WO2016101986A1 - Spectromètre à grille à chemin optique commutable - Google Patents

Spectromètre à grille à chemin optique commutable Download PDF

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Publication number
WO2016101986A1
WO2016101986A1 PCT/EP2014/079059 EP2014079059W WO2016101986A1 WO 2016101986 A1 WO2016101986 A1 WO 2016101986A1 EP 2014079059 W EP2014079059 W EP 2014079059W WO 2016101986 A1 WO2016101986 A1 WO 2016101986A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
grating
grid
spectrometer
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2014/079059
Other languages
German (de)
English (en)
Inventor
Wolfram Bohle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spectro Analytical Instruments GmbH and Co KG
Original Assignee
Spectro Analytical Instruments GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spectro Analytical Instruments GmbH and Co KG filed Critical Spectro Analytical Instruments GmbH and Co KG
Priority to DE112014007080.7T priority Critical patent/DE112014007080B4/de
Priority to PCT/EP2014/079059 priority patent/WO2016101986A1/fr
Publication of WO2016101986A1 publication Critical patent/WO2016101986A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/08—Beam switching arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20—Rowland circle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector

Definitions

  • the present invention relates to an optical spectrometer according to the
  • Optical emission spectrometry uses grating spectrometers to determine elemental contents in a sample by analyzing the radiation emission of excited atoms. Large spectral ranges have to be measured simultaneously - starting from the deep UV to the near IR.
  • a diffraction grating causes a dispersion of the spectrum according to the
  • Equations: ⁇ ⁇ N d ⁇ [sina + sin ⁇ ] (equation l)
  • the angular dispersion ⁇ / ⁇ (equation 2) gives the difference of the diffraction angle ⁇ for two wavelengths which differ by the small amount ⁇ .
  • the spectral resolution of the spectrometer is essentially determined by the angular dispersion of the diffraction grating.
  • the cut-off wavelength A G denotes the wavelength for which the
  • Diffraction angle 90 ° reached (equation 3). Larger wavelengths than A G are no longer diffracted at this grid. The cut-off wavelength must therefore be above the longest wavelength of the spectrum to be displayed.
  • Eq. 3 states that, for the diffraction of long wavelengths, the spacing of the grating grooves d must be large and the diffraction order N must be low. For a high angular dispersion, however, exactly the reverse procedure is necessary. According to Eq. 2, a high angular dispersion is due to a small angle
  • the largest wavelength to be measured determines the groove spacing of the grid and thus also defines the angular dispersion.
  • the demands for high spectral coverage and high angular dispersion can therefore not be realized simultaneously.
  • the first way is to use different diffraction orders of a diffraction grating simultaneously. Parts of the spectrum with higher requirements for the angular dispersion are in higher
  • the second approach is to combine several spectrometer units simultaneously in one device, with the respective diffraction gratings having different groove spacings. In this way, selected parts of the spectrum can be displayed with a higher angular dispersion than the main spectrum.
  • spectrometer units in one device have disadvantages. All units must be optically in the same way to the radiation source
  • Angle dispersion is as high as possible. This object is achieved by an optical spectrometer with the features of claim 1.
  • the beam path of the radiation emitted by a source in the wavelength range UV to IR extends via an entrance slit and a grating
  • Detectors wherein in operation the radiation from the entrance slit falls on the grating at a first angle of incidence against a grating normal.
  • a first mirror is provided at a position where the radiation reflected in zero order on the grating is incident on the first mirror
  • a second mirror is further provided at a position where the radiation reflected in zero order on the grating is provided from the first mirror to the second mirror, the second mirror being oriented so that the radiation reflected at the second mirror falls on the grating at a second angle of incidence
  • at least one aperture is provided in the optical path between the grating , the first mirror, the second mirror and the grating for selectively interrupting this path, either a spectrum based on the first angle of incidence or two overlapping spectrums based on the first angle of incidence and on the second angle of incidence can be generated at the location of the detectors.
  • the resolution of these two partial spectra is dependent on the grid number of the grid according to the grid equation. If the whole Spectrum is continuously imaged on the detectors, the number of lines and thus the resolution is limited. Since the spectrum of this invention can be split into two sub-spectra, a higher-ranked grating may be used, offering a higher angular dispersion.
