WO2013026764A2 - Procédé de passivation électrique de composants électromécaniques - Google Patents

Procédé de passivation électrique de composants électromécaniques Download PDF

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Publication number
WO2013026764A2
WO2013026764A2 PCT/EP2012/066008 EP2012066008W WO2013026764A2 WO 2013026764 A2 WO2013026764 A2 WO 2013026764A2 EP 2012066008 W EP2012066008 W EP 2012066008W WO 2013026764 A2 WO2013026764 A2 WO 2013026764A2
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WO
WIPO (PCT)
Prior art keywords
piezoelectric
layer
ceramic
ceramic layer
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/066008
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German (de)
English (en)
Other versions
WO2013026764A3 (fr
Inventor
Stefan Denneler
Carsten Schuh
Thorsten Steinkopff
Andreas Wolff
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Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
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Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of WO2013026764A2 publication Critical patent/WO2013026764A2/fr
Publication of WO2013026764A3 publication Critical patent/WO2013026764A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Definitions

  • the invention relates to a method for the electrical passivation of electromechanical, in particular piezoelectric components.
  • Piezoceramic components are becoming increasingly important in modern electrical engineering.
  • Piezo actuators are often used as actuators or in fuel injection systems.
  • Piezoactuators are usually designed as multilayer components with a large number of piezoelectric ceramic layers and electrode layers arranged alternately. A corresponding multilayer actuator is described in detail, for example, in DE 102 34 787 C1.
  • Piezo actuators must be operated as electromechanical components partially with high electrical voltages or field strengths.
  • piezoelectric sensors and piezoelectric generators for example piezotransformers
  • the inner electrodes usually extend to the side surfaces of a component, for example a multilayer actuator, in order to achieve the largest possible electrically active surface of the piezoceramic layers.
  • the internal electrodes extend as far as the outside, a large part of the lateral surface is electrically active, whereby the actuator can not be operated directly in electrically conductive liquids such as internal combustion engine fuels, especially in direct injection systems in the automotive sector, since this leads to an electrical short circuit different internal electrodes and thus would lead to the failure of the multilayer actuator.
  • piezoelectric electrical components In order to ensure sufficient protection against surface flashover and the environment, piezoelectric electrical components usually surface passivated.
  • piezoceramic components can be passivated against surface flashovers from surrounding medium by the application of polymers, silicones, silicone elastomer, thermoplastics or polyurethane.
  • the application of the layers is usually done by brushing, spraying or dipping. After the coating is usually carried out a thermal step, which leads to Trock ⁇ voltage or for chemical curing of polymers such as silicone elastomers,.
  • This object is achieved by a method for electrically passivating at least one surface of an electromechanical, in particular piezoelectric, component. transmitting at least one electrode, wherein one of ceramic particles is applied to the passivated to four ⁇ surface by means of aerosol deposition, a ceramic layer.
  • the aerosol deposition of ceramic protective layers on a piezoceramic component makes it possible to provide components with high reliability and service life.
  • the advantages of the aerosol deposition can be combined with the advantageous properties of a ceramic protective layer.
  • the thermal expansion coefficient of a ceramic layer applied for passivation corresponds approximately to that of a piezoceramic Baulemen tes.
  • mechanical stresses can be largely avoided.
  • a ceramic layer can be applied to flat or unre ⁇ regularly shaped, rough and uneven surfaces, for example concave, the convex surfaces, applied by aerosol deposition.
  • surface-conforming protective layers can be applied by means of a surface application of high-density ceramic layers by means of aerosol deposition.
  • special non-planar passivated surfaces of a device against a surrounding medium can be electrically, chemically and / or thermally isolated.
  • the ceramic layer is deposited by means of aerosol deposition of ceramic particles.
  • Preferred is an aerosol deposition by means of the so-called ⁇ aerosol deposition method.
  • aerosol deposition an aerosol is made from a powder.
  • An aerosol separation of particles takes place in particular at high speed and low temperature.
  • the aero- sol may for example be accelerated under the suction effect ⁇ a vacuum pump in a vacuum section.
  • the layer is formed. Before ⁇ preferably the particles emerge from a ver ⁇ movable in three axes nozzle. Alternatively, the device can be moved while the nozzle is stationary.
