WO2012127104A1 - Appareil pour suivre des particules - Google Patents

Appareil pour suivre des particules Download PDF

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Publication number
WO2012127104A1
WO2012127104A1 PCT/FI2012/050246 FI2012050246W WO2012127104A1 WO 2012127104 A1 WO2012127104 A1 WO 2012127104A1 FI 2012050246 W FI2012050246 W FI 2012050246W WO 2012127104 A1 WO2012127104 A1 WO 2012127104A1
Authority
WO
WIPO (PCT)
Prior art keywords
sample
flow
ejector
aerosol
supply channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FI2012/050246
Other languages
English (en)
Inventor
Kauko Janka
Jan Landkammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pegasor Oy
Original Assignee
Pegasor Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pegasor Oy filed Critical Pegasor Oy
Priority to JP2014600002U priority Critical patent/JP3189910U/ja
Priority to CN201290000376.7U priority patent/CN203705221U/zh
Priority to DE212012000076U priority patent/DE212012000076U1/de
Publication of WO2012127104A1 publication Critical patent/WO2012127104A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38—Diluting, dispersing or mixing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G01N2001/2264—Sampling from a flowing stream of gas with dilution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G01N2001/242—Injectors or ejectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0038—Investigating nanoparticles

Definitions

  • the present invention relates to an apparatus for monitoring particles and especially to an apparatus as defined in the preamble of independent claim 1 .
  • Fine particles are formed in many industrial processes and combustion processes. Furthermore, fine particles exist in breathing air flowing in ducts and ventilation systems and in room spaces. For various reasons these fine particles are measured. The fine particle measurements may be conducted because of their potential health effects and also for monitoring operation of industrial processes and combustion processes. The fine particles are also measured in ventilation systems for monitoring air quality. Another reason for monitoring fine particles is the increasing use and production of nanosized particles in industrial processes. The above reasons there is need for reliable fine particle measurement equipments and methods.
  • the clean gas flow and the ejector together cause suction to the sample inlet such that a sample aerosol flow is formed from the duct or the space to the inlet chamber.
  • the sample aerosol flow is thus provided as a side flow to the ejector.
  • the ionized clean gas charges the particles.
  • the charged particles may be further conducted back to the duct or space containing the aerosol.
  • the fine particles of the aerosol sample are thus monitored by monitoring the electrical charge carried by the electrically charged particles. Free ions may removed further be removed using an ion trap.
  • fine particle monitoring apparatuses One important demand for the fine particle monitoring apparatuses is reliable operation and efficient operation. Furthermore, it is also preferable that these fine particle monitoring apparatuses may be operated with low energy consumption and continuously for conducting fine particle measurements in real-time.
  • the object of the present invention is to provide an apparatus so as to overcome or at least alleviate the prior art disadvantages.
  • the objects of the present invention are achieved with an apparatus according to the characterizing portion of claim 1 , which apparatus comprises a sample supply channel arranged between the sample inlet and the inlet chamber for mixing the sample aerosol to the essentially particle free gas flow.
  • the present invention is based on the idea of providing an apparatus for monitoring particles in a channel or a space comprising aerosol in which apparatus the sample aerosol is supplied to the apparatus essentially as a countercurrent against the essentially particle free gas.
  • the sample aerosol flow is guided at least partly in opposite direction to essentially particle free gas flow for mixing the sample aerosol to the essentially particle free gas flow.
  • the sample aerosol may be directed directly in opposite direction to the essentially particle free gas flow or at an angle against the essentially particle free gas flow.
  • the sample aerosol flow is supplied to the apparatus and towards essentially particle free ionized gas flow such that the flow direction of the sample aerosol has a flow component in opposite direction to the essentially particle free ionized gas flow.
  • the object of present invention is achieved by an apparatus comprising a sample supply channel arranged between the sample inlet and the inlet chamber.
  • the sample supply channel is arranged to supply the sample aerosol flow to the inlet chamber at least partly in opposite direction to the essentially particle free gas flow.
  • the sample supply channel may be provided inside the body of the apparatus. In one embodiment the sample supply channel is provided inside the inlet chamber.
  • the sample supply channel may be formed by the body of the apparatus and the ejector or it may be a separate conduit.
  • the advantage of the present invention is that directing the sample aerosol flow at least partly in opposite direction in relation the essentially particle free ionized gas flow provides effective mixing of the sample aerosol and the essentially particle free ionized gas flow. Effective mixing of the sample aerosol flow and the essentially particle free ionized gas flow enhances and accelerates the charging of the particles of the sample aerosol flow. This ensures that all the particles of the sample aerosol flow are charged. As the operation of the particle monitoring apparatus is based on charging the particles of the sample aerosol flow. Therefore the efficient and reliable charging of the particles of the sample aerosol flow will enhance the operation of the apparatus and provide reliable and correct measurement results.
