WO2014178405A1 - Stratifié de film de verre, et procédé de production de dispositif électronique - Google Patents

Stratifié de film de verre, et procédé de production de dispositif électronique Download PDF

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Publication number
WO2014178405A1
WO2014178405A1 PCT/JP2014/062002 JP2014062002W WO2014178405A1 WO 2014178405 A1 WO2014178405 A1 WO 2014178405A1 JP 2014062002 W JP2014062002 W JP 2014062002W WO 2014178405 A1 WO2014178405 A1 WO 2014178405A1
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WO
WIPO (PCT)
Prior art keywords
glass
glass film
film
supporting
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/062002
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English (en)
Japanese (ja)
Inventor
三和　義治
道治 江田
隆雄 岡
尚利 稲山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Publication of WO2014178405A1 publication Critical patent/WO2014178405A1/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation

Definitions

  • the present invention relates to flat panel displays such as liquid crystal displays and organic EL displays, solar cells, lithium ion batteries, digital signage, touch panels, electronic paper, glass substrates for devices such as mobile phones and smartphones, and organic EL lighting and mobile phones.
  • the present invention relates to a method for producing film-like glass used for a cover glass of a device such as a smartphone or a pharmaceutical package, and a glass film laminate in which a glass film is supported by a supporting glass.
  • flat panel displays such as a liquid crystal display, a plasma display, an organic EL display and a field emission display have become popular in recent years.
  • These flat panel displays are required to be thinner.
  • organic EL displays are required to be easily carried by folding or winding, and to be usable not only on flat surfaces but also on curved surfaces.
  • it is not limited to a display that can be used not only on a flat surface but also on a curved surface.
  • the surface of an object having a curved surface such as a car body surface, a roof of a building, a pillar, or an outer wall. If a solar cell can be formed or organic EL illumination can be formed, the application will be expanded. Therefore, the substrate and cover glass used in these devices are required to be further thinned and highly flexible.
  • Organic EL element materials such as a light emitting layer and an electron transport layer (Alq3) used for an organic EL display are deteriorated by contact with a gas such as oxygen or water vapor. Accordingly, since a high gas barrier property is required for a substrate used in an organic EL display, it is expected to use a glass substrate. However, unlike the resin film, the glass used for the substrate is weak in tensile stress and thus has low flexibility. When the glass substrate is bent, an excessive tensile stress is applied to the glass substrate surface, resulting in breakage. In order to impart flexibility to the glass substrate, it is necessary to make the glass substrate ultra-thin, and a glass film or glass roll having a thickness of 200 ⁇ m or less as described in Patent Document 1 below has been proposed. .
  • the glass substrate used for electronic devices such as flat panel displays and solar cells is subjected to various processing related to electronic device manufacturing such as processing and cleaning.
  • processing and cleaning various processing related to electronic device manufacturing
  • glass is a brittle material, so it is damaged by a slight stress change, and handling is difficult when performing various electronic device manufacturing related processes described above. There is a problem that it is difficult.
  • a glass film having a thickness of 200 ⁇ m or less is rich in flexibility, it is difficult to perform positioning when performing processing, and there is a problem that displacement or the like occurs during patterning.
  • Patent Document 2 proposes a glass film laminate in which a glass film is laminated on a supporting glass. According to this, even if a glass film having no strength or rigidity is used alone, the supporting glass has high rigidity, so that the entire glass film laminate can be easily positioned during processing. Moreover, in the following patent document 2, it is said that it can peel from a support glass immediately, without damaging a glass film after completion
  • Patent Document 3 the glass film is supported on the supporting glass so that the corner portion of the glass film is exposed at the peeling start portion formed by cutting out a part of the supporting glass into a concave shape.
  • a glass film laminate laminated on top has been proposed. Thereby, since the corner part which the glass film exposed can be easily hold
  • the present invention has been made to solve the above-mentioned problems of the prior art, and is a glass film when the glass film is peeled off or broken from the supporting glass during the manufacturing-related processing or when the glass film is peeled off from the supporting glass. It is an object of the present invention to make it possible to easily peel a glass film from a supporting glass while preventing breakage or breakage of the glass.
  • the present invention devised to solve the above problems is a glass film laminate in which a supporting glass and a glass film are laminated with their respective mating surfaces in surface contact, and the glass film is eaten from the supporting glass.
