WO2015170399A1 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- WO2015170399A1 WO2015170399A1 PCT/JP2014/062469 JP2014062469W WO2015170399A1 WO 2015170399 A1 WO2015170399 A1 WO 2015170399A1 JP 2014062469 W JP2014062469 W JP 2014062469W WO 2015170399 A1 WO2015170399 A1 WO 2015170399A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor module
- solder
- lead frame
- module according
- flow suppressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/481—Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/01—Manufacture or treatment
- H10W70/04—Manufacture or treatment of leadframes
- H10W70/041—Connecting or disconnecting interconnections to or from leadframes, e.g. connecting bond wires or bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/411—Chip-supporting parts, e.g. die pads
- H10W70/417—Bonding materials between chips and die pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/421—Shapes or dispositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/421—Shapes or dispositions
- H10W70/424—Cross-sectional shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/464—Additional interconnections in combination with leadframes
- H10W70/465—Bumps or wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/464—Additional interconnections in combination with leadframes
- H10W70/466—Tape carriers or flat leads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/016—Manufacture or treatment using moulds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/129—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed forming a chip-scale package [CSP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/811—Multiple chips on leadframes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07336—Soldering or alloying
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/076—Connecting or disconnecting of strap connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/076—Connecting or disconnecting of strap connectors
- H10W72/07631—Techniques
- H10W72/07636—Soldering or alloying
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/381—Auxiliary members
- H10W72/387—Flow barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W72/641—Dispositions of strap connectors
- H10W72/646—Dispositions of strap connectors the connected ends being on auxiliary connecting means on bond pads, e.g. on a bump connector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W72/651—Materials of strap connectors
- H10W72/652—Materials of strap connectors comprising metals or metalloids, e.g. silver
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/853—On the same surface
- H10W72/871—Bond wires and strap connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/886—Die-attach connectors and strap connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/921—Structures or relative sizes of bond pads
- H10W72/926—Multiple bond pads having different sizes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
- H10W90/763—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between laterally-adjacent chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
- H10W90/766—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
Definitions
- the present invention relates to a semiconductor module in which a plurality of semiconductor elements are mounted on a lead frame, and particularly relates to miniaturization of the module.
- semiconductor modules including power semiconductor elements such as IGBTs (Insulated Gate Bipolar Transistors) and power MOSFETs are required to have semiconductor packages with high insulation and good heat dissipation. Further, such semiconductor modules are being reduced in size and density. For example, there is a semiconductor module that is miniaturized by integrating a plurality of terminals and reducing the number of terminals (see, for example, Patent Document 1).
- Patent Document 1 has many spaces where no element is mounted on each terminal, and there is still room for miniaturization by increasing the element mounting rate. Furthermore, by reducing the size of the semiconductor module, the yield of the lead frame can be improved.
- the present invention has been made to solve the above-described problems, and an object thereof is to obtain a semiconductor module capable of effectively using a lead frame and reducing the module size.
- a semiconductor module according to the present invention is a semiconductor module formed by soldering an electronic component and a bus bar on a lead frame composed of a plurality of terminals, and the lead frame is in the vicinity of a solder portion of the component to be solder-mounted, A solder flow suppressing portion that can regulate the flow direction of the solder on the lead frame is formed.
- a misalignment shape, a notch, or a solder flow restraint portion formed by a hole is formed on the lead frame to restrict the solder flow direction, thereby suppressing misalignment such as rotation and movement of the mounted component.
- FIG. 1 is an overall circuit diagram illustrating, as an example, a power steering device mounted on a vehicle as a device to which a semiconductor module according to Embodiment 1 of the present invention is applied. It is a perspective view of the semi-finished state of the conventional U-phase semiconductor module. It is a perspective view of the semi-finished state of the U phase semiconductor module to which the solder flow suppression part in Embodiment 1 of the present invention is applied. It is sectional drawing of the semi-finished state of the U-phase semiconductor module to which the solder flow suppression part in Embodiment 1 of this invention is applied.
