WO2014139664A1 - Dispositif d'électrodes destiné à une décharge de plasma à glissement d'arc - Google Patents
Dispositif d'électrodes destiné à une décharge de plasma à glissement d'arc Download PDFInfo
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- WO2014139664A1 WO2014139664A1 PCT/EP2014/000615 EP2014000615W WO2014139664A1 WO 2014139664 A1 WO2014139664 A1 WO 2014139664A1 EP 2014000615 W EP2014000615 W EP 2014000615W WO 2014139664 A1 WO2014139664 A1 WO 2014139664A1
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- electrode
- electrodes
- arc
- electrode device
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
- H05H1/482—Arrangements to provide gliding arc discharges
Definitions
- the invention relates to an electrode device which is configured for a sliding arc plasma discharge and has two spaced-apart electrodes, between which a running path of the sliding arc is formed.
- the invention further relates to a method of treating a gas stream with a moving-arc plasma and a plasma generator equipped with said electrode means.
- Applications of the invention are particularly in the production of a reactive arc plasma, z. B. in a chemical reactor, a plasma-based cleaning device or in a device for plasma treatment of a gas stream given.
- a conventional plasma generator for producing the plasma with a flowing arc typically contains two planar electrode plates or two electrode wires.
- FIG. 7 2009/0236215 AI, is shown in Figure 7 (prior art).
- the electrodes 10 ', 20' are arranged in a common plane at a mutual distance.
- a section of minimum distance between the electrodes 10 ', 20' becomes a Arc 1 'ignited, which slides under the action of a gas stream 4' along a running path 3 'until it at a greater distance between the electrodes 10', 20 'disappears.
- the electric current of the arc 1 ' flows with a main current direction which extends between the electrodes 10', 20 '.
- the gas stream 4 ' is heated, for. B. to cause a chemical reaction.
- the length of the run 3 ' is limited to a few centimeters, while the distance between the electrodes 10', 20 'varies in the range of less than 1 cm.
- Conventional plasma generators e.g. As shown in Figure 7, have proven to be disadvantageous because the contact time between the arc see 1 'and the gas stream 2' is limited and the electrodes 10 ', 20' require cooling.
- conventional plasma generator with electrode wires include the electrodes z. B. a straight central electrode wire, which is surrounded by a spiral electrode wire. A sliding arc, the main flow direction of which extends between the spiral electrode wire and the central electrode wire, moves along a running path along a helical surface. Although the length of the running ⁇ stretch can be increased with this structure, the interaction with the gas stream is still limited. Furthermore, after ⁇ parts can occur due to the complex arrangement of the electrode wires.
- the object of the invention is to provide an improved electric ⁇ den adopted for generating a plasma with a sliding arc, are avoided with the disadvantages of conventional techniques.
- the electrode device should characterized in particular by an increased effectiveness of the interaction between the arc and a surrounding gas, a reduced cooling effort and / or a stable and insensitive construction.
- a further object of the invention is to provide an improved plasma generator characterized in particular by an increased efficiency of a plasma with a sliding arc, a reduced cooling requirement and / or an increased stability and reliability, in particular in a continuous operation.
- an electrode device configured for a sliding arc plasma discharge having a first electrode and a second electrode at a mutual distance.
- Electrodes each have a longitudinal extent and are arranged on ⁇ order that the sliding arc can be generated with a predetermined main flow direction and is movable along a running distance between the electrodes.
- the running distance substantially follows the direction of the L Lucassausdeh ⁇ voltage of the electrodes.
- the electrode device is so drivable be ⁇ that flows between the electrodes, an electrical current, which bridges the distance between the electrodes.
- the electric current has a main current direction through the field distribution between the electrodes and the shape of the facing electrode sides of the electrodes is determined.
- the term "main current direction" here refers to the direction along which most of the electric current flows in the arc.
- the main current direction is equal to the direction of the shortest connecting line between a current position of the leakage of electric current from one of the electrodes and the other electrode.
- At least one of the two electrodes is provided with a profile which extends transversely to the main flow direction and transversely to the passage of the arc.
- the at least one profiled electrode has a three-dimensional shape, wherein an electrode side pointing to the respective other electrode is formed with a shape which has a plurality of reversal points and which is multiply curved transverse to the main flow direction.
