WO2014110830A1 - Dispositif laser à guide d'ondes - Google Patents

Dispositif laser à guide d'ondes Download PDF

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Publication number
WO2014110830A1
WO2014110830A1 PCT/CN2013/070788 CN2013070788W WO2014110830A1 WO 2014110830 A1 WO2014110830 A1 WO 2014110830A1 CN 2013070788 W CN2013070788 W CN 2013070788W WO 2014110830 A1 WO2014110830 A1 WO 2014110830A1
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WO
WIPO (PCT)
Prior art keywords
waveguide
ring
annular
laser
srl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/070788
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English (en)
Chinese (zh)
Inventor
吴波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huawei Technologies Co Ltd filed Critical Huawei Technologies Co Ltd
Priority to CN201380000061.1A priority Critical patent/CN103384950B/zh
Priority to PCT/CN2013/070788 priority patent/WO2014110830A1/fr
Publication of WO2014110830A1 publication Critical patent/WO2014110830A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338—Loop resonators
    • G02B6/29341—Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1071—Ring-lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers

Definitions

  • the present invention relates to the field of optical transmission, and in particular to a laser waveguide device. Background technique
  • TL tunable lasers
  • optical switching itself has the advantages of large capacity and low power consumption. It can be divided into optical path switching, but the switching particles in wavelength units are too large, which limits its application in small business particle scenarios, and optical burst switching (Optical Burst Switching).
  • OBS optical Packet Switching
  • FTL Fast Tunable Lasers
  • the existing FTL sampling grating distributed Bragg reflector (SGDBR), modulation grating Y type (MG-Y) and digital supermode DBR (DS-DBR) adopt two sets of grating reflection modes.
  • SGDBR sampling grating distributed Bragg reflector
  • MG-Y modulation grating Y type
  • DS-DBR digital supermode DBR
  • embodiments of the present invention provide a laser waveguide device that changes the injection current of three semiconductor ring lasers ( SRLs) by independent current control, so that the ring
  • the inter-light field effects spatially coupled to illuminate light having a desired wavelength.
  • an embodiment of the present invention provides a laser waveguide device, the device comprising: a first semiconductor ring laser SRL including a first ring waveguide having a first annular length, the first ring waveguide and the first cut One side of the groove is tangent, the first slit has a width of less than 5 micrometers;
  • the second SRL includes a second annular waveguide having a second annular length, and the second annular waveguide and the first slit One side is tangent, the second annular waveguide is tangent to one side of the second slit, and the width of the second slit is less than 5 micrometers;
  • a third SRL comprising a third annular waveguide having a first annular length, the third annular waveguide being tangent to the other side of the second slot;
  • the other end of the first complementary waveguide arm is coupled to the other end of the second complementary waveguide arm as a waveguide.
  • the second SRL ( 2 ) further includes a second electrode ( 20 ) for inputting a second injection current to the second ring waveguide ( 21 ) to tune the Second ring wave
  • the refractive index of the guide (21), and finally the light field generated by the second SRL, is spatially coupled such that the three inter-ring optical fields are spatially coupled to illuminate the light having the desired wavelength.
  • the first SRL (1) further includes a first electrode (10) for inputting a first injection current to the first ring waveguide (11) to tune the refraction of the first ring waveguide (11)
  • the third SRL (3) further includes a third electrode (30) for inputting a third injection current to the third ring waveguide (31) to tune the refraction of the third ring waveguide (31)
  • the two currents are generally equal, and finally the light field generated by the first SRL and the third SRL is finally adjusted, so that the space between the three rings is realized. Inter-coupled to illuminate light of the desired wavelength.
  • the second SRL(2) further includes a second electrode (20) for inputting a second injection current to the second annular waveguide (21) to tune the a refractive index of the second annular waveguide (21); the first SRL (1) further comprising a first electrode (10) for inputting a first injection current to the first annular waveguide (11) to tune the a refractive index of the first annular waveguide (11); the third SRL (3) further includes a third electrode (30) for inputting a third injection current to the third annular waveguide (31) to tune the The refractive index of the third annular waveguide (31).
  • the final adjustment of the first SRL, the second SRL, and the third SRL is finally adjusted.
  • the light field is such that the three inter-ring optical fields are spatially coupled to illuminate the light having the desired wavelength.
