WO2013022402A1 - Système de moteur linéaire à densité de force élevée pour positionner une charge - Google Patents

Système de moteur linéaire à densité de force élevée pour positionner une charge Download PDF

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Publication number
WO2013022402A1
WO2013022402A1 PCT/SG2011/000279 SG2011000279W WO2013022402A1 WO 2013022402 A1 WO2013022402 A1 WO 2013022402A1 SG 2011000279 W SG2011000279 W SG 2011000279W WO 2013022402 A1 WO2013022402 A1 WO 2013022402A1
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WO
WIPO (PCT)
Prior art keywords
magnets
row
linear motor
coil assembly
high force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/SG2011/000279
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English (en)
Inventor
Howe Yuen Lim
Chai Meng Goh
Ko Aung KO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akribis Systems Pte Ltd
Original Assignee
Akribis Systems Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akribis Systems Pte Ltd filed Critical Akribis Systems Pte Ltd
Priority to PCT/SG2011/000279 priority Critical patent/WO2013022402A1/fr
Priority to PCT/SG2011/000348 priority patent/WO2013022403A1/fr
Publication of WO2013022402A1 publication Critical patent/WO2013022402A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/14—Stator cores with salient poles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Definitions

  • the present invention relates to a high force linear motor that is used to position a load.
  • the present invention is suitable for a XY table that requires very high dynamics and performance, such as in wire bonding applications.
  • Linear motors are now widely used to position loads in equipment used for manufacturing electronic components and semiconductors.
  • the commonly known advantages of using direct drive are higher acceleration, higher speed, higher accuracy, reduced moving mass, simplified design without complicated transmission systems, and better reliability without any wear and tear of moving parts associated with transmission mechanisms.
  • the moving coil linear motor comprises only copper coils molded together to form a coil assembly, without any iron laminations.
  • US patent 6,713,903 B2 and US patent 6,983,703 B2 both describe the use of moving coil linear motors to drive an XY table. While this type of linear motor is already implemented widely, one disadvantage of such motors is its high costs. Two rows of high energy rare earth magnets need to be placed between the moving coil to generate large forces when current is passed through the coils.
  • the magnets used are typically Neodymium magnets, a rare earth, high energy permanent magnet made from an alloy of neodymium, iron and boron.
  • FIG. 1 Another linear motor commonly used to position loads for an XY table is the iron core linear motor.
  • US patent 5,910,691 1 B2 describes such a motor system.
  • FIG 1 A simplified drawing of an iron core motor of the prior art is shown in Fig 1 .
  • Magnets 1 a, lb and lc are magnets with alternating polarity and are part of a row of magnets which are mounted on magnet back iron 2.
  • the coil assembly comprises coils 3 which are inserted into the slots formed by laminations 4 stacked together. The laminations act as the coil back iron and are used to reduce eddy current losses, although normal magnetic soft iron can also be used.
  • Two magnetic circuits 5a and 5b are shown in the figure, which allows some of the flux to cut through the coils as it circulates around the slots of the laminations.
  • the advantage of the iron core linear motor is the large force it can generate, compared to the ironless and coreless linear motors.
  • the moving mass of the coil is relatively large and this limits the acceleration it can achieve, even without any load.
  • the total mass of the magnets and the magnet back iron is also very significant.
  • Another big disadvantage of the iron core motor is the large attraction force between the magnets and the coil laminations. Due to the small air gap needed for this type of motor to work properly, which is typically in the range of 0.8 mm to 1.1 mm, the attraction force becomes very large. Large bearings with high load rating need to be used to support the motor. Large static friction force is therefore associated with this type of motor system, and this affects the response of the motor during start of motion and end of motion settling performance.
  • a first object of the invention is a n improved high force linear motor system comprising a linear motor with a first coil assembly, a second coil assembly and a plurality of magnets forming a row of magnets, wherein the row of magnets is positioned between the first coil assembly and the second coil assembly, the first coil assembly is aligned along the length of the row of magnets, and the second coil assembly is aligned along the length of the row of magnets, so each coil assembly is geometrically and exactly opposite one another and equidistant from one another about a center mirror line formed by the horizontal axis of the row of magnets; and the force of attraction between the row of magnet and the first coil assembly being completely balanced by the force of attraction between the row of magnets and the second coil assembly
  • the magnets in the row of magnets are movable along the length of the center mirror line formed by the horizontal axis of the row of magnets.
  • the magnets in the row of magnets are each held by a magnet support structure, which is non magnetic.
  • the row of magnets are held by a magnet support structure made from Aluminum.
  • the row of magnets are held by a magnet support structure made from other light but stiff non-metallic materials.
  • the row of magnets be held by a magnet support structure made from fiber reinforced resin. It is also possible that the row of magnets be held by a magnet support structure made from plastic.
  • Sx is the maximum stroke of the X axis
  • Cx is the length of the X coil assembly in the direction of travel
  • Mx is the distance between the edges of the magnets for the X motor in the direction of X travel Sy is the maximum stroke of the Y axis
  • Cy is the length of the Y coil assembly in the direction of Y travel
  • My is the distance between the edges of the magnets for the Y motor in the direction of Y travel Cy is the length of the Y coil assembly in the direction of X travel