- a predetermined reference surface is spanned between the electrodes. In the case of planar electrodes arranged in a common plane, this reference surface is also a plane. In the case of curved electrodes, the reference surface may be curved.
- the at least one profiled electrode has a profile transversely (in particular perpendicular) to the reference surface.
- the above object is achieved by a method for loading ⁇ treatment of a gas stream with a plasma with a moving arc, wherein the plasma with a moving arc ⁇ ER- between two electrodes at a mutual spacing is witnessed.
- the arc moves between facing electrode sides of the two electrodes along a running path formed in a reference plane defined between the electrodes.
- the gas flow is introduced into the space between the electrodes so that the gas flow moves along the path of the sliding arc.
- the arc is displaced in addition to its movement along the running path perpendicular to the running track.
- the sliding arc is moved transversely to its main flow direction, ie transverse to its extent. There is a repeated variation of the position of the arc transverse to the reference plane spanned between the electrodes.
- the method according to the invention is carried out using the electrode device according to the above-mentioned first aspect of the invention.
- a plasma generator which comprises the electrode device according to the invention according to the above first aspect of the invention and a voltage source, which is adapted to act on the electrodes of the electrode device with an operating voltage for generating the plasma discharge ,
- duliert by the provision of at least one of the two electrodes with a profile, the positi ⁇ on the arc in a direction deviating from the direction of travel Lichtbo ⁇ gene and of the main current direction mo-.
- the arc follows the profile which is impressed on the respective electrode up to the electrode side facing the respective other electrode.
- Arc which slides in egg ⁇ ner planar reference surface in conventional planar electrodes, according to the invention with the Arc, which follows the profile of the at least one profiled electrode, increases the contact time and the contact area between the arc and a gas flow flowing through the electrode means.
- the efficiency of the arc eg. In the production of active reactants.
- the cooling effect on the electrode can be increased without having to extend the electrode or to provide an additional cooling device.
- the stability of the electrode device is increased, as compared to a conventional
- both the first and the second electrode are provided with the profile transverse to the main current direction between the electrodes.
- This embodiment is also referred to below as a symmetrical embodiment, irrespective of the details of the profiles of the first and second electrodes.
- the first and second electrodes are preferably mirror-symmetrically formed relative to a median plane between the electrodes. In this case, the electrodes have the same shape and the same profile of the profile. Alternatively, it is possible that in the symmetrical embodiment, the electrodes are the same, mirror-symmetrical relative to the center plane
- the profiles of the first and second Elect ⁇ can Roden, in particular of the facing Elektrodensei ⁇ th of the first and second electrodes have mutually
- ⁇ sat shapes so that the arc running along the is tilted relative to the reference surface between the electrodes with changing directions.
- first electrode only one of the electrodes (hereinafter: first electrode) is connected to the first electrode
- the other electrode is unprofiled (unstructured) relative to the main current direction between the first and second electrodes.
- This embodiment is also called asymmetric embodiment.
- the first electrode has a profile with a plurality of reversal points
- the second electrode is e.g. B. a straight rod or a flat plate.
- the second electrode is a flat plate whose surface faces the first electrode.
- the second electrode in this case preferably has a longitudinal extent which is equal to the longitudinal extent of the first electrode with the profile in the running direction of the arc and a transverse extent perpendicular to the reference surface between the first and second electrodes which is equal to the height of the profile of the first electrode is transverse to the main flow direction.
- This variant of the asymmetrical embodiment has the advantage that, as in the symmetrical embodiment, the arc can be moved over the entire distance between the electrodes according to the height of the profile of the first electrode, without the second electrode being profiled.
- the generation and movement of the arc are influenced, in particular, by the geometry of the mutually facing electrode sides of the first and second electrodes.
- a first variant of the invention may min ⁇ least a profiled electrode a multiply bent Include electrode wire.
- the electrode wire may be cantilevered between two insulating brackets at the ends of the arc of the arc or supported by an insulating substrate along the entire path.
- two electrode wires are provided, which are transverse to the reference plane spanned between them with several reversal points, for. B. wavy, curved.
- the first electrode comprises the multiply bent electrode wire
- the second electrode comprises a straight electrode wire or a flat plate having a surface facing the first electrode.
- the at least one electrode provided with the profile is a profiled electrode plate.
- the electrode plate is made with a surface shape, wherein the profile of the electrode plate extends perpendicular to the surface shape.
