WO2012161536A2 - Pomme de douche multicouche et procédé de fermeture étanche de cette derniere - Google Patents

Pomme de douche multicouche et procédé de fermeture étanche de cette derniere Download PDF

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Publication number
WO2012161536A2
WO2012161536A2 PCT/KR2012/004125 KR2012004125W WO2012161536A2 WO 2012161536 A2 WO2012161536 A2 WO 2012161536A2 KR 2012004125 W KR2012004125 W KR 2012004125W WO 2012161536 A2 WO2012161536 A2 WO 2012161536A2
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WO
WIPO (PCT)
Prior art keywords
plate
guide tube
gas guide
gas
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2012/004125
Other languages
English (en)
Korean (ko)
Other versions
WO2012161536A3 (fr
Inventor
변철수
김종석
정훈
김선창
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Institute of Industrial Technology KITECH
Original Assignee
Korea Institute of Industrial Technology KITECH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Institute of Industrial Technology KITECH filed Critical Korea Institute of Industrial Technology KITECH
Priority to KR1020157018817A priority Critical patent/KR101947519B1/ko
Priority to KR1020137019237A priority patent/KR20130115330A/ko
Publication of WO2012161536A2 publication Critical patent/WO2012161536A2/fr
Publication of WO2012161536A3 publication Critical patent/WO2012161536A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber

Definitions

  • the present invention relates to a multi-layered shower head and a sealing method thereof, and in particular, the upper plate, the separating plate, and the lower plate in a shower head body in which an inner empty space is divided into an upper space and a lower space by a separating plate installed between the upper plate and the lower plate.
  • a multi-layered shower head which tightly seals the gap between the gas guide tube and the upper plate, the separating plate, or the lower plate through which the gas guide tube and the gas guide tube penetrate the at least one separation guide plate. It relates to a sealing method.
  • a shower head capable of uniformly injecting process gas into the process chamber has been applied.
  • a multi-layered showerhead has been proposed, which allows the inside of the showerhead to be divided into an upper space and a lower space through a separation plate so that the gas can be sprayed uniformly over a large area or multiple gases can be sprayed at the same time. It would be.
  • FIG. 1 is a view for explaining a conventional multi-layered shower head 100 that can spray several gases at the same time.
  • the inner empty space of the body 50 is separated into upper and lower spaces 31 and 32 by the separating plate 30, and the upper space 31 is disposed in the upper space 31.
  • the first gas injection pipe 10 is installed, and the lower space 32 is provided with a second gas injection pipe 20.
  • the first gas guide tube 33 is fitted into the separation plate 30 so as to pass through the lower space 32 and penetrate the bottom surface of the body 50.
  • a gas outlet 11 is formed.
  • the bottom surface of the body 50 is formed with a through hole which serves as the second gas outlet 21 in a position not overlapping with the first gas outlet 11.
  • the first gas 10a flowing into the upper space 31 through the first gas injection pipe 10 is showered through the first gas outlet 11 by the first gas guide tube 33.
  • the second gas 20a sprayed downward of the head 100 and introduced into the lower space 32 through the second gas injection pipe 20 is connected to the shower head 100 through the second gas outlet 21.
  • a plurality of gases in the process chamber through the shower head 100 is independently provided simultaneously or at a time.
  • the problem to be solved by the present invention at least the separation plate of the top plate, the separation plate, and the bottom plate in the shower head body that the inner empty space is divided into the upper space and the lower space by the separation plate installed between the upper plate and the lower plate.
  • the gas guide tube is installed to penetrate through the gas guide tube and the gas guide tube through which the gap between the upper plate, the separating plate, or the bottom plate to provide a multi-layered shower head and a sealing method thereof have.
  • Multi-layered shower head for achieving the above object
  • a process gas injection pipe installed in the upper space
  • a gas guide tube installed to penetrate at least the separation plate of the upper plate, the separation plate, and the bottom plate of the body
  • a through hole is formed to correspond to a portion where the gas guide tube is installed, and the gas guide tube is brazed in a state where it is placed on any one of the upper plate, the separating plate, and the lower plate through which the gas guide tube passes.
  • a filler sheet installed to seal and seal a gap between the upper plate, the separating plate, and the lower plate through which the pipe and the gas guide tube pass.
  • the gas guide tube may be installed only in the separation plate so that the gas diffused from the upper space flows into the lower space, or the gas diffused from the upper space passes through the lower space without being exposed to the lower space. It may be installed to penetrate the separation plate and the bottom plate to be sprayed under the bottom plate of the body.
  • the gas guide tube is installed to penetrate the upper plate, the separating plate, and the lower plate, so that the process gas is sprayed under the lower plate of the body through the body without being exposed to the internal space of the body through the gas guide tube.
  • the filler sheet is preferably made of a nickel-based alloy.
  • the nickel-based alloy is preferably made of boron.
  • the through hole of the filler sheet may be formed by irradiation of high power laser or wet etching.
  • the filler sheet preferably has a thickness of 40 ⁇ 70um, the brazing treatment is preferably made in a temperature range of 950 ⁇ 1200 °C.
  • Multilayer showerhead sealing method for achieving the above object
  • the gas guide tube is installed after placing a filler sheet having a through hole corresponding to a portion where the gas guide tube is installed on any one of the upper plate, the separating plate, and the lower plate through which the gas guide tube will pass. Doing; And
  • the filler sheet is made of a nickel-based alloy containing boron
  • the brazing treatment is preferably made in a temperature range of 950 ⁇ 1200 °C.
  • the brazing filler liquid (a mixture of binder and paste) is applied to the gap A between the gas guide tube and the separation plate, or a plurality of sheets in a ring form are formed, one for each gas guide tube.
  • the method of brazing after placing instead of placing a sheet with a through hole corresponding to the gas guide tube on the separating plate and brazing, it is very easy to manufacture a sealable shower head. And reliably.
  • the sheet may be a plurality of sheets divided into several, not a single sheet.
  • FIG. 1 is a view for explaining a conventional multilayer showerhead 100
  • FIG. 2 is a view for explaining the multilayer showerhead 101 according to the first embodiment of the present invention.
  • FIG. 3 is a view for explaining a filler sheet 160 of FIG. 2;
  • FIG. 4 is a view for explaining a multilayer showerhead 101 according to a second embodiment of the present invention.
  • FIG. 5 is a view for explaining a multilayer showerhead 201 according to a third embodiment of the present invention.
  • FIG. 6 is a view from above of the separating plate 230 of FIG. 5;
  • FIG. 7 is a view for explaining the multilayer showerhead 201 'according to the fourth embodiment of the present invention.
  • FIG. 2 is a view for explaining the multi-layered shower head 101 according to the first embodiment of the present invention.
  • the multilayer shower head 101 is divided into upper and lower spaces 131 and 132 by a separation plate 130 installed between an upper empty space of the body 150 and an upper plate and a lower plate.
  • the first gas injection pipe 110 is installed in the space 131
