WO2012132811A1 - Procédé de télémétrie et dispositif de télémétrie laser - Google Patents

Procédé de télémétrie et dispositif de télémétrie laser Download PDF

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Publication number
WO2012132811A1
WO2012132811A1 PCT/JP2012/055901 JP2012055901W WO2012132811A1 WO 2012132811 A1 WO2012132811 A1 WO 2012132811A1 JP 2012055901 W JP2012055901 W JP 2012055901W WO 2012132811 A1 WO2012132811 A1 WO 2012132811A1
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light
measurement
laser
data
measurement point
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Japanese (ja)
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直行 古山
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver

Definitions

  • the present invention relates to a distance measuring method and a laser distance measuring apparatus that measure the distance or thickness in the thickness direction of an object to be measured with high accuracy using interference of laser light.
  • the laser light is divided into reference light and measurement light, and the optical path difference between the reference light and measurement light reflected by the object to be measured is obtained. Measure the distance to the object to be measured.
  • the distance measurement accuracy is far from the wavelength level of the laser light, that is, the order of nm (nanometer).
  • Patent Document 1 the inventor of the present application uses a plurality of laser beams having different wavelengths, and further changes the optical path difference so as to utilize the coherence characteristic of the laser beams.
  • inventions related to a laser distance measuring method and a laser distance measuring apparatus for performing the laser distance measuring method have been made.
  • the invention disclosed in [Patent Document 1] makes it possible to measure the distance to the object to be measured with high accuracy.
  • the optical path difference is changed by mechanical means such as a motor. Therefore, high-precision ranging requires expensive mechanical means with high positional accuracy, and there is a problem that the cost increases.
  • mechanical means with high positional accuracy may cause errors due to backlash (reverse operation) or the like, and further improvement is desired in this respect.
  • the present invention has been made in view of the above circumstances, and while utilizing the coherence characteristic of laser light, the distance to the object to be measured or the distance in the thickness direction without using mechanical means in the optical system or It is an object of the present invention to provide a distance measuring method and a laser distance measuring device for measuring a thickness with high accuracy.
  • the first laser light and the second laser light having different wavelengths are divided into reference light and measurement light by the dividing unit 12, and reflected by the reference light reflected by the reflecting unit 14 and the measurement point of the object 6 to be measured.
  • the light receiving unit 18 receives the measured light and measures the distance L in the thickness direction of the DUT 6 based on light and dark data obtained by the interference between the reference light and the measurement light.
  • a method A calculation light / dark data creating step for calculating calculated light / dark data based on the wavelengths of the first laser light and the second laser light and the light intensity of the reference light and measurement light received by the light receiving unit 18;
  • the reference light of each of the first laser light and the second laser light is reflected by the reflecting portion 14 whose reflecting surface is inclined, and each measurement light of the first laser light and the second laser light is reflected on the first object 6 to be measured.
  • the light receiving unit 18 receives the measured light and measures the distance L in the thickness direction of the DUT 6 based on light and dark data obtained by the interference between the reference light and the measurement light.
  • a method A calculation light / dark data creating step for calculating calculated light / dark data based on the wavelengths of the first laser light and the second laser light and the light intensity of the reference light and measurement light received by the light receiving unit 18;
  • the first laser beam and the second laser beam are each divided into two reference beams and a measuring beam, and one of the first laser beam and the second laser beam (first reference beam) is inclined on the reflection surface.
  • the light is reflected by the first reflection region 14a of the reflection unit 14, and one measurement light (first measurement light) of the first laser light and the second laser light is reflected by the first measurement point S1 of the object 6 to be measured.
  • the reference light reflected by the one reflection region 14a and the measurement light reflected by the first measurement point S1 are received by the first light receiving region 18a of the light receiving unit 18 including a plurality of light receivers 22,
  • the other reference light (second reference light) of the first laser light and the second laser light is reflected by the second reflection region 14b of the reflecting portion 14 whose reflection surface is inclined, and the first laser light and the second laser light.
  • the second measurement light (second measurement light) is reflected at the second measurement point S2 of the object 6 to be measured, and a plurality of reference lights reflected at the second reflection region 14b and measurement light reflected at the second measurement point S2 are used.
  • a second light / dark data creation step for creating measurement light / dark data of the second measurement point S2 based on the light intensity data of each light receiver 22 in the second light receiving region 18b;
  • First laser irradiation means 10a and second laser irradiation means 10b for emitting two first laser beams and second laser beams having different wavelengths, and the first laser beam and the second laser beam as reference light.
  • a dividing unit 12 that divides each measurement light into a measurement light, a reflection unit 14 that reflects each reference light at a predetermined reflection angle, and a reference light that is composed of a plurality of light receivers 22 and reflected by the reflection unit 14 and the device under test 6
  • a light receiving unit 18 that receives the measurement light reflected by the light receiving unit 22 and outputs the light intensity data of each light receiver 22, and a calculation unit 20 that receives the light intensity data from the light receiving unit 18.
  • the comparison step, the second distance data acquisition step, and the distance measurement step are performed to measure the distance L in the thickness direction between the first measurement point S1 and the second measurement point S2 of the object 6 to be measured.
