WO2011078544A2 - Injecteur d'ions, spectromètre de masse comportant celui-ci et procédé de focalisation d'ions à l'aide de celui-ci - Google Patents

Injecteur d'ions, spectromètre de masse comportant celui-ci et procédé de focalisation d'ions à l'aide de celui-ci Download PDF

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Publication number
WO2011078544A2
WO2011078544A2 PCT/KR2010/009141 KR2010009141W WO2011078544A2 WO 2011078544 A2 WO2011078544 A2 WO 2011078544A2 KR 2010009141 W KR2010009141 W KR 2010009141W WO 2011078544 A2 WO2011078544 A2 WO 2011078544A2
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
ions
region
protruding portion
ion injector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2010/009141
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English (en)
Other versions
WO2011078544A3 (fr
Inventor
Myoung Choul Choi
Hyun Sik Kim
Jong Shin Yoo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Basic Science Institute KBSI
Original Assignee
Korea Basic Science Institute KBSI
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Filing date
Publication date
Application filed by Korea Basic Science Institute KBSI filed Critical Korea Basic Science Institute KBSI
Publication of WO2011078544A2 publication Critical patent/WO2011078544A2/fr
Publication of WO2011078544A3 publication Critical patent/WO2011078544A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0404—Capillaries used for transferring samples or ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/083—Beam forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Definitions