  • a protrusion that protrudes toward the glass film is provided, and the glass film is in contact with the protrusion, and in the vicinity of the edge of the glass film.
  • a peeling region is provided that is surrounded by the support glass, the protruding portion, and the glass film, and in which the mating surfaces of the support glass and the glass film are in a non-contact state.
  • the supporting surface of the supporting glass is the surface on the glass film side of the supporting glass of the glass film laminate, and when the supporting glass is composed only of glass, the surface of the glass is the supporting glass.
  • the supporting glass is formed by forming a thin film such as a resin thin film or an inorganic thin film on the surface of the glass, it means that the surface of the thin film becomes the mating surface of the supporting glass.
  • the “glass film mating surface” is the surface on the supporting glass side of the glass film of the glass film laminate, and when the glass film is composed only of glass, the surface of the glass is glass.
  • the surface of the thin film should be the mating surface of the glass film. Meaning (hereinafter the same).
  • the protruding portion is formed in the vicinity of the edge of the support glass, so that the strength of the support glass does not decrease, so that the probability of occurrence of breakage or breakage of the support glass is greatly reduced.
  • a peeling region that is surrounded by the support glass, the protruding portion, and the glass film and that the mating surfaces of the glass film and the support glass are brought into a non-contact state. Therefore, when peeling a glass film from support glass, a glass film can be easily peeled from support glass by expanding the above-mentioned peeling area gradually.
  • a thin metal member such as a resin sheet or a razor may be used as a peeling jig, but the peeling jig is easily inserted into the peeling area. be able to.
  • an excessive force for peeling does not act on the glass film, so that the glass film is effectively prevented from being broken or damaged during the peeling. .
  • the supporting glass protrudes from the glass film.
  • the protrusion is provided in the vicinity of at least one side of the polygonal support glass, and the protrusion and the glass film are in line contact.
  • tool can be more easily inserted in the space
  • the polygonal support glass is preferably a rectangular support glass
  • the glass film is preferably a rectangular glass film.
  • the supporting glass and the glass film are more preferably similar.
  • the glass film is preferably laminated so that the edge of the glass film is positioned above the protrusion, and the edge of the glass film and the protrusion are preferably separated from each other. .
  • the part which the glass film and the protrusion part of the support glass have separated can also be made into the peeling start part of a glass film. Further, the separated portion can be used as a guide for inserting the above-described peeling jig, and can more easily insert the above-described peeling jig into the peeling region. Therefore, the glass film can be more easily peeled from the supporting glass.
  • the protruding portion is disposed with a gap from an end side of the support glass, and the glass film has an end side between the end side of the support glass and the protruding portion. It is preferable to be laminated on the supporting glass so as to be positioned.
  • the edge of the glass film is separated from the supporting glass and the protruding portion, the edge of the glass film can effectively and sufficiently exhibit the function as the peeling start portion of the glass film. .
  • the protruding portion preferably protrudes from 1 to 50 ⁇ m to the glass film side from the mating surface of the support glass.
  • the height dimension of the above-described peeling region is optimized, and the size of the peeling region can sufficiently exhibit its function.
  • the width of the peeling region in the direction along the mating surface of the supporting glass is preferably 0.5 to 5 mm.
  • the protrusion is preferably made of a glass tape that is thinner than the glass film.
  • the protrusion is made of a glass tape that is thinner than the glass film, the protrusion can be easily formed on the supporting glass.
  • the surface roughness Ra of the mating surfaces of the glass film and the supporting glass is 2.0 nm or less.
  • the glass film and the supporting glass can be laminated by direct adhesion without using an adhesive.
  • Such advantages are particularly remarkable when both the glass film and the supporting glass are made of only glass and when one or both of them are formed with an inorganic thin film on the surface of the glass. Is obtained.
  • the support glass is preferably formed by an overflow down draw method, a slot down draw method, or a float method.
  • thick ear portions may be formed at both ends of the glass original plate immediately after the molding at the time of forming the supporting glass.
  • the ear portions can also be used as protruding portions. is there. Thereby, it becomes possible to omit the post-process for producing the protruding portion.
  • the glass film preferably has a thickness of 300 ⁇ m or less.