  • First laser irradiation means 10a and second laser irradiation means 10b for emitting two first laser beams and second laser beams having different wavelengths, and two references each of the first laser beam and the second laser beam
  • a laser beam splitting unit that splits the light into a measurement beam, and a first reference beam that reflects one reference beam (first reference beam) of the first laser beam and the second laser beam split by the laser beam splitting unit at a predetermined reflection angle.
  • the second measurement light (second measurement light) is emitted
  • the exit port 16b It is composed of a plurality of light receivers 22, receives the reference light reflected by the first reflection region 14 a and the measurement light reflected by the first measurement point S 1 of the device under test 6, and outputs the light intensity data of each light receiver 22.
  • a first light receiving region 18a to be It is composed of a plurality of light receivers 22, receives the reference light reflected by the second reflection region 14 b and the measurement light reflected by the second measurement point S 2 of the device under test 6, and outputs the light intensity data of each light receiver 22.
  • a second light receiving region 18b that A calculation unit 20 for inputting light intensity data from the first light receiving region 18a and the second light receiving region 18b, The calculated brightness / darkness data creation step, the irradiation step, the first brightness / darkness data creation step, the second brightness / darkness data creation step, the first comparison step, the second comparison step, the first distance data acquisition step, and the second distance data described in (2) above.
  • Laser distance measuring device 50b characterized in that the distance L in the thickness direction between first measurement point S1 and second measurement point S2 of object 6 is measured by performing an acquisition step and a distance measurement step.
  • the first output port 16a and the second output port 16b are installed so as to face each other, and the device under test 6 is disposed between the first output port 16a and the second output port 16b.
  • the above-mentioned problem is solved by providing the laser distance measuring device 50c according to the above (5), which measures the thickness t of 6.
  • the distance or thickness in the thickness direction of the object to be measured can be measured with high accuracy without using mechanical means in the optical system.
  • FIG. 1 the basic principle of the distance measuring method and the laser distance measuring device according to the present invention will be described with reference to the laser distance measuring device 50a of the first embodiment of FIG. 1 and FIGS. 2, 3, and 4.
  • FIG. 2 the laser distance measuring device 50a of the first embodiment of FIG. 1 and FIGS. 2, 3, and 4.
  • the laser distance measuring device 50a includes a first laser irradiation unit 10a and a second laser irradiation unit 10b that respectively emit two laser beams having different wavelengths (first laser beam and second laser beam). ing.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b it is preferable to use a helium neon laser, a semiconductor excitation solid laser, a semiconductor DFB laser, or the like having a relatively long coherence length.
  • a semiconductor laser or the like having a short coherence length may be used.
  • the first laser light emitted from the first laser irradiation means 10a is reflected by the mirror 4a provided on the optical path of the first laser light and travels toward the dividing unit 12.
  • the second laser light emitted from the second laser irradiation means 10b is reflected by the half mirror 4b provided on the optical path of the second laser light, passes through the same optical path as the first laser light, and travels to the dividing unit 12.
  • a half mirror, a beam splitter, or the like is used as the splitting unit 12, and the first laser light and the second laser light that have reached the splitting unit 12 are split into two by the splitting unit 12 into reference light and measurement light.
  • a flat beam splitter is used as the dividing unit 12
  • the correction plate 11 need not be provided.
  • the reference light of the first laser beam and the second laser beam divided by the dividing unit 12 is reflected by the reflecting unit 14.
  • the reflection surface of the reflection portion 14 is not perpendicular to the incident direction of the reference light but is inclined by a predetermined angle ⁇ . Therefore, the reference light is reflected at a predetermined reflection angle (2 ⁇ as viewed from the incident direction) as shown in FIG.
  • the reference light reflected by the reflecting section 14 passes through the correction plate 11 and the beam splitter (dividing section 12) and reaches the light receiving section 18 at an angle inclined by 2 ⁇ .
  • the measurement light of the first laser beam and the second laser beam divided by the dividing unit 12 is reflected at a measurement point (for example, the first measurement point S1) of the object 6 to be measured and received through the dividing unit 12. Part 18 is reached.
  • the inclination angle ⁇ of the reflecting surface of the reflecting portion 14 is about 0.23 °, the reference light reflected by the reflecting portion 14 and the measuring light reflected by the object 6 are partially received by the light receiving portion 18. It interferes with this part.
  • the light receiving unit 18 is composed of a plurality of light receivers 22 such as a CCD and a CMOS, and one that can output light intensity data for each light receiver 22 is used.
  • the reflecting surface of the reflecting portion 14 is inclined by a predetermined angle ⁇ .
  • the optical path length of the reference light between the points aa ′ in FIG. 2 is Lra
  • the optical path length of the reference light between the points bb ′ is Lrb
  • the optical path difference between the measuring light and the reference light increases from the point a ′ on the light receiving unit 18 toward the point b ′. For this reason, periodic interference fringes are generated in the interference light between the measurement light and the reference light as the optical path difference changes.
  • FIG. 3A shows a case where the number of irradiated laser beams is one. Further, the dark part of the interference fringes is indicated as B.
  • the light intensity data of an arbitrary row n and row n ⁇ 1 of the light receiver 22 are connected from the column a ′ to the column b ′, the light / dark data of the interference light is obtained as shown in FIG. can get.
  • the light intensity data of a large number of rows of light receivers 22 can be used to create light and dark data. It becomes possible, and more detailed light and dark data can be created.