  • Figure 1 is a schematic view of one embodiment of an apparatus for monitoring fine particles
  • Figure 2 is a schematic view of another embodiment of an apparatus for monitoring fine particles.
  • the apparatus 1 comprises a sample inlet 2 for guiding a sample aerosol flow A into the apparatus 1 .
  • the sample inlet 2 is in fluid communication with the aerosol duct 1 1 and inside of the apparatus 1 .
  • the apparatus 1 preferably also comprises a sample outlet 1 0 through which the analyzed sample aerosol flow B exhausted from the apparatus 1 .
  • the analyzed sample aerosol B is returned to the aerosol duct 1 1 .
  • the sample outlet 1 0 may also be arranged to conduct the analyzed sample aerosol B directly to the ambient atmosphere or some other location. Accordingly the apparatus 1 does not collect or store the sample aerosol A.
  • the apparatus may also comprise a sample- inlet arrangement 2 comprising one or more sample inlets.
  • the apparatus may also comprise a sample outlet arrangement 10 comprising one or more sample outlets.
  • a sample outlet arrangement 10 comprising one or more sample outlets.
  • the sample inlet 2 and the sample outlet 1 0 are shown as short channels, but in an alternative embodiment the sample inlet 2 and the sample outlet 1 0 may be only opening provided to the body 1 7 of the apparatus 1 .
  • the apparatus 1 comprises an inlet chamber 4 and the sample inlet 2 is arranged to provide a fluid communication between the aerosol duct 1 1 and the inlet chamber 4.
  • the apparatus further comprises a gas supply for supplying clean particle free gas C into the inlet chamber 4.
  • the gas supply comprises gas supply connection 18 via which the clean gas may be brought from a gas source.
  • the gas may be cleaned in a filter or the like for essentially removing particles from the gas.
  • the clean gas may be air or some other suitable gas.
  • the clean gas may be fed from the gas source to a temperature regulator, which can either heat or cool the air.
  • a magnetic valve may be switched to feed the gas to a flow controller, so that the clean gas flow C may be set to a desired value.
  • the flow controller can be e.g.
  • the flow controller may be connected to a filter, which essentially removes particles from the pressurized gas, so that the particle concentration in the pressurized gas is remarkably lower than the particle concentration in the sample aerosol flow A.
  • the clean gas is then fed to the measurement apparatus 1 through the gas supply connection 18.
  • the apparatus 1 further comprises a clean gas supply channel 16 through which the clean gas is fed to inlet chamber 4 of the apparatus 1 .
  • the clean gas supply channel comprises a nozzle head 6 opening into the inlet chamber 4.
  • the clean gas supply is also provided with an ionization device 14 for ionizing at least a portion of the clean gas before or during feeding the clean gas from the nozzle head 6 into the inlet chamber 4.
  • the ionization device is a corona needle 14 extending in the clean gas supply channel 16.
  • the nozzle head 6 and the corona needle 14 are advantageously arranged such that corona needle 14 extends essentially to the vicinity of the nozzle head 6. This helps the corona needle 14 to stay clean and improves the ion production.
  • the corona needle 14 is isolated from the clean gas flow channel and the body 17 of the apparatus 1 by one or more electrical insulators 20.
  • the gas supply channel 16 is arranged to provide an essentially particle free ionized gas flow C to the inlet chamber 4.
  • the apparatus is further provided with an ejector 24.
  • the ejector 24 comprises a converging-diverging nozzle 24 forming thus a converging-diverging flow channel, the throat 8 of the ejector 24.
  • the ejector 24 is a pump-like device utilizing Venturi effect of a converging-diverging nozzle to convert the pressure energy of a main fluid flow to kinetic energy which creates a low pressure zone that draws in and entrains suction for a side fluid flow.
  • the main fluid flow and the side fluid flow are at least partly mixed in the ejector 24.
  • the main fluid flow and the side fluid flow are fed through an ejector inlet opening 7 into the ejector throat 8. After passing through the throat 8 of the ejector 24, the mixed fluid expands and the velocity is reduced which results in recompressing the mixed fluids by converting velocity energy back into pressure energy.
  • the apparatus may also comprise one or more clean gas supply channels 16, corona needles 14 and ejectors 24.
  • the essentially particle free ionized gas flow C is fed to the throat 8 of the ejector as a main flow. Therefore the clean gas supply channel 16 and the nozzle head 6 are arranged to feed the essentially particle free gas flow C at a high velocity into the throat 8.
  • the velocity of the essentially particle free gas flow C is preferably sonic or close to sonic.
  • the essentially particle free gas flow C forms a suction to the sample inlet 2 such that the sample aerosol flow A may be sucked into the inlet chamber 4.
  • the sample aerosol flow A forms a side flow of the ejector 24.
  • the flow rate of the sample aerosol flow A is depended essentially only on the geometry of ejector 24 and the flow rate of the essentially particle free ionized gas flow C.
