WO2010065976A8 - Aufhängung einer ventilplatte an einer ventilstange - Google Patents

Aufhängung einer ventilplatte an einer ventilstange Download PDF

Info

Publication number
WO2010065976A8
WO2010065976A8 PCT/AT2009/000474 AT2009000474W WO2010065976A8 WO 2010065976 A8 WO2010065976 A8 WO 2010065976A8 AT 2009000474 W AT2009000474 W AT 2009000474W WO 2010065976 A8 WO2010065976 A8 WO 2010065976A8
Authority
WO
WIPO (PCT)
Prior art keywords
valve
valve plate
cross member
valve rod
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AT2009/000474
Other languages
English (en)
French (fr)
Other versions
WO2010065976A1 (de
Inventor
Florian Ehrne
Thomas Blecha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Priority to SG2011042371A priority Critical patent/SG172073A1/en
Priority to CN200980150366.4A priority patent/CN102282399B/zh
Priority to JP2011539844A priority patent/JP5655002B2/ja
Publication of WO2010065976A1 publication Critical patent/WO2010065976A1/de
Priority to US13/009,147 priority patent/US8678344B2/en
Publication of WO2010065976A8 publication Critical patent/WO2010065976A8/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)
  • Check Valves (AREA)

Abstract

Bei einer Aufhängung einer Ventilplatte (1) an einer Ventilstange (2) mittels einem quer zur Ventilstange (2) sich erstreckenden Querträger (3) ist der Querträger (3) an einer mittleren Verbindungsstelle (4) mit der Ventilstange (2) verbunden und an mindestens zwei, beidseitig der mittleren Verbindungsstelle (4) liegenden seitlichen Verbindungsstellen (5, 6) mit der Ventilplatte (1) verbunden. Der Querträger (3) weist in einem mittleren Abschnitt (17), der die mittlere Verbindungsstelle (4) und beidseitig an diese anschließende Abschnitte des Querträgers (3) umfasst, einen Abstand (a) von der Ventilplatte (1) auf. Durch eine Verwindung des Querträgers (3) ist die Ventilplatte (1) gegenüber der Ventilstange (2) um eine rechtwinkelig zur Ventilplatte (1) stehende Schwenkachse (19) verschwenkbar.
PCT/AT2009/000474 2008-12-11 2009-12-04 Aufhängung einer ventilplatte an einer ventilstange Ceased WO2010065976A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SG2011042371A SG172073A1 (en) 2008-12-11 2009-12-04 Mounting of a valve plate on a valve rod
CN200980150366.4A CN102282399B (zh) 2008-12-11 2009-12-04 用于将阀板悬置在阀杆处的装置以及带有这种装置的真空阀
JP2011539844A JP5655002B2 (ja) 2008-12-11 2009-12-04 バルブロッドに対するバルブプレートの懸架装置
US13/009,147 US8678344B2 (en) 2008-12-11 2011-01-19 Mounting of a valve plate on a valve rod

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008061315A DE102008061315B4 (de) 2008-12-11 2008-12-11 Aufhängung einer Ventilplatte an einer Ventilstange
DE102008061315.0 2008-12-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/009,147 Continuation-In-Part US8678344B2 (en) 2008-12-11 2011-01-19 Mounting of a valve plate on a valve rod

Publications (2)

Publication Number Publication Date
WO2010065976A1 WO2010065976A1 (de) 2010-06-17
WO2010065976A8 true WO2010065976A8 (de) 2011-03-03

Family

ID=42077731

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2009/000474 Ceased WO2010065976A1 (de) 2008-12-11 2009-12-04 Aufhängung einer ventilplatte an einer ventilstange

Country Status (7)

