WO2010138451A2 - Pré-incision laser de verre à températures élevées - Google Patents

Pré-incision laser de verre à températures élevées Download PDF

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Publication number
WO2010138451A2
WO2010138451A2 PCT/US2010/035954 US2010035954W WO2010138451A2 WO 2010138451 A2 WO2010138451 A2 WO 2010138451A2 US 2010035954 W US2010035954 W US 2010035954W WO 2010138451 A2 WO2010138451 A2 WO 2010138451A2
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WIPO (PCT)
Prior art keywords
glass
laser beam
laser
temperature
scoring
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Ceased
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PCT/US2010/035954
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WO2010138451A3 (fr
Inventor
Anatoli A Abramov
Michael T Kelley
Liming Wang
Naiyue Zhou
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Corning Inc
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Corning Inc
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Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to JP2012513152A priority Critical patent/JP5636423B2/ja
Priority to CN201080023841.4A priority patent/CN102448661B/zh
Publication of WO2010138451A2 publication Critical patent/WO2010138451A2/fr
Publication of WO2010138451A3 publication Critical patent/WO2010138451A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0215—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the ribbon being in a substantially vertical plane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • This disclosure relates to laser scoring of glass sheets and ribbons and, in particular, to laser scoring where part or all of the score line passes through glass that is at an elevated temperature, i.e., a temperature above room temperature.
  • glass sheet is used generically to refer to both an individual glass sheet and to a glass ribbon.
  • Scoring of glass is conventionally accomplished using mechanical tools.
  • laser radiation e.g., CO 2 laser radiation at a wavelength of 10.6 ⁇ m
  • CO 2 laser radiation at a wavelength of 10.6 ⁇ m
  • a median crack also known as a partial vent or, simply, a vent
  • a small initial flaw 111 is formed on the glass surface near one of its edges, which is then transformed into the vent by propagating laser light 121 formed into a beam 113 across the surface of the glass followed by a cooling area produced by a cooling nozzle 119.
  • Heating of the glass with a laser beam and quenching it immediately thereafter with a coolant creates a thermal gradient and a corresponding stress field, which is responsible for the propagation of the initial flaw to form the vent.
  • Such mechanical dividing changes the stress distribution within the glass, specifically, the in-plane stress distribution seen when the glass is vacuumed flat. Even more particularly, the dividing relieves residual stresses in the sheet at the cut line since the cut edge is rendered traction free. Such stress relief in general results in changes in the vacuumed-flat shape of the glass sub-pieces, a phenomenon referred to by display manufacturers as "distortion.”
  • the amount of distortion produced when such mechanical dividing is performed depends on the residual stress in the sheet, with lower levels of residual stress producing smaller distortions. Because laser scoring relies on heating the glass to produce a stress field, there is an inherent conflict between applying sufficient heat to produce enough stress to achieve a reproducible vent and yet not so much heat as to substantially increase the residual stress in the glass sheet being scored. [0011] In addition to the distortion problem, residual stress is also important in terms of the quality of the edges produced when a laser-scored sheet of glass is divided into two sub- pieces. High levels of residual stress have been associated with edges having relatively low strength and poor quality, e.g., splinters and micro cracks. It has also been found that high residual stress nearby the glass edge may cause a gradual deterioration of the edge quality, namely chipping or delamination, which manifests itself some time after scoring or can be induced by an external impact.
  • the present disclosure addresses this deficit in the art and, among other things, provides easy-to-use quantitative techniques for selecting laser beam power levels for any particular combination of scoring speed, scoring equipment (e.g., laser wavelength, laser beam size, laser beam shape, cooling area size, cooling area shape, cooling area temperature, laser beam-to-cooling area spacing, etc.), glass properties (e.g., thickness, CTE, Young's modulus, chemical composition, etc.), and glass temperatures and temperature distributions (e.g-, uniform, linear, non-linear, and combinations thereof).