  • Embodiments relate to an ion injector, a mass spectrometer including the same and a method for focusing ions using the same.
  • Mass spectrometry is an analytical spectrometric technique based on separation by mass of molecules or atoms, capable of analyzing not only elemental compositions but also structures of macromolecules. Mass spectrometry involves ionization of sample molecules by activating in vacuum to produce molecular ions or fragment ions, followed by acceleration of the ions in vacuum and measurement of mass-to-charge ratios using electric field and/or magnetic field.
  • a mass spectrometer used for the mass spectrometry may include a sample introducer, an ion source, a mass analyzer, a detector, etc.
  • the ion source ionizes the sample, for example, by electron impact ionization or chemical ionization.
  • the produced ions should be introduced to the mass analyzer for separation according to their mass-to-charge ratio.
  • ion optics devices are used to accelerate the ions and focus them into the mass analyzer.
  • An aspect of the present invention is directed to provide an ion injector capable of focusing injected ions with an electric field by modifying the shape of a protruding electrode without requiring additional lenses for focusing the ions, a mass spectrometer including the same and a method for focusing ions using the same.
  • an ion injector may include: a first electrode comprising a first region allowing ions to pass; and a second electrode disposed to enclose one end of the first electrode.
  • the second electrode may include: a second region aligned with the first region to allow the ions to pass; and a protruding portion extending along the path of the ions passing through the second region.
  • a mass spectrometer may include: a first chamber and a second chamber; a first electrode comprising a first region for injecting ions from outside into the first chamber; a second electrode disposed to enclose one end of the first electrode, the second electrode comprising: a second region aligned with the first region to allow the ions to pass, and a protruding portion extending along the path of the ions passing through the second region and focusing the ions passing through the second region; and a skimmer for injecting the ions passing through the second region and focused by the protruding portion from the first chamber into the second chamber.
  • the pressure inside the first chamber may be lower than the pressure of the outside.
  • a method for focusing ions may include: providing a first electrode and a second electrode, the second electrode disposed to enclose one end of the first electrode and including a protruding portion; applying an electric power to the second electrode; allowing ions to pass through the first electrode and the second electrode; and focusing the ions passing through the first electrode and the second electrode using an electric field generated by the protruding portion.
  • ions may be focused using an electric field generated by an electrode for injecting the ions, which has protruding portion protruding toward the path of the ions.
  • the ion injector may be applied to a capillary of a mass spectrometer for injecting ions from a spray source.
  • a protruding portion protruding toward a skimmer
  • the ions may be focused into a hole of the skimmer. Accordingly, the ions may be focused without requiring, for example, an additional lens for ion focusing.
  • FIG. 1 is a perspective view of an ion injector according to an embodiment
  • FIG. 2 is a cross-sectional view of the ion injector illustrated in FIG. 1;
  • FIG. 3 is a schematic view of a mass spectrometer including an ion injector according to an embodiment
  • FIG. 4 is a partial enlarged cross-sectional view of the mass spectrometer illustrated in FIG. 3;
  • FIGS. 5 to 7 show a computational simulation result at various angles of a protruding portion of an ion injector according to an embodiment
  • FIGS. 8 to 11 show a computational simulation result at various voltages applied to a protruding portion of an ion injector according to an embodiment.
  • FIG. 1 is a perspective view of an ion injector according to an embodiment
  • FIG. 2 is a cross-sectional view of the ion injector illustrated in FIG. 1.
  • an ion injector may comprise a first electrode 1 and a second electrode 2.
  • the ion injector may be used to inject ions to a mass spectrometer for analysis. Further, the ion injector may be used to accelerate and/or focus the injected ions.
  • the first electrode 1 is the portion where ions generated by a spray source, e.g. ionized samples, are injected.
  • the first electrode 1 may comprise a first region 10 allowing ions to pass therethrough.
  • the first electrode 1 may have a shape extending along one direction.
  • the first region 10 may be a channel formed in the first electrode 1 along the one direction.
  • the first electrode 1 may be a hollow capillary.
  • the shapes of the first electrode 1 and the first region 10 in the first electrode 1 illustrated in FIG. 1 and FIG. 2 are only exemplary.
  • the first electrode 1 and the first region 10 may have other shapes appropriate for injection of ions.
  • an electric power may be applied to move and/or accelerate the injected ions.
  • a predetermined voltage may be applied between both ends of the first electrode 1, so that the ions can be carried through the first region 10.
  • end portions 11, 12 of the first electrode 1 may be formed of a conducting material such as metal or may be coated with a conducting material.
  • other portions of the first electrode 1 excluding the end portions 11, 12 may be formed of glass, a dielectric material, or the like.
  • a voltage of about 4 kV may be applied to one end portion 11 of the first electrode 1 and a voltage of about 250 V may be applied to the other end portion 12. Due to the voltage difference between the two end portions 11, 12, the ions passing through the first region 10 may be accelerated.
  • the second electrode 2 is the portion to focus the ions that have passed through the first electrode 1.
  • the second electrode 2 may be disposed to enclose the end portion 12 of the first electrode 1.
  • the second electrode 2 may comprise a second region 20 and a protruding portion 21.
  • the second region 20 is the portion to allow the ions to pass therethrough, and may be aligned with the first region 10 of the first electrode 1.
  • the second region 20 may be a hole of a circular, oval or polygonal shape.
  • the ions that have passed through the first region 10 of the first electrode 1 may also pass through the second region 20 of the second electrode 2.
  • the protruding portion 21 is the portion to focus the ions passing through the second region 20.
  • the protruding portion 21 may extend along the path of the ions that have passed through the second region 20.
  • the ions passing through the second region 20 may be focused by an electric field generated by the protruding portion 21.
  • the protruding portion 21 may be formed of a metal or other appropriate conducting material.
  • the protruding portion 21 may be electrically connected to the end portion 12 of the first electrode 1, so that the same electric power may be applied as the end portion 12.
  • first electrode 1 and the second electrode 2 may be electrically separated from each other.
  • an insulating material may be inserted at the interface of the first electrode 1 and the second electrode 2.
  • an electric power may be applied to the second electrode 2 independently of the first electrode 1.
  • the protruding portion 21 may comprise a surface inclined with respect to the path of the ions.
  • an inner surface 210 of the protruding portion 21 may be inclined with respect to the path of the ions with an angle ⁇ .
