WO2015106732A1 - Capteur magnétostrictif pour la mesure d'une distance ou d'une position - Google Patents

Capteur magnétostrictif pour la mesure d'une distance ou d'une position Download PDF

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Publication number
WO2015106732A1
WO2015106732A1 PCT/DE2014/000011 DE2014000011W WO2015106732A1 WO 2015106732 A1 WO2015106732 A1 WO 2015106732A1 DE 2014000011 W DE2014000011 W DE 2014000011W WO 2015106732 A1 WO2015106732 A1 WO 2015106732A1
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WO
WIPO (PCT)
Prior art keywords
fiber
magnetostrictive
measuring
sensor according
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2014/000011
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German (de)
English (en)
Inventor
Heiko Mahr
Josef ALBANO
Michael Warber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balluff GmbH
Original Assignee
Balluff GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balluff GmbH filed Critical Balluff GmbH
Priority to PCT/DE2014/000011 priority Critical patent/WO2015106732A1/fr
Priority to DE112014006216.2T priority patent/DE112014006216B4/de
Publication of WO2015106732A1 publication Critical patent/WO2015106732A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35303—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
    • G01D5/3538—Optical fibre sensor using a particular arrangement of the optical fibre itself using a particular type of fiber, e.g. fibre with several cores, PANDA fiber, fiber with an elliptic core or the like