  • one laser beam is irradiated.
  • the brightness data is the reference beam of the first laser beam.
  • the interference light that interferes with the measurement light, the reference light of the second laser light, and the interference light that interferes with the measurement light are combined.
  • the use area in the light receiving unit 18 and the order of arrangement of the light intensity data at the time of creating the brightness / darkness data are acquired in advance before the laser ranging devices 50a to 50c are shipped, and the memories in the laser ranging devices 50a to 50c are obtained. It is preferable to memorize in the above.
  • the length of the light / dark data obtained by the above method is basically the number of data (number of light receivers 22) used to create the light / dark data, which is different from the actual length (Lrb-Lra). Yes.
  • the length based on the number of the light receivers 22 is hereinafter referred to as a pixel length.
  • the above conversion formula is used.
  • the actual length can be calculated from the pixel length.
  • the conversion from the pixel length to the actual length may be performed at the time of the light / dark data, but the intermediate calculation is performed with the pixel length, and the pixel length is changed to the actual length at the final stage of the distance measurement step. Conversion is preferable from the viewpoint of error reduction. In this example, a description will be given of an example in which an intermediate calculation is performed with the pixel length and converted to the actual length at the final stage of the distance measuring step.
  • light and dark data (hereinafter referred to as “light intensity data”) generated based on light intensity data output from the light receiving unit 18 or first light receiving area 18a and second light receiving area 18b described later.
  • the measured light / dark data) is compared with the light / dark data (hereinafter referred to as the calculated light / dark data) created by the calculation of the computer of the laser distance measuring device.
  • the period of the interference fringes of the interference light of the laser light is determined by the wavelength (frequency) of the laser light used as described above. Since the frequencies of the first laser light and the second laser light are known, the period of the interference fringes of the interference light of the first laser light and the period of the interference fringes of the interference light of the second laser light can be calculated.
  • the light intensity of the reference light of the first laser light, the measurement light of the first laser light, the reference light of the second laser light, and the measurement light of the second laser light received by the light receiving unit 18 may be individually acquired in advance. For example, the amplitude of each interference light of the first laser light and the second laser light can also be calculated.
  • the light intensity of the measurement light received by the light receiving unit 18 varies depending on the state of reflection of the object 6 to be measured. Therefore, the measurement of the light intensity of the measurement light is preferably performed every time the measurement object 6 changes greatly.
  • the bright part is taken at the point where the optical path difference between the reference light and the measuring light is zero in any interference light of the laser light of any transmission wavelength. Therefore, the position of the arbitrary bright portion of the interference light of the first laser light created by the calculation and the position of the arbitrary bright portion of the interference light of the second laser light are overlapped and added together, thereby adding the first laser. Computed light / dark data in which the interference fringes of the interference light of the light and the interference fringes of the interference light of the second laser light are combined can be created. It should be noted that the position where the bright portions are overlapped takes the maximum light intensity on the calculated light / dark data, and the waveform of the calculated light / dark data is symmetrical before and after this.
  • this point is preferably used as a reference point for the calculated light / dark data.
  • the above is the method for creating the calculated brightness / darkness data, and it is preferable that the calculation brightness / darkness data is created in advance before the distance measurement of the object 6 to be measured.
  • calculated brightness / darkness data is created by the above-described method (calculated brightness / darkness data creation step in the first distance measuring method).
  • the DUT 6 is installed so that the measurement light is irradiated to the first measurement point S1.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b are operated to irradiate the first laser beam and the second laser beam simultaneously.
  • the irradiated first laser light and second laser light are divided into two by the dividing unit 12 into reference light and measurement light.
  • the reference light of the first laser beam and the second laser beam divided by the dividing unit 12 is reflected by the reflecting unit 14 whose reflecting surface is inclined at a predetermined angle ⁇ , passes through the dividing unit 12, and receives the light receiving unit 18. To reach. Further, the measurement light of the first laser beam and the second laser beam divided by the dividing unit 12 is emitted from the emission port 16, reflected at the first measurement point S ⁇ b> 1 of the object 6 to be measured, and then reflected by the dividing unit 12. And reaches the light receiving unit 18. The light receiving unit 18 receives the reference light of the first laser beam and the second laser beam reflected by the reflecting unit 14 and the measurement light of the first laser beam and the second laser beam reflected by the first measurement point S1 of the object 6 to be measured.
  • the optical path length of the measurement light and the optical path length of the reference light are substantially equal so that the optical path difference between the reference light and the measurement light is within the range of the coherence length during distance measurement.
  • the light receiving unit 18 outputs the light intensity data of each light receiver 22 to the calculation unit 20.
  • the calculation unit 20 arranges the light intensity data of the respective light receivers 22 in a predetermined order, and creates measurement brightness / darkness data of the first measurement point S1 (first measurement brightness / darkness data creation step in the first distance measuring method).
  • the light and dark periodically change the interference light between the reference light of the first laser light and the measurement light of the first laser light. Interference fringes are formed.
  • the interference light between the reference light of the second laser light and the measurement light of the second laser light also forms interference fringes whose brightness changes periodically.
  • the first laser beam and the second laser beam have different wavelengths, the period of interference fringes is different. Incidentally, the interference light between the first laser beam and the second laser beam becomes “beat”, and takes a constant value when time averaged.