  • Equipotential surfaces are formed in parallel with the surface of a conducting material, and the ions are accelerated by the force perpendicular to the equipotential surfaces. As a result, the ions are accelerated in a direction perpendicular to the inner surface 210 of the protruding portion 21, and thus, focused to the center portion.
  • the focal point of the focused ions varies depending on the angle between the inner surface 210 of the protruding portion 21 and the path of the ions.
  • the characteristics of the ion beam to be focused may be determined adequately by adjusting the angle ⁇ .
  • the focal point of the focused ions also varies depending on the electric power applied to the protruding portion 21. This will be described later in detail referring to FIGS. 5 to 11.
  • the protruding portion 21 protrudes along the outer periphery of the second region 20, which is in the form of a circular hole.
  • the second region 20 and the protruding portion 21 may have other shapes appropriate for injecting and focusing the ions.
  • FIG. 3 is a schematic view of a mass spectrometer in which an ion injector according to an embodiment is applied.
  • a mass spectrometer may comprise one or more chamber(s) 5, 6, 7. Since it is preferred to perform mass spectrometry of ions in vacuum or at a pressure as low as possible, gas may be discharged through discharge ports 50, 60, 70 of the chambers 5, 6, 7 so as to reduce pressure inside each chamber 5, 6, 7.
  • the sizes of the components illustrated in Fig. 3 are enlarged or reduced for easier understanding, and those skilled in the art will appreciate that they are not the actual sizes of the components of a mass spectrometer.
  • An ion injector comprises a first electrode 1 and a second electrode 2, and may be disposed between the first chamber 5 and a spray source 4 of the mass spectrometer.
  • the configurations of the first electrode 1 and the second electrode 2 are the same as described above referring to FIG. 1 and FIG. 2, and thus, will not be described in detail.
  • the ion injector may serve to inject ions generated from the spray source 4 into the first chamber 5.
  • the spray source 4 may be an electrospray ionization (ESI) emitter.
  • ESI electrospray ionization
  • the ions injected into the first chamber 5 by the ion injector may be injected into the next, second chamber 6 through a skimmer 3.
  • the second chamber 6 is the portion where the ions are classified according to their mass-to-charge ratio by a mass analyzer 61.
  • the second chamber 6 may be configured to have a pressure lower than that of the first chamber 5.
  • the skimmer 3 is the portion to transfer the ions injected into the first chamber 5 to the second chamber 6.
  • the skimmer 3 may have the shape of one or more cone(s) having a hole 30. The center of the cone(s) may protrude toward the first chamber 5.
  • the ions injected by the ion injector may be focused by the second electrode 2.
  • the ion injector may be arranged such that the ions focused by the second electrode 2 may pass through the hole 30 of the skimmer 3. Accordingly, the ions may be injected into the second chamber 6 through the hole 30.
  • the spray source 4 Since the spray source 4 is provided outside the mass spectrometer, it is under atmospheric pressure. Thus, it is not easy to focus the ions having been generated by the spray source 4 and passing through a space with high neutral gas density at atmospheric pressure using an electric field. Also, since the inside of the ion injector for injecting the ions from outside into the first chamber 5 is under atmospheric pressure, it is not easy to focus the ions inside the ion injector.
  • the ions may be focused inside the first chamber 5 and outside the ion injector.
  • the ion injector and the skimmer 3 are close to each other with a gap of only about 2 mm to about 3 mm, it is not easy to equip, for example, an additional lens for focusing the ions therebetween.
  • the ion injector is modified to have the protruding second electrode 2 to focus the ions.
  • the ions may be focused by the second electrode 2 of the ion injector, and it is not necessary to use, for example, an additional lens for focusing the ions.
  • the mass analyzer 61 is a device for classifying the ions according to their mass-to-charge ratio by various known methods.
  • the mass analyzer 61 may be of various types, including a quadrupole or hexapole mass analyzer, a collision cell, a time-of-flight (TOF) mass analyzer, an ion cyclotron resonance (ICR) mass analyzer, or the like, depending on the principle of mass analysis, and is not limited to a particular configuration.
  • the mass analyzer 61 may comprise a plurality of components. For example, a quadrupole mass analyzer and a hexapole collision cell may be arranged sequentially so as to form the mass analyzer 61.
  • each chamber 5, 6, 7 may comprise a plurality of chambers, or more than one of the chambers 5, 6, 7 may be configured as one chamber.
  • the ions classified according to their mass-to-charge ratio by the mass analyzer 61 may be transferred to a detector 71 in the next chamber 7.
  • the detector 71 may comprise a device capable of detecting ions such as a microchannel plate (MCP) detector.
  • MCP microchannel plate
  • the detector 71 may also be implemented variously and is not limited to a particular configuration.
  • FIG. 4 is a partial enlarged cross-sectional view of the mass spectrometer illustrated in FIG. 3.
  • the skimmer 3 may be provided close to the second electrode 2 of the ion injector.
  • a second region 20 of the second electrode 2 may be aligned with the hole 30 of the skimmer 3. Further, as described above, the second region 20 of the second electrode 2 may be aligned with the first region 10 of the first electrode 1.
  • the ions that have passed through the first region 10 may be injected into the hole 30 of the skimmer 3 after passing through the second region 20.
  • the protruding portion 21 of the second electrode 2 may serve to focus the ions into the hole 30 by means of an electric field.
  • the focal point of the ion beam focused by the protruding portion 21 may be controlled with the angle ⁇ between an inner surface 210 of the protruding portion 21 and the path of the ions, the electric power applied to the protruding portion 21, or the like. Accordingly, the angle ⁇ and the electric power applied to the protruding portion 21 may be determined adequately based on the characteristics of the ion beam to be focused.
  • FIGS. 5 to 7 show a computational simulation result at various angles of a protruding portion of an ion injector according to an embodiment.
  • Each of FIGS. 5 to 7 shows the equipotential lines of the electric field generated by the protruding portion and the path of the ions focused thereby when the angle between the inner surface of the protruding portion and the path of the ions is about 0°, about 15° and about 31°, respectively.
  • the voltage applied to the protruding portion was about 143 V.
  • the focal point of the focused ions changes depending on the angle of the inner surface of the protruding portion.
  • FIGS. 8 to 11 show a computational simulation result at various voltages applied to a protruding portion of an ion injector according to an embodiment.
  • Each of FIGS. 8 to 11 shows the equipotential lines of the electric field generated by the protruding portion and the path of the ions focused thereby when a voltage of about 23 V, about 43 V, about 143 V and about 203 V is applied to the protruding portion, respectively.
  • the angle between the inner surface of the protruding portion and the path of the ions was about 15°.
  • the focal point of the focused ions changes as the voltage applied to the protruding portion varies.
  • Embodiments relate to an ion injector, a mass spectrometer including the same and a method for focusing ions using the same.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

