WO2015139689A1 - Chambre à vide munie d'un boîtier de protection - Google Patents

Chambre à vide munie d'un boîtier de protection Download PDF

Info

Publication number
WO2015139689A1
WO2015139689A1 PCT/DE2015/100110 DE2015100110W WO2015139689A1 WO 2015139689 A1 WO2015139689 A1 WO 2015139689A1 DE 2015100110 W DE2015100110 W DE 2015100110W WO 2015139689 A1 WO2015139689 A1 WO 2015139689A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
vacuum chamber
protective
protective housing
chamber according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2015/100110
Other languages
German (de)
English (en)
Inventor
Stefan Jakobs
Uwe Reisgen
Simon Olschok
Stefan Klein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rheinisch Westlische Technische Hochschuke RWTH
Original Assignee
Rheinisch Westlische Technische Hochschuke RWTH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=53040329&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2015139689(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rheinisch Westlische Technische Hochschuke RWTH filed Critical Rheinisch Westlische Technische Hochschuke RWTH
Publication of WO2015139689A1 publication Critical patent/WO2015139689A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow-control means
    • B23K26/1438—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow-control means for directional control

Definitions

  • the invention relates to a vacuum chamber with a protective housing having the features of the preamble of claim 1.
  • Such a vacuum chamber can be used to process one or more workpieces located therein. This can lead to process emissions of gaseous, liquid or solid type. Exemplary for the
  • Machining processes are welding, drilling, structuring or ablation with a laser beam or a particle beam, in particular an electron beam.
  • the term vacuum chamber here also includes a vacuum chamber.
  • An element to be protected may e.g. be an optical component, which should retain good reflective or transmissive properties over as long a period as possible.
  • the elements to be protected have to be maintained in a time-consuming manner, for example cleaned or exchanged, at short intervals of time.
  • sacrificial surfaces located between the place of origin of the process emissions and the element to be protected.
  • Such sacrificial surfaces may be rotatable, for example
  • the victim surfaces are consumables that can extend the time between laborious maintenance, but are generally used only once.
  • a vacuum chamber of the aforementioned type is known from WO 2013/092981 A2.
  • This publication discloses between an object to be machined and the element to be protected, there an optical component, a protective housing, and to inject by means of at least one nozzle in the protective housing a protective gas, which leaves the protective housing via a gas outlet and in a protective housing adjacent Interior region of the vacuum chamber occurs.
  • a protective gas flow is generated, which is generally oriented in the direction of the workpiece to be machined.
  • the process emissions through the gas outlet would have to work against the gas flow.
  • the gas stream is introduced laterally according to this prior art and accelerated due to the existing pressure gradient to the surrounding interior region of the vacuum chamber in the direction of the gas outlet opening.
  • gaseous process emissions can be effectively prevented in this way from entering the interior of the protective housing and from access to the element to be protected.
  • this opposite inert gas flow may be insufficient.
  • EP 0 618 037 B1 discloses an optical and environmental protection device for laser treatment methods, in which a protective housing is provided between the laser optics and a substrate to be processed, which is placed directly on the substrate. There is a lateral flow of protective gas across the
  • a vacuum chamber in addition to the protective housing is not disclosed.
  • US 2001/0040222 A1 discloses a processing apparatus using an electron beam, in which the electron beam is directed via an entrance window onto a workpiece located in a vacuum chamber.
  • a cooling block adjoining the inlet window is provided, through which a cooling liquid flows.
  • a flat jet of a cooling gas is directed directly to the inlet window. It is on it
  • this cooling gas jet can prevent adhesion of impurities formed in the vacuum chamber.
  • the flat jet is primarily used for cooling and for a related high efficiency directly on the
  • Entrance window is directed, he can not reliably prevent particles from the machining process, which have a sufficient impulse toward the window, achieve this.
  • a protective housing in the sense of the preamble of
  • Claim 1 is not provided in this embodiment. In further detail,
  • the vacuum chamber is subdivided into an antechamber and a process chamber, wherein the cooling gas is injected laterally into the prechamber.
  • JP 021333189 A is an apparatus for processing a in a
  • Vacuum chamber located workpiece by means of a laser beam, which passes through an entrance window into the chamber.
  • a protective housing as well
  • the nozzle arrangement injecting the protective gas into the protective housing is set up, with which at least one shielding gas jet is directed,
  • contiguous protective gas flat jet to produce wherein the inert gas flat jet is dimensioned and aligned so that when viewed from
  • the protective gas flat jet completely covers the element to be protected.
  • the volume flow of the protective gas flat jet is used for lateral deflection of ballistic splashes, which have made it because of their size and kinetic energy from their place of origin against the protective gas flow directed through the protective housing in the direction of the workpiece through the gas outlet opening to this point.
