WO2011122005A1 - Mécanisme d'inversion dans un mécanisme de transport de substrat et dans un dispositif de laminage de film polarisant - Google Patents

Mécanisme d'inversion dans un mécanisme de transport de substrat et dans un dispositif de laminage de film polarisant Download PDF

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Publication number
WO2011122005A1
WO2011122005A1 PCT/JP2011/001869 JP2011001869W WO2011122005A1 WO 2011122005 A1 WO2011122005 A1 WO 2011122005A1 JP 2011001869 W JP2011001869 W JP 2011001869W WO 2011122005 A1 WO2011122005 A1 WO 2011122005A1
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WIPO (PCT)
Prior art keywords
substrate
reversing
polarizing film
transport mechanism
unit
Prior art date
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Ceased
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PCT/JP2011/001869
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English (en)
Japanese (ja)
Inventor
力也 松本
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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Priority to CN201180017069.XA priority Critical patent/CN102822727B/zh
Priority to KR1020127014501A priority patent/KR101419619B1/ko
Publication of WO2011122005A1 publication Critical patent/WO2011122005A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers

Definitions

  • the present invention relates to a substrate transport mechanism and a reversing mechanism in a polarizing film bonding apparatus.
  • liquid crystal display devices have been widely manufactured.
  • a polarizing film is bonded to a substrate (liquid crystal panel) used in a liquid crystal display device in order to control transmission or blocking of light.
  • the polarizing film is bonded so that the absorption axes thereof are orthogonal.
  • Patent Document 1 discloses an optical display device manufacturing system.
  • the said manufacturing system rotates a board
  • optical film polarizing film
  • the conventional apparatus has the following problems.
  • the work is usually performed in a clean room in order to prevent foreign matters such as dust from entering the bonding surface.
  • air is rectified. This is because it is necessary to bond the polarizing film in a state in which rectification is performed on the substrate in a downflow in order to suppress the yield reduction due to the foreign matter.
  • the manufacturing system of Patent Document 1 has a configuration in which a polarizing film is bonded to the substrate from the upper surface and the lower surface.
  • a demerit that airflow (downflow) is hindered by the polarizing film and the rectification environment to the substrate is deteriorated.
  • FIGS. 9A and 9B show air velocity vectors in the top-paste type manufacturing system. In FIG.
  • area A is an area where an unwinding part for unwinding the polarizing film is installed
  • area B is an area through which the polarizing film mainly passes
  • area C is peeled off from the polarizing film. This is an area in which a take-up unit or the like for winding the film is installed.
  • HEPA (High Efficiency Particulate Air) Clean air is supplied from the filter 40.
  • the airflow can move in the vertical direction via the grating 41.
  • FIG. 9B since the grating 41 is not installed, the airflow moves along the floor after contacting the floor at the bottom of FIG. 9B.
  • the areas A to C are arranged on the 2F (second floor) portion, and the clean air from the HEPA filter 40 is blocked by the polarizing film. Therefore, it is difficult to generate an airflow in the vertical direction with respect to the substrate passing through the 2F portion.
  • the airflow vector in the horizontal direction is large (vector density is high). That is, it can be said that the rectification environment has deteriorated.
  • the present invention has been made in view of the above-described conventional problems, and includes a first substrate transport mechanism that transports a rectangular substrate in a state in which a long side or a short side is along a transport direction, and the short side of the substrate.
  • a first substrate transport mechanism that transports a rectangular substrate in a state in which a long side or a short side is along a transport direction, and the short side of the substrate.
  • the reversing mechanism in the substrate transport mechanism including the second substrate transport mechanism that transports the long side along the transport direction the above-described transported by the first substrate transport mechanism by the reversing operation of the substrate reversing unit.
  • An object of the present invention is to provide a manufacturing system of a liquid crystal display device including the above.
  • the present invention provides a first substrate transport mechanism for transporting a rectangular substrate with a long side or a short side along the transport direction, and transports the substrate with a short side or a long side along the transport direction.
  • a reversing mechanism in a substrate transporting mechanism comprising a second substrate transporting mechanism that rotates, a substrate reversing unit that rotates about a reversing axis that is arranged at a fixed inclination with respect to the transporting direction of the substrate, based on rotational driving of a driving device.
  • the reversing operation is based on the second technical idea of reversing the substrate transported by the first substrate transporting mechanism and changing the placement and placing it on the second substrate transporting mechanism.
  • the purpose is to reverse the substrate by one reversing operation of the substrate reversing unit, to change the direction of the short side and the long side along the transport direction of the substrate, and to shorten the tact time. It is to make it Rukoto can.
  • the reversing mechanism in the substrate transport mechanism of the present invention is: A first substrate transport mechanism for transporting a rectangular substrate with a long side or a short side along the transport direction; In a substrate transport mechanism comprising a second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction, A reversing mechanism configured to reverse the substrate transported by the first substrate transporting mechanism by a reversing operation of the substrate reversing unit, and to change the placement and place the second substrate transporting mechanism on the second substrate transporting mechanism; It is what.
  • the reversing mechanism in the substrate transport mechanism of the present invention (second invention) according to claim 2 is:
  • the reversing mechanism includes a substrate reversing portion that rotates around a reversing axis disposed at a certain inclination with respect to the transport direction of the substrate by a rotational drive of a driving device and performs a reversing operation.
  • the reversing mechanism in the substrate transport mechanism of the present invention (third invention) according to claim 3 is: In the second invention, The inclination of the inversion axis is 45 °.
  • the reversing mechanism in the substrate transport mechanism of the present invention (fourth invention) according to claim 4 is:
  • One end of the substrate reversing portion is disposed with an inclination of 45 ° with respect to the reversing axis.
  • the reversing mechanism in the substrate transport mechanism of the present invention is: In any one of the first invention to the fourth invention, The reversing shaft of the reversing mechanism, the substrate transported by the first substrate transporting mechanism, and the substrate reversed by the substrate reversing unit on the second substrate transporting mechanism are disposed on the same plane. Is.
  • the reversing mechanism in the substrate transport mechanism of the present invention is: In any one of the first invention to the fifth invention, The reversing mechanism includes means for allowing the reversing shaft to be lifted, tilted and adjusted in position.