  • the laser waveguide device disclosed in the embodiments of the present invention includes, in order from bottom to top, an indium phosphide substrate (91), an N-type confinement layer (92), a quantum well active layer (93), and a P-type restriction. Layer (94), three ring waveguides (95) and a P-type ohmic contact layer (96). Further, the first slot and the second slot have a depth at least reaching the N-type limiting layer (92), so that the quantum well active layer (93) is divided into three independent layers. In this way, the control currents of the three SRLs can be independently injected into the respective regions, thereby adjusting the light field generated by a single waveguide ring.
  • the laser waveguide device of the embodiment of the invention has three SRLs, and the three are changed by independent current control.
  • the injection current of the SRL generates three light fields. Since the FSRs of the two light fields are the same and different from the FSR of the third light field, the adjacent portions of the light field are spatially coupled and lasing the desired wavelength. Light.
  • the lasing light is coupled out through two complementary waveguide arms. By controlling the injection current, the inter-ring light field is spatially coupled to achieve fast, wide-range tunability of the output light wavelength.
  • FIG. 1 is a schematic view of a laser waveguide device according to an embodiment of the present invention.
  • FIG. 2 is a longitudinal sectional view of a conductor ring laser of a laser according to an embodiment of the present invention
  • FIG. 3A is a schematic diagram showing a lasing spectrum of a laser waveguide device according to an embodiment of the present invention
  • FIG. 3B is a second schematic diagram showing the lasing spectrum of the laser waveguide device according to the embodiment of the present invention. detailed description
  • the laser waveguide device of the embodiment of the invention comprises three semiconductor ring lasers (Semi conduc tor
  • each of the annular waveguides of the adjacent SRL has a slit through the active layer, so that the active layers of the SRL are independent of each other.
  • the injection currents of the three SRLs are changed by independent current control to produce three light fields, where the free spectral regions FSR of the two light fields are the same and different from the FSR of the third light field.
  • the adjacent portions of the light field are spatially coupled, and the respective cavity modes are fused to finally illuminate the light having the desired wavelength.
  • the illuminating light is coupled out through two complementary waveguide arms and combined to output.
  • the inter-ring light field is spatially coupled, thereby realizing a fast and wide-range tunability of the output light wavelength.
  • the grooving in the embodiment of the present invention can achieve weak coupling of heat between the SRLs, and the thermal turbulence between them is small, so that the tuning range is large, the switching is fast, the narrow line width is wide, the integration can be integrated, and the process flow is clean.
  • the body includes: a first semiconductor ring laser (Semi conduc tor Ring Laser, SRL second SRL2, a third SRL3, a first complementary waveguide arm 51 and a second complementary waveguide arm 52).
  • a first semiconductor ring laser Silicon conduc tor Ring Laser, SRL second SRL2, a third SRL3, a first complementary waveguide arm 51 and a second complementary waveguide arm 52.
  • the first SRL 1 has a first annular waveguide 11
  • the second SRL 2 has a second annular waveguide 21
  • the third SRL 3 has a third annular waveguide 31 .
  • the first ring waveguide 11 and the third ring waveguide 31 are both of a first length
  • the second ring waveguide 21 is of a second length.
  • the first length may be slightly larger than the second length, or may be slightly smaller than the second length, and the first length may be the same as the second length.
  • the first annular waveguide 11 is tangential to one side of the first slit 41
  • the second annular waveguide 21 is tangential to the other side of the first slit 41.
  • the width of the first groove 41 is generally not more than 5 ⁇ m, preferably 2 to 3 ⁇ m.
  • the second loop waveguide 21 is tangent to one side of the second slit 42 and the third loop waveguide 31 is adjacent to the other side of the second slit 42.
  • the width of the second slit 42 is generally not more than 5 ⁇ m, preferably 2 to 3 ⁇ m.
  • One end of the first complementary waveguide arm 51 is tangentially coupled to the third ring waveguide 31 in the clockwise direction, and one end of the second complementary waveguide arm 52 is tangentially coupled to the third ring waveguide 31 in the counterclockwise direction.
  • the other end of the first complementary waveguide arm 51 is coupled to the other end of the second complementary waveguide arm 52 as a waveguide.
  • the light field of the first SRL1 and the light field of the second SRL2 are lasing the light having the desired wavelength by spatially interactive coupling, and the third SRL3 passes the lasing light through the first complementary waveguide arm 51 and the second complementary waveguide arm 52. Output.
  • FIG. 2 is a longitudinal sectional view of a conductor ring laser of a laser according to an embodiment of the present invention.
  • the material structure of the conductor ring laser is indium phosphide (InP) substrate 91, N type (n + ion) from the bottom layer to the top layer, respectively.
  • InP indium phosphide
  • n + ion N type from the bottom layer to the top layer, respectively.