  • the measurement brightness / darkness data at the first measurement point S1 is basically the interference light between the measurement light of the first laser light reflected at the first measurement point S1 and the reference light of the first laser light, and at the first measurement point S1.
  • the reflected measurement light of the second laser light and the interference light of the reference light of the second laser light are combined.
  • the calculation unit 20 compares the acquired measurement brightness / darkness data of the first measurement point S1 with previously calculated brightness / darkness data, and determines the position of the measurement brightness / darkness data of the first measurement point S1 in the calculation brightness / darkness data. Identify. (First comparison step in the first distance measuring method).
  • the calculated brightness / darkness data is obtained by calculating the brightness / darkness data obtained by combining the above two interference lights, and the measured brightness / darkness data is obtained by actual measurement. Therefore, the calculated brightness data and the measured brightness data are basically the same, although the acquisition ranges are different.
  • FIG. 4 schematically shows the relationship between the calculated brightness data and the measured brightness data.
  • the thin line in FIG. 4 shows calculation brightness data
  • a thick line shows measurement brightness data.
  • the calculation unit 20 calculates the first distance data La ′ from the base point (point P in FIG. 4) of the measured light / dark data at the first measurement point S1 to the reference point (point O in FIG. 4) on the calculated light / dark data.
  • (Pixel length) is calculated (first distance data acquisition step in the first distance measuring method).
  • the base point of the measured light / dark data can be an arbitrary position of the measured light / dark data (light intensity data of any light receiver 22).
  • the laser distance measuring device 50a or the object to be measured 6 is translated, and the object to be measured 6 is positioned so that the measurement light is irradiated to the second measurement point S2, as shown in FIG.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b are operated to irradiate the first laser beam and the second laser beam simultaneously.
  • the light receiving unit 18 measures the first laser light and the second laser light reflected by the reflecting unit 14 and the first laser light and the second laser light reflected by the second measurement point S2 of the object 6 to be measured.
  • Receiving light (second irradiation step in the first distance measuring method).
  • the light receiving unit 18 outputs the light intensity data of each light receiver 22 to the calculation unit 20.
  • the computing unit 20 arranges the light intensity data of the respective light receivers 22 in a predetermined order, and creates measurement brightness / darkness data of the second measurement point S2 (second measurement brightness / darkness data creation step in the first distance measuring method).
  • the measured brightness / darkness data at the second measurement point S2 is basically the interference light between the measurement light of the first laser light reflected at the second measurement point S2 and the reference light of the first laser light, and the second measurement point S2.
  • the reflected measurement light of the second laser light and the interference light of the reference light of the second laser light are combined.
  • the calculation unit 20 compares the acquired measurement brightness / darkness data of the second measurement point S2 with previously calculated brightness / darkness data, and determines the position of the measurement brightness / darkness data of the second measurement point S2 in the calculation brightness / darkness data. Identify. (Second comparison step in the first distance measuring method).
  • the calculated brightness / darkness data and the measured brightness / darkness data are basically the same although the acquisition ranges are different. Therefore, if the creation range of the calculated brightness / darkness data is optimized, the second measurement point S2 in FIG.
  • the measured light / dark data B also matches any part of the calculated light / dark data.
  • the difference in the positions of the measured light / dark data A at the first measurement point S1 and the measured light / dark data B at the second measurement point S2 in the calculated light / dark data is the difference between the measured light / dark data A at the first measurement point S1 and the second measurement point S2. This is due to a difference in optical path difference from the measured light / dark data B.
  • the computing unit 20 obtains the second distance data Lb ′ (pixel length) from the base point (point P ′ in FIG. 4) of the measured brightness / darkness data at the second measurement point S2 to the reference point O on the calculated brightness / darkness data.
  • calculate second distance data acquisition step in the first distance measuring method.
  • the base point at this time must be the same position in the measured light / dark data as in the first distance data acquisition step.
  • the difference in position between the measured light / dark data A at the first measurement point S1 and the measured light / dark data B at the second measurement point S2 when the base points are the same is the optical path difference on the measured object 6 side, that is, the first measurement. This corresponds to the distance L in the thickness direction between the point S1 and the second measurement point S2.
  • the calculation unit 20 subtracts the first distance data La ′ obtained in the first distance data acquisition step from the second distance data Lb ′ obtained in the second distance data acquisition step, and then divides by two.
  • the distance L ′ pixel length
  • the distance L ′ is calculated.
  • the distance L ′ is negative, it indicates that the second measurement point S2 is located closer to the laser distance measuring device 50a than the first measurement point S1.
  • the distance L ′ in the thickness direction between the first measurement point S1 and the second measurement point S2 is calculated by converting the pixel length of the distance L ′ into an actual length (first distance measurement method). Ranging step).
  • the above is the operation of the first distance measuring method and the laser distance measuring device 50a of the first embodiment according to the present invention.
  • the laser distance measuring device 50 b has a laser beam splitting unit 28 that splits the first laser beam and the second laser beam into two before the splitting unit 12.
  • the laser beam splitting unit 28 and the splitting unit 12 constitute a laser beam splitting unit that splits the first laser beam and the second laser beam into two reference beams and measurement beams, respectively.