  • the reversing mechanism in the substrate transport mechanism of the present invention is: In any one of the first invention to the sixth invention, Two reversing mechanisms are disposed on both sides of the first substrate transport mechanism, and two substrates on which the substrates transported by the first substrate transport mechanism are alternately transported on both sides of the first substrate transport mechanism.
  • the substrate placement unit is disposed, and the substrates transferred to the two substrate placement units are alternately reversed by the two reversing mechanisms, and the arrangement is changed to the second substrate conveyance mechanism. It is comprised so that it may arrange.
  • the reversing mechanism in the polarizing film laminating device of the present invention is: A first substrate transport mechanism for transporting a rectangular substrate with a long side or a short side along the transport direction; A first bonding unit for bonding a polarizing film to the lower surface of the substrate in the first substrate transport mechanism; A second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction; In the polarizing film bonding apparatus including the second bonding portion for bonding the polarizing film to the lower surface of the substrate in the second substrate transport mechanism, A reversing mechanism configured to reverse the substrate transported by the first substrate transporting mechanism by a reversing operation of the substrate reversing unit, and to change the placement and place the second substrate transporting mechanism on the second substrate transporting mechanism; It is what.
  • the reversing mechanism in the polarizing film laminating device of the present invention is: A first substrate transport mechanism for transporting a rectangular substrate with a long side or a short side along the transport direction; A first bonding unit for bonding a polarizing film to the lower surface of the substrate in the first substrate transport mechanism; A second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction; A second bonding part for bonding a polarizing film to the lower surface of the substrate in the second substrate transport mechanism; A polarizing film laminating apparatus comprising: a holding unit that holds the substrate conveyed by the first substrate conveying mechanism; and a holding mechanism that controls the holding unit to a held state or a state in which the holding is released.
  • the substrate reversing operation of the substrate reversing unit having one end connected to the holding unit of the holding mechanism reverses the substrate transported by the first substrate transport mechanism and held by the holding unit.
  • a reversing mechanism configured to change the arrangement and arrange the arrangement on the second substrate transport mechanism.
  • the reversing mechanism in the polarizing film laminating device of the present invention (tenth invention) according to claim 10 is: In the eighth invention or the ninth invention, The inclination of the inversion axis is 45 °.
  • the reversing mechanism in the polarizing film laminating device of the present invention (11th invention) according to claim 11 is: In the tenth invention, One end of the substrate reversing portion is disposed with an inclination of 45 ° with respect to the reversing axis.
  • the reversing mechanism in the polarizing film laminating device of the present invention (the twelfth invention) according to claim 12 is:
  • the reversal axis includes a straight line that passes through the center of the substrate in the first substrate transport mechanism and has a 45 ° inclination with respect to a straight line perpendicular to the transport direction of the substrate, and is located in a plane perpendicular to the substrate. It is.
  • the reversing mechanism in the polarizing film laminating device of the present invention (13th invention) according to claim 13 is: In any of the eighth to twelfth inventions, The reversing shaft of the reversing mechanism, the substrate transported by the first substrate transporting mechanism, and the substrate reversed by the substrate reversing unit on the second substrate transporting mechanism are disposed on the same plane. Is.
  • the reversing mechanism in the polarizing film laminating device of the present invention (14th invention) according to claim 14 is: In any of the eighth to thirteenth inventions, The reversing mechanism includes means for allowing the reversing shaft to be lifted, tilted and adjusted in position.
  • the reversing mechanism in the polarizing film laminating device of the present invention is: In any one of the eighth invention to the fourteenth invention, Two reversing mechanisms are disposed on both sides of the first substrate transport mechanism, and two substrates on which the substrates transported by the first substrate transport mechanism are alternately transported on both sides of the first substrate transport mechanism.
  • the substrate placement unit is disposed, and the substrates transferred to the two substrate placement units are alternately reversed by the two reversing mechanisms, and the arrangement is changed to the second substrate conveyance mechanism. It is comprised so that it may be arrange
  • the polarizing film laminating apparatus of the present invention transports a rectangular substrate with a long side or a short side along the transport direction, and the first substrate.
  • a first bonding unit that bonds a polarizing film to the lower surface of the substrate in the transport mechanism;
  • a reversing mechanism that reverses the substrate transported by the first substrate transport mechanism and places the substrate in the second substrate transport mechanism;
  • a second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction, and a second bonding unit for bonding a polarizing film to the lower surface of the substrate in the second substrate transport mechanism;
  • the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction, and the long side or the short side of the first substrate transport mechanism is transported.
  • the second substrate transport mechanism includes a reversing mechanism for bringing the short side or the long side along the transport direction, and the reversing mechanism includes a suction unit that sucks the substrate, and a substrate reversing unit connected to the suction unit,
  • the substrate reversing unit is for reversing the substrate by rotating along the reversal axis, and the reversal axis is located in the plane of (1) below and at the vertical position of (2) below. It is characterized by.
  • the polarizing film is bonded to the lower surface of the substrate by the first bonding portion, and the substrate is rotated by rotation along the reversal axis of the substrate reversing portion in the reversing mechanism. And the long side and the short side with respect to the transport direction can be changed. Then, a polarizing film can be bonded to the lower surface of a board
  • the bonding apparatus since a polarizing film can be bonded from the lower surface to both surfaces of the substrate, the rectifying environment is not hindered. Moreover, since the operation of the reversing mechanism is a simple operation, the tact time is short. Therefore, it is possible to realize bonding with a short tact time. Further, the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus according to the present invention is very simple to install and is excellent in area efficiency.
  • the first substrate transport mechanism and the second substrate transport mechanism are arranged in a straight line, and at the end of the first substrate transport mechanism on the second substrate transport mechanism side.
  • the substrate mounting portion and the reversing mechanism are provided in two pairs along both directions parallel to the transport direction of the first substrate transport mechanism at the end portion, and the end portion includes the substrate from the end portion to the substrate. It is preferable that transport means for transporting the substrate to the placement unit is provided, and the reversing mechanism reverses the substrate transported to each of the substrate placement units and places it on the second substrate transport mechanism.
  • the 1st film conveyance mechanism and 2nd film conveyance mechanism which convey a polarizing film are provided, and the said 1st film conveyance mechanism was protected by the peeling film.
  • a plurality of unwinding sections for unwinding the polarizing film, a cutting section for cutting the polarizing film, a removing section for removing the release film from the polarizing film, and a plurality of winding sections for winding the removed release film are provided.