  • scoring equipment e.g., laser wavelength, laser beam size, laser beam shape, cooling area size, cooling area shape, cooling area temperature, laser beam-to-cooling area spacing, etc.
  • glass properties e.g., thickness, CTE, Young's modulus, chemical composition, etc.
  • glass temperatures and temperature distributions e.g-, uniform, linear, non-linear, and combinations thereof.
  • the laser beam's power satisfies the relationship: 0.85( ⁇ - ⁇ T prior (x)) ⁇ P(x) ⁇ 1.10( ⁇ - ⁇ T pri ⁇ r (x))
  • x represents distance along the score line (31, 115)
  • P(x) is the laser beam's power along the score line (31, 115)
  • T pr io r (x) is the temperature of the glass in degrees centigrade along the score line (31, 115) prior to application of the laser beam (113)
  • ⁇ and ⁇ are positive constants.
  • an apparatus for scoring a glass sheet (27, 45, 112) along a score line (31, 115) which includes:
  • a detector (33) which detects the temperature of the surface (114) of the glass sheet (27, 45, 112) at at least one location;
  • a controller (35) operatively connected (39, 41) to the laser (37) and the detector (33), the controller (35) adjusting the power P of the laser beam (113) based on the temperature of the surface (114) of the glass sheet (27, 45, 112) detected by the detector (33) ⁇ at the at least one location.
  • an apparatus for scoring a glass sheet (27, 45, 112) along a score line (31, 115) that includes: (a) a laser (37) which produces a laser beam (113); and
  • the controller (35) divides the score line (31, 115) into a plurality of segments, and (ii) the controller (35) adjusts the target (specified) power of the laser beam (113) so that the target power is constant for each segment.
  • a method of scoring a glass sheet along a score line using a laser beam wherein for at least a portion of the score line, the glass is above room temperature prior to application of the laser beam comprising: (a) translating a laser beam along the score line; and (b) translating a cooling area over the score line in tandem with the laser beam; wherein heating by the laser beam contributes to the formation of a vent in the glass sheet and the power of the laser beam is selected so that:
  • ⁇ and ⁇ are determined by measuring, at a plurality of glass temperatures, the minimum laser power that produces repeatable scoring and fitting those measured laser powers to a linear function.
  • the method of Aspect 3 wherein the plurality of glass temperatures includes room temperature and at least two temperatures above room temperature.
  • T p rio r (x) is a linear function of x.
  • Tprio r (x) is a non-linear function of x.
  • Tstrain - Tp ⁇ orCx 100°C, where T stra i n is the strain point of the glass in degrees centigrade.
  • the score line is divided into a plurality of segments; (ii) an average temperature value is assigned to each segment; and
  • an apparatus for scoring a glass sheet along a score line comprising:
  • a controller operatively connected to the laser and the detector, the controller adjusting the power P of the laser beam based on the temperature of the surface of the glass sheet detected by the detector at the at least one location.
  • T pr i or is the temperature of the glass in degrees centigrade detected by the detector at the at least one location and ⁇ and ⁇ are positive constants.
  • ⁇ and ⁇ are determined by measuring, at a plurality of glass temperatures, the minimum laser power that produces repeatable scoring and fitting those measured laser powers to a linear function.
  • the apparatus of Aspect 15 wherein the plurality of glass temperatures includes room temperature and at least two temperatures above room temperature.
  • the detector detects at least one temperature for each segment
  • the controller adjusts the target power of the laser beam for each segment based on the at least one temperature for the segment detected by the detector, the target laser beam power being constant over the segment.
  • an apparatus for scoring a glass sheet along a score line comprising:
  • the controller divides the score line into a plurality of segments, and (U) the controller adjusts the target power of the laser beam so that the target power is constant for each segment.
  • a method of producing a glass sheet including producing a glass ribbon, and scoring the glass ribbon according to the method of Aspect 1.