- FIG. 5 is a perspective view of a semi-finished state of a U-phase semiconductor module in which a solder flow suppressing unit is applied to a position different from that in FIG.
- FIG. 7 is a perspective view of a semi-finished state of a U-phase semiconductor module to which a solder flow suppressing unit different from that in FIG. 6 according to Embodiment 2 of the present invention is applied. It is the whole circuit diagram which showed the power steering device with which the vehicle was mounted
- FIG. 1 is an overall circuit diagram illustrating, as an example, a power steering device mounted on a vehicle as a device to which a semiconductor module according to Embodiment 1 of the present invention is applied.
- This apparatus is composed of a motor 1 and a control unit 2, and both parts are integrated.
- the control unit 2 includes a control circuit unit 20 including a microcomputer 8 and its peripheral circuits, a power relay unit 4, and a power circuit unit 3 including an inverter that supplies power to the motor windings. .
- the control unit 2 receives a battery, a vehicle speed sensor, a torque sensor power supply, and various information, calculates a steering assist amount by the microcomputer 8, and outputs it to the inverter 3 via the pre-driver 9. Further, a rotation sensor I / F that transmits a signal from a rotation sensor 7 that detects the rotation of the motor 1 and a current monitor I / F 10 that measures a current supplied to the motor 1 are connected to the microcomputer.
- the power supply unit operates by receiving power from the battery, and includes a choke coil 6 for suppressing noise, a smoothing capacitor 5, and a relay 4 for connecting / cutting off the power supply line, and supplies power to the inverter 3. ing.
- the inverter 3 includes three sets of switching elements 11 to 16 for a total of six upper and lower arms corresponding to the three-phase windings of the motor 1. Furthermore, switching elements 17 to 19 serving as relays that can connect and shut off the power supply to the motor 1 are arranged in each phase.
- switching elements 11 to 16, 17 to 19
- u, v, and w terminals for controlling each switching element are connected to the microcomputer 8 via the pre-driver 9, respectively.
- each phase winding terminal Mu, Mv, Mw of the motor 1 also exists.
- the inverter 3 is composed of three semiconductor modules including a U-phase semiconductor module, a V-phase semiconductor module, and a W-phase semiconductor module that incorporate a plurality of switching elements. Since these semiconductor modules incorporate a plurality of switching elements, a plurality of circuit circuits for connecting each component are also incorporated, and there are a large number of terminals. Moreover, the current for supplying electric power to the motor 1 is large, and it is necessary to improve heat dissipation. Therefore, the semiconductor module is an important component in terms of the scale, quality, cost, etc. occupied in this apparatus.
- FIG. 2 is a perspective view of a conventional U-phase semiconductor module in a semi-finished state.
- the U-phase semiconductor module is a component that drives the U-phase of the inverter 3.
- the U-phase semiconductor module has a structure in which a lead frame 31 on which a U-phase upper FET 11, U-phase lower FET 12, U-phase motor relay FET 17, shunt resistor 22, and inner leads 32 are mounted is molded with a sealing resin. It has become.
- the V-phase semiconductor module and the W-phase semiconductor module have the same structure. Hereinafter, each part in the semiconductor module will be described in detail.
- the lead frame 31 is manufactured by using a copper or iron-based alloy material and pressing, etching, or cutting a single metal plate, and the portions are stretched without overlapping each other. Yes. Note that the press processing has the advantages of high mass productivity, the etching processing has a short delivery time, and the cut processing has a low cost.
- three U-phase FETs 11, 12, and 17 are mounted as semiconductor chips.
- the semiconductor chips or the lead frames 31 are connected by inner leads 32 made of copper or iron-based material.
- the inner lead 32 bridges the top of the lead frame 31. Furthermore, a large number of terminals are extended downward as external terminals 34 in FIG.
- FIG. 3 is a perspective view of a semi-finished state of the U-phase semiconductor module to which the solder flow suppressing unit according to the first embodiment of the present invention is applied.
