WO2016111479A1 - Filtre comprenant une résistance active, et circuit de lissage d'ondulation à modulateur sigma-delta de capteur capacitif de micro-accélération utilisant celui-ci - Google Patents

Filtre comprenant une résistance active, et circuit de lissage d'ondulation à modulateur sigma-delta de capteur capacitif de micro-accélération utilisant celui-ci Download PDF

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Publication number
WO2016111479A1
WO2016111479A1 PCT/KR2015/013693 KR2015013693W WO2016111479A1 WO 2016111479 A1 WO2016111479 A1 WO 2016111479A1 KR 2015013693 W KR2015013693 W KR 2015013693W WO 2016111479 A1 WO2016111479 A1 WO 2016111479A1
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WO
WIPO (PCT)
Prior art keywords
input
level shift
mos transistor
voltage
active resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/013693
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English (en)
Korean (ko)
Inventor
이병렬
남철
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industry Academy Collaboration Foundation of Korea University
Industry University Cooperation Foundation of Korea University of Technology and Education
Original Assignee
Industry Academy Collaboration Foundation of Korea University
Industry University Cooperation Foundation of Korea University of Technology and Education
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020150010563A external-priority patent/KR101691714B1/ko
Application filed by Industry Academy Collaboration Foundation of Korea University, Industry University Cooperation Foundation of Korea University of Technology and Education filed Critical Industry Academy Collaboration Foundation of Korea University
Publication of WO2016111479A1 publication Critical patent/WO2016111479A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H11/00—Networks using active elements
    • H03H11/02—Multiple-port networks
    • H03H11/04—Frequency selective two-port networks
    • H03H11/12—Frequency selective two-port networks using amplifiers with feedback