  • FIG. 1 is a plot of average laser beam power (vertical axis; watts) versus T P ⁇ or values (horizontal axis; 0 C). The square data points are off-line experimental values and the circular data points were obtained on-line using a fusion draw machine (FDM).
  • FIG. 2 is a plot of maximum T beam values (vertical axis; 0 C) versus laser beam power (horizontal axis; watts). The data points are modeled values.
  • FIG. 3 is a plot of maximum T beam values (vertical axis; 0 C) versus T pr i or values (horizontal axis; 0 C). The data points are modeled values.
  • FIG. 4 is a diagram illustrating glass surface temperature during laser scoring (vertical axis; arbitrary units) versus distance along a score line (horizontal axis; arbitrary units) for a uniform background glass temperature (light shaded bars). The contribution to the glass surface temperature from the laser beam is shown by the dark shaded bars, hi this figure, the laser beam contribution is constant.
  • FIG. 5 is a diagram illustrating glass surface temperature during laser scoring (vertical axis; arbitrary units) versus distance along a score line (horizontal axis; arbitrary units) for a gradient background glass temperature (light shaded bars). The contribution to the glass surface temperature from the laser beam is shown by the dark shaded bars, hi this figure, the laser beam contribution is constant.
  • FIG. 6 is a diagram illustrating glass surface temperature during laser scoring (vertical axis; arbitrary units) versus distance along a score line (horizontal axis; arbitrary units) for a gradient background glass temperature (light shaded bars). The contribution to the glass surface temperature from the laser beam is shown by the dark shaded bars. In this figure, the laser beam contribution is controlled based on the local value of the background glass temperature.
  • FIG. 7 is a diagram illustrating glass surface temperature during laser scoring (vertical axis; arbitrary units) versus distance along a score line (horizontal axis; arbitrary units) for an arbitrary background glass temperature (light shaded bars). The contribution to the glass surface temperature from the laser beam is shown by the dark shaded bars. In this figure, the laser beam contribution is controlled based on the local value of the background glass temperature.
  • FIG. 8 is a schematic diagram illustrating a control system that can be used to detect glass surface temperatures and adjust laser beam power values.
  • FIG. 9 is a schematic diagram illustrating laser beam scoring of a glass sheet.
  • FIG. 10 is a schematic diagram illustrating the relationship at the glass surface between a laser beam 113 and an associated cooling area 15.
  • the temperature of a glass sheet affects the basic process variables of the laser scoring process, including laser beam power, quenching efficiency, and scoring speed.
  • the temperature distribution is generally not uniform and the distribution changes over time.
  • the temperature gradients resulting from these non-uniform mass distributions create stress patterns in the glass, which may be a complex combination of tension areas and compression areas, which change over time and ultimately result in residual stress when the glass finally reaches room temperature.
  • the glass ribbons produced by the overflow fusion draw process typically are formed at temperatures in the range of about 1 ,000 0 C and this temperature drops by about 700°C, e.g., to about 300 0 C, by the time the ribbon reaches the bottom of the draw (BOD) where scoring and the separation of individual sheets takes place.
  • BOD bottom of the draw
  • the number of process variables which play a role in laser scoring is large thus suggesting that modifying a scoring process developed under room temperature conditions for use at elevated temperatures would be a daunting prospect.
  • a single primary variable specifically, laser beam power
  • the value of laser beam power to be used for any particular glass temperature can be readily determined from a limited number of experiments performed with laser scoring equipment and glass sheets of the type that are to be scored at the elevated temperatures. It should be noted that the equipment and glass sheets used in the experiments need not be identical to those that will be used at the elevated temperature(s), but should be representative of the elevated temperature equipment and sheets.
  • the scoring speed used in the experiments should be close to the speed (or speeds) that will be used at the elevated temperature(s), e.g., the experimental speed should be with ⁇ 20% of the speed(s) that will be used at the elevated temperature(s).