  • the laser beam splitting unit 28 may be configured to divide the first laser beam and the second laser beam into two orthogonally polarized beams using a Savart plate. As described above, the laser beam splitting unit 28 splits the first laser beam and the second laser beam into two.
  • One of the first laser light and the second laser light divided by the laser light dividing unit 28 is further divided into two by the dividing unit 12 into reference light and measurement light. Then, one reference light (hereinafter referred to as first reference light) of the first laser beam and the second laser beam divided by the dividing unit 12 is reflected by the first reflection region 14 a of the reflecting unit 14 and is divided by the dividing unit 12. , And reaches the first light receiving region 18a of the light receiving unit 18 constituted by a plurality of light receivers 22.
  • One measurement light of the first laser light and the second laser light (hereinafter referred to as first measurement light) divided by the dividing unit 12 is a first measurement point of the DUT 6 from the first emission port 16a. The light is emitted toward S1, reflected by the first measurement point S1 and the dividing unit 12, and reaches the first light receiving region 18a of the light receiving unit 18.
  • the other first laser light and second laser light divided by the laser light dividing unit 28 are reflected by the mirror 4c, and further divided into two by the dividing unit 12 into reference light and measurement light.
  • the other reference light hereinafter referred to as second reference light
  • the other measurement light of the first laser beam and the second laser beam (hereinafter referred to as second measurement beam) divided by the dividing unit 12 is sent from the second emission port 16b to the second measurement point of the object 6 to be measured.
  • the light is emitted toward S2, reflected by the second measurement point S2 and the dividing unit 12, and reaches the second light receiving region 18b of the light receiving unit 18.
  • a step may be provided between the first reflection region 14a and the second reflection region 14b in the reflection portion 14, or the step may be eliminated to be a straight line.
  • the step between the first reflection region 14a and the second reflection region 14b may be large as shown in FIG. 6A or small as shown in FIG. 6B.
  • the positions of the first reflection region 14a and the second reflection region 14b may be positioned on the near side when the first reflection region 14a is viewed from the light receiving unit 18, as shown in FIG. 6C.
  • the inclination of the reflection surfaces of the first reflection region 14a and the second reflection region 14b may be opposite to each other as shown in FIG.
  • the direction in which the first reflection area 14a and the second reflection area 14b are arranged differs from the inclination direction of the reflection surfaces (in FIGS. 9 and 10). 90 °).
  • the operation of the second distance measuring method according to the present invention and the laser distance measuring apparatus 50b of the second embodiment will be described.
  • the first reference distance data Las ′ pixel length of the first measurement light system
  • the second reference distance data Lbs ′ pixel length of the second measurement light system.
  • An example of a method for obtaining the first reference distance data Las 'and the second reference distance data Lbs' will be described later.
  • calculation light / dark data is created by the same method as the first distance measuring method (calculated light / dark data creation step in the second distance measuring method).
  • the first reference distance data Las 'and the second reference distance data Lbs' are obtained by a predetermined method.
  • the first measurement light of the first laser light and the second laser light is placed at the first measurement point S ⁇ b> 1 at the first laser light and the second laser light.
  • the second measurement light is installed so as to irradiate the second measurement point S2 vertically.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b are operated to irradiate the first laser beam and the second laser beam simultaneously.
  • the first measurement light of the first laser light and the second laser light is reflected at the first measurement point S1 of the object 6 to be measured and reaches the first light receiving region 18a as described above.
  • the second measurement light of the first laser light and the second laser light is reflected at the second measurement point S2 of the object 6 to be measured and reaches the second light receiving region 18b.
  • the first reference light of the first laser light and the second laser light is reflected by the first reflection region 14a of the reflecting portion 14 and reaches the first light receiving region 18a.
  • the second reference light of the first laser light and the second laser light is reflected by the second reflection region 14b of the reflecting portion 14 and reaches the second light receiving region 18b (irradiation step in the second distance measuring method).
  • the reflection surfaces of the first reflection region 14a and the second reflection region 14b are inclined at a predetermined angle ⁇ , and the reference light reflected by the first reflection region 14a and the second reflection region 14b has an optical path length depending on the positions of the reflection surfaces. Is different. Therefore, the interference light between the first measurement light of the first laser light received by the first light receiving region 18a and the first reference light of the first laser light, the first measurement light of the second laser light, and the second laser light Together with the interference light with the first reference light, an interference fringe is formed.
  • the light receiving unit 18 outputs the light intensity data of each light receiver 22 in the first light receiving region 18a and the second light receiving region 18b to the arithmetic unit 20.
  • the first light receiving region 18a and the second light receiving region 18b may be provided in one light receiving unit 18, or the first light receiving region 18a and the second light receiving region 18b may be configured by individual light receiving units 18. Also good.
  • the calculation unit 20 arranges the light intensity data of the respective light receivers 22 in the first light receiving region 18a in a predetermined order, and creates measurement light / dark data of the first measurement point S1 (the first measurement light / dark in the second distance measuring method). Data creation step).
  • the measurement light / dark data at the first measurement point S1 basically includes the interference light between the first measurement light of the first laser light reflected at the first measurement point S1 and the first reference light of the first laser light, Interference light of the first measurement light of the second laser light reflected at the measurement point S1 and the first reference light of the second laser light is combined.
