanism, which allows the measurement of the position of the piston 1 with respect to the drive mechanism.
  • the sensor may for example be formed by electrical contacts that close when the piston 1 has reached a predetermined position.
  • the object to be moved is a hollow body which is displaced relative to a fixed part, for example a piston.
  • Fig. 5 shows a drive mechanism which is arranged in a hollow body 16 and is able to move the hollow body 16 relative to the piston 1 along the movement axis 2.
  • the cross section of the hollow body 16 is, for example, round, i. the hollow body 16 is a hollow cylinder.
  • Examples of hollow cylinders are tubes or sleeves or the like.
  • the drive mechanism in turn comprises two clamping elements 17 and 18 which, as in the previous example, have base bodies 6 connected by the expansible elements 9 ( Figure 2).
  • the stretchable elements are not visible in this figure.
  • the two clamping elements 17 and 18 have a similar structure and a slightly different operation.
  • the clamping element 17 comprises two support surfaces 19, which are preferably fixed with a press fit on the piston 1, and at least one movable jaw 20 and a piezoelectric actuator 13 which is arranged between the support surface 19 and the movable jaw 20.
  • both sides of the piston 1 are each a movable jaw 20 with associated piezoelectric actuator 13 is present.
  • the piezoactuator 13 allows the displacement of the movable jaw 20 relative to the base body 6 and generates the clamping force, but in this example, the jaw 20 does not press against the piston 1, but against the inner wall of the hollow body 16.
  • the jaw 20 is connected via at least two webs 21 to the base body 6.
  • the base body 6, the webs 21 and the jaw 20 are made of one piece of material, the webs 21 therefore represent a solid-state joint.
  • the piezoelectric actuator 13 is disposed between the support surface 19 and the movable jaw 8. If the piezoactuator 13 is subjected to a voltage such that it expands, then the movable clamping jaw 20 - as viewed from the center of the base body 6 - is pressed outward. This makes it possible to caulk the clamping element 3 in the hollow body 16. In the example with two movable clamping jaws 20, which are arranged on both sides of the piston 1, the clamping element 3 is caulked on both sides of the movement axis 2 in the hollow body 16.
  • the clamping element 18 differs only in one point from the clamping element 17, namely that the support surfaces 19 do not clamp the piston 1, but store with sliding fit on the piston 1. While the clamping member 17 is fixedly connected to the piston 1, it is on the described or in another way, the clamping element 18 is movable back and forth along the piston 1 thanks to the sliding fit by means of the drive element 5.
  • a movement cycle comprises the following four steps, wherein at the beginning of a movement cycle, the drive element 5 in the state "contracted" and therefore the both clamping elements 17 and 18 are at a distance A:
  • the clamping element 17 is brought into the state "terminals”, the clamping element 18 in the state "non-terminals”.
  • the clamping element 17 is now anchored stationary in the hollow body 16.
  • the drive element 5 is placed in the "stretched" state so that it shifts the clamping element 18 to the left by a predetermined distance ⁇ a, i.e. the distance between the two clamping elements 17 and 18 is increased to the distance A + ⁇ a.
  • the clamping element 18 is brought into the state “terminals”, the clamping element 17 in the state "non-terminals”. The clamping element 18 is now anchored in the hollow body 16.
  • the drive element 5 is brought into the state "contracted.”
  • the clamping element 18 is displaced to the right by the distance ⁇ a, ie the distance between the two clamping elements 17 and 18 is again reduced to the original distance A, whereby the hollow body 16 is moved with the clamping element 17, while the clamping element 17 is anchored to the piston 1 and maintains its position.
  • each cycle of movement of the hollow body 16 is displaced by a predetermined, very small distance of typically one to five micrometers.
  • the movement of the hollow body 16 along the piston 1 therefore takes place with a multiplicity of successive movement cycles.
  • Fig. 6 shows a three-dimensional sectional view of another drive mechanism which is arranged in a hollow body 16 and is capable of the hollow body 16 relative to the clamping element 17 and connected to the clamping element 17 carrier 23 along the longitudinal axis of the hollow body 16 to move.
  • the movement axis 2 is thus the longitudinal axis of the hollow body 16.
  • the hollow body 16 is cut open for reasons of clarity of drawing.