  • the glass film can be easily peeled off from the supporting glass as described above, even though it is a glass film having a thickness of 300 ⁇ m or less that is likely to be cracked or chipped.
  • the method according to the present invention which was created to solve the above-mentioned problems, is a method for manufacturing an electronic device in which a manufacturing-related process is performed on a glass film, and a glass tape is disposed in the vicinity of the edge of the supporting glass to protrude.
  • the first step is to perform a heat treatment after the glass tape is arranged, so that the supporting glass and the glass tape are bonded to each other to form a protruding portion. It is preferable to include a forming step.
  • the third step is a manufacturing-related process involving heating, and the heating temperature in the heating process after the glass tape placement is higher than the heating temperature of the third manufacturing-related process. High temperature is preferred.
  • the glass film is removed from the supporting glass while preventing the damage or damage of the supporting glass during the manufacturing-related processing and the glass film from being broken or damaged when the glass film is peeled off from the supporting glass. It can be easily peeled off.
  • FIG. 1 illustrates the configuration of the main part of a glass film laminate 1 according to an embodiment of the present invention.
  • this glass film laminate 1 has a surface contact portion 12 in which the lower surface (mating surface) 22 of the glass film 2 and the upper surface (mating surface) 33 of the supporting glass 3 are in surface contact over a wide range.
  • the glass film 2 is laminated on the support glass 3 so as to have a state.
  • a protruding portion 31 having a rectangular cross section separate from the support glass 2 is provided.
  • the support glass 3, the protruding portion 31, and the glass film 2 are surrounded in the vicinity of the edge 21 of the glass film 2, and the lower surface 22 of the glass film 2 and the upper surface of the support glass 3.
  • region 11 made into the non-contact state with 33 is formed.
  • the peeling region 11 is a space surrounded by the lower surface 22 of the glass film 2, the upper surface 33 of the supporting glass 3, and the inner surface 312 of the protruding portion 31.
  • the peeling region 11 preferably has a width dimension w in the direction along the upper surface 33 of the supporting glass 3 (distance from the inner surface 312 of the protruding portion 31 to the starting end of the surface contact portion 12) of 0.01 to 10 mm. 0.1 to 5 mm is more preferable, and 1 to 4 mm is most preferable. Thereby, it becomes possible to produce the peeling area
  • the peeling region 11 By forming the peeling region 11 on the glass film laminate 1, the following action is performed. That is, when peeling the glass film 2 from the support glass 3, the surface contact portion 12 can be separated by gradually expanding the peeling region 11, and the glass film 2 can be easily peeled from the support glass 3. it can. In addition, when the glass film 2 is peeled from the support glass 3, a thin metal member such as a resin sheet or a razor may be used as a peeling jig (not shown). 11 can be inserted.
  • the end side 21 of the glass film 2 is separated from the upper surface 313 of the protruding portion 31.
  • the glass film 2 can be peeled from the support glass 3 more easily.
  • a peeling jig (not shown) is used when peeling the glass film 2 from the support glass 3
  • the separation region 14 between the edge 21 of the glass film 2 and the upper surface 313 of the protruding portion 31 is peeled off. Since it serves as a guide when the jig is inserted, the peeling jig can be easily inserted into the peeling region 11.
  • the surface roughness Ra of the mating surfaces (the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3) of the glass film 2 and the supporting glass 3 is 2.0 nm. It is as follows. Thereby, the glass film 2 and the support glass 3 can be laminated
  • the surface roughness Ra of the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3 is preferably 1.0 nm or less, more preferably 0.5 nm or less, and preferably 0.2 nm or less. Most preferred.
  • the glass film 2 is made of silicate glass or silica glass, preferably borosilicate glass, most preferably non-alkali glass. If the glass film 2 contains an alkali component, cations are dropped on the surface, so-called soda blowing phenomenon occurs, and the structure becomes rough. In this case, if the glass film 2 is used while being curved, there is a possibility that the glass film 2 may be broken from a portion that has become rough due to deterioration over time.
  • the alkali-free glass is a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically, a glass having an alkali component of 3000 ppm or less.
  • the content of the alkali component in the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and still more preferably 300 ppm or less.