  • the second film transport mechanism includes a plurality of unwinding sections for unwinding the polarizing film protected by the peeling film, a cutting section for cutting the polarizing film, and a removing section for removing the peeling film from the polarizing film.
  • the first bonding unit is provided on the top of the structure and the second film transport mechanism, and bonds the polarizing film from which the release film has been removed to the substrate.
  • the unwinding part and the winding part are provided in plural, when the remaining amount of the original film of the polarizing film in one unwinding part decreases, the other unwinding part is provided in the original film. It is possible to connect raw materials. As a result, the operation can be continued without stopping the unwinding of the polarizing film, and the production efficiency can be increased.
  • the first film transporting mechanism before the polarizing film is bonded to the lower surface of the substrate by the first bonding portion, the first film transporting mechanism includes a cleaning unit for cleaning the substrate. It is preferable to transport the substrate with the short side of the substrate along the transport direction.
  • the substrate can be cleaned by the cleaning unit in a state where the long sides of the substrate are orthogonal to the substrate transport direction. That is, since the distance of the substrate along the transport direction can be reduced, the tact time required for cleaning can be further shortened. As a result, it is possible to provide a polarizing film laminating apparatus that is further excellent in production efficiency.
  • the first film transport mechanism and the second film transport mechanism detect a defect display attached to the polarizing film unwound from the first unwinding section. It is preferable to have a defect detection unit, a bonding avoidance unit that discriminates the defect display and stops the conveyance of the substrate, and a recovery unit that recovers the polarizing film from which bonding with the substrate is avoided.
  • the yield can be increased.
  • the manufacturing system of the liquid crystal display device of this invention is equipped with the bonding apparatus of the said polarizing film, and the sticking
  • the presence / absence of sticking misalignment is determined based on the inspection result of the sticking misalignment inspection apparatus, and the substrate on which the polarizing film is bonded is classified based on the determination result. It is preferable to provide a transport device.
  • inspects the foreign material in the board
  • the presence or absence of a foreign material is determined based on the inspection result by the said bonded foreign material automatic test
  • the manufacturing system of the liquid crystal display device of this invention has the bonding foreign material automatic test
  • a determination is made as to whether there is a sticking deviation and a foreign matter, and based on the determination result, a sorting and conveying device is provided that sorts the substrate on which the polarizing film is bonded. It is preferable.
  • the reversing mechanism in the substrate transport mechanism according to the first aspect of the present invention having the above-described structure is configured to transport the rectangular substrate with the long side or the short side along the transport direction by the reversing operation of the substrate reversing unit.
  • the substrate transferred by the one-substrate transfer mechanism is reversed, and the arrangement is changed to arrange the substrate on a second substrate transfer mechanism that transfers the short side or the long side along the transfer direction. Therefore, by one reversing operation of the substrate reversing unit, the substrate can be reversed, the direction of the short side and the long side along the transport direction of the substrate can be changed, and the tact time can be shortened. There is an effect that can be done.
  • the reversing mechanism in the substrate transport mechanism according to the second invention of the present invention having the above-described configuration is the reversing mechanism according to the first invention, in which the substrate reversing portion of the reversing mechanism is rotated with respect to the transport direction of the substrate. Since the reversing operation is performed by rotating around the reversing axis disposed at a constant inclination, the substrate reversing portion rotating around the reversing axis disposed at a certain inclination with respect to the transport direction of the substrate. With one reversing operation, the substrate can be reversed, the direction of the short side and the long side along the transport direction of the substrate can be changed, and the tact time can be shortened.
  • the reversing mechanism in the substrate transport mechanism according to the third invention of the present invention having the above-described configuration is the above-described second invention, wherein the substrate reversing portion of the reversing mechanism is disposed at a constant inclination with respect to the transport direction of the substrate.
  • the reversing operation is performed by rotating about the reversing axis. While reversing the said board
  • the reversing mechanism in the substrate transport mechanism according to the fourth aspect of the present invention having the above-described configuration is the reversing mechanism according to the third aspect, wherein one end of the substrate reversing portion is disposed at an inclination of 45 ° with respect to the reversing axis. Therefore, by one reversing operation of the substrate reversing unit, the substrate disposed at one end of the substrate reversing unit is reversed, and the direction of the short side and the long side along the transport direction of the substrate is changed. This has the effect of reducing the tact time.
  • the reversing mechanism in the substrate transport mechanism of the fifth invention of the present invention having the above configuration is transported by the reversing shaft of the reversing mechanism and the first substrate transport mechanism in any of the first to fourth inventions.
  • the substrate reversing operation performs one reversing operation on the substrate. And the direction of the short side and the long side along the substrate transport direction can be changed, and the tact time can be shortened.
  • the reversing mechanism in the substrate transport mechanism of the sixth invention of the present invention having the above-described configuration is the reversing mechanism according to any one of the first to fifth inventions, wherein the means provided in the reversing mechanism is configured to lift and tilt the reversing shaft. Further, since the position can be adjusted, the adjustment and control in the reversing operation of the substrate reversing unit can be achieved.
  • the reversing mechanism in the substrate transport mechanism according to the seventh aspect of the present invention having the above-described structure is the reversing mechanism according to any one of the first to sixth aspects, wherein two reversing mechanisms are disposed on both sides of the first substrate transport mechanism. Two substrate platforms that alternately transport the substrates transported by the first substrate transport mechanism are disposed on both sides of the first substrate transport mechanism, and the two substrate platforms are disposed on the two substrate platforms. The transported substrate is alternately reversed by the two reversing mechanisms, and the arrangement is changed and disposed in the second substrate transporting mechanism, so that the tact time in transporting the substrate is reduced by half.
  • the substrate carrying process can be doubled.
  • the reversing mechanism in the polarizing film laminating apparatus according to the eighth aspect of the present invention having the above-described structure is the polarizing film laminating apparatus, wherein the long side or the short side of the rectangular substrate is in the transport direction by the reversing operation of the substrate reversing unit.
  • the substrate is conveyed by the first substrate conveyance mechanism in the state along the line, and the substrate on which the polarizing film is bonded to the lower surface in the first bonding unit is reversed, and the second substrate transfer is performed by changing the arrangement.
  • the substrate Since the substrate is disposed in the mechanism, the substrate is transported by the second substrate transport mechanism in a state where the short side or the long side is along the transport direction, and the polarizing film is provided on the lower surface of the substrate in the second bonding portion. There is an effect of realizing that is bonded.