  • the ratio of the main flow C to the side flow A is small, preferably less than 1 :1 and more preferably less than 1 :3. According to the above mentioned there is no need for actively feed the sample aerosol flow A into the apparatus 1 , but it may be sucked by the by means of the clean gas supply and the ejector 24.
  • the apparatus 1 further comprises ion trapping chamber 22.
  • the ion trapping chamber 22 comprises an ion trap 12 for removing ions that are not attached to the particles of the sample aerosol flow A.
  • the ion tarp 12 is provided with a collection voltage for removing the mentioned free ions.
  • the voltage used for trapping free ions depends on design parameters of the apparatus 1 , but typically the ion trap 12 voltage is 10V - 30kV.
  • the ion trap 12 voltage may also be adjusted to removed nuclei mode particles or even the smallest particles in the accumulation mode.
  • the sample aerosol and the essentially clean gas mixed together are discharged from the apparatus 1 through the outlet 10 together with the ionized particles of the sample aerosol.
  • the outlet 10 is provided in fluid communication with the ion trapping chamber 22 for exhausting the discharge flow B out of the apparatus 1 .
  • the outlet 10 may be arranged to supply the discharge flow B back to the aerosol duct 1 1 or to ambient atmosphere or some other location.
  • Particles of the aerosol F in the aerosol duct 1 1 are monitored by measuring the electrical charge carried by the electrically charged particles of the sample aerosol flow A.
  • particles of the aerosol F are monitored by measuring the electrical charge escaping with the electrically charged particles from the apparatus 1 .
  • the measurement of the charge carried by the electrically charged particles may be measured by many alternative ways.
  • the charge carried by the electrically charged particles is measured by measuring the net current escaping from the sample outlet 10
  • the whole apparatus 1 is isolated from the surrounding systems..
  • An electrometer may be assembled between the isolated apparatus (i.e. a pint in the wall of body 17) and a ground point of the surrounding systems. With this kind of setup, the electrometer may measure the charge escaping from the isolated apparatus 1 together with the ionized particles. In other words this kind of setup measures the escaping current.
  • the sample supply channel 5 is arranged between the sample inlet 2 and the inlet chamber 4. This arrangement provides efficient mixing of the sample aerosol and the essentially particle free ionized gas as they flow in opposite directions in the inlet chamber 4.
  • the sample inlet 2 is provided downstream of the nozzle head 6 and the sample supply channel 5 extends from the sample inlet 2 in opposite direction of the clean gas supply channel 16.
  • the sample inlet 2 is furthermore provided downstream of the ejector inlet opening 7 and the sample supply channel 5 extends substantially between the sample inlet 2 and the ejector inlet opening 7 in the flow direction of the essentially particle free gas flow C.
  • the sample supply channel 5 is provided inside the body 17 of the apparatus.
  • the sample supply channel may also be provided at least partly inside the inlet chamber 4.
  • the sample supply channel of figure 1 is formed by the side wall of the body 17 of the apparatus and structures of the ejector 24.
  • the sample supply channel may also be provided by a separate conduit, pipe or the like arranged inside the body 17 of the apparatus 1 or inside the inlet chamber 4.
  • Figure 2 shows another embodiment of the present invention in which the sample aerosol is fed at least partly in opposite direction to the essentially particle free gas flow C or in other words at an angle against the flow direction of the essentially particle free gas flow C.
  • the sample aerosol flow is fed to the inlet chamber 4 at an angle less than 45° against the flow direction of the essentially particle free gas flow C.
  • the sample aerosol flow is preferably fed to the inlet chamber 4 at an angle less than 30° against the flow direction of the essentially particle free gas flow C.
  • the above mentioned angle has to be small enough and the sample supply channel arranged such that the essentially particle free ionized gas flow C does not cause too high pressure into the sample supply channel 5 due to the flow of the essentially particle free ionized gas.
  • the sample supply channel provides at least partly opposed flow of sample aerosol towards the essentially particle free gas flow C. This is achieved by arranging the sample supply channel 5 to extend at an angle of less than 45 Q , preferably less than 30 Q in relation to the ejector throat 8, or the flow direction of the essentially particle free ionized gas flow C or the clean gas supply channel 16, as shown in figure 2.
  • the sample inlet 2 is provided downstream of the nozzle head 6 and the sample supply channel 5 extends from the sample inlet 2 at an angle in opposite direction of the clean gas supply channel 16.
  • the sample inlet 2 is furthermore provided downstream of the ejector inlet opening 7 and the sample supply channel 5 extends substantially between the sample inlet 2 and the ejector inlet opening 7.
  • the sample supply channel 5 is provided inside the body 17 of the apparatus.
  • the sample supply channel may also be provided at least partly inside the inlet chamber 4.
  • the sample supply channel of figure 1 is formed by the structures of the ejector 24.
  • the sample supply channel may also be provided by a separate conduit, pipe or the like arranged inside the body 17 of the apparatus 1 or inside the inlet chamber 4.
  • other structural feature may be added to the apparatus for providing the sample supply channel 5.

