WO2012143467A3 - Verfahren zur herstellung einer solarzelle - Google Patents

Verfahren zur herstellung einer solarzelle Download PDF

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Publication number
WO2012143467A3
WO2012143467A3 PCT/EP2012/057201 EP2012057201W WO2012143467A3 WO 2012143467 A3 WO2012143467 A3 WO 2012143467A3 EP 2012057201 W EP2012057201 W EP 2012057201W WO 2012143467 A3 WO2012143467 A3 WO 2012143467A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
back side
emitter
front side
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/057201
Other languages
English (en)
French (fr)
Other versions
WO2012143467A2 (de
Inventor
Christine MEYER
Agata Lachowicz
Yvonne GASSENBAUER
Gabriele Blendin
Jens Dirk MOSCHNER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecoran GmbH
Original Assignee
Schott Solar AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Solar AG filed Critical Schott Solar AG
Priority to DE112012001787.0T priority Critical patent/DE112012001787A5/de
Publication of WO2012143467A2 publication Critical patent/WO2012143467A2/de
Publication of WO2012143467A3 publication Critical patent/WO2012143467A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
    • H10F77/223—Arrangements for electrodes of back-contact photovoltaic cells for metallisation wrap-through [MWT] photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
    • H10F77/227—Arrangements for electrodes of back-contact photovoltaic cells for emitter wrap-through [EWT] photovoltaic cells, e.g. interdigitated emitter-base back-contacts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)

Abstract

Die Erfindung bezieht sich auf ein Verfahren zur Herstellung einer MWT-PERC- Solarzelle, bei der Öffnungen im Substrat der Solarzelle durchkontaktiert werden und auf der Rückseite der Solarzelle vorhandene Emitterbereiche durch Diffusion außerhalb der Durchkontaktierung vollständig entfernt werden und auf der Rückseite eine dielektrische Schicht aufgetragen wird. Um beim Entfernen des rückseitig verlaufenden Emitterbereichs den frontseitigen Emitter nicht anzugreifen, wird vorgeschlagen, dass auf der Frontseite eine Opferschicht ausgebildet wird, die beim Ätzen der auf der Rückseite der Solarzellen vorhandenen Emitterbereiche den frontseitigen Emitter schützt und/oder dass beim Abätzen der auf der Rückseite vorhandenen Emitterbereichen ein von der Frontseite her wirkendes Medium der Ätzwirkung des die Öffnungen durchsetzenden Ätzmediums entgegenwirkt.
PCT/EP2012/057201 2011-04-19 2012-04-19 Verfahren zur herstellung einer solarzelle Ceased WO2012143467A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112012001787.0T DE112012001787A5 (de) 2011-04-19 2012-04-19 Verfahren zur Herstellung einer Solarzelle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011002174.4 2011-04-19
DE102011002174 2011-04-19

Publications (2)

Publication Number Publication Date
WO2012143467A2 WO2012143467A2 (de) 2012-10-26
WO2012143467A3 true WO2012143467A3 (de) 2013-02-21

Family

ID=45974355

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP2012/057192 Ceased WO2012143460A2 (de) 2011-04-19 2012-04-19 Verfahren zur herstellung einer solarzelle
PCT/EP2012/057201 Ceased WO2012143467A2 (de) 2011-04-19 2012-04-19 Verfahren zur herstellung einer solarzelle

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/057192 Ceased WO2012143460A2 (de) 2011-04-19 2012-04-19 Verfahren zur herstellung einer solarzelle

Country Status (6)