  • the protection system of nozzle assembly and protective housing can be easily adapted to the respective requirements.
  • a freedom from maintenance can be achieved for the protective housing and the nozzle arrangement, since - apart from optional additional protective elements - no wear or disposable parts are included.
  • the protective gas flat jet aligned transversely to an imaginary, extending between the center of the gas outlet opening of the protective housing and the center of the surface of the element to be protected extending connecting line become. It is advantageous if an angle of attack of the protective gas flat jet, which, for example, to a central plane of the protective gas flat jet to the imaginary
  • the width direction of the protective gas flat jet is preferably perpendicular to the connecting line.
  • the protective gas flat jet can in the height direction a
  • the protective gas flat jet is preferably oriented so that it runs parallel or at a shallow angle to the surface of the element to be protected.
  • the distance between the element to be protected and the protective gas flat jet is preferably at least 1.5 cm, more preferably at least 2 cm.
  • the distance between the element to be protected and a nozzle of the nozzle arrangement measured parallel to the longitudinal central axis of the protective housing or, for several nozzles, of the nozzle closest to the element to be protected can preferably be at least 1 cm, more preferably at least 1.5 cm, more preferably at least 2 cm.
  • Measuring point at the nozzle may be the center of the nozzle opening in the direction parallel to the longitudinal central axis of the protective housing. This will be the
  • the nozzle arrangement is preferably arranged directly on a wall of the protective housing in the interior of the protective housing, but may alternatively be integrated in the wall of the protective housing or penetrate it. The placement of the nozzle or the nozzle of the nozzle assembly limited / limited thereby
  • Circumferential direction of the protective housing wall seen on a portion of this wall preferably at most half, more preferably at most a quarter the circumference, so that with a suitable orientation of the nozzle (s) of the protective gas flat jet is directed, for example, in the direction of a nozzle assembly opposite wall or an opposite wall portion of the
  • Protective housing In a protective housing having at least one flat wall, e.g. in a protective housing with rectangular cross section, the
  • the nozzle arrangement may be formed so that the total gas outlet from the nozzle assembly is limited to at most half the circumference, preferably to a quarter of the circumference.
  • a with its nozzle orifice or nozzle orifices on more than half of the circumference of the protective housing wall or even evenly extending in the circumferential direction nozzle arrangement is thus excluded because they are not the
  • Rated pump power of the vacuum source can be provided in order to ensure the desired negative pressure in the vacuum chamber can.
  • the required low gas mass flow allows the use of a protective gas source, which provides the shielding gas at ambient pressure (about 1 bar absolute). Of course, higher pressures are possible. Due to the pressure difference to the working chamber pressure (Less than 1 bar absolute) is created by expansion in the protective housing a correspondingly high gas flow rate.
  • the type of shielding gas used can be selected depending on the specific application.
  • the protective gas may be a single gas or a gas mixture.
  • gases or gas mixtures listed from which the inert gas may consist or may contain the inert gas, eg typical shielding gases, such as those known from welding technology, eg noble gases or noble gas mixtures or C0 2 , but also active gases or gas mixtures, such as air, compressed air, 0 2 or chemically reactive gases, such as halogens, for example Cl or F, or metallurgically active gases, for example N 2 (for example as Austenitchanner or Kunststoff).
  • Nitration Nitration
  • CO for example for carburizing
  • Inert and active gases of all kinds can also be mixed if required.
  • the vacuum chamber according to the invention can also be designed so that means for generating a bypass gas stream from a further, used in addition to the protective gas or gas mixture and means for regulating the pressure in the vacuum chamber by means of the bypass gas stream are provided. To set a desired pressure in the vacuum chamber during the
  • the bypass stream with a low-cost gas or gas mixture e.g. Air, for example in the form of compressed air
  • a low-cost gas or gas mixture e.g. Air, for example in the form of compressed air
  • the gas or gas mixture is introduced through a separate inlet and sucked through the outlet of the vacuum chamber to the vacuum source.
  • the gas mass flow of the bypass flow can be regulated or controlled, while the gas mass flow of the inert gas can be adjusted independently thereof, preferably constant. This makes it possible to keep the cost of the usually more expensive protective gas low.
  • the protective housing it is advantageous to align the protective housing so that the direction from the element to be protected to the gas outlet or the longitudinal center axis of the protective housing is substantially parallel to the orientation of the gravitational field, so that the protective gas flow follows the gravity exiting the protective housing.
  • the protective gas flat jet can be dispensed with additional protection elements, such as another protective glass in front of the element to be protected.
  • protective element may be arranged in front of the protective gas flat jet. However, an arrangement behind the inert gas flat jet is preferred so that the additional protective element is already protected.