  • the second gas injection pipe 120 is installed in the lower space 132.
  • a gas guide tube 133 is inserted into the separation plate 130 so as to pass through the lower space 132 and penetrate the lower plate of the body 150, so that the lower end portion of the gas guide tube 133 is first gas outlet 111. ).
  • the lower plate of the body 150 is formed with a through hole that serves as the second gas outlet 121 in a position not overlapping with the first gas outlet 111.
  • the first gas (110a) flowing into the upper space 131 through the first gas injection pipe 110 is the shower head (1) through the first gas outlet 111 by the gas guide pipe 133 (
  • the second gas 120a which is injected downward of the 101 and flows into the lower space 132 through the second gas injection pipe 120 is downward of the shower head 101 through the second gas outlet 121.
  • the first gas 110a staying in the upper space 131 is undesirably introduced into the lower space 132. Since the first gas 110a and the second gas 110b are not mixed in the lower space 132 before being sprayed from the shower head 101, a problem may occur that does not correspond to the process recipe.
  • the filler sheet 160 is installed on the separation plate 130 to seal the gap A between the separation plate 130 and the gas guide tube 133.
  • FIG. 3 is a diagram for describing the filler sheet 160 of FIG. 2.
  • the filler sheet 160 is preferably made of a 40-70um thick nickel-based alloy including 70-90 wt% nickel and 1-10 wt% boron.
  • the through hole 160a is formed corresponding to the portion where the guide tube 133 is provided.
  • the through hole 160a may be formed through high power laser irradiation or wet etching.
  • the gas guide tube 133 is inserted into the separator plate 130 and brazed under conditions of 950 to 1200 ° C. and 10 ⁇ 1 to 10 ⁇ 2 torr.
  • the gap A is sealed and bonded through the gap A between the gas guide tube 133 and the separation plate 130 through wetness and capillary action.
  • the filler sheet 160 should have strong corrosion resistance to various gases, it is preferable to use a nickel alloy in this way.
  • the melting point may vary slightly depending on the amount of boron for flowability. If the thickness of the filler sheet 160 is too thick, it may be difficult to secure fluidity during the fluid brazing process, and if the thickness is too thin, it may not be sufficient to fill the gap A. Thus, an appropriate thickness should be considered. If the brazing temperature is too high, other parts of the body 150 may be damaged by heat treatment, so it is preferable to reduce the brazing temperature as described above by creating a vacuum environment.
  • the present invention applies the brazing filler liquid (a mixture of the binder and the paste) to the gap A or prepares a plurality of sheets in a ring form and places one by one for each gas guide tube 133 before brazing.
  • the brazing filler liquid a mixture of the binder and the paste
  • the shower head 101 is manufactured. This is done very simply and reliably.
  • FIG. 4 is a view for explaining the multilayer showerhead 101 according to the second embodiment of the present invention, which is an improvement of the gas guide tube 133 of FIG.
  • the first gas 110a flowing into the upper space 131 is provided from the top to the bottom, the first gas 110a does not spread widely on all sides by the longitudinal direction thereof, and thus, at the edge of the shower head 101.
  • the gap g between the upper surface of the gas guide tube 133 and the body 150 is too large, the gas flows into the lower space 130 mainly from the center portion through the gas guide tube 133 before the gas is sufficiently spread in the transverse direction. If the gap g is too small, the transverse flow of the gas is so obstructed that the process uniformity is rather deteriorated and the problem of particle generation due to vortices is required, so proper selection is required.
  • FIG. 5 is a view for explaining the multi-layered shower head 201 according to the third embodiment of the present invention, and is for explaining a case in which gas is uniformly sprayed on a large area.
  • 6 is a view looking down on the separation plate 230 of FIG.
  • the multi-layered shower head 201 is divided into upper and lower spaces 231 and 232 by a separation plate 230 installed between an upper empty space of the body 250 and an upper plate and a lower plate.
  • the gas injection pipe 210 is installed in the upper space 231.
  • a plurality of gas outlets 211 are formed in the lower plate of the body 250, and the gas guide tube 233 is inserted into the separation plate 230 so that the upper space 231 and the lower space 232 communicate with each other.
  • the upper end (t) of the gas guide pipe 233 is installed to protrude above the separation plate 230 for the reason as described in FIG.
  • the upper end (t) of the gas guide tube 233 may not protrude above the separation plate 230.
  • the gas flowing into the upper space 231 through the gas injection pipe 210 is spread evenly to a wide range in the transverse direction by the protrusion (t) of the gas guide pipe 233 in an instant After being introduced into the lower space 232 through the guide tube 233 and dispersed, it is sprayed evenly with respect to the large area under the shower head 100 through the gas outlet 211.
  • FIG. 7 is a view for explaining the multilayer shower head 201 'according to the fourth embodiment of the present invention to describe a case in which two shower heads are overlapped and installed.
  • the upper shower head 201 is essentially the same as the case of FIG. 5, and only the gas outlet 211 extends downward in a tubular shape and penetrates the lower shower head 201 ′.
  • the showerhead 201 ' is also essentially the same as in FIG. 5 except that the gas guide tube 233' is further installed to penetrate the upper plate, the separating plate, and the lower plate of the lower showerhead 201 '.
  • Example 4 it is not preferable to have a gap in the portion where the gas guide tube 233 'penetrates, and thus, the filler sheet 360 is placed on the upper plate, the separating plate, and the lower plate of the shower head body, and the brazing treatment is performed. To seal.
  • the brazing filler liquid (a mixture of binder and paste) is applied to the gap A, or a plurality of sheets in a ring form are formed for each gas guide tube 133 and 233.
  • a sheet having a through hole 160a corresponding to the gas guide tubes 133 and 233 is formed on the separation plate 130 and 230 and brazing. Because of the processing, the manufacture of the shower heads 101, 201, and 201 'is made very simple and reliable.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Nozzles (AREA)

