WO2012111963A3 - 기재 필름 및 그의 제조방법 - Google Patents

기재 필름 및 그의 제조방법 Download PDF

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Publication number
WO2012111963A3
WO2012111963A3 PCT/KR2012/001111 KR2012001111W WO2012111963A3 WO 2012111963 A3 WO2012111963 A3 WO 2012111963A3 KR 2012001111 W KR2012001111 W KR 2012001111W WO 2012111963 A3 WO2012111963 A3 WO 2012111963A3
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Prior art keywords
substrate film
present
manufacturing same
wafer
stress
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Ceased
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PCT/KR2012/001111
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English (en)
French (fr)
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WO2012111963A2 (ko
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주효숙
김세라
심정섭
장석기
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LG Chem Ltd
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LG Chem Ltd
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Priority to CN201280018385.3A priority Critical patent/CN103492466B/zh
Priority to EP12747060.7A priority patent/EP2676991B1/en
Publication of WO2012111963A2 publication Critical patent/WO2012111963A2/ko
Publication of WO2012111963A3 publication Critical patent/WO2012111963A3/ko
Priority to US13/967,060 priority patent/US9236303B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
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    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
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    • C09J7/00—Adhesives in the form of films or foils
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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Adhesive Tapes (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Laminated Bodies (AREA)
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  • Mechanical Treatment Of Semiconductor (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

본 발명은, 기재 필름 및 그의 제조방법에 관한 것이다. 본 발명에서는, 우수한 내열성 및 치수 안정성을 나타내는 기재 필름을 제공할 수 있으며, 상기 기재 필름은 응력 완화성이 탁월하여 잔류 응력에 의한 웨이퍼의 파손을 방지할 수 있고, 웨이퍼 가공 과정에서의 불균일한 압력의 인가에 의한 웨이퍼의 손상이나 비산 등을 억제할 수 있으며, 탁월한 절단성을 나타낸다. 이에 따라 본 발명의 기재 필름은, 다이싱, 백그라인딩 또는 픽업 등을 포함한 각종 웨이퍼 가공 공정에서의 가공용 시트로서 효과적으로 사용될 수 있다.
PCT/KR2012/001111 2011-02-14 2012-02-14 기재 필름 및 그의 제조방법 Ceased WO2012111963A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201280018385.3A CN103492466B (zh) 2011-02-14 2012-02-14 衬底膜及其制备方法
EP12747060.7A EP2676991B1 (en) 2011-02-14 2012-02-14 Substrate film and method for manufacturing same
US13/967,060 US9236303B2 (en) 2011-02-14 2013-08-14 Substrate film and method of manufacturing the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0012989 2011-02-14
KR20110012989 2011-02-14
KR10-2012-0014775 2012-02-14
KR1020120014775A KR101548784B1 (ko) 2011-02-14 2012-02-14 기재 필름 및 그의 제조방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/967,060 Continuation US9236303B2 (en) 2011-02-14 2013-08-14 Substrate film and method of manufacturing the same

Publications (2)

Publication Number Publication Date
WO2012111963A2 WO2012111963A2 (ko) 2012-08-23
WO2012111963A3 true WO2012111963A3 (ko) 2012-12-20

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ID=46884811

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Application Number Title Priority Date Filing Date
PCT/KR2012/001111 Ceased WO2012111963A2 (ko) 2011-02-14 2012-02-14 기재 필름 및 그의 제조방법

Country Status (5)

Country Link
US (1) US9236303B2 (ko)
EP (1) EP2676991B1 (ko)
KR (1) KR101548784B1 (ko)
CN (1) CN103492466B (ko)
WO (1) WO2012111963A2 (ko)

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WO2015002270A1 (ja) * 2013-07-05 2015-01-08 リンテック株式会社 ダイシングシート
JP5822052B1 (ja) * 2013-12-25 2015-11-24 Dic株式会社 紫外線硬化型粘着剤組成物、粘着フィルム、及び、粘着フィルムの製造方法
JP2015193706A (ja) * 2014-03-31 2015-11-05 リンテック株式会社 導電性基板用表面保護フィルムの製造方法
TWI545996B (zh) * 2014-04-23 2016-08-11 財團法人工業技術研究院 基板結構、其製造方法、及電子裝置之製造方法
WO2017154226A1 (ja) * 2016-03-09 2017-09-14 三菱樹脂株式会社 粘着フィルム及びその製造方法
KR102090041B1 (ko) * 2016-03-25 2020-03-18 주식회사 엘지화학 점착제 조성물 및 점착 테이프
KR102487395B1 (ko) * 2016-09-20 2023-01-11 동우 화인켐 주식회사 점착제 조성물 및 그를 이용한 점착 시트
JP6298226B1 (ja) * 2017-03-30 2018-03-20 リンテック株式会社 保護膜形成用複合シート
KR20180136712A (ko) * 2017-06-15 2018-12-26 동우 화인켐 주식회사 점착제 조성물 및 그를 이용한 점착 시트
JP6467548B1 (ja) * 2017-09-28 2019-02-13 日東電工株式会社 補強フィルム
KR102031799B1 (ko) * 2017-12-22 2019-10-14 동우 화인켐 주식회사 점착제 조성물, 이를 이용하여 제조된 점착시트, 광학부재 및 표시장치
KR102239210B1 (ko) * 2018-06-04 2021-04-09 주식회사 엘지화학 백 그라인딩 테이프
WO2019245246A1 (ko) * 2018-06-20 2019-12-26 주식회사 엘지화학 점착제 조성물
KR102220313B1 (ko) 2018-06-20 2021-02-25 주식회사 엘지화학 점착제 조성물
JP7295774B2 (ja) * 2018-10-31 2023-06-21 三洋化成工業株式会社 粘着剤組成物
CN116529074A (zh) * 2020-10-29 2023-08-01 日东电工株式会社 粘合片用树脂及粘合片
WO2022092090A1 (ja) * 2020-10-29 2022-05-05 日東電工株式会社 粘着シート用樹脂および粘着シート
JP7705725B2 (ja) * 2021-03-26 2025-07-10 リンテック株式会社 ワーク処理用シートおよび処理済みワーク製造方法

Citations (4)

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EP2676991B1 (en) 2020-07-15
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