WO2014184055A1 - Procédé de fabrication d'une structure supprimant la lumière parasite et dispositif doté de cette structure - Google Patents

Procédé de fabrication d'une structure supprimant la lumière parasite et dispositif doté de cette structure Download PDF

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Publication number
WO2014184055A1
WO2014184055A1 PCT/EP2014/059212 EP2014059212W WO2014184055A1 WO 2014184055 A1 WO2014184055 A1 WO 2014184055A1 EP 2014059212 W EP2014059212 W EP 2014059212W WO 2014184055 A1 WO2014184055 A1 WO 2014184055A1
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WIPO (PCT)
Prior art keywords
optical
optical channels
light
lens
irradiation
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Ceased
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PCT/EP2014/059212
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German (de)
English (en)
Inventor
Frank Wippermann
Andreas Brückner
Nicolas LANGE
Andreas BRÄUER
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Publication of WO2014184055A1 publication Critical patent/WO2014184055A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/005—Diaphragms

Definitions

  • the present invention relates to a method for producing an aliasing structure and a device having the same.
  • the preferably light-absorbing structures are formed as narrow as possible and in the third dimension, the direction of the optical axis of the camera, continuously. Due to the different inclinations of the optical axes of adjacent channels, optimum area utilization results when the preferably absorbing structures have undercut edges or surfaces.
  • litho lithographic plate arrays made of chrome, black chrome or photostructurable polymers or on embossed or cast components using molding methods.
  • a plurality of diaphragm layers with adapted geometry such as aperture shape, size or position, are arranged in several layers one above the other and thus mimic the effect of a heightwise continuous false-rejecting structure.
  • the areas above and below the panels are transparent and permit crosstalk between channels if the panels are dimensioned unfavorably.
  • an optimal misregistration results in an increased area requirement, since the non-transparent areas between the imaging channels are laterally enlarged in order to prevent cross-talk between the channels.
  • lithographic, layer-by-layer production methods often have an increased number of process steps compared to impression methods and thus an increased process outlay.
  • Embossed or cast components using molding processes do not allow an optimal and thus minimal distance between the channels.
  • Optimal surface utilization results in undercut edges or surfaces of the optical channels due to the different inclinations of the optical axes of adjacent channels.
  • undercut edges or surfaces prevent removal of the workpieces from the impression tools. As a result, an overall larger area requirement for the overall arrangement results disadvantageously.
  • the object of the present invention is to provide a method and a device with which optical channels can be arranged relative to each other in such a way that an optimal area utilization is achieved, bypassing the aforementioned disadvantages.
  • the present invention is based on the finding that the above-described problems in conventional production methods are avoided by producing the optical channels with different angles in a machining process by irradiation of the material, starting from a one-piece carrier material made of an irradiation-curable material.
  • the carrier is formed of hardenable polymer in which the optical channels to be formed are hardened by means of irradiation.
  • the support is formed of photosensitive polymer so that areas between the optical channels can be developed and areas where optical channels are formed remain unexposed.
  • the production of the false-light-suppressing structure takes place by selective curing or exposure of a suitable polymer layer, for example, a curing polymer or photoresist which has a post-exposure photosensitive solubility, wherein the selective cure or exposure is through an aperture array using optical structures that perform channel-wise beamforming.
  • a suitable polymer layer for example, a curing polymer or photoresist which has a post-exposure photosensitive solubility
  • a curing polymer is arranged in a layer and cured locally selectively and with channelwise different angle by irradiation. Subsequently, the uncured polymer is rinsed out with a suitable solvent. The spaces thus created between the hardened areas which define the optical channels are filled with a material which absorbs light or radiation as far as possible. In a further, optional step, the previously cured polymer regions defining the optical channels can be removed using a suitable solvent.
  • a photosensitive polymer which changes its solubility upon irradiation, is placed in a layer and exposed locally selectively at channel-wise different angles by irradiation.
  • the exposed or unexposed polymer is developed with a suitable solvent and rinsed out.
  • the resulting intermediate spaces between the hardened areas are filled with a material that is as light- or radiation-absorbent as possible.
  • thematic or time-curing polymers can be used.
  • the polymer areas remaining after the development can be removed using a suitable solvent.