  • the thickness of the glass film 2 is preferably 300 ⁇ m or less, more preferably 5 ⁇ m to 200 ⁇ m, and most preferably 5 ⁇ m to 100 ⁇ m. Thereby, the thickness of the glass film 2 can be made thinner and appropriate flexibility can be imparted, and handling properties are difficult, and problems such as positioning errors and bending during patterning are likely to occur. On the other hand, electronic device manufacturing related processing and the like can be easily performed by using the supporting glass 3 having the characteristics described later. If the thickness of the glass film 2 is less than 5 ⁇ m, the strength of the glass film 2 tends to be insufficient, and the glass film 2 may be difficult to peel from the support glass 3.
  • silicate glass, silica glass, borosilicate glass, non-alkali glass, or the like is used as in the glass film 2.
  • the supporting glass 3 it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 within 5 ⁇ 10 ⁇ 7 / ° C.
  • the supporting glass 3 and the glass film 2 are most preferably glass having the same composition.
  • the thickness of the support glass 3 is preferably 400 ⁇ m or more. When the thickness of the supporting glass 3 is less than 400 ⁇ m, there is a possibility that a problem may occur in terms of strength when the supporting glass 3 is handled alone.
  • the thickness of the supporting glass 3 is preferably 400 ⁇ m to 700 ⁇ m, and most preferably 500 ⁇ m to 700 ⁇ m. As a result, the glass film 2 can be reliably supported, and breakage of the glass film 2 that can occur when the glass film 2 is peeled from the support glass 3 can be effectively suppressed.
  • the thickness of the support glass 3 may be less than 400 ⁇ m (for example, 300 ⁇ m, the same thickness as the glass film 2).
  • the glass film 2 and the support glass 3 used in the present embodiment are preferably formed by an overflow down draw method, a slot down draw method, or a float method.
  • an overflow down draw method a slot down draw method, or a float method.
  • thick ears may be formed at both ends of the plate glass during molding of the supporting glass, but the ears can be used as protrusions. Thereby, it becomes possible to omit the process of producing a protrusion part.
  • a protruding portion may be newly formed at the end of the supporting glass after the ear portion is removed.
  • the glass ribbon G that has reached the predetermined thickness is gradually cooled in a slow cooling furnace (annealer), the thermal distortion of the glass ribbon (G) is removed, and the glass ribbon (G) is cut into a predetermined size, thereby forming a glass film. 2 and the supporting glass 3 are respectively formed.
  • the supporting glass 3 is laminated so as to protrude from the glass film 2. Thereby, it can prevent that the glass film 2 breaks because the edge 21 of the glass film 2 collides with the positioning pin etc. which are not shown in figure.
  • the protruding amount of the supporting glass 3 from the glass film 2 is preferably 0.5 to 30 mm, and more preferably 0.5 to 5 mm. By reducing the amount of protrusion of the supporting glass 3, the effective surface of the glass film 2 can be secured more widely. From such a viewpoint, the protrusion amount of the supporting glass 3 from the glass film 2 may be 0 mm.
  • the support glass 3 protrudes from the glass film 2 on all four sides, and at least a portion where the protruding portion 31 is formed in the vicinity of the end 32 of the support glass 3.
  • the support glass 3 protrudes from the glass film 2.
  • a protrusion 31 is formed in the vicinity of the end 32 of the support glass 3 so as to protrude toward the glass film 2 by a thickness t.
  • the protruding portion 31 may be formed in the vicinity of a part of the end side 32 of the support glass 3 or may be formed along the entire end side 32 of the support glass 3.
  • it may be formed only on one side of the support glass 3 having a polygonal shape or a rectangular shape, it may be provided on two adjacent sides, two opposite sides, or all four sides.
  • the protruding portion 31 is provided in the vicinity of the end side 32 of the support glass 3.
  • “the vicinity of the end side 32 of the support glass 3” refers to the end side 32 of the support glass 3.
  • positions so that the outer surface 311 of the protrusion part 31 may become on the same plane is also included.