Definitions

  • Magnetostrictive sensor for distance or position measurement
  • the invention is based on a magnetostrictive sensor according to the preamble of the independent claims.
  • US Pat. No. 3,898,555 A discloses a position measuring device comprising an electrical waveguide (i.e., waveguide) having magnetostrictive properties.
  • the waveguide is acted upon by current pulses which lead to a magnetic field whose field lines run concentrically in the waveguide and surround it concentrically on the outside. Adjacent to the waveguide is a
  • slidable permanent magnet provided whose poles are arranged such that the magnet is a localized, extending mainly in the axial direction within the waveguide magnetic field
  • the permanent magnet is arranged on the object whose position or movement is to be measured.
  • Damping element arranged, which absorbs the sound wave impinging there and prevents reflection.
  • a wave detection device is arranged, which detects the vibration of the waveguide and converts it into signals.
  • the signals are fed to a signal evaluation arrangement, which determines the position of the permanent magnet and the associated object from the transit time of the shaft.
  • the wave detection is realized as a magnetic coil.
  • the magnetic coil surrounds the waveguide at one end over a short distance, while at the other end the damping element is again arranged.
  • the auxiliary permanent magnet is replaced by an always existing magnetic field of the waveguide, which can be referred to as remanent magnetic field.
  • the short-term change of the (remanence) magnetic field induces a measuring voltage in the magnetic coil.
  • Permanent magnet is again determined from the transit time of the wave in the waveguide, which is between the occurrence of the current pulse and the occurrence of the measuring voltage.
  • Applicant's previously published DE 10 2010 008 495 A1 also discloses a method for measuring the position of an object, in which a magnet associated with the object is moved along a magnetostrictive waveguide, whereby the magnet causes a first magnetic field component in a field region in the waveguide.
  • a current signal is provided with a current pulse which causes a current magnetic field in the waveguide, which has at least one field component in the waveguide, which caused by the magnet
  • the transit time of a mechanical shaft is used to determine the position of the position sensor.
  • the wave is created by superposition of a magnetic field from the current pulse with the magnetic field of the position sensor.
  • Signal detection has a decisive influence on the measuring accuracy.
  • a coil is used for this purpose in which the mechanical shaft induces a voltage twice.
  • the mechanical shaft is reflected after passing through the coil and then generates a voltage for the second time.
  • the two signals can be added so that an optimum useful signal, in particular an approximately twice as large useful signal arises.
  • a characteristic size of the signal for example a zero crossing, is evaluated.
  • Nanosecond range are evaluated, which corresponds to a measurement accuracy of a few m. Furthermore, from US 2007/0014506 A1 a fiber optic
  • Position measuring system which comprises a magnetic element and one or more segments of magnetostrictive material.
  • Fiber optics include a fiber Bragg grating. This measuring system detects changes in the relative position between a magnetic field source and one of said segments. The local measuring principle is based on
  • the fiber optic disclosed therein has more than one lattice constant.
  • the determination of position data by means of the relatively complex interferometric method described briefly takes place. Since the measuring section is not formed continuously but segmented, the
  • the measurement length accessible for the measurement is limited by the resolution of said interferometer.
  • US Pat. No. 6,433,543 B1 discloses a magnetostrictive magnetic sensor, in which a first glass fiber is attached to a
  • Bending beam is arranged and a second fiber from the first
  • Glass fiber is arranged spaced. Light is introduced into the first fiber.
  • the second optical fiber has means for detecting the end of the first optical fiber by optical coupling to the end of the second optical fiber
  • Magnetic field is, and therefore allows the determination of the size of the external magnetic field. Disclosure of the invention
  • the invention has for its object to provide a generic magnetostrictive sensor, which eliminates the disadvantages of the prior art described.
  • the invention is based on the idea of further developing a sensor based on a fiber optic technology having at least one optical fiber.
  • the senor according to the invention has a Bragg grating known per se, by means of which distance or position measurements are made possible by the interaction of the Bragg grating with the described principle of magnetostriction.
  • the at least one optical fiber can be formed by one or more individual fibers.
  • the use of such an optical fiber has the advantage that a flexible arrangement or laying of the
  • Measuring section is made possible.
  • the measuring method on which the invention is based measures the distance continuously and not only periodically. Magnetostrictive systems known in the prior art can only measure periodically, in particular due to the current impulse excitation.
  • the better damping compared to sound waves at the end face of an optical fiber allows a higher useful length than ultrasound-based displacement sensors and thus long measuring distances of eg greater than 7 m. Also, with a light guide, ultrasonic noise due to reflections decreases.
  • the measuring method does not generate a mechanical wave but is based on optical reflections taking place in the optical measuring section. Optical reflections can be significantly improve reflective coatings or by chamfering the fiber. In addition, optical reflections can be better damped by corresponding damping elements than mechanical waves.
  • the space to be provided for damping at the end of the measuring section is significantly reduced in optical fiber systems compared to mechanical ones
  • the proposed fiber optics especially in view of the relatively small number of electrical components, allows the use in an industrial environment, in particular under chemically or physically particularly aggressive or even potentially explosive environments.