  • Myx is the distance between the edges of the magnets for the Y motor in the direction of X travel
  • a second object of the Invention is an improved high force linear motor system in a XY table, comprising a X axis high force linear motor and a Y axis high force linear motor, the high force linear motor of each axis having a first coil assembly, a second coil assembly s and a plurality of magnets forming a row of magnets, wherein the row of magnets is positioned between the first coil assembly and the second coil assembly; the first coil assembly is aligned along the length of the row of magnets, and the second coil assembly is aligned along the length of the row of magnets; so each coil assembly is geometrically and exactly opposite one another and equidistant from one another about a center mirror line formed by the horizontal axis of the row of magnets; and the force of attraction between the row of magnets and the first coil assembly being completely balanced by the force of attraction between the row of magnet and the second coil assembly
  • the row of magnets are not mounted onto any back iron, but are held by a magnet support structure.
  • the row of magnets are held by a magnet support structure, which is non magnetic.
  • the row of magnets are held by a magnet support structure made from Aluminum.
  • the row of magnets are held by a magnet support structure made from other light but stiff non-metallic materials.
  • the row of magnets be held by a magnet support structure made from fiber reinforced resin. It is also possible the row of magnets be held by a magnet support structure made from plastic.
  • the XY table for positioning a load using an X axis high force linear motor and a Y axis high force linear motor has the following relationships:
  • Sx is the maximum stroke of the X axis
  • Cx is the length of the X coil in the direction of travel
  • Mx is the distance between the edges of the magnets for the X motor in the direction of X travel
  • Sy is the maximum stroke of the Y axis
  • Cy is the length of the Y coil in the direction of Y travel
  • My is the distance between the edges of the magnets for the Y motor in the direction of Y travel
  • Cy is the length of the Y coil in the direction of X travel
  • Fig 1 is a simplified drawing of an iron core motor of the prior art.
  • Fig 2 is an illustration of the high force linear motor of the invention.
  • Fig 3 is an illustration of a possible design of how the magnets are mounted in a support structure.
  • Fig 4 is an illustration of the inventive device having two coil assemblies with a geometrically symmetrical arrangement.
  • Fig 5 is an illustration of the improved high force linear motors in an XY table, such as for wire bonding application.
  • Fig 6 shows a plan view of the X axis of the improved high force linear motor in a XY Table.
  • Fig 7 shows a plan view of the Y axis of the improved high force linear motor in a XY Table.
  • the present invention provides a linear motor with very high force, low moving mass and zero net attraction force between the magnets and the coil laminations,
  • the motor also uses a relatively small volume of magnets, thereby reducing the costs of production.
  • FIG. 1 The arrangement of this high force linear motor is illustrated in Fig 2.
  • a row of magnets 6 is positioned in the center, between two coil assembly, a 1 st coil assembly 7a and a 2 nd coil assembly 7b.
  • the two coil assemblies are aligned exactly along the length of the row of magnets, so that in essence the 2 nd coil assembly is geometrically an exact and opposite image of the 1 st coil assembly, with the horizontal axis of the row of magnets forming a center line equidistant from the 1 st and 2 nd coil assemblies.
  • the row of magnets form a center mirror line equidistant from the 1 st and 2 nd coil assemblies.
  • the flux circuit 8 illustrates the flow of the flux, with the flux lines flowing in the same direction as the polarity of the magnets, without any magnet back iron necessary.
  • the attraction force between the magnets and the 1 st coil assembly is completely balanced by the force of attraction between the magnets and the 2 nd coil assembly.
  • This allows the use of smaller linear bearings, or even frictionless air bearings. It is needless to say that it is also possible to have the magnets stationary, and to move the coil with this design, although it is not a preferred way unless there is some special reason to do so.
  • the magnets are not free to float in the air, but are mounted on a support structure. In this new design, the support structure need not and should not be magnetic soft iron.
  • a light weight, non magnetic material, such as aluminum or fiber reinforced plastic or resin material can be used.
  • Fig 3 is an illustration of a possible arrangement of the magnet in the support structure. This involves machining pockets or slots in the support structure that fit the magnets exactly and the magnets are fixed easily into their respective position and orientation. Magnets 9a and 9b are inserted into the support structure 10. The face of magnets 9a, 9b, may flush with the surface of the support structure 10, or the magnets 9a, 9b can be slightly thinner than the support structure 10.
  • the magnets 9a, 9b can be held onto this support structure by means of high strength epoxy.
  • This support structure can be mounted to a linear guidance system, to keep it at the horizontal axis (or mirror centre line) of the row of magnets so that the 1 st and 2 nd coil assemblies are exact and opposite and equidistant from each other. This arrangement allow motion in the desired direction
  • PCT Publication WO 2004/047258 A2 also describes a linear motor with a center row of magnets between two coil assemblies. However, the two coil assemblies are offset from each other, so as to possess an array pitch difference. In order to actuate and move the magnets, the coils have to be energized in a complicated manner, and in the proper sequence. A customized controller and drive system need to specially designed for this purpose.
  • Another PCT Publication WO 93/15547 also describes a similar linear motor with two coil assemblies and one row of magnets, where the two coil assemblies are also offset from each other, such that the emf of the phase of one coil assembly is substantially 90 electrical degrees apart from the emf of the phase of the other coil assembly.