  • a filter can be switched into the optical path between the entrance slit and the grating once the shutter is off, this filter can absorb the wavelengths of the spectrum that arise at the first angle of incidence at the detector location. When the iris is off and the filter is on, only the spectrum of the second one falls
  • the total spectrum to be measured can thus be divided into two
  • a 2> a l is chosen, since in this case the filter element can be a simple long-pass filter. From Eq. 1 shows that with a2> a l the spectrum belonging to a l has a shorter wavelength than the spectrum belonging to a 2. Therefore, the spectrum belonging to a 1 can be easily suppressed by a long-pass filter with a properly selected filter edge.
  • the aperture or the filter are switched on and the spectrum is automatically switched over.
  • the controller may preferably act on a common actuator.
  • the source is a spark excitation source or a
  • ICP inductively coupled plasma
  • the grating is a concave grating and the grating, the entrance slit and the detectors are arranged in Rowland arrangement.
  • one or both mirrors may be designed with focusing properties, for example as cylindrical or spherical mirrors, to improve the imaging properties at the angle of incidence a2.
  • FIG. 1 shows the beam path of a spectrometer according to the invention in a first mode of operation
  • Fig. 2 the beam path of the spectrometer of Fig. 1 in a second
  • the spectrometer has a Rowland arrangement in which a concave, reflective grating 1 with a given radius of curvature R determines the Rowland circle of radius Vi R and center M.
  • the detectors 3-6 are designed in this embodiment as a CCD line sensors in a linear array.
  • the spectrometer further comprises a first mirror 7 and a second mirror 8.
  • a switchable diaphragm 9 is arranged, which completely block the light path at this point depending on the switching position (as shown in Figure 1) or can release.
  • a switchable filter 10 is provided in the light path between the entrance slit 2 and the grid 1, which is completely outside of the light path in a first switching position as shown in Figure 1 and is located in a second switching position within the light path.
  • the filter 10 is a Long-pass filter that allows all wavelengths greater than a certain wavelength to pass through and absorbs all wavelengths smaller than the specific wavelength.
  • Another portion of the radiation is diffracted at the grating 1 in the first order and spectrally dissected at the wavelength-dependent angle ßl and then meets the sensors 3 - 6, which are arranged on the Rowland Vietnamese and on which in a known manner images of the entrance slit in the various Wavelengths arise.
  • the wavelength range that falls in the arrangement of Figure 1 on the detectors 3-6, is not the entire wavelength range to be analyzed from UV to red, but only the short-wavelength part, for example, from 150 nm to 350 nm.
  • FIG. 2 shows the arrangement from FIG. 1 in another switching position.
  • the switchable diaphragm 9 is moved out of the light path, so that the path between the first mirror 7 and the second mirror 8 is free.
  • the filter 10 has moved into the light path, so that only the long-wavelength part of the outgoing radiation from the source 11 can pass the light path from the entrance slit 2 to the grating 1, the short-wave part of the spectrum is absorbed.
  • the radiation thus occurs in the position from FIG. 2 from the source 11 through the entrance slit 2 and is filtered in the filter 10.
  • the long-wave part then falls on the grating 1 at the angle a l. Since the diffraction angle ⁇ is wavelength-dependent, the long-wave part of the radiation is diffracted to first order, but lies outside the range that the wavelengths
  • the long-wave part is also under the Angle -al in the zeroth order without dispersion on the grating 1 is reflected and directed to the first mirror 7. From there, the long-wave part is then reflected to the second mirror 8, which throws the radiation back onto the grating 1, but now at a different angle of incidence a2, which in this embodiment is greater than al.
  • the radiation falling onto the grating 1 at the angle a2 is diffracted in the first order and then falls below the wavelength-dependent one
  • the filter 10 prevents the shortwave part of the spectrum from falling onto the detectors 3-6 and superimposing the desired signal.
  • the short-wave part can be measured once, as shown in FIG. 1, and then the long-wave part, as in Fig. 2.
  • the aperture 9 and the filter 10 are suitably switched with a common actuator 12 simultaneously.
  • a broad spectrum can be measured with a grating and a compact detector array, and that would require a spectral resolution that would otherwise require twice the detector area or a second dispersive array.
  • the resulting spectrometer can therefore be lighter, more compact and less expensive at high resolution.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