  • beamforming optics comprising a macroscopic lens extended across all channels of the assembly and a shutter array disposed in front of the polymer to be exposed or cured comprising one aperture per channel may be used.
  • the beam-shaping optics may comprise a microlens array with one lens per channel and a diaphragm array with one diaphragm per channel, the diaphragms being offset differently by channel with respect to the centers of the microlenses.
  • the beam-shaping optics comprises an array of discontinuously shaped cutouts of decentered lenses with a cutout and aperture in each channel, which apertures may be untranslocated with respect to the centers of the lens cutouts.
  • Further exemplary embodiments show a multilayer arrangement of lens and / or diaphragm arrays, in particular also a combination of lens arrays and macroscopic lenses.
  • the beam shaping optics may include both refractive and diffractive optical elements in the macroscopic lenses or lens arrays. Thus, both a bundling and a beam deflecting function of the beam shaping optics can be realized.
  • the false light-suppressing structure can be produced in multiple use at wafer level with an optimum respectively minimum area requirement, whereby the design of the false-light-suppressing structure simultaneously enables optimum false light suppression. Further advantageous embodiments are the subject of the dependent claims.
  • Fig. L a-f a first embodiment for channelwise irradiation of a polymer with different irradiation angle
  • FIGS. 2a-c show a second embodiment for channel-wise irradiation of a photosensitive polymer having different irradiation angles
  • FIG. 4 shows the method step of the channel-selective selective irradiation with channel-wise different angles according to FIG. 3a by arranging a macroscopic lens and a diaphragm array; 5 shows the process step of the channel-like irradiation according to FIG. 3 a with a different angle by arranging a microlens array of lens cut-outs; FIG. the process step of the locally selective irradiation according to FIG.
  • Fig. 12 is a cross-sectional view of a device similar to Fig. 10, wherein additional light absorbing or opaque material is disposed between the false light suppression structure and the lens array;
  • Fig. 13 is a cross-sectional view of a device analogous to FIG. 12, in which the
  • Image area is arranged directly adjacent to the false light suppressing structure
  • Fig. 14 is a cross-sectional view of a device analogous to FIG. 12, in which the additional material is additionally arranged between the lenses of the lens array;
  • Fig. 15 is a cross-sectional view of a device analogous to Fig. 14, in which the
  • Fig. 17 is a cross-sectional view of a device analogous to FIG. 16, in which the
  • Image surface is arranged directly adjacent to the false light suppressing structure
  • FIG. 18 shows a cross-sectional view of a device analogous to FIG. 14, in which transparent material is arranged instead of the light-absorbing or opaque material; a cross-sectional view of a device analogous to Figure 18, in which the image surface is arranged directly adjacent to the false light suppressing structure.
  • a cross-sectional view of a device analogous to Figure 20 in which the glass layer between strictlyrichtunterrichder structure and image surface is arranged. and a device having two sacrificial structures between which the glass layer is disposed.
  • FIG. 1 shows a first embodiment of producing a false light suppression structure with undercut edges / surfaces for a multi-aperture arrangement.
  • FIG. 1a shows the provision of a one-piece carrier which comprises radiation-curable or erosive material 12.
  • Figure lb shows channel-wise irradiation of the hardenable material 12 such that portions of the curable material 12 defining optical channels 14a and 14b pass through Irradiation 1 5a and 15b are cured, wherein the irradiation 1 5a at an angle ⁇ and the radiation 15b at an angle ß with respect to a surface of the curable material 12 takes place, wherein the angles ⁇ and ß are different from each other.
  • the surfaces of the cured optical channels 14a and 14b have surfaces that are undercut with each other.
  • the hardenable material 12 cures by polymerization so that the volumes of the optical channels 14a and 14b after the irradiation 15a and 15b comprise hardened material 13.
  • FIG. 1c shows the optical channels 14a and 14b after removal of the non-irradiated curable material 12.
  • the unirradiated and thus unpolymerized curable material 12 is thereby removed with a solvent.
  • Fig. Ld shows the introduction of opaque material 16 in the areas from which in Fig. 1 c, the curable material 12 has been removed.
  • thermally or temporally curing or radiation-curable polymers can be used.
  • the opaque material 16 prevents stray light effects or crosstalk between the optical channels 14a and 14b. As a result, the optical channels 14a and 14b are optically isolated from each other.