  • scoring speed it should be further noted that this variable of the scoring process is typically dictated by the context in which the laser scoring is to be performed. For example, if laser scoring is to be used in connection with the separation of individual glass sheets from a ribbon, the scoring has to be performed at a rate compatible with the width of the ribbon and the desired rate of individual sheet production. For such an application, the scoring rate can, for example, be on the order of 750 millimeters/second. In terms of dealing with the challenges posed by elevated glass temperatures, scoring speed is essentially a fixed parameter and thus can only be modified slightly, if at all, in addressing those challenges.
  • laser beam residence time which is based on the combined effects of scoring speed, laser beam length, and laser beam shape, can be used to achieve successful scoring at elevated temperatures, but laser beam power remains the preferred modifiable variable.
  • laser beam power In terms of real time adjustments to the laser scoring process, e.g., to accommodate glass sheet temperatures that vary over the length of the score line, laser beam power has the advantages that it can be easily varied electronically and its response time is shorter than that of other available process variables, e.g., coolant flow rate. Even with its faster response time, there will still be a limit on the achievable spatial resolution along the score line.
  • the segment lengths can be constant or can vary over the length of the score line, e.g., the segment lengths can be shorter where the temperature profile along the score line is changing most rapidly, e.g., in the vicinity of the beads of a glass ribbon, and longer where the temperature profile is changing more slowly, e.g., across the quality portion of a ribbon.
  • the response time of the laser can be readily accommodated by setting a lower limit on segment length which ensures that the laser beam power will be able to reach its target (specified) value within, for example, the first 10% of a segment.
  • the segmental approach also simplifies the circuitry for controlling the output of the laser.
  • the laser beam power needs to remain below the level at which the temperature of the glass surface under the laser beam would rise above the glass' strain point (e.g., 666 °C in case of Corning Incorporated's Eagle XGTM glass). In this way, overheating of the glass surface is prevented. Such overheating is undesirable because it can ablate the glass and generate high residual stress near the edge, which can entail lower edge strength, formation of edge defects, and increased edge waviness and roughness.
  • ⁇ and ⁇ are pre-determined experimentally using scoring equipment, a scoring speed, and a glass corresponding to those that will be used when the actual laser scoring is performed.
  • FIG. 1 illustrates the experimental approach for determining ⁇ and ⁇ values.
  • the horizontal axis plots T P ⁇ or in degrees centigrade and the vertical axis laser beam power in watts.
  • the square data points represent the results of laboratory laser scoring experiments performed on individual glass sheets whose temperatures prior to scoring were 20, 205, 270, and 315°C. For each of these temperatures, the minimum laser power that produced repeatable scoring was experimentally determined and those powers (590, 450, 405, and 345 watts, respectively) are plotted along the vertical axis in FIG. 1. An ⁇ value of 609.4 watts and a ⁇ value of 0.8 watts/°C were then determined by fitting a straight line to this data (i.e., the dashed line in FIG. 1). [0065] The effectiveness of Eqs.
  • the round data points in FIG. 1 show representative laser beam powers that were found to produce reliable scoring at the bottom of the draw (BOD).
  • the center of box 21 corresponds to a power of 350 watts and a temperature of 310 0 C.
  • a comparison of this data with the ranges of Eqs. (3) and (4) illustrates the effectiveness of Eqs. (1) and (2) in identifying laser beam power levels for elevated values of T pr j Or .
  • Further experiments were performed in which laser scoring was used to trim the edges (beads) from individual glass sheets separated from the ribbon produced by the FDM. The glass temperatures for these tests were lower than those of the ribbon separation test, but still well above room temperature.
  • a typical range of temperatures during separation of individual sheets from a ribbon is 300-400°C
  • the individual glass sheets typically have a temperature in the 60- 140°C range.
  • the temperature along the score line typically exhibits a 50-100 0 C drop from the top to the bottom of the individual sheets.
