WO2012108654A3 - 퓸 제거장치 및 이를 이용한 반도체 제조장치 - Google Patents

퓸 제거장치 및 이를 이용한 반도체 제조장치 Download PDF

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Publication number
WO2012108654A3
WO2012108654A3 PCT/KR2012/000863 KR2012000863W WO2012108654A3 WO 2012108654 A3 WO2012108654 A3 WO 2012108654A3 KR 2012000863 W KR2012000863 W KR 2012000863W WO 2012108654 A3 WO2012108654 A3 WO 2012108654A3
Authority
WO
WIPO (PCT)
Prior art keywords
fume
fumes
rack
same
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2012/000863
Other languages
English (en)
French (fr)
Other versions
WO2012108654A2 (ko
WO2012108654A9 (ko
Inventor
우범제
김상현
박노영
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=44047384&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2012108654(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Individual filed Critical Individual
Publication of WO2012108654A2 publication Critical patent/WO2012108654A2/ko
Publication of WO2012108654A9 publication Critical patent/WO2012108654A9/ko
Publication of WO2012108654A3 publication Critical patent/WO2012108654A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0462—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the processing chambers, e.g. modular processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning In General (AREA)

Abstract

본 발명은 퓸 제거장치 및 이를 이용한 반도체 제조장치에 관한 것으로, 본 발명의 퓸 제거장치는 상하로 분리되는 몸체, 상기 몸체 상측에 구비되어 웨이퍼를 수납하는 적재대, 상기 몸체 상측에 구비되어 상기 적재대에 진입하는 웨이퍼를 샤워하는 에어커튼, 상기 적재대에 적재된 웨이퍼로부터 퓸을 흡기하는 흡기부재 및 흡기된 퓸을 배기하는 배기부재;로 이루어지는 것을 특징으로 한다. 따라서, 본 발명에 따르면 공정 중 기판에 잔존하는 퓸(fume)을 제거하여 기판 및 공정에 이용되는 장치들의 손상을 최소화함으로써 공정 수율을 증대시킬 수 있는 효과가 있다.
PCT/KR2012/000863 2011-02-07 2012-02-07 퓸 제거장치 및 이를 이용한 반도체 제조장치 Ceased WO2012108654A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110010653A KR101090350B1 (ko) 2011-02-07 2011-02-07 퓸 제거장치 및 이를 이용한 반도체 제조장치
KR10-2011-0010653 2011-02-07

Publications (3)

Publication Number Publication Date
WO2012108654A2 WO2012108654A2 (ko) 2012-08-16
WO2012108654A9 WO2012108654A9 (ko) 2012-10-18
WO2012108654A3 true WO2012108654A3 (ko) 2012-12-06

Family

ID=44047384

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/000863 Ceased WO2012108654A2 (ko) 2011-02-07 2012-02-07 퓸 제거장치 및 이를 이용한 반도체 제조장치

Country Status (2)

Country Link
KR (1) KR101090350B1 (ko)
WO (1) WO2012108654A2 (ko)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201413780A (zh) * 2012-09-24 2014-04-01 尤金科技有限公司 煙氣移除設備及基板處理設備
KR101444241B1 (ko) 2013-01-14 2014-09-26 우범제 웨이퍼 처리장치의 배기시스템
KR101366135B1 (ko) * 2013-10-10 2014-02-25 주식회사 엘에스테크 포스트 퍼지 장치
KR102164544B1 (ko) 2014-01-22 2020-10-12 삼성전자 주식회사 가스 충진부를 구비하는 웨이퍼 스토리지 장치를 포함하는 반도체 제조 장치
KR101724451B1 (ko) * 2015-03-19 2017-04-07 주식회사 이오테크닉스 수지 도포 장치에서 발생되는 퓸을 제거하는 장치 및 이를 포함하는 보호막형성 시스템
KR101637498B1 (ko) 2015-03-24 2016-07-07 피코앤테라(주) 웨이퍼 수납용기
KR101600307B1 (ko) * 2015-10-13 2016-03-08 오션브릿지 주식회사 회전식 퓸 제거 웨이퍼 스토리지
KR200483073Y1 (ko) * 2016-07-15 2017-04-11 오션브릿지 주식회사 웨이퍼 스토리지용 퓸 제거 장치
KR101756743B1 (ko) * 2016-12-30 2017-07-12 김태훈 웨이퍼 가공 설비용 버퍼 챔버 유닛
KR101867997B1 (ko) * 2017-03-22 2018-06-15 우범제 퓸 제거 장치
KR101868001B1 (ko) * 2017-03-22 2018-06-15 우범제 퓸 제거 장치
KR101980437B1 (ko) * 2017-07-28 2019-06-24 오션브릿지 주식회사 관리효율이 향상된 웨이퍼 자동 관리 장치용 챔버
KR101874809B1 (ko) * 2018-02-08 2018-07-05 김원기 오염물질 배출 장치
KR102120704B1 (ko) * 2018-09-28 2020-06-10 무진전자 주식회사 에어 커튼을 이용한 케미컬 퓸 제거장치
US11508593B2 (en) * 2018-10-26 2022-11-22 Applied Materials, Inc. Side storage pods, electronic device processing systems, and methods for operating the same
KR102479895B1 (ko) 2020-07-03 2022-12-21 우범제 웨이퍼 수납용기
KR102528927B1 (ko) 2021-05-07 2023-05-03 피코앤테라(주) 웨이퍼 수납용기

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040086056A (ko) * 2003-06-03 2004-10-08 김원기 웨이퍼 에치용 배출장치
KR100589107B1 (ko) * 2005-01-19 2006-06-12 삼성전자주식회사 기판 상의 막을 베이크하는 방법 및 이를 수행하기 위한장치
KR20060065186A (ko) * 2004-12-10 2006-06-14 삼성전자주식회사 흄제거 기능을 갖는 반도체 제조설비
KR20070057470A (ko) * 2005-12-02 2007-06-07 주식회사 케이씨텍 배스의 흄 유출 방지장치 및 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040086056A (ko) * 2003-06-03 2004-10-08 김원기 웨이퍼 에치용 배출장치
KR20060065186A (ko) * 2004-12-10 2006-06-14 삼성전자주식회사 흄제거 기능을 갖는 반도체 제조설비
KR100589107B1 (ko) * 2005-01-19 2006-06-12 삼성전자주식회사 기판 상의 막을 베이크하는 방법 및 이를 수행하기 위한장치
KR20070057470A (ko) * 2005-12-02 2007-06-07 주식회사 케이씨텍 배스의 흄 유출 방지장치 및 방법

Also Published As

Publication number Publication date
WO2012108654A2 (ko) 2012-08-16
WO2012108654A9 (ko) 2012-10-18
KR101090350B1 (ko) 2011-12-07
KR20110041445A (ko) 2011-04-21

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