- FIG. 4 is a cross-sectional view of the semi-finished state of the U-phase semiconductor module to which the solder flow suppressing unit according to the first embodiment of the present invention is applied, and illustrates the solder flow suppressing unit used in FIG. FIG.
- the lead frame 31 is provided with a solder flow suppressing portion having a convex shape 36 (uneven shape 36).
- a solder flow suppressing portion having a convex shape 36 (uneven shape 36).
- 3 and 4 exemplify a case where positional deviation such as rotation and movement of the shunt resistor 22 is suppressed.
- FIG. 5 is a perspective view of the semi-finished state of the U-phase semiconductor module to which the solder flow suppressing unit according to the first embodiment of the present invention is applied, and the solder flow suppressing unit is located at a position different from the previous FIG.
- the case where the convex shape 36 is provided is illustrated.
- convex shapes 36 are provided on both sides where the FET 12 is mounted in order to suppress the positional deviation of the FET 12.
- misregistration suppressing portion By forming such a misregistration suppressing portion on the lead frame 31, interference between a component mounted in the vicinity of the misregistration suppressing portion and other mounted components can be prevented. Further, by suppressing the positional deviation with respect to the FET 12 as shown in FIG. 5, it is possible to suppress secondary errors such as mounting errors of the inner leads 32 and disconnection of the wire bonding 33. Furthermore, since the component mounting position accuracy on the lead frame 31 is improved, it is possible to mount components on the lead frame 31 at a higher density than in the past, and the semiconductor module can be miniaturized.
- the component mounting is performed using the lead frame in which the misalignment suppressing portion having the convex shape is provided at an appropriate place.
- the semiconductor module can be miniaturized, the lead frame itself can also be made compact and the yield can be improved. Furthermore, high mounting accuracy leads to a reduction in defective products during manufacturing.
- Embodiment 2 FIG. In the first embodiment, the case where the convex shape 36 is formed on the lead frame 31 as the misregistration suppressing portion has been described. On the other hand, in the second embodiment, a case where the solder flow suppressing portion provided in the lead frame 31 is realized with a structure other than the convex shape 36 will be described. Therefore, the following description will be made centering on the changed parts associated with such differences, and the description of the same components as those of the above-described semiconductor module will be omitted.
- the convex shape 36 used in the first embodiment has a bend R, and the component mountable area on the lead frame 31 is narrowed. Therefore, in the second embodiment, a solder flow suppressing unit that can make the component mountable area wider than that in the first embodiment and can further reduce the size of the semiconductor module will be described.
- FIG. 6 is a perspective view of a semi-finished state of the U-phase semiconductor module to which the solder flow suppressing unit according to the second embodiment of the present invention is applied.
- FIG. 7 is a perspective view of a semi-finished state of a U-phase semiconductor module to which a solder flow suppressing portion different from that in FIG. 6 in the second embodiment of the present invention is applied.
- the notch 37 (FIG. 6) or the hole 38 (FIG. 7) is used as the solder flow suppressing portion. Furthermore, the solder flow is suppressed by directing the processing burr of the notch 37 or the hole 38 of the lead frame 31 toward the component mounting surface side.
- the solder flow suppressing portion in the second embodiment is formed on the lead frame 31 as the notch 37 or the hole 38.
- the convex shape 36 is formed as in the first embodiment, it is possible to suppress the displacement of the mounted components without narrowing the component mountable area on the lead frame 31. Become.
- the width of the notch 37 or the hole 38 provided in the lead frame 31 as the solder flow suppressing portion is determined in consideration of processing accuracy and reliability, and is preferably equal to or greater than the thickness of the lead frame 31.
- the component mounting is performed using the lead frame in which the position shift suppression portion due to the notch or the hole is provided at an appropriate place.
- the notch 37 and the hole 38 are also formed by processing the convex shape 36 described in the first embodiment by the half punching method. The same effect as the case can be obtained.
- Embodiment 3 In the first and second embodiments, the structure in which the U-phase, V-phase, and W-phase semiconductor modules are individually modularized has been described. On the other hand, in this Embodiment 3, the case where the three semiconductor modules which comprised the inverter 3 are made into one module is demonstrated.