  • the powder particles strike with a high kinetic energy.
  • a preferred velocity of the particles is in the range of> 10 m / s to -S 3000 m / s, preferably in the range of> 100 m / s to -S 1000 m / s.
  • Particularly suitable for the aerosol deposition are particles with a particle size in the range of> 10 nm to -S 100 ym, preferably in the range of> 100 nm to -S 50 ym, preferably in the range of> 200 nm to -S 10 ym, in particular in the range of> 300 nm to -S 5 ym.
  • the ceramic layer is deposited at temperatures ⁇ 700 ° C, preferably ⁇ 300 ° C from.
  • the ceramic layer is deposited at temperatures in the range of> 18 ° C to ⁇ 300 ° C from. It is particularly advantageous that although the ceramic layer can be deposited at low temperatures, the protective layer, the typical ceramic own sheep ⁇ th has such a good temperature stability.
  • the ceramic layers can be thermally treated. As a result, the properties, in particular the density, can be further improved.
  • the microstructure can be influenced like the mean grain size of the deposited layer.
  • the density and porosity can be adjusted.
  • the density of the layer can be increased.
  • the ⁇ special theoretical density or technologically achievable maximum density of a deposited ceramic layer can be further increased, as this allows a sintering green sheets.
  • a theoretical density or a technologically achievable maximum density in the range of 98 ⁇ 6 to 100% in particular in the range of 99% to 100% of a possible theoretical density or technologically achievable maximum density of 100% can be achieved.
  • Due to the high density of the deposited layer electrical insulation can be ensured.
  • the layer deposited for passivation can fulfill the function of an insulation layer. Furthermore, the diffusion of water or other media can be prevented.
  • the oxygen content of the deposited ceramic layer can be increased. This is advantageous insbesonde- re since the electrical conductivity of the ist ⁇ different layer increases when oxygen escapes, for example, during manufacture. Therefore, by annealing the electrical conductivity of the passivating layer can be lowered in vorteilhaf ⁇ ter manner.
  • the ceramic layer has a thickness in the range of> 0.5 to ym ⁇ 100 ym, before ⁇ preferably in the range of> 1 ym to ⁇ 50 ym, preferably in the loading rich from> 5 ym to ⁇ 20 ym, up.
  • surfaces of a thickness in the range of> 0.5 .mu.m to ⁇ 100 .mu.m can advantageously be deposited on flat as well as on uneven, for example concave or convex contours. This also allows so-called 3D shaping.
  • a small thickness of the passivation layer causes good heat dissipation capability. This is in particular ⁇ sondere beneficial in multilayer actuators.
  • Preferred electromechanical components are piezoelectric ⁇ specific devices, which in addition to the at least one electrode at least one piezoelectric ceramic layer. This active piezoelectric ceramic layer extends on ⁇ due to the piezoelectric effect when an electric voltage across the internal electrodes.
  • the findsschie ⁇ for electrical passivation ceramic layer is formed of materials that form perovskite.
  • the ceramic layer is formed of materials selected from the group consisting of lead zirconate titanate, lithium niobate, potassium sodium niobate, barium titanate, lead magnesium niobate-lead titanate (PMN-PT), lead Zirconium niobate - lead titanate and / or bismuth sodium titanate.
  • the material of the deposited for forming the layer of particle corresponds to the material of the deposited layer and can for example be selected from materials out ⁇ selected from the group comprising lead zirconate titanate, Li ⁇ thiumniobat, potassium sodium niobate, Barium titanate, lead magnesium niobate - lead titanate (PMN-PT), lead zirconium niobate - lead titanate and / or bismuth sodium titanate.
  • lead zirconate titanate Li ⁇ thiumniobat, potassium sodium niobate, Barium titanate, lead magnesium niobate - lead titanate (PMN-PT), lead zirconium niobate - lead titanate and / or bismuth sodium titanate.
  • the material of the deposited for electrical passivation ⁇ vation ceramic layer corresponds to the material of the piezoelectric layer (s) of a piezoelectric component.
  • the material of the Kera ⁇ mik Anlagen is formed of the same material as the active piezoelectric layer.