Definitions

  • the present invention relates to a filter comprising an active resistor and a sigma delta modulator ripple smoothing circuit of a capacitive micro acceleration sensor using the same.
  • the capacitance value of the capacitive micro-acceleration sensor is approximately several pF, and the change in the capacitance value according to the change in acceleration has a value of tens of those.
  • an accelerometer die and a readout IC die are connected by a bonding wire.
  • the present embodiment is to solve the above-mentioned disadvantages of the prior art, and one of the objects of the present invention is to implement a filter using an active resistor to remove noise with a desired time constant while occupying a small die area.
  • one of the main objectives is to provide a sigma delta modulator ripple smoothing circuit of a capacitive micro acceleration sensor capable of correcting capacitance capacitance error of the acceleration sensor through sigma delta modulation.
  • the filter according to the present exemplary embodiment includes a level shift unit which provides a control voltage formed by receiving an input signal and shifting up the level of the input signal, and a control voltage is applied to the control terminal to provide a deep control voltage.
  • An active resistor including a metal oxide semiconductor transistor (MOS transistor) operating in a deep triode region (deep linear region) and a capacitor connected to the active resistor are included.
  • MOS transistor metal oxide semiconductor transistor
  • the ripple smoothing device of the sigma delta modulator includes an acceleration sensor that includes a capacitor and a capacitance change occurs to correspond to the acceleration change, and the equivalent capacitance is sigma delta modulated to correspond to the capacitance change, and corresponds to the equivalent capacitance.
  • a first switched capacitor amplifier (SCA) for outputting a signal, a coarse regulating capacitor unit whose equivalent capacitance changes to correspond to a change in capacitance, a second SCA for outputting a control signal corresponding to an equivalent capacitance of the coarse regulating capacitor unit, and
  • An active resistor having one end and the other end and having a control stage receiving a control signal, and a filter including a capacitor connected to the other end, the resistance value of the active resistor is determined by a control signal applied to the control stage, the filter Is the sigma included in the signal corresponding to the equivalent capacitance. It removes high frequency ripple caused by the other modulation.
  • the capacitive mismatch of the capacitive acceleration sensor can be eliminated, and the ripple noise generated in the process can be efficiently removed.
  • the present embodiment provides an advantage that a primary RC filter for removing ripple noise can be formed by consuming a small die area.
  • FIG. 1 is a circuit diagram showing an outline of a sigma delta modulator ripple smoothing circuit of a capacitive micro acceleration sensor according to the present embodiment.
  • FIG. 2 is a diagram illustrating an overview of SCA1 including a Sigma-Delta Modulator.
  • FIG. 4 is a circuit diagram illustrating an example of an active resistor.
  • FIG. 5 is a timing diagram illustrating removing ripple by a filter including an active resistor.
  • first and second are intended to distinguish one component from another, and the scope of rights should not be limited by these terms.
  • first component may be named a second component, and similarly, the second component may also be named a first component.
  • each step may occur differently from the stated order unless the context clearly dictates the specific order. That is, each step may occur in the same order as specified, may be performed substantially simultaneously, or may be performed in the reverse order.
  • FIG. 1 is a circuit diagram showing an outline of a sigma delta modulator ripple smoothing circuit of a capacitive micro acceleration sensor according to the present embodiment.
  • the capacitance of the micro acceleration sensor 201 may be divided into a constant capacitance (C SP + ⁇ 0.5Cs) on the anode side and a secondary capacitance (C SN ⁇ 0.5Cs) on the cathode side.
  • Switched capacitor amplifiers SCA, 203, 204 are used to detect and amplify the variable capacitance ⁇ Cs, which is the difference in values.
  • Switched capacitor amplifiers (SCA) 203 and 204 are physically and electrically coupled to micro acceleration sensor 201 and bonding wires 202.
  • the switched capacitor amplifiers (SCA, 203, 204) act as amplifiers, the C F capacitors (Fig. 2, 3 C F1 , C F2 ) are responsible for amplification.
  • C RP , C RN capacitors are C F control blocks (see FIGS. 2 105 and 3 105) and C R control blocks (see FIGS. 2 104 and 3), respectively.
  • the capacitance value of each capacitor is adjusted by controlling the n-bit digital value provided by the present invention.
  • Capacitors C F1 , C F2, and capacitors C RP , C RN are respectively represented by CF control block 105 and CR control block 104.
  • the capacitances C SP and C SN of micro acceleration sensor 201 are C RP and C RN, respectively. Are adjusted to match.
  • the output value of the buffer BUFFER during matching is expressed as the product of the power supply voltage VDD by the ratio of the C F capacitor and the variable capacitance ⁇ Cs as shown in Equation 1 below.
  • FIG. 2 shows an overview of SCA1 (see FIG. 1 203) including a Sigma-Delta Modulator.
  • C R C RP , C RN only with control block 104 It may be difficult to precisely match the minute capacitance difference between the capacitance C SP and the capacitance C SN of the capacitor and the micro acceleration sensor.
  • the sigma delta modulator 106 outputs the output signal SDP [2: 0] in synchronization with the clock (CLK) input when the input value DIN [7: 0] is provided, and this output signal is parallel to C RP , C RN . It is provided to connected variable capacitors (C 11 , C 21 , C 31 , C 12 , C 22 , C 32 ) to change the capacitance value of the variable capacitor. However, the harmonic component of the clock CLK is applied to the output V OA2 , SCA 102 of the applied output signal. It appears in V OA1 (see FIG. 5 301).
  • the antialiasing filter can be used to remove harmonic components of the clock CLK, but the signal adjusted in the sigma delta modulator can be distorted, limiting its use.
  • the circuit for removing harmonic components of the clock CLK shown in the output V OA2 (V OA1 ) will be described later.
  • FIG. 3 is a schematic circuit diagram of SCA2 (see FIG. 1 204) without sigma delta modulator.
  • the SCA1 including the sigma delta modulator and the SCA2 without the sigma delta modulator have the same sensor input signal, clock input signals ⁇ 1 and ⁇ 2 and control signals con_cr ⁇ n-1:>.
  • Output signal of SCA2 (V R, p V R, n ) is a signal that follows the capacitance change amount of the acceleration sensor, and is applied to the control terminal of the active resistor to adjust the resistance value of the active resistor.
  • SCA2 does not include a sigma delta modulator so that the noise of the clock signal CLK is not added to the output signal of SCA2.
  • FIG. 4 is a circuit diagram illustrating an embodiment of the active resistor shown at 206 in FIG. 1.
  • the SCA1 (see FIG. 1 203) including the sigma delta modulator 106 may perform fine tuning of the capacitance, but the clock CLK may be changed in the sigma delta modulation process for fine tuning. Harmonic components appear at the outputs V OA1 and V OA2 of SCA1.
  • the SCA1 including the sigma delta modulator (106 in FIG. 1) and the SCA2 (see FIG. 1 204) fixing the input of the variable capacitor without the sigma delta modulator are put together in parallel, and the sample and hold circuit (FIG. 1 207).
  • a filter including an active resistor 206 and a capacitor (see FIG. 1 210) is placed in the filter to remove high frequency noise.
  • a first-order RC filter having an RC time constant may be used.
  • a large area is consumed to realize a large capacitance capacitor and a large resistance, so using both the capacitor and the resistor is uneconomical in terms of die area.
  • an on-chip capacitor 210 having a small size without burden on the area may be used, and an active resistor 206 using a MOS transistor may be used.
  • the active resistor 206 includes a level shift unit 410, a buffer 420, and MOS transistors M 2n , M 3n , M 4n , 430 connected in series.
  • the operational amplifier 411 included in the level shift unit 410 is provided with an output signal V R of SCA2 as one input.
  • the buffer 420 applies the buffered voltage V RB to the output of the MOS transistors connected in series.
  • Vin the voltage provided to the input side of the MOS transistor 430 connected in series, is a voltage in which the output signal V R of the sigma delta modulator overlaps the small change voltage V ⁇ of the sigma delta modulator.
  • the value of the voltage V RB is provided on the output side) it is equal to V R.
  • the voltage applied between the drain and the source of each of the MOS transistors connected in series is a voltage obtained by dividing V ⁇ . For example, if M 2n , M 3n , and M 4n have the same size, M 2n , M 3n , and M 4n
  • the drain-source voltage of the transistor is V ⁇ / 3, where V ⁇ is an equalized voltage.
  • each of the MOS transistors M 2n , M 3n , and M 4n has a deep linear region. (deep triode region, deep linear region) (see Equation 2).
  • FIG. 5 is a computer simulation timing diagram of a filter that removes ripples in the output signal of SCA1.
  • the output signal outp1 of SCA1 illustrated in black includes ripple due to sigma delta modulation
  • the output signal outp2 of SCA2 that does not perform sigma delta modulation does not include ripple.
  • the output signal (outp2) of the SCA2 is used as a control signal of the active resistor, and the result of filtering the output signal (outp1) of the SCA1 with the filter implemented with the active resistor and the on-chip capacitor (see FIG. 210) is shown in red at Voutp.
  • the ripple is removed to have a smoothed value of Vs.
  • V OA2 which is the output of the buffer (see FIG. 1 207).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Amplifiers (AREA)
  • Compression, Expansion, Code Conversion, And Decoders (AREA)
  • Networks Using Active Elements (AREA)

Abstract

Un filtre selon le mode de réalisation de la présente invention comprend : une résistance active comprenant une unité de décalage de niveau, qui reçoit un signal d'entrée de manière à fournir une tension de commande formée en décalant vers le haut le niveau du signal d'entrée, et un transistor à semi-conducteur à oxyde métallique (MOS) fonctionnant dans une région de triode profonde en permettant à la tension de commande d'être appliquée à une extrémité de commande ; et un condensateur connecté à la résistance active.
PCT/KR2015/013693 2015-01-05 2015-12-15 Filtre comprenant une résistance active, et circuit de lissage d'ondulation à modulateur sigma-delta de capteur capacitif de micro-accélération utilisant celui-ci Ceased WO2016111479A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20150000801 2015-01-05
KR10-2015-0000801 2015-01-05
KR10-2015-0010563 2015-01-22
KR1020150010563A KR101691714B1 (ko) 2015-01-05 2015-01-22 능동 저항을 포함하는 필터 및 이를 이용하는 용량성 마이크로 가속도 센서의 시그마 델타 변조기 리플 평활 회로

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WO2016111479A1 true WO2016111479A1 (fr) 2016-07-14

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106656072A (zh) * 2016-12-31 2017-05-10 唯捷创芯(天津)电子技术股份有限公司 一种精确乘二开关电容放大器、芯片及通信终端
CN109633207A (zh) * 2018-12-19 2019-04-16 哈尔滨工业大学 一种数字闭环加速度计片上在线自检测系统及方法
CN115206107A (zh) * 2021-04-01 2022-10-18 丰田自动车株式会社 监视装置、监视方法以及监视系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221654A (ja) * 1999-12-09 2001-08-17 Texas Instr Inc <Ti> 可変容量性トランスジューサ
KR100836900B1 (ko) * 2007-02-09 2008-06-11 한양대학교 산학협력단 전류 감지 회로
KR20090109454A (ko) * 2008-04-15 2009-10-20 한국과학기술원 연속시간 델타-시그마 변조기
KR20100041967A (ko) * 2008-10-15 2010-04-23 네오뷰코오롱 주식회사 커패시터 결합형 레벨시프트
WO2013062164A1 (fr) * 2011-10-28 2013-05-02 숭실대학교산학협력단 Dispositif de commande d'une alimentation à découpage

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221654A (ja) * 1999-12-09 2001-08-17 Texas Instr Inc <Ti> 可変容量性トランスジューサ
KR100836900B1 (ko) * 2007-02-09 2008-06-11 한양대학교 산학협력단 전류 감지 회로
KR20090109454A (ko) * 2008-04-15 2009-10-20 한국과학기술원 연속시간 델타-시그마 변조기
KR20100041967A (ko) * 2008-10-15 2010-04-23 네오뷰코오롱 주식회사 커패시터 결합형 레벨시프트
WO2013062164A1 (fr) * 2011-10-28 2013-05-02 숭실대학교산학협력단 Dispositif de commande d'une alimentation à découpage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106656072A (zh) * 2016-12-31 2017-05-10 唯捷创芯(天津)电子技术股份有限公司 一种精确乘二开关电容放大器、芯片及通信终端
CN109633207A (zh) * 2018-12-19 2019-04-16 哈尔滨工业大学 一种数字闭环加速度计片上在线自检测系统及方法
CN115206107A (zh) * 2021-04-01 2022-10-18 丰田自动车株式会社 监视装置、监视方法以及监视系统

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