- FIG. 8 is an overall circuit diagram illustrating, as an example, a power steering device mounted on a vehicle as an apparatus to which the semiconductor module according to Embodiment 3 of the present invention is applied.
- the configuration of FIG. 8 in the present third embodiment is for current monitoring due to the change in which the three semiconductor modules constituting the inverter 3 are made into one module.
- the number of shunt resistors (25) is also changed from three to one.
- FIG. 9 is a perspective view of a semi-finished state of the semiconductor module to which the solder flow suppressing unit according to the third embodiment of the present invention is applied.
- three semiconductor modules are made into one module. The case is shown as an example. 8 and FIG. 9, the following description will be made with a focus on the differences made into one module, and the same components as those of the semiconductor modules of the first and second embodiments will be described here. Is omitted.
- the semiconductor module according to the third embodiment all components constituting the inverter 3 are made into one module. For this reason, compared with the case where it modularizes separately for every phase, one module size is enlarged and the inner lead 32 is also large.
- the inner lead 32a corresponding to a bus bar that connects the same potential terminals between the respective phases has a size larger in the longitudinal direction than other components. For this reason, when mounted on the lead frame 31, the amount of positional deviation when the component is rotated is large, which has been a barrier to downsizing the module.
- solder flow suppressing portion according to the present invention to the lead frame 31 used for the module which is increased in size as described above, it is possible to effectively suppress the displacement.
- FIG. 9 the case where the notch part 37 is applied as a solder flow suppression part is illustrated. As a result of having such a solder flow suppressing part, even when many parts are made into one module, the distance between the parts can be shortened along with the improvement of the mounting position accuracy, and a semiconductor module with high-density mounting of parts can be manufactured. It becomes possible to do.
- the component mounting is performed by using the lead frame in which the misregistration suppressing portion according to the present invention is provided at an appropriate place. Yes.
- the distance between the components can be shortened, and a semiconductor module that achieves high mounting and miniaturization can be obtained.
- FIG. 10 is a perspective view of a semi-finished state of a semiconductor module to which the solder flow restraint unit according to the fourth embodiment of the present invention is applied. In correspondence with FIG. 8, three semiconductor modules are made into one module. The case is shown as an example.
- the semiconductor module according to the fourth embodiment has a structure in which all components constituting the inverter 3 are made into one module, as in the third embodiment.
- the configuration of FIG. 10 in the fourth embodiment is different in that the inner lead 32b and the inner lead 32c are three-dimensionally crossed. Therefore, this difference will be mainly described below with reference to FIG. 10, and the description of the same components as those of the semiconductor modules of the first to third embodiments will be omitted here.
- the inner lead 32b and the inner lead 32c corresponding to bus bars having different potentials are three-dimensionally crossed.
- the semiconductor module can be further reduced in size as compared with the third embodiment.
- FIG. 10 illustrates the case where the notch 37 is applied as the solder flow suppressing portion.
- the portion of the second reducible region 41 indicated by hatching from the upper left to the lower right can be reduced, which can contribute to the miniaturization of the semiconductor module.
- FIG. 11 is a perspective view of a semi-completed state of a semiconductor module to which a solder flow suppressing portion different from that of FIG. 10 in the fourth embodiment of the present invention is applied.
- a U-phase lower FET and V-phase lower FET to which the inner lead 32c is attached are further provided with a solder flow suppressing portion by a hole 38. Yes.
- the hole 38 it is possible to improve the mounting position accuracy of the FET, and it is possible to more reliably avoid the contact short between the inner lead 32b and the inner lead 32c. As a result, even when many components are made into one module, it is possible to reduce the size of the semiconductor module while ensuring product reliability.