  • the first groove 41 and the second slit 42 are cut at least from the P-type ohmic contact layer 96 and the P-type confinement layer 94 to the N-type (n + ion doped) confinement layer 92, so that the injection current can be controlled in the three SRLs. Independently injected into each area of each SRL, the two slots can also achieve the weak coupling between the SRLs, reducing the effects of thermal crosstalk generated during the respective current tuning process. Two laser spots are strictly limited Within the quantum well active layer 93.
  • the first SRL 1 further includes a first electrode 10, and the first electrode 10 can generate a first injection current to generate a first light field in the first ring waveguide 11; the first ring waveguide 1
  • the optical frequency of 1 is the first optical frequency, the first injection current is received, and the refractive index of the first annular waveguide 11 is tuned to generate the first free spectral region FSR.
  • the second SRL2 further includes a second electrode 20, and the second electrode 20 can generate a second injection current to generate a second light field in the second ring waveguide 21; the second ring waveguide 21 has an optical frequency of the second optical frequency, and receives the second Injecting a current, tuning the refractive index of the two annular waveguides 21 produces a second FSR.
  • the third SRL 3 further includes a third electrode 30, which can generate the same first injection current as the first electrode 30 to generate a third light field in the third ring waveguide 31; the length of the third ring waveguide 31 is also a length, the optical frequency is also the first optical frequency, receiving the third injection current, and generally the third injection current is the same as the first injection current, thereby changing the refractive index of the third annular waveguide 31 to generate the same number as the first annular waveguide 31.
  • An FSR can generate the same first injection current as the first electrode 30 to generate a third light field in the third ring waveguide 31; the length of the third ring waveguide 31 is also a length, the optical frequency is also the first optical frequency, receiving the third injection current, and generally the third injection current is the same as the first injection current, thereby changing the refractive index of the third annular waveguide 31 to generate the same number as the first annular waveguide 31.
  • the second annular length of the second annular waveguide 21 may be the same as the first annular length of the first annular waveguide 11 and the third annular waveguide 31, and the second injection current of the second electrode 20 may be adjusted at this time.
  • the second annular length of the second annular waveguide 21 may also be slightly larger or slightly smaller than the first annular length.
  • the second length of this embodiment is slightly larger than the first length.
  • the two independent first SRL1 and second SRL2 are adjacent by the first slot 41, so the active layers of the SRL 1 and the SRL 2 are independent of each other and belong to the heat weak coupling, and the light fields of the SRL 1 and the SRL 2 pass through the first slot 41 .
  • the adjacent regions are alternately coupled.
  • the two independent second SRL2 and the third SRL3 are adjacent to each other through the second slot 42, so the active layers of SRL2 and SRL3 are independent of each other and belong to the heat weak coupling, and the light fields of SRL2 and SRL3 pass through the second slice.
  • the adjacent regions of the slot 42 are alternately coupled.
  • FIG. 3A is a schematic diagram of a lasing spectrum of a laser waveguide device according to an embodiment of the present invention
  • FIG. 3A is a schematic diagram of an independent lasing mode of SRL 1 and SRL2.
  • FSR c/ (nx L) , where c is the propagation velocity of light in free space, which is 2.979792458 ⁇ lOVs; n is the refractive index of the waveguide, which is related to the material of the waveguide; L is the loop length of the waveguide. Since the first ring length of the first ring waveguide 11 is smaller than that of the second ring waveguide 21, FSR1 > FSR2.
  • the lasing mode of SRL1 has an optical frequency of F1 and the free spectral region is FSR1;
  • the optical frequency of the shooting mode is F2
  • the free spectral region is FSR2.
  • FIG. 3B is a second schematic diagram of a lasing spectrum of a laser waveguide device according to an embodiment of the present invention, and FIG. 3B is a schematic diagram of a wavelength lasing mode after coupling of SRL1 and SRL2.
  • the resonant mode enters a common frequency selective state, and only the lasing modes of the two SRLs are aligned, that is, the optical frequencies at the intersection of the first FSR and the second FSR can
  • the lasing, other misaligned modes, that is, the optical frequencies at the non-coincidence of the first FSR and the second FSR are greatly suppressed.
  • the common mode optical frequency F2 of SRL1 and SRL2 is lasing, other The optical frequency in the mode is suppressed.
  • the second injection current of the second electrode 20 in the SRL2 can also be tuned simultaneously, and the tuning
  • the first injection current of the first electrode 10 of the SRL1 flexibly adjusts the refractive indices of the first annular waveguide 11 and the second annular waveguide 21, so that the mode positions in which the SRL1 and the SRL2 are aligned are changed, and the required excitation is finally selected.