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Dispersion Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Nozzles (AREA)

Abstract

La présente invention concerne un appareil (1) pour suivre des particules (54) dans un conduit (11) ou un espace comprenant un aérosol. L'appareil (1) comprend une chambre d'entrée (4), un éjecteur (24), une alimentation en gaz (6, 16, 18) conçue pour introduire un flux de gaz essentiellement dépourvu de particules (C) dans l'éjecteur (24) par l'intermédiaire de la chambre d'entrée (4) et au moins une entrée d'échantillon (2) conçue pour introduire un flux d'aérosol d'échantillon (A) depuis le conduit (11) ou l'espace dans la chambre d'entrée (4) au moyen d'une aspiration appliquée par l'alimentation en gaz (6, 16, 8) et l'éjecteur (24). L'appareil (1) comprend en outre un conduit d'alimentation en échantillon (5) placé entre l'entrée d'échantillon (2) et la chambre d'entrée (4) pour mélanger l'aérosol d'échantillon au flux de gaz essentiellement dépourvu de particules (C). Le conduit d'alimentation en échantillon (5) est conçu pour diriger le flux d'aérosol d'échantillon (A) au moins partiellement dans la direction opposée à celle du flux de gaz essentiellement dépourvu de particules (C).
PCT/FI2012/050246 2011-03-21 2012-03-15 Appareil pour suivre des particules Ceased WO2012127104A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014600002U JP3189910U (ja) 2011-03-21 2012-03-15 粒子を監視する装置
CN201290000376.7U CN203705221U (zh) 2011-03-21 2012-03-15 用于监测颗粒的装置
DE212012000076U DE212012000076U1 (de) 2011-03-21 2012-03-15 Vorrichtung zum Messen von Partikeln