Country Link
US (1) US20140299182A1 (de)
EP (1) EP2700107A2 (de)
CN (1) CN103620800A (de)
DE (1) DE112012001787A5 (de)
TW (2) TW201251067A (de)
WO (2) WO2012143460A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012217078B4 (de) * 2012-09-21 2015-03-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen einer photovoltaischen Solarzelle
DE102012223698A1 (de) * 2012-12-19 2014-06-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Konzentratorsystem
TWI581442B (zh) * 2013-05-13 2017-05-01 昱晶能源科技股份有限公司 太陽能電池之製造方法
CN103762278A (zh) * 2014-01-29 2014-04-30 英利集团有限公司 一种mwt太阳能电池及其制作方法
CN108336162A (zh) * 2018-02-08 2018-07-27 浙江晶科能源有限公司 一种双面太阳能电池及其制造方法
CN109545906A (zh) * 2018-12-24 2019-03-29 江苏日托光伏科技股份有限公司 一种mwt+perc太阳能电池的生产方法
CN111245366B (zh) * 2020-01-09 2021-05-18 徐州谷阳新能源科技有限公司 一种mwt太阳能电池改善稳态的psg调整和测试方法
CN116314415B (zh) * 2023-02-10 2024-09-27 天合光能股份有限公司 背接触太阳能电池和制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2068369A1 (de) * 2007-12-03 2009-06-10 Interuniversitair Microelektronica Centrum (IMEC) Photovoltaikzellen mit Metal-Wrap-Through und verbesserter Passivierung
DE102009005168A1 (de) * 2009-01-14 2010-07-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Verfahren zur Herstellung einer Solarzelle aus einem Siliziumsubstrat
US20110000530A1 (en) * 2007-11-19 2011-01-06 Stichting Energieonderzoek Centrum Nederland Method of fabrication of a back-contacted photovoltaic cell, and back-contacted photovoltaic cell made by such a method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101046287B1 (ko) 2004-03-22 2011-07-04 레나 게엠베하 기판 표면 처리 방법
KR20050122498A (ko) * 2004-06-24 2005-12-29 삼성에스디아이 주식회사 감광성 페이스트 조성물, 이를 이용하여 제조된 ｐｄｐ전극, 및 이를 포함하는 ｐｄｐ
KR20080075156A (ko) * 2005-11-07 2008-08-14 어플라이드 머티어리얼스, 인코포레이티드 광전지 콘택 및 배선 형성 방법
DE102005062527A1 (de) 2005-12-16 2007-06-21 Gebr. Schmid Gmbh & Co. Vorrichtung und Verfahren zur Oberflächenbehandlung von Substraten
KR101627217B1 (ko) 2009-03-25 2016-06-03 엘지전자 주식회사 태양전지 및 그 제조방법
JP2011017052A (ja) 2009-07-09 2011-01-27 Adeka Corp 銅含有材料のウエットエッチングシステム及びパターニング方法
NL2005261C2 (en) 2010-08-24 2012-02-27 Solland Solar Cells B V Back contacted photovoltaic cell with an improved shunt resistance.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110000530A1 (en) * 2007-11-19 2011-01-06 Stichting Energieonderzoek Centrum Nederland Method of fabrication of a back-contacted photovoltaic cell, and back-contacted photovoltaic cell made by such a method
EP2068369A1 (de) * 2007-12-03 2009-06-10 Interuniversitair Microelektronica Centrum (IMEC) Photovoltaikzellen mit Metal-Wrap-Through und verbesserter Passivierung
DE102009005168A1 (de) * 2009-01-14 2010-07-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Verfahren zur Herstellung einer Solarzelle aus einem Siliziumsubstrat

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FLORIAN CLEMENT: "DIE METAL WRAP THROUGH SOLARZELLE - ENTWICKLUNG UND CHARAKTERISIERUNG", DISSERTATION, 1 January 2009 (2009-01-01), Freiburg im Breisgau, Germany, XP055046139, Retrieved from the Internet <URL:http://www.freidok.uni-freiburg.de/volltexte/6832/pdf/Diss_Clement_30jun09_final.pdf> [retrieved on 20121130] *
SCHUBERT G: "Thick Film Metallisation of Crystalline Silicon Solar Cells - Mechanisms, Models and Applications", DISSERTATION, UNIVERSITÄT KONSTANZ, FACHBEREICH PHYSIK,, 13 June 2007 (2007-06-13), pages I - V, XP002571398 *

Also Published As

Publication number Publication date
WO2012143460A3 (de) 2013-01-24
EP2700107A2 (de) 2014-02-26
WO2012143467A2 (de) 2012-10-26
DE112012001787A5 (de) 2014-01-16
TW201251067A (en) 2012-12-16
TW201248904A (en) 2012-12-01
WO2012143460A2 (de) 2012-10-26
CN103620800A (zh) 2014-03-05
US20140299182A1 (en) 2014-10-09

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