  • the nozzle arrangement can be at least one
  • the slot nozzles are so close to each other that they unite to form a common flat jet.
  • two or more slot nozzles of the same nozzle arrangement can be arranged directly below one another perpendicular to the width direction, namely in order to achieve a sufficient height of the protective gas flat jet.
  • the vacuum chamber according to the invention can also be designed so that the nozzle arrangement comprises at least one row of juxtaposed hole nozzles.
  • the hole nozzles are preferably arranged parallel to each other and on an imaginary line so close to each other that immediately after the escape of the protective gas from the hole nozzles, the individual protective gas jets to the Required coherent directed inert gas flat jet pool.
  • the cross section of the hole nozzles may be, for example, circular, oval or rectangular.
  • the total width is e.g. for a single slot nozzle, the width of the nozzle opening. With multiple nozzles juxtaposed in a row in the width direction, the total width is the distance between the outer boundaries of the outer nozzles.
  • the vacuum chamber according to the invention can also be designed so that in the protective housing of the nozzle assembly opposite a flow deflector is arranged.
  • This flow diverter directs the flow exiting the nozzle assembly toward the gas exit orifice so that the momentum of the inert gas or inert gas molecules is directed toward the gas exit orifice to effectively counteract process emissions
  • An element to be protected may e.g. a component which should retain good reflective or transmissive properties over as long a period as possible, e.g. a radiation passage element, for example in the form of an optical system or a feedthrough for the processing beam, a mirror system or a camera system.
  • the element to be protected may also be jet-forming, e.g. a lens.
  • An element to be protected can also be a subarea of such a component, namely if only this subarea is required for the process to be carried out, for example the subsection for the passage of the processing beam, e.g. an electromagnetic beam,
  • the element to be protected may be a sensor which is subject to increasing contamination, for example due to condensation or
  • sensors are radiation sensors, e.g. Geiger-Müller counter tubes, or sensors for detecting backscattered or transmitted electrons, e.g. as process sensors in the field of electron welding. In particular, in the latter application, it would be affected by a metal vapor-induced coating of the
  • the vacuum chamber according to the invention can be designed so that the electromagnetic radiation used is provided for processing a workpiece.
  • the vacuum chamber according to the invention may be designed so that the electromagnetic radiation used for observation, for example a
  • Observation can also be made inside the vacuum chamber, e.g. from the workpiece in the form of inherent radiation due to its heat.
  • the vacuum chamber according to the invention can also be designed so that the gas outlet opening is a variable aperture.
  • the variability may relate to the area of the gas outlet, e.g. in order to adapt the opening size to an alternating diameter of the machining beam, for example due to a change in the focal position, or to the volume flow of the protective gas or to change the viewing direction or the observable area.
  • the variability may also relate to the position of the gas outlet opening, e.g. to follow a possible pendulum movement of a machining beam.
  • the variability may also relate to the geometry of the gas outlet opening, e.g. to change from a circular shape to a slot shape or to
  • Change of vanes, the emerging from the protective housing Inert gas flow give a preferential flow direction. This can also be done, for example, to adapt to a pendulum motion of a machining beam.
  • the variability may also be any hybrid of at least two of the mutabilities described above.
  • the nozzle arrangement according to the invention can be designed such that at least one second nozzle arrangement is present, wherein the at least two nozzle arrangements are arranged one behind the other viewed in the direction from the element to be protected to the gas outlet opening of the protective housing. In this way, at least two separate shielding gas flat jets can be generated, which would have to pass particles to be deflected successively to get to the element to be protected.
  • Shielding gas flat jets in the associated center planes are not parallel to each other.
  • the center planes of the protective gas flat jets not parallel to each other, so the center planes and thus the inert gas flat jets are employed differently to the imaginary line connecting the required intersection of the projected flat-jet flows is given when the given perpendicular to the connecting line components of
  • Main flow directions of the two shielding gas flat jets are not parallel to each other.
  • the different orientation of at least two of the protective gas flat jets in particular has the advantage, when the respective inert gas flat jets each a flow deflector is provided without one in the direction of the
  • Gas outlet deflected flow seen in the direction of the deflected flow upper nozzle assembly substantially interferes with the flat jet of the lower nozzle assembly.
  • the angle of intersection between two shield gas jets, or the angle between two plane flow components is preferably 0 ° to +/- 90 °, wherein in each case all intermediate values of the angles, e.g. in 5 ° steps, are conceivable.
  • the vacuum chamber according to the invention can also be designed so that the position of the protective housing relative to a vacuum chamber boundary wall is variable. This makes it possible, in particular, to use the means for focusing the machining beam, e.g. a focusing lens to change in position and e.g. to move further into the interior of the vacuum chamber. This is particularly advantageous for larger vacuum chambers, since in this way e.g. the need for long focusing distances can be eliminated. In addition, a larger range of workpiece sizes or positions of the workpiece within the
  • Vacuum chamber allows, as the position of the protective housing can be adjusted without the optical parameters, e.g. Collimating distance, focus distance or imaging ratio to change. The change in the position of the
  • Protective housing can be done manually or by motor.
  • the vacuum chamber may be on a protective housing carrying
  • Feedthrough element e.g. a jet tube
  • a vacuum seal e.g. be sealed against the environment via one or more radial sealing rings or a stuffing box.
  • Load balancing system may be provided, for example by pneumatic cylinders, preferably rodless pneumatic cylinders, which can be acted upon, for example, when evacuating the chamber with appropriate pressure.
  • the load balancing system can also serve to support a motor drive, such as a linear drive in predicaments.
  • the vacuum chamber may be arranged so that a receiving space is provided which, viewed from the interior of the vacuum chamber represents a depression relative to the surrounding vacuum chamber boundary wall.
  • Receiving space and protective housing can be designed such that the front end of the protective housing can be partially or completely retracted into the receiving space.
  • the element to be protected can - as in the other embodiments - a beam-forming optics, e.g. be a focusing lens, or a separate one
  • Coupling window for electromagnetic radiation or particle radiation which is e.g. inexpensive and / or easily replaceable.
  • the supply of the protective gas to the protective housing for example, via the interior of the lead-through element and / or in the outer wall of the
  • the splash guard can be arranged so that it is moved in the case of a method of the protective housing at least on a portion of the travel together with the protective housing.
  • the processing beam can be passed through a mirror, preferably a partially transparent mirror, in the feedthrough element.
  • the mirror can be arranged and designed such that a parallel to the processing beam preferably coaxial observation of the processing is possible.
  • the mirror may also be controllable in its orientation in order to be able to influence the direction of the machining beam.
  • the mirror may also be a vibrating mirror to allow vibrational movement of the machining beam on the workpiece.
  • Fig. 1 a partial, a double chamber with protective housing in a first
  • 1 b a protective housing with protective gas flat jet in cross section
  • FIG. 4 shows a detail of a vacuum chamber with protective housing in a second embodiment
  • FIG. 5 shows a detail of a vacuum chamber with protective housing in a third embodiment
  • FIG. 6 shows a detail of a vacuum chamber with protective housing in a fourth embodiment
  • FIG. 7 shows a detail of a vacuum chamber with protective housing in a fifth embodiment
  • FIG. 8 shows a detail of a vacuum chamber with protective housing in a sixth embodiment
  • 9 shows an alternative embodiment of a nozzle arrangement with slot nozzle
  • Fig. 12 in cross section, the protective housing of FIG. 1 1 near an outer
  • Fig. 13 in cross section, the protective housing according to FIG. 1 1 in an inner
  • Fig. 1 a shows schematically a vacuum chamber, of which only an upper
  • Vacuum chamber boundary wall 1 can be seen.
  • a workpiece 2 is arranged, which is processed with a laser beam 3. Schematically, the process emissions 4 resulting from laser beam processing are shown.
  • the laser beam 3 enters through an inlet optics 5 in the vacuum chamber.
  • the entry optics 5 is fixed to the vacuum chamber boundary wall 1 via a fastening ring 6.
  • a protective housing 7, which has a e.g. cylindrical or rectangular cross-section, into the interior of the vacuum chamber inside. Seen from the workpiece 2, the protective housing 7 thus roofs the entrance optics 5, which represents an element to be protected.
  • the laser beam 3 passes through the protective housing 7 and leaves the protective housing 7 through an aperture 8.
  • a nozzle assembly 9 is connected via a
  • Fig. 1 b shows a protective housing 7 with a circular cross-section and cutout a nozzle assembly 9 with exiting protective gas flat jet 14, the lateral Borders are shown by a dashed line.
  • an entrance optics 5 is indicated for a laser beam, which is corresponding to FIG. 1 a at a distance above the protective gas flat jet 14.
  • the width and orientation of the shielding gas flat jet 14 is selected so that in a view from the Gausaustrittsö réelle not shown in Fig. 1 b (see 8 in Fig. 1 a) in the direction of the
  • Protective gas flat jet 14 alone covers the area of the entrance optics 5, which is needed for the transmitted radiation.
  • Fig. 2 shows an embodiment of the nozzle assembly 9, which has a slot nozzle 1 1, which extends from a protective gas feedthrough 12.
  • FIG. 3 An alternative embodiment of the nozzle arrangement 9 is shown in FIG. 3, according to which a multiplicity of hole nozzles 13 arranged in series is provided instead of a slot nozzle.
  • the hole nozzles are arranged so close to each other that the resulting
  • the nozzle assembly 9 is aligned in the protective housing 7 such that the
  • Shielding gas flat jet 14 is oriented transversely to the beam path of the laser beam 3.
  • the width of the protective gas flat jet 14 is sufficient to cover the entrance optics 5 in any case so far that process emissions 4, which in rectilinear movement of the aperture 8 in the direction of the required for the beam path of the laser radiation 3 region of the entrance optics 5 to to the height of the protective gas flat jet 14 have managed to be detected by the inert gas flat jet 14. This is ensured in any case with a suitable orientation of the nozzle assembly 9, when the width of the protective gas flat jet 14 already at the exit from the
  • Nozzle arrangement 9 corresponds to the extent of the beam path at the location of the entrance optics 5.
  • the width of the protective gas flat jet emerging from the nozzle assembly 9 corresponds to the given perpendicular to the outflow direction of the protective gas width b of the slot nozzle 1 1 (see Fig. 2) or in the case of the plurality in series
  • the distance between the outermost boundaries of the outer hole nozzles 13th In the vacuum chamber prevails due to a vacuum source, not shown, for example, a pumping station, a low pressure, so that the protective gas in the protective housing 7 is accelerated towards the aperture 8 and flows through this aperture 8 through into the interior of the vacuum chamber.
  • a vacuum source not shown, for example, a pumping station, a low pressure
  • Aperture 8 thus serves simultaneously as a gas outlet opening. Due to the flow of the protective gas through the aperture 8, gaseous particles of the process emission 4 do not or hardly get into the protective housing 7 or are entrained.
  • a flow deflector 15 (FIG. 1 a) arranged opposite the protective housing 7 of the nozzle arrangement 9, onto which the protective gas impinges, impacts the deflection of the flow in the direction of the diaphragm opening 8.
  • Fig. 4 shows a variant of the device according to the invention, in which compared to the embodiment of FIG. 1, only the shape of the protective housing 7 is changed.
  • the protective housing 7 has in its front region a tapered end piece 17, e.g. in conical form or in the form of a truncated pyramid. Because of the match, with respect to the other elements shown, the
  • Fig. 5 shows a further embodiment of the device according to the invention with a stepped end piece 18 of the protective housing 7, which, for example, cylindrical or may be rectangular in cross-section.
  • the flow deflector 15 is arranged in this case at the inner end of a step 19 in order to effect an effective flow diversion in the direction of the aperture 8 can.
  • Fig. 6 shows a further embodiment in which the protective housing 7 as in Fig. 4, a tapered end piece 17 has.
  • Fig. 4 is the
  • Inert gas supply line 10 is not guided by the upper vacuum chamber boundary wall 1, but by the entry optics 5 bearing mounting ring 6 and must not again penetrate the protective housing outer wall 16 in this way.
  • FIG. 7 shows a variant embodiment of the vacuum chamber according to the invention, in which a processing unit 20 is arranged within the vacuum chamber, of which only an upper boundary wall 1 and a lateral boundary wall 31 can be seen.
  • a laser beam 3 is used, which originates from a laser source, not shown here, arranged in the processing unit or by means of a laser supply, likewise not shown here, e.g. via glass fiber, is introduced.
  • the laser beam impinging on the workpiece 2 generates process emissions 4 there.
  • the processing unit 20 has exit optics 21, which are to be regarded as equivalent to the entry optics 5 in FIGS. 1 and 4 to 6.
  • the protective housing 7 protects the exit optics 21 from the influence of the process emissions 4 in the manner shown in FIGS. 1 and 4 to 6.
  • a protective gas over a protective gas over a
  • Nozzle arrangement 9 is introduced into the protective housing 7 in the form of a protective gas flat jet 14, which strikes an opposing flow deflector 15.
  • Fig. 8 shows an embodiment of the invention, by the
  • Boundary walls 1 and 31 schematically indicated vacuum chamber having an observation unit 22 in the interior instead of the processing unit 20 (FIG.
  • the observation unit 22 comprises an observation instrument, not separately shown here, for example a camera, to which the
  • Observation beam 23 is shown.
  • the observation beam path 23 passes through the observation optics 24. All other elements correspond to those of FIG. 7, for which reason reference is made to the description there.
  • the process emissions 4 are, according to the embodiment of FIG. 8, by a processing beam, not shown, which is a laser beam or a particle beam, e.g. an electron beam, can act, generates.
  • a processing beam not shown, which is a laser beam or a particle beam, e.g. an electron beam, can act, generates.
  • Shapes for example, those shown in Figs. 1 or 5, have.
  • An observation unit can also be arranged outside the vacuum chamber. This is not shown separately in the figures, but easily understood, if in Figs. 1 and 4 to 6 of the local laser beam 3 by a
  • Observation beam is replaced, which belongs to a not shown there and arranged outside the vacuum chamber observation unit.
  • a process in the vacuum chamber for example, a
  • Coating process such as a PVD coating
  • the observation may also relate to a processing of the workpiece 2 by a separate energy beam, for example laser beam or electron beam.
  • FIG. 9 shows in plan view a plate element 25 with nozzle arrangement 26, which is suitable for a protective housing, not shown in FIG. 9, with a circular cross section and comprises a slot nozzle 27.
  • the slot nozzle 27 is supplied with protective gas via a protective gas feedthrough 28 and a protective gas feed line 29.
  • the outlet of the slot nozzle 27 has the shape of a circular arc and is thus adapted in particular for a cylindrical or conical protective housing.
  • the plate assembly 25 may be, for example be fixed via mounting holes 30 to a vacuum chamber boundary wall, not shown here.
  • nozzle arrangement with a plurality of slot nozzles or with a
  • a plurality of hole nozzles may be formed so that the exit points for the protective gas follow a circular arc line or any other adapted to the circumferential course of a protective housing line.
  • FIG. 10 schematically shows a protective housing 32 in the direction of view
  • Fig. 1 1 shows schematically in cross-section detail a vacuum chamber in which a protective housing 57 relative to an upper vacuum chamber boundary wall 51 is changeable in position.
  • Vacuum chamber is a workpiece 52, which is acted upon by a laser beam 53.
  • the laser beam 53 originating from a source not shown is transmitted via a mirror 54 and via a feedthrough element
  • Beam guide tube 65 is directed to a focusing lens 66 which focuses the laser beam 53 on the surface of the workpiece 52.
  • the mirror 54 may, for. B. may be formed as a half mirror, which allows a coaxial to the laser beam 53 observation of the workpiece 52.
  • the mirror 54 may also be provided as a vibrating mirror with which the Beam direction of the laser beam 53 is variable.
  • the protective housing 57 connects, which tapers, for example, and the focused laser beam 53 surrounds.
  • an entrance optics 55 in the form of a window which does not form the laser beam 53, is arranged.
  • the entrance optics 55 are easily interchangeable fixed and protects the
  • Focusing lens 66 Focusing lens 66.
  • a shielding gas nozzle 61 is arranged, which generates a protective gas flat jet 62 which is injected perpendicular to the optical axis of the laser beam and completely covers this entry optics 55 when viewed from the focal point of the laser radiation 53 on the entrance optics 55.
  • a protective gas feed line 63 passes through the interior of the jet guide tube 65 in a partial section.
  • a receiving space 68 is provided, which is for receiving the protective housing 57 in an outer
  • the beam-guiding tube 65 is guided at the feedthrough block 67 in an axial guide 69, which is e.g. by a plain bearing, such as a Teflon bushing, or z. B. can be performed by a linear ball bearing.
  • a plain bearing such as a Teflon bushing
  • z. B. can be performed by a linear ball bearing.
  • vacuum seals 70 are provided, the z. B. are realized by radial sealing rings. For sealing and a single seal or seals, z. B. in the form of one or more stuffing boxes, be provided.
  • the vacuum seal 70 is at the beam guide tube 65, whose outer wall is preferably polished in the region of the sealing surface, the interior of the
  • a splash guard sleeve 71 is provided, which surrounds the beam guide tube 65 and with her
  • the splash guard 71 is completely absorbed by the receiving space 68.
  • the splash guard sleeve 71 has at its front end a circumferential driving ring 72 which is entrained by an outer ring 73 of the protective housing 67 in the process towards an inner end position (FIG. 13).
  • the outer ring 73 of the protective housing 57 engages in a non-positive or positive fit into the splash guard sleeve 71 in a manner not shown here and pulls it into the receiving space 68.
  • the protective housing 57 is shown near an outer end position, e.g. As soon as the splash guard sleeve 71 abuts against a rear inner wall 74 of the receiving space 68, the frictional connection or positive connection between the splash guard 71 and the outer ring 73 of the
  • Protective housing 57 overcome, so that the protective housing 57 can be completely retracted into the receiving space 68.
  • Fig. 13 shows the protective housing 57 in an inner end position for adaptation to a larger distance to the vacuum chamber boundary wall 51 positioned workpiece 52. Due to the change in position can on an adjustment of the
  • Focusing length of the processing beam 53 are omitted.
  • the splash guard sleeve 71 protrudes into the receiving space 68 and in this way reliably protects the outer wall of the jet guide tube 65 from particles from the processing of the
  • means for driving the beam-guiding tube 57 e.g. a motor-driven linear drive
  • means for compensating the force occurring due to the pressure difference between the interior of the vacuum chamber and the environment may comprise a load balancing system, e.g. by pneumatic cylinder, preferably rodless
  • Pneumatic cylinders e.g. when evacuating the vacuum chamber with
  • the load balancing system can also serve to support the aforementioned drive.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne une chambre à vide munie d'un boîtier de protection (7, 32), un élément à protéger étant disposé dans le boîtier de protection (7, 32) ou couvert par ledit boîtier de protection (7, 32), et d'un ensemble buse(s) (9, 26) destiné à produire au moins un jet de gaz protecteur orienté vers l'intérieur du boîtier de protection (7, 32), le boîtier de protection (7, 32) comportant un orifice de sortie de gaz (8) permettant au gaz protecteur de s'échapper vers une zone intérieure de la chambre à vide, adjacente au boîtier de protection (7, 32). Selon l'invention, l'ensemble buse(s) (9, 26) est conçu pour produire, avec ledit au moins un jet de gaz protecteur, un jet de gaz protecteur plat (14, 33, 34) continu orienté, ce jet plat (14, 33, 34) étant dimensionné et orienté de telle sorte que ledit jet de gaz protecteur plat (14, 33, 34) recouvre complètement l'élément à protéger lorsque l'on regarde en direction de l'élément à protéger depuis le centre de l'orifice de sortie de gaz (8) du boîtier de protection (7, 32).
PCT/DE2015/100110 2014-03-17 2015-03-17 Chambre à vide munie d'un boîtier de protection Ceased WO2015139689A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014103635.2A DE102014103635C5 (de) 2014-03-17 2014-03-17 Unterdruckkammer mit einem Schutzgehäuse
DE102014103635.2 2014-03-17