  • the reversing mechanism in the polarizing film laminating device of the ninth aspect of the present invention having the above-described configuration is a state in which the holding state or the holding state of the holding mechanism is released based on the rotational drive of the driving device in the polarizing film laminating device.
  • the reversing operation of the substrate reversing unit having one end connected to the holding unit controlled by the reversing operation reverses the substrate transported by the first substrate transporting mechanism and held by the holding unit, and changes the arrangement.
  • the substrate By being arranged in the second substrate transport mechanism, the substrate can be transported and the polarizing film can be bonded, so that the effect of realizing that the polarizing film is bonded to the upper and lower surfaces of the substrate, respectively. Play.
  • the reversing mechanism in the polarizing film laminating apparatus according to the tenth aspect of the present invention having the above-described configuration is the substrate reversing portion that rotates about the reversal axis disposed at a 45 ° inclination in the eighth or ninth aspect.
  • the substrate can be reversed, the direction of the short side and the long side along the transport direction of the substrate can be changed, and the tact time can be shortened.
  • the reversing mechanism in the polarizing film laminating apparatus according to the eleventh aspect of the present invention having the above-described configuration is the tenth aspect, wherein one end of the substrate reversing portion is disposed at an inclination of 45 ° with respect to the reversal axis. Therefore, by one reversing operation of the substrate reversing portion, the substrate disposed at one end of the substrate reversing portion is reversed, and the short side and the long side directions along the transport direction of the substrate are reversed. As a result, the tact time can be shortened.
  • the reversing mechanism in the polarizing film laminating apparatus of the twelfth aspect of the present invention having the above-described configuration is that the reversing axis passes through the center of the substrate in the first substrate transporting mechanism, and the transport direction of the substrate. Since the substrate includes a straight line having an inclination of 45 ° with respect to the vertical straight line and is positioned in a plane perpendicular to the substrate, the substrate is reversed by one reversing operation of the substrate reversing unit, and It is possible to change the direction of the short side and the long side along the substrate transport direction and to shorten the tact time.
  • the reversing mechanism in the polarizing film laminating apparatus of the thirteenth aspect of the present invention configured as described above is the reversing shaft of the reversing mechanism and the first substrate transport mechanism in any of the eighth to twelfth aspects. Since the substrate that has been transferred and the substrate that has been reversed and disposed on the second substrate transport mechanism by the substrate reversing unit are arranged on the same plane, one reversing operation of the substrate reversing unit allows While reversing the said board
  • the reversing mechanism in the polarizing film laminating apparatus of the fourteenth aspect of the present invention having the above-described structure is the eighth aspect or the thirteenth aspect, wherein the means provided in the reversing mechanism is configured to raise and lower the reversing shaft. Since the tilt and the position can be adjusted, the adjustment and control in the reversing operation of the substrate reversing unit can be achieved.
  • the reversing mechanism in the polarizing film laminating apparatus of the fifteenth aspect of the present invention having the above-described structure is the reversing mechanism according to any one of the eighth to fourteenth aspects, wherein two reversing mechanisms are arranged on both sides of the first substrate transport mechanism.
  • two substrate platforms on which the substrates transported by the first substrate transport mechanism are alternately transported are alternately transported.
  • the substrate transported to the section is alternately reversed by the two reversing mechanisms, and the arrangement is changed and disposed in the second substrate transporting mechanism, so that the tact time in transporting the substrate is halved.
  • the substrate carrying process can be doubled.
  • the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction, and the long side in the first substrate transport mechanism or
  • the second substrate transport mechanism includes a reversing mechanism that causes the short side or the long side to be along the transport direction in the second substrate transport mechanism, and the reversing mechanism sucks the substrate.
  • a suction part and a substrate reversing part connected to the suction part are provided, and the substrate reversing part turns the substrate by rotating along a reversing axis.
  • the reversing axis is in the plane of (1) below. In addition to being positioned, it is in the vertical position (2) below.
  • the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus according to the present invention is very simple to install and also has an effect of being excellent in area efficiency.
  • the manufacturing system includes a bonding apparatus according to the present invention.
  • FIG. 1 is a cross-sectional view showing a manufacturing system.
  • the manufacturing system 100 has a two-stage structure, the 1F (first floor) portion is a film transport mechanism 50, and the 2F (second floor) portion is a substrate transport mechanism (first substrate transport mechanism and It becomes the bonding apparatus 60 containing a 2nd board
  • the film transport mechanism 50 plays the role of unwinding the polarizing film (polarizing plate) and transporting it to the nip rolls 6 ⁇ 6a and 16 ⁇ 16a and winding up the peeling film that is no longer needed.
  • the bonding device 60 plays a role of bonding the polarizing film unwound by the film transport mechanism 50 to the substrate (liquid crystal panel) 5.
  • the film transport mechanism 50 includes a first film transport mechanism 51 and a second film transport mechanism 52.
  • the 1st film conveyance mechanism 51 conveys a polarizing film to the nip roll 6 * 6a which bonds a polarizing film to the lower surface of the board
  • the second film transport mechanism 52 transports the polarizing film to the bottom surface of the inverted substrate 5.
  • the first film transport mechanism 51 includes a first unwinding unit 1, a second unwinding unit 1a, a first winding unit 2, a second winding unit 2a, a half cutter 3, a knife edge 4, and a defect film winding roller. 7 ⁇ 7a.
  • the first unwinding unit 1 is provided with a polarizing film original, and the polarizing film is unwound.
  • a known polarizing film may be used as the polarizing film. Specifically, a polyvinyl alcohol film is dyed with iodine or the like, and a film stretched in a uniaxial direction can be used. Although it does not specifically limit as thickness of the said polarizing film, A polarizing film 5 micrometers or more and 400 micrometers or less can be used preferably.
  • the polarizing film has a pressure-sensitive adhesive layer protected by a release film.
  • a release film also referred to as a protective film or a separator
  • a polyester film, a polyethylene terephthalate film, or the like can be used.
  • the peeling film of 5 micrometers or more and 100 micrometers or less can be used preferably.
  • the manufacturing system 100 includes two unwinding portions and two unwinding portions corresponding to the unwinding portions, the first unwinding portion 1 has a low remaining amount of raw material. It is possible to connect the original fabric provided in the two unwinding portions 1 a to the original fabric of the first unwinding portion 1. As a result, it is possible to continue the operation without stopping the unwinding of the polarizing film. With this configuration, production efficiency can be increased.