Country Link
US (1) US8678344B2 (de)
JP (1) JP5655002B2 (de)
KR (1) KR101568454B1 (de)
CN (1) CN102282399B (de)
DE (1) DE102008061315B4 (de)
SG (1) SG172073A1 (de)
WO (1) WO2010065976A1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2740979A1 (de) 2012-12-05 2014-06-11 VAT Holding AG Vakuumventil
EP2913573A1 (de) 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
JP6584829B2 (ja) * 2014-07-04 2019-10-02 バット ホールディング アーゲー バルブ
KR101597600B1 (ko) * 2014-09-30 2016-02-26 프리시스 주식회사 핀형세그먼트가 구비된 게이트밸브
US9470319B2 (en) 2015-01-26 2016-10-18 King Lai Hygienic Materials Co., Ltd. Gate valve with linkage structure
KR101725250B1 (ko) * 2015-05-04 2017-04-11 프리시스 주식회사 진공밸브용 블레이드
JP5890929B1 (ja) * 2015-07-01 2016-03-22 株式会社ブイテックス ゲートバルブ
KR102548017B1 (ko) * 2015-08-06 2023-06-26 배트 홀딩 아게 바람직하게는 진공밸브인 밸브
EP3150322A1 (de) 2015-10-02 2017-04-05 VAT Holding AG Verschlusselement für eine vakuumdichtung mit einer reibrührschweissverbindung
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
JP6774302B2 (ja) 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
DE102017123231A1 (de) * 2017-10-06 2019-04-11 Aixtron Se Verschlusselement zum Verschlließen einer Beladeöffnung eines Innengehäuses eines CVD-Reaktors
JP7057584B2 (ja) * 2018-01-10 2022-04-20 Smc株式会社 弁ロッドに対する弁板の取付構造
KR101918512B1 (ko) * 2018-07-10 2018-11-15 이노레스 주식회사 진공밸브용 개폐플레이트
JP7385185B2 (ja) 2019-06-19 2023-11-22 Smc株式会社 ゲート弁における弁ロッドに対する弁板の取付構造、及びその取付構造を有するゲート弁
JP7442294B2 (ja) * 2019-11-01 2024-03-04 株式会社キッツエスシーティー 真空用ゲートバルブ
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
DE102020102081A1 (de) 2020-01-29 2021-07-29 Vat Holding Ag Verbindungsvorrichtung zur Verbindung einer Ventilstange mit einem Verschlussglied eines Vakuumventils
JP7089245B1 (ja) * 2020-12-22 2022-06-22 Smc株式会社 デュアルゲートバルブ
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021117955A1 (de) 2021-07-12 2023-01-12 Vat Holding Ag Ventil
US11948814B2 (en) 2021-10-26 2024-04-02 Samsung Electronics Co., Ltd. Valve structure and substrate processing apparatus including the same
DE102021129884A1 (de) 2021-11-16 2023-05-17 Vat Holding Ag Ventilplatte
DE102021129883A1 (de) 2021-11-16 2023-05-17 Vat Holding Ag Ventilplatte
KR102427175B1 (ko) * 2021-11-25 2022-07-29 주식회사 에스에스케이 진공 게이트밸브용 밸브조립체
KR102817410B1 (ko) * 2022-06-17 2025-06-10 주식회사 엔피엠 게이트 밸브의 실플레이트 장치 및 게이트 밸브
US12535149B2 (en) * 2022-06-30 2026-01-27 Srt Co., Ltd Sealing blade for a slit valve
TWI867753B (zh) * 2022-09-23 2024-12-21 瑞士商Ｖａｔ控股股份有限公司 真空閥的關閉組件
DE102023103080A1 (de) 2023-02-08 2024-08-08 Vat Holding Ag Verschlussorgan
TWI853663B (zh) * 2023-08-02 2024-08-21 新萊應材科技有限公司 使用於閥件之二向驅動裝置
JP1794531S (ja) 2024-09-09 2025-03-28 ゲートバルブ用弁体
CN121047985A (zh) * 2025-11-05 2025-12-02 宸微设备科技(苏州)有限公司 真空系统压力控制装置及真空系统压力控制方法

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JP2613171B2 (ja) 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
US5667197A (en) * 1996-07-09 1997-09-16 Lam Research Corporation Vacuum chamber gate valve and method for making same
DE19746241C2 (de) * 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung
EP1061301B1 (de) * 1999-06-14 2004-07-28 SMC Kabushiki Kaisha Schieber
JP4169892B2 (ja) 1999-12-03 2008-10-22 株式会社アルバック ゲートバルブ
US6913243B1 (en) * 2000-03-30 2005-07-05 Lam Research Corporation Unitary slot valve actuator with dual valves
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US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6471181B2 (en) 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
IL141989A0 (en) * 2001-03-12 2002-03-10 El Far Electronics Ltd Armature for solenoid devices such as valves
JP3912604B2 (ja) 2003-11-04 2007-05-09 入江工研株式会社 ゲート弁
KR100960030B1 (ko) * 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
US7396001B2 (en) * 2005-12-20 2008-07-08 Vat Holding Ag Valve for essentially gastight closing a flow path
KR20070113122A (ko) * 2006-05-24 2007-11-28 배트 홀딩 아게 벽 내의 개구부의 진공 밀봉 폐쇄를 위한 폐쇄장치
JP5080169B2 (ja) 2006-09-20 2012-11-21 バット ホールディング アーゲー 真空バルブ
DE102008049353A1 (de) 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil

Also Published As

Publication number Publication date
JP2012511672A (ja) 2012-05-24
JP5655002B2 (ja) 2015-01-14
CN102282399A (zh) 2011-12-14
KR20110102328A (ko) 2011-09-16
CN102282399B (zh) 2014-09-10
DE102008061315A1 (de) 2010-06-24
KR101568454B1 (ko) 2015-11-11
WO2010065976A1 (de) 2010-06-17
US8678344B2 (en) 2014-03-25
SG172073A1 (en) 2011-07-28
US20110108750A1 (en) 2011-05-12
DE102008061315B4 (de) 2012-11-15

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