  • the bead regions are also known to exhibit rather high levels of residual stress as a result of the nonuniform thickness of the glass in this region. Such high levels of residual stress further complicate the scoring process. Nevertheless, Eqs. (1) and (2) were again found to accurately predict the laser beam powers that worked reliably in the trimming procedure.
  • the glass temperature (T beam ) under the laser beam during the laser scoring process can be defined as a sum of the background (intrinsic) glass temperature (T pr j O r ) and the glass temperature change induced by exposure to the laser beam ( ⁇ Tiaser):
  • Tpri or depends on the temperature of the glass environment, the sheet forming temperature, the time after sheet forming, the cooling rate and its efficiency, the uniformity of the glass cooling, and the sheet thickness, while ⁇ Ti as e r depends on laser beam power density, beam mode profile, beam residence time (i.e., the combination of beam size and scoring speed), and also the internal glass properties, including optical absorption at the laser wavelength and reflectivity of the glass surface.
  • the laser beam needs to raise T beam to a value (T b ea m minimum) that will produce sufficient stress in the glass to maintain propagation of the initial flaw to form the vent, where the stress is the result of the heating produced by the beam and the subsequent quenching.
  • the minimum stress level depends on quenching efficiency and the glass 1 properties, namely, its coefficient of thermal expansion and modulus of elasticity at high temperatures.
  • the interaction between the glass and the laser beam/coolant combination also depends on the glass' thermal conductivity and its heat capacity.
  • Tbeam In addition to being above T b e am mitiimum, Tbeam also needs to be kept below the strain point of the glass to avoid the various adverse effects discussed above that result from overheating.
  • FIG. 2 shows the results of modeling these various factors to predict maximum T beam values (vertical axis; 0 C) as a function of laser beam power (horizontal axis; watts).
  • FIG. 3 shows the modeled data replotted as maximum T beam values (vertical axis; 0 C) versus T p ri or values (horizontal axis; 0 C).
  • the circle, "x", triangle, square, and diamond data points are for T pr j Or values of 650, 550, 450, 350, and 250 0 C, respectively
  • the square, diamond, triangle, circle, and asterisk data points are for laser beam powers of 400, 300, 200, 100, and 0 watts, respectively.
  • the horizontal dashed line 13 represents the glass 1 strain point (e.g., 666 0 C) and the vertical dashed line 19 represents a laser beam power of 340 watts, i.e., a power level approximately equal to those used in the FDM test of FIG. 1.
  • the modeled data was obtained using the commercially available ANSYS program (ANSYS, Inc., Canonsburg, Pennsylvania), although other commercially available and/or custom software can be used as desired.
  • ANSYS, Inc. ANSYS, Inc., Canonsburg, Pennsylvania
  • operating laser beam power ranges ⁇ and ⁇ values
  • Tstram - Tpriortx 100°C
  • the first guideline ensures that the laser beam provides sufficient energy to direct the propagation of the initial flaw to form the vent along the score line and the second guideline ensures that the first guideline can be satisfied without exceeding the strain point (Tstrain) of the glass.
  • a Tbeam minimum value can be identified based on a laboratory study conducted at room temperature using a glass sheet, scoring equipment, and a scoring speed corresponding to those that will be used at the elevated temperature(s).
  • a series of laser beam powers can be identified for a series of T P ⁇ or values, e.g., laser beam powers can be determined for T beam values halfway between Tb ea m minimum and T stra i n - Those laser beam power values can then be plotted against the corresponding T P ⁇ or values to produce plotted data (in this case modeled data) of the type shown in FIG. 1.
  • ⁇ and ⁇ are determined, the elevated temperature scoring of which they are a part can be viewed as falling into one of two major categories.
  • the first category is scoring of glass with a high, but uniform, temperature across the sheet with just small temperature variations. This is typically the case in scoring a glass ribbon on relatively small width draw, e.g., one that produces up to Gen 5 or 6 glass sheets.