  • Shoot light
  • the second injection current can be adjusted to change the refractive index n of the second ring waveguide 21 such that FSR1 is different from FSR2.
  • the first injection current is adjusted to change the refractive index n of the first ring waveguide 11 such that FSR1 is different from FSR2.
  • the second injection current is changed so that n of the second ring waveguide 21 is decreased, and FSR2 is increased, F1 can be aligned, and the laser beam is changed from F2 to F1 to complete the wavelength tuning. Since the speed of electro-optical tuning can reach ns, the wavelength tuning time of the entire laser waveguide can reach ns.
  • the second light field of the second ring waveguide 21 and the third light field of the third ring waveguide 31 are coupled adjacent to the second slot 42 such that the laser beam of the second ring waveguide 21 is coupled out at the third ring waveguide 31.
  • the ring length of the third ring waveguide 31 of the SRL3 is the same as the length of the first ring waveguide 11 of the SRL1, and the injection currents of the first electrode and the third electrode are also the same, the same as the first injection current, so
  • the FSR generated by the three-ring waveguide 31 is also the same as the FSR generated by the first ring waveguide 11, and is also the first FSR, so the SRL3 and the SRL1 belong to the synchronous tuning, so the effect of the SRL3 on the entire lasing mode (ie, the optical frequency) is related to the SRL1.
  • SRL3 the main function of the SRL3 is to conveniently implement the light output in a clockwise, counterclockwise direction.
  • the laser waveguide device of the embodiment of the present invention further includes: a semiconductor optical amplifier
  • the laser beam coupled into SRL3 through the second slot will have clockwise light and Counterclockwise light.
  • the upper end of the third ring waveguide 31 of the SRL3 is connected to the first complementary waveguide arm 51 for coupling the clockwise laser on the SRL3; the lower end of the third ring waveguide 31 and the second complementary waveguide arm (Bottom arm)
  • the 52-phase connection is used to couple the counterclockwise laser output on the SRL3.
  • the output end of the first complementary waveguide arm 51 and the output end of the second complementary waveguide arm 52 are coupled and merged into A waveguide output laser is then connected to a semiconductor optical amplifier (S0A) 7, which can function to amplify the output laser of the coupler 6.
  • S0A semiconductor optical amplifier
  • the output laser is connected to the light collimating lens and the pigtail at the end of the waveguide.
  • the embodiment L of the present invention can be used as a transmitter source of wavelength and sub-wavelength (burst/packet), and can also be used as an emission source of an uplink signal at the user end of the optical access network;
  • a local oscillator source that can be used as a receiver for a coherent optical communication system.
  • the SRL in the embodiment of the present invention utilizes a closed loop waveguide as a resonant cavity, which does not require a cleavage plane or a grating to provide optical feedback, and thus has a compact structure, a single process, high reliability, easy integration, and tunable, wavelength conversion, and optics. The effect of bistable.
  • Embodiments of the present invention utilize the spatial coupling of three SRLs to implement a fast tunable laser function, which simultaneously achieves a wide tuning range and fast switching characteristics.
  • the lengths of the first and third ring waveguides of the three SRLs in the embodiment of the present invention are slightly different from the length of the second ring waveguide, and the refractive indices of the respective SRLs are changed by independent injection current control, thereby realizing Verni er
  • the effect a wide range of tunable functions, and taking into account the optical bistable characteristics of the SRL, the use of two complementary waveguide arms to achieve the coupling of the laser and the pigtail.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention concerne un dispositif laser à guide d'ondes comprenant : un premier laser en anneau à semi-conducteur (SRL) (1), un deuxième SRL (2) et un troisième SRL (3), les trois SRL étant respectivement tangents à deux fentes (41, 42) et étant indépendants les uns des autres. Le dispositif comprend également un premier bras de guide d'ondes complémentaire (51), ayant une extrémité tangente à et couplée à un troisième guide d'ondes en anneau (31) dans le sens horaire ; et un deuxième bras de guide d'ondes complémentaire (52), ayant une extrémité tangente au troisième guide d'ondes en anneau (31) et couplée à celui-ci dans le sens antihoraire, l'autre extrémité du premier bras de guide d'ondes complémentaire (51) étant couplée à l'autre extrémité du deuxième bras de guide d'ondes complémentaire (52) afin de former un chemin de guide d'ondes. Grâce audit dispositif laser à guide d'ondes, la longueur d'ondes de la lumière émise peut être accordée rapidement dans une large plage.
PCT/CN2013/070788 2013-01-21 2013-01-21 Dispositif laser à guide d'ondes Ceased WO2014110830A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201380000061.1A CN103384950B (zh) 2013-01-21 2013-01-21 激光器波导装置
PCT/CN2013/070788 WO2014110830A1 (fr) 2013-01-21 2013-01-21 Dispositif laser à guide d'ondes

