WO2010142631A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
WO2010142631A3
WO2010142631A3 PCT/EP2010/057899 EP2010057899W WO2010142631A3 WO 2010142631 A3 WO2010142631 A3 WO 2010142631A3 EP 2010057899 W EP2010057899 W EP 2010057899W WO 2010142631 A3 WO2010142631 A3 WO 2010142631A3
Authority
WO
WIPO (PCT)
Prior art keywords
frequency converter
vacuum pump
pump
housing
electric motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2010/057899
Other languages
English (en)
French (fr)
Other versions
WO2010142631A2 (de
Inventor
Thomas Dreifert
Wolfgang Giebmanns
Robert Jenkins
Roland Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to JP2012514436A priority Critical patent/JP5756097B2/ja
Priority to CN201080023678.1A priority patent/CN102450115B/zh
Priority to KR1020127000675A priority patent/KR101740235B1/ko
Priority to EP10723116.9A priority patent/EP2440788B1/de
Priority to US13/376,691 priority patent/US9234519B2/en
Publication of WO2010142631A2 publication Critical patent/WO2010142631A2/de
Publication of WO2010142631A3 publication Critical patent/WO2010142631A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/047—Cooling of electronic devices installed inside the pump housing, e.g. inverters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

Eine Vakuumpumpe weist in einem Schöpfraum (12) Pumpelemente (14) auf. Eines der Pumpelemente (14) wird von einem Elektromotor (24) angetrieben. Zur Veränderung der Drehzahl des Elektromotors (24) ist ein Frequenzumrichter (30) vorgesehen. Der Frequenzumrichter (30) ist in einem unmittelbar mit dem Pumpengehäuse (10) verbundenen Frequenzumrichter- Gehäuse (32) angeordnet. Zur Kühlung des Frequenzumrichters (30) ist innerhalb des Frequenzumrichter-Gehäuses (32) ein Luftkühler (34) sowie ein Flüssigkeitskühler (36) angeordnet.
PCT/EP2010/057899 2009-06-09 2010-06-07 Vakuumpumpe Ceased WO2010142631A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012514436A JP5756097B2 (ja) 2009-06-09 2010-06-07 真空ポンプ
CN201080023678.1A CN102450115B (zh) 2009-06-09 2010-06-07 真空泵
KR1020127000675A KR101740235B1 (ko) 2009-06-09 2010-06-07 진공 펌프
EP10723116.9A EP2440788B1 (de) 2009-06-09 2010-06-07 Vakuumpumpe
US13/376,691 US9234519B2 (en) 2009-06-09 2010-06-07 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009024336A DE102009024336A1 (de) 2009-06-09 2009-06-09 Vakuumpumpe
DE102009024336.4 2009-06-09

Publications (2)

Publication Number Publication Date
WO2010142631A2 WO2010142631A2 (de) 2010-12-16
WO2010142631A3 true WO2010142631A3 (de) 2011-07-28

Family

ID=43122900

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/057899 Ceased WO2010142631A2 (de) 2009-06-09 2010-06-07 Vakuumpumpe

Country Status (8)