L'invention porte sur un injecteur d'ions qui peut comprendre : une première électrode comportant une première région permettant aux ions de passer, et une seconde électrode disposée de façon à enfermer une extrémité de la première électrode. La seconde électrode peut comprendre : une seconde région alignée avec la première région afin de permettre aux ions de passer, et une partie en saillie s'étendant le long de la trajectoire des ions passant à travers la seconde région. Un spectromètre de masse peut être configuré en plaçant l'injecteur d'ions de façon adjacente à un écrémeur.
PCT/KR2010/009141 2009-12-21 2010-12-21 Injecteur d'ions, spectromètre de masse comportant celui-ci et procédé de focalisation d'ions à l'aide de celui-ci Ceased WO2011078544A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090127855A KR20110071320A (ko) 2009-12-21 2009-12-21 이온 주입기, 이를 포함하는 질량 분석기 및 이를 이용한 이온 집속 방법
KR10-2009-0127855 2009-12-21

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WO2011078544A2 true WO2011078544A2 (fr) 2011-06-30
WO2011078544A3 WO2011078544A3 (fr) 2011-11-10

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2912677A4 (fr) * 2012-10-28 2016-08-10 Perkinelmer Health Sci Inc Adaptateurs pour dispositif d'analyse directe d'échantillons et leurs procédés d'utilisation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8901975D0 (en) * 1989-01-30 1989-03-22 Vg Instr Group Plasma mass spectrometer
KR20030097284A (ko) * 2002-06-20 2003-12-31 삼성전자주식회사 이온 주입 설비의 이온 소스
KR20060066792A (ko) * 2004-12-14 2006-06-19 동부일렉트로닉스 주식회사 이온주입기에 있어서 이온빔 균일성 조절장치 및 방법
JP4862738B2 (ja) * 2007-05-08 2012-01-25 株式会社日立製作所 イオン移動度分析装置およびイオン移動度分離／質量分析複合装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2912677A4 (fr) * 2012-10-28 2016-08-10 Perkinelmer Health Sci Inc Adaptateurs pour dispositif d'analyse directe d'échantillons et leurs procédés d'utilisation

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KR20110071320A (ko) 2011-06-29
WO2011078544A3 (fr) 2011-11-10

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