- both electrodes comprise profiled electrode plates.
- the first electrode comprises a profiled electrode plate, while the second electrode comprises a rod or a flat plate with a surface facing the first electrode.
- guide elements for guiding a gas flow are provided with the profile of the electrode plate.
- the profile of the electrode plate of the first electrode (in the asymmetrical embodiment) and the profiles of the electrode plates of both electrodes (in the symmetrical embodiment) are so designed such that a gas flow, which flows parallel to the longitudinal extent of the electrodes, the electrode plates, is passed into the region between the electrodes.
- the vanes direct the gas flow on at least one side of the electrode surface to the distance between the first and second electrodes where the conducting arc is generated.
- the efficiency of the arc is thereby increased.
- preheating of the gas stream and additional cooling of the electrodes can be achieved by flowing the gas stream over the electrode plates.
- the electrode side of the at least one profiled electrode follows the electrode profile.
- the profiled electrode side is the side of the electrode wire facing the other electrode or a side edge of the electrode plate.
- the electrode side preferably forms a sharp side edge.
- the electrode plate is tapered on the electrode side in the thickness direction. Advantageously, this achieves a concentration of electric field lines and supports the generation and maintenance of the arc.
- the profile of the electrode plate of the at least one profiled electrode is a wave-shaped profile.
- the material of the electrode plate is formed in the shape of a plane wave.
- the term "wave” is not limited to a specific mathematically defined form.
- the encryption running the waveform and in particular directed towards the other electric ⁇ de-electrode can for.
- B. the shape of a sine function or a course with alternately oppositely oriented semicircles or a course with flat flange ken, which are connected at the reversal points in rounded areas have.
- the wave normal of the waveform may be parallel to the longitudinal extent of the profiled electrode and parallel to the electrode side facing the other electrode. However, the wave normal is preferably inclined with respect to the longitudinal extent of the profiled electrode so that a gas flow flowing over the electrode plate is directed with a speed component parallel to the running direction of the arc into the distance between the electrodes.
- an ignition portion is provided at an upstream end of the electrodes in which the distance between the first electrode and the second electrode is minimum.
- the ignition of the arc takes place. Under the action of the arc on the surrounding gas and / or under the influence of the flowing gas flow, the arc then moves along the mutually facing sides of the electrode.
- the distance between the electrodes can continuously increase until the end of the running path (divergent
- the electrodes may be shaped so that the distance between the electrodes along the running track is constant in at least one downstream of the Zündab ⁇ cut electrode section.
- various materials are advantageously available, from which the electrodes can be produced.
- the electrodes are made of a metallic material, in particular of stainless steel, brass or tungsten.
- the electrodes are made of a sintered metal, a metallic composite or a metallic alloy, advantages for the generation of the arc and the influence of chemical reactions can be achieved.
- at least one of the electrodes can carry a coating which, for. B. made of silver, gold, copper or T1O2.
- FIG. 1 is a schematic plan view of a symmetrical
- FIG. 2 shows a schematic illustration of a variant of the symmetrical embodiment of the electrode device according to the invention
- FIG. 3 shows a plan view of a profiled electrode plate
- FIG. 4 is a perspective view of a profiled electrode plate
- FIG. 5 shows a schematic plan view of an asymmetrical embodiment of the electrode device according to the invention
- Figure 6 is a schematic perspective view of the asymmetrical embodiment of the invention.
- FIG. 7 shows a schematic plan view of a conventional electrode device (prior art).
- the gas flow is z. B. from a carrier gas such. As air, and a mist of a treatment liquid, for. As water, together.
- a carrier gas such. As air
- a mist of a treatment liquid for. As water
- the treatment liquid is activated (generation of reactive species), so that when the surface of an object to be cleaned is exposed to the activated mist of the treatment liquid, the desired cleaning effect results.
- the invention is not limited to this application but is applicable to other methods of treating a gas stream with a sliding arc plasma.
- the electrode device and the plasma generator can, for. B. be arranged in a chemical reactor.
- the preferred embodiments are described in particular with respect to the profile shape of the electrodes. Other features of generating the plasma with a sliding arc, such. As the ignition of the arc and its interaction with the gas stream are not explained, as far as they are known per se from conventional techniques.