  • the drive mechanism comprises the two clamping elements 17 and 18 and the drive element 5.
  • the expandable elements connecting the base body 6 of the two clamping elements 17 and 18 are not visible in this figure.
  • the clamping element 17 and the clamping element 18 each comprise two clamping jaws 20 and 22 which are displaceable perpendicularly to the movement axis 2 and a piezoactuator 13 which is arranged between the two clamping jaws 20 and 22 and respectively generates the clamping force directed perpendicularly to the movement axis 2.
  • the jaws 20 and 22 are a part of the base body 6 and connected thereto via a solid-state joint in the form of thin webs.
  • the piezoelectric actuator 13 consists of a stack 24 of many piezoelectric elements, which is completed on both sides by a ceramic plate 25, wherein the ceramic plates 25 in the clamping state of the clamping member of the Press jaws 20 and 22 against the inner wall of the hollow body 16.
  • the drive element 5 is a piezoactuator, which consists of a stack 26 of many piezoelectric elements, which in this example is closed on both sides by a ceramic body 27, and serves in operative connection with the non-visible expandable elements, the clamping element 18 relative to the clamping element 17 along the movement axis 2 to move back and forth.
  • Fig. 7 shows schematically and in plan view of a piezo-bending beam 28, which can be used in place of the piezoelectric actuator 13 composed of many piezoelectric elements (for example Fig. 1) in the clamping elements 3, 4, 17, 18.
  • the piezo-bending beam 28 can assume two states A and B, namely the state "straight" and the state "bent".
  • the state “contracted” of the piezo actuator 13 corresponds to the state A of the piezo-bending beam 28
  • the state “stretched” of the piezo actuator 13 corresponds to the state B of the piezo-bending beam 28.
  • the piezo-bending beam 28 generates the clamping force when in the state B is located.
  • the direction of the clamping force is indicated by the arrow.
  • the piezoactuator 13 eg, FIG. 1
  • the piezoactuators 13.1 and 13.2 eg, FIG. 4
  • Fig. 8 shows in section a piezoelectric actuator 29, the stroke is increased by a hydraulic amplifier 30.
  • the piezoactuator 29 and the hydraulic booster 30 are sandwiched or clamped between a movable jaw 31 and a stationary support 32.
  • the piezoactuator 29 and the hydraulic amplifier 30 are thus coupled together.
  • An arrow indicates the direction of movement of the jaw 31 and the piezo actuator 29.
  • the support 32 may be a part of the base body 6 (FIG. 1) or a part of a housing.
  • the piezoactuator 29 consists of a stack of piezoelectric elements.
  • the hydraulic amplifier 30 serves to increase the change in length of the piezoactuator 29 by a predetermined factor, so that, for example, a change in length of the stack of piezoelectric elements by 2 .mu.m causes a change in length of the hydraulic amplifier 30 by 20 .mu.m.
  • the hydraulic booster 30 comprises a liquid-filled chamber 33 bounded on one side by a first flexible membrane 34.
  • the chamber 33 includes on the opposite side of the membrane 34 has a rigid wall 35 compared to the membrane 34 with a thin bore 36.
  • a second flexible membrane 37 is fixed, which covers the bore 36, so that between the second diaphragm 37 and the wall 35 a closed space is formed.
  • Fig. 9 shows in section a hydraulic amplifier 30 which is arranged between a stationary support 32 and a movable jaw 31.
  • the hydraulic booster 30 in turn has two diaphragms 34 and 37, with a bore 36 connecting the chamber 33 of the hydraulic booster 30 to the second diaphragm 37.
  • the two membranes 34 and 37 are arranged at right angles to each other.
  • the longitudinal extension of the piezoactuator 29 in a predetermined direction causes a longitudinal expansion of the hydraulic booster 30 in a direction perpendicular thereto.
  • Arrows indicate the different directions of movement of the jaw 31 and the piezo actuator 29. This makes it possible to arrange the piezoactuators 13 of the clamping elements 3, 4 in the drive mechanism transversely to the clamping direction and thus to use a longer piezoactuator.
  • Fig. 10 shows in section a further development of the hydraulic amplifier 30 according to FIG. 9, in which two membranes 37 are arranged on opposite sides, which are both connected via a respective bore 36 with the chamber 33.
  • the piezo actuators 13 of the clamping elements 3, 4 as well as the further piezoelectric actuator 14 can be replaced by such a combination of piezoelectric actuator and hydraulic booster.
  • the drive mechanisms according to the invention can be used in a very large number of applications in which a small size is important, for example in the case of microvalves.