  • the elimination of an electrical excitation also offers a higher E MV stability (electromagnetic compatibility) along the entire measuring path.
  • the optical fiber is provided with a continuous lattice constant grating lattice and then coated in a manner known per se with a magnetostrictive envelope or surrounded by such a sheath, e.g. by means of an adhesive bond, Schrumpf′′. Press connection, or by overmolding, remelting, threading, pressing, coating or doping.
  • a magnetostrictive envelope or surrounded by such a sheath e.g. by means of an adhesive bond, Schrumpf′′. Press connection, or by overmolding, remelting, threading, pressing, coating or doping.
  • magnetostrictive wrapping is not important, but it must be ensured that it is a non-positive connection, which mechanically takes place in the envelope held expansions or compressions on the fiber.
  • a suitable material for said enclosure is e.g. a
  • magnetostrictive polyethylene (PE) layer The exact material is not relevant to the invention, however, it is advantageous if the magnetostrictive material as similar or coincident mechanical properties such as the material of the fiber optic, in particular with respect to the bending flexibility, on the elongation over the temperature and on the material expansion over the temperature. Therefore, all magnetostrictive acting (MR) materials such as
  • Plastics, ceramics, magnetostrictive glasses or doped optical fibers suitable for the envelope are plastics, ceramics, magnetostrictive glasses or doped optical fibers suitable for the envelope.
  • the elongated extent of the magnetostrictive envelope along the optical fiber defines the actual measurement range, i. the area within which the magnetostrictive sensor is sensitive.
  • Light source a time-varying frequency modulated light signal is introduced or fed into the optical fiber.
  • the same light signal is e.g. fed by means of a splitter in a not provided with such a magnetostrictive envelope optical reference fiber or fed directly to the receiver, wherein the two signals from the reference path and the reflection from the measuring fiber are fed to a receiver.
  • the two exiting signals are superimposed and therefore give a modulated signal.
  • an optical component is provided, which combines the two exiting signals, or the two signals are fed directly to the receiver, which is connected to both optical fibers in a light-conducting or light-tight manner. The latter is made possible in particular by the small thickness of a single fiber.
  • the signals emerging from the first fiber and the reference fiber may also be separate
  • the light signal fed into the two fibers is preferably infrared (IR) liquid.
  • IR infrared
  • Fiber measuring technology is common wavelength and many standard components are available in this area.
  • the sensor according to the invention can in principle be realized with any wavelength of light
  • the feeding of said light signals and the detection of the two exiting light signals or the said modulated signal is preferably carried out by means of the known measuring principle of the modulated (FMCW) continuous wave radar.
  • FMCW modulated
  • the advantage of the FMCW method in comparison with normal magnetostrictive methods with mechanical waves is in particular that due to the sampling in the MHz to GHz range as well as due to the insensitivity to optical
  • a third optical fiber which is preferably arranged along the measuring section and which, like the reference fiber, is likewise not provided with a magnetostrictive envelope but is mirrored at its free end, can be provided.
  • this third fiber e.g. Variations in the thermal expansion of the measuring path caused by changing environmental conditions are detected and compensated by suitable measures, e.g. the length of the reference fiber is determined using the same method, and then the length extension of the measuring fiber is compensated for electronically or mathematically.
  • the sensor according to the invention has in comparison to the prior art, a Bragg grating, whereby the size of the by magnetostriction
  • the measurement resolution can be freely adapted to the measurement length, since the chirp frequency can be adapted to the position of the magnet or the application.
  • Said chirp frequency refers to a signal whose frequency changes over time, distinguishing between positive chirps, in which the frequency increases in time, and negative chirps, which have a frequency decrease.
  • the sensor according to the invention is preferably suitable for a position or displacement transducer for detecting the position of a magnetic
  • the senor can detect internal or external mechanical stresses or deflections of a body.
  • the sensor is in principle also suitable for detecting changes in temperature or pressure.
  • the very small cross-section and the great mechanical flexibility of the optical fibers used make it possible to use them in curved measuring sections or environments and to lay the measuring path in a mechanically and optically difficult or impossible area, e.g. in the interior of a
  • opaque cylinder e.g. for detecting the longitudinal position of a magnet in such a cylinder.
  • Figure 1 shows a glass fiber with a Bragg grating according to the prior art
  • Figures 2a-c show in a glass fiber according to Figure 1 resulting signal waveforms
  • Figure 3 shows a preferred embodiment of a
  • Figures 4a-e show in a sensor according to the invention according to Figure 3 resulting signal waveforms.
  • the optical waveguide (in this case a conventional glass fiber or POF) shown in FIG. 1 comprises, as is known, a cladding 100, a core 105 and an outer coating (not shown).
  • Bragg grating in which the so-called “Bragg reflection” takes place.
  • the Bragg grating corresponds to a periodic modulation of the refractive index and therefore influences a continuous signal such as an interference filter with a filter bandwidth ⁇ ⁇ (see FIG. 2).
  • Said periodic modulation of the refractive index n, with high and low refractive index ranges, causes the light of a certain wavelength to be reflected back according to a band-stop filter.
  • the center wavelength of the filter bandwidth in a monomode fiber is given by the following Bragg condition:
  • n 2 and n 3 are the effective refractive indices of the core of the optical fiber and ⁇ the grating period.
  • the spectral width of the band depends on the length of the fiber Bragg grating and the strength of the