  • the second category includes scoring of glass with significant temperature gradients, which can take place either at lower temperatures, e.g., during bead removal, or at high temperatures on large width draws or specialty draws which have a non-uniform glass temperature across the score line.
  • the two categories generally involve different approaches to the set-up of the laser scoring process.
  • the scoring process can be run at a constant laser beam power.
  • the power has to be chosen so that it is high enough to heat up the colder portions of the glass to a point where sufficient stress is created in the glass by the coolant to propagate the initial flaw to form the vent.
  • the power should not be so high that the hotter portions of the glass are overheated and thus exceed the glass 1 strain temperature.
  • the constant laser beam power approach works well for the majority of applications with glass temperatures of up to 400- 500°C and temperature gradients not exceeding 100°C. These particular temperature values are, of course, exemplary since different values may apply depending on glass properties and the specific scoring conditions.
  • FIGS. 4 and 5 illustrate two examples of the constant laser beam power category.
  • the background glass temperature (T p ri or ) is constant, while in FIG. 5, it is slowly rising across the width of the sheet (horizontal axis).
  • the minimum glass temperature under the laser beam (T beam minimum) for reliable scoring is shown by line 11 and the strain point of the glass is shown by line 13.
  • a constant laser beam power represented by the dark portion of the vertical bars, achieves a maximum glass temperature under the laser (vertical axis) which falls between lines 11 and 13 and is thus suitable for scoring.
  • the overflow fusion draw process employs a forming structure (isopipe) 25 which receives molten glass in a trough 23.
  • the molten glass flows out and over the top of the trough and down the sides of the isopipe to form ribbon 27 at the isopipe's root 43.
  • Pulling rollers 29 draw the ribbon away from the root at a set rate, thus determining the thickness of the ribbon.
  • controller 35 e.g., a microprocessor, which controls the power level of the laser beam.
  • controller 35 e.g., a microprocessor
  • controller 35 is also operatively connected to detector 33, e.g., an IR camera, which provides information to the controller regarding the temperature at one or more locations along score line 31. If information regarding the temperature distribution along the entire score line is desired, the detector can be scanned across the width of the ribbon or the detector can be designed to simultaneously detect temperatures from a plurality of locations along the ribbon's width.
  • detector 33 e.g., an IR camera
  • the detector can be scanned across the width of the ribbon or the detector can be designed to simultaneously detect temperatures from a plurality of locations along the ribbon's width.
  • flexible laser power control can be implemented using a plurality of segments which divide the width of the glass sample or, in other words, the scoring distance, into multiple segments (1, 2, ...N). In this case, controller 35 will link the position of the laser beam within each segment with a command voltage responsible for the laser discharge current.
  • the number of segments N and their length ⁇ L are then variables that are selected based on the speed of the laser response to a change in the command signal and
  • controller 35 changes the laser power based on information regarding the glass 1 background temperature, e.g., information from detector 33. It should be noted that information from detector 33 may not be needed in some cases because the temperature profile is known for other reasons, e.g., as a result of prior use of the equipment. In such a case, the controller can be programmed to vary the laser power to compensate for the known temperature profile without the need for real time information from the detector.
  • FIGS. 6 and 7 illustrate two examples of the use of a variable laser power to compensate for a large variation in the temperature profile along the score line.
  • the glass temperature rises linearly, but at a rate sufficiently large so that if a constant laser power were used to bring the coolest parts of the profile above line 11, the hottest parts would be above line 13.
  • the controller reduces the amount of laser beam power applied to the surface as the beam scans across the score line, thus holding the glass temperature under the laser beam between the temperatures represented by lines 11 and 13 and, as shown in this figure, substantially constant. (Note that although a substantially constant temperature is desirable for many applications, it is generally not required, provided the temperature remains between the temperatures represented by lines 11 and 13.) [0083] FIG.
  • controller 35 provides different power levels for each segment so that the ultimate temperature profile is, for example, substantially constant across the width of the ribbon.