  • a plurality of unwinding sections and winding sections may be provided, and three or more winding sections may be provided.
  • Half cutter (cutting unit) 3 half-cuts a polarizing film (a film laminate composed of a polarizing film, a pressure-sensitive adhesive layer and a peeling film) protected by a peeling film, and cuts the polarizing film and the pressure-sensitive adhesive layer.
  • a polarizing film a film laminate composed of a polarizing film, a pressure-sensitive adhesive layer and a peeling film
  • the half cutter 3 a known member may be used. Specifically, a cutter, a laser cutter, etc. can be mentioned. After the polarizing film and the pressure-sensitive adhesive layer are cut by the half cutter 3, the release film is removed from the polarizing film by the knife edge (removal part) 4.
  • the pressure-sensitive adhesive layer is not particularly limited, and examples thereof include acrylic, epoxy, and polyurethane pressure-sensitive adhesive layers.
  • the thickness of the pressure-sensitive adhesive layer is not particularly limited, but is usually 5 to 40 ⁇ m.
  • the 2nd film conveyance mechanism 52 is the structure similar to the 1st film conveyance mechanism 51, and is the 1st unwinding part 11, the 2nd unwinding part 11a, the 1st winding part 12, and the 2nd winding part 12a. , Half cutter 13, knife edge 14 and defect film winding rollers 17 and 17 a. About the member which attached
  • the manufacturing system 100 includes a cleaning unit 71.
  • the cleaning unit 71 cleans the substrate 5 before the polarizing film is bonded to the lower surface of the substrate 5 by the nip rolls 6 and 6a.
  • a known cleaning unit composed of a nozzle and a brush for injecting a cleaning liquid may be used. By cleaning the substrate 5 immediately before the bonding by the cleaning unit 71, the bonding can be performed in a state where there are few adhered foreign substances on the substrate 5.
  • FIG. 2 is a cross-sectional view showing a peripheral portion of the nip rolls 6 and 6a in the manufacturing system 100.
  • FIG. FIG. 2 shows a situation where the substrate 5 is conveyed from the left direction and the polarizing film 5a having an adhesive layer (not shown, the same hereinafter) is conveyed from the lower left direction.
  • the polarizing film 5a is provided with a release film 5b.
  • the polarizing film 5a and the pressure-sensitive adhesive layer are cut by the half cutter 3, and the release film 5b is not cut (half cut).
  • the knife edge 4 is installed on the peeling film 5b side.
  • the knife edge 4 is an edge-shaped member for peeling the peeling film 5b, and the polarizing film 5a and the peeling film 5b having a low adhesive force are peeled off along the knife edge 4.
  • the release film 5b is wound around the first winding portion 2 in FIG.
  • it can replace with a knife edge and can also use the structure which winds up a peeling film using an adhesion roller.
  • the winding efficiency of a peeling film can be improved by providing an adhesive roller in two places similarly to a winding part.
  • the bonding apparatus 60 conveys the board
  • clean air is supplied to the upper surface of the substrate 5 in the bonding apparatus 60. That is, downflow rectification is performed. Thereby, it is possible to perform conveyance and bonding of the substrate 5 in a stable state.
  • the bonding device 60 is provided on the upper part of the film transport mechanism 50. Thereby, space saving of the manufacturing system 100 can be achieved.
  • a substrate transport mechanism including a conveyor roll is installed in the bonding apparatus 60, whereby the substrate 5 is transported in the transport direction (first substrate transport mechanism 61 and second described later in FIG. 5).
  • the substrate transport mechanism 62 corresponds to the substrate transport mechanism).
  • the substrate 5 is transported from the left side, and then transported from the right side in the drawing, that is, from the top of the first film transport mechanism 51 to the top of the second film transport mechanism 52.
  • the nip rolls 6 * 6a (1st bonding part) and the nip rolls 16 * 16a (2nd bonding part) which are bonding parts are each provided.
  • the nip rolls 6, 6 a and 16, 16 a are members that serve to bond the polarizing film from which the release film has been removed to the lower surface of the substrate 5.
  • the substrate 5 is reversed by the reversing mechanism 65 after being bonded by the nip rolls 6 and 6a.
  • the reversing mechanism 65 will be described later.
  • the polarizing film conveyed to the nip rolls 6 and 6a is bonded to the lower surface of the substrate 5 through an adhesive layer.
  • known configurations such as a pressure roll and a pressure roll can be employed.
  • what is necessary is just to adjust the pressure and temperature at the time of bonding in the nip rolls 6 and 6a suitably.
  • the configuration of the nip rolls 16 and 16a is the same.
  • a defect display (mark) detection unit is provided between the first unwinding unit 1 and the half cutter, and a polarizing film having a defect is detected. It has a configuration.
  • the said defect display is provided at the time of the 1st unwinding part 11 or the 2nd unwinding part 11a rather than a defect display detection part by performing the detection at the time of original film production of a polarizing film, and providing a defect display. It attaches
  • the defect display imparting unit includes a camera, an image processing device, and a defect display forming unit. First, a polarizing film is imaged by the camera, and the presence or absence of a defect can be inspected by processing the imaging information. Specific examples of the drawback include foreign matters such as dust and fish eyes. When a defect is detected, a defect display is formed on the polarizing film by the defect display forming unit. A mark such as ink is used as the defect display.
  • a bonding avoiding unit discriminates the mark with a camera and transmits a stop signal to the bonding apparatus 60 to stop the conveyance of the substrate 5. Thereafter, the polarizing film in which the defect is detected is not bonded by the nip rolls 6 and 6a and is wound by the defect film winding roller (collecting unit) 7 and 7a. Thereby, pasting with substrate 5 and a polarizing film which has a fault can be avoided. If such a series of structures is provided, it is possible to avoid the bonding between the polarizing film having a defect and the substrate 5, so that the yield can be increased, which is preferable.
  • a publicly known inspection sensor can be used suitably as a fault detection part and a pasting avoidance part.
  • the substrate 5 is conveyed to the nip rolls 16 and 16a. Then, a polarizing film is bonded to the lower surface of the substrate 5. As a result, the polarizing film is bonded to both surfaces of the substrate 5, and the two polarizing films are bonded to both surfaces of the substrate 5 with different absorption axes. Thereafter, if necessary, the both sides of the substrate 5 are inspected for misalignment.