  • piezoceramic material and "piezoelectric ⁇ cal ceramic” in the context of the present invention, a ceramic material which is piezoelectrically active, as well as such a ceramic material which is piezoelectrically active only by polarization or other pretreatment.
  • a piezoceramic becomes piezoelectrically active by polarization in a homogeneous electric field.
  • Layers of the same material or the same material advantageously have a similar or equal extensibility and / or thermal expansion coefficients as the piezoelectric component and thereby allow use in thermal cycling. Furthermore, a longer life of the device at Temperaturcicbelas ⁇ tion can be provided by the same thermal expansion coefficient.
  • a piezoelectric effect of the insulating layer can be exploited.
  • the ceramic layer is formed from a ceramic electrically isolie ⁇ leaders material selected from the group comprising Alumini ⁇ oxide, magnesium oxide, zirconium oxide, titanium oxide and / or Silizi ⁇ oxide.
  • Layers of an electrically insulating material have the advantage of good electrical insulation. Further comprise ceramic materials selected from the group collectively to ⁇ alumina, magnesia, zirconia, titania and / or silica in an advantageous manner similar elongation and / or thermal expansion coefficient as the piezoelectric ceramic layers. Permit independent ⁇ chen also provide a use of the device at tempera ⁇ turcicbe runung and can last longer on the device during thermal cycling available.
  • the ceramic layer is doped, preferably with metals selected from the group consisting of silver, nickel, manganese, antimony, molybdenum, tantalum, tungsten, hafnium, potassium, calcium, strontium, lithium
  • Rare earth metals are selected from the group comprising scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium and / or lutetium.
  • Preferred dopants are in particular selected from the group comprising silver, nickel, manganese, antimony, molybdenum, tantalum, tungsten, hafnium, potassium, calcium, strontium, lithium or rare earth metals. Dopants are preferably added in the form of their oxides.
  • the ceramic layer preferably has a proportion of dopants ranging from> 0.5% by weight to ⁇ 30% by weight, based on the total weight of the layer.
  • the passivation by means of aerosol deposition may be during or after the production of a component coated ⁇ the.
  • the ceramic layer by means of aerosol deposition is gradually inde pendent ⁇ by sintering a piezoceramic component be applied.
  • a passivation by means of aerosol deposition can be applied at any time during a post-processing of a component. In preferred exporting approximately ⁇ form the piezoelectric component to be sintered and / or edited.
  • the electromechanical, in particular piezoelectric, component is preferably a multilayer component.
  • the piezoelectric ceramic component as a piezoelectric actuator is designed, in particular multi-layer actuator or piezoelectric transducer.
  • the piezoceramic component is designed as a piezoelectric sensor, piezotransformer or piezotransformer. The deposition of a ceramic layer by means of aerosol
  • the method according to the invention enables the construction of thin structured layers for selectively covering internal electrode layers on piezoelectric multilayer actuators.
  • the surface to be passivated comprises at least one electrode surface.
  • the passivating surface may comprise the entire electrode surfaces of a component, or selectively, for example, al ⁇ ternierende electrode surfaces of a component, which should not be controlled.
  • the deposited passivation can serve, for example, as a cover layer or insulation wall for a metallization layer subsequently applied by means of a further deposition method. Due to the part adhered before ⁇ temperature stability of the ceramic layer is a metallization layer at temperatures up to 1000 ° C can be introduced. This additionally enables further contact, which can be applied, for example, by means of soldering or welding.
  • the surface to be passivated may also cover the entire exposed surface of a component and its Kera ⁇ mik harshness acoustic wave (e.g., a laser beam, a laser beam, or a laser beam.
  • the surface to be passivated may also cover the entire exposed surface of a component and its Kera ⁇ mik harshness acoustic wave (e.g., a laser beam, a laser beam, or a laser beam.
  • the surface to be passivated forms a surface, in particular a side surface of the electromechanical, in particular piezoelectric Bauelemen- tes.
  • a further subject of the invention concerns an electromechanical, in particular piezoelectric, component. transmitting at least one electrode comprising an element to the construction ⁇ applied ceramic passivation layer Herge ⁇ prepared according to the inventive method.
