WO2011083989A2 - Dispositif de contrôle de défaut - Google Patents

Dispositif de contrôle de défaut Download PDF

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Publication number
WO2011083989A2
WO2011083989A2 PCT/KR2011/000086 KR2011000086W WO2011083989A2 WO 2011083989 A2 WO2011083989 A2 WO 2011083989A2 KR 2011000086 W KR2011000086 W KR 2011000086W WO 2011083989 A2 WO2011083989 A2 WO 2011083989A2
Authority
WO
WIPO (PCT)
Prior art keywords
light
image
inspection object
defect
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/000086
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English (en)
Korean (ko)
Other versions
WO2011083989A3 (fr
Inventor
이제선
장기수
최백영
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3B System Inc
Original Assignee
3B System Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3B System Inc filed Critical 3B System Inc
Publication of WO2011083989A2 publication Critical patent/WO2011083989A2/fr
Publication of WO2011083989A3 publication Critical patent/WO2011083989A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • An embodiment of the present invention relates to a defect inspection apparatus, which irradiates light to an object to be inspected, and is capable of detecting defects such as identification of foreign matters attached to the surface to which light is irradiated, and stamping, wrinkles, or discoloration of the irradiation surface. It relates to an inspection apparatus.
  • Optical films which are mainly used in the flat panel display industry, cause defects in manufacturing and handling processes, and defects in optical films are factors that lower efficiency of LCD panels and PDP modules.
  • optical film manufacturers are carrying out an inspection process, and are using a device using visual inspection and vision by an operator.
  • the inspection of the optical film is a kind of final inspection performed after the manufacturing process of the optical film is completed. Therefore, various defects that may occur in the manufacturing process should be detected. Preventing the leakage of defective products through accurate image acquisition and automatic inspection process is an important technical task.
  • an image acquisition method should be used differently according to the defect type, and the quantity of optical system for image acquisition of defects should be set in accordance with the applied image acquisition method and installed in the inspection equipment.
  • the optical film When the optical film is sequentially put into the automatic inspection equipment, the optical film is transferred using a conveyor, a roll, and the like, and each optical system acquires an image suitable for its role while passing through a plurality of optical systems during the transfer.
  • FIG. 1 is a view showing an example of a conventional defect inspection apparatus
  • Figure 2 is a view showing another example of a conventional defect inspection apparatus.
  • a defect inspection apparatus is a device for inspecting a defect of an inspection object, which is mainly an opaque panel 2, wherein the light source 20 is moved to the opaque panel when the opaque panel 2 is moved by a conveyor 30. The light is irradiated at an oblique angle to (2), and the camera 10 receives light reflected from the opaque panel 2 to perform line scanning of the opaque panel 2.
  • the defect inspection apparatus is a device for inspecting the defects on the inspection object, which is mainly a transparent panel 3, the conveyor 30 is formed in the slit 31, the slit of the conveyor 30 A transparent panel 3 is placed on the upper portion 31.
  • a light source 20 is disposed below the slit 31, and the light emitted from the light source 20 passes through the slit 31, and the camera 10 passes through the slit 31. Line scanning is performed by receiving light.
  • the irradiation direction of the light irradiated from the light source is irradiated at a plurality of positions, there is a problem that it is difficult to distinguish the shape of the defect from the shadow.
  • the amount of light is insufficient to reach the camera efficiently, the light intensity of the light source should be increased.
  • scattering increases due to the increased light intensity, a clear image cannot be obtained.
  • a condensing illumination device must be constructed by installing a condenser lens on the light source, but even in the case of such a condensing illumination device, since the secondary light loss cannot be prevented, there is still a problem that the light efficiency is lowered. have.
  • the present embodiment is to solve such a conventional problem, and to propose a defect inspection apparatus to easily determine whether a defect is generated by acquiring a clearer image of the inspection object.
  • the defect inspection apparatus of the proposed embodiment includes a first light source for irradiating a first light to the inspection object; A retroreflective plate for retroreflecting the first light reflected from the inspection object, thereby allowing the first light to be reincident to the inspection object; A second light source for irradiating a second light to the inspection object; A light conversion unit collimating the second light so that the collimated second light is incident on the inspection object; And a camera which acquires an image of the inspection object from the first light recursively reflected by the retroreflective plate and re-entered into the inspection object and the second light passing through the light conversion unit.
  • the light conversion unit may include a collimator for collimating the second light, and a diffuser for dispersing the second light collimated by the collimator.
  • the retroreflective plate retroreflects the first light in the same direction as the incidence path of the first light to the first light reflected by the test object, thereby allowing the first light to be reincident to the test object. .