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20115272A FI20115272A0 (fi) 2011-03-21 2011-03-21 Laitteisto hiukkasten tarkkailemiseksi
FI20115272 2011-03-21

Publications (1)

Publication Number Publication Date
WO2012127104A1 true WO2012127104A1 (fr) 2012-09-27

Family

ID=43806482

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FI2012/050246 Ceased WO2012127104A1 (fr) 2011-03-21 2012-03-15 Appareil pour suivre des particules

Country Status (5)

Country Link
JP (1) JP3189910U (fr)
CN (1) CN203705221U (fr)
DE (1) DE212012000076U1 (fr)
FI (1) FI20115272A0 (fr)
WO (1) WO2012127104A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019168245A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサの取付構造、微粒子センサ、センサ取付部、及びセンサ取付部付き通気管
JP2019168246A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサ
JP2019168243A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサ
US10502710B2 (en) 2016-06-06 2019-12-10 Alphasense Limited Particulate matter measurement apparatus and method
US12298216B2 (en) 2019-08-02 2025-05-13 Cambridge Enterprise Limited Particle sensor and sensing method

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20115045A0 (fi) * 2011-01-18 2011-01-18 Pegasor Oy Laite ja menetelmä hiukkasten tarkkailemiseksi
JP5960619B2 (ja) * 2013-01-28 2016-08-02 日本特殊陶業株式会社 外部ガス流を利用した微粒子センサ
CN107607447A (zh) * 2017-08-21 2018-01-19 黑龙江科技大学 一种精确测量低浓度粉尘浓度的装置和方法
CN110220765B (zh) * 2018-07-24 2024-09-20 江苏苏净集团有限公司 一种气溶胶稀释装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986386A (en) * 1974-04-12 1976-10-19 Exxon Research And Engineering Company Particulate sampling system
JP2004205253A (ja) * 2002-12-24 2004-07-22 Horiba Ltd 排ガス希釈装置
WO2009109688A1 (fr) 2008-03-04 2009-09-11 Pegasor Oy Procédé et appareil de mesure de particules

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986386A (en) * 1974-04-12 1976-10-19 Exxon Research And Engineering Company Particulate sampling system
JP2004205253A (ja) * 2002-12-24 2004-07-22 Horiba Ltd 排ガス希釈装置
WO2009109688A1 (fr) 2008-03-04 2009-09-11 Pegasor Oy Procédé et appareil de mesure de particules

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10502710B2 (en) 2016-06-06 2019-12-10 Alphasense Limited Particulate matter measurement apparatus and method
JP2019168245A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサの取付構造、微粒子センサ、センサ取付部、及びセンサ取付部付き通気管
JP2019168246A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサ
JP2019168243A (ja) * 2018-03-22 2019-10-03 日本特殊陶業株式会社 微粒子センサ
US12298216B2 (en) 2019-08-02 2025-05-13 Cambridge Enterprise Limited Particle sensor and sensing method

Also Published As

Publication number Publication date
FI20115272A0 (fi) 2011-03-21
CN203705221U (zh) 2014-07-09
JP3189910U (ja) 2014-04-10
DE212012000076U1 (de) 2013-10-24

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