  • the control element 15 (FIG. 1) is set up to also act on the piezoactuator 14 of the drive element 5 with an alternating voltage or alternating current whose frequency lies in the ultrasonic range, in particular in the range from a few kilohertz up to a few megahertz. If the one clamping element is firmly connected to the environment and at the same time does not clamp the piston 1 and if the other clamping element is free to move and clamps the piston 1, then transmits the ultrasonically acted drive element 5 the ultrasound on the piston 1, so that its resonant End can be used for welding. This oscillating end of the piston 1 is preferably formed pointed.
  • the drive mechanism according to the invention is suitable, for example, for the construction of essentially cylindrical microvalves whose diameter is less than 5 mm, in extreme cases less than 0.4 mm.
  • FIGS. 11 to 17 show examples of various microvalves, and the same reference numerals as above are used for the reference numerals of the driving mechanism of the microvalve.
  • 11 shows a first exemplary embodiment of a microvalve according to the invention for the control and / or regulation of the flow of a fluid in various designs and operating states.
  • the fluid may be a gas, such as air, a liquid or even an adhesive.
  • the microvalve includes a valve housing 38, a piston 1, and a drive mechanism 39 for reciprocating the piston 1 in the valve housing 38 along the longitudinal axis of the piston 1.
  • the piston 1 is hollow.
  • the valve housing 38 is cut open, so that the parts arranged inside are clearly visible.
  • the valve housing 38 comprises a head part 40 having a first bore 41 which receives the front part of the piston 1 and forms a gap seal with the piston 1, ie the diameter of the first bore 41 is only a few micrometers, for example two micrometers larger than the diameter of Piston 1.
  • the first bore 41 may be a through bore or, as in the example, a blind hole.
  • the valve housing 38, the piston 1 and the first bore 41 have a common longitudinal axis 42.
  • the valve housing 38 has a parallel to the longitudinal axis 42 extending side wall.
  • the valve housing 38 further comprises a chamber 43, which adjoins the head part 40 and receives the drive mechanism 39.
  • the piston 1 is preferably a tube whose front end is closed and whose rear end is connected to an inlet 45 for the supply of the fluid.
  • the side wall of the piston 1 includes an opening 44 which opens into the first bore 41.
  • the valve housing 38 includes at least one further bore 46, which opens into the first bore 41.
  • the bore 46 extends obliquely or preferably perpendicular to the first bore 41.
  • the valve housing 38 includes two holes 46.
  • the valve housing 38 may be made of a single piece of material or composed of a plurality of sub-bodies.
  • the fluid is discharged via one of the bores 46 as soon as the opening 44 in the piston 1 is aligned with this bore 46, because then this bore 46 in the valve housing 38 and the opening 44 in the piston 1 form a common continuous flow channel, in the Cavity of the piston 1 opens.
  • the microvalve is a one-way valve that can be used as an ON-OFF valve or as a proportional valve.
  • the microvalve is a multiway valve.
  • the n> l holes are staggered along the longitudinal axis 42 of the microvalve and may point in the same direction or in different directions as in the example.
  • the clamping element 4 is connected directly or indirectly to the valve housing 38, i. E. the position of the clamping element 4 does not change with respect to the position of the valve housing 38.
  • the clamping member 4 is fixedly connected to the valve housing 38 and the drive mechanism moves the piston 1 back and forth to move the opening 44 in the piston 1 relative to the at least one bore 46.
  • the clamping elements 3 and 4 in such a way that the clamping force generated by the piezoelectric actuator 13 is directed to the inner wall of the valve housing 38 and the associated clamping element 3 or 4 caulked in the valve housing 38, so that the piston 1 remains stationary and the drive mechanism 39 shifts the valve housing 38 relative to the piston 1.
  • Fig. 12 shows a microvalve, in which the first bore 41 is completely passed through the valve housing 38.
  • An adjoining the outlet opening 48 of the first bore 41, limited section 49 of the first bore 41 has an enlarged cross section through which the fluid can escape as soon as the opening 44 in the piston 1 is within this section 49.
  • the microvalve is in the "open" state.
  • FIG. 13 shows the same microvalve in the "closed” state:
  • the opening 44 in the piston 1 is sealed by the inner wall of the first bore 41.
  • the piston 1 and the inner wall of the first bore 41 form a gap seal which forms the outlet of the fluid effectively prevented.