  • the methods and apparatus can achieve uniform vent creation along an intended score line and are based on heating a glass surface by a laser beam up to a temperature in a range whose lower limit is defined by the stress required to maintain propagation of the Initial flaw to form the vent and whose upper limit equals or, preferably, is less than the strain point of the glass.
  • the glass temperature under the laser beam stays within these limits regardless of the background temperature of the glass through the use of flexible laser power control which produces a laser power profile along the score line which varies Inversely with the glass temperature gradient.
  • the gradient can, for example, be detected in real time using an infrared camera. In this way, process margins can be significantly increased during the scoring of glass sheets that exhibit significant glass temperature variations.

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Abstract

L'invention porte sur la pré-incision laser de feuilles de verre individuelles (45, 112) et de rubans de verre (27) à des températures élevées. Un évent uniforme peut être créé le long d'une ligne de coupe souhaitée (31, 115) par chauffage d'une surface de verre (114) par un faisceau laser (113) jusqu'à une température se situant dans une plage dont la limite inférieure (11) est définie par la contrainte requise pour conserver une propagation d'un défaut initial (111) pour former l'évent et dont la limite supérieure (13) est égale ou inférieure à la température inférieure de recuit du verre. Dans certains modes de réalisation, la température du verre sous le faisceau laser (113) reste dans ces limites, indépendamment de la température d'arrière-plan du verre, par l'utilisation d'une commande souple de la puissance laser fournie par un dispositif de commande (35) qui amène le laser (37) à produire un profil de puissance laser le long de la ligne de coupe (31, 115) qui varie de façon inverse au gradient de température du verre. Le gradient de température du verre peut, par exemple, être détecté en temps réel à l'aide d'un détecteur (33), par exemple, une caméra infrarouge. Par la commande de la puissance de faisceau laser de cette façon, des marges de traitement peuvent être significativement accrues lors de la pré-incision de feuilles de verre individuelles (45, 112) et de rubans de verre (27) qui présentent des variations de température de verre significatives.
PCT/US2010/035954 2009-05-27 2010-05-24 Pré-incision laser de verre à températures élevées Ceased WO2010138451A2 (fr)

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JP2012513152A JP5636423B2 (ja) 2009-05-27 2010-05-24 高温でのガラスのレーザ・スコアリング
CN201080023841.4A CN102448661B (zh) 2009-05-27 2010-05-24 在升高温度下的玻璃的激光刻痕

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120047956A1 (en) * 2010-08-31 2012-03-01 Xinghua Li Methods of separating strengthened glass substrates
US8946590B2 (en) 2009-11-30 2015-02-03 Corning Incorporated Methods for laser scribing and separating glass substrates
US9533910B2 (en) 2009-08-28 2017-01-03 Corning Incorporated Methods for laser cutting glass substrates
US9610653B2 (en) 2012-09-21 2017-04-04 Electro Scientific Industries, Inc. Method and apparatus for separation of workpieces and articles produced thereby
US9938180B2 (en) 2012-06-05 2018-04-10 Corning Incorporated Methods of cutting glass using a laser
CN116493345A (zh) * 2023-05-26 2023-07-28 江苏大学 一种有机溶剂激光清洗系统及其控制方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103009896B (zh) * 2012-12-12 2015-03-25 徐林波 热态玻璃板激光雕刻技术、工艺及设备