  • the calculation unit 20 arranges the light intensity data of the respective light receivers 22 in the second light receiving region 18b in a predetermined order, and creates the measurement light / dark data of the second measurement point S2 (second in the second distance measuring method). Measurement light / dark data creation step).
  • the measured brightness / darkness data at the second measurement point S2 basically includes interference light between the second measurement light of the first laser light reflected at the second measurement point S2 and the second reference light of the first laser light, Interference light of the second measurement light reflected by the measurement point S2 and the second reference light of the second laser light is combined.
  • the calculation unit 20 compares the acquired measurement brightness / darkness data of the first measurement point S1 with previously calculated brightness / darkness data, and determines the position of the measurement brightness / darkness data of the first measurement point S1 in the calculation brightness / darkness data. Identify. (First comparison step in the second distance measuring method).
  • the calculation unit 20 compares the acquired measurement brightness / darkness data of the second measurement point S2 with previously calculated brightness / darkness data, and specifies the position of the measurement brightness / darkness data of the second measurement point S2 in the calculation brightness / darkness data. To do. (Second comparison step in the second distance measuring method).
  • the calculation unit 20 calculates first distance data La ′ (pixel length) from the base point of the measured light / dark data at the first measurement point S1 to the reference point on the calculated light / dark data (in the second distance measuring method). First distance data acquisition step).
  • the calculation unit 20 calculates second distance data Lb ′ (pixel length) from the base point of the measured brightness / darkness data at the second measurement point S2 to the reference point on the calculated brightness / darkness data (the second distance measurement method uses the second distance measurement method). 2 distance data acquisition step). Note that the measurement light / dark data of the first measurement point S1 and the base points of the measurement light / dark data of the second measurement point S2 are the measurement light / dark data set when the first reference distance data Las ′ and the second reference distance data Lbs ′ described later are acquired. It is the same as the position inside.
  • the following acquisition method is suitable for the laser distance measuring device 50b according to the present invention, but this method is not necessarily used.
  • the acquisition of the first reference distance data Las 'and the second reference distance data Lbs' is not necessarily performed for each measurement, and may be performed at the time of shipment of the laser distance measuring device and recorded in a memory or the like.
  • the first exit port 16a and the second exit port 16b are closed with a flat plate 5 having a smooth surface.
  • the distance from the first exit 16a to the flat plate 5 is equal to the distance from the second exit 16b to the flat plate 5.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b are operated to irradiate the first laser beam and the second laser beam simultaneously.
  • the first measurement light of the first laser light and the second laser light is reflected at the first measurement point S ⁇ b> 1 ′ of the flat plate 5.
  • the second measurement light of the first laser light and the second laser light is reflected at the second measurement point S2 'of the flat plate 5 (irradiation step).
  • the base point of the measured light / dark data in the first distance data acquisition step and the second distance data acquisition step can be basically set at an arbitrary position. However, the base point set here cannot be changed when the object 6 is measured.
  • the first distance data La ′ obtained in the first distance data acquisition step becomes the first reference distance data Las ′
  • the second distance data Lb ′ obtained in the second distance data acquisition step becomes the second reference distance data Lbs ′. It becomes.
  • the first reference distance data Las ' corresponds to the optical path difference between the first measurement light and the first reference light reflected at the first measurement point S1' of the flat plate 5.
  • the second reference distance data Lbs ′ corresponds to the optical path difference between the second measurement light and the second reference light reflected at the second measurement point S ⁇ b> 2 ′ of the flat plate 5.
  • the difference between the first reference distance data Las 'and the second reference distance data Lbs' substantially corresponds to the position difference between the first reflection area 14a and the second reflection area 14b.
  • the above is the method for obtaining the first reference distance data Las 'and the second reference distance data Lbs' suitable for the distance measuring device 50b.
  • the calculation unit 20 obtains the first distance data La ′ obtained in the first distance data obtaining step, the second distance data Lb ′ obtained in the second distance data obtaining step, the first reference distance data Las ′, and the first distance data La ′.
  • a distance L ′ pixel length in the thickness direction between the first measurement point S1 and the second measurement point S2 is calculated by, for example, the following formula (second measurement). Ranging step in the distance method).
  • L ′ ((La′ ⁇ Las ′) ⁇ (Lb′ ⁇ Lbs ′)) / 2
  • the distance L is calculated by converting the pixel length of the distance L ′ into an actual length.
  • the second distance measuring method can be performed by the laser distance measuring device 50a of the first embodiment.
  • the device under test 6 is arranged so that the measurement light is simultaneously irradiated onto the first measurement point S1 and the second measurement point S2 of the device under test 6. And a part of measurement light irradiated to 1st measurement point S1 turns into one 1st measurement light.
  • the first measurement light is reflected at the first measurement point S ⁇ b> 1 and reaches the first light receiving region 18 a which is a part of the light receiving unit 18 via the dividing unit 12. Further, a part of the measurement light irradiated to the second measurement point S2 becomes the other second measurement light.
  • the second measurement light is reflected at the second measurement point S2, and reaches the second light receiving region 18b which is a part of the light receiving unit 18 via the dividing unit 12. Further, a part of the reference light corresponding to the first measurement light becomes one first reference light.