  • the angle at which the first light emitted from the first light source forms the light irradiation surface of the inspection object is different from the angle at which the second light emitted from the second light source forms the light irradiation surface of the inspection object. Is formed.
  • the apparatus may further include an image processor configured to receive at least one image captured by the camera and perform image processing of the inspection object, wherein the image processor comprises a first image captured by the first light from the camera. And a second image captured by the second light, and synthesizes the first image and the second image.
  • an image processor configured to receive at least one image captured by the camera and perform image processing of the inspection object, wherein the image processor comprises a first image captured by the first light from the camera. And a second image captured by the second light, and synthesizes the first image and the second image.
  • the first light source for irradiating the first light to the inspection object;
  • a retroreflective plate for re-reflecting the first light passing through the inspection object, thereby allowing the first light to be reincident to the inspection object;
  • a second light source for irradiating a second light to the inspection object;
  • a camera for acquiring an image of the inspection object from a first light that is re-entered into the inspection object by the retroreflective plate and passes through the inspection object, and a second light emitted from the second light source and passing through the inspection object. It includes;
  • the defects on the inspection object are summed by adding up the background part of the image acquired by the light retroreflected by the retroreflective plate and the defect part of the image acquired by the collimated and diffused light. It is possible to obtain a clear image for.
  • the defect inspection apparatus of the present invention by providing a light conversion unit for collimating and dispersing the light irradiated from the second light source, it is possible to minimize the change in the position of the illumination with respect to vibration to maintain a uniform brightness.
  • FIG. 1 is a view showing an example of a conventional defect inspection apparatus.
  • FIG. 2 is a view showing another example of a conventional defect inspection apparatus.
  • FIG. 3 is a view showing a defect inspection apparatus according to an embodiment of the present invention.
  • FIG. 4 is a view showing in detail the light conversion unit of the defect inspection apparatus of FIG.
  • FIG. 5 is a diagram showing an example of defects picked up by the defect inspection apparatus of FIG. 3;
  • FIG. 6 is a view showing a defect inspection apparatus according to another embodiment of the present invention.
  • Figure 3 is a view showing a defect inspection apparatus according to an embodiment of the present invention
  • Figure 4 is a view showing in detail the light conversion unit of the defect inspection apparatus of Figure 3
  • Figure 5 is taken by the defect inspection apparatus of Figure 3 It is a figure which shows an example of a fault.
  • the configuration of the defect inspection apparatus 100 according to the present embodiment is shown in Figure 3, the defect inspection apparatus 100 by irradiating two different light to the inspection object, to provide a clear image of the defect Can be obtained.
  • the defect inspection apparatus 100 includes a first light source 110 that emits first light, a retroreflective plate 120, and a second light source 130 that emits second light. And a light converter 140, a camera 150, a slit 160, and an image processor 170.
  • the case where the said test target object is the optical film 1 is demonstrated as an example.
  • the first light source 110 irradiates the first light to the optical film 1, and the first light source 110 may be coaxially installed at an inlet side of the camera 150 to be described later.
  • the first light source 110 may be configured as a high power LED lighting unit.
  • the retroreflective plate 120 is a member that retroreflects incident light in the same direction as the incident direction.
  • the light emitted from the first light source 110 is reflected by the optical film 1 and is incident on the retroreflective plate 120, and the light incident on the retroreflective plate 120 is an inspection object in the same direction as the incident direction. It retroreflects to the optical film 1 side.
  • the second light source 130 also emits light toward the optical film 1 side, and may be configured as a high power LED lighting unit.
  • the angle between the optical axis of the first light source 110 and the light irradiation surface of the optical film 1 is different from the angle between the optical axis of the second light source 130 and the light irradiation surface of the optical film 1.
  • the path L1 (optical axis) of the light emitted from the first light source 110 is formed to be inclined approximately 45 degrees to 50 degrees with respect to the light irradiation surface of the optical film 1 ( ⁇ )
  • the path L2 (optical axis) of the light emitted from 130 is formed to be inclined at about 10 to 20 degrees with the optical film 1 ( ⁇ ).
  • the light converting unit 140 collimates and disperses the light emitted from the second light source 130, and includes a collimator 141 and a diffuser 142.
  • the light emitted from the second light source 130 is collimated while passing through the collimator 141, and the light is diffused in the left and right directions while passing through the diffuser 142.
  • the position of the illumination is severely changed due to vibration and uniformity. It is difficult to maintain strength. Therefore, since the size of the defect on the optical film 1 may be distorted, it is necessary to configure the light conversion unit 140.
  • the camera 150 detects a defect on the optical film 1 by acquiring an image of the optical film 1.
  • the light retroreflected by the retroreflective plate 120 is incident to the optical film 1 side, and the light is reflected by the optical film 1 to be incident to the camera 150.
