WO2017126378A1 - 無鉛ガラス組成物、ガラス複合材料、ガラスペースト、封止構造体、電気電子部品及び塗装部品 - Google Patents
無鉛ガラス組成物、ガラス複合材料、ガラスペースト、封止構造体、電気電子部品及び塗装部品 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/24—Fusion seal compositions being frit compositions having non-frit additions, i.e. for use as seals between dissimilar materials, e.g. glass and metal; Glass solders
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
- C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
- C03C17/04—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/122—Silica-free oxide glass compositions containing oxides of As, Sb, Bi, Mo, W, V, Te as glass formers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/125—Silica-free oxide glass compositions containing aluminium as glass former
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/16—Silica-free oxide glass compositions containing phosphorus
- C03C3/21—Silica-free oxide glass compositions containing phosphorus containing titanium, zirconium, vanadium, tungsten or molybdenum
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/16—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions with vehicle or suspending agents, e.g. slip
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/18—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/20—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing titanium compounds; containing zirconium compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/22—Electrodes, e.g. special shape, material or configuration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/48—Sealing, e.g. seals specially adapted for leading-in conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/60—Seals
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2205/00—Compositions applicable for the manufacture of vitreous enamels or glazes
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/20—Glass-ceramics matrix
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
- H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
Definitions
- the present invention relates to a lead-free glass composition, a glass composite material, a glass paste, a sealing structure, an electric / electronic component, and a painted component.
- Sealing and adhesion are performed by a glass composite material containing a low-melting glass composition and ceramic particles.
- This glass composite material is often applied in the form of a glass paste.
- the glass paste is applied to a substrate by a screen printing method, a dispenser method, or the like, and dried and fired to be developed into sealing or adhesion.
- the low melting point glass composition contained in the glass composite material or glass paste is softened and fluidized to adhere to the member to be sealed or the member to be bonded.
- a glass composite material containing a low melting point glass composition and metal particles is used. Electrodes and wiring are formed. Moreover, this glass composite material is also used as a conductive joint for taking electrical conduction or a heat-radiating joint for conducting heat. Also in forming electrodes, wirings, heat dissipation joints, and the like, the low melting point glass composition contained in the glass composite material or glass paste softens and flows, thereby sintering the metal particles or bringing them into close contact with the substrate.
- a PbO—B 2 O 3 -based low-melting glass composition containing a very large amount of lead oxide has been widely applied.
- This PbO-B 2 O 3 low-melting glass composition has a low softening point of 350 to 400 ° C., good softening fluidity at 400 to 450 ° C., and relatively high chemical stability. It was.
- the PbO—B 2 O 3 -based low melting point glass composition contains a large amount of lead designated as a prohibited substance in the RoHS Directive, it has become difficult to use the glass composite material and its glass paste. Therefore, development of a new low-melting glass composition containing no lead has been advanced.
- Patent Document 1 Japanese Patent Laid-Open No. 2013-32255
- 10 to 60% by mass of Ag 2 O, 5 to 65% by mass of V 2 O 5 and 15 to 50% when the component is expressed by an oxide. mass% and the TeO 2 the total content of Ag 2 O and V 2 O 5 and TeO 2 is less than 75 wt% to 100 wt%, the balance being P 2 O 5, BaO, K 2 O
- a lead-free glass composition containing at least one of WO 3 , Fe 2 O 3 , MnO 2 , Sb 2 O 3 , and ZnO in an amount of more than 0% by mass and 25% by mass or less is disclosed.
- This Ag 2 O—V 2 O 5 —TeO 2 lead-free glass composition has a softening point in the temperature range of 268 to 320 ° C. determined from the second endothermic peak temperature of differential thermal analysis (DTA).
- DTA differential thermal analysis
- -B 2 O 3 system to softening and fluidization at a lower temperature than the low-melting-point glass composition. It is also said to have good chemical stability.
- DTA differential thermal analysis
- Ag 2 O-V 2 O 5 -TeO 2 lead-free glass composition disclosed in Patent Document 1 is significantly lower softening point than conventional PbO-B 2 O 3 -based low melting glass composition.