  • the first reference light is reflected by the first reflection region 14 a that is a part of the reflection unit 14, and reaches the first light reception region 18 a that is a part of the light reception unit 18 via the dividing unit 12. Further, a part of the reference light corresponding to the second measurement light becomes the other second reference light.
  • the second reference light is reflected by the second reflection region 14 b that is a part of the reflection unit 14, and reaches the second light reception region 18 b that is a part of the light reception unit 18 via the dividing unit 12.
  • the distance L in the thickness direction between the first measurement point S1 and the second measurement point S2 is calculated in the same manner as in the second distance measurement method described above.
  • the discrimination between the first light receiving area 18a and the second light receiving area 18b may be made from the discontinuity of the acquired measurement light / dark data, or a blank area between the first light receiving area 18a and the second light receiving area 18b.
  • the DUT 6 may be arranged so that the boundary portion (step) between the first measurement point S1 and the second measurement point S2 is in a range corresponding to the blank area.
  • the laser range finder 50c of the third embodiment is between the first measurement point S1 located on the one surface side of the object 6 to be measured and the second measurement point S2 located on the back surface of the first measurement point S1.
  • the distance t in the thickness direction is measured by measuring the distance in the thickness direction. Therefore, the configuration is basically the same as that of the laser distance measuring device 50b of the second embodiment except that the optical paths of the first measurement light and the second measurement light are different.
  • the first measurement light of the first laser light and the second laser light is reflected by the mirror 8a, the mirror 8b, and the mirror 8c provided on the optical path and is transmitted from the first emission port 16a.
  • the light is emitted toward the second emission port 16b.
  • the first exit port 16a and the second exit port 16b are provided at positions facing each other.
  • the DUT 6 includes the first exit port 16a and the second exit port 16b. It is arranged between.
  • the first measurement light of the first laser beam and the second laser beam emitted from the first emission port 16a is reflected at the first measurement point S1 of the object 6 to be measured, and the mirror 8c, the mirror 8b, the mirror 8a, and the dividing unit. 12 to reach the first light receiving region 18 a of the light receiving unit 18.
  • the first measurement light S1 and the second measurement light of the second laser light are reflected by the mirror 8d, the mirror 8e, and the mirror 8f provided on the optical path, and the first measurement point S1 of the DUT 6 from the second emission port 16b.
  • the light is emitted toward the second measurement point S2 located on the back surface of.
  • the light is reflected at the second measurement point S2 of the DUT 6 and reaches the second light receiving region 18b of the light receiving unit 18 via the mirror 8f, the mirror 8e, the mirror 8d, and the dividing unit 12.
  • the optical path length of the first measurement light and the optical path length of the second measurement light be as equal as possible.
  • the acquisition of the first reference distance data Las 'and the second reference distance data Lbs' in the third distance measuring method and the third laser distance measuring apparatus 50c according to the present invention is performed as follows, for example.
  • a block gauge 7 having a known thickness ta is installed at an intermediate position between the first emission port 16a and the second emission port 16b. At this time, the distance from the first exit port 16a to the block gauge 7 and the distance from the second exit port 16b to the block gauge 7 are arranged substantially equal.
  • the thickness ta of the block gauge 7 is preferably thinner than the thickness t of the object 6 to be measured.
  • the first laser irradiation unit 10a and the second laser irradiation unit 10b are operated to irradiate the first laser beam and the second laser beam simultaneously.
  • the first measurement light of the first laser light and the second laser light is reflected at the first measurement point S ⁇ b> 1 ′ of the block gauge 7.
  • the second measurement light of the first laser light and the second laser light is reflected at the second measurement point S2 'located on the back surface of the first measurement point S1' (irradiation step).
  • steps equivalent to the first light / dark data creation step to the second distance data acquisition step in the second distance measuring method are performed.
  • the base point of the measured light / dark data in the first distance data acquisition step and the second distance data acquisition step can be basically set at an arbitrary position. However, the base point set here cannot be changed when the object 6 is measured. Then, the first distance data La ′ obtained in the first distance data acquisition step becomes the first reference distance data Las ′, and the second distance data Lb ′ obtained in the second distance data acquisition step becomes the second reference distance data Lbs ′. It becomes.
  • the first reference distance data Las ' corresponds to the optical path difference between the first measurement light and the first reference light reflected at the first measurement point S1' of the block gauge 7.
  • the second reference distance data Lbs ′ corresponds to the optical path difference between the second measurement light and the second reference light reflected at the second measurement point S ⁇ b> 2 ′ of the block gauge 7.
  • the above is the method for obtaining the first reference distance data Las 'and the second reference distance data Lbs' suitable for the distance measuring device 50c.
  • the calculated brightness data is created by performing the same steps as the calculated brightness data creation step in the second distance measuring method.
  • the DUT 6 is disposed between the first exit port 16a and the second exit port 16b.
  • the irradiation step to the second distance data acquisition step in the second distance measuring method are performed.
  • the first distance data La ′ acquired in the first distance data acquisition step here corresponds to the optical path difference between the first measurement light and the first reference light reflected at the first measurement point S1 of the object 6 to be measured.
  • the second distance data Lb ′ acquired in the second distance data acquisition step corresponds to the optical path difference between the second measurement light and the second reference light reflected at the second measurement point S2 of the object 6 to be measured.