  • Figure le shows a further embodiment in which material 13 cured from the support of Figure 1d, which has been cured by irradiation in Figure 1b and which defines optical channels 14a and 14b, is removed. After removing the material of the optical channels 14a and 14b, the optical channels 14'a and 14'b are formed as free spaces. The removal can be done for example with a cured material 13, but not the opaque material 16 solvent dissolving.
  • the optical properties of the exposed optical channels 14'a and 14'b are more constant with respect to temperature fluctuations than the optical properties of optical channels 14a and 14b in which the material remains.
  • Fig. 1f shows a next embodiment in which transparent material 18 is introduced into the spaces provided in Fig. 1e in a further step.
  • This transparent material 18 is permeable to light or radiation along the optical channels 14 "a and 14" b thus produced, for example in a defined wavelength range, and may comprise an optical property different from the hardened material 13 or from the free spaces. According to embodiments it can be provided that portions of a specific light spectrum of light, which traverses the optical channels 14 "a and 14" b, is filtered out.
  • the method steps of FIGS. 1 and 1 f of removing the hardened material 13 in the optical channels 14a and 14b and / or replacing the hardened material 13 with the transparent material 18 may also be performed on only one of the two optical channels 14a, 14b according to embodiments become.
  • the optical channels 14a and 14b Due to the independent irradiation angle of the optical channels 14a and 14b, the optical channels have mutually independent profiles within the carrier material. This makes it possible, without lithographic or molding processes, to produce apertures whose optical channels have undercut edges or surfaces and whose surface requirements in the material are minimal, since no positional tolerances of individual lithographic layers or additional intermediate spaces required during a molding process are required.
  • the definition of the areas in which the optical channels are formed is made by locally varying irradiation such that some areas of the material provided in the first step are irradiated and other areas remain unirradiated.
  • the separation of irradiated and unirradiated areas can be effected, for example, by masking the surface of the material provided or by using lenses or diaphragm structures, as explained below.
  • FIG. 2 shows a second embodiment in which optical channels 21 a and 2 1 b are formed in a photoactive positive lacquer.
  • the one-piece carrier provided in FIG. 2a comprises a positive lacquer 22 and is also locally selectively irradiated in FIG. 2b.
  • the solubility of the positive resist 22 in the unmasked and exposed regions 24a-c changes by a photochemical reaction, so that, as shown in FIG. 2c, the exposed regions are spatially separated from the optical channels 21a and 21b and, after removal, the optical channels 21 a and 21 b formed from positive varnish 22 can be provided.
  • the further steps of the production process include, analogously to FIG. 1 d, the introduction of opaque material in the region between the optical channels.
  • the positive resist is removed from the regions of the optical channels analogous to FIG. 1 e and replaced by a transparent material.
  • shutter structures and / or lenses or lens structures are used according to exemplary embodiments, as will be explained below.
  • FIG. 3 shows a further embodiment for producing a false-opaque structure with undercut edges / surfaces for a multi-aperture optical system in which a combination of lenses and diaphragms is used to define the optical channels.
  • a lens structure 32 is arranged at a distance from the main side or main surface of the hardenable material 12 facing away from the substrate 28.
  • the lens structure 32 comprises a glass carrier 34 with two main sides, a respective polymer layer 36a and 36b being arranged on the two main sides.
  • Lens structures 38a-e and 38f-j are connected to the glass carrier 34 via the polymer layers 36a and 36b.
  • An aperture structure 44 comprises aperture elements 42a-f, wherein the aperture structure 44 is arranged between the lens structure 32 and the curable material 12 such that the aperture elements 42a-f are offset with respect to the centers 46a-e of the lens structures 38a-j.
  • the radiation 48 is deflected individually for each optical channel 14a-e, so that the optical axes 52a-e of the optical channels 14a-e with respect to a main side of the curable material 1 2 individual angles ⁇ - have ⁇ .
  • the lens structure 32 in combination with the Blendcn Modell 44 allows the curing of the curable material 12 in the region of the optical channels 14a-e such that along an optical channel 14a-e, a first diameter D 1 ae differs from a second diameter D2a-e and a diameter of the respective optical channel 14a-e is variable in the course of the optical channel 14a-e.