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Application Number Priority Date Filing Date Title
PCT/CN2013/070788 WO2014110830A1 (fr) 2013-01-21 2013-01-21 Dispositif laser à guide d'ondes

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WO2014110830A1 true WO2014110830A1 (fr) 2014-07-24

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CN106027224B (zh) * 2016-08-01 2017-02-22 西南大学 一种基于光电反馈环形激光器的保密通信系统

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JPS60148185A (ja) * 1984-01-12 1985-08-05 Sumitomo Electric Ind Ltd 半導体リングレ−ザジヤイロ
CN1886686A (zh) * 2003-12-24 2006-12-27 皮雷利&C.有限公司 低损耗微环形谐振器设备
CN1829012A (zh) * 2005-03-03 2006-09-06 日本电气株式会社 波长可调谐激光器
CN1848556A (zh) * 2005-03-03 2006-10-18 日本电气株式会社 可调谐激光器、光模块及它们的控制方法
US20090154505A1 (en) * 2007-12-17 2009-06-18 Electronics And Telecommunications Research Institute Wavelength tunable laser diode using double coupled ring resonator
CN102324983A (zh) * 2011-06-10 2012-01-18 复旦大学 基于迈克尔逊干涉仪的光域多波长信号产生系统

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CN103384950A (zh) 2013-11-06

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