  • the inventive device as shown in Fig 4, consists of two coil assemblies which are geometrically symmetrical, so there is no offset between the 1 st coil assembly and the 2 nd coil assembly.
  • the coils are also energized in the same manner for the 1 st coil assembly and the 2 nd coil assembly.
  • coils 1 1 and coils 12 have currents flowing inwards or in a positive direction
  • coils 13 and coils 14 have a current direction flowing outwards, in a negative direction.
  • the invention allows use of conventional servo control amplifiers that work with all three phase brushless servo motors.
  • the high force linear motor system of this invention gives about 1.8 times the amount of force compared to the conventional linear motor of the prior art, with a force constant of 45.4 N/A with this invention compared to 25.2 N/A with the conventional linear motor.
  • the inventive high force linear motor also has a much higher motor constant of 16.5 N/SqRt(W), which is a measure of the efficiency of the motor.
  • the moving mass of the inventive high force linear motor is also much smaller, thereby yielding a high force constant/mass ratio of 181.6 compared to 38.8 for the conventional linear motor of the prior art. This allows us to achieve higher acceleration and performance with the invention.
  • Fig 5 shows the application of the improved high force linear motor of this invention in an XY table, such as for wire bonding application.
  • the load or work piece is mounted on XY table 1 15, which are typically guided by cross roller bearings, which give high stiffness.
  • the X direction of motion is driven by the X axis high force linear motor 1 16, while the Y direction of motion is driven by the Y axis high force linear motor 1 17.
  • the 2 motors are decoupled.
  • “Decoupling” means separating two motors in a configuration that will enable both motors to work simultaneously and yet the whole weight of one motor is not carried or supported by another motor. Decoupling effectively does not reduce the number of motors.
  • Fig 6 shows a plan view of the X axis improved high force linear motor.
  • the motor comprises the coil 1 18 which has a 1 a and a 2 nd portion according to the invention although the 2 nd section is hidden in this view.
  • Coil 1 18 is fixed to the base, while the moving part is the magnet support structure 1 19, which can be made of Aluminum, for example.
  • Sx is the maximum stroke of the X axis
  • Cx is the length of the X coil assembly_in the direction of travel
  • Mx is the distance between the edges of the magnets for the X axis high force linear motor in the direction of X travel
  • Fig 7 shows a plan view of the Y axis high force linear motor.
  • the motor comprises the coil assembly 120 which has a 1 st and a 2 nd portion according to this invention although the 2 nd section is hidden in this view.
  • Coil assembly 120 is fixed to the base, while the moving part is the magnet support structure 121.
  • the coil assembly 120 is substantially wider than the magnet support structure, to enable the motor to be decoupled from the X axis high force linear motor.
  • the following relationships may be established for the Y axis high force linear motor,
  • Sy is the maximum stroke of the Y axis
  • Cy is the length of the Y coil assembly , in the direction of Y travel
  • My is the distance between the edges of the magnets for the Y axis high force linear motor in the direction of Y travel
  • Cy is the length of the Y coil assembly in the direction of X travel
  • Myx is the distance between the edges of the magnets for the Y axis high force linear motor in the direction of X travel It should be also be noted that the desired travel in the X and Y directions can be less than Sx and Sy, the maximum travels allowed.
  • This invention allows us to have an iron core motor without any magnetic back iron for the magnets. With the elimination of the magnet back iron, many more types of materials can be explored for holding the magnets, since these materials are no longer limited to having high magnetic permeability. Aluminum or other light and stiff non-metallic materials, such as fiber reinforced resin or plastic materials can be used. This results in the reduction of moving mass. Hence, higher accelerations can be achieved when moving the useful load, which is critical in a wire bonding application.
  • the invention allows us to produce higher force with a linear motor. With a corresponding reduction in the moving mass, the performance of the motor is greatly enhanced.
  • the invention also allows decoupling of the motors, so that the moving mass only involves the moving magnet structures of the 2 motors, and not the entire mass of any motor.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un système de moteur linéaire à densité de force élevée amélioré comprenant un moteur linéaire pourvu d'un premier ensemble de bobines, d'un second ensemble de bobines et d'une pluralité d'aimants formant une rangée. La rangée d'aimants est positionnée entre le premier et le second ensemble de bobines, le premier et le second ensemble de bobines étant alignés sur la rangée d'aimants. Les deux ensembles de bobines sont symétriques autour d'une ligne miroir centrale formée par la rangée d'aimants. En conséquence, la force d'attraction entre la rangée d'aimants et le premier ensemble de bobines est totalement équilibrée par la force d'attraction se situant entre la rangée d'aimants et le second ensemble de bobines. L'invention concerne un système de moteur linéaire à densité de force élevée amélioré utilisé dans une table XY, notamment dans des applications de soudure de fils.
PCT/SG2011/000279 2011-08-10 2011-08-10 Système de moteur linéaire à densité de force élevée pour positionner une charge Ceased WO2013022402A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/SG2011/000279 WO2013022402A1 (fr) 2011-08-10 2011-08-10 Système de moteur linéaire à densité de force élevée pour positionner une charge
PCT/SG2011/000348 WO2013022403A1 (fr) 2011-08-10 2011-10-06 Système de moteur linéaire à densité de force élevée pour positionner une charge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG2011/000279 WO2013022402A1 (fr) 2011-08-10 2011-08-10 Système de moteur linéaire à densité de force élevée pour positionner une charge