  • the diameter of an optical channel 14a-e over its course, so that the diameters D1a and D2a-e are the same.
  • FIG. 3b shows the optical channels 1 4a-c of hardened material 13 arranged on the substrate 28 after the unexposed hardenable material 12 has been removed from the regions between the optical channels 14a-e analogously to FIG.
  • the curable material 12 is a material which polymerizes under radiation and is highly viscous in its initial state, it remains highly viscous in the regions in which no optical channels 14a-e are formed. After curing, the unirradiated curable material 12 may be removed with a solvent. The polymerized optical channels 14a-e are thereby not dissolved and remain on the substrate 28.
  • Fig. 3c shows the placement of a radiation curable material 54 in the exposed spaces between the optical channels 14a-e. The curable material 54 has light-absorbing properties in the cured state.
  • An irradiation 56 of the curable material 54 causes it to cure to the opaque material 16 so that the areas between the optical channels 14a-e comprise the opaque material 16 and the optical channels 14a-e are isolated from each other by the opaque material 16 are.
  • the hardening of the curable material 54 is accomplished by a temporally or thermally controlled process.
  • Fig. 3e shows the application of a solvent 58 to the structure shown in Fig. 3d to release the cured material 13 in the optical channels 14a-e such that, as shown in Fig. 3f, the optical channels 14'ae be exposed.
  • FIG. 3g shows the application of a solvent 62, which effects a detachment of the opaque material 16 insulating the optical channels 14'ae from the substrate 28, so that after the application of the solvent 62, as shown in FIG. 3h, the substrate 28 is separated from the opaque material 1 6.
  • a false-bottomed structure 64 with undercut edges / surfaces for a multi-aperture optical system produced in this way comprises the optical channels 14'ae and the opaque material 16, which is formed in the region outside the optical channels 14'a- e.
  • This valley-suppressed structure with undercut edges / surfaces for multi-aperture optics can be used to define imaging channels of optical systems.
  • optical channels represented in FIG. 3a by the lens system 32 comprising several lenses in combination with the diaphragm structure 44 can also be effected by arranging a macroscopic lens, as explained in the following exemplary embodiment.
  • FIG. 4 shows the arrangement of a macroscopic lens 66 arranged over the lateral extent of the optical channels 14a-e.
  • the macroscopic lens 66 focuses the radiation 48 in the direction of the curable material 12 arranged on the substrate 28 in the direction of the macroscopic lens 66
  • Arranging a glass layer 68 and diaphragm elements 42a-f arranged thereon prevents the radiation 48 in the regions of the diaphragm elements 42a-f from traversing the glass layer 68 and thus from irradiating the curable material 12.
  • optical properties of the macroscopic lens 66 such as a focal length or distance of the macroscopic lens 66 to the hardenable material 12, define in combination with the arrangement the aperture elements 42a-f, for example the lateral extensions of the regions between the diaphragm elements 42a-f or a distance of the diaphragm elements 42a-f to the curable material 12 position, the angles ⁇ - ⁇ and the lateral extent of the optical channels 14a-e.
  • the macroscopic lens 66 in combination with the aperture elements 42a-f, beamforms the radiation 48 such that the curable material 12 is irradiated by individual beams 74a-e and the beams 74a-c define the optical channels 14a-c.
  • aperture elements are arranged alternatively or in addition to the on the curable material 12 remote from the main side of the glass layer 68 angeordne- th aperture elements 42a-f on the hardenable 12 facing main side or Hauptoberfläehc the glass layer 68 to a more accurate shaping and Steuerungsun the irradiation to enable.
  • aperture elements or structures are arranged, alternatively or in addition to previous exemplary embodiments, at a distance from the glass layer 68 or aperture elements without a glass layer 68.
  • FIG. 5 shows a method step analogous to FIG. 3a, in which a lens structure 32 ', through which the irradiation 48 is performed, defines the irradiation angle ⁇ - ⁇ .
  • the lens structure 32 comprises the glass carrier 34, on which the polymer layers 36a and 36b and the optical elements 38a-j are arranged.
  • the diaphragm elements 42a-l are likewise arranged on the glass carrier 34 and form a two-layer diaphragm structure 75, one layer of which is arranged on the curable material 12 facing main side and the other position on the curable material 12 facing away from the main side of the glass carrier 34, wherein the Lens structure 32 'and the diaphragm structure 44 are arranged adjacent to each other.
