WO2014128161A3 - Vorrichtung und verfahren zur berührungslosen detektion eines nicht infrarotaktiven zielgases - Google Patents

Vorrichtung und verfahren zur berührungslosen detektion eines nicht infrarotaktiven zielgases Download PDF

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Publication number
WO2014128161A3
WO2014128161A3 PCT/EP2014/053232 EP2014053232W WO2014128161A3 WO 2014128161 A3 WO2014128161 A3 WO 2014128161A3 EP 2014053232 W EP2014053232 W EP 2014053232W WO 2014128161 A3 WO2014128161 A3 WO 2014128161A3
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WO
WIPO (PCT)
Prior art keywords
excitation laser
gas
target location
infrared
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2014/053232
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English (en)
French (fr)
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WO2014128161A2 (de
Inventor
Armin Lambrecht
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of WO2014128161A2 publication Critical patent/WO2014128161A2/de
Publication of WO2014128161A3 publication Critical patent/WO2014128161A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G01N2021/1714—Photothermal radiometry with measurement of emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513—Open path with an instrumental source

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung und ein Verfahren zur Ferndetektion eines nicht infrarotaktiven Zielgases an einem Zielort, an dem sich das Zielgas befinden kann, mit einem Anregungslaser 4 zur Emission eines auf wenigstens zwei Zielorte Oi, Oi+1 lenkbaren Anregungslaserstrahls 5, mit einem Detektor 6 zum Nachweis einer von dem jeweiligen Zielort Oi, Oi+1 ausgehenden Strahlung 16 und mit einer Steuereinrichtung zum Steuern des Anregungslasers 4 und mit einer Auswerteeinrichtung zum Auswerten von Ausgangssignalen des Detektors 6 in Abhängigkeit von dem jeweiligen Zielort Oi, Oi+1 und in Korrelation mit dem von dem Anregungslaser 4 emittierten Anregungslaserstrahl 5. Ein zuverlässiger und sicherer Nachweis des Zielgases 1 wird dadurch erreicht, dass der Anregungslaser 4 zur Emission eines infraroten Anregungslaserstrahls 5 ausgebildet ist, dessen Wellenlänge auf die Wellenlänge einer im infraroten Bereich liegenden Absorptionslinie eines infrarotaktiven Hintergrundgases 3 abstimmbar ist, welches sich in der Umgebung des jeweiligen Zielortes Oi, Oi+1 befindet, dass mit dem Detektor 6 eine aufgrund der Anregung des Hintergrundgases 3 beeinflussbare Strahlung messbar ist, und dass mit der Auswerteeinrichtung mittels der Ausgangssignale des Detektors 6 Werte darstellbar sind, die in Korrelation mit der Konzentration des Hintergrundgases an dem jeweiligen Zielort Oi, Oi+1 stehen und aus welchen Eigenschaften eines vorhandenen Zielgases 1 an dem jeweiligen Zielort Oi, Oi+1 ermittelbar sind.
PCT/EP2014/053232 2013-02-19 2014-02-19 Vorrichtung und verfahren zur berührungslosen detektion eines nicht infrarotaktiven zielgases Ceased WO2014128161A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013101610.3A DE102013101610B4 (de) 2013-02-19 2013-02-19 Vorrichtung und Verfahren zur Ferndetektion eines nicht infrarotaktiven Zielgases
DE102013101610.3 2013-02-19

Publications (2)

Publication Number Publication Date
WO2014128161A2 WO2014128161A2 (de) 2014-08-28
WO2014128161A3 true WO2014128161A3 (de) 2014-11-13

Family

ID=50289631

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PCT/EP2014/053232 Ceased WO2014128161A2 (de) 2013-02-19 2014-02-19 Vorrichtung und verfahren zur berührungslosen detektion eines nicht infrarotaktiven zielgases

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Country Link
DE (1) DE102013101610B4 (de)
WO (1) WO2014128161A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107884363B (zh) * 2017-10-17 2023-10-24 中国矿业大学(北京) 一种基于机器视觉技术的激光矿井气体遥测方法
CN107870159B (zh) * 2017-11-01 2023-09-19 中国矿业大学(北京) 用于可调谐半导体激光吸收光谱的气体浓度二维重建方法
JP7100988B2 (ja) * 2018-02-05 2022-07-14 東京瓦斯株式会社 ガス検知システムおよびガス検知方法
PL3816609T3 (pl) * 2019-11-04 2022-04-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Urządzenie i sposób do zdalnego wykrywania gazu docelowego
CN110836866A (zh) * 2019-11-05 2020-02-25 度亘激光技术（苏州）有限公司 光谱分析系统及光谱分析设备
CN111089848B (zh) * 2019-12-31 2022-08-19 哈尔滨工业大学 三维激光气体扫描仪
CN112611726A (zh) * 2020-12-23 2021-04-06 陈政 一种分子特征吸收光谱测量装置及方法
DE102022109027B4 (de) 2022-04-13 2023-12-21 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren zum Kartieren der Oberfläche eines Makromoleküls
CN117491314A (zh) * 2023-12-27 2024-02-02 金卡智能集团(杭州)有限公司 可燃气体探测装置及探测方法

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JPH01301138A (ja) * 1988-05-30 1989-12-05 Ishikawajima Harima Heavy Ind Co Ltd ガス漏洩検出方法及び装置
WO2002027297A1 (en) * 2000-09-28 2002-04-04 Sandia Corporation Pulsed laser linescanner for a backscatter absorption gas imaging system
US20020166969A1 (en) * 2001-03-14 2002-11-14 Mau-Song Chou Remote trace gas detection and analysis
US20060203248A1 (en) * 2005-03-11 2006-09-14 Reichardt Thomas A Natural gas leak mapper
US20100064777A1 (en) * 2006-12-07 2010-03-18 Cascade Technologies Limited Leak detection system and method

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DE2966702D1 (en) * 1978-06-26 1984-03-29 Measurex Corp Method and apparatus for measuring gas, including standardisation
US5473162A (en) * 1987-10-26 1995-12-05 Baylor University Infrared emission detection of a gas
CA1332204C (en) * 1987-10-26 1994-10-04 Kenneth W. Busch Infrared emission detection
IL140055A0 (en) * 1998-06-12 2002-02-10 On Line Techn Inc Method and apparatus for determining processing chamber cleaning or wafer etching endpoint
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Publication number Priority date Publication date Assignee Title
JPS63309831A (ja) * 1987-06-11 1988-12-16 Mitsubishi Electric Corp 蒸気もれ検出装置
JPH01301138A (ja) * 1988-05-30 1989-12-05 Ishikawajima Harima Heavy Ind Co Ltd ガス漏洩検出方法及び装置
WO2002027297A1 (en) * 2000-09-28 2002-04-04 Sandia Corporation Pulsed laser linescanner for a backscatter absorption gas imaging system
US20020166969A1 (en) * 2001-03-14 2002-11-14 Mau-Song Chou Remote trace gas detection and analysis
US20060203248A1 (en) * 2005-03-11 2006-09-14 Reichardt Thomas A Natural gas leak mapper
US20100064777A1 (en) * 2006-12-07 2010-03-18 Cascade Technologies Limited Leak detection system and method

Also Published As

Publication number Publication date
WO2014128161A2 (de) 2014-08-28
DE102013101610A1 (de) 2014-08-21
DE102013101610B4 (de) 2015-10-01

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