  • the thickness t of the protrusion 31 is preferably 0.1 to 100 ⁇ m, more preferably 0.1 to 20 ⁇ m, and most preferably 1 to 10 ⁇ m. Thereby, the peeling area
  • the protrusion 31 is preferably formed in a rectangular cross section, and the corner of the protrusion 31 (particularly, the upper end portion of the inner side surface 312 of the protrusion 31) is C chamfered or R chamfered (circular chamfered in cross section) or the like. It is preferable that the shape is chamfered. Thereby, the protrusion part 31 and the glass film 2 will be line-contacted in the contact location 13, and the peeling jig
  • the protruding portion 31 when the protruding portion 31 has a shape in which the four corners are chamfered or a shape in which the side surface is formed with a convex curved surface as shown in FIG. 4, the protruding portion 31 can be prevented from being cracked or chipped.
  • the protrusion 31 may be formed in a polygonal cross section, or may be formed in a circular cross section or an elliptical cross section.
  • the protrusion 31 is preferably made of a glass tape having a thickness smaller than that of the glass film 2. Thereby, the desired protrusion part 31 is producible by setting freely the thickness and width
  • the silicate glass, the silica glass, the borosilicate glass, the alkali free glass etc. are used like the glass film 2 and the support glass 3.
  • FIG. it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 or the supporting glass 3 within 5 ⁇ 10 ⁇ 7 / ° C.
  • thermal warp due to a difference in expansion coefficient, cracking of the protruding portion 31, and the like are unlikely to occur, and the glass film laminate 1 can maintain a stable laminated state. It becomes possible.
  • the material of the protrusion 31 is not limited to the glass described above, and resin, metal, or the like may be used.
  • the glass tape is preferably formed by a redraw method.
  • the protrusion 31 having a desired width and thickness can be easily formed by appropriately designing the thickness and width of the base material, the draw-down rate of stretch molding, and the like.
  • glass tape means a glass sheet having a stripe shape (ribbon shape or tape shape), and is preferably formed by a redraw method.
  • FIG. 3 is a diagram illustrating a redraw method used when the protruding portion 31 (glass tape) is manufactured.
  • a base glass 51 is prepared and set in the stretch molding apparatus 5 as shown in FIG. It is possible to form the glass tape 53 by heating the base glass 51 with the heater 52 and pulling out the base glass 51 at a temperature where the viscosity of the base glass 51 is 6.0 to 8.0 dPa ⁇ s so that the thickness is 100 ⁇ m or less. it can.
  • the stretching force of the stretch molding is controlled by the rotational force of the resin pulley 54, and the molded glass tape 53 is wound up by the winding drum 55. Thereby, since only the single side
  • the protruding portion 31 has been described by taking a glass tape produced by stretch molding as an example, but is not limited to this form. For example, you may use what cut
  • both the glass film 2 and the supporting glass 3 are made of only glass
  • the two films 2 and 3 are laminated by direct surface contact.
  • a resin layer such as silicone resin, EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the upper surface 31 of the glass of the support glass 3, and the peelability of the glass film 2 may be improved.
  • an inorganic oxide thin film such as ITO or ZrO 2 or a metal thin film such as Ti may be formed on the upper surface 31 of the supporting glass 3.
  • a resin layer such as EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the lower surface 22 of the glass of the glass film 2, and an inorganic oxide thin film such as ITO or ZrO 2 , SiN, TiN, A nitride film such as CrN, TiAlN, or AlCrN, a metal thin film such as Ti, a carbide film such as diamond-like carbon, TiC or WC, or a fluoride film such as MgF 2 may be formed. A film may be formed. In this case, the surface after the resin layer or inorganic thin film is formed becomes the mating surface of the glass film or the supporting glass.
  • an inorganic oxide thin film such as ITO or ZrO 2 , SiN, TiN, A nitride film such as CrN, TiAlN, or AlCrN, a metal thin film such as Ti, a carbide film such as diamond-like carbon, TiC or WC, or a fluoride film such as MgF 2
  • the protruding portion 31 may be formed after the inorganic thin film or the resin layer is formed, and before the inorganic thin film or the resin layer is formed. You may form the protrusion part 31 in this.
  • the method of fixing the protruding portion 31 on the supporting glass 3 may be bonding using an adhesive such as a resin, and by heating,
  • the protrusion 31 may be bonded onto the support glass 3.