  • the diaphragm structure may also be arranged at a distance from the lens structure, as shown by the preceding embodiments.
  • the arranged aperture structure 44 may be formed in one layer and be arranged only on one of the main sides of or spaced from the glass carrier 34.
  • the lens structures 38a and 38f, 38b and 38g, 38c and 38h, 38d and 38i and 38e and 38j each form a lens 72a-e, which cause a shaping or deflection of the irradiation 48 due to the formation of lens structures 38a-j.
  • the lens 72a is associated with the optical channel 17a, the lens 72b with the optical channel 14b, the lens 72c with the optical channel 14c, the lens 72d with the optical channel 14d, and the lens 72e with the optical channel 14e.
  • FIG. 6 shows that the arrangement of lenses, lens structures or diaphragm structures can be chosen such that, in addition to multilayer diaphragm structures, lenses or lens structures are also arranged in multiple layers.
  • the irradiation process illustrated in FIG. 5 is expanded in such a way that an additional macroscopic lens 66 is arranged at a greater distance from the curable material 12 than the lens structure 32 ', so that the irradiation 48 in a radiation direction towards the curable material 12 first passes through the macroscopic lens 66 and then the lens structure 32 'with the two-ply diaphragm structure 75 arranged thereon.
  • Such a multilayer lens arrangement can be used, for example, to collimate a divergent radiation through a macroscopic lens and then to divide or align this collimated radiation by means of a lens structure into a channel-wise radiation.
  • FIG. 7 shows the channel-wise irradiation step during a process in which multiple false-light suppression structures 64a-c for multi-aperture optics are fabricated.
  • a glass layer 77 on which macroscopic lenses 66a-c are arranged, is arranged so that the glass layer 77 extends over the lateral extent of all the structures 64a-c to be fabricated and each structure 64a-c is assigned a macroscopic lens 66a-c.
  • the lens structures 32a-c and the single-layer diaphragm structures 44a-c are arranged.
  • the channel-wise irradiation step of Figure 3a is extended for each irradiated false-light suppressing structure 64a-c analogous to Figure 6 by a macroscopic lens 66a-c.
  • the manufacturing method described in FIG. 3 can be carried out analogously to FIG. 5 with a multilayer arrangement of lenses and can be extended such that several multi-aperture optical systems are produced simultaneously and simultaneously on a wafer.
  • the distance between the structures to be realized and therefore beam-shaping optics is arbitrary.
  • channel-wise irradiation manufacturing step described in FIG. 5 can also be performed simultaneously for a plurality of false-light-suppressing structures with undercut edges / surfaces for multi-aperture optics.
  • curable material 12 is covered over the lateral extent with lens structures 32'a-c, so that irradiation 48a-c is shaped and / or steered such that a plurality of structures 64a-c are formed from the curable material 12.
  • producing multiple false-opaque structures with undercut edges / surfaces for multi-aperture optics simultaneously adjacent to each other allows such modules to be formed from an entire wafer and then separated from one another.
  • a large number of false-opaque structures can be manufactured by the simultaneous production with a low operative wall.
  • FIG. 9 shows the method step of the channel-wise irradiation analogous to FIG. 6 with macroscopic lenses 66a-e arranged on a common carrier 77 and the lens structures 32'ac and the diaphragm structures 75a-c, in which, analogously to FIGS. 7 and 8, a plurality of false-light-suppressing structures are irradiated side by side at the same time.
  • embodiments allow any combination of macroscopic lenses, lens structures and aperture structures to define the optical channels.
  • FIG. 10 shows an apparatus 10 having a false-oppression structure 64 with undercut edges / surfaces for multi-aperture optics, e.g. B. was prepared by the method described above.
  • the false-light-suppressing structure comprises optical channels 14'a-e which comprise free spaces and on whose one main side an image surface 76 is arranged at a distance.
  • Image surface 76 is configured to detect or image light or radiation transmitted through optical channels 14'a-e.
  • the image surface 76 may be a CCD (Charge-Coupled-Device) sensor, such that each of the optical channels 14'a-e transmits the light to a region of the image sensor.