- the lead frame provided with the misalignment suppressing portion according to the present invention is used at an appropriate place, and the three-dimensional intersection structure is provided. Adopting and mounting components. As a result, by improving the mounting position accuracy of the mounting components on the lead frame, the distance between the components can be shortened, and a semiconductor module that achieves high mounting and miniaturization can be obtained.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Inverter Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
特許文献1に提示された半導体モジュールは、各ターミナルに素子が実装されていない空間が多く、素子実装率を上げることで、まだまだ小型化の余地がある。さらに、半導体モジュールを小型化することで、リードフレームの歩留まり向上が図れる。
図1は、本発明の実施の形態1における半導体モジュールを適用した装置として、車両に装着されたパワーステアリング装置を例として示した全体回路図である。この装置は、モータ1、制御ユニット2から構成され、両部位が一体化されている。
(手順1)成形金型のキャビティ内に、半導体素子、電子部品等を実装したリードフレーム31を載置する。このとき、リードフレーム31は、金型上にある固定ピンまたは可動ピンにより位置固定される。
(手順2)続いて、成形金型が密閉され、エポキシ樹脂などの熱硬化性樹脂がキャビティ内に充填されて封止樹脂30が形成される。
なお、封止樹脂30で各部位を覆うのではなく、外枠形成し、その中をシリコン樹脂でカバーする構造でもよい。
先の実施の形態1では、位置ずれ抑制部として、凸形状36をリードフレーム31に形成する場合について説明した。これに対して、本実施の形態2では、リードフレーム31に設ける半田流れ抑制部を、凸形状36ではない構造で実現する場合について説明する。そこで、このような相違点に伴う変更部分を中心に以下に説明を行い、上述の半導体モジュールと同じ構成部分については、ここでの説明を省略する。
先の実施の形態1、2では、U相、V相、W相の各半導体モジュールで、個別にモジュール化する構造について説明した。これに対して、本実施の形態3では、インバータ3を構成していた3つの半導体モジュールを、1モジュール化する場合について説明する。
本実施の形態4では、先の実施の形態3の構造に対して、さらなる高実装化を実現するための構造について説明する。図10は、本発明の実施の形態4における半田流れ抑制部を適用した半導体モジュールの半完成状態の透視図であり、先の図8に対応して、3つの半導体モジュールが1モジュール化されている場合を例示している。
Claims (14)
- 複数ターミナルからなるリードフレーム上に電子部品およびバスバーを半田実装して形成される半導体モジュールであって、
前記リードフレームは、半田実装される部品の半田部の近傍に、リードフレーム上での半田の流れ方向を規制できる半田流れ抑制部が形成されている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
前記リードフレームは、前記半田部に沿った領域の少なくとも一部分に凹凸形状が設けられることで前記半田流れ抑制部が形成されている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
前記リードフレームは、前記半田部に沿った領域の少なくとも一部分に切欠き、または穴が設けられることで前記半田流れ抑制部が形成されている
半導体モジュール。 - 請求項2に記載の半導体モジュールにおいて、
前記リードフレームは、前記半田部に沿ったすべての領域に前記凹凸形状が設けられている
半導体モジュール。 - 請求項3に記載の半導体モジュールにおいて、
前記リードフレームは、前記半田部に沿ったすべての領域に前記切欠き、または前記穴が設けられている
半導体モジュール。 - 請求項3または5に記載の半導体モジュールにおいて、
前記半田流れ抑制部として前記リードフレームに設けられる前記切欠き、または前記穴の幅は、前記リードフレームの厚み以上である
半導体モジュール。 - 請求項2または4に記載の半導体モジュールにおいて、
前記半田流れ抑制部として前記リードフレームに設けられる前記凹凸形状は、半抜き工法で加工することで形成されている
半導体モジュール。 - 請求項1から7のいずれか1項に記載の半導体モジュールにおいて、
前記リードフレームは、同電位のターミナル間を接続するバスバーの半田部近傍の少なくとも一部分に、前記半田流れ抑制部が設けられている
半導体モジュール。 - 請求項8に記載の半導体モジュールにおいて、
前記リードフレームは、前記半田流れ抑制部が前記バスバーの両端の半田部近傍に設けられている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
前記リードフレームは、半田実装される電子部品間または前記リードフレームのターミナル間、もしくは前記電子部品と前記ターミナル間を接続するバスバーに関して、異なる電位で立体交差する2組の前記バスバーの半田部近傍に、前記半田流れ抑制部が設けられている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
前記リードフレームは、半田実装される電子部品間または前記リードフレームのターミナル間、もしくは前記電子部品と前記ターミナル間を接続するバスバーの直下に前記バスバーと立体交差するように配置される電子部品の半田部近傍に、前記半田流れ抑制部が設けられている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