  • the glass tape as the protrusion 31 is produced by the above-described redraw method, the glass tape can be directly bonded onto the supporting glass by setting the surface roughness Ra of the glass tape to 2.0 nm or less. Even if it is a lower temperature heating, the protrusion part 31 can be adhere
  • the surface roughness Ra of the glass tape is preferably 1.0 nm or less, more preferably 0.5 nm or less, and most preferably 0.2 nm or less.
  • FIG. 4 is a view showing another embodiment of the glass film laminate according to the present invention.
  • the glass film laminate 1 according to the present invention has a convex curved surface in which the outer side surface 311 and the inner side surface of the projecting portion 31 formed separately from the supporting glass 3 are substantially semicircular in cross section.
  • the protruding portion 31 is disposed with a distance 34 from the end side 32 of the supporting glass 3, and the end side 21 of the glass film 2 is formed between the end side 32 of the supporting glass 3 and the outer side surface 311 of the protruding portion 31. It is laminated
  • the edge 21 of the glass film 2 is directly gripped. It becomes easy to do.
  • the lower surface in the vicinity of the edge 21 of the glass film 2 is in surface contact with the upper surface of the protruding portion 31.
  • a separation region surrounded by the lower surface of the glass film 2, the upper surface of the support glass 3, and the inner surface of the protruding portion 31 is formed in the vicinity of the end side 21 of the glass film 2.
  • FIG 5 and 6 are plan views of the glass film laminate 1 according to the present embodiment.
  • the length in the longitudinal direction of the protruding portion 31 is longer than the length of the end side 21 of the glass film 2. Both ends protrude from both ends in the longitudinal direction of the end side 21 of the glass film 2.
  • the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 21 of the glass film 2.
  • the protrusion 31 protrudes from both ends in the longitudinal direction.
  • both ends in the longitudinal direction of the end side 21 may coincide with each other.
  • both end portions of the peeling region 11, that is, both longitudinal end portions of the space portion forming the peeling region 11 are opened.
  • a peeling jig having a diameter smaller than that of the peeling region 11 can be inserted, and the peeling jig can be inserted into the peeling region 11 without going through the contact portion 13 between the glass film 2 and the protruding portion 31.
  • the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 32 of the support glass 3, and both ends in the longitudinal direction of the end side 32 of the support glass 3 protrude.
  • the longitudinal length of the protruding portion 31 is made the same as the length of the end side 32 of the supporting glass 3, and both longitudinal ends of the protruding portion 31 are supported by the supporting glass 3. You may make it correspond to the longitudinal direction both ends of the edge 32 of this.
  • FIG. 7 is a view showing a flowchart of a manufacturing method of an electronic device (an electronic device subjected to manufacturing-related processing on a glass film) according to the present invention.
  • the reference numerals used in the following description are the same as those used in FIGS.
  • the glass film 2 is laminated on the support glass 3 as described above, and a glass film laminate 1 having a peeling region 11 surrounded by the support glass 3, the protruding portion 31, and the glass film 2 is produced, and glass
  • the first step (S1) is a step of forming the protruding portion 31 by placing a glass tape in the vicinity of the end side 32 of the supporting glass 3.
  • the end surface 32 of the support glass is arranged so that the surface on the side not in contact with the pulley 54 is in contact with the upper surface 33 of the support glass 3. Place the glass tape along.
  • the surface of the glass tape that is not in contact with the pulley 54 is in a better surface state than the surface that is in contact with the pulley 54, so that in the bonding step between the protruding portion 31 and the support glass 3 described later.
  • the heating temperature can be reduced.
  • the surface state which contacted the pulley 54 has deteriorated slightly, it can prevent that the glass film 2 and the protrusion part 31 adhere
  • the first step (S1) according to the present invention may include a protruding portion forming step in which the supporting glass 3 is heated to adhere the supporting glass 3 and the protruding portion 31 after the glass tape is arranged.
  • the method of heating the support glass 3 may be performed by putting the support glass 3 into a known baking furnace, and heating the contact surface between the upper surface 33 of the support glass 3 and the protruding portion 31 with a known laser or the like. You can go there. As described above, the smaller the surface roughness Ra of the protrusion 31 and the upper surface 33 of the support glass 3, the lower the temperature can be bonded.
  • the glass film 2 and the supporting glass 3 are laminated by bringing the mating surfaces 22 and 33 into surface contact so that the protruding portion 31 and the glass film 2 are in contact with each other.