  • CCD Charge-Coupled-Device
  • a lens field 78 is likewise arranged at a distance from one another.
  • the lens field 78 comprises a glass carrier 82, on whose two main sides a respective polymer layer 84a and 84b are arranged, wherein the lens elements 86a-e are arranged on the polymer layer 84a and the lens elements 86f-j are arranged on the polymer layer 84b arranged opposite thereto.
  • the respectively opposite arrangement of two lens elements 86a and 86f, 86b and 86g, 86c and 86h, 86d and 86i and 86e and 86j are the lenses by the respective two lens elements and the portions of the interposed polymer layers 84a and 84b and the glass carrier 82 88a-e, wherein each of the lenses 88a-e is associated with the axially adjacent optical channel 14'ae.
  • the optical axes 92a-e of the optical channels 14'a-e have with respect to the mutually parallel main ropes of the opaque material 16 from each other angles ⁇ - ⁇ .
  • the lens array 78 is positioned with respect to the false light suppressing structure 64 and the image surface 76 such that the lens 88a-e associated with the optical channel 14'ae is positioned along the optical axis 92a-e and the focal point of the respective lens 88a-e adjacent to the image surface 76 is positioned.
  • Fig. 10 describes a possible application of the false light suppressing structure 64 produced by the method steps of previous embodiments.
  • the false light suppressing structure 64 is arranged to be relative to the lenses 88a-e of the lens array 78 and the focal or pixels allows a false light suppression between adjacent focal points or pixels.
  • the arrangement of the structure 1 suppressing the structure 64 between the image surface 76 and the lenses 88a-e can thus increase the quality of the image surface 76 or the quality of a projected image.
  • the light-absorbing material 16 arranged between the optical channels 14'ae prevents crosstalk between the optical channels 14'ae, so that each optical channel 14'ae transmits light or radiation with the greatest possible independence from adjacent optical channels 14'ae can allow.
  • FIG. 11 shows apparatus 10 analogous to FIG.
  • the false light-suppressing structure 64 is arranged directly adjacent and without a distance from the image surface 76.
  • the lens array 78 is further positioned such that a respective lens 88a-e of the lens array 78 is positioned along the optical axis of the associated optical channel 14'ae and the focal point or image point of the respective lens 88a-e at the lens 88a. e facing surface of the image surface 76 is positioned.
  • FIG. 11 shows a device analogous to device 10 from FIG. 10, in which additional material 96 is arranged at the distance between the lens field 78 and the false-light-suppressing structure 64 at laterally outward locations, which is designed to reduce the distance between the lens field 78 and the false light suppressing structure 64 to fix.
  • the additional material 96 is, for example, a thermally or UV curable adhesive to reduce or prevent relative movement between the lens array 78 and the false light suppressing structure 64 and, for example, to maintain the focus of the lenses 88 on the image surface 76 .
  • the additional material 96 has 1 nonabsorbent or opaque properties. This additionally reduces or suppresses stray light from locations which are arranged laterally to the device.
  • the additional material 96 may, for example, form a peripheral frame on the main lens facing side of the false-back structure 64.
  • FIG. 13 shows an apparatus as shown in FIG. 12, with the false-light suppressing structure 64 disposed on the image surface 76 as described with reference to FIG. 11.
  • Fig. 14 shows a device analogous to the device of Fig.
  • the additional material 96 is additionally arranged between the lenses 88a-e.
  • the additional material 96 lengthens the optical channels 14'ae in the axial direction and improves a false-light suppression between the optical channels 14'ae in the region between the lens field 78 and the false-light-suppressing structure 64.
  • the described additional isolation of the optical channels allows a further increase of the projection or image quality.
  • the additional material 96 stabilizes the lens array 78 with respect to the false light suppressing structure 64 by a plurality of support points such that deflections of the lens array 78 and thus a shift of focal points or pixels of individual lenses 88 is prevented.
  • Fig. 15 shows a device as shown in Fig. 14, wherein the false light suppressing structure 64 is arranged on the image surface 76, as described with reference to FIG. 11.