  • the inspection can be usually performed by an inspection unit equipped with a camera.
  • the bonding is performed from the lower surface of the substrate 5, and the rectifying environment to the substrate 5 is not hindered. For this reason, foreign matter mixing into the bonding surface of the substrate 5 can be prevented, and more accurate bonding can be performed.
  • FIG. 3 (a) and FIG. 3 (b) show the velocity vector of the airflow in the under-paste type manufacturing system similar to the present invention.
  • Regions A in FIGS. 3 (a) and 3 (b) are regions where the unwinding part is installed
  • region B is a region through which the polarizing film mainly passes
  • region C is a region where the winding unit and the like are installed. It is. Further, clean air is supplied from the HEPA filter 40.
  • FIG. 3A since the grating 41 through which clean air can pass is installed, the airflow can move in the vertical direction via the grating 41.
  • FIG. 3B since the grating 41 is not installed, the airflow moves along the floor after contacting the floor.
  • FIGS. 3 (a) and 3 (b) Since the manufacturing system shown in FIGS. 3 (a) and 3 (b) is a bottom-attached type, the air current from the HEPA filter 40 is not hindered by the polarizing film, as shown in FIGS. 9 (a) and 9 (b). For this reason, the direction of the airflow vector is almost directed toward the substrate, and it can be said that a preferable rectification environment is realized in the clean room.
  • the grating 41 is installed and not installed in FIG. 3 (b), but both drawings show the same preferable state.
  • the substrate transport mechanism is formed horizontally, but it is not installed as a series of structures. For this reason, the airflow can pass between the substrate transport mechanisms. After the substrate is held by a reversing mechanism to be described later, the substrate is transferred between the substrate transport mechanisms.
  • substrate 5 is first conveyed by a long side opening (a long side is orthogonal to a conveyance direction), and is conveyed by a short side opening (a short side is orthogonal to a conveyance direction) after that. It has become.
  • the reversing mechanism 65 changes the arrangement of the substrate 5 whose short side or long side is along the transport direction to a state where the long side or short side is along the transport direction and reversed.
  • 4A to 4C are perspective views showing a process of reversing the substrate 5 by the reversing mechanism 65.
  • FIG. 4A shows a state where the substrate 5 transported by the first substrate transport mechanism is adsorbed.
  • FIG. 4B shows a process of moving the substrate 5, and
  • FIG. 4C shows a state in which the substrate 5 is inverted by the second substrate inversion mechanism.
  • the first substrate transport mechanism and the second substrate transport mechanism are omitted in FIG. 4, but will be described later with reference to FIG.
  • the reversing mechanism 65 includes a suction unit 66, a substrate reversing unit 67, and a lifting unit 68.
  • the adsorption unit 66 is a member that adsorbs to the surface of the substrate 5.
  • the surface of the substrate 5 is held by the suction unit 66 by the suction unit 66.
  • a known adsorption unit can be used, and for example, an air suction type adsorption unit can be used.
  • the substrate reversing part 67 is connected to the suction part 66 and is formed so as to connect the suction part 66 and the lifting part 68.
  • the substrate reversing unit 67 reverses the substrate 5 by rotating around the reversing axis M.
  • the lifting / lowering portion 68 side of the substrate reversing portion 67 has a shape extending toward the substrate 5 in a direction perpendicular to the reversing axis M.
  • the suction unit 66 side of the substrate reversing unit 67 has a shape bent about 40 ° along a straight line passing through the center of the substrate 5 in the first substrate transport mechanism and parallel to the long side (transport direction) of the substrate 5. ing.
  • the shape of the substrate reversing part 67 shown in FIG. 4A is merely an example, and is not limited to the shape. As another shape, for example, instead of being bent like the substrate reversing portion 67, a shape that is curved from the lifting / lowering portion 68 side to the suction portion 66 side may be employed. Further, a structure having a plurality of movable parts such as a robot arm may be adopted.
  • the substrate reversing unit 67 is configured such that a movable unit that can rotate is provided in the lifting unit 68.
  • the movable part is arranged along the reversal axis M, and the substrate reversing part 67 is rotatable along the reversal axis M.
  • the inversion axis M includes (1) a straight line that passes through the center of the substrate 5 in the first substrate transport mechanism and has an inclination of 45 ° with respect to a straight line perpendicular to the transport direction of the substrate 5, and is perpendicular to the substrate 5. (Refer to FIG. 5A), and (2) located at a position horizontal to the substrate 5 (see FIG. 4A).
  • the inversion axis M is located in the plane and may be moved in the direction perpendicular to the substrate 5.
  • the substrate reversing unit 67 is configured to rotate along the reversing axis M via the movable unit, but is not limited to this structure as long as it can be rotated along the reversing axis M.
  • the substrate reversing unit 67 has a rotating shaft structure, and the rotation shaft structure rotates along the reversing axis M and the entire substrate reversing unit 67 rotates.
  • the substrate reversing part 67 is rotated by a driving device such as a motor (not shown).
  • the substrate reversing unit 67 can reverse the substrate 5 by one rotation about the reversing axis M. Inversion means that the substrate 5 is rotated to the opposite surface. In other words, the substrate 5 is disposed so that the front surface of the substrate 5 is the back surface.
  • the elevating part 68 has an arm shape with a bent part, and the substrate reversing part 67 can be raised by reducing the angle of the arm. On the other hand, the substrate inversion part 67 can be lowered by increasing the angle of the arm.
  • the suction unit 66 is disposed above the substrate 5 so as not to contact the substrate 5 when the substrate 5 is not being transported. When the substrate 5 is transferred, the substrate reversing unit 67 is lowered and the adsorption unit 66 is also lowered by the elevating unit 68, so that the substrate 5 can be adsorbed by the adsorption unit 66.
  • the adsorption of the adsorption unit 66 is released, but after the release, the substrate reversing unit 67 is moved by the lifting unit 68 and the adsorption unit 66 is separated from the substrate 5.
  • FIG. 4A shows a case where the short side of the substrate 5 is along the transport direction.
  • the substrate inversion unit 67 rotates along the inversion axis M.