  • the glass film laminated body which has the peeling area
  • 1 is a process of manufacturing 1.
  • the method for laminating the glass film 2 on the supporting glass 3 is not particularly limited, and the glass film 2 can be laminated on the supporting glass 3 using a known laminating machine or the like.
  • the third step (S3) according to the present invention is a step of performing manufacturing-related processing on the glass film 2 side of the glass film laminate 1.
  • Examples of the manufacturing-related processing performed on the glass film 2 side include film formation processing by sputtering, etc., sealing processing for sealing elements, sintering processing for glass frit, etc. in device, particularly electronic device manufacturing. It is done.
  • Examples of the manufacturing-related process performed on the glass film 2 side include a film forming process such as an antireflection film or a transmission preventing film by a sputtering method or the like.
  • the manufacturing-related process used in the third step may be constituted by a single processing means, or may be constituted by a plurality of identical or different processing means. Moreover, a manufacturing related process with heating may be included in part, and a manufacturing related process without heating such as a cleaning process may be included.
  • the third step forms an element on the glass film 2 of the glass film laminate 1 produced in the second step by performing an electronic device manufacturing related process, not shown.
  • the glass film laminated body 1 of this invention can be used also for a cover glass.
  • the fourth step (S4) according to the present invention is a step of peeling the treated glass film from the support glass 3.
  • a peeling jig (not shown) may be used. By using the peeling jig, the peeling jig can be smoothly inserted up to the peeling area 11, and by continuing to insert the peeling jig, the peeling area 11 can be expanded.
  • a fluid containing water in the peeling region 11 a gas containing water having a high relative humidity, a gas containing water mist, or liquid water itself or water is interfaced.
  • An aqueous solution containing an activator or the like may be supplied, or the glass film laminate 1 or the electronic device with supporting glass described above may be immersed in water. May be applied.
  • the shape of the peeling jig may be a thread-like member, but it is preferable to use a member having a small thickness and a wide width in the peeling progress direction, such as a sheet shape, a band shape, a plate shape or a strip shape.
  • the thickness of the peeling jig is preferably 0.01 mm to 1 mm, and more preferably 0.1 mm to 0.5 mm.
  • the peeling jig can smoothly pass through the contact portion 13 between the treated glass film and the protruding portion 31, and the peeling jig can be smoothly inserted into the peeling region 11.
  • tool also depends on the area of the glass film laminated body 1 used as the object of peeling, it is preferable that it is wider than the glass film laminated body 1 at least in the peeling progress direction.
  • the material of the peeling jig can be a rigid metal such as aluminum or stainless steel, but it is preferable to use a flexible resin film such as polyethylene or acrylic, and a hydrophobic film such as a fluorine film.
  • the resin sheet is more preferable.
  • a treated glass film is adsorbed by a pad or the like, and the treated glass film is moved from the supporting glass 3 by moving the pad in a direction separating from the supporting glass 3.
  • a peeling method may be used.
  • an electronic device subjected to manufacturing-related processing on the glass film can be obtained, and the manufacturing-related processing on the glass film is appropriately performed on another electronic device or the like. It is possible to incorporate an electronic device subjected to the above.
  • a liquid crystal panel or an organic EL panel can be directly produced in the third step to produce an electronic device with a supporting glass, and an electronic device can be produced by peeling the supporting glass. .
  • the heating temperature of the heating process performed after the placement of the glass tape in the first process is higher than the heating temperature of the manufacturing-related process in the third process.
  • the heating temperature of the heating process performed after the placement of the glass tape in the first process is higher than the heating temperature of the manufacturing-related process in the third process.
  • the heating temperature of the heat treatment performed after the placement of the glass tape in the first step is 50 ° C. or higher, and more preferably 100 ° C. or higher than the manufacturing-related processing temperature in the third step.
  • the manufacturing-related process in the third step is a film forming process such as a transparent conductive film
  • it is usually heated to 250 to 350 ° C. during the third step.
  • the heating performed after the glass tape is disposed.
  • the heating temperature for the treatment is preferably 350 to 450 ° C.
  • non-alkali glass (OA-10G, thermal expansion coefficient at 30 to 380 ° C .: 38 ⁇ 10 ⁇ 7 / ° C.) manufactured by Nippon Electric Glass Co., Ltd. was used.