  • Fig. 16 shows a device as shown in Fig. 12, wherein instead of the light absorbing material 96, a transparent material 98 is used. If in a later field of application of the multi-aperture optical system no suppression of stray light arriving laterally to the false-light-suppressing structure is required, the configuration of the spacing of the lens array 78 from the false-light suppressing structure 64 by a transparent additional material 98 may be simpler or less expensive than with the arrangement of light-absorbing or opaque material 96th
  • FIG. 17 shows a device as shown in FIG. 16 with the false-suppression structure 64 disposed on the image surface 76 as described with reference to FIG. 11.
  • FIG. 18 shows a device as shown in FIG. 14, wherein transparent material 98 is arranged as an alternative to the light-absorbing or opaque additional material 96, as described with reference to FIG.
  • FIG. 19 shows a device as shown in FIG. 18, wherein the false-suppressive structure 64 is arranged on the image surface 76, as described with reference to FIG. 11.
  • FIG. 20 shows a device analogous to the device of FIG. 14, in which a glass layer 102 is disposed between the false light suppression structure 64 and the additional material 96 and extends over the entire lateral extent of the false light suppressing structure 64.
  • the glass layer may be formed, for example, to stabilize the optical channels.
  • optical structures may be arranged in or on the glass layer, for example diffractive or refractive optical elements.
  • FIG. 21 shows the device of FIG. 20, in which the glass layer 102 is arranged on the main side of the false-light-suppressing structure 64 remote from the lens field 78 and directly adjacent to the image surface 76.
  • Fig. 22 shows an apparatus in which additional material 96 and the lens array 78 are arranged on a first false light suppressing structure 64a analogous to Fig. 14, between the first false light suppressing structure 64a and a second false light suppressing structure 64b arranged in the direction of the image area 76 the glass layer 102 is disposed directly adjacent to the false light suppressing structures 64a and 64b.
  • a false-light suppressing structure 64 made by methods of previous embodiments is severed in a lateral sectional plane and the glass layer 102 is disposed between the two resulting cut surfaces.
  • the glass layer 102 with stabilizing and / or optical effect can be arranged at any point along the axial path of the optical channels 14a-e.
  • the lens array 78 in previous embodiments includes a glass layer in FIGS. 10 to 22, in alternative embodiments the lenses 88 are formed on a polymeric layer in the absence of glass.
  • the lenses 88 and the layers 84 are described as being formed of polymeric materials, the lenses 88 and / or the lenses may be used Layers 84 may be made in alternative embodiments of another optical material, such as glass. In further embodiments, the lenses 88 and the layers 84 are integrally formed. In further embodiments, the lenses 88, the layers 84, and the layer 82 are made of an identical material and all of these components are integrally formed.

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Abstract

L'invention concerne un procédé de fabrication d'un module optique multicanaux dans lequel on expose un matériau durcissable (12) canal par canal à un rayonnement selon un angle d'irradiation (α ; β) différent ou bien on le masque canal par canal et on l'expose à un rayonnement selon un angle d'irradiation (α ; β) différent. Des zones de la région non irradiée ou non masquée du matériau (12) sont remplacées par un matériau (16) opaque.
PCT/EP2014/059212 2013-05-17 2014-05-06 Procédé de fabrication d'une structure supprimant la lumière parasite et dispositif doté de cette structure Ceased WO2014184055A1 (fr)

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DE102013209246.6 2013-05-17
DE102013209246.6A DE102013209246B4 (de) 2013-05-17 2013-05-17 Verfahren zur Herstellung einer falschlichtunterdrückenden Struktur und Vorrichtung mit derselben

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Cited By (5)

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CN108344506A (zh) * 2017-01-25 2018-07-31 罗伯特·博世有限公司 限制光的入射角的器件，制造该器件的方法和显微光谱仪
CN107285618A (zh) * 2017-07-13 2017-10-24 广州宏晟光电科技有限公司 一种实心光微通道阵列面板及其制备方法
CN107285618B (zh) * 2017-07-13 2022-10-25 广州宏晟光电科技股份有限公司 一种实心光微通道阵列面板及其制备方法
US11126305B2 (en) 2018-05-07 2021-09-21 Wavetouch Limited Compact optical sensor for fingerprint detection
CN109669229A (zh) * 2018-12-28 2019-04-23 广州宏晟光电科技股份有限公司 一种具有倾斜通道的实心光微通道阵列面板及其制备方法

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