- this crystallization occurs more remarkably when the ceramic particles or metal particles are combined or used in the form of a paste. For this reason, it has been difficult to develop glass composite materials and glass pastes, and further use them in sealing structures and electrical / electronic components.
- the present invention reduces the crystallization tendency of the Ag 2 O—TeO 2 —V 2 O 5 lead-free glass composition and is used at a temperature equal to or lower than that of tin solder containing no lead or cadmium, ie, the melting point of tin (231. It is to provide a lead-free glass composition that softens and flows at less than 9 ° C.
- the lead-free glass composition according to the present invention contains silver oxide, tellurium oxide and vanadium oxide, and further includes yttrium oxide, lanthanum oxide, cerium oxide, erbium oxide, yttrium oxide, aluminum oxide, gallium oxide, It contains at least one of indium oxide, iron oxide, tungsten oxide, and molybdenum oxide, and the content (mol%) of silver oxide, tellurium oxide, and vanadium oxide is Ag 2 O> TeO 2 ⁇ V in terms of oxides shown below. 2 O 5, and has a relationship of Ag 2 O ⁇ 2V 2 O 5 , the content of TeO 2 is characterized in that it is 37 mol% or less than 25 mol%.
- DTA differential thermal analysis
- connection resistance of the joined body joined with the conductive material containing the lead-free glass composition and Al particles according to one embodiment of the present invention and the relationship between the lead-free glass composition and the content ratio of the Al particles in the glass composite material. It is a graph to show.
- the relationship between the wiring resistance of the electrode / wiring formed with the glass composite material containing the lead-free glass composition and Ag particles according to one embodiment of the present invention, and the content ratio of the lead-free glass composition and Ag particles in the glass composite material It is a graph which shows. It is a schematic plan view of the vacuum heat insulation multilayer glass panel which concerns on one Embodiment of this invention. It is AA sectional drawing of FIG. 9A. It is a schematic plan view which shows a part of manufacturing method of the vacuum heat insulation multilayer glass panel of FIG. 9A. It is AA sectional drawing of FIG. 10A. It is a schematic plan view which shows a part of manufacturing method of the vacuum heat insulation multilayer glass panel of FIG. 9A. FIG.
- FIG. 11B is a sectional view taken along line AA in FIG. 11A. It is a schematic sectional drawing which shows a part of manufacturing method of the vacuum heat insulation multilayer glass panel of FIG. 9A. It is a sealing temperature profile in the manufacturing process of the vacuum heat insulation multilayer glass panel shown in FIG. 1 is a schematic plan view of an organic light emitting diode (OLED) display according to an embodiment of the present invention. It is AA sectional drawing of FIG. 14A.
- FIG. 14B is a schematic plan view showing a part of the manufacturing method of the OLED display of FIG. 14A. It is AA sectional drawing of FIG. 15A.
- FIG. 14B is a schematic plan view showing a part of the manufacturing method of the OLED display of FIG. 14A.
- FIG. 16A It is a schematic sectional drawing which shows a part of manufacturing method of the OLED display of FIG. It is a schematic plan view which shows the light-receiving surface of the photovoltaic cell which concerns on one Embodiment of this invention. It is a back surface figure of the light-receiving surface of the photovoltaic cell of FIG. 18A. It is AA sectional drawing of FIG. 18A. It is a schematic sectional drawing which shows the manufacturing method of the crystal oscillator package which concerns on one Embodiment of this invention. It is a schematic sectional drawing which shows the manufacturing method of the crystal oscillator package which concerns on one Embodiment of this invention.
- FIG. 19 is a schematic cross-sectional view showing a crystal resonator package manufactured by the method of FIGS. 19A to 19F.
- the lower the characteristic temperature such as transition point, yield point, softening point, etc.
- the softening fluidity at low temperatures is deteriorated.
- the lower the characteristic temperature the lower the chemical stability such as moisture resistance and acid resistance.