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PCT/SG2011/000348 Ceased WO2013022403A1 (fr) 2011-08-10 2011-10-06 Système de moteur linéaire à densité de force élevée pour positionner une charge

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015163007A1 (fr) * 2014-04-23 2015-10-29 株式会社日立製作所 Moteur lineaire et appareil utilisant ce moteur
EP4106161A1 (fr) * 2021-06-18 2022-12-21 Isochronic AG Moteur linéaire à double face
CN120454438A (zh) * 2024-02-08 2025-08-08 华为技术有限公司 马达、摄像模组以及电子设备

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111355349B (zh) * 2020-04-13 2021-05-11 南通启电新能源科技有限公司 一种高能利用率的往复式直线发电机的生产工艺

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2467363A (en) * 2009-01-30 2010-08-04 Imra Europ S A S Uk Res Ct A linear actuator
WO2011087453A1 (fr) * 2010-01-14 2011-07-21 Akribis Systems Pte Ltd Système de positionnement xyz à entraînement direct comportant un nombre réduit de pièces mobiles

Family Cites Families (2)

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Publication number Priority date Publication date Assignee Title
JPS63217965A (ja) * 1987-03-05 1988-09-12 Shinko Electric Co Ltd リニアモ−タ
US6271606B1 (en) * 1999-12-23 2001-08-07 Nikon Corporation Driving motors attached to a stage that are magnetically coupled through a chamber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2467363A (en) * 2009-01-30 2010-08-04 Imra Europ S A S Uk Res Ct A linear actuator
WO2011087453A1 (fr) * 2010-01-14 2011-07-21 Akribis Systems Pte Ltd Système de positionnement xyz à entraînement direct comportant un nombre réduit de pièces mobiles

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015163007A1 (fr) * 2014-04-23 2015-10-29 株式会社日立製作所 Moteur lineaire et appareil utilisant ce moteur
JP2015208173A (ja) * 2014-04-23 2015-11-19 株式会社日立製作所 リニアモータ及びそれを用いた機器
US10727727B2 (en) 2014-04-23 2020-07-28 Hitachi, Ltd. Linear motor and apparatus using same
EP4106161A1 (fr) * 2021-06-18 2022-12-21 Isochronic AG Moteur linéaire à double face
WO2022263268A1 (fr) * 2021-06-18 2022-12-22 Isochronic AG Moteur linéaire double face
CN120454438A (zh) * 2024-02-08 2025-08-08 华为技术有限公司 马达、摄像模组以及电子设备

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