  • Another object of the invention relates to an electromechanical chanisches particular piezoelectric component umfas ⁇ send at least one electrode, wherein the component has a ke ⁇ ramische passivation layer, and wherein the Kera ⁇ mik Schweizer a layer thickness in the range from> 0.5 to ym ⁇ 100 ym , preferably in the range of> 1 ym to ⁇ 50 ym, preferably ⁇ in the range of> 5 ym to ⁇ 20 ym.
  • a passivation layer of this thickness may in particular have a good heat dissipation capability.
  • the ceramic layer is formed from materials selected from the group consisting of lead zirconate titanate, lithium niobate, potassium sodium niobate, barium titanate, lead magnesium niobate lead titanate, lead zirconium niobate lead, Titanate and / or bismuth sodium titanate.
  • Preferred electromechanical components are piezoelectric ⁇ specific devices, which in addition to the at least one electrode at least one piezoelectric ceramic layer.
  • the material of the ceramic passivation layer ⁇ approximately corresponds to the material of the piezoelectric layer (s). It is particularly preferred that the ceramic passivation approximately ⁇ layer is formed of the same material as the active piezoelectric layer.
  • ceramic passivation and " ⁇ ceramic layer” are used in the sense of the present invention interchangeably and refer to a deposited for electrical passivation ceramic layer.
  • the ceramic layer is deposited in particular by means of aerosol deposition of ceramic particles, preferably by means of the so-called aerosol deposition method.
  • the passivation layer may be a particular electrical insulation layer.
  • the electromechanical, in particular piezoelectric component comprising at least one electrode, wherein the component has a ceramic passivation layer, a ceramic layer formed from a ceramic electrically insulating material selected from the group comprising alumina, magnesia, zirconia, titanium oxide and / or Have silica.
  • the ceramic layer ⁇ ranging from 98% to 100%, in particular in the range of 99% to 100% of a possible theoretical density or technologically achievable maximum density of 100% to a theoretical log ⁇ te or a technologically attainable maximum density Be.
  • the ceramic layer is doped, preferably with metals selected from the group consisting of silver, nickel, manganese, antimony, molybdenum, tantalum, tungsten, hafnium, potassium, calcium, strontium, lithium
  • Rare earth metals are selected from the group comprising scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium and / or lutetium.
  • Preferred dopants are in particular selected from the group comprising silver, nickel, manganese,
  • the ceramic layer has a proportion of dopants in the range of> 0.5 wt .-% to ⁇ 30 wt .-%, based on the total weight of the layer on.
  • the ceramic layer forms a surface, in particular a side surface of the component.
  • the surface area of the particular page Bauele ⁇ mentes may have a flat, as well as an uneven, for example, concave or convex contour.
  • the ceramic passivation layer can also cover the entire exposed surface of a Cover a component.
  • the ceramic layer may be formed as a closed enclosure of the electromechanical, in particular piezoelectric component.
  • the ceramic layer can specifically cover electrode surfaces which are exposed in a component.
  • the ceramic layer can form a selective covering of internal electrode layers on piezoelectric multilayer actuators.
  • the ceramic passivation layer comprises at least one electrode surface.
  • the Kerami ⁇ specific passivation layer may cover the entire electrode surfaces of a component, or selectively, for example, al ⁇ ternierende electrode areas of a component.
  • the Kerami ⁇ specific passivation layer may, for example, as a covering or layer serve insulating wall for a via a further bearing on ⁇ method subsequently applied metallization ⁇ approximate location.
  • the electromechanical, in particular piezoelectric, component is preferably a multilayer component.
  • the piezoelectric ceramic component as a piezoelectric Ak ⁇ tor particular multilayer actuator or piezoelectric transducer is formed.
  • the piezoceramic component is designed as a piezoelectric sensor, piezoelectric generator or piezotransformer.
  • FIG. 1 shows a schematic representation of a passivated piezoelectric actuator 1.
  • Fig. 2 shows a plan view of the piezoelectric actuator shown in Fig. 1.
  • FIG. 3 shows another schematic representation of a pas ⁇ siv faced piezoelectric actuator.
  • FIG. 4 shows a schematic illustration of a piezoelectric actuator 11 with a passivation in accordance with the structure, with a ceramic layer applied for passivation and a non-passivated surface.