  • FIG. 14 shows a microvalve in which the piston 1 is not hollow inside, i. E. the piston 1 is like a bolt or pin.
  • the first bore 41 is completely passed through the head portion 40 of the valve housing 38 and has, optionally, in a lying in front of the outlet opening portion 49 an expanded cross-section.
  • the valve housing 38 has at least one further bore 46 which extends obliquely or, as in the example, perpendicular to the first bore 41 and opens into the first bore 41.
  • the microvalve is in the "open" state: The fluid is supplied via the bore 46 and discharged via the first bore 41, or vice versa.
  • FIG. 15 shows the same microvalve in the "closed” state:
  • the opening 44 in the piston 1 is sealed by the inner wall of the first bore 41.
  • the piston 1 and the inner wall of the first bore 41 form a gap seal which forms the outlet of the fluid effectively prevented.
  • Fig. 16 shows a microvalve in which the piston 1 is not hollow inside and in which a portion 50 of the piston 1 has a reduced cross-section.
  • the piston 1 is in a position in which the portion 50 is in the region of the two bores 46.1 and 46.2, so that there is formed between the piston 1 and the inner wall of the first bore 41, a cavity.
  • the microvalve is in the "open” state
  • the fluid is supplied through one bore 46.1 and discharged through the other bore 46.2 or vice versa
  • the piston 1 is retracted so that the foremost part of the piston 1 is at least the bore 46.1, preferably covers both holes 46.1 and 46.2.
  • Fig. 17 shows a microvalve for mixing two gaseous or liquid substances and, optionally, compressing the mixture.
  • the piston 1 is not internally hollow and a portion 49 of the first bore 41 has, optionally, an expanded cross-section, so that there is an extended chamber 51 is formed.
  • the piston 1 In the "open” state, the piston 1 is in a retracted position, so that the one substance passes through the bore 46.1 and the other substance via the bore 46.2 in the first bore 41 and in the extended chamber 51, wherein the outlet opening 48 by not In the "closed” state, the piston 1 is brought into an advanced position in which it closes the two bores 46.1 and 46.2. The closer the tip of the piston 1 is moved to the outlet opening 48, the greater the pressure exerted on the mixture.
  • the piezoactuator 14 of the drive element 5 is preferably acted upon by an alternating voltage or alternating current whose frequency is in the ultrasonic range.
  • an alternating voltage or alternating current whose frequency is in the ultrasonic range.
  • the piston 1 is completely passed through the drive mechanism 39.
  • this is not mandatory in each embodiment, in some embodiments, it is sufficient if only the clamping element 3 can clamp on the piston 1, or it is sufficient if the two clamping elements 3 and 4 can caulk on the valve housing 38. Then, if the fluid is a gaseous substance and the piston 1 is hollow, it is possible to let the fluid flow through the chamber 43 and to introduce it into the hollow piston 1 just before the first bore 41.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un mécanisme d'entraînement pour le déplacement d'un objet sur un axe de déplacement (2), comprenant deux éléments de serrage (3, 4) et un élément d'entraînement (5) disposé entre les deux éléments de serrage (3, 4) et permettant un déplacement relatif des deux éléments de serrage (3, 4) le long de l'axe de déplacement (2). Chacun des éléments de serrage (3 ; 4) comprend un corps de base (6) et deux mors de serrage (7, 8). Un piézoactionneur (13) est disposé entre le corps de base (6) et au moins l'un des deux mors de serrage (7, 8) et peut exercer une force de serrage agissant sur l'objet et orientée perpendiculairement à l'axe de déplacement (2). Les corps de base (6) des deux éléments de serrage (3, 4) sont reliés par au moins deux éléments extensibles (9). L'élément d'entraînement (5) comprend un autre piézoactionneur (14) qui permet le déplacement relatif des deux éléments de serrage (3, 4) le long de l'axe de déplacement (2). Le mécanisme d'entraînement convient pour une application dans une microvanne.
PCT/EP2009/065747 2008-11-24 2009-11-24 Mécanisme d'entraînement pour le déplacement d'un objet sur un axe de déplacement et microvanne Ceased WO2010058029A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE112009003682.1T DE112009003682B4 (de) 2008-11-24 2009-11-24 Antriebsmechanismus für die Bewegung eines Objekts entlang einer Bewegungsachse und Mikroventil
CH00869/11A CH702561B1 (de) 2008-11-24 2009-11-24 Antriebsmechanismus mit einem entlang einer Bewegungsachse bewegbaren Objekt und Mikroventil.
US13/131,026 US8777179B2 (en) 2008-11-24 2009-11-24 Drive mechanism for the movement of an object along an axis of motion and micro-valve