  • Refractive index change between the adjacent refractive index ranges.
  • the infrared light 115 propagating in the glass fiber are reflected 120 at the Bragg grating 110.
  • the wavelength of the reflected light 120 depends in particular on the elongation of the glass fiber, i. of the
  • the wavelength of the filter bandwidth ⁇ shifts by ⁇ with the temperature 7 and the relative elongation e of the glass fiber:
  • the elongation of the fiber is made up of the proportion of the outside
  • a described fiber Bragg grating can resolve compressive forces of several bar and temperature changes of 100 K.
  • FIGS. 2a to 2c show a fiber according to FIG.
  • the light output P is plotted against the wavelength ⁇ .
  • the individual values of the light output are the input power P E corresponding to the input signal 115 in FIG. 1, the output power P R of the reflected signal 120, and the output power P D of the signal 125 exiting the optical fiber 100, 105.
  • the power P E of the input signal has a relatively large bandwidth of wavelengths ⁇ . Due to the above-mentioned filter function of the Bragg grating 110 is a relative
  • FIG. 3 shows an optical fiber according to the invention, in the present case formed from an arrangement of at least two individual fibers 300, 342.
  • the individual fibers 300, 342 may be glass fibers, plastic (polymer) fibers, or the like. Only the single fiber 300 has a Bragg grating 310 arranged in the respective fiber core 305 and is enveloped or coated with a magnetostrictive material 315.
  • Light signal 320 is fed to a splitter 325.
  • the splitter 325 is used to feed the input signal 320 into both the first measuring fiber 300 and the second reference fiber 342.
  • the signal fed into the measuring fiber 300 is fed to the signal current position of a magnetic object or measuring body 307 due to
  • magnetostrictive cladding 315 and in combination with the Bragg grating, and deflected by means of the beam splitter 325 so as to strike an optical receiver 370.
  • the optical elements shown here can also be dispensed with altogether if the measuring fiber and the reference fiber are arranged relatively close, e.g. are bundled so that the signals due to the small lateral offset are instantaneous, i. can be supplied to a receiver without the 90 ° deflection shown, or to be supplied to separate receivers and then to be electrically superimposed.
  • a third fiber can be provided, which is also fed via the identical input signal.
  • the third fiber also has a mirror finish at the end. Due to this mirroring the input signal is reflected back, whereby a change in length of the third fiber due to a
  • Temperature change in turn, known per se via the FMCW method can be determined. Based on the resulting value of the change in length, the sensor can be calibrated to a
  • the magnetostrictive envelope 315 is stretched or compressed by the magnetic field shown.
  • the magnetic measuring body 307 is formed in the present embodiment by a permanent magnet, but can also be realized by an electromagnet or the like, since it does not depend on the type of generating the magnetic field.
  • the position of the measuring body 307 in the longitudinal direction of the measuring fiber 300 and the reference fiber 342 corresponds to the position to be detected of the present sensor.
  • the path traveled by the magnetic measuring body along the length of the fibers can be detected.
  • a temperature change, a mechanical stress or
  • the sheath of the measuring fiber 300 is correspondingly stretched or compressed by the magnetostrictive effect. This deformation causes due to the Bragg grating 310 an intrinsic influence on the coupled-in light spectrum, which in turn a
  • FIGS. 4a-4e The measuring principle on which the invention is based is illustrated below with reference to the signal curves shown in FIGS. 4a-4e.
  • a typical frequency response i. shown in the embodiment shown a sawtooth with constant pitch.
  • FIG. 4b as a further exemplary embodiment of the aforementioned frequency characteristic, a triangular function with a constant gradient is shown.
  • FIG. 4c shows a typical transmission signal, in the present case an amplitude characteristic with the named sawtooth frequency response.
  • FIG. 4d shows a typical receiver signal 400, which results from the incoherent superimposition of the measurement signal 405 and the reference signal 410.
  • the frequency of the beat i. the envelope shown, are determined.
  • FIG. 4e illustrates how twice as large a distance as compared to FIG. 4a is twice as large
  • the Beating frequency of the receiver signal 415 The elongation or compression of the measuring fiber 300 caused by the magnetic measuring body 307 caused by the magnetic measuring body 307 at the location of the magnetic influencing, ie in the area of the mentioned measuring section, causes an intensified reflection of the coupled-in light signal due to the corresponding distortion of the Bragg grating.
  • This reflected light is supplied to the aforementioned optical receiver 370.
  • the light reflected from the reference fiber 342 is supplied to the receiver 370.
  • the light components of the measuring fiber 300 and the reference fiber 342 are superimposed incoherently or coherently, resulting in a correspondingly modulated signal.
  • the light signals from the measuring fiber and the reference fiber as already described, can be supplied to separate receivers and then subsequently be electrically superimposed.
  • the feeding of said light signals and the corresponding detection of the light signals emerging from the fibers 300, 342 and the said modulated signal by means of the known measuring principle of the modulated (FMCW) continuous wave radar takes place.
  • a radar signal is emitted with a constantly changing frequency. The frequency increases either linearly to drop abruptly at a certain value back to the initial value (sawtooth pattern), according to the waveform shown in Figure 4a, or it rises and falls alternately at a constant
  • Waveform By linear change of the frequency and by continuous transmission, it is possible, in addition to the differential speed between transmitter and object in particular to determine their absolute distance from each other. The exact position of the generated reflection can be over the
  • Determination of the beat frequency (envelope) can be determined, as can be seen from the waveform in Figure 4d. At twice as big