- the invention is not limited to the geometry of the electrodes shown in the drawings, but also with different electrode shapes, in particular with regard to the shape of the facing electrode sides, the basic Shape of the electrodes and the profile of the at least one profiled electrode, realized.
- FIG. 1 schematically shows a plasma generator 200 equipped with an electrode device 100 according to the symmetrical embodiment.
- the plasma generator 200 is shown by way of example schematically with a housing 210, a switchable voltage source 220 and a control device 230. Details of these components are chosen depending on the application of the invention.
- the housing 210 comprises, for example, inlet and outlet openings (not shown) for a gas flow and housing walls (not shown) for conducting the gas flow through the electrode device 100 and / or over the surfaces of the electrodes of the electrode device 100 . It is Z. B. at least one inlet opening provided through which a gas stream is passed on and between the electrodes of the electrode device 100.
- the voltage source 210 includes z. As a DC source, an AC source, a voltage source for generating negative or positive pulsed voltages or a combination of these types of sources such. B. a voltage source for generating a voltage, which is composed of a DC or AC voltage component and a pulsed component.
- the controller 230 generally includes control of operating parameters of the voltage source 210, such as, for example, the power source 210. As the voltages, powers or frequencies of the voltage applied to the electrodes 10, 20 voltages.
- the electrode device 100 comprises a first electrode 10 and a second electrode 20, which are shown in plan view.
- the first electrode 10 comprises a planar electrode plate 11 with a profile with a waveform (see Figure 4). Due to the wave form, guiding elements 12 in the form of alternating grooves and elevations for guiding a gas flow 4 are provided on the surfaces of the electrode plate 11.
- the second electrode 20 also includes a planar electrode plate 21 having a profile with a waveform so that vanes 22 are formed.
- the electrode plates 11, 21 have planar surface shapes that extend in a common plane (x-z plane).
- the mutually facing electrode sides 13, 23 of the electrode plates 11, 21 form diverging edges, which have a straight course in the x-z plane. Starting at an ignition section 30, the distance between the electrodes 10, 20, in particular between the electrode sides 13, increases.
- the electrode plates 11, 21, are clamped between the electrode plates 11, 21, a flat reference surface is clamped.
- the remaining edges of the electrode plates 11, 21 can be selected depending on the desired function of the guide elements 12, 22 and the available space in the plasma generator 200, wherein preferably the mirror-symmetrical arrangement of the electrodes 10, 20 shown in the plan view of FIG is.
- an arc 1 is ignited in the ignition section 30.
- the main flow direction 2 of the arc 1 runs parallel to the reference surface between the electrode plates 11, 21, in particular in the xz plane.
- the arc slides along the running distance 3 in a running direction (z-direction) away from the ignition section 30.
- the main current direction 2 of the arc 1 remains in the xz plane.
- the running route 3 also runs parallel to the reference surface between the electrode plates 11, 21, in particular in the xz-plane.
- the arc 1 follows the profile of the electrode plates 11, 21, which extends perpendicular to the main flow direction 2 and perpendicular to the running path 3.
- the movement of the arc 1 in the z-direction is imparted with a further movement with an alternating direction transverse to the reference surface between the electrodes 10, 20, ie in the y-direction.
- the contact time and the action of the arc 1 on the gas stream 2 are thereby increased.
- FIG. 1 illustrates that the distance between the electrodes (perpendicular distance with respect to the z-axis) increases downstream of the ignition section 30.
- the divergent arrangement of the mutually facing electrode sides 13, 23 is not absolutely necessary.
- the distance between the electrodes 10, 20 shown schematically without profiles
- the distance between the electrodes 10, 20 shown schematically without profiles
- the mutually facing electrode sides 13, 23 along the running path 3 downstream of the ignition section 30 marked by dashed lines be increased and then be constant in a subsequent electrode section.
- Other modifications of the shape of the mutually facing electrode sides 13, 23 in the common reference surface between the electrodes 10, 20 (x-z plane) can be realized differently from the examples in FIGS. 1 and 2.
- curved, divergent and / or convergent shapes may be provided.
- FIGs 3 and 4 show further details of one of the electrodes 10 with a profiled electrode plate 11.
- the electrode plate 11 has an L-shape with a Stanfordab ⁇ section 14 and a profile section 15.
- the Stanfordab- section 14 serves for the electrical connection of the electrode 10 to the voltage source 210 (FIG. 1). Deviating from the illustration, however, the electrical connection can also be provided in the profile section 15.
