WO2012159625A3 - Quasimonolithische polarisationsstrahlteilerbaugruppe - Google Patents

Quasimonolithische polarisationsstrahlteilerbaugruppe Download PDF

Info

Publication number
WO2012159625A3
WO2012159625A3 PCT/DE2012/100152 DE2012100152W WO2012159625A3 WO 2012159625 A3 WO2012159625 A3 WO 2012159625A3 DE 2012100152 W DE2012100152 W DE 2012100152W WO 2012159625 A3 WO2012159625 A3 WO 2012159625A3
Authority
WO
WIPO (PCT)
Prior art keywords
beam splitter
polarization beam
splitter assembly
quasi
monolithic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2012/100152
Other languages
English (en)
French (fr)
Other versions
WO2012159625A2 (de
Inventor
Sven Laux
Jörg-Peter SCHMIDT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik Optical Systems GmbH
Original Assignee
Jenoptik Optical Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems GmbH filed Critical Jenoptik Optical Systems GmbH
Priority to DE112012002246.7T priority Critical patent/DE112012002246A5/de
Priority to EP12761882.5A priority patent/EP2715427A2/de
Publication of WO2012159625A2 publication Critical patent/WO2012159625A2/de
Publication of WO2012159625A3 publication Critical patent/WO2012159625A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/142—Coating structures, e.g. thin films multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Polarising Elements (AREA)
  • Optical Head (AREA)

Abstract

Die Anmeldung betrifft eine quasimonolithische Polarisationsstrahlteilerbaugruppe, zur Teilung eines UV-Strahles in zwei Teilstrahlen, bestehend aus zwei optischen Prismen (1), die einen Polarisationsstrahlteiler (2) bilden und einem mit dem Polarisationsstrahlteiler (2) verbundenen Halteteil (6) ohne optisch wirksame Flächen. Die Anmeldung betrifft auch ein Verfahren zur Herstellung einer solchen Polarisationsstrahlteilerbaugruppe, die sich dadurch auszeichnet, dass die hindurchtretenden Teilstrahlen auch nach Fassen der Polarisationsstrahlteilerbaugruppe in einer optischen Fassung eine nur sehr geringe Wellenfrontdeformation erfahren.
PCT/DE2012/100152 2011-05-26 2012-05-22 Quasimonolithische polarisationsstrahlteilerbaugruppe Ceased WO2012159625A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112012002246.7T DE112012002246A5 (de) 2011-05-26 2012-05-22 Quasimonolithische Polarisationsstrahlteilerbaugruppe
EP12761882.5A EP2715427A2 (de) 2011-05-26 2012-05-22 Quasimonolithische polarisationsstrahlteilerbaugruppe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011050644 2011-05-26
DE102011050644.6 2011-05-26

Publications (2)

Publication Number Publication Date
WO2012159625A2 WO2012159625A2 (de) 2012-11-29
WO2012159625A3 true WO2012159625A3 (de) 2013-01-17

Family

ID=46888280

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2012/100152 Ceased WO2012159625A2 (de) 2011-05-26 2012-05-22 Quasimonolithische polarisationsstrahlteilerbaugruppe

Country Status (3)

Country Link
EP (1) EP2715427A2 (de)
DE (1) DE112012002246A5 (de)
WO (1) WO2012159625A2 (de)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784469A (en) * 1986-09-17 1988-11-15 Matsushita Electric Industrial Co., Ltd. Beam splitter for color imaging equipment
US5339441A (en) * 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20050162621A1 (en) * 2004-01-22 2005-07-28 Fujinon Corporation Projector

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757962B2 (ja) 2003-03-18 2006-03-22 コニカミノルタオプト株式会社 光ピックアップ用プリズム及び光ピックアップの製造方法
DE102005060517A1 (de) 2005-12-12 2007-06-21 Carl Zeiss Smt Ag Belastungsfester Prismenpolarisator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784469A (en) * 1986-09-17 1988-11-15 Matsushita Electric Industrial Co., Ltd. Beam splitter for color imaging equipment
US5339441A (en) * 1992-07-02 1994-08-16 Advanced Intervention Systems, Inc. Polarizing device with optically contacted thin film interface for high power density ultraviolet light
US20050162621A1 (en) * 2004-01-22 2005-07-28 Fujinon Corporation Projector

Also Published As

Publication number Publication date
DE112012002246A5 (de) 2014-03-13
EP2715427A2 (de) 2014-04-09
WO2012159625A2 (de) 2012-11-29

Similar Documents

Publication Publication Date Title
WO2012073086A8 (en) Optical device, laser apparatus, and extreme ultraviolet light generation system
WO2016077171A3 (en) Laser processing of transparent article using multiple foci
WO2011126731A3 (en) Wavelength combining apparatus, system and method
UA95565C2 (ru) Защитное устройство на основе фотонного кристалла и способ формирования такого устройства
WO2013002988A3 (en) Illumination control
WO2010030575A3 (en) Adaptive optic beamshaping in laser processing systems
WO2014133980A8 (en) Optical system for near-eye display
DE602007004659D1 (de) System, Verfahren und Vorrichtung für ein mikrogefertigtes Interferometer mit optischem Strahlteiler
WO2009062929A3 (en) Beam device and system comprising a particle beam device and an optical microscope
WO2013007945A3 (fr) Dispositif et procede passif de combinaison coherente d'une pluralite d'amplificateurs optiques
WO2018063546A8 (en) MICRO-OPTICAL ASSEMBLIES AND OPTICAL INTERROGATION SYSTEMS
WO2008123519A1 (ja) レーザ加工装置及びレーザ加工方法
WO2017009808A3 (en) Free space optical communication system, apparatus and a method thereof
WO2014023828A3 (de) Anordnung zum bearbeiten von werkstücken mit einem laserstrahl
TW200622335A (en) Optical system for spatially controlling light polarization and method for manufacturing the same
WO2013037861A3 (fr) Unite optique, notamment pour vehicule automobile, comportant deux sources lumineuses et une lentille multifocale convergente
JP2017523609A5 (de)
WO2015024877A3 (de) Operationsmikroskop mit optischen schnittstellen
WO2012066127A3 (de) Patronenaufnahme und verfahren zur herstellung der patronenaufnahme
TW200625296A (en) Design method of optical element and objective lens
WO2012159625A3 (de) Quasimonolithische polarisationsstrahlteilerbaugruppe
ATE544206T1 (de) Verfahren und anordnung zur erzeugung von azimutaler polarisation in einer laserlichtquelle und verwendung dieser anordnung zur lasermaterialbearbeitung
IL232807B (en) Bone lens with a combination of mirrors and lenses for measuring reflections
TW200726565A (en) Laser processing apparatus using laser beam splitting
WO2012064141A3 (ko) 광학 소자

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12761882

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 112012002246

Country of ref document: DE

Ref document number: 1120120022467

Country of ref document: DE

ENP Entry into the national phase

Ref document number: 13325

Country of ref document: GE

Kind code of ref document: P

REG Reference to national code

Ref country code: DE

Ref legal event code: R225

Ref document number: 112012002246

Country of ref document: DE

Effective date: 20140313