Abstract

La présente invention concerne une pomme de douche comportant un corps de pomme de douche dans lequel un espace vide intérieur est divisé en un espace supérieur et un espace inférieur par une plaque de séparation (130) intercalée entre une plaque inférieure et une plaque inférieure. Lorsqu'un tuyau de guidage de gaz (133) est disposé pour traverser au moins la plaque de séparation (130), la plaque supérieure. la plaque de séparation (130) et la plaque inférieure, une feuille de garniture (160) est placée sur la plaque supérieure, la plaque de séparation (130) ou la plaque inférieure à travers laquelle passe le tuyau de guidage de gaz (133), puis la feuille de garniture (160) est brasée. De cette manière, on ferme hermétiquement un espace existant entre le tuyau de guidage de gaz (133) et la plaque supérieure, la plaque de séparation (130) ou la plaque inférieure qui est traversée par ledit tuyau de guidage de gaz (133).
PCT/KR2012/004125 2011-05-24 2012-05-24 Pomme de douche multicouche et procédé de fermeture étanche de cette derniere Ceased WO2012161536A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020157018817A KR101947519B1 (ko) 2011-05-27 2012-05-24 다층 샤워헤드 및 그 밀봉방법
KR1020137019237A KR20130115330A (ko) 2011-05-24 2012-05-24 다층 샤워헤드 및 그 밀봉방법

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0049102 2011-05-24
KR20110049102 2011-05-27
KR10-2011-0050670 2011-05-27
KR20110050670 2011-05-27

Publications (2)

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WO2012161536A2 true WO2012161536A2 (fr) 2012-11-29
WO2012161536A3 WO2012161536A3 (fr) 2013-03-21

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PCT/KR2012/004125 Ceased WO2012161536A2 (fr) 2011-05-24 2012-05-24 Pomme de douche multicouche et procédé de fermeture étanche de cette derniere

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KR (2) KR20130115330A (fr)
WO (1) WO2012161536A2 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6073577A (en) * 1998-06-30 2000-06-13 Lam Research Corporation Electrode for plasma processes and method for manufacture and use thereof
KR100752622B1 (ko) * 2006-02-17 2007-08-30 한양대학교 산학협력단 원거리 플라즈마 발생장치
KR100923453B1 (ko) * 2007-09-21 2009-10-27 주식회사 피에조닉스 샤워헤드를 구비한 반도체 소자 제조 장비
KR101064210B1 (ko) * 2009-06-01 2011-09-14 한국생산기술연구원 막증착 진공장비용 샤워헤드

Also Published As

Publication number Publication date
KR20130115330A (ko) 2013-10-21
KR20150091520A (ko) 2015-08-11
WO2012161536A3 (fr) 2013-03-21
KR101947519B1 (ko) 2019-02-14

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