Country Link
US (1) US9234519B2 (de)
EP (1) EP2440788B1 (de)
JP (1) JP5756097B2 (de)
KR (1) KR101740235B1 (de)
CN (1) CN102450115B (de)
DE (1) DE102009024336A1 (de)
TW (1) TW201104077A (de)
WO (1) WO2010142631A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9611852B2 (en) * 2013-03-29 2017-04-04 Agilent Technology, Inc. Thermal/noise management in a scroll pump
US10208753B2 (en) 2013-03-29 2019-02-19 Agilent Technologies, Inc. Thermal/noise management in a scroll pump
DE102013114383B4 (de) * 2013-12-18 2016-04-07 Khs Gmbh Reinigungsvorrichtung sowie Verfahren zum Reinigen von Behältern
PL3161318T3 (pl) * 2014-06-27 2020-08-10 Ateliers Busch S.A. Sposób pompowania w układzie pomp próżniowych oraz układ pomp próżniowych
DE102015219078A1 (de) * 2015-10-02 2017-04-06 Robert Bosch Gmbh Hydrostatisches Kompaktaggregat mit Kühlung
DE102016200112A1 (de) * 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung
HUE069767T2 (hu) 2016-04-12 2025-04-28 Atlas Copco Airpower Nv Kompresszor vezérlõ
CN106194769A (zh) * 2016-08-31 2016-12-07 池泉 一种静音离心泵
GB2553321A (en) * 2016-09-01 2018-03-07 Edwards Ltd Pump
DE102016011504A1 (de) * 2016-09-21 2018-03-22 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH System für ein Nutzfahrzeug umfassend einen Schraubenkompressor sowie einen Elektromotor
KR101869386B1 (ko) * 2016-10-14 2018-06-20 주식회사 벡스코 냉각식 진공펌프
JP6473276B1 (ja) * 2017-08-14 2019-02-20 株式会社アルバック 真空排気装置及び真空排気装置の冷却方法
TWI661658B (zh) 2018-06-22 2019-06-01 群光電能科技股份有限公司 馬達裝置及散熱裝置
DE102018211128B3 (de) * 2018-07-05 2019-11-28 Continental Automotive Gmbh Anordnung mit einem Gehäuse und einer darin auf einem Gehäuseboden angeordneten Leistungselektronikschaltung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060227504A1 (en) * 2005-04-11 2006-10-12 Delta Electronics, Inc. Heat-dissipating module of electronic device
WO2007026047A1 (en) * 2005-08-31 2007-03-08 Axco-Motors Cooling system of an aggregate
EP1936198A2 (de) * 2006-12-13 2008-06-25 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1288737B1 (it) 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
DE19749572A1 (de) * 1997-11-10 1999-05-12 Peter Dipl Ing Frieden Trockenlaufender Schraubenverdichter oder Vakuumpumpe
JP2001271777A (ja) * 2000-03-27 2001-10-05 Toyota Autom Loom Works Ltd 真空ポンプにおける冷却装置
BE1013865A3 (nl) * 2000-12-06 2002-10-01 Atlas Copco Airpower Nv Werkwijze voor het regelen van een compressorinstallatie.
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2004197644A (ja) * 2002-12-18 2004-07-15 Toyota Industries Corp 真空ポンプの制御装置
CN2624513Y (zh) * 2003-04-14 2004-07-07 大庆东达节能技术开发服务有限公司 水空冷全封闭移动式变频装置
JP4255765B2 (ja) 2003-07-08 2009-04-15 株式会社日立産機システム パッケージ形圧縮機
US20060081185A1 (en) * 2004-10-15 2006-04-20 Justin Mauck Thermal management of dielectric components in a plasma discharge device
JP4764253B2 (ja) 2006-05-25 2011-08-31 三菱重工業株式会社 インバータ一体型電動圧縮機
WO2008062598A1 (en) * 2006-11-22 2008-05-29 Edwards Japan Limited Vacuum pump
FI7573U1 (fi) * 2007-01-19 2007-07-17 Abb Oy Taajuusmuuttaja
DE102007048510A1 (de) * 2007-10-10 2009-04-16 Robert Bosch Gmbh Elektromotor-Pumpen-Einheit, sowie eine Hydraulikanordnung mit einer derartigen Einheit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060227504A1 (en) * 2005-04-11 2006-10-12 Delta Electronics, Inc. Heat-dissipating module of electronic device
WO2007026047A1 (en) * 2005-08-31 2007-03-08 Axco-Motors Cooling system of an aggregate
EP1936198A2 (de) * 2006-12-13 2008-06-25 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
US9234519B2 (en) 2016-01-12
TW201104077A (en) 2011-02-01
EP2440788A2 (de) 2012-04-18
CN102450115B (zh) 2015-07-15
US20120315165A1 (en) 2012-12-13
DE102009024336A1 (de) 2010-12-23
CN102450115A (zh) 2012-05-09
KR20120027052A (ko) 2012-03-20
JP5756097B2 (ja) 2015-07-29
JP2012529590A (ja) 2012-11-22
WO2010142631A2 (de) 2010-12-16
EP2440788B1 (de) 2017-01-18
KR101740235B1 (ko) 2017-06-08

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