Publications (1)

Publication Number Publication Date
WO2015139689A1 true WO2015139689A1 (fr) 2015-09-24

Family

ID=53040329

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2015/100110 Ceased WO2015139689A1 (fr) 2014-03-17 2015-03-17 Chambre à vide munie d'un boîtier de protection

Country Status (2)

Country Link
DE (1) DE102014103635C5 (fr)
WO (1) WO2015139689A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106929847A (zh) * 2017-05-12 2017-07-07 温州大学 气氛保护组件及激光熔覆气氛保护装置
CN108971751A (zh) * 2017-06-01 2018-12-11 丰田自动车株式会社 激光焊接装置
DE102021123027A1 (de) 2021-09-06 2023-03-09 LaVa-X GmbH Laser-Bearbeitungsvorrichtung
CN116765642A (zh) * 2023-06-30 2023-09-19 大族激光科技产业集团股份有限公司 激光加工控制方法、装置、设备及存储介质

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021107422A1 (de) 2021-03-24 2022-09-29 Mogema BV Vorrichtung und Verfahren zum Schweißen
CN115971696A (zh) * 2021-10-14 2023-04-18 株式会社Lg新能源 焊接遮罩及焊接方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59223191A (ja) * 1983-06-03 1984-12-14 Mitsubishi Heavy Ind Ltd レ−ザ溶接装置
JPH02133189A (ja) 1988-11-10 1990-05-22 Mitsubishi Electric Corp ビーム加工方法
DE29518138U1 (de) 1995-11-15 1996-04-18 Brandstetter, Heinz Peter, Wien Lasergravier- und Schneidegerät
EP0618037B1 (fr) 1993-04-02 1997-06-04 International Business Machines Corporation Dispositif de protection de l'environnement et de l'optique pour des applications de traitement par faisceau laser
US5756962A (en) * 1994-08-02 1998-05-26 Mcneil - Ppc, Inc. Laser-processing head for laser processing apparatus
US20010040222A1 (en) 2000-05-12 2001-11-15 Ushio Denki Kabushiki Kaisya Electron beam processing device
WO2011145514A1 (fr) * 2010-05-18 2011-11-24 国立大学法人大阪大学 Dispositif de soudage au laser et procédé de soudage au laser
WO2013092981A2 (fr) 2011-12-21 2013-06-27 Forschungszentrum Jülich GmbH Procédé de protection de la surface d'un élément optique ainsi que dispositif de traitement de pièces

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03294081A (ja) * 1990-04-13 1991-12-25 Amada Co Ltd レーザ加工機のスパッタ除去装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59223191A (ja) * 1983-06-03 1984-12-14 Mitsubishi Heavy Ind Ltd レ−ザ溶接装置
JPH02133189A (ja) 1988-11-10 1990-05-22 Mitsubishi Electric Corp ビーム加工方法
EP0618037B1 (fr) 1993-04-02 1997-06-04 International Business Machines Corporation Dispositif de protection de l'environnement et de l'optique pour des applications de traitement par faisceau laser
US5756962A (en) * 1994-08-02 1998-05-26 Mcneil - Ppc, Inc. Laser-processing head for laser processing apparatus
DE29518138U1 (de) 1995-11-15 1996-04-18 Brandstetter, Heinz Peter, Wien Lasergravier- und Schneidegerät
US20010040222A1 (en) 2000-05-12 2001-11-15 Ushio Denki Kabushiki Kaisya Electron beam processing device
WO2011145514A1 (fr) * 2010-05-18 2011-11-24 国立大学法人大阪大学 Dispositif de soudage au laser et procédé de soudage au laser
WO2013092981A2 (fr) 2011-12-21 2013-06-27 Forschungszentrum Jülich GmbH Procédé de protection de la surface d'un élément optique ainsi que dispositif de traitement de pièces

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ONO M ET AL: "EFFECT OF AMBIENT PRESSURE AND GAS ON PENETRATION DEPTH AND LASER-INDUCED PLASMA BEHAVIOUR - STUDY ON CO2 LASER WELDING PHENOMENA", WELDING INTERNATIONAL, TAYLOR & FRANCIS, ABINGDON, GB, vol. 7, no. 1, 1 January 1993 (1993-01-01), pages 15 - 20, XP000332041, ISSN: 0950-7116 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106929847A (zh) * 2017-05-12 2017-07-07 温州大学 气氛保护组件及激光熔覆气氛保护装置
CN106929847B (zh) * 2017-05-12 2022-11-25 温州大学 气氛保护组件及激光熔覆气氛保护装置
CN108971751A (zh) * 2017-06-01 2018-12-11 丰田自动车株式会社 激光焊接装置
CN108971751B (zh) * 2017-06-01 2021-04-09 丰田自动车株式会社 激光焊接装置
DE102021123027A1 (de) 2021-09-06 2023-03-09 LaVa-X GmbH Laser-Bearbeitungsvorrichtung
CN116765642A (zh) * 2023-06-30 2023-09-19 大族激光科技产业集团股份有限公司 激光加工控制方法、装置、设备及存储介质

Also Published As

Publication number Publication date
DE102014103635C5 (de) 2019-12-19
DE102014103635A1 (de) 2015-09-17
DE102014103635B4 (de) 2017-04-13

Similar Documents

Publication Publication Date Title
WO2015139689A1 (fr) Chambre à vide munie d'un boîtier de protection
DE102014011569B4 (de) Verfahren zum Messen des Abstands zwischen einem Werkstück und einem Bearbeitungskopf einer Laserbearbeitungsvorrichtung
DE10060176B4 (de) Laserbearbeitungskopf
DE102006014694B3 (de) Prozesskammer und Verfahren für die Bearbeitung eines Werkstoffs mit einem gerichteten Strahl elektromagnetischer Strahlung, insbesondere für eine Lasersintervorrichtung
DE102014210838A1 (de) Einkoppeloptik, Laserschweißkopf und Laserschweißvorrichtung mit Vakuumkammer
DE3822097C2 (fr)
DE102016103578B4 (de) Vorrichtung und Verfahren zum Aufrauen von Substraten
WO2013092981A2 (fr) Procédé de protection de la surface d'un élément optique ainsi que dispositif de traitement de pièces
DE102012217082A1 (de) Laserbearbeitungskopf und Ringdüse für einen Laserbearbeitungskopf
DE10226359B4 (de) Laserbearbeitungskopf zur Bearbeitung, insbesondere zum Schneiden eines Werkstücks mittels Laserstrahl
EP3329030B1 (fr) Procédé et dispositif de revêtement d'une surface
DE102005025119B4 (de) Vorrichtung zur Standzeiterhöhung von Laser-Bearbeitungsoptiken
DE102008042343A1 (de) Verfahren und Vorrichtung zum Bearbeiten und/oder Schweißen eines rotationssymmetrischen Werkstücks mit einem Laserstrahl
EP3763472A1 (fr) Dispositif d'usinage au laser et procédé d'usinage au laser destinés à l'usinage au laser d'un fil
DE102013214925A1 (de) Einhausung für einen Strahlengang, Bearbeitungskammer und Verfahren zur Laserbearbeitung
DE102019110637B4 (de) Vorrichtung, System und Verfahren zur Erzeugung eines Gasstroms zum Schutz mindestens eines optischen Elements
WO2008037310A1 (fr) dispositif de protection de l'optique d'un dispositif d'usinage par laser doté d'au moins une tuyère disposée dans la zone d'un coin
DE20080266U1 (de) Vorrichtung für einen Laser-Hybrid-Schweissprozess
EP3900869B1 (fr) Procédé et dispositif de contrôle qualité optique lors du soudage par dépôt laser
DE102016116659A1 (de) Laserschweiß-Vorrichtung und Laserschweiß-Verfahren zum Laserschweißen metallischer Werkstücke
DE102021123027A1 (de) Laser-Bearbeitungsvorrichtung
DE102019108096A1 (de) Werkstückbearbeitung mittels Laserstrahlung
DE102018107662A1 (de) Werkstückbearbeitung mittels Laserstrahlung
DE102013208698B4 (de) Wechselbarer oder selbstreinigender Spritzschutz zum Schutz einer optischen Einheit, die dem Schweißbrenner eines Schweißroboters zur Schweißbadbeobachtung zugeordnet ist
DE102015013847A1 (de) Laserschweißeinrichtung

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15720196

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 15720196

Country of ref document: EP

Kind code of ref document: A1