  • the light emitted from the second light source 130 is also incident on the optical film 1, and the light is reflected by the optical film 1 and is incident on the camera 150.
  • the camera 150 may acquire an image of the optical film 1 by using the light retroreflected by the retroreflective plate 120 and the light of the second light source 130.
  • the camera 150 may be a line camera, an area camera, or the like, and various image capturing means may be used in the optical film inspection apparatus.
  • the slit 160 is to reduce interference of light of various paths and is disposed above the optical film 1.
  • the light emitted from the first light source 110, the light retro-reflected by the retroreflective plate 120, and the light emitted from the second light source 130 pass through the slit part 160 to pass through the optical film 1. ) Is incident.
  • the light reflected from the optical film 1 also passes through the slit 160 and then enters the retroreflective plate 120 or the camera 150.
  • the image processor 170 synthesizes an image captured by the light retroreflected by the retroreflective plate 120 and an image captured by the light emitted from the second light source 130 and reflected by the optical film 1. do.
  • the image captured by the light retroreflected by the retroreflective plate 120 and the image emitted by the second light source 130 and reflected by the optical film 1 are captured by the first light source 110 and
  • the second light source 130 may be simultaneously driven and obtained, or the first light source 110 and the second light source 130 may be alternately driven as necessary.
  • Images having the first light source 110 and the second light source 130 as sources are transferred from the camera 150 to the image processor 170, and the defect image processed by the image processor 170 is illustrated in FIG. 5. Is shown.
  • the first image I10 by the first light source 110 includes an image I11 of a defect portion and an image I12 of a background portion, and includes an image of the defect portion ( I11) is simply dark in its entirety, making it difficult to distinguish whether it is a depressed image or a contaminant.
  • the second image I20 in the center of FIG. 5 is obtained by the light emitted from the second light source 130 entering the camera 150 through the light conversion unit 140 and the optical film 1. It is a video.
  • the second image I20 also includes an image I21 of a defect portion and an image I22 of a background portion, wherein the image I22 of the background portion is displayed in overall darkness, and the image I21 of the defect portion is a second image.
  • the area irradiated with light emitted from the light source 130 is brightly displayed.
  • the lower third image I30 is an image obtained by combining the background area I12 of the first image I10 and the defect area I21 of the second image I20.
  • I30 includes a bright background region I32 as a whole and a defect region I31 that appears more clearly.
  • the defect inspection apparatus configured as described above is configured by summing a defect portion of an image acquired by collimated and diffused light and a background portion of an image acquired by light retroreflected by a retroreflective plate. In addition, the effect of obtaining a clear image of the defect on the inspection object can be obtained.
  • the defect inspection apparatus configured as described above, by using the slit portion for reducing the interference of light of various paths, it is possible to obtain the effect of increasing the light efficiency.
  • the defect inspection apparatus configured as described above has a light conversion unit for collimating and dispersing the light irradiated from the second light source, thereby minimizing the change in the position of the illumination with respect to the vibration to achieve a uniform brightness A sustainable effect can be obtained.
  • Figure 6 is a view showing a defect inspection apparatus according to another embodiment of the present invention.
  • members referred to by the same reference numerals as the members illustrated in FIGS. 3 to 5 have the same configuration and function, and detailed descriptions thereof will be omitted.
  • the defect inspection apparatus 200 includes a first light source 110, a retroreflective plate 220, a second light source 130, a light conversion unit 140, and a camera ( 250, a slit 160, and an image processor 270.
  • the retroreflective plate 220 is a member that retroreflects incident light in the same direction as the incident direction.
  • the light emitted from the first light source 110 passes through the optical film 1 and is incident on the retroreflective plate 220.
  • the light incident on the retroreflective plate 220 is directed toward the optical film 1 in the same direction as the incident direction. Retroreflective.
  • the camera 250 detects a defect on the optical film 1 by acquiring an image of the optical film 1.
  • Light retroreflected by the retroreflective plate 220 passes through the optical film 1 and is incident on the camera 250.
  • the light emitted from the second light source 130 is incident to the optical film 1 through the light conversion unit 140, and the light is transmitted to the camera 250 through the optical film 1.
  • An image of the optical film 1 may be obtained by using the light retroreflected by the retroreflective plate 220 and the light of the second light source 130.
  • the image processor 270 captures an image of a background portion of the image captured by the light retroreflected by the retroreflective plate 220 and light transmitted from the second light source 130 to pass through the optical film 1.
  • the images of defects are summed up among the images.
  • the embodiment of the present invention is applicable to an apparatus capable of confirming whether a defect of an object to be inspected by acquiring an image of the surface of the object to be inspected, and thus has industrial applicability.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