L'invention concerne un spectromètre amélioré pour la spectrométrie d'émission optique, comportant une source (11) émettant un rayonnement, une fente d'entrée (2), une grille (1), un filtre passe-long (10) et des détecteurs (3, 4, 5, 6), le rayonnement atteignant la grille (1) à partir de la fente d'entrée (2) à un premier angle d'incidence (α1) lors du fonctionnement. Le spectromètre est caractérisé en ce que : - un premier miroir est placé en un point où le rayonnement réfléchi en ordre zéro au niveau de la grille atteint le premier miroir, - un deuxième miroir est placé en un point où le rayonnement réfléchi en ordre zéro au niveau de la grille atteint le deuxième miroir à partir du premier miroir, le deuxième miroir étant configuré de telle manière que le rayonnement réfléchi au niveau du deuxième miroir atteint la grille selon un deuxième angle d'incidence (α2), - le spectromètre comprend au moins un diaphragme (9) qui peut être mis en circuit sur le chemin optique entre la grille, le premier miroir, le deuxième miroir et la grille pour interrompre sélectivement ledit chemin, - et le spectromètre est commandé par des moyens de commande de telle manière que soit le diaphragme, soit le filtre sont activés.
PCT/EP2014/079059 2014-12-22 2014-12-22 Spectromètre à grille à chemin optique commutable Ceased WO2016101986A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112014007080.7T DE112014007080B4 (de) 2014-12-22 2014-12-22 Gitterspektrometer mit umschaltbarem Lichtweg
PCT/EP2014/079059 WO2016101986A1 (fr) 2014-12-22 2014-12-22 Spectromètre à grille à chemin optique commutable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/079059 WO2016101986A1 (fr) 2014-12-22 2014-12-22 Spectromètre à grille à chemin optique commutable

Publications (1)

Publication Number Publication Date
WO2016101986A1 true WO2016101986A1 (fr) 2016-06-30

Family

ID=52146511

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/079059 Ceased WO2016101986A1 (fr) 2014-12-22 2014-12-22 Spectromètre à grille à chemin optique commutable

Country Status (2)

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DE (1) DE112014007080B4 (fr)
WO (1) WO2016101986A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB765441A (en) * 1953-03-24 1957-01-09 William George Fastie Spectroscopic device
JPS57111422A (en) * 1980-12-29 1982-07-10 Shimadzu Corp Spectrum measuring device
WO1995032408A1 (fr) * 1994-05-24 1995-11-30 Renishaw Plc Appareil spectroscopique
EP1845349A1 (fr) * 2006-04-15 2007-10-17 Carl Zeiss MicroImaging GmbH Unité d'analyse spectrale dotée d'un réseau de diffraction
DE19853754B4 (de) * 1998-11-21 2009-06-10 Spectro Analytical Instruments Gmbh Simultanes Doppelgitter-Spektrometer mit Halbleiterzeilensensoren oder Photoelektronenvervielfachern
JP2011232032A (ja) * 2010-04-23 2011-11-17 Olympus Corp 分光装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2054201A (en) 1999-12-01 2001-06-12 Damond V. Ryer Spectral instrument using multiple non-interfering optical beam paths and elements for use therewith
JP4357421B2 (ja) 2002-07-12 2009-11-04 リヴァー ダイアグノスティックス ベースローテン フェンノートシャップ 光学分光計

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB765441A (en) * 1953-03-24 1957-01-09 William George Fastie Spectroscopic device
JPS57111422A (en) * 1980-12-29 1982-07-10 Shimadzu Corp Spectrum measuring device
WO1995032408A1 (fr) * 1994-05-24 1995-11-30 Renishaw Plc Appareil spectroscopique
DE19853754B4 (de) * 1998-11-21 2009-06-10 Spectro Analytical Instruments Gmbh Simultanes Doppelgitter-Spektrometer mit Halbleiterzeilensensoren oder Photoelektronenvervielfachern
EP1845349A1 (fr) * 2006-04-15 2007-10-17 Carl Zeiss MicroImaging GmbH Unité d'analyse spectrale dotée d'un réseau de diffraction
JP2011232032A (ja) * 2010-04-23 2011-11-17 Olympus Corp 分光装置

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DE112014007080B4 (de) 2021-09-09
DE112014007080A5 (de) 2017-08-17

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