  • FIG. 5 shows a plan view of the piezoelectric actuator shown in FIG. 4.
  • the piezoactuator 1 shown in section in FIG. 1 comprises a layer stack in which piezoelectric ceramic layers 10 and electrode layers 20 are arranged alternately.
  • the layer stack has laterally each a ceramic layer 80 applied for passivation as well as an outer metallization 50.
  • the ceramic layer 80 was brought to ⁇ by means of aerosol deposition.
  • the ceramic layer 80 is formed of lead zirconate titanate and was deposited by depositing an aerosol of lead zirconate titanate particles in a carrier gas.
  • the lead zirconate titanate particles were added ⁇ leads to form an aerosol, which was deposited on the piezoelectric actuator in the form of powder to a carrier gas.
  • a metallization 50 was formed formed of silver.
  • FIG. 2 shows a plan view of the piezoactuator 1 shown in FIG. 1, wherein a piezoelectric ceramic layer 10 and the laterally applied ceramic layer 80 and the outer metallization 50 are shown.
  • FIG. 3 shows a section of a piezoactuator 11 comprising a layer stack in which piezoelectric ceramic layers 10 and electrode layers 20 are arranged alternately.
  • the stack of layers has a laterally placed for passivation on ⁇ ceramic layer 80th
  • the ceramic layer 80 is formed from lead zirconate titanate by means of aerosol Deposition of lead zirconate titanate particles applied in a carrier gas.
  • the illustrated in Fig. 4 side view of a piezoelectric actuator 11 shows an applied for passivation ceramic layer 80 and a non-passivated surface 70.
  • the ceramic layer 80 is applied to a layer stack in which piezoelectric Kera ⁇ mic layers and electrode layers are arranged alternately applied.
  • the ceramic layer 80 is formed from lead zirconate titanate deposited by aerosol deposition of lead zirconate titanate particles in a carrier gas.
  • Fig. 5 shows a plan view of the illustrated in Fig. 4 piezoelectric actuator 11, wherein the ceramic layer completely wraps 80, the piezoelectric ⁇ specific ceramic layer 10 on a side surface to ⁇ , while in each case a non-passivated surface 70 remains on two opposite side surfaces.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne un procédé de passivation électrique de composants électromécaniques, en particulier piézoélectriques, comprenant au moins une électrode, une couche de céramique étant appliquée sur la surface à passiver par dépôt de particules piézocéramiques par projection d'aérosol.
PCT/EP2012/066008 2011-08-19 2012-08-16 Procédé de passivation électrique de composants électromécaniques Ceased WO2013026764A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011081279A DE102011081279A1 (de) 2011-08-19 2011-08-19 Verfahren zur elektrischen Passivierung elektromechanischer Bauelemente
DE102011081279.2 2011-08-19

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WO2013026764A2 true WO2013026764A2 (fr) 2013-02-28
WO2013026764A3 WO2013026764A3 (fr) 2013-05-16

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WO2017032868A1 (fr) * 2015-08-26 2017-03-02 Ceramtec Gmbh Couche de protection résistant à l'humidité
DE102016119340A1 (de) * 2016-10-11 2018-04-12 Heraeus Sensor Technology Gmbh Verfahren zur Herstellung eines Sensors, Sensor und Verwendung eines Sensors
DE102019206018B4 (de) * 2019-04-26 2022-08-25 Pi Ceramic Gmbh Elektromechanischer Aktor mit keramischer Isolierung, Verfahren zu dessen Herstellung sowie Verfahren zur Ansteuerung eines solchen Aktors

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DE10234787C1 (de) 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material

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JP4729260B2 (ja) * 2004-02-18 2011-07-20 富士フイルム株式会社 積層構造体及びその製造方法
US7466067B2 (en) * 2004-11-01 2008-12-16 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, method for producing piezoelectric actuator, liquid transporting apparatus, and method for producing liquid transporting apparatus
JP4748978B2 (ja) * 2004-12-02 2011-08-17 日本碍子株式会社 圧電／電歪素子及びその製造方法
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WO2013026764A3 (fr) 2013-05-16

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