  • the computing unit 20 includes the first distance data La ′ obtained in the first distance data obtaining step, the second distance data Lb ′ obtained in the second distance data obtaining step, and the first reference distance data Las ′.
  • the distance L in the thickness direction between the first measurement point S1 and the second measurement point S2 that is, the thickness t of the object 6 to be measured is as follows: (A ranging step in the third ranging method) is calculated as follows.
  • the distance L ′ is calculated from the first distance data La ′, the second distance data Lb ′, the first reference distance data Las ′, and the second reference distance data Lbs ′ by the following formula.
  • the distance L ′ corresponds to the pixel length obtained by subtracting the thickness ta of the block gauge 7 from the thickness t of the object 6 to be measured.
  • L ′ ((La′ ⁇ Las ′) + (Lb′ ⁇ Lbs ′)) / 2
  • the distance L ′ is calculated by converting the pixel length of the distance L ′ into an actual length.
  • the thickness t of the object to be measured 6 is calculated by adding the thickness ta of the block gauge 7 to the obtained distance L.
  • the optical path length of the reference light is continuously changed in the optical path by installing the reflecting portion 14 at a predetermined angle ⁇ . Can be made. Thereby, interference fringes are formed in the measurement light received by the light receiving unit 18 and the interference light by the reference light, and measurement light / dark data can be created based on the light intensity data of each light receiver 22 of the light receiving unit 18. . Then, distance measurement is performed by comparing the measured brightness / darkness data with the calculated brightness / darkness data calculated in advance. Thus, the distance or thickness in the thickness direction of the object to be measured can be measured with high accuracy without using mechanical means in the optical system.
  • the laser beam division direction may be an arbitrary angle between the direction parallel to the paper surface and the direction perpendicular to the paper surface, and the optical path of each laser beam may take any three-dimensional optical path.
  • the configuration of each part of the other laser distance measuring devices 50a to 50c can be changed and implemented without departing from the gist of the present invention.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

[Problème] L'objectif est de concevoir un procédé de télémétrie et un dispositif de télémétrie laser permettant de mesurer la distance à laquelle se trouve un objet avec une grande précision en utilisant la cohérence caractéristique de la lumière laser, au lieu d'utiliser un moyen mécanique dans un système optique. [Solution] Avec le procédé de télémétrie et le dispositif de télémétrie laser de l'invention, en disposant une unité réfléchissante (14) de façon à ce qu'elle soit inclinée à un angle prédéterminé θ, il est possible de faire varier la longueur du chemin optique d'une lumière de référence de manière continue au sein d'un chemin optique. Une frange d'interférence est ainsi formée dans la lumière d'interférence de la lumière de mesure et de la lumière de référence reçues par une unité de réception de lumière (18) et des données de contraste de mesure peuvent être créées sur la base de données d'intensité lumineuse provenant de chaque photodétecteur (22) de l'unité de réception de lumière (18). La distance est ensuite mesurée sur la base des données de contraste de mesure. L'épaisseur ou une distance dans le sens de l'épaisseur d'un objet peut ainsi être mesurée avec une grande précision sans employer de moyen mécanique dans un système optique.
PCT/JP2012/055901 2011-03-29 2012-03-08 Procédé de télémétrie et dispositif de télémétrie laser Ceased WO2012132811A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
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CN104567692A (zh) * 2015-01-07 2015-04-29 中国船舶重工集团公司第七一〇研究所 一种水下拖曳作业宽度自动监测系统
EP3531118A4 (fr) * 2016-10-20 2019-11-20 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Dispositif de détection et procédé de détection de défauts de puce

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Publication number Priority date Publication date Assignee Title
JP2007071817A (ja) * 2005-09-09 2007-03-22 Tottori Univ 二光束干渉計及び同干渉計を用いた被測定物の形状測定方法
WO2008099788A1 (fr) * 2007-02-13 2008-08-21 Naoyuki Koyama Procédé de mesure de distance et dispositif de mesure de distance par laser
JP2010014426A (ja) * 2008-07-01 2010-01-21 Topcon Corp 測定装置
WO2010016126A1 (fr) * 2008-08-07 2010-02-11 Koyama Naoyuki Procédé de mesure de distance et télémètre à laser

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JP2007071817A (ja) * 2005-09-09 2007-03-22 Tottori Univ 二光束干渉計及び同干渉計を用いた被測定物の形状測定方法
WO2008099788A1 (fr) * 2007-02-13 2008-08-21 Naoyuki Koyama Procédé de mesure de distance et dispositif de mesure de distance par laser
JP2010014426A (ja) * 2008-07-01 2010-01-21 Topcon Corp 測定装置
WO2010016126A1 (fr) * 2008-08-07 2010-02-11 Koyama Naoyuki Procédé de mesure de distance et télémètre à laser

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104567692A (zh) * 2015-01-07 2015-04-29 中国船舶重工集团公司第七一〇研究所 一种水下拖曳作业宽度自动监测系统
CN104567692B (zh) * 2015-01-07 2017-05-03 中国船舶重工集团公司第七一〇研究所 一种水下拖曳作业宽度自动监测系统
EP3531118A4 (fr) * 2016-10-20 2019-11-20 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Dispositif de détection et procédé de détection de défauts de puce
US10942129B2 (en) 2016-10-20 2021-03-09 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Chip defect detection device and detection method

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