- the electrode plate 11 has the waveform, which is illustrated in the perspective view of Figure 4. The waveform extends perpendicular to the main current direction of the arc and perpendicular to the reference surface (xz-plane) between the electrodes 10, 20 (see Figure 1) in the y-direction.
- the wave form has the shape of a plane wave with a wave normal 16 (see FIG. 3), which is inclined with respect to the straight course of the electrode side 13.
- the gas flow 4 (see FIG. 1) can be guided by the guide elements 12, which are formed by the wave shape, to the passage 3 of the arc.
- the angle ⁇ between the profile section 15 and the terminal section 14, the angle ⁇ between the straight guide elements 12 and the terminal section 14 and an opening angle ⁇ of the waveform of the profile can be varied depending on the specific application conditions of the electrode device 100 and the plasma generator 200 to get voted.
- the width B of the electrode plate 11, in particular of the Profilab ⁇ section 15 may be up to the millimeter or sub-millimeter range is reduced, so that notwithstanding 10, this in the form of ei ⁇ nes curved electrode wire from the Illust ⁇ ration a surface shape of the electrode (not shown).
- the electrode wire has z. B. a sine shape in the y direction and a straight shape in the xy plane.
- the sizes L, B and b are selected in the range ⁇ 10 cm, in particular ⁇ 5 cm, while the sizes d and D are preferably ⁇ 10 mm, in particular ⁇ 5 mm, z. B. 2 mm or less.
- the angle is preferably selected in the range of 20 ° to 160 ° and is typically 90 °.
- a divergence angle between the mutually facing electrode sides 13, 23 can additionally by the orientation of the
- Electrodes 10, 20 are fixed relative to each other.
- the angle ß is z. B. in the range of 60 ° to 160 °.
- the opening angle ⁇ is z. B. in the range of 5 ° to 160 °.
- the thickness D in particular at the electrode side 13 (side edge of the electrode plate 11), is minimal, in order to provide a sharp side edge and if the profile in the y-direction at the turning points has rounded shape.
- FIGS. 5 and 6 show, by way of example, the asymmetrical embodiment of the electrode device 100 according to the invention in a schematic plan view and in a perspective view.
- the first electrode 10 comprises an electrode plate 11 having a profile as described above with reference to FIGS. 1 to 4.
- the second electrode 20 comprises a plate-shaped electrode having a planar surface 24 (see FIG. 6) facing the first electrode 10.
- the arc ignition portion 1 from the starting 30 follows the shape of the Elect ⁇ clear page 13 of the first electrode 10, which faces the surface 24 of the second electrode 20th Accordingly, the arc 1 performs in addition to its movement in the z direction one Movement in the y-direction, ie perpendicular to the main current direction and perpendicular to the reference surface, which is spanned by the first electrode 10 and the second electrode 20.
- the at least one electrode 10 of the electrode device 100 may be provided with a curved surface shape.
- a curved reference surface is formed between the facing electrode sides, which is formed by the main current direction and the running distance of the arc.
- the profile of the at least one electrode is formed transversely to the local orientation of the reference surface between the electrodes.
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Abstract
L'invention concerne un dispositif d'électrodes (100) qui est destiné à une décharge de plasma à glissement de l'arc (1), comprenant une première électrode (10) et une deuxième électrode (20) disposées à une certaine distance l'une de l'autre de manière que l'arc (1) puisse glisser entre la première et la deuxième électrode (10, 20) dans une direction principale de courant électrique (2) prédéfinie et se déplacer le long d'un trajet (3), au moins la première ou la deuxième électrode (10, 20) ayant un profil perpendiculaire à la direction principale de courant électrique (2) de l'arc (1) et au trajet (3). L'invention concerne également un procédé de traitement d'un flux gazeux (4) à l'aide d'un plasma à glissement d'arc, et un générateur de plasma (200).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013004514.2 | 2013-03-15 | ||
| DE102013004514.2A DE102013004514B3 (de) | 2013-03-15 | 2013-03-15 | Elektrodeneinrichtung für eine Plasmaentladung mit gleitendem Lichtbogen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2014139664A1 true WO2014139664A1 (fr) | 2014-09-18 |
Family
ID=50272561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2014/000615 Ceased WO2014139664A1 (fr) | 2013-03-15 | 2014-03-10 | Dispositif d'électrodes destiné à une décharge de plasma à glissement d'arc |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102013004514B3 (fr) |
| WO (1) | WO2014139664A1 (fr) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112010398A (zh) * | 2019-05-31 | 2020-12-01 | 夏普株式会社 | 容器 |
| CN115665960A (zh) * | 2022-11-14 | 2023-01-31 | 中国人民解放军战略支援部队航天工程大学 | 非对称滑动弧等离子体的发生装置 |
| CN116313715A (zh) * | 2021-12-20 | 2023-06-23 | 中国石油化工股份有限公司 | 涂覆刀片电极的方法、刀片电极、滑动弧等离子体反应器和等离子体转化甲烷的方法 |
| WO2023116630A1 (fr) * | 2021-12-20 | 2023-06-29 | 中国石油化工股份有限公司 | Réacteur à plasma à arc glissant, et procédé de conversion de méthane au moyen d'un plasma |
| WO2024037089A1 (fr) * | 2022-08-16 | 2024-02-22 | 海南摩尔兄弟科技有限公司 | Structure de chauffage au plasma et dispositif d'atomisation au plasma |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CZ2015310A3 (cs) * | 2015-05-06 | 2016-08-10 | Masarykova Univerzita | Způsob generování nízkoteplotního plazmatu, způsob plazmové úpravy tekutin, práškových materiálů i pevných látek tímto nízkoteplotním plazmatem a zařízení k provádění těchto způsobů |
| CN113088337B (zh) * | 2021-03-01 | 2022-03-29 | 山东师范大学 | 一种滑动弧放电等离子体转化生物质资源制合成气装置 |
| CN115646155B (zh) * | 2022-10-14 | 2024-07-16 | 国家电网有限公司 | 一种基于滑动弧放电的油冷式六氟化硫降解装置及降解方法 |
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| JP2006216468A (ja) * | 2005-02-04 | 2006-08-17 | Toyohashi Univ Of Technology | プラズマ表面処理方法、プラズマ生成装置及びプラズマ表面処理装置 |
| US9511240B2 (en) * | 2009-03-16 | 2016-12-06 | Drexel University | Apparatus for atmospheric pressure pin-to-hole spark discharge and uses thereof |
| WO2011073170A1 (fr) * | 2009-12-15 | 2011-06-23 | Danmarks Tekniske Universitet | Appareil, procédé et système de traitement de surface au moyen d'au moins une source d'arc à glissement |
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- 2013-03-15 DE DE102013004514.2A patent/DE102013004514B3/de active Active
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- 2014-03-10 WO PCT/EP2014/000615 patent/WO2014139664A1/fr not_active Ceased
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| US20090236215A1 (en) * | 2006-05-26 | 2009-09-24 | Florida State University Research Foundation, Inc. | Gliding arc electrical discharge reactors with improved nozzle configuration |
| WO2008103433A1 (fr) * | 2007-02-23 | 2008-08-28 | Ceramatec, Inc. | Électrode en céramique pour arc électrique glissant |
| JP2008231471A (ja) * | 2007-03-19 | 2008-10-02 | Toyohashi Univ Of Technology | 進行プラズマ成膜方法、プラズマ焼成基材及びプラズマ成膜装置 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112010398A (zh) * | 2019-05-31 | 2020-12-01 | 夏普株式会社 | 容器 |
| CN112010398B (zh) * | 2019-05-31 | 2025-03-11 | 夏普株式会社 | 容器 |
| CN116313715A (zh) * | 2021-12-20 | 2023-06-23 | 中国石油化工股份有限公司 | 涂覆刀片电极的方法、刀片电极、滑动弧等离子体反应器和等离子体转化甲烷的方法 |
| WO2023116630A1 (fr) * | 2021-12-20 | 2023-06-29 | 中国石油化工股份有限公司 | Réacteur à plasma à arc glissant, et procédé de conversion de méthane au moyen d'un plasma |
| WO2024037089A1 (fr) * | 2022-08-16 | 2024-02-22 | 海南摩尔兄弟科技有限公司 | Structure de chauffage au plasma et dispositif d'atomisation au plasma |
| CN115665960A (zh) * | 2022-11-14 | 2023-01-31 | 中国人民解放军战略支援部队航天工程大学 | 非对称滑动弧等离子体的发生装置 |
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