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Capteur magnétostrictif pour la mesure d'une distance ou d'une position, qui comporte au moins une fibre optique (300, 305) pourvue d'une gaine magnétostrictive (315), à l'aide de laquelle la position d'un objet magnétique (307) peut être détectée dans la direction de la fibre optique (300, 305). Selon l'invention, ladite fibre optique (300, 305) comporte un réseau de Bragg (310) dont la constante de réseau peut être modifiée par l'action mécanique de l'effet magnétostrictif, produit par l'objet magnétique (307), de la gaine magnétostrictive (315).
PCT/DE2014/000011 2014-01-20 2014-01-20 Capteur magnétostrictif pour la mesure d'une distance ou d'une position Ceased WO2015106732A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/DE2014/000011 WO2015106732A1 (fr) 2014-01-20 2014-01-20 Capteur magnétostrictif pour la mesure d'une distance ou d'une position
DE112014006216.2T DE112014006216B4 (de) 2014-01-20 2014-01-20 Magnetostriktiver Sensor zur Entfernungs- bzw. Positionsmessung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2014/000011 WO2015106732A1 (fr) 2014-01-20 2014-01-20 Capteur magnétostrictif pour la mesure d'une distance ou d'une position

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2541896A (en) * 2015-09-01 2017-03-08 Airbus Operations Ltd Position sensing
RU2674574C2 (ru) * 2016-06-01 2018-12-11 Общество с ограниченной ответственностью "Современные технологии" Цифровой волоконно-оптический датчик перемещения

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898555A (en) 1973-12-19 1975-08-05 Tempo Instr Inc Linear distance measuring device using a moveable magnet interacting with a sonic waveguide
EP1020734A2 (fr) * 1999-01-15 2000-07-19 Biosense, Inc. Capteur de position optique
US6433543B1 (en) 2002-01-04 2002-08-13 Mohsen Shahinpoor Smart fiber optic magnetometer
WO2006123103A1 (fr) * 2005-05-17 2006-11-23 Petróleo Brasileiro Sa - Petrobras Transducteur de position a fibre optique avec materiau magnetostrictif et procede d'etalonage de position
DE102010008495A1 (de) 2010-02-18 2011-08-18 BALLUFF GmbH, 73765 Verfahren zur Positionsmessung und Positions-Messvorrichtung
WO2013083192A1 (fr) * 2011-12-07 2013-06-13 Aktiebolaget Skf Codeur d'angle optique

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011050717B4 (de) * 2011-05-30 2018-12-27 BAM Bundesanstalt für Materialforschung und -prüfung Messsystem und Verfahren zum Validieren eines faseroptischen Sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898555A (en) 1973-12-19 1975-08-05 Tempo Instr Inc Linear distance measuring device using a moveable magnet interacting with a sonic waveguide
EP1020734A2 (fr) * 1999-01-15 2000-07-19 Biosense, Inc. Capteur de position optique
US6433543B1 (en) 2002-01-04 2002-08-13 Mohsen Shahinpoor Smart fiber optic magnetometer
WO2006123103A1 (fr) * 2005-05-17 2006-11-23 Petróleo Brasileiro Sa - Petrobras Transducteur de position a fibre optique avec materiau magnetostrictif et procede d'etalonage de position
US20070014506A1 (en) 2005-05-17 2007-01-18 Petroleo Brasileiro S.A. - Petrobras Fiber optic position transducer with magnetostrictive material and position calibration process
DE102010008495A1 (de) 2010-02-18 2011-08-18 BALLUFF GmbH, 73765 Verfahren zur Positionsmessung und Positions-Messvorrichtung
WO2013083192A1 (fr) * 2011-12-07 2013-06-13 Aktiebolaget Skf Codeur d'angle optique

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2541896A (en) * 2015-09-01 2017-03-08 Airbus Operations Ltd Position sensing
US10220956B2 (en) 2015-09-01 2019-03-05 Airbus Operations Limited Position sensing
RU2674574C2 (ru) * 2016-06-01 2018-12-11 Общество с ограниченной ответственностью "Современные технологии" Цифровой волоконно-оптический датчик перемещения

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DE112014006216A5 (de) 2016-09-29

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