- the impact on the environmental load tends to increase. For example, in the conventional PbO-B 2 O 3 low melting point glass composition, the more harmful PbO content, the lower the characteristic temperature, but the greater the tendency to crystallize, and the lower the chemical stability. The impact on the environmental load is also increased.
- the inventors of the present invention have a softening fluidity at a lower temperature than a conventional PbO-B 2 O 3 low melting point glass composition, and a chemical composition which is a low melting point glass composition substantially free of lead.
- a novel low-melting glass composition can satisfy the above requirements at the same time, and have completed the present invention.
- the lead-free glass composition according to the present invention is mainly composed of silver oxide, tellurium oxide and vanadium oxide, and further contains yttrium oxide, lanthanum oxide, cerium oxide, erbium oxide, yttrium oxide, aluminum oxide, gallium oxide and indium oxide as additional components. , Iron oxide, tungsten oxide, and molybdenum oxide.
- “lead-free” in this specification shall permit the inclusion of prohibited substances in the above-mentioned RoHS Directive (enforced on July 1, 2006) within a specified value or less. In the case of lead (Pb), it is 1000 ppm or less.
- the content of the main component of lead-free glass composition according to the present invention (mol%) is in terms of oxide shown below, Ag 2 O> TeO 2 ⁇ V 2 O 5, and Ag 2 O ⁇ 2V 2 O
- the TeO 2 content is 25 mol% or more and 37 mol% or less.
- Lead-free glass composition mainly composed of oxides of silver (Ag), tellurium (Te) and vanadium (V), yttrium (Y), lanthanum (La), cerium (Ce), erbium (Er) as additional components
- yttrium (Yb) aluminum (Al), gallium (Ga), indium (In), iron (Fe), tungsten (W) and molybdenum (Mo)
- the content (mol%) of oxides of silver (Ag), tellurium (Te) and vanadium (V), which are the main components, are set to Ag 2 O> TeO 2 ⁇ V 2 O 5 and Ag 2 O ⁇ 2V 2 O.
- the lead-free glass composition of the present invention was a lead-free glass composition having high chemical stability such as moisture resistance and acid resistance despite the softening point being lowered in temperature, and corresponding to the RoHS directive.
- the glass structure composed of Ag 2 O, TeO 2 and V 2 O 5 has a layered structure composed of V 2 O 5 and TeO 2, and Ag 2 O exists in the form of Ag + ions between the layers. It is considered a thing.
- Ag 2 O is contained for lowering the characteristic temperature such as transition point, yield point, softening point, and improving chemical stability. The characteristic temperature is lowered because Ag + ions enter between layers of a layered structure composed of V 2 O 5 and TeO 2, and the interlayer force is weakened. Further, the chemical stability is improved because Ag + ions enter between the layers and the intrusion of water molecules and the like is prevented.
- V 2 O 5 is contained in order to prevent Ag 2 O from being reduced and metal Ag from being precipitated during glass production. If Ag 2 O as a glass component does not exist in the state of Ag + ions between layers in the glass structure, the desired effect of lowering the temperature cannot be obtained. Increasing the content of Ag 2 O, that is, increasing the amount of Ag + ions between the layers in the glass structure can lower the temperature. In this case, the content of V 2 O 5 is included in order to prevent the precipitation of metal Ag. It is also necessary to increase the amount. Up to two Ag + ions can be contained between the layers in the glass structure with respect to one pentavalent vanadium ion ( V5 + ion) during glass production. TeO 2 is a vitrification component for vitrification during glass production.
- TeO 2 tetravalent tellurium ion
- the content of Ag 2 O is 40 mol% or more and less than 50 mol% and the content of V 2 O 5 is 20 mol% or more and less than 30 mol%.
- yttrium (Y), lanthanum (La), cerium are added as additional components in order to reduce the crystallization tendency.
- (Ce), erbium (Er), yttrium (Yb), aluminum (Al), gallium (Ga), indium (In), iron (Fe), tungsten (W), and molybdenum (Mo) It is effective to contain one or more.
- the content is preferably 0.1 mol% or more and 3.5 mol% or less in terms of oxide.
- the additional component is preferably an oxide of yttrium (Y), lanthanum (La