WO2017118828A3 - Dispositif d'imagerie du champs électromagnétique d'un échantillon - Google Patents

Dispositif d'imagerie du champs électromagnétique d'un échantillon Download PDF

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Publication number
WO2017118828A3
WO2017118828A3 PCT/FR2017/050041 FR2017050041W WO2017118828A3 WO 2017118828 A3 WO2017118828 A3 WO 2017118828A3 FR 2017050041 W FR2017050041 W FR 2017050041W WO 2017118828 A3 WO2017118828 A3 WO 2017118828A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
beams
imaging
electromagnetic field
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2017/050041
Other languages
English (en)
Other versions
WO2017118828A2 (fr
Inventor
Yannick DE WILDE
Léo GREUSARD
Gilles Tessier
Sylvain GIGAN
Samuel GRÉSILLON
Kamel BENCHEIKH
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to JP2018535414A priority Critical patent/JP7141948B2/ja
Priority to US16/068,639 priority patent/US10684113B2/en
Priority to EP17711703.3A priority patent/EP3400488A2/fr
Publication of WO2017118828A2 publication Critical patent/WO2017118828A2/fr
Publication of WO2017118828A3 publication Critical patent/WO2017118828A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/08—Measuring electromagnetic field characteristics
    • G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
    • G01R29/0892—Details related to signal analysis or treatment; presenting results, e.g. displays; measuring specific signal features other than field strength, e.g. polarisation, field modes, phase, envelope, maximum value
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0463—Frequency heterodyne, i.e. one beam is frequency shifted
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0469—Object light being reflected by the object
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0471—Object light being transmitted through the object, e.g. illumination through living cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00—Optical components
    • G03H2223/12—Amplitude mask, e.g. diaphragm, Louver filter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Electromagnetism (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Dispositif de détection optique comprenant une source lumineuse (9) émettant un faisceau lumineux, un moyen adapté pour diviser le faisceau (91) en un faisceau définissant une voie référence (80) et un faisceau définissant une voie échantillon (70) comprenant l'échantillon (1), un système de modulation (7,8,78) décalant en fréquence les champs électromagnétiques des deux faisceaux, un coupleur de faisceaux (93) adapté pour collecter les faisceaux, un système de détection optique (5,6,50) adapté pour mesurer l'amplitude et la phase au niveau de l'échantillon à partir du signal issu de l'interférence entre les faisceaux couplés, le dispositif comportant un écran opaque (2) comprenant une ouverture optique (20) placé à proximité de l'échantillon, dans la voie échantillon (70), la résolution du dispositif ne dépendant que de la taille de l'ouverture.
PCT/FR2017/050041 2016-01-08 2017-01-06 Dispositif d'imagerie du champs électromagnétique d'un échantillon Ceased WO2017118828A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018535414A JP7141948B2 (ja) 2016-01-08 2017-01-06 サンプルの電磁場を撮像するための装置
US16/068,639 US10684113B2 (en) 2016-01-08 2017-01-06 SNOM device using heterodyne detection
EP17711703.3A EP3400488A2 (fr) 2016-01-08 2017-01-06 Dispositif d'imagerie du champs électromagnétique d'un échantillon

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1650165A FR3046683B1 (fr) 2016-01-08 2016-01-08 Dispositif d'imagerie du champs electromagnetique d'un echantillon
FR1650165 2016-01-08

Publications (2)

Publication Number Publication Date
WO2017118828A2 WO2017118828A2 (fr) 2017-07-13
WO2017118828A3 true WO2017118828A3 (fr) 2017-10-05

Family

ID=56069028

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2017/050041 Ceased WO2017118828A2 (fr) 2016-01-08 2017-01-06 Dispositif d'imagerie du champs électromagnétique d'un échantillon

Country Status (5)

Country Link
US (1) US10684113B2 (fr)
EP (1) EP3400488A2 (fr)
JP (1) JP7141948B2 (fr)
FR (1) FR3046683B1 (fr)
WO (1) WO2017118828A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119973388B (zh) * 2024-12-31 2025-10-10 西北工业大学 中空原子力探针加工方法、系统及中空原子力探针

