WO2015003501A1 - 一种界面导热片及其制备方法、散热系统 - Google Patents

一种界面导热片及其制备方法、散热系统 Download PDF

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Publication number
WO2015003501A1
WO2015003501A1 PCT/CN2014/072666 CN2014072666W WO2015003501A1 WO 2015003501 A1 WO2015003501 A1 WO 2015003501A1 CN 2014072666 W CN2014072666 W CN 2014072666W WO 2015003501 A1 WO2015003501 A1 WO 2015003501A1
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Prior art keywords
conductive sheet
thermal conductive
substrate
interface
carbon
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PCT/CN2014/072666
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English (en)
French (fr)
Inventor
徐焰
赵仁哲
李松林
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Priority to JP2015526874A priority Critical patent/JP2015526904A/ja
Priority to EP14814663.2A priority patent/EP2863426B1/en
Priority to US14/581,573 priority patent/US20150136360A1/en
Publication of WO2015003501A1 publication Critical patent/WO2015003501A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D9/0087—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall with flexible plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control

Definitions

  • Embodiments of the present invention relate to an interface thermal conductive sheet, a preparation method thereof, and a heat dissipation system
  • the interface between the heating element and the heat sink element is filled with a thermal interface material ( Thermal) to reduce the contact thermal resistance.
  • Thermal thermal interface material
  • thermal conductivity usually does not exceed 6w / mk, can not meet the heat dissipation requirements of high power density devices such as high power field effect transistors.
  • a common process is to solder a high power density device to a heat sink using tin-based solder, or a conductive thermally conductive silver paste (HENkel CF3350).
  • Tin-based solders are usually tin-lead eutectic, tin-silver-copper-lead-free solder pastes, which have the unique high electrical conductivity and high thermal conductivity of metal alloys, but the welding requires high-cost metallization of the heat-dissipating components, and Heating at high temperatures completes the welding process.
  • the embodiments of the present invention provide an interface thermal conductive sheet, which overcomes the problem that the interface thermal conductive material in the prior art cannot simultaneously satisfy good thermal conductivity and easy industrial installation.
  • an embodiment of the present invention provides an interface thermal conductive sheet, comprising a substrate and a carbon nanowire, the substrate having a first surface and a second surface opposite to the first surface, the substrate The first surface and the second surface are both disposed with the carbon nanowires, and the carbon nanowires are arranged in an array, wherein the substrate comprises a flexible composite metal film, or a material of the substrate At least one of flexible graphite and a solder alloy, the flexible composite metal film being a flexible metal film coated with nickel, silver or gold.
  • the carbon nanowires are perpendicular to at least one of the first surface and the second surface of the substrate.
  • the carbon nanowires are at least one of nano carbon fibers and multi-wall carbon nanotubes.
  • the nanocarbon fibers have a diameter of 50 nm to 200 nm.
  • the multi-walled carbon nanotubes have a diameter of from 1 nm to 50 nm.
  • the flexible metal film is one of a copper foil, an aluminum foil, a nickel foil, a copper alloy sheet, and a stainless steel sheet.
  • the flexible composite metal film has a thickness of 10 to 200 ⁇ m.
  • the flexible graphite is highly oriented pyrolytic graphite.
  • the flexible graphite has a thickness of 10 to 200 ⁇ m.
  • the nanocarbon material disposed on at least one of the first surface and the second surface of the substrate has a length of 20 to 125 ⁇ m.
  • the solder alloy is an indium based alloy or a gallium based alloy.
  • the substrate made of the solder alloy has a thickness of 10 to 50 ⁇ m.
  • the nanocarbon material is disposed on the first surface of the substrate to have a length of 0.5 to 10 ⁇ m, and the nanocarbon material is disposed on the second surface of the substrate to have a length of 50 to 150 ⁇ m.
  • the vapor deposition layer or the sputter layer being located on one side of the second surface of the substrate, the nano carbon rice thread on the second surface Provided in the vapor deposition layer or the sputter layer, and at least a portion of the nanocarbon rice wire of the second surface passes through the vapor deposition layer or the sputter layer, protruding beyond the vapor deposition layer or the sputtering layer
  • the length of the portion of the nanocarbon rice wire protruding beyond the vapor deposition layer or the sputter layer is 0.5 to 10 ⁇ m.
  • the sum of the cross-sectional areas of the carbon nanowires disposed in the vapor-deposited layer or the sputtered layer is The second surface area of the substrate is 50% to 99%.
  • an embodiment of the present invention provides a method for preparing an interface thermal conductive sheet, including the following steps:
  • the substrate is flexible a composite metal film or flexible graphite, the substrate having a first surface and a second surface opposite to the first surface, the first surface and the second surface of the substrate are each loaded with a catalyst, and the flexible composite metal film is a surface a flexible metal film coated with nickel, silver or gold;
  • the catalyst is a particle having a particle diameter of 50 nm to 200 nm.
  • the reaction chamber is heated to a temperature of 700 to 900 ° C in a protective gas atmosphere, a carbon source gas is introduced, and the reaction is maintained at a constant temperature for 3 to 10 minutes.
  • an embodiment of the present invention provides a method for preparing an interface thermal conductive sheet, which comprises the following steps:
  • solder alloy composite material includes the a nanocarbon material, a solder alloy coated on the end surface of the nanocarbon material, and a copper foil attached to the end of the nanocarbon material;
  • solder alloy substrate composite material is placed in an acidic solution to dissolve the copper foil, and the solder alloy substrate from which the copper foil is removed is obtained, dried after cleaning, and the nanometer in the solder alloy substrate A solder alloy is retained at one end of the carbon material, and then the solder alloy substrate is heated to move higher than the other end of the solder nanocarbon material, and cooled to obtain an interface thermal conductive sheet.
  • the interface thermal conductive sheet is made of a solder alloy.
  • the substrate has a first surface and a second surface opposite to the first surface, and the first surface and the second surface of the substrate are both provided with the nano carbon material, and the nano carbon material is arranged in an array Carbon nanowires of cloth.
  • the deposition device is passed through a carbon source and a protective gas, and a chemical reaction takes place at 700 to 1200 ° C for 3-10 minutes.
  • a vapor deposited layer or a sputtered layer is formed by vapor-depositing or sputtering a nickel, gold or tin-based solder alloy on the surface of the nanocarbon material before performing step (2).
  • a surface of the nanocarbon material of the second surface of the substrate is vapor-deposited or sputtered with a nickel, gold or tin-based solder alloy to form an evaporation layer or a sputter layer, the vapor deposition layer or splash a shot layer is located on one side of the second surface of the substrate, the nanocarbon rice noodle on the second surface is disposed in the vapor deposition layer or the sputter layer, and the second surface is At least a portion of the nano-carbon rice noodle passes through the vapor-deposited layer or the sputtered layer, protruding beyond the vapor-deposited layer or the sputtered layer, and the nano-carbon rice noodle protrudes from the vapor-deposited layer or a portion other than the sputtered layer
  • the length is 0.5 ⁇ 10 ⁇ m. More preferably, the sum of the cross-sectional areas of the nanocarbon material passing through the vapor-deposited layer or the sputtered layer is 50% to 99% of the
  • a heat dissipation system including a heat generating component, a heat sink, and a heat conductive sheet, wherein the heat conductive sheet is made of an interface heat conductive sheet in all possible implementations, and the heat generating component is mounted on the heat sink The heat conducting sheet is placed between the heat generating component and the heat sink, so that the heat generating component transfers heat to the heat sink through the heat conducting sheet to dissipate heat.
  • the present invention provides a heat dissipation system including a heat generating component, a heat sink and a heat conductive sheet, the heat conductive sheet being made of an interface heat conductive sheet in all possible implementations, the heat generating component being mounted on the heat sink, The heat conductive sheet is placed between the heat generating component and the heat sink such that the heat generating component transfers heat to the heat sink through the heat conductive sheet to dissipate heat. Due to The heat conducting sheet is a separate component that can be picked up and placed between the heat generating component and the heat sink to facilitate installation.
  • the heat conductive sheet is made of the interface thermal conductive sheet
  • the substrate of the interface thermal conductive sheet is provided with the nano carbon material on both sides, and the carbon fiber in the nano carbon material or the heat sink
  • the micropores present on the top surface significantly reduce the contact thermal resistance of the thermally conductive sheet.
  • the nanocarbon material and the axial direction are perpendicular to the first surface and/or the second surface of the substrate. The ordered arrangement of the nanocarbon fibers provides a consistent, better thermal conductivity in the thickness direction.
  • the nano-carbon material the axial (Z direction) thermal conductivity can reach 2000w / (mk), the resistivity of 5xl0- 5 ohmcm, thus greatly improving the thermal effects between the heat generating element and the heat sink.
  • the substrate of the interface thermal conductive sheet provided by the embodiment of the invention is one of a flexible composite metal film, a flexible graphite and a solder alloy, which is different from the prior art thermal grease, phase change material and polymer.
  • the base material has good thermal conductivity
  • the surface of the substrate provided by the embodiment of the invention is provided with a nano carbon material, and the nano carbon material can simultaneously fill the micropores of the surface of the heat generating component or the surface of the heat dissipating component to significantly reduce the contact thermal resistance.
  • the interface thermal conductive sheet provided by the embodiment of the invention has a substrate structure, can be separately formed from the heat generating component and the heat sink component, can be picked up and placed, and thus is easy to be industrially produced and used, and overcomes the interface in the prior art.