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH1821/08 2008-11-24
CH18212008 2008-11-24
CH1822/08 2008-11-24
CH18222008 2008-11-24

Publications (1)

Publication Number Publication Date
WO2010058029A1 true WO2010058029A1 (fr) 2010-05-27

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PCT/EP2009/065747 Ceased WO2010058029A1 (fr) 2008-11-24 2009-11-24 Mécanisme d'entraînement pour le déplacement d'un objet sur un axe de déplacement et microvanne

Country Status (4)

Country Link
US (1) US8777179B2 (fr)
CH (1) CH702561B1 (fr)
DE (1) DE112009003682B4 (fr)
WO (1) WO2010058029A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105190133B (zh) * 2013-05-07 2019-06-04 皇家飞利浦有限公司 线性数字比例压电阀
DE102018001048A1 (de) * 2018-02-09 2019-08-14 Atlas Copco Ias Gmbh Dosierventil
DE102018117812A1 (de) * 2018-07-24 2019-08-29 Baumer Hhs Gmbh Dosierventil
CN109193020B (zh) * 2018-10-24 2024-03-08 珠海格力智能装备有限公司 电芯安装设备
CN112994513B (zh) * 2021-02-08 2022-02-18 合肥工业大学 一种中空二维压电惯性冲击驱动平台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2338031A (en) * 1998-06-04 1999-12-08 Daimler Chrysler Ag An fuel injection valve, for an I.C. engine, with a piezoelectric actuator and injection orifices of different opening cross section

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
EP0160707B1 (fr) * 1984-05-03 1988-09-28 International Business Machines Corporation Dispositif de déplacement rotatif pas à pas piézo-électrique
JPS63167687A (ja) * 1986-12-26 1988-07-11 Nippon Electric Ind Co Ltd 直線運動機構
US4971106A (en) * 1987-09-30 1990-11-20 Toto, Ltd. Automatically operating valve for regulating water flow and faucet provided with said valve
IL87312A (en) * 1988-08-02 1992-02-16 Zvi Orbach Electromechanical translation apparatus of the inchworm linear motor type
US4874979A (en) 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
US5319257A (en) * 1992-07-13 1994-06-07 Martin Marietta Energy Systems, Inc. Unitaxial constant velocity microactuator
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
US6380661B1 (en) * 2000-06-05 2002-04-30 Burleigh Instruments, Inc. Linear incremental bi-directional motor
US7218035B2 (en) * 2002-09-27 2007-05-15 University Of Waterloo Micro-positioning device
US9801527B2 (en) * 2004-04-19 2017-10-31 Gearbox, Llc Lumen-traveling biological interface device
DE102007008567A1 (de) * 2007-02-21 2008-08-28 Robert Bosch Gmbh Stelleinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2338031A (en) * 1998-06-04 1999-12-08 Daimler Chrysler Ag An fuel injection valve, for an I.C. engine, with a piezoelectric actuator and injection orifices of different opening cross section

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LI J ET AL: "Design and development of a new piezoelectric linear Inchworm actuator", MECHATRONICS, PERGAMON PRESS, OXFORD, GB, vol. 15, no. 6, 1 July 2005 (2005-07-01), pages 651 - 681, XP004843337, ISSN: 0957-4158 *
TENZER P E ET AL: "On amplification in inchworm(TM) precision positioners", MECHATRONICS, PERGAMON PRESS, OXFORD, GB, vol. 14, no. 5, 1 June 2004 (2004-06-01), pages 515 - 531, XP004499037, ISSN: 0957-4158 *

Also Published As

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US8777179B2 (en) 2014-07-15
US20110220821A1 (en) 2011-09-15
DE112009003682B4 (de) 2018-10-18
CH702561B1 (de) 2014-03-31
DE112009003682A5 (de) 2012-07-05

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