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1043632A1 (fr) * 1999-04-06 2000-10-11 Thomson-Csf Dispositif d'holographie numérique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3009199B2 (ja) * 1990-09-28 2000-02-14 株式会社日立製作所 光音響信号検出方法及び装置
JPH08262038A (ja) * 1995-03-20 1996-10-11 Nikon Corp 微小開口プローブ及び微小開口プローブの製造方法
JPH11316240A (ja) * 1998-05-01 1999-11-16 Olympus Optical Co Ltd 走査型近接場光学顕微鏡
JP4117348B2 (ja) * 1999-08-19 2008-07-16 独立行政法人産業技術総合研究所 近接場プローブ及び近接場プローブ作成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1043632A1 (fr) * 1999-04-06 2000-10-11 Thomson-Csf Dispositif d'holographie numérique

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
ARIADNA MARTINEZ-MARRADES ET AL: "Characterization of plasmonic nanoantennas by Holographic Microscopy and Scanning Near-field Microscopy", OPTICS COMMUNICATIONS, vol. 359, 1 January 2016 (2016-01-01), AMSTERDAM, NL, pages 455 - 459, XP055380333, ISSN: 0030-4018, DOI: 10.1016/j.optcom.2015.09.104 *
CELEBRANO MICHELE ET AL: "Hollow-pyramid based scanning near-field optical microscope coupled to femtosecond pulses: A tool for nonlinear optics at the nanoscale", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 80, no. 3, 20 March 2009 (2009-03-20), pages 33704 - 33704, XP012128152, ISSN: 0034-6748, DOI: 10.1063/1.3095556 *
HOSAKA S ET AL: "SNOM imaging of very fine pits formed by EB lithography for ultrahigh density optical recording", MICROELECTRONIC ENGINEER, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 67-68, 1 June 2003 (2003-06-01), pages 728 - 735, XP004428942, ISSN: 0167-9317, DOI: 10.1016/S0167-9317(03)00133-3 *
LAFOREST TIMOTHÉ ET AL: "Co-integration of a smart CMOS image sensor and a spatial light modulator for real-time optical phase modulation", OPTOMECHATRONIC MICRO/NANO DEVICES AND COMPONENTS III : 8 - 10 OCTOBER 2007, LAUSANNE, SWITZERLAND; [PROCEEDINGS OF SPIE , ISSN 0277-786X], SPIE, BELLINGHAM, WASH, vol. 9022, 4 March 2014 (2014-03-04), pages 90220N - 90220N, XP060035796, ISBN: 978-1-62841-730-2, DOI: 10.1117/12.2039867 *
MICHAEL ATLAN ET AL: "Heterodyne holographic microscopy of gold particles", ARXIV.ORG, CORNELL UNIVERSITY LIBRARY, 201 OLIN LIBRARY CORNELL UNIVERSITY ITHACA, NY 14853, 10 December 2007 (2007-12-10), XP080345411, DOI: 10.1364/OL.33.000500 *
RENÉ DÄNDLIKER ET AL: "Measuring optical phase singularities at subwavelength resolution; Measuring optical phase singularities at subwavelength resolution", JOURNAL OF OPTICS. A, PURE AND APPLIED OPTICS, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 6, no. 5, 1 May 2004 (2004-05-01), pages S189 - S196, XP020081431, ISSN: 1464-4258, DOI: 10.1088/1464-4258/6/5/009 *

Also Published As

Publication number Publication date
US20190041185A1 (en) 2019-02-07
US10684113B2 (en) 2020-06-16
JP7141948B2 (ja) 2022-09-26
FR3046683A1 (fr) 2017-07-14
FR3046683B1 (fr) 2018-06-29
JP2019501394A (ja) 2019-01-17
WO2017118828A2 (fr) 2017-07-13
EP3400488A2 (fr) 2018-11-14

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