3相以上の多相インバータ装置を駆動する複数のスイッチング素子を備えた半導体がモジュール化される際に、前記多相インバータ装置の相毎で個別に、前記半田流れ抑制部が形成された前記リードフレームを用いてモジュール化されている
半導体モジュール。 - 請求項1に記載の半導体モジュールにおいて、
3相以上の多相インバータ装置を駆動する複数のスイッチング素子を備えた半導体がモジュール化される際に、前記多相インバータ装置の2相または3相毎に、前記半田流れ抑制部が形成された前記リードフレームを用いてモジュール化されている
半導体モジュール。 - 請求項13に記載の半導体モジュールにおいて、
前記前記半田流れ抑制部は、異相間の同電位のターミナルを接続するバスバーの半田部近傍に設けられている
半導体モジュール。
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/124,809 US9935040B2 (en) | 2014-05-09 | 2014-05-09 | Semiconductor module |
| EP14891180.3A EP3142144A4 (en) | 2014-05-09 | 2014-05-09 | Semiconductor module |
| JP2016517775A JP6389515B2 (ja) | 2014-05-09 | 2014-05-09 | 半導体モジュール |
| CN201480079109.7A CN106415831B (zh) | 2014-05-09 | 2014-05-09 | 半导体模块 |
| PCT/JP2014/062469 WO2015170399A1 (ja) | 2014-05-09 | 2014-05-09 | 半導体モジュール |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/062469 WO2015170399A1 (ja) | 2014-05-09 | 2014-05-09 | 半導体モジュール |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2015170399A1 true WO2015170399A1 (ja) | 2015-11-12 |
Family
ID=54392267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2014/062469 Ceased WO2015170399A1 (ja) | 2014-05-09 | 2014-05-09 | 半導体モジュール |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9935040B2 (ja) |
| EP (1) | EP3142144A4 (ja) |
| JP (1) | JP6389515B2 (ja) |
| CN (1) | CN106415831B (ja) |
| WO (1) | WO2015170399A1 (ja) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007012857A (ja) * | 2005-06-30 | 2007-01-18 | Renesas Technology Corp | 半導体装置 |
| JP2008270290A (ja) * | 2007-04-16 | 2008-11-06 | Sumitomo Electric Ind Ltd | パワーモジュール、その製造方法および素子接続用バスバー |
| JP2009302101A (ja) * | 2008-06-10 | 2009-12-24 | Denso Corp | 電子部品搭載構造 |
| JP2011250491A (ja) * | 2010-05-21 | 2011-12-08 | Denso Corp | 半導体モジュール、および、それを用いた駆動装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD248906A1 (de) * | 1985-08-08 | 1987-08-19 | Seghers A Mikroelektronik Veb | Traeger zur herstellung von transistoren mittlerer leistung fuer die aufsetz- und hybridtechnik |
| US5367124A (en) * | 1993-06-28 | 1994-11-22 | International Business Machines Corporation | Compliant lead for surface mounting a chip package to a substrate |
| JPH0992776A (ja) * | 1995-09-28 | 1997-04-04 | Mitsubishi Electric Corp | リードフレームおよび半導体装置 |
| JPH09283687A (ja) * | 1996-04-18 | 1997-10-31 | Toyota Autom Loom Works Ltd | リードフレーム及び半導体装置 |
| KR100231086B1 (ko) * | 1996-09-06 | 1999-11-15 | 윤종용 | 관통 슬릿이 형성된 다이패드를 포함하는 반도체 칩 패키지 |
| JP3285815B2 (ja) * | 1998-03-12 | 2002-05-27 | 松下電器産業株式会社 | リードフレーム,樹脂封止型半導体装置及びその製造方法 |
| TW472951U (en) * | 2000-10-16 | 2002-01-11 | Siliconix Taiwan Ltd | Leadframe chip with trench |
| TWI310979B (en) * | 2006-07-11 | 2009-06-11 | Chipmos Technologies Shanghai Ltd | Chip package and manufacturing method threrof |
| TWI302373B (en) * | 2006-07-18 | 2008-10-21 | Chipmos Technologies Shanghai Ltd | Chip package structure |