SI3544760T1 (sl) * 2016-11-23 2021-04-30 Aperam Postopek za lasersko dekapiranje premikajočega se kovinskega izdelka in postrojenje za izvedbo le-tega
CN107876969B (zh) * 2017-11-06 2019-07-23 江门市蓬江区珠西智谷智能装备协同创新研究院 一种三维激光镭射效果的检测方法
CN110449745A (zh) * 2019-08-29 2019-11-15 翔实光电科技(昆山)有限公司 一种防眩玻璃的激光刻蚀方法
JP7528454B2 (ja) * 2020-02-03 2024-08-06 日本電気硝子株式会社 ガラス板の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE403280B (sv) * 1972-10-12 1978-08-07 Glaverbel Sett och anordning att skera av glas- eller glaskristalliniskt material lengs en bestemd linje
JPH058062A (ja) * 1991-07-03 1993-01-19 Toshiba Corp レーザ加工装置
US5776220A (en) * 1994-09-19 1998-07-07 Corning Incorporated Method and apparatus for breaking brittle materials
JPH08231239A (ja) * 1994-12-27 1996-09-10 Asahi Glass Co Ltd ガラスリボンの割断方法およびそのための装置
DE19918936A1 (de) * 1999-04-27 2000-11-02 Schott Glas Verfahren und Vorrichtung zur Herstellung von Einzelglasscheiben
US6796144B2 (en) * 2001-05-30 2004-09-28 Battelle Memorial Institute System and method for glass processing and temperature sensing
KR100794284B1 (ko) * 2001-09-29 2008-01-11 삼성전자주식회사 비금속 기판 절단 방법
EP1396556A1 (fr) * 2002-09-06 2004-03-10 ALSTOM (Switzerland) Ltd Méthode pour controller la microstructure d'une couche dure fabriquée par revêtement utilisant un laser
US20060021977A1 (en) * 2004-07-30 2006-02-02 Menegus Harry E Process and apparatus for scoring a brittle material incorporating moving optical assembly
US7371143B2 (en) * 2004-10-20 2008-05-13 Corning Incorporated Optimization of parameters for sealing organic emitting light diode (OLED) displays
EP1806202B1 (fr) * 2004-10-25 2011-08-17 Mitsuboshi Diamond Industrial Co., Ltd. Procede et dispositif pour former une fissure
US7292616B2 (en) * 2005-02-09 2007-11-06 Ultratech, Inc. CO2 laser stabilization systems and methods
JP4664718B2 (ja) * 2005-03-31 2011-04-06 パナソニック電工Ｓｕｎｘ株式会社 レーザ加工装置及びその出力制御方法
DE102006024825A1 (de) 2006-05-23 2007-11-29 Jenoptik Automatisierungstechnik Gmbh Verfahren und Vorrichtung zum Randbeschneiden eines Floatglasbandes
JP2008062489A (ja) 2006-09-07 2008-03-21 Systec Inoue Corp 脆性材料の割断方法、および脆性材料の割断装置
WO2008133800A1 (fr) * 2007-04-30 2008-11-06 Corning Incorporated Appareil, système et procédé de rayage d'un ruban de verre mobile
JP2009084096A (ja) * 2007-09-28 2009-04-23 Omron Laserfront Inc ガラス切断装置及び方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9533910B2 (en) 2009-08-28 2017-01-03 Corning Incorporated Methods for laser cutting glass substrates
US8946590B2 (en) 2009-11-30 2015-02-03 Corning Incorporated Methods for laser scribing and separating glass substrates
US10358374B2 (en) 2009-11-30 2019-07-23 Corning Incorporated Methods for laser scribing and separating glass substrates
US20120047956A1 (en) * 2010-08-31 2012-03-01 Xinghua Li Methods of separating strengthened glass substrates
US8720228B2 (en) * 2010-08-31 2014-05-13 Corning Incorporated Methods of separating strengthened glass substrates
US9938180B2 (en) 2012-06-05 2018-04-10 Corning Incorporated Methods of cutting glass using a laser
US9610653B2 (en) 2012-09-21 2017-04-04 Electro Scientific Industries, Inc. Method and apparatus for separation of workpieces and articles produced thereby
CN116493345A (zh) * 2023-05-26 2023-07-28 江苏大学 一种有机溶剂激光清洗系统及其控制方法

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JP5636423B2 (ja) 2014-12-03
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CN102448661B (zh) 2014-08-13
KR101549721B1 (ko) 2015-09-02

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