WO2012015152A3 - 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법 - Google Patents

삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법 Download PDF

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Publication number
WO2012015152A3
WO2012015152A3 PCT/KR2011/003249 KR2011003249W WO2012015152A3 WO 2012015152 A3 WO2012015152 A3 WO 2012015152A3 KR 2011003249 W KR2011003249 W KR 2011003249W WO 2012015152 A3 WO2012015152 A3 WO 2012015152A3
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WIPO (PCT)
Prior art keywords
manufacturing
silicon
reaction
trichlorosilane
active carbon
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Ceased
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PCT/KR2011/003249
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English (en)
French (fr)
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WO2012015152A2 (ko
Inventor
양오봉
심경보
곽도환
오대웅
콩마니싼티
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Industry Academic Cooperation Foundation of Chonbuk National University
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Industry Academic Cooperation Foundation of Chonbuk National University
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Publication of WO2012015152A2 publication Critical patent/WO2012015152A2/ko
Publication of WO2012015152A3 publication Critical patent/WO2012015152A3/ko
Anticipated expiration legal-status Critical
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/18—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/02—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the alkali- or alkaline earth metals or beryllium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/755—Nickel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/78—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with alkali- or alkaline earth metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/60—Catalysts, in general, characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J35/61—Surface area
    • B01J35/613—10-100 m2/g
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/0201—Impregnation
    • B01J37/0207—Pretreatment of the support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/08—Heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/08—Heat treatment
    • B01J37/10—Heat treatment in the presence of water, e.g. steam
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)

Abstract

본 발명은 태양전지용 실리콘 웨이퍼를 만들 때 부산물로 나오는 사염화규소(silicon tetrachloride, SiCl4)를 삼염화실란(trichlorosilane, HSiCl3)으로 전환하는 탈염소수소화 반응에 사용되는 촉매로서, 1) 활성탄, 2) 스팀 등으로 전처리한 활성탄, 3) 실리콘과 염소가 도입된 활성탄을 스팀 등으로 전처리하여 제조한 촉매, 4) 실리콘과 염소가 도입된 활성탄을 스팀 등으로 전처리한 후 니켈, 코발트, 구리, 칼슘, 스트론튬, 바륨 중 어느 하나의 금속을 도입한 촉매 및 그 제조방법에 관한 것이다. 본 발명에 의한 4종류의 촉매는 사염화규소의 탈염소수소화반응으로 삼염화실란을 제조하는 경우 반응압력 1~5기압, 반응온도 600~900, 반응시간 5~9시간에서 삼염화실란의 수율이 9~31%에 달하게 된다. 이는 태양전지용 폴리실리콘 제조 과정에서 발생되는 주된 부산물인 사염화규소를 재사용함으로써 실리콘계 태양전지 소재인 폴리실리콘의 제조비용을 획기적으로 절감할 수 있을 뿐만 아니라, 반응온도 및 압력이 낮음에도 수율 향상 및 에너지 절감을 할 수 있어 경제적인 효과를 높일 수 있는 장점이 있다.
PCT/KR2011/003249 2010-07-27 2011-05-02 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법 Ceased WO2012015152A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0072360 2010-07-27
KR1020100072360A KR100984942B1 (ko) 2010-07-27 2010-07-27 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법

Publications (2)

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WO2012015152A2 WO2012015152A2 (ko) 2012-02-02
WO2012015152A3 true WO2012015152A3 (ko) 2012-04-19

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PCT/KR2011/003249 Ceased WO2012015152A2 (ko) 2010-07-27 2011-05-02 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법

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WO (1) WO2012015152A2 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014116341A1 (en) * 2013-01-25 2014-07-31 Dow Corning Corporation Mehtod for preparing a trihalosilane
JP2018503589A (ja) * 2014-12-18 2018-02-08 ヘムロック・セミコンダクター・オペレーションズ・エルエルシー ハロシランを水素化する方法
KR101657987B1 (ko) * 2015-05-11 2016-09-21 한국과학기술연구원 글리세롤 탈수반응용 니오븀계 무정형 촉매 및 이의 제조방법
EP3098201A1 (de) * 2015-05-27 2016-11-30 Evonik Degussa GmbH Verfahren zur katalytischen dehalogenierung von chlorsilanen
KR102242019B1 (ko) * 2018-07-25 2021-04-19 주식회사 에이시티 표면개질된 활성탄을 이용하는 축산용 탈취제
CN113533600B (zh) * 2021-08-09 2022-02-22 江苏鑫华半导体材料科技有限公司 一种三氯硅烷的检测前处理方法及检测方法
CN114011451B (zh) * 2021-11-30 2023-09-12 新特能源股份有限公司 一种铜硅系催化剂及其制备方法
CN114505084B (zh) * 2022-01-18 2023-09-12 石河子大学 一种氯化亚铜催化剂的预处理方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4217334A (en) * 1972-02-26 1980-08-12 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Process for the production of chlorosilanes
JPS56169119A (en) * 1980-05-27 1981-12-25 Mitsubishi Metal Corp Manufacture of trichlorosilane
US5869017A (en) * 1997-05-12 1999-02-09 Tokuyama Corporation Method of producing trichlorosilane having a reduced content of dichlorosilane
US20090035205A1 (en) * 2004-04-23 2009-02-05 Degussa Ag PROCESS FOR PREPARING HSiCI3 BY CATALYTIC HYDRODEHALOGENATION OF SiCl4

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4217334A (en) * 1972-02-26 1980-08-12 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Process for the production of chlorosilanes
JPS56169119A (en) * 1980-05-27 1981-12-25 Mitsubishi Metal Corp Manufacture of trichlorosilane
US5869017A (en) * 1997-05-12 1999-02-09 Tokuyama Corporation Method of producing trichlorosilane having a reduced content of dichlorosilane
US20090035205A1 (en) * 2004-04-23 2009-02-05 Degussa Ag PROCESS FOR PREPARING HSiCI3 BY CATALYTIC HYDRODEHALOGENATION OF SiCl4

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KR100984942B1 (ko) 2010-10-01

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