  • a support tape and a glass film were produced by the overflow downdraw method, and a glass tape was produced by the redraw method.
  • a rectangular plate glass having a length of 110 mm, a width of 110 mm, and a thickness of 500 ⁇ m was prepared as a supporting glass.
  • a rectangular transparent glass having a length of 100 mm, a width of 100 mm, and a thickness of 100 ⁇ m was prepared as a glass film.
  • a streaky glass sheet having a length of 100 mm, a width of 5 mm, and a thickness of 5 ⁇ m was prepared as a glass tape.
  • a protrusion was formed by placing a glass tape on the support glass in a direction along the end side while being spaced 5 mm away from one end side of the support glass. Thereafter, the supporting glass was heat-treated at 400 ° C. for 30 minutes. After the heat treatment, the supporting glass and the glass film are washed, and the glass film is laminated on the supporting glass, so that the edge of the glass film is spaced above the protruding portion, and is about 2 mm from the contact point between the glass film and the protruding portion. The glass film laminated body in which the peeling area
  • Comparative example As a comparative example, a glass film with the same conditions was laminated on a supporting glass except that no protrusion was formed on the supporting glass, and when peeling the glass film was attempted, it was difficult to peel off the glass film. Some glass films were damaged during peeling.
  • the present invention can be suitably used for glass substrates used in flat panel displays such as liquid crystal displays and organic EL displays, devices such as solar cells, and cover glasses for organic EL lighting.

Landscapes

  • Laminated Bodies (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

　La présente invention concerne un stratifié (1) de film de verre obtenu en mettant en contact par surfaces les surfaces (33, 22) de stratification respectives du verre de support (3) et un film de verre (2) et en stratifiant le verre de support et le film de verre (2), sachant que : le film de verre (2) ne s'étend pas au-delà du verre de support (3) ; une saillie (31) qui fait saillie vers le côté film de verre (2) est prévue à proximité d'un bord (32) du verre de support (3) ; le film de verre (2) est en contact avec la saillie (31) ; et une région de détachement (11) qui est entourée par le verre de support (3), la saillie (31) et le film de verre (2) et dans laquelle les surfaces (33, 22) de stratification du verre de support (3) et du film de verre (2) ne sont pas en contact est prévue à proximité d'un bord (21) du film de verre (2). Le film de verre (2) est détaché du verre de support (3) en élargissant progressivement la région de détachement (11).
PCT/JP2014/062002 2013-04-30 2014-04-30 Stratifié de film de verre, et procédé de production de dispositif électronique Ceased WO2014178405A1 (fr)

Applications Claiming Priority (2)

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JP2013095354 2013-04-30
JP2013-095354 2013-04-30

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WO2014178405A1 true WO2014178405A1 (fr) 2014-11-06

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TW (1) TW201444676A (fr)
WO (1) WO2014178405A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016210157A (ja) * 2015-05-13 2016-12-15 旭硝子株式会社 ガラス積層体および電子デバイスの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003308019A (ja) * 2002-04-17 2003-10-31 Sharp Corp 貼り付けシート及び被貼り付け体
JP2010194874A (ja) * 2009-02-25 2010-09-09 Nippon Electric Glass Co Ltd ガラスフィルム積層体、及び該積層体のガラスロール
WO2011001946A1 (fr) * 2009-07-03 2011-01-06 日本電気硝子株式会社 Stratifié verre-film
JP2013075818A (ja) * 2011-09-15 2013-04-25 Nippon Electric Glass Co Ltd 薄板ガラスの切断方法及び薄板ガラス

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003308019A (ja) * 2002-04-17 2003-10-31 Sharp Corp 貼り付けシート及び被貼り付け体
JP2010194874A (ja) * 2009-02-25 2010-09-09 Nippon Electric Glass Co Ltd ガラスフィルム積層体、及び該積層体のガラスロール
WO2011001946A1 (fr) * 2009-07-03 2011-01-06 日本電気硝子株式会社 Stratifié verre-film
JP2013075818A (ja) * 2011-09-15 2013-04-25 Nippon Electric Glass Co Ltd 薄板ガラスの切断方法及び薄板ガラス

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TW201444676A (zh) 2014-12-01

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