  • the thermal conductive sheet cannot simultaneously satisfy the problems of good thermal conductivity and ease of industrial production and use.
  • the embodiment of the invention further provides a heat dissipation system using the interface thermal conductive sheet, which not only improves the heat conduction effect of the heating element, but also is convenient to install.
  • Figure 1 is a side elevational view of an interfacial thermally conductive sheet prepared by a preparation method according to a second aspect of the present invention.
  • FIG. 2 is a partial perspective view of an interface thermal conductive sheet prepared by the preparation method according to the second aspect of the present invention.
  • 3 is a flow chart of a preparation method provided by a third aspect of the embodiment of the present invention.
  • FIG. 4 is a side view of an interface thermal conductive sheet prepared by the preparation method according to the third aspect of the present invention.
  • Fig. 5 is an electron micrograph (scanning electron microscope) of an interface thermal conductive sheet prepared by the preparation method according to the first embodiment of the present invention.
  • FIG. 6 is a schematic diagram of a heat dissipation system according to an embodiment of the present invention. detailed description
  • the first aspect of the embodiments of the present invention provides an interface thermal conductive sheet, which has good thermal conductivity, can be picked up and placed, and is easy to be industrially produced and used.
  • the second aspect and the third aspect of the embodiments of the present invention provide a method for preparing an interface thermal conductive sheet.
  • an embodiment of the present invention provides an interface thermal conductive sheet, comprising a substrate and a nano carbon material, the substrate having a first surface and a second surface opposite to the first surface, the first of the substrate The surface and the second surface are both provided with the nano carbon material, wherein the nano carbon material is a carbon nanowire arranged in an array, and the substrate is one of a flexible composite metal film, a flexible graphite and a solder alloy.
  • the flexible composite metal film is a flexible metal film whose surface is coated with nickel, silver or gold.
  • the substrate of the interface thermal conductive sheet is provided with the nano carbon material on both sides, and the hole (generally represented by roughness, belonging to the micron level), thereby significantly reducing the contact thermal resistance.
  • the carbon nanowires are perpendicular to at least one of the first surface and the second surface of the substrate.
  • the carbon nanowires are at least one of nano carbon fibers and multi-wall carbon nanotubes.
  • the ordered arrangement of the nanocarbon fibers provides a consistent, better thermal conductivity in the thickness direction.
  • the size of the diameter of the nanocarbon material is related to the size of the catalyst particles used in the preparation process, and preferably, the nano carbon material The material has a diameter of 200 nm.
  • the nano carbon fiber has a diameter of 50 nm to 200 nm.
  • the multi-walled carbon nanotubes have a diameter of 1 nm to 50 nm.
  • the carbon nanotubes have an axial (Z-direction) thermal conductivity of 2000 w/(mk) and a resistivity of 5 x 10 - 5 ohm cm.
  • a flexible composite metal film can be selected as the substrate, and the flexible composite metal film is a flexible metal film coated with metal nickel, silver or gold as a barrier layer.
  • the flexible metal film is one of a copper foil, an aluminum foil, a nickel foil, a copper alloy sheet, and a stainless steel sheet.
  • the flexible metal film without the barrier layer is chemically reactive at high temperatures. If it is directly used for chemical vapor deposition to grow nano carbon fibers, it easily reacts with the catalyst and affects the growth of the nano carbon fibers.
  • alumina is usually provided as a barrier layer between the flexible metal film and the catalyst, but the thermal conductivity or conductivity of the alumina is not good, and it is not suitable for the preparation of the interfacial thermally conductive sheet.
  • a metal material such as nickel, silver or gold which is less reactive is used as a barrier layer to have good thermal conductivity and electrical conductivity.
  • the flexible composite metal film has a thickness of 10 to 200 ⁇ m. More preferably, the flexible composite metal film has a thickness of 10 to 50 ⁇ m.
  • the height of the nanocarbon material will affect the thermal conductivity of the interfacial thermally conductive sheet, and that the length of the nanocarbon material disposed on at least one of the first surface and the second surface of the substrate in the embodiment of the present invention is 20 ⁇ 125 ⁇ m.
  • the nanocarbon material produces a certain inclination under assembly pressure to compensate for certain assembly tolerances. More preferably, the nanocarbon material disposed on at least one of the first surface and the second surface of the substrate has a length of 25 to 60 ⁇ m. Further preferably, the substrate and the first and second surfaces of the substrate have a total height of the nanocarbon material of 100 to 200 ⁇ m. And more preferably, the substrate and the first and second surfaces of the substrate have a total height of the nanocarbon material of 100 to 150 ⁇ m.
  • flexible graphite is also used as the substrate, and the flexible graphite is high-oriented pyrolytic graphite.
  • the thickness of each structure is as described above, and the flexible composite metal film is selected as the substrate.
  • the flexible graphite has a thickness of 10 to 200 ⁇ m.
  • the height of the nanocarbon material disposed on one or more of the first surface and the second surface of the substrate is 20 to 125 ⁇ m.
  • a solder alloy may be selected as the substrate, and the solder alloy is a low melting point solder alloy, such as an indium based alloy or a gallium based alloy.
  • the substrate made of the solder alloy has a thickness of 10 to 50 ⁇ m.
  • the solder alloy has a first surface and a second surface, both surfaces being provided with a nanocarbon material.
  • the nanocarbon material is disposed on the first surface of the substrate to have a length of 0.5 to 10 ⁇ m, and the nanocarbon material is disposed on the second surface of the substrate to have a length of 50 to 150 ⁇ m.
  • the interface thermal conductive sheet further includes an evaporation layer or a sputter layer, and the nano carbon material on the second surface of the substrate is away from the substrate.
  • a portion passing through the vapor deposition layer or the sputter layer and passing through the vapor deposition layer or the sputter layer has a length of 0.5 to 10 ⁇ m.
  • the sum of the cross-sectional areas of the nanocarbon material passing through the vapor-deposited layer or the sputtered layer is 50% to 99% of the second surface area of the substrate.
  • the interface thermal conductive sheet provided by the embodiment of the invention has good thermal conductivity in both the substrate and the nano carbon material, and the nano carbon material can simultaneously fill the surface of the heat generating component or the micropores existing on the surface of the heat dissipating component to significantly reduce the contact.
  • Thermal resistance on the other hand, an interface thermal conductive sheet provided by an embodiment of the invention has a substrate structure, can be picked up and placed, is easy to be industrially produced and used, and overcomes the problem that the interface thermal conductive sheet cannot meet at the same time in the prior art. Thermal conductivity and ease of industrial production and use.
  • an embodiment of the present invention provides a method for preparing an interface thermal conductive sheet, including the following steps:
  • the substrate is flexible a composite metal film or flexible graphite, the substrate having a first surface and a second surface opposite to the first surface, the first surface and the second surface of the substrate are each loaded with a catalyst, and the flexible composite metal film is a surface a flexible metal film coated with nickel, silver or gold;
  • the reaction After the reaction is completed, it is cooled to room temperature under a protective gas atmosphere to obtain a first surface and a second surface.
  • the surface is grown with a substrate having a nano-carbon material, that is, an interface thermal conductive sheet is prepared, and the nano-carbon material is a carbon nanowire arranged in an array.
  • the flexible composite metal film is a flexible metal film coated with nickel, silver or gold on the surface, and is prepared by setting metal nickel, silver or gold on the surface of the flexible metal film by conventional electroplating, electroless plating, evaporation or sputtering. .
  • the catalyst particles have a particle diameter of 50 nm to 200 nm.
  • the catalyst may be supported on the surface of the flexible composite metal film or the flexible graphite, and the method of supporting the catalyst is as conventional techniques, for example, placing the carrier flexible composite metal film or flexible graphite to be deposited at a concentration of 0.01 ⁇ Soak for 0.05 ⁇ 40s in 0.05mol/L nickel nitrate solution, dry the immersed substrate in vacuum drying oven at 80 ⁇ 100°C for 1-4 hours, then take it out into quartz boat and react in quartz.
  • the constant temperature zone of the tube is raised to a temperature of 200 to 400 ° C at a heating rate of 10 to 20 ° C / min under the protection of a protective gas, and is calcined at a constant temperature for 1 to 4 hours.
  • the protective gas is typically one or a combination of nitrogen and argon.
  • the carbon source gas is one or more of decane, ethylene, propylene, acetylene, decyl alcohol and ethanol.
  • the reaction chamber is heated to 700-900 ° C in a protective gas atmosphere, a carbon source gas is introduced, and the reaction is maintained at a constant temperature for 3 to 10 minutes.
  • Figure 1 is a side elevational view of an interfacial thermally conductive sheet prepared by a preparation method according to a second aspect of the present invention.
  • 2 is a partial perspective view of an interface thermal conductive sheet prepared by the preparation method according to the second aspect of the present invention. As shown in FIG. 1 and FIG.
  • an interface thermal conductive sheet includes a substrate and a nano carbon material, the substrate having a first surface and a second surface opposite to the first surface, the first surface of the substrate And the second surface is provided with the nano carbon material, the nano carbon material is a carbon nanowire arranged in an array, the substrate is one of a flexible composite metal film and a flexible graphite, the flexible composite metal The film is a flexible metal film coated with nickel, silver or gold.
  • the carbon nanowires are perpendicular to at least one of the first surface and the second surface of the substrate.
  • the carbon nanowires are at least one of nano carbon fibers and multi-wall carbon nanotubes.
  • the nano carbon fiber has a diameter of 50 nm to 200 nm.
  • the multi-walled carbon nanotubes have a diameter of 1 nm to 50 nm.
  • the flexible metal film is one of a copper foil, an aluminum foil, a nickel foil, a copper alloy sheet, and a stainless steel sheet.
  • the flexible composite metal film has a thickness of 10 to 200 ⁇ m.
  • the flexible graphite is highly oriented pyrolytic graphite.
  • the flexible graphite has a thickness of 10 to 200 ⁇ m.
  • the nanocarbon material disposed on at least one of the first surface and the second surface of the substrate has a length of 20 to 125 ⁇ m.
  • a second aspect of the present invention provides a method for preparing an interfacial thermal conductive sheet, which overcomes the problem that a chemically reactive flexible metal film directly reacts with a catalyst to affect the growth of the nanocarbon material, and on the other hand
  • the preparation of the carbon nanotube array has the advantages of using the equipment, high output, low cost and easy control of the product quality, and the prepared interface thermal conductive sheet not only has good thermal conductivity but can be picked up and placed, and is easy to be industrially produced and used.
  • FIG. 3 is a flowchart of a preparation method according to a third aspect of the present invention. As shown in FIG. 3, the method includes the following steps:
  • step S01 (1) growing a nanocarbon material on the first surface of the silicon substrate or the quartz substrate by a chemical vapor deposition method, wherein the nanocarbon material is a carbon nanowire arranged in an array, as shown in step S01;
  • step S02 (2) a copper foil provided with a solder alloy on the surface of the first surface of the silicon substrate or the quartz substrate, wherein the solder alloy is in contact with the nanocarbon material, as in step S02. It is shown that heating to a temperature higher than the melting point of the solder alloy causes the solder alloy to melt, cool, and mechanically peel the silicon substrate or the quartz substrate from the nanocarbon material, as shown in step S03, to obtain a solder alloy substrate.
  • a composite material, the solder alloy composite material comprising the nanocarbon material, a solder alloy coated on the end surface of the nanocarbon material, and a copper foil attached to the end of the nanocarbon material;
  • step S04 an interface thermal conductive sheet is prepared, the interface thermal conductive sheet is based on a solder alloy, and the substrate has a first surface and a surface opposite to the first surface
  • the second surface, the first surface and the second surface of the substrate are both provided with the nano carbon material, and the nano carbon material is carbon nanowires arranged in an array.
  • the method of chemical vapor deposition grows a nanocarbon material having an array arrangement property on the first surface of a silicon substrate or a quartz substrate as a prior art.
  • the silicon substrate and the quartz substrate have low thermal expansion coefficient and no chemical reactivity, which is beneficial to improving the quality of the nanocarbon material, and is easy to control the deposition device, and the carbon source and the protective gas are introduced, and the chemical reaction occurs at 700 to 1200 ° C. 10 minutes.
  • the height of the nanocarbon material prepared in the step (1) is 50.5 to 160 ⁇ m.
  • the nanocarbon material adsorbs the solder alloy by the capillary adsorption force, and is firmly bonded to the solder alloy after cooling.
  • the bonding force between the nano-carbon material and the solder alloy interface is greater than the bonding force between the nano-carbon material and the silicon substrate or the quartz substrate interface, so that the nano-carbon material can be peeled off from the silicon substrate or the quartz substrate.
  • an evaporation layer or a sputter layer may be formed by vapor-depositing or sputtering a nickel, gold or tin-based solder alloy on the surface of the nano carbon fiber before performing the step (2), and the evaporation or sputtering is a metallization process. Used to enhance the mechanical strength of nanocarbon materials.
  • step (3) heating to a temperature higher than a melting point of the solder alloy causes the solder alloy to be realized by a capillary adsorption force such that one end of the nano single fiber array is exposed from the first surface of the tantalum alloy.
  • the carbon nanowires are perpendicular to at least one of the first surface and the second surface of the substrate.
  • the carbon nanowires are at least one of nano carbon fibers and multi-wall carbon nanotubes.
  • the nano carbon fiber has a diameter of 50 nm to 200 nm.
  • the multi-walled carbon nanotubes have a diameter of from 1 nm to 50 nm.
  • an interface thermal conductive sheet includes a substrate and a nano carbon material, the substrate having a first surface and a second surface opposite to the first surface, the first surface and the second surface of the substrate The surface is provided with the nanocarbon material, which is an array of carbon nanowires, and the substrate is made of a solder alloy.
  • the solder alloy is selected from an indium based alloy or a gallium based alloy. More preferably, the substrate made of the solder alloy has a thickness of 10 to 50 ⁇ m. And more preferably, the carbon nanowires are disposed on the first surface of the substrate to have a length of 0.5 to 10 ⁇ m, and the carbon nanowires are disposed on the second surface of the substrate to have a length of 50 to 150 ⁇ m.
  • vapor-deposit or sputter a nickel, gold or tin-based solder alloy on the surface of the second surface of the substrate to form an evaporation layer or splash after the step (3).
  • the sum of the cross-sectional areas of the nanocarbon material passing through the vapor-deposited layer or the sputtered layer is 50% to 99% of the second surface area of the substrate.
  • a third aspect of the embodiments of the present invention provides a method for preparing an interface thermal conductive sheet, which transfers a nano carbon material with excellent growth quality from a silicon substrate or a quartz substrate to a solder alloy substrate, and the nano carbon material is made through a specific process. Exposed from the first surface of the substrate, the first surface and the second surface of the substrate are provided with the nano carbon material, and the prepared interface thermal conductive sheet not only has good thermal conductivity but can be picked up and pasted. Easy to industrialize production and use.
  • Embodiment 1 is a method for preparing an interface thermal conductive sheet, which transfers a nano carbon material with excellent growth quality from a silicon substrate or a quartz substrate to a solder alloy substrate, and the nano carbon material is made through a specific process. Exposed from the first surface of the substrate, the first surface and the second surface of the substrate are provided with the nano carbon material, and the prepared interface thermal conductive sheet not only has good thermal conductivity but can be picked up and pasted. Easy to industrialize production and use.
  • a method for preparing an interface thermal conductive sheet includes the following steps:
  • Pretreatment of flexible composite metal film Metal nickel plating on the surface of electrolytic copper foil according to the conventional electroplating method (required that the copper foil manufacturer has prepared the corresponding inert plating layer), and the surface nickel plating electrolysis of 12um thickness is obtained.
  • the copper foil is a flexible composite metal film, which is respectively ultrasonically cleaned by deionization and acetone, dried and then subjected to argon plasma treatment for lmin; and nickel nitrate and deionized water are mixed and formulated.
  • the flexible composite metal film to be deposited is immersed in a nickel nitrate solution for 30s, and the immersed flexible composite metal film is dried in a vacuum drying oven at 90 ° C for 2 hours, then It is taken out and placed in a quartz boat. In the constant temperature zone of the quartz reaction tube, it is raised to a temperature of 300 ° C at a heating rate of 20 ° C / min under the protection of argon gas, and calcined at a constant temperature for 1 hour to prepare a catalyst-loaded flexible composite metal film. ;
  • Fig. 5 is an electron micrograph (scanning electron microscope) of an interfacial thermal conductive sheet prepared by the preparation method according to the first embodiment of the present invention.
  • the interface thermal conductive sheet prepared in the first embodiment of the present invention comprises a substrate and a nano carbon material, the substrate is a flexible composite metal film, and the substrate has a first surface and a surface opposite to the first surface. a second surface, the first surface and the second surface of the substrate are each provided with a nano carbon material, wherein the nano carbon material is a carbon nanowire arranged in an array, and the substrate has a thickness of 12 um, and is disposed on the base The height of the nanocarbon material of the first surface and the second surface of the material is about 60 um.
  • Embodiment 2 is an electron micrograph (scanning electron microscope) of an interfacial thermal conductive sheet prepared by the preparation method according to the first embodiment of the present invention.
  • the interface thermal conductive sheet prepared in the first embodiment of the present invention comprises a substrate and a nano carbon material
  • a method for preparing an interface thermal conductive sheet includes the following steps:
  • the highly oriented pyrolytic graphite (Panasonic PGS graphite film) be a substrate having a first surface and a second surface opposite to the first surface.
  • the Panasonic PGS graphite film is placed in a tubular resistance furnace and heated to a reaction temperature of about 850 ° C under argon gas protection.
  • the flow rate was 300 sccm of hydrogen and 1000 sccm of argon, respectively, and a solution of ferrocene-dissolved diphenylbenzene having a concentration of 0.025 g/ml was continuously fed into the reaction chamber at a flow rate of 0.4 mL/min.
  • a method for preparing an interface thermal conductive sheet includes the following steps:
  • nano carbon material 50 nm to 90 nm of nano carbon fiber and a small number of multi-walled carbon nanotubes having a diameter of 30 nm to 50 nm, and the height of the nano carbon material is about 150 ⁇ m;
  • a copper foil provided with an indium-based solder alloy Sn42In58 is placed on one end of the grown nanocarbon material away from the first surface of the silicon substrate, and the indium-based solder alloy is contacted with the nanocarbon material and heated to 118 ° C or higher.