La présente invention a trait à un dispositif de contrôle de défaut donné à titre d'exemple qui comprend : une première source lumineuse permettant d'éclairer au moyen d'une première lumière un objet à contrôler ; une plaque rétroréfléchissante qui rétroréfléchit la première lumière réfléchie à partir de l'objet à contrôler de sorte que la première lumière est de nouveau incidente à l'objet à contrôler ; une seconde source lumineuse qui éclaire au moyen d'une seconde lumière l'objet à contrôler ; et une caméra qui capture une image de l'objet à contrôler à partir de la première lumière, qui a été rétroréfléchie et renvoyée de manière à être de nouveau incidente à l'objet à contrôler au moyen de la plaque rétroréfléchissante, et à partir de la seconde lumière émise à partir de la seconde source lumineuse.
PCT/KR2011/000086 2010-01-07 2011-01-06 Dispositif de contrôle de défaut Ceased WO2011083989A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20100001083A KR101151274B1 (ko) 2010-01-07 2010-01-07 결점 검사장치
KR10-2010-0001083 2010-01-07

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WO2011083989A2 true WO2011083989A2 (fr) 2011-07-14
WO2011083989A3 WO2011083989A3 (fr) 2011-11-10

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110809731A (zh) * 2017-04-14 2020-02-18 康宁股份有限公司 玻璃处理装置和方法

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KR101500375B1 (ko) 2013-06-27 2015-03-10 현대자동차 주식회사 차체 도장 외관 검사장치
KR101446984B1 (ko) 2013-08-08 2014-10-07 이영우 결함 검사장치
KR101522365B1 (ko) * 2014-05-28 2015-05-21 이영우 빗각조명을 이용한 기판 검사장치
KR101637019B1 (ko) * 2014-10-28 2016-07-21 에이클로버 주식회사 일체형 영상기반 자동 표면검사장치
WO2018190693A2 (fr) * 2017-04-14 2018-10-18 Corning Precision Materials Co., Ltd Appareil et procédés de traitement du verre
KR102250085B1 (ko) * 2019-08-13 2021-05-10 (주)케파 광학 검사 장치

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JP2932307B2 (ja) * 1990-08-23 1999-08-09 ディフラクト リミテッド 逆反射を利用した表面検査及び歪み測定のための方法及び装置
JPH04340447A (ja) * 1991-05-16 1992-11-26 Kobe Steel Ltd 逆反射スクリーンによる表面検査方法および検査装置
US5436725A (en) * 1993-10-12 1995-07-25 Hughes Aircraft Company Cofocal optical system for thickness measurements of patterned wafers
JPH07294446A (ja) * 1994-04-21 1995-11-10 Kobe Steel Ltd 逆反射スクリーンによる表面検査方法
JPH0875665A (ja) * 1994-09-05 1996-03-22 Kawasaki Steel Corp 逆反射スクリーンを用いた表面検査方法及びその装置
JPH08114430A (ja) * 1994-10-17 1996-05-07 Kobe Steel Ltd 逆反射スクリーンによる表面検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110809731A (zh) * 2017-04-14 2020-02-18 康宁股份有限公司 玻璃处理装置和方法

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Publication number Publication date
KR20110080725A (ko) 2011-07-13
WO2011083989A3 (fr) 2011-11-10
KR101151274B1 (ko) 2012-06-14

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