  • the vicinity of the center of the substrate 5 is adsorbed by the adsorbing portion 66, but the adsorbing portion is not particularly limited as long as the substrate 5 is fixed so as not to come off during rotation. Further, the number of adsorption locations is not limited to 4 and may be increased or decreased.
  • FIG. 4B shows a state in which the substrate reversing unit 67 is rotated by 90 ° with respect to the substrate 5 (in the first substrate transport mechanism) in FIG. 4B, the substrate reversing unit 67 continues to rotate and the substrate 5 is reversed as shown in FIG. 4C.
  • the direction of the short side and the long side of the substrate 5 can be changed and reversed by the rotating operation of the reversing mechanism 65 1. That is, the substrate 5 can be reversed with a short tact time without complicated rotation operation. As a result, the polarizing film can be bonded to the substrate 5 including reversal in a short tact time.
  • a substrate reversing unit 67 is installed on the transport direction side with respect to the substrate 5 in FIG.
  • the second substrate transport mechanism can be reversed in a state where the substrate 5 is moved further in the transport direction.
  • the tact time concerning double-sided bonding including reversal can be further shortened.
  • FIG. 5 is a plan view showing the rotation process of the substrate 5 corresponding to FIG.
  • FIG. 5 illustrates the first substrate transport mechanism 61 and the second substrate transport mechanism 62.
  • the first substrate transport mechanism 61 and the second substrate transport mechanism 62 are provided with a conveyor roll.
  • the first substrate transport mechanism 61 and the second substrate transport mechanism 62 transport the substrate 5 in the same direction.
  • the first substrate transport mechanism 61 and the second substrate transport mechanism 62 have a linear shape along the transport direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus 60 according to the present invention is very simple to install and has a structure with excellent area efficiency.
  • the substrate reversing portion 67 is rotated by 90 ° so that the substrate 5 is vertical.
  • the substrate reversing unit 67 further rotates along the direction of the reversal axis M, and the substrate 5 is reversed.
  • the substrate 5 is disposed on a conveyor roll (not shown), and the substrate reversing unit 67 does not contact the conveyor roll. For this reason, the reversing mechanism 65 is located below the substrate 5.
  • the suction of the suction part 66 is released, whereby the holding of the substrate 5 is released, and the substrate 5 is transported by the second substrate transport mechanism 62. Then, the reversing mechanism 65 returns to the position shown in FIG. 5A and reverses the other substrates 5 that are sequentially conveyed by the same operation.
  • the substrate 5 can be reversed by the operation of 1, and the long side and the short side with respect to the transport direction can be changed.
  • a polarizing film is bonded to the lower surface of the substrate 5, and after performing the reversing operation, a polarizing film can be further bonded to the lower surface of the reversed substrate 5. .
  • the reversing operation is a simple rotating operation, and the tact time is short because of one operation. Therefore, it is possible to realize bonding with a short tact time without disturbing the rectification environment.
  • the reversing operation of the substrate reversing unit 67 is one operation. However, even if the operation of moving the substrate 5 up and down and / or adjusting the position of the substrate reversing unit 67 is included before and after the operation, the present invention Are included in the operation of the reversing mechanism 65.
  • the first substrate transport mechanism 61 and the second substrate transport mechanism 62 transport the substrate 5 in the same direction, and have a structure adjacent to each other. This is because, as shown in FIG. 5C, the substrate reversing unit 67 replaces the short side and the long side with respect to the transport direction of the substrate 5, so This is because the transport directions in the transport mechanism 61 are not positioned on a straight line with each other, and a shift occurs.
  • the first substrate transport mechanism 61 and the second substrate transport mechanism 62 do not necessarily have to be adjacent to each other, and the first substrate transport mechanism 61 and the second substrate transport mechanism 62 may be spaced from each other.
  • the substrate reversing unit 67 is provided on the transport direction side with respect to the substrate 5 before reversal.
  • the reversing mechanism 65 may be arranged as shown in FIG. In this case, the substrate 5 cannot be moved further in the transport direction, but it is possible to deal with restrictions such as the arrangement of the reversing mechanism 65.
  • FIG. 6 is a plan view showing a modification of the bonding apparatus 60. Changes in the modification include (1) two reversing mechanisms 65, (2) two substrate mounting portions 61 a on both sides of the first substrate transport mechanism 61, and (3 ) The first substrate transport mechanism 61 and the second substrate transport mechanism 62 are arranged on a straight line. The first substrate transport mechanism 61 and the second substrate transport mechanism 62 are the same in that the substrate 5 is transported in the same direction.
  • the substrate platform 61a and the reversing mechanism 65 are arranged at both ends of the first substrate transport mechanism 61 on the second substrate transport mechanism 62 side, which are horizontal with respect to the transport direction of the first substrate transport mechanism 61 at the end. Are provided along.
  • the reversing mechanism 65 is the same as the structure described in FIGS.
  • the end region 61b is provided with transport means for transporting the substrate 5 to the substrate platform 61a.
  • a conveyor roll can be mentioned, for example.
  • the substrate mounting portion 61a is a place where the substrate 5 is placed by the suction portion 66. According to the modification, the substrates 5 transported to the first substrate transport mechanism 61 are transported alternately to the two substrate platforms 61a. Since two pairs of the substrate platform 61a and the reversing mechanism 65 are provided, the substrate 5 transported to the substrate platform 61a is inverted by the reversing mechanism 65 by one operation.
  • the two substrate platforms 61 a are provided along both horizontal directions of the first substrate transport mechanism 61, and the inverted substrate 5 is along the transport direction of the first substrate transport mechanism 61. Will be placed. Therefore, the first substrate transport mechanism 61 and the second substrate transport mechanism 62 can be arranged on a straight line.
  • the substrate 5 can be processed twice per unit time. Thereby, since many substrates 5 can be reversed per unit time, the tact time is shortened.
  • the bonding apparatus of the structure excellent in area efficiency can be provided. Especially in a clean room, since the area efficiency is required, the bonding apparatus is very preferable.
  • the manufacturing system 100 includes a control unit 70, a cleaning unit 71, a misalignment inspection device 72, a bonded foreign matter automatic inspection device 73, and a sorting and conveying device 74.
  • the bonding deviation inspection device 72, the bonded foreign substance automatic inspection device 73, and the sorting and conveying device 74 perform processing such as inspection on the substrate 5 after bonding, that is, the liquid crystal display device.