| US8354303B2 (en) * | 2009-09-29 | 2013-01-15 | Texas Instruments Incorporated | Thermally enhanced low parasitic power semiconductor package |
| EP2637285B1 (en) * | 2010-11-02 | 2020-04-01 | Mitsubishi Electric Corporation | Electric power steering power module and electric power steering drive control device employing same |
| JP5762078B2 (ja) * | 2011-03-28 | 2015-08-12 | 新光電気工業株式会社 | リードフレーム |
-
2014
- 2014-05-09 EP EP14891180.3A patent/EP3142144A4/en not_active Ceased
- 2014-05-09 US US15/124,809 patent/US9935040B2/en active Active
- 2014-05-09 WO PCT/JP2014/062469 patent/WO2015170399A1/ja not_active Ceased
- 2014-05-09 CN CN201480079109.7A patent/CN106415831B/zh not_active Expired - Fee Related
- 2014-05-09 JP JP2016517775A patent/JP6389515B2/ja not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007012857A (ja) * | 2005-06-30 | 2007-01-18 | Renesas Technology Corp | 半導体装置 |
| JP2008270290A (ja) * | 2007-04-16 | 2008-11-06 | Sumitomo Electric Ind Ltd | パワーモジュール、その製造方法および素子接続用バスバー |
| JP2009302101A (ja) * | 2008-06-10 | 2009-12-24 | Denso Corp | 電子部品搭載構造 |
| JP2011250491A (ja) * | 2010-05-21 | 2011-12-08 | Denso Corp | 半導体モジュール、および、それを用いた駆動装置 |
Non-Patent Citations (1)
| Title |
|---|
| See also references of EP3142144A4 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US9935040B2 (en) | 2018-04-03 |
| EP3142144A1 (en) | 2017-03-15 |
| CN106415831A (zh) | 2017-02-15 |
| JP6389515B2 (ja) | 2018-09-12 |
| US20170018486A1 (en) | 2017-01-19 |
| JPWO2015170399A1 (ja) | 2017-04-20 |
| EP3142144A4 (en) | 2018-03-21 |
| CN106415831B (zh) | 2020-04-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10468338B2 (en) | Semiconductor device | |
| US10192818B2 (en) | Electronic part mounting heat-dissipating substrate | |
| JP6026009B2 (ja) | 半導体モジュール | |
| US10388596B2 (en) | Electronic part mounting heat-dissipating substrate | |
| US9978670B2 (en) | Semiconductor module and semiconductor driving device | |
| CN107004648B (zh) | 电子部件搭载用散热基板 | |
| US11025140B2 (en) | Rotary electric machine having heat sink for semiconductor device of controller | |
| KR20200067233A (ko) | 반도체 장치 | |
| JP6192809B2 (ja) | 半導体モジュールおよび半導体モジュールを搭載した駆動装置 | |
| JP6389515B2 (ja) | 半導体モジュール | |
| US12412813B2 (en) | Semiconductor module | |
| JP2023069756A (ja) | 半導体装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 14891180 Country of ref document: EP Kind code of ref document: A1 |
|
| ENP | Entry into the national phase |
Ref document number: 2016517775 Country of ref document: JP Kind code of ref document: A |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 15124809 Country of ref document: US |
|
| REEP | Request for entry into the european phase |
Ref document number: 2014891180 Country of ref document: EP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 2014891180 Country of ref document: EP |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |