WO2015031602A1 - Interface d'alignement optique - Google Patents

Interface d'alignement optique Download PDF

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Publication number
WO2015031602A1
WO2015031602A1 PCT/US2014/053139 US2014053139W WO2015031602A1 WO 2015031602 A1 WO2015031602 A1 WO 2015031602A1 US 2014053139 W US2014053139 W US 2014053139W WO 2015031602 A1 WO2015031602 A1 WO 2015031602A1
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WO
WIPO (PCT)
Prior art keywords
optic
cradle
spherical
alignment
locators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2014/053139
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English (en)
Inventor
Ryan MURDICK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RHK Technology Inc
Original Assignee
RHK Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RHK Technology Inc filed Critical RHK Technology Inc
Publication of WO2015031602A1 publication Critical patent/WO2015031602A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/027—Mountings, adjusting means, or light-tight connections, for optical elements for lenses the lens being in the form of a sphere or ball
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors

Definitions

  • This disclosure relates generally to optical alignment and, more particularly, to optical systems for testing purposes.
  • SPM Scanning probe microscopy
  • One illustrative embodiment includes an optical alignment system that includes a mount and an alignment cradle.
  • the mount is located on a first optic, and the alignment cradle is couplable to the mount.
  • the cradle may have at least one spherical locator or at least one pilot cavity for receiving the spherical locator(s).
  • Another embodiment includes a method of assembling an optical calibration apparatus for a concave optic.
  • the steps of the method include: movably carrying a first optic in a cradle; mounting the cradle to the concave optic so that the first optic is positioned at least partially within an interior region of the optic; moving the first optic to an alignment position; and immobilizing the first optic with respect to the cradle in the alignment position.
  • Another embodiment includes a method of aligning a first optic to a second optic.
  • the steps of the method include: providing the second optic having a mounting surface; positioning a cradle having a complementary mounting surface with respect to the second optic such that the mounting surface of the second optic and the complementary mounting surface of the cradle pair; positioning the first optic carried by the cradle with respect to a focal point of the second optic; receiving directed light through a third optic and into the second optic resulting in: incident light onto the first optic, and reflected light off the first optic; adjusting the position of at least one of the first, second, or third optics until the incident light and reflected light overlap; and fixing the position of the first optic with respect to the cradle.
  • FIG. 1 is a schematic view of an illustrative embodiment of an optical alignment system that may be used in an illustrative embodiment of an alignment process
  • FIG. 2 is an image in perspective of an alignment cradle of the optical alignment system of FIG. 1 ;
  • FIG. 3 is a schematic view of a mounting surface of an optic of the optical alignment system along section lines 3-3 of FIG. 1;
  • FIG. 4 is an image in perspective of a portion of the mounting surface of FIG. 3.
  • optical microscopy hardware typically involves alignment of the hardware with the subject matter or specimen to be examined. This alignment process can be both time consuming and require the assistance of a technician or specialist to perform the alignment for each specimen to be examined.
  • the following description generally describes an optical alignment system 8 having an optical alignment or calibration interface 10 and methods of manufacturing and aligning the interface 10. Following an initial alignment, the interface 10 may be used to rapidly examine different specimens without the assistance of a specialist.
  • the description provides one or more illustrative embodiments. While the example embodiments are described with reference to the optical alignment system 8, it will be appreciated as the description proceeds that the inventions are useful regardless of the particular system or apparatus and may be implemented in many embodiments.
  • the alignment interface 10 includes the coupling or adjoining of an optic (e.g., optic A) and a cradle 12 for carrying another optic (e.g., optic B).
  • the alignment interface 10 (between the cradle 12 and optic A) may be decoupled and recoupled such that the alignment of optic A and optic B is repeatable within a predetermined and acceptable margin of error.
  • FIG. 1 illustrates optic B as a retroreflector carried by the alignment cradle 12 which has a mounting surface 14 and optic A as an elliptical mirror (or concave optic) having a mount or mounting surface 16 for coupling or mating to mounting surface 14.
  • the cradle 12 and optic A, together with their respective mounting surfaces 14, 16, are described more fully below.
  • the alignment cradle 12 is depicted in FIGS. 1 and 2 as a generally annular-shaped member having multiple spherical locators 20 and one or more magnets 22 on mounting surface 14.
  • FIG. 2 there are three circumferentially, evenly spaced spherical locators 20 and three circumferentially, evenly spaced magnets 22 interposed between the spherical locators 20.
  • the spherical locators 20 are circumferentially spaced approximately 120 degrees from one another with respect to a center axis L of the cradle 12; similarly, the magnets 22 are shown approximately 120 degrees from one another as well.
  • the locators 20 and magnets 22 may be provided in any other suitable spacing and configuration.
  • the spherical locators 20 may include any locating device having at least a partially- spherical shape, and need not be complete spheres.
  • the spherical locators 20 have diameters (Ds) that extend approximately a full-hemisphere from the mounting surface 14 of the cradle 12; however, other implementations are possible.
  • the spherical locators 20 may be a pin or post coupled to the mounting surface 14 and having a partially-hemispherical region extending from the pin (e.g., on the end thereof).
  • each of the spherical locators 20 may be full or partial spheres located within recesses 30 of the mounting surface 14.
  • the locators 20 may be spheres surface-coupled to mounting surface 14 (i.e., without recesses 30).
  • the illustrated magnets 22 are shown as cylindrical members each longitudinally oriented parallel to the center axis L and each having an end 32 facing outwardly from the mounting surface 14.
  • each magnet 22 is located within recesses 34 of the mounting surface 14.
  • the shape of the magnets 22 and their relative location at the mounting surface 14 may vary.
  • these magnets 22 may be surface-mounted to the cradle 12 instead or partially extend outwardly from the mounting surface 14 from the recesses 34.
  • Other implementations are possible.
  • Both the spherical locators 20 and the magnets 22 may be coupled to the mounting surface 14 and/or recesses 30, 34 in any of various ways known to those of ordinary skill in the art (e.g., use of solder, fasteners, adhesives, welding, etc.).
  • FIGS. 1 and 2 illustrate the cradle 12 having an outer radius (Ro) and an inner radius (Ri). Between the inner and outer radii Ri, Ro is a shoulder 36 and a wall 38.
  • optic A is illustrated in FIGS. 1 and 3 as having a cylindrical body 50 and an ellipsoidal passage 52 extending longitudinally therethrough along axis L; more specifically, the passage 52 extends from an opening 54 at a first end 56 of the body 50 to another opening 58 at the opposing or second end 60 having the mounting surface 16 located thereat.
  • the opening 54 at the first end 56 is shown as wider than the opening 58 at the second end 60.
  • the illustrated passage 52 has a reflective or mirror-like surface 62.
  • the body 50 of optic A may be composed of any suitable material and the passage surface 62 may or may not be a coating.
  • the body 50 may be composed of a ferrous material and the surface 62 may be of the same material and polished to a suitable reflectance.
  • the body 50 may be non-metallic and the surface 62 may be a coating having a suitable reflectance.
  • the passage 62 may have a reflective insert.
  • these are merely examples and other implementations are also possible.
  • the mounting surface 16 of optic A may complement the mounting surface 14 of the alignment cradle 12.
  • the mounting surface 16 may have multiple pockets or pilot cavities 70 for receiving or cooperating with the spherical locators 20 and one or more magnetically responsive regions 72 for magnetically cooperating or coupling with the magnets 22.
  • the regions 72 may include ferrous material, magnetic material, or the like.
  • the pockets 70 and magnetically responsive regions 72 may be circumferentially spaced around the second opening 58.
  • the pockets 70 are circumferentially spaced approximately 120 degrees from one another with respect to the axis L; similarly, the magnetically responsive regions 72 are shown approximately 120 degrees from one another as well. This spacing and arrangement is merely one example however. The regions 72 and/or the pockets 70 may be at a common radial distance from center L.
  • the pockets 70 may be of any suitable shape; in FIG. 3 they are illustrated as rectangular. Each pocket 70 may have one or more fiducial surfaces therein. In one illustrative implementation, the fiducial surfaces are the exterior surfaces of one or more locators76.
  • the locators 76 may include cylinders, as illustrated, and/or may include elements of any other suitable shape(s) and size(s).
  • the locators 76 may be arranged and/or oriented in various ways. For example, the longitudinal axes Mi, M2 of the locators 76 may lie in a plane parallel to the mounting surface 16. Further, while the axes Mi, M2 in FIG. 3 are shown generally parallel to one another, this is not necessary.
  • the locator axes Mi, M2 may be positioned radially inwardly or traverse to the center axis L.
  • the diameter (Dc) of the locators 76 may vary; and in some embodiments, the locators 76 may protrude from the pocket 70 outwardly beyond the mounting surface 16, and in other embodiments, they may not.
  • the ratio of the diameter of the spherical locator 20 (Ds) to the locator 76 diameter (D c ) may be between 1.5 and 4 (e.g., 1.5 ⁇ D s / D c ⁇ 4).
  • the locators 76 may be soldered, welded, adhered, fastened, or coupled in any other suitable manner to the pockets 70.
  • the magnetically responsive regions 72 may comprise the body 50 of the optic A itself (e.g., where the body is machined or cast from a ferrous material). In other implementations, the regions 72 may be inserts of ferrous material or any other material responsive to a magnetic field. Still further, the regions 72 may be one or more surface-mounted plates or even a plating composed of a magnetically responsive material coupled to the second end 60 of the optic A. The regions 72 may or may not extend outwardly from the mounting surface 16. In the illustrated embodiment of FIG. 1, the regions 72 are generally flush with the second end 60, and the body 50 of the optic A itself is composed of aluminum.
  • Both the pockets 70 and the magnetically responsive regions 72 may be positioned on optic A to complement the respective locations of the spherical locators 20 and magnets 22 of the cradle 12 - thus, enabling the mounting surfaces 14, 16 to pair. Further, the pairing of the spherical locators 20 with the pockets 70 may bring the spherical locators 20 into contact with each of the locators 76 within the pockets 70 (e.g., three spherical locators 20 may be in contact with six locators 76).
  • the two mounting surfaces 14, 16 may be coupled and decoupled from one another.
  • the spherical locators 20 of mounting surface 14 may align with the pockets 70 of mounting surface 16.
  • the spherical locators 20 may seat or locate at least partially between the locators 76 in the respective pockets 70.
  • the spherical locators 20 (or at least the portion extending beyond the mounting surface 14) may be at least partially located within the depth of the pockets 70 further bringing the magnets 22 into closer proximity with the magnetically responsive regions 72.
  • the magnets 22 of the alignment cradle 12 when assembled, the magnets 22 of the alignment cradle 12 may be flush with the mounting surface 16 of optic A (i.e., the magnets 22 also contact the regions 72).
  • the location of the alignment cradle 12 with respect to the optic A will be relocated in substantially the same position and orientation as it was previously.
  • a maximum deviation from its original position (or repeatability) may be predetermined based on a number of factors, including: manufacturing tolerances (e.g., of the spherical locators 20, locators 76, the body 50 of optic A, the cradle 12, etc.); thermal stability and deformation characteristics of the materials of the cradle 12, optic A, and their various components; and various system conditions and environmental conditions and characteristics known to those of ordinary skill in the art (e.g., ambient temperature, dust, scratches, etc.).
  • the deviation may be a predetermined value based on these known characteristics and conditions.
  • the predetermined value may be less than 0.05 microns (micrometers ( ⁇ )); i.e., the position and orientation of the alignment cradle 12 with respect to optic A is repeatable with an error less than 0.05 microns.
  • the alignment cradle 12 may be used to carry another optic - optic B and, as will be described below, where optic B is fixed to the alignment cradle 12, the position and orientation of optic A with respect to optic B may be repeatable within the predetermined value described above (i.e., 0.05 microns).
  • optic B (the spherical retroreflector) includes a sphere 78 and a hub 80 having a reflective cavity 82; however, optic B may be any suitable reflective device or apparatus having reflective properties.
  • optic B may be a flat or curved mirror.
  • retroreflectors also vary - e.g., while a spherical retroreflector is shown, other embodiments are also possible (e.g., a corner retroreflector).
  • the hub 80 may be any suitable device for carrying a mirror or reflector.
  • the hub 80 has a disk-shaped body 84 with the reflective cavity 82 on one side 88.
  • the reflective cavity 82 is illustrated as semi-spherical; however, other implementations are possible.
  • the diameter (DH) of the hub body 84 may be greater than the inner diameter of the alignment cradle 12 (i.e., 2*3 ⁇ 4) and less than the diameter of the counterbore 40 (i.e., 2*[3 ⁇ 4 + Rc]).
  • a second side 90 of the body 84 i.e., opposite of the reflective cavity 82
  • both the second side 90 and counterbore surface 42 are generally flat.
  • FIG. 1 further illustrates a positioning stage 96 carried by a test stand or bench 98 and suitably coupled to the second side 90 of the hub body 84 for carrying optic B.
  • the positioning stage 96 may have up to six degrees of freedom (e.g., translation in the x-, y-, and z-directions as well as pitch, roll, and yaw). Adjustment of the positioning stage 96 may be incremental - e.g., having coarse and fine adjustment knobs (not shown); further the stage 96 may be motorized or manually operated.
  • the stage 96 may include one or more nano-positioning devices, which may include piezo-electric elements. Positioning stages are known to artisans of ordinary skill in the art.
  • Optic C may be any optic for conveying or transmitting light into optic A.
  • optic C may be an active device (e.g., a laser) or a passive device (e.g., a prism or one or more lenses).
  • optic C is an objective lens receiving light from a source (not shown) and redirecting that light into optic A.
  • Optic B may be initially aligned with optic A, and thereafter optic B may be fixedly assembled to the cradle 12 so that when the cradle 12/optic B are displaced from optic A, they may thereafter be re-located proximate to one another without re- performing alignment.
  • the cradle 12/optic B are displaced, the spherical locators 20 are decoupled from the pockets 70 and the magnets 22 are decoupled from the magnetically responsive regions 72.
  • the spherical locators 20 are recoupled to the pockets 70 and the magnets 22 are recoupled to the magnetically responsive regions 72 - and the precision of the alignment is within a predetermined value (e.g., 0.05 microns).
  • the method includes placing a bonding agent 100 on the counterbore surface 42 of the cradle 12, and then locating optic B (e.g., the spherical retroreflector) within the alignment cradle 12; more specifically, by locating the hub 80 within the counterbore 40 such that the second surface 90 of the hub 80 is in contact with the bonding agent 100 and the counterbore surface 42. This may require coarse adjustment of the positioning stage 96 (or may simply be performed manually). Thus, prior to the bonding agent 100 setting, optic B may be movably carried by the cradle 12. Since the body 84 of the hub 80 is smaller than the counterbore 40 of the cradle 12, the hub 80 will be movable having some play or leeway.
  • optic B e.g., the spherical retroreflector
  • the amount of play will at least partially depend on the diameter (DH) of the hub body 84 and the diameter of the counterbore 40 (2*[Ri + Rc]). In at least one embodiment there will be only lateral play not exceeding 5 millimeters (mm).
  • the bonding agent 100 may be located near the periphery of the second side 90 of the hub body 84.
  • the cradle 12 may be mounted or located proximate to optic A using the alignment interface 10 (i.e., the spherical locators 20, pockets 70, magnets 22, and magnetically responsive regions 72). This may locate the sphere 78 and/or the reflective cavity 82 at least partially within the interior of the optic A's passage 52. More specifically, the sphere 78 may be generally proximate to a focal point ( ) of optic A (e.g., the focal point of the elliptical mirror).
  • the alignment interface 10 i.e., the spherical locators 20, pockets 70, magnets 22, and magnetically responsive regions 72. This may locate the sphere 78 and/or the reflective cavity 82 at least partially within the interior of the optic A's passage 52. More specifically, the sphere 78 may be generally proximate to a focal point ( ) of optic A (e.g., the focal point of the elliptical mirror).
  • optic B may be further aligned to an alignment position by moving the hub 80 carrying the sphere 78 and the reflective cavity 82 with respect to the cradle 12. More specifically, in the illustrated example, the hub 80 may be moved until the center of the sphere 78 is located coincident with the focal point ( ) of optic A. This movement may be facilitated using the fine adjustments of the positioning stage 96.
  • Achieving a co-location of the center of the sphere 78 and the focal point ( ) of optic A may include moving the hub 80 until incident light received from optic C (e.g., the objective lens) onto optic B is coincident with or overlaps with the light reflected from optic B (e.g., light entering the sphere 78 overlaps light exiting the glass sphere 78). Once the incident light overlaps the reflected light, initial alignment is complete.
  • optic C e.g., the objective lens
  • the bonding agent 100 may be permitted to set and/or cure.
  • the bonding agent 100 is an adhesive
  • the aforementioned initial alignment may be performed while the adhesive is unset or during its working time.
  • the working time of adhesives will vary; in at least one implementation, the adhesive may have a working time up to 60 minutes.
  • One commercially available adhesive having such working time is LoctiteTM 907 Hysol.
  • Other suitable adhesives will be apparent to those having ordinary skill in the art.
  • other bonding agents are also possible (e.g., soldering, welding, fastening, etc.).
  • the cradle 12 fixedly carries optic B, and the realignment of optics A and B is simplified by merely recoupling the mounting surface 14 of the cradle 12 to mounting surface 16 of optic A. This process of decoupling and recoupling may be repeated as often as necessary. Further, the alignment of optics A and B will be within 0.05 microns.
  • either of the spherical locators 20 or the pockets 70 may be located on optic A, optic B, or both.
  • either of the magnets 22 or magnetically responsive regions 72 may be located on optic A, optic B, or both.
  • either optic A or optic B substantially could be composed of a ferrous material.
  • one spherical locator 20 may be located on the cradle 12 while two spherical locators 20 may be located on the mounting surface 16 of optic A.
  • one magnet 22 may be located on the cradle 12 while two magnets 22 may be located on the mounting surface 16 of optic A.
  • any combination or other suitable variation of these embodiments are possible.
  • the alignment interface 10 further is not limited to three spherical locators 20, three pockets 70, three magnets 22, and three magnetically responsive regions 72.
  • the alignment interface 10 may have any suitable number of any of these features.
  • other suitable features may be included with one or more spherical locators 20 (and pockets 70) and/or one or more magnets 22 (and regions 72).
  • the alignment interface 10 does not have magnets 22 and/or magnetically responsive regions 72.
  • each pocket 70 may have different locator 76 arrangements.
  • the shape of the pocket may differ having a main bore 102 and having two lobes 104 each carrying a locator 76 extending from both sides of the main bore 102.
  • each pocket 70 may have three or four locator located therein.
  • the pockets 70 may have other fiducial surfaces or members located therein.
  • the optic A, optic B, and cradle 12 are all shown having the same center or longitudinal axis L; however, this is not required either.
  • the alignment process described above may be successfully achieved where the cradle 12 is not coaxial with optic A.
  • optic A and/or optic C may be moved rather than only optic B.
  • one or more of the optics A, B, or C may be moved or adjusted until the incident light at optic B and reflected light from optic B overlap.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

On décrit un système d'alignement optique qui comprend une monture et un berceau d'alignement. La monture est située sur une première optique, et le berceau d'alignement peut être couplé à la monture. Le berceau comprend au moins un dispositif de positionnement sphérique ou au moins une cavité pilote pour recevoir au moins un dispositif de positionnement sphérique.
PCT/US2014/053139 2013-08-29 2014-08-28 Interface d'alignement optique Ceased WO2015031602A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361871591P 2013-08-29 2013-08-29
US61/871,591 2013-08-29

Publications (1)

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WO2015031602A1 true WO2015031602A1 (fr) 2015-03-05

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PCT/US2014/053139 Ceased WO2015031602A1 (fr) 2013-08-29 2014-08-28 Interface d'alignement optique

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
WO2016100578A2 (fr) 2014-12-16 2016-06-23 Micurx Pharmaceuticals, Inc. Polymyxines antimicrobiennes pour le traitement d'infections bactériennes
CN106908961A (zh) * 2017-04-24 2017-06-30 上海航天控制技术研究所 基于红外成像的光学组件调试方法及工具
WO2026018007A1 (fr) * 2024-07-19 2026-01-22 Bae Systems Plc Ensemble de montage

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US5194993A (en) * 1991-09-24 1993-03-16 Eastman Kodak Company Adjustable mount for cylindrical lens
US5555134A (en) * 1995-02-27 1996-09-10 Hughes Electronics Refractive lens cradle
US6327038B1 (en) * 1999-09-21 2001-12-04 Ut-Battelle, Llc Linear and angular retroreflecting interferometric alignment target
US20020018113A1 (en) * 1998-07-01 2002-02-14 Koh Byeong-Cheon Scanning unit of laser printer and magnetic bearing apparatus therein
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US20040263790A1 (en) * 2001-08-30 2004-12-30 Vanoverloop Ronald R Apparatus and methods for mounting and aligning the optical elements of a projection image display system
US20060007562A1 (en) * 2004-07-12 2006-01-12 Willey Charles D Mounting/adjusting mechanism for vision enhancement system
US20060096108A1 (en) * 2002-02-14 2006-05-11 Simon Raab Portable coordinate measurement machine
US7606608B2 (en) * 2000-05-02 2009-10-20 Sensys Medical, Inc. Optical sampling interface system for in-vivo measurement of tissue

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Publication number Priority date Publication date Assignee Title
US4408830A (en) * 1981-03-02 1983-10-11 The United States Of America As Represented By The Secretary Of The Navy Multidirectional translator mechanism
US5194993A (en) * 1991-09-24 1993-03-16 Eastman Kodak Company Adjustable mount for cylindrical lens
US5555134A (en) * 1995-02-27 1996-09-10 Hughes Electronics Refractive lens cradle
US20020018113A1 (en) * 1998-07-01 2002-02-14 Koh Byeong-Cheon Scanning unit of laser printer and magnetic bearing apparatus therein
US6327038B1 (en) * 1999-09-21 2001-12-04 Ut-Battelle, Llc Linear and angular retroreflecting interferometric alignment target
US7606608B2 (en) * 2000-05-02 2009-10-20 Sensys Medical, Inc. Optical sampling interface system for in-vivo measurement of tissue
US6556280B1 (en) * 2000-09-19 2003-04-29 Optical Switch Corporation Period reconfiguration and closed loop calibration of an interference lithography patterning system and method of operation
US20040263790A1 (en) * 2001-08-30 2004-12-30 Vanoverloop Ronald R Apparatus and methods for mounting and aligning the optical elements of a projection image display system
US20060096108A1 (en) * 2002-02-14 2006-05-11 Simon Raab Portable coordinate measurement machine
US20060007562A1 (en) * 2004-07-12 2006-01-12 Willey Charles D Mounting/adjusting mechanism for vision enhancement system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016100578A2 (fr) 2014-12-16 2016-06-23 Micurx Pharmaceuticals, Inc. Polymyxines antimicrobiennes pour le traitement d'infections bactériennes
CN106908961A (zh) * 2017-04-24 2017-06-30 上海航天控制技术研究所 基于红外成像的光学组件调试方法及工具
CN106908961B (zh) * 2017-04-24 2019-05-03 上海航天控制技术研究所 基于红外成像的光学组件调试方法及工具
WO2026018007A1 (fr) * 2024-07-19 2026-01-22 Bae Systems Plc Ensemble de montage

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