  • FIG. 7 is a block diagram showing the relation of each member provided in the above-described liquid crystal display device manufacturing system
  • FIG. 8 is a flowchart showing the operation of the liquid crystal display device manufacturing system.
  • the operation of the liquid crystal display device will be described together with the description of each member.
  • the control unit 70 is connected to the cleaning unit 71, the misalignment inspection device 72, the bonded foreign matter automatic inspection device 73, and the sorting and conveying device 74, and controls them by transmitting control signals thereto.
  • the control unit 70 is mainly configured by a CPU (Central Processing Unit) and includes a memory or the like as necessary.
  • CPU Central Processing Unit
  • the cleaning unit 71 In the case where the cleaning unit 71 is provided in the manufacturing system 100, the substrate 5 in the first substrate transport mechanism 61 is transported to the cleaning unit 71 at the front edge of the long side in order to reduce the tact time in the cleaning unit 71. Is preferred. Usually, since the cleaning in the cleaning unit 71 takes a long time, this configuration is very effective from the viewpoint of shortening the tact time.
  • a bonding step (including a reversing operation of the substrate 5) for bonding the polarizing film to both surfaces of the substrate 5 is performed (S2 in FIG. 8). This step will be described with reference to FIGS. That's right.
  • the sticking deviation inspection device 72 is for inspecting the presence or absence of sticking deviation of the polarizing film on the bonded substrate 5.
  • the sticking deviation inspection device 72 is constituted by a camera and an image processing device, and the camera is installed at the bonding position of the substrate 5 on which the polarizing film is bonded by the nip rolls 16 and 16a.
  • the substrate 5 is photographed by the camera, and the photographed image information is processed, whereby it is possible to inspect whether or not there is a sticking deviation on the substrate 5 (sticking deviation inspection step, S3 in FIG. 8).
  • the misalignment inspection apparatus 72 a conventionally known misalignment inspection apparatus can be used as the misalignment inspection apparatus 72.
  • the bonded foreign matter automatic inspection device 73 inspects the presence or absence of foreign matter on the bonded substrate 5.
  • the bonded foreign matter automatic inspection device 73 is configured by a camera and an image processing device, like the misalignment inspection device 72, and transports the second substrate of the substrate 5 after the polarizing film is bonded by the nip rolls 16 and 16a.
  • the camera is installed in the mechanism (bonding device 60).
  • substrate 5 is image
  • the foreign matter include foreign matters such as dust, fish eyes, and the like.
  • a conventionally well-known bonding foreign material inspection apparatus can be used as the bonding foreign material automatic inspection apparatus 73.
  • S3 and S4 may be performed in the reverse order or simultaneously. One step can be omitted.
  • the sorting and conveying device 74 determines the presence or absence of sticking misalignment and foreign matter based on the inspection results from the sticking misalignment inspection device 72 and the bonded foreign matter automatic inspection device 73.
  • the sorting and conveying device 74 only needs to receive an output signal based on the inspection result from the sticking misalignment inspection device 72 and the bonding foreign matter automatic inspection device 73 and can sort the bonded substrates 5 into non-defective products or defective products. . Therefore, a conventionally known sorting and conveying system can be used.
  • both the misalignment and foreign matter are detected.
  • the bonded substrate 5 is not used. Sorted as good (S7).
  • the bonded substrates 5 are classified as non-defective products (S6).
  • the non-defective product and the defective product can be quickly sorted, and the tact time can be shortened.
  • the sorting and conveying device 74 may be configured to determine the presence / absence of only one of the sticking misalignment and the foreign matter.
  • the polarizing film bonding apparatus according to the present invention can be used in the field of bonding a polarizing film to a substrate.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Polarising Elements (AREA)

Abstract

Mécanisme de transport de substrat et dispositif de laminage de film polarisant comprenant un premier mécanisme de transport de substrat (61) qui achemine un substrat rectangulaire (5)dans un état où soit le côté long, soit le côté court du substrat est orienté dans le sens d'avance, et un second mécanisme de transport de substrat (62) dans lequel le substrat susmentionné (5) est acheminé dans un état où le côté court ou le côté long est orienté dans le sens d'avance. Le mécanisme d'inversion du mécanisme de transport de substrat et du dispositif de laminage de film polarisant est muni d'un mécanisme d'inversion (65) conçu pour que le substrat susmentionné (5) acheminé par ledit dispositif (61) soit inversé par le mécanisme d'inversion de substrat (67) et soit repositionné sur ledit mécanisme (62).
PCT/JP2011/001869 2010-03-30 2011-03-29 Mécanisme d'inversion dans un mécanisme de transport de substrat et dans un dispositif de laminage de film polarisant Ceased WO2011122005A1 (fr)

Priority Applications (2)

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CN201180017069.XA CN102822727B (zh) 2010-03-30 2011-03-29 基板输送机构以及偏振膜的贴合装置中的翻转机构
KR1020127014501A KR101419619B1 (ko) 2010-03-30 2011-03-29 기판 반송 기구 및 편광 필름의 접합 장치에서의 반전 기구

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PCT/JP2011/001865 Ceased WO2011122001A1 (fr) 2010-03-30 2011-03-29 Dispositif de stratification de film de polarisation et système de fabrication de dispositif d'affichage à cristaux liquides le comportant

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JP6064684B2 (ja) * 2013-03-05 2017-01-25 三星ダイヤモンド工業株式会社 基板処理システムおよび基板反転装置
JP6127707B2 (ja) * 2013-05-16 2017-05-17 住友化学株式会社 光学表示デバイスの生産システム及び生産方法
JP6178660B2 (ja) * 2013-08-08 2017-08-09 住友化学株式会社 光学表示デバイスの生産システム
CN104678612B (zh) * 2013-11-29 2018-12-14 芝浦机械电子装置株式会社 基板贴合装置、显示面板制造装置及显示面板制造方法
TWI548110B (zh) * 2015-01-12 2016-09-01 精曜有限公司 基板自動傳輸系統
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KR20130018221A (ko) 2013-02-20
TW201145436A (en) 2011-12-16
CN102822727A (zh) 2012-12-12
CN102472902A (zh) 2012-05-23
KR101140872B1 (ko) 2012-05-03
TW201137464A (en) 2011-11-01
TWI517285B (zh) 2016-01-11
CN102472902B (zh) 2014-02-05
TWI401503B (zh) 2013-07-11

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