  • the indium-based solder alloy is melted, cooled, and the silicon substrate is mechanically stripped from the nano-carbon material to obtain an indium-based solder alloy substrate composite material, wherein the indium-based solder alloy substrate composite material comprises the nano carbon material and is coated a nano-carbon material, a solder alloy of one end surface of the first surface of the silicon substrate; and a copper foil connected to one end of the first surface of the nano-carbon material far-silicon substrate;
  • solder alloy substrate composite material placed in an acidic solution to dissolve the copper foil, preparing a solder alloy substrate from which the copper foil is removed, drying after cleaning, and nanocarbon material in the solder alloy substrate
  • One end of the material retains a solder alloy, and then the solder alloy substrate is moved to the other end of the nano-carbon material than the solder alloy, and is cooled to obtain an interface thermal conductive sheet having a thickness of 10 um.
  • the solder alloy is a substrate, the substrate has a first surface and a second surface opposite to the first surface, and the first surface and the second surface of the substrate are both provided with the nano-carbon material, and the substrate is disposed on the substrate
  • the height of the nanocarbon material of one surface is about 1 ⁇ 2 ⁇ m
  • the height of the nano carbon material disposed on the second surface of the substrate is about 140 ⁇ m
  • the nano carbon material is carbon nanometer arranged in an array. line.
  • a method for preparing an interface thermal conductive sheet includes the following steps:
  • a silicon substrate is taken, placed in a reaction chamber through acetylene gas, and the temperature in the reaction chamber is heated to 700 ° C to grow a nano-carbon material on the first surface of the silicon substrate, wherein the nano-carbon material is
  • the array of carbon nanowires comprises carbon nanowires having a diameter of 50 nm to 90 nm and a plurality of multi-walled carbon nanotubes having a diameter of 30 nm to 50 nm, and the height of the nanocarbon material is about 150 ⁇ m;
  • a thin gold is deposited on the surface of the nanocarbon material by using a vacuum evaporation device, and the thickness of the gold layer is about 0.2 um, which is used to enhance the mechanical strength and electrical conductivity of the nano carbon material;
  • a copper foil provided with an indium/tin-based solder alloy In97Ag3 is placed on one end of the grown nanocarbon material away from the first surface of the silicon substrate, and the In97Ag3 solder alloy is contacted with the nano carbon material and heated to In97 Ag3.
  • the melting point of 143 ° C or more causes the In97Ag3 solder alloy to be melted, cooled, and the silicon substrate and the nano carbon material are mechanically peeled off to obtain an indium/tin-based solder alloy substrate composite material, and the indium/tin-based solder alloy substrate composite material includes a nano-carbon material, a solder alloy coated on one end surface of the first surface of the nano-carbon material far silicon substrate, and a copper foil connected to one end of the nano-carbon material away from the first surface of the silicon substrate;
  • solder alloy substrate composite material placed in an acidic solution to dissolve the dissolved copper foil, A solder alloy is retained at one end of the carbon material, and then the solder alloy substrate is heated to move higher than the other end of the soldered nanocarbon material, cooled, and the surface of the nanocarbon material of the second surface of the substrate is magnetized.
  • the sputtering equipment is sputtered with Au, Ag, Ni or Pt. The thickness of the sputter layer is recommended to be
  • the sputtered nano carbon material has a height of 2 ⁇ 3 ⁇ m and the end is exposed outside the vapor deposition layer, and the exposed area of the end is 90% ⁇ 95%
  • the interface thermal conductive sheet is prepared.
  • the interface thermal conductive sheet is made of a solder alloy having a thickness of 1 Oum
  • the substrate has a first surface and a second surface opposite to the first surface, and the first surface and the second surface of the substrate are provided with the nanometer
  • the carbon material, the height of the nanocarbon material disposed on the first surface of the substrate is 1-2 ⁇ m, and the height of the nanocarbon material disposed on the second surface of the substrate is about 140 ⁇ m
  • the nano carbon material is Carbon nanowires arranged in an array. Referring to FIG.
  • an embodiment of the present invention provides a heat dissipation system 100.
  • the heat dissipation system 100 includes a heat generating component 10, a heat sink 20, and a heat conductive sheet 30.
  • the thermally conductive sheet 30 is made of the interfacial thermal sheet.
  • the heat conducting sheet 30 is closely attached between the heat generating component 10 and the heat sink 20, so that the heat generating component 10 transfers heat to the heat sink 20 through the heat conducting sheet 30 for heat dissipation.
  • the heat dissipation system includes a heat generating component 10, a heat sink 20, and the heat conductive sheet 30.
  • the heat conductive sheet 30 is made of the interface heat conductive sheet.
  • the heat conducting sheet 30 is closely attached between the heat generating component 10 and the heat sink 20 such that the heat generating component 10 transfers heat to the heat sink 20 through the heat conducting sheet 30 for heat dissipation. Since the heat conducting sheet 30 is a separate component, it can be picked up and attached between the heat generating component 10 and the heat sink 20, thereby facilitating installation.
  • the heat conductive sheet 30 is made of the interface thermal conductive sheet, and the substrate 1 of the interface thermal conductive sheet is provided with the nano carbon materials 2 and 3 on both sides, and the nano carbon material and the The diameter of the carbon fiber is nanometer, and the presence of the nano carbon material can simultaneously fill the bottom of the heating element 10 or the micropores present on the top surface of the heat sink 20 (generally embodied as roughness, It belongs to the micron level, thereby significantly reducing the contact thermal resistance of the thermal conductive sheet 30.
  • the nanocarbon materials 2 and 3 are axially perpendicular to the first surface and/or the second surface of the substrate 1. The ordered arrangement of the nanocarbon fibers provides a consistent, better thermal conductivity in the thickness direction.
  • the nano-carbon material the axial (Z direction) thermal conductivity can reach 2000w / (mk), the resistivity of 5xl0 "5 ohmcm, thus greatly improving the thermal effects 10 between the heat generating element 20 and the heat sink Effect embodiment
  • the interface thermal conductive sheet prepared in the first embodiment is placed between the heat source and the heat sink, and the thickness of the material is pressed from 0.13 mm to 0.05 mm before assembly by the pressure and thickness control of the self-made tool.
  • the overall thermal resistance is about 16 ° C -mm 2 /W, which is lower than the thermal resistance of tin-lead solder of about 24 ° C -mm 2 /W under the same test conditions, and the thermal resistance of CF3350 is about 40 ° C lower than the equivalent test conditions. -mm 2 /W.
  • This material is shown to have a lower thermal resistance than solder for TM applications. The conductivity of this material is slightly worse than that of tin-lead solder.
  • an interface thermal conductive sheet provided by an embodiment of the invention has a substrate structure, can be separately formed from the heat generating component and the heat sink component, can be picked up and placed, and thus is easy to be industrially produced and used, and overcomes the prior art.
  • the interface thermal conductive material cannot simultaneously satisfy the problems of good thermal conductivity and easy industrial production and use.

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Abstract

一种界面导热片，包括基材和碳纳米线，所述基材具有第一表面及相对于所述第一表面的第二表面，所述基材的所述第一表面和所述第二表面均设置有所述碳纳米线，所述碳纳米线呈阵列排布，其中，所述基材包括柔性复合金属薄膜，或者所述基材的材质包括柔性石墨和焊料合金中的至少一种，所述柔性复合金属薄膜为表面涂覆有镍、银或金的柔性金属薄膜，还提供了一种散热系统。该界面导热材料具有良好的导热性能，可拾取及贴放，易于工业化生产和使用。

Description

一种界面导热片及其制备方法、 散热系统 技术领域
本发明实施例涉及一种界面导热片及其制备方法、 散热系统 背景技术
电子设备中芯片等发热元件工作时产生的热量通常需借助散热器件实 现热量向外部的扩散。 从微观角度看， 发热元件与散热器件之间的接触界 面都存在很多的凹凸不平，需使用界面导热材料（ Thermal Interface Materials , ΤΜ )填充发热元件与散热器件的接触界面， 降低接触热阻。 随着电子设备 的 £型化、 轻量化和高密度化的发展。
现有界面导热材料， 比如导热硅脂、 相变导热材料， 导热系数通常不 超过 6w/mk, 无法满足高功率密度器件比如大功率场效应晶体管的散热要 求。 针对这种高功率密度器件的散热， 通用工艺为使用锡基焊料将高功率 密度器件与散热组件焊接在一起，也可使用导电导热银胶（ Henkel CF3350 )。 CF3350导电银胶的导热系数约 7w/mk， 体积电阻率约 2χ10-4Ω·«η, 可归 类于高导热系数的导热胶。 导电导热银胶在应用中可能会溢出导致短路， 在应用环境中易腐蚀或者出现银迁移， 长期可靠性较差。 锡基焊料通常为 锡铅共晶、 锡银铜无铅合金的锡膏， 具有金属合金独有的高导电、 高导热 特性， 但实现焊接需对散热部件进行高成本的金属化镀层处理， 且在高温 下加热完成焊接过程。 发明内容
有鉴于此， 本发明实施例提供了一种界面导热片， 克服了现有技术中 界面导热材料不能同时满足具有良好的导热性能和易于工业化安装的问题。
第一方面， 本发明实施例提供了一种界面导热片， 包括基材和碳纳米 线， 所述基材具有第一表面及相对于所述第一表面的第二表面， 所述基材 的所述第一表面和所述第二表面均设置有所述碳纳米线， 所述碳纳米线呈 阵列排布， 其中， 所述基材包括柔性复合金属薄膜， 或者所述基材的材质 包括柔性石墨和焊料合金中的至少一种， 所述柔性复合金属薄膜为表面涂 覆有镍、 银或金的柔性金属薄膜。
优选地， 所述碳纳米线垂直于所述基材的第一表面和第二表面中的至 少一表面。
优选地, 所述碳纳米线为纳米碳纤维和多壁碳纳米管中的至少一种。 优选地, 所述纳米碳纤维的直径为 50nm~200nm。
优选地, 所述多壁碳纳米管的直径为 lnm~50nm。
优选地, 所述柔性金属薄膜为铜箔、 铝箔、 镍箔、铜合金片和不锈钢片 中的一种。
优选地, 所述柔性复合金属薄膜的厚度为 10~200 μ ιη。
优选地, 所述柔性石墨为高定向热解石墨。
优选地, 所述柔性石墨的厚度为 10~200 μ ιη。
更优选地，设置在所述基材的第一表面和第二表面中的至少一表面上的 纳米碳材料长度为 20~125 μ m。
优选地， 所述焊料合金为铟基合金或镓基合金。
优选地， 所述焊料合金制成的基材的厚度为 10~50 μ ιη。
优选地， 设置在所述基材第一表面上纳米碳材料长度为 0.5~10 μ ιη, 设 置在所述基材第二表面上纳米碳材料长度为 50~150 μ ιη。
更优选地， 还包括有蒸镀层或溅射层， 所述蒸镀层或溅射层位于所述 基材的所述第二表面的一侧， 位于所述第二表面的所述纳米碳米线穿设在 所述蒸镀层或溅射层内， 并且所述第二表面的所述纳米碳米线的至少一部 分穿过所述蒸镀层或溅射层， 突出于所述蒸镀层或溅射层之外， 所述纳米 碳米线突出于所述蒸镀层或溅射层之外的部分的长度为 0.5~10 μ m。 进一步 优选地， 传设于所述蒸镀层或溅射层内的碳纳米线的横截面积总和为所述 基材第二表面面积的 50%~99%。
第二方面， 本发明实施例提供了一种界面导热片的制备方法， 包括如 下步骤：
将所述基材通过夹具固定在反应室中，在保护性气体气氛下将反应室加 热至 700~1200°C , 通入碳源气体， 恒温保持反应 2~20分钟； 所述基材为柔 性复合金属薄膜或柔性石墨， 所述基材具有第一表面及相对于第一表面的 第二表面， 所述基材的第一表面和第二表面均负载催化剂， 所述柔性复合 金属薄膜为表面涂覆有镍、 银或金的柔性金属薄膜；
反应完成后，在保护性气体气氛下冷却至室温，制得第一表面和第二表 面均生长有具有纳米碳材料的基材， 即制得界面导热片， 所述纳米碳材料 为呈阵列排布的碳纳米线。
优选地， 所述催化剂为粒径为 50nm~200nm的颗粒。
优选地， 在保护性气体气氛下将反应室加热至 700~900°C , 通入碳源气 体， 恒温保持反应 3~10分钟。
第三方面， 本发明实施例提供了一种界面导热片的制备方法， 包括如 下步骤：
( 1 )通过化学气相沉积的方法在硅基板或石英基板的第一表面生长纳 米碳材料， 所述纳米碳材料为呈阵列排布的碳纳米线；
( 2 )在生长制得的纳米碳材料远离硅基板或石英基板的第一表面的一 端压设表面设置有焊料合金的铜箔， 所述焊料合金与所述纳米碳材料接触， 加热至高于所述焊料合金熔点的温度使得所述焊料合金熔化， 冷却， 将所 述硅基板或石英基板与所述纳米碳材料机械剥离， 制得焊料合金基材复合 材料， 所述焊料合金复合材料包括所述纳米碳材料、 包覆在所述纳米碳材 料所述端表面的焊料合金和连接在所述纳米碳材料所述端的铜箔；
( 3 )将所述焊料合金基材复合材料置于酸性溶液中浸泡溶解铜箔， 制 得去除了铜箔的焊料合金基材， 清洗后干燥， 所述焊料合金基材中的纳米 碳材料一端保留有焊料合金， 随后将所述焊料合金基材加热至高于所述焊 述纳米碳材料的另一端移动， 冷却， 制得界面导热片， 所述界面导热片以 焊料合金为基材， 所述基材具有第一表面及相对于第一表面的第二表面， 所述基材的第一表面和第二表面均设置有所述纳米碳材料， 所述纳米碳材 料为呈阵列排布的碳纳米线。 沉积装置，通入碳源和保护性气体，在 700~1200°C发生化学反应 3-10分钟。
优选地， 在进行步骤（2 )之前对纳米碳材料的表面蒸镀或溅射镍、 金 或锡基焊料合金形成蒸镀层或溅射层。
优选地， 在步骤（3 )之后对所述基材第二表面的纳米碳材料的表面蒸 镀或溅射镍、 金或锡基焊料合金形成蒸镀层或溅射层， 所述蒸镀层或溅射 层位于所述基材的所述第二表面的一侧， 位于所述第二表面的所述纳米碳 米线穿设在所述蒸镀层或溅射层内， 并且所述第二表面的所述纳米碳米线 的至少一部分穿过所述蒸镀层或溅射层， 突出于所述蒸镀层或溅射层之外， 所述纳米碳米线突出于所述蒸镀层或溅射层之外的部分的长度为 0.5~10 μ m。 更优选地， 穿过所述蒸镀层或溅射层的纳米碳材料的横截面积总和为所 述基材第二表面面积的 50%~99%。
第四方面， 提供了一种散热系统， 包括发热元件、散热器及导热片， 所 述导热片由所有可能的实现方式中的界面导热片制成， 所述发热元件安装 于所述散热器上， 所述导热片贴置于所述发热元件与所述散热器之间， 以 使所述发热元件通过所述导热片将热量传递至所述散热器来进行散热。
本发明提供一种散热系统， 包括发热元件、 散热器及导热片， 所述导 热片由所有可能的实现方式中的界面导热片制成， 所述发热元件安装于所 述散热器上， 所述导热片贴置于所述发热元件与所述散热器之间， 以使所 述发热元件通过所述导热片将热量传递至所述散热器来进行散热。 由于所 述导热片为独立的元件， 可拾取及贴放于所述发热元件与散热器之间， 从 而方便安装。 另外， 所述导热片由所述界面导热片制成， 且所述界面导热 片的基材在两个侧面均设置有所述纳米碳材料， 并且纳米碳材料中的碳纤 或所述散热器的顶面存在的微孔（通常体现为粗糙度， 属于微米级别）， 从 而显著降低所述导热片的接触热阻。 且， 所述纳米碳材料及轴向垂直于所 述基材的第一表面和 /或第二表面。 纳米碳纤维的有序排列使得其在厚度方 向上具有一致、 更好的导热系数。 理论上， 纳米碳材料轴向（Z向）导热系 数可达到 2000w/ ( m.k ), 电阻率为 5xl0—5ohmcm, 从而大大提高了所述发热 元件与所述散热器之间的导热效果。
综上， 本发明实施例提供的一种界面导热片中基材选用柔性复合金属 薄膜、 柔性石墨和焊料合金中的一种， 相对现有技术中的导热硅脂、 相变 材料和聚合物等基体材料具有良好的导热性能， 并且本发明实施例提供的 基材表面设置有纳米碳材料， 纳米碳材料可同时填充发热部件表面或散热 部件表面微观存在的微孔从而显著降低接触热阻， 另一方面， 本发明实施 例提供的一种界面导热片具有基材结构， 可独立于发热元件与散热器件单 独存在， 可拾取及贴放， 因此易于工业化生产和使用， 克服了现有技术中 界面导热片不能同时满足具有良好的导热性能和易于工业化生产和使用的 问题。 本发明实施例还提供了一种应用所述界面导热片的散热系统， 不但 提高了发热元件导热效果， 而且安装方便。 附图说明
图 1为本发明实施例第二方面提供的制备方法制得的界面导热片的侧 视图。
图 2为本发明实施例第二方面提供的制备方法制得的界面导热片的局 部立体图。 图 3为本发明实施例第三方面提供的制备方法的流程图。
图 4为本发明实施例第三方面提供的制备方法制得的界面导热片的侧 视图。
图 5为本发明实施例一提供的制备方法制得的界面导热片的电镜图（扫 描电子显微镜）。
图 6为本发明实施例提供的一种散热系统的示意图。 具体实施方式
以下所述是本发明的优选实施方式， 应当指出， 对于本技术领域的普 通技术人员来说， 在不脱离本发明原理的前提下， 还可以做出若干改进和 润饰， 这些改进和润饰也视为本发明的保护范围。
本发明实施例第一方面提供了一种界面导热片， 具有良好的导热性能， 可拾取及贴放， 易于工业化生产和使用。 本发明实施例第二方面和第三方 面提供了一种界面导热片的制备方法。
第一方面， 本发明实施例提供了一种界面导热片， 包括基材和纳米碳 材料， 所述基材具有第一表面及相对于第一表面的第二表面， 所述基材的 第一表面和第二表面均设置有所述纳米碳材料， 所述纳米碳材料为呈阵列 排布的碳纳米线， 所述基材为柔性复合金属薄膜、 柔性石墨和焊料合金中 的一种，所述柔性复合金属薄膜为表面涂覆有镍、银或金的柔性金属薄膜。
本发明实施例界面导热片的基材在两个侧面均设置有所述纳米碳材料, 孔（通常体现为粗糙度， 属于微米级别）， 从而显著降低接触热阻。 所述碳 纳米线垂直于所述基材的第一表面和第二表面中的至少一表面。 所述碳纳 米线为纳米碳纤维和多壁碳纳米管中的至少一种。 纳米碳纤维的有序排列 使得其在厚度方向上具有一致、 更好的导热系数。 所述纳米碳材料直径的 大小与制备工艺中使用的催化剂颗粒的大小有关， 优选地， 所述纳米碳材 料的直径 200nm。 优选地， 所述纳米碳纤维的直径为 50nm~200nm。 优选 地， 所述多壁碳纳米管的直径为 lnm~50nm。 理论上， 纳米碳纤维轴向 （Z 向）导热系数可达到 2000w/ ( m-k ), 电阻率为 5xl0—5ohmcm。
本发明实施例中可以选用柔性复合金属薄膜为基材，所述柔性复合金属 薄膜为表面包覆有金属镍、 银或金作为阻挡层的柔性金属薄膜。 使用柔性
所述柔性金属薄膜为铜箔、 铝箔、 镍箔、 铜合金片和不锈钢片中的一种。 未包覆阻挡层的柔性金属薄膜在高温下具有化学反应活性， 若直接用于化 学气相沉积法生长纳米碳纤维， 易与催化剂发生反应， 影响纳米碳纤维的 生长。 现有技术中通常在柔性金属薄膜和催化剂之间设置氧化铝作为阻挡 层， 但氧化铝的导热性或导电性不佳， 不适用于界面导热片的制备。 本发 明实施例中使用金属镍、 银或金这类反应活性较低的金属材料作为阻挡层 具有良好的导热性能和导电性能。 柔性复合金属薄膜的厚度为 10~200 μ ιη。 更优选地， 柔性复合金属薄膜的厚度为 10~50 μ ιη。
考虑到纳米碳材料的高度将影响界面导热片的导热性能， 以及考虑到 本发明实施例中设置在所述基材的第一表面和第二表面中的至少一表面上 的纳米碳材料长度为 20~125 μ m。在装配压力下纳米碳材料可产生一定的倾 斜， 从而弥补一定的装配公差。 更优选地， 设置在所述基材的第一表面和 第二表面中的至少一表面上的纳米碳材料长度为 25~60 μ m。进一步优选地， 所述基材与设置在所述基材的第一表面和第二表面所述纳米碳材料的总高 度为 100~200 μ ιη。 以及更优选地， 所述基材与设置在所述基材的第一表面 和第二表面所述纳米碳材料的总高度为 100~150 μ ιη。
本发明实施例中还可以选用柔性石墨为基材， 所述柔性石墨为高定向 热解石墨， 此时各结构的厚度参见前述选用柔性复合金属薄膜为基材的情 况。所述柔性石墨的厚度为 10~200 μ ιη。设置在所述基材的第一表面和第二 表面中的一个或多个面的纳米碳材料的高度为 20~125 μ m。
以及， 本发明实施例中可以选用焊料合金为基材， 所述焊料合金为低 熔点焊料合金， 例如铟基合金或镓基合金。 所述焊料合金制成的基材的厚 度为 10~50 μ ιη。 所述焊料合金具有第一表面和第二表面， 两个表面均设置 有纳米碳材料。 设置在所述基材第一表面上纳米碳材料长度为 0.5~10 μ m, 设置在所述基材第二表面上纳米碳材料长度为 50~150 μ m。
为增强选用焊料合金为基材的界面导热片的机械强度， 所述界面导热 片还包括有蒸镀层或溅射层， 所述基材第二表面上纳米碳材料向远离所述 基材的方向穿过所述蒸镀层或溅射层且穿过所述蒸镀层或溅射层的部分长 度为 0.5~10 μ ιη。 进一步优选地， 穿过所述蒸镀层或溅射层的纳米碳材料的 横截面积总和为所述基材第二表面面积的 50%~99%。
本发明实施例提供的一种界面导热片中无论是基材还是纳米碳材料都 具有良好的导热性能， 且纳米碳材料可同时填充发热部件表面或散热部件 表面微观存在的微孔从而显著降低接触热阻， 另一方面， 本发明实施例提 供的一种界面导热片具有基材结构， 可拾取及贴放， 易于工业化生产和使 用， 克服了现有技术中界面导热片不能同时满足具有良好的导热性能和易 于工业化生产和使用的问题。
第二方面， 本发明实施例提供了一种界面导热片的制备方法， 包括如 下步骤：
将所述基材通过夹具固定在反应室中，在保护性气体气氛下将反应室加 热至 700~1200°C , 通入碳源气体， 恒温保持反应 2~20分钟； 所述基材为柔 性复合金属薄膜或柔性石墨， 所述基材具有第一表面及相对于第一表面的 第二表面， 所述基材的第一表面和第二表面均负载催化剂， 所述柔性复合 金属薄膜为表面涂覆有镍、 银或金的柔性金属薄膜；
反应完成后，在保护性气体气氛下冷却至室温，制得第一表面和第二表 面均生长有具有纳米碳材料的基材， 即制得界面导热片， 所述纳米碳材料 为呈阵列排布的碳纳米线。
柔性复合金属薄膜为表面包覆有金属镍、 银或金的柔性金属薄膜， 其 制备方法为按常规电镀、 化学镀、 蒸镀或溅射的方法在柔性金属薄膜表面 设置金属镍、 银或金。 所述催化剂颗粒的粒径为 50nm~200nm。
为便于实现纳米碳材料的生长， 可在柔性复合金属薄膜或柔性石墨表 面负载催化剂， 负载催化剂的方法如常规技术， 例如： 将待沉积的载体柔 性复合金属薄膜或柔性石墨置于浓度为 0.01 ~0.05mol/L的硝酸镍溶液中浸 泡 20~40s, 将浸泡后的基材置于真空干燥箱内于 80~100°C下干燥 1~4小时， 随后取出放入石英舟中， 在石英反应管的恒温区， 在保护性气体的保护下 以升温速率 10~20°C/min升至温度 200~400°C , 恒温煅烧 1~4小时。
保护性气体通常为氮气和氩气中的一种或其组合。 碳源气体为曱烷、 乙烯、 丙烯、 乙炔、 曱醇和乙醇中的一种或几种。
在保护性气体气氛下将反应室加热至 700~900°C , 通入碳源气体， 恒温 保持反应 3~10分钟。
图 1为本发明实施例第二方面提供的制备方法制得的界面导热片的侧 视图。 图 2为本发明实施例第二方面提供的制备方法制得的界面导热片的局 部立体图。 如图 1和图 2所示， 一种界面导热片， 包括基材和纳米碳材料， 所述基材具有第一表面及相对于第一表面的第二表面， 所述基材的第一表 面和第二表面均设置有所述纳米碳材料， 所述纳米碳材料为呈阵列排布的 碳纳米线， 所述基材为柔性复合金属薄膜和柔性石墨中的一种， 所述柔性 复合金属薄膜为表面涂覆有镍、 银或金的柔性金属薄膜。
所述碳纳米线垂直于所述基材的第一表面和第二表面中的至少一表面。 所述碳纳米线为纳米碳纤维和多壁碳纳米管中的至少一种。
所述纳米碳纤维的直径为 50nm~200nm。
所述多壁碳纳米管的直径为 lnm~50nm。 所述柔性金属薄膜为铜箔、铝箔、镍箔、铜合金片和不锈钢片中的一种。 所述柔性复合金属薄膜的厚度为 10~200 μ ιη。
所述柔性石墨为高定向热解石墨。
所述柔性石墨的厚度为 10~200 μ ιη。
设置在所述基材的第一表面和第二表面中的至少一表面上的纳米碳材 料长度为 20~125 μ ιη。
本发明实施例第二方面提供了一种界面导热片的制备方法， 该制备方 法中克服了具有化学反应活性的柔性金属薄膜直接与催化剂反应从而影响 纳米碳材料生长的问题， 另一方面相比制备碳纳米管阵列具有使用设备筒 单、 产量高、 成本低且产品质量易于控制的优点， 制得的界面导热片不但 具有良好的导热性能且可拾取及贴放， 易于工业化生产和使用。
第三方面， 本发明实施例提供了一种界面导热片的制备方法， 图 3为本 发明实施例第三方面提供的制备方法的流程图，如图 3所示，包括如下步骤：
( 1 )通过化学气相沉积的方法在硅基板或石英基板的第一表面生长纳 米碳材料， 所述纳米碳材料为呈阵列排布的碳纳米线， 如步骤 S01所示；
( 2 )在生长制得的纳米碳材料远离硅基板或石英基板的第一表面的一 端压设表面设置有焊料合金的铜箔， 所述焊料合金与所述纳米碳材料接触， 如步骤 S02所示， 加热至高于所述焊料合金熔点的温度使得所述焊料合金 熔化， 冷却， 将所述硅基板或石英基板与所述纳米碳材料机械剥离， 如步 骤 S03所示， 制得焊料合金基材复合材料， 所述焊料合金复合材料包括所 述纳米碳材料、 包覆在所述纳米碳材料所述端表面的焊料合金和连接在所 述纳米碳材料所述端的铜箔；
( 3 )将所述焊料合金基材复合材料置于酸性溶液中浸泡溶解铜箔， 制 得去除了铜箔的焊料合金基材， 清洗后干燥， 所述焊料合金基材中的纳米 碳材料一端保留有焊料合金， 随后将所述焊料合金基材加热至高于所述焊 述纳米碳材料的另一端移动， 冷却， 如步骤 S04所示， 制得界面导热片， 所 述界面导热片以焊料合金为基材， 所述基材具有第一表面及相对于第一表 面的第二表面， 所述基材的第一表面和第二表面均设置有所述纳米碳材料， 所述纳米碳材料为呈阵列排布的碳纳米线。
步骤（1 ) 中， 化学气相沉积的方法在硅基板或石英基板的第一表面生 长具有阵列排布特性的纳米碳材料为现有技术。 硅基板和石英基板的热膨 胀系数低， 无化学反应活性， 有利于提高纳米碳材料的质量， 并且容易控 沉积装置，通入碳源和保护性气体，在 700~1200°C发生化学反应 3~10分钟。 相应地， 步骤（1 ) 中制得的所述纳米碳材料的高度为 50.5~160 μ ιη。
步骤（2 ) 中， 加热使得所述焊料合金熔化时， 纳米碳材料会通过毛细 吸附的作用力吸附焊料合金， 冷却后与焊料合金牢固的结合。 纳米碳材料 与焊料合金界面的结合力大于纳米碳材料与硅基板或石英基板界面的结合 力， 因此所述纳米碳材料可以从所述硅基板或石英基板上才 U戒剥离。
为了便于该机械剥离， 可在进行步骤（2 )之前对纳米碳纤维的表面蒸 镀或溅射镍、 金或锡基焊料合金形成蒸镀层或溅射层， 该蒸镀或溅射为金 属化过程， 用于增强纳米碳材料的机械强度。
步骤（3 ) 中， 加热至高于所述焊料合金熔点的温度使得所述焊料合金 为通过毛细吸附作用力实现， 使得纳米单纤维阵列的一端从悍料合金第一 表面中露出。
所述碳纳米线垂直于所述基材的第一表面和第二表面中的至少一表面。 所述碳纳米线为纳米碳纤维和多壁碳纳米管中的至少一种。
所述纳米碳纤维的直径为 50nm~200nm。
所述多壁碳纳米管的直径为 lnm~50nm。
图 4为本发明实施例第三方面提供的制备方法制得的界面导热片的侧 视图。 如图 4所示， 一种界面导热片， 包括基材和纳米碳材料， 所述基材具 有第一表面及相对于第一表面的第二表面 , 所述基材的第一表面和第二表 面均设置有所述纳米碳材料， 所述纳米碳材料为呈阵列排布的碳纳米线， 所述基材由焊料合金制成。
所述焊料合金选自铟基合金或镓基合金。 更优选地， 所述焊料合金制 成的基材的厚度为 10~50 μ ιη。 以及更优选地， 设置在所述基材第一表面上 碳纳米线长度为 0.5~10 μ m, 设置在所述基材第二表面上碳纳米线长度为 50~150 μ ιη。
为增强纳米碳材料的机械强度， 进一步优选地在步骤（3 )之后对所述 基材第二表面的纳米碳材料的表面蒸镀或溅射镍、 金或锡基焊料合金形成 蒸镀层或溅射层， 所述基材第二表面上纳米碳材料向远离所述基材的方向 穿过所述蒸镀层或溅射层且穿过所述蒸镀层或溅射层的部分长度为 0.5~10 μ m。穿过所述蒸镀层或溅射层的纳米碳材料的横截面积总和为所述基材第 二表面面积的 50%~99%。
本发明实施例第三方面提供了一种界面导热片的制备方法， 将生长质 量优良的纳米碳材料从硅基板或石英基板上转移至焊料合金基材上， 并通 过特定的工艺使得纳米碳材料从所述基材第一表面露出， 实现了所述基材 的第一表面和第二表面均设置有所述纳米碳材料， 制得的界面导热片不但 具有良好的导热性能且可拾取及贴放， 易于工业化生产和使用。 实施例一
一种界面导热片的制备方法， 包括如下步骤：
( 1 )预处理柔性复合金属薄膜： 按常规电镀方法在电解铜箔表面镀金 属镍（可要求铜箔厂家来料已做好相应的惰性镀层处理 ), 制得 12um厚度的 表面镀镍的电解铜箔为柔性复合金属薄膜， 分别采用去离子、 丙酮超声波 清洗， 干燥后进行氩气等离子处理 lmin; 将硝酸镍与去离子水混合配制成 0.02mol/L的硝酸镍溶液； 将待沉积的柔性复合金属薄膜置于硝酸镍溶液中 浸泡 30s, 将浸泡后的柔性复合金属薄膜置于真空干燥箱内于 90°C下干燥 2 小时， 随后取出放入石英舟中， 在石英反应管的恒温区， 在氩气的保护下 以升温速率 20°C/min升至温度 300°C , 恒温煅烧 1小时，制得负载催化剂的柔 性复合金属薄膜；
( 2 )将步骤（ 1 )制得的柔性复合金属薄膜放置在石英夹具中作为基材， 将石英夹具置于石英反应管恒温区 , 所述基材具有第一表面及相对于第一 表面的第二表面， 所述基材的第一表面和第二表面均负载催化剂， 第一表 面和第二表面可通过流动气体， 在氩气气氛下以 20°C的升温速度将反应室 加热至 900°C , 通入氩气、 氢气和乙炔气的混合气， 三种气体的流量分别问 200mL/min、 80mL/min、 60mL/min , 在 900 °C下恒温保持反应 10分钟， 反 应完成后， 在氩气气氛下将炉温快速降至室温， 制得第一表面和第二表面 均生长有纳米碳材料的基材， 即制得界面导热片， 所述纳米碳材料为呈阵 列排布的碳纳米线。
图 5为本发明实施例一提供的制备方法制得的界面导热片的电镜图 （扫 描电子显微镜）。 如图 5所示， 本发明实施例一制得的界面导热片包括基材 和纳米碳材料， 所述基材为柔性复合金属薄膜， 所述基材具有第一表面及 相对于第一表面的第二表面， 所述基材的第一表面和第二表面均设置有纳 米碳材料，所述纳米碳材料为呈阵列排布的碳纳米线，基材的厚度为 12um, 设置在所述基材的第一表面和第二表面的纳米碳材料的高度约 60um。 实施例二
一种界面导热片的制备方法， 包括如下步骤：
取柔性石墨， 推荐为高定向热解石墨（松下的 PGS石墨薄膜） 为基材， 所述基材具有第一表面及相对于第一表面的第二表面。将松下的 PGS石墨薄 膜放入管式电阻炉内， 在氩气保护下加热到反应温度 850°C左右， 随后通入 流量分别为 300sccm的氢气和 lOOOsccm的氩气， 同时将浓度为 0.025g/ml的溶 有二茂铁的二曱苯溶液连续进给到反应室中， 流量控制为 0.4mL/min。 在氢 气和氩气的输运作用下，二茂铁和二曱苯到达 PGS石墨薄膜的位置， 由二茂 铁分解产生的 Fe原子团簇会负载在 PGS石墨薄膜的第一表面和第二表面。在 这些 Fe原子团簇的催化作用下， 由二曱苯裂解产生的碳原子会生成纳米碳 纤维。 恒温保持反应约 6min, 反应完成后， 在保护性气体气氛下冷却至室 温，制得第一表面和第二表面均生长有纳米碳材料的 PGS石墨薄膜， 即制得 界面导热片， 所述纳米碳材料为呈阵列排布的碳纳米线， 设置在所述基材 的第一表面和第二表面的纳米碳材料的高度约为 50um。 实施例三
一种界面导热片的制备方法， 包括如下步骤：
( 1 )化学气相沉积： 取硅基板， 置于通过乙炔气的反应室中， 将反应 室中的温度加热至 700 °C , 在硅基板第一表面生长纳米碳材料， 所述纳米碳 材料为呈阵列排布的碳纳米线， 制得的碳纳米线包含大量直径为
50nm~90nm的纳米碳纤维和少量直径为 30nm~50nm的多壁碳纳米管， 纳 米碳材料高度约为 150 μ ιη;
( 2 )在生长制得的纳米碳材料远离硅基板的第一表面的一端压设表面 设置有铟基焊料合金 Sn42In58的铜箔， 铟基焊料合金与纳米碳材料接触， 加热至 118°C以上使得铟基焊料合金熔化， 冷却， 将硅基板与纳米碳材料机 械剥离， 制得铟基焊料合金基材复合材料， 所述铟基焊料合金基材复合材 料包括所述纳米碳材料、 包覆在所述纳米碳材料远萬硅基板的第一表面的 一端表面的焊料合金和连接在所述纳米碳材料远萬硅基板的第一表面的一 端的铜箔；
( 3 )将所述焊料合金基材复合材料置于酸性溶液中浸泡溶解铜箔， 制 得去除了铜箔的焊料合金基材， 清洗后干燥， 焊料合金基材中的纳米碳材 料一端保留有焊料合金， 随后将所述焊料合金基材至高于所述焊料合金熔 所述纳米碳材料的另一端移动， 冷却， 制得界面导热片， 所述界面导热片 以厚度为 10 um的焊料合金为基材， 基材具有第一表面及相对于第一表面的 第二表面， 所述基材的第一表面和第二表面均设置有所述纳米碳材料， 设 置在基材第一表面的纳米碳材料的高度约为 1~2 μ m, 设置在所述基材第二 表面的纳米碳材料的高度约为 140 μ m, 所述纳米碳材料为呈阵列排布的碳 纳米线。 实施例四
一种界面导热片的制备方法， 包括如下步骤：
( 1 )化学气相沉积： 取硅基板， 置于通过乙炔气的反应室中， 将反应 室中的温度加热至 700 °C , 在硅基板第一表面生长纳米碳材料， 所述纳米碳 材料为呈阵列排布的碳纳米线， 制得的碳纳米线包含大量直径为 50nm~90nm的纳米碳纤维和少量直径为 30nm~50nm的多壁碳纳米管， 纳 米碳材料高度约 150 μ ιη; 在进行步骤（ 2 )之前使用真空蒸镀装置对纳米 碳材料的表面沉积薄金，金层厚度约 0.2um, 用于增强纳米碳材料的机械强 度及导电性；
( 2 )在生长制得的纳米碳材料远离硅基板的第一表面的一端压设表面 设置有铟 /锡基焊料合金 In97Ag3的铜箔， In97Ag3焊料合金与纳米碳材料 接触，加热至 In97 Ag3的熔点 143 °C以上使得 In97Ag3焊料合金熔化，冷却， 将硅基板与纳米碳材料机械剥离， 制得铟 /锡基焊料合金基材复合材料， 所 述铟 /锡基焊料合金基材复合材料包括所述纳米碳材料、 包覆在所述纳米碳 材料远萬硅基板的第一表面的一端表面的焊料合金和连接在所述纳米碳材 料远离硅基板的第一表面的一端的铜箔；
( 3 )将所述焊料合金基材复合材料置于酸性溶液中浸泡溶解铜箔， 制 碳材料一端保留有焊料合金， 随后将所述焊料合金基材加热至高于所述焊 述纳米碳材料的另一端移动， 冷却， 对所述基材第二表面的纳米碳材料的 表面使用磁控溅射装备溅射 Au、 Ag、 Ni或者 Pt , 溅射层厚度推荐为
0.5um~lum,溅射后的纳米碳材料保留高度为 2~3 μ m的端头露在蒸镀层外， 所述端头露出面积为 90%~95%, 制得界面导热片， 所述界面导热片以厚度 为 1 Oum的焊料合金为基材 , 基材具有第一表面及相对于第一表面的第二表 面， 所述基材的第一表面和第二表面均设置有所述纳米碳材料， 设置在基 材第一表面的纳米碳材料的高度为 1 ~2 μ m, 设置在所述基材第二表面的纳 米碳材料的高度约为 140 μ m, 所述纳米碳材料为呈阵列排布的碳纳米线。 请参阅图 6,本发明实施例提供了一种散热系统 100。所述散热系统 100 包括发热元件 10、 散热器 20及导热片 30。 所述导热片 30由所述界面导热 片制成。所述导热片 30紧密贴置于所述发热元件 10与所述散热器 20之间， 以使所述发热元件 10通过所述导热片 30将热量传递至所述散热器 20来进 行散热。
在本实施例中， 所述散热系统包括发热元件 10、散热器 20及所述导热 片 30。 所述导热片 30由所述界面导热片制成。 所述导热片 30紧密贴置于 所述发热元件 10与所述散热器 20之间， 以使所述发热元件 10通过所述导 热片 30将热量传递至所述散热器 20来进行散热。 由于所述导热片 30为独 立的元件， 可拾取及贴置于所述发热元件 10与所述散热器 20之间， 从而 方便安装。 另外， 所述导热片 30由所述界面导热片制成， 且所述界面导热 片的基材 1在两个侧面均设置有所述纳米碳材料 2及 3, 并且纳米碳材料 及 3 中的碳纤维直径为纳米级别， 纳米碳材料的存在可同时填充所述发热 元件 10的底部或所述散热器 20的顶面存在的微孔（通常体现为粗糙度， 属于微米级别）， 从而显著降低所述导热片 30的接触热阻。 且， 所述纳米 碳材料 2及 3轴向垂直于所述基材 1的第一表面和 /或第二表面。 纳米碳纤 维的有序排列使得其在厚度方向上具有一致、 更好的导热系数。 理论上， 纳米碳材料轴向 （Z 向） 导热系数可达到 2000w/ ( m.k ) , 电阻率为 5xl0"5ohmcm,从而大大提高了所述发热元件 10与所述散热器 20之间的导 热效果。 效果实施例
采用本实施例一制作的界面导热片， 将此材料放置在热源与散热器之 间， 通过自制工装的压力及厚度控制， 使上述材料厚度从装配前的 0.13mm 压制至 0.05mm, 测试此材料的综合热阻约 16°C -mm2/W, 低于同等测试条 件下锡铅焊料的热阻约 24°C -mm2/W, 低于同等测试条件下 CF3350的热阻 约 40°C -mm2/W。 表明此材料作为 TM应用具有比焊料更低的热阻。 此材 料的导电性能略差于锡铅焊料， 体积电阻率约 10-4ohm-cm, 接地阻抗完全 满足要求。 此材料可实现高功率密度器件的散热， 达成与焊接材料相当于 的散热效果， 可避免散热组件采用可焊性镀层处理， 显著降低成本。 另一 方面， 本发明实施例提供的一种界面导热片具有基材结构， 可独立于发热 元件与散热器件单独存在， 可拾取及贴放， 因此易于工业化生产和使用， 克服了现有技术中界面导热材料不能同时满足具有良好的导热性能和易于 工业化生产和使用的问题。

Claims

权利要求
1、 一种界面导热片， 其特征在于， 包括基材和碳纳米线， 所述基材具 有第一表面及相对于所述第一表面的第二表面， 所述基材的所述第一表面 和所述第二表面均设置有所述碳纳米线，所述碳纳米线呈阵列排布，其中， 所述基材包括柔性复合金属薄膜， 或者所述基材的材质包括柔性石墨和焊 料合金中的至少一种， 所述柔性复合金属薄膜为表面涂覆有镍、 银或金的 柔性金属薄膜。
2、 如权利要求 1所述的一种界面导热片， 其特征在于， 所述碳纳米线 垂直于所述基材的所述第一表面和所述第二表面中的至少一个表面。
3、 如权利要求 1或 2所述的一种界面导热片， 其特征在于， 所述碳纳 米线包括纳米碳纤维和多壁碳纳米管中的至少一种。
4、 如权利要求 3所述的一种界面导热片， 其特征在于， 所述纳米碳纤 维的直径为 50nm~200nm。
5、 如权利要求 3所述的一种界面导热片， 其特征在于， 所述多壁碳纳 米管的直径为 lnm~50nm。
6、 如权利要求 1所述的一种界面导热片， 其特征在于， 所述柔性金属 薄膜包括铜箔、 铝箔、 镍箔、 铜合金片和不锈钢片中的一种。
7、 如权利要求 1或 6所述的一种界面导热片， 其特征在于， 所述柔性 复合金属薄膜的厚度为 10~200 μ ιη。
8、 如权利要求 1所述的一种界面导热片， 其特征在于， 所述柔性石墨 为高定向热解石墨。
9、 如权利要求 1或 8所述的一种界面导热片， 其特征在于， 所述柔性 石墨的厚度为 10~200 μ ιη。
10、 如权利要求 9利要求所述的一种界面导热片， 其特征在于， 设置在 所述基材的所述第一表面和所述第二表面中的至少一个表面上的碳纳米米 线的长度为 20~125 μ ιη。
11、如权利要求 1所述的一种界面导热片， 其特征在于， 所述焊料合金 为铟基合金或镓基合金。
12、 如权利要求 1或 11所述的一种界面导热片， 其特征在于， 所述焊 料合金制成的基材的厚度为 10~50 μ ιη。
13、 如权利要求 12所述的一种界面导热片， 其特征在于， 设置在所述 基材的所述第一表面的碳纳米线的长度为 0.5~10 μ m,设置在所述基材的所 述第二表面的碳纳米线的长度为 50~150 μ ιη。
14、 如权利要求 13所述的一种界面导热片， 其特征在于， 所述界面导 热片还包括蒸镀层或溅射层， 所述蒸镀层或溅射层位于所述基材的所述第 二表面的一侧， 位于所述第二表面的所述纳米碳米线穿设在所述蒸镀层或 溅射层内， 并且所述第二表面的所述纳米碳米线的至少一部分穿过所述蒸 镀层或溅射层， 突出于所述蒸镀层或溅射层之外， 所述纳米碳米线突出于 所述蒸镀层或溅射层之外的部分的长度为 0.5~10 μ m。
15、 如权利要求 14所述的一种界面导热片， 其特征在于， 穿设于所述 蒸镀层或溅射层内的所述纳米碳米线的横截面积和总和为所述基材的所述 第二表面面积的 50%~99%。
16、 一种散热系统， 包括发热元件、 散热器以及导热片， 所述导热片 包括权利要求 1或 所述的界面导热片， 所述发热元件位于所述散热器一 侧， 所述导热片贴置于所述发热元件与所述散热器之间， 以使所述发热元 件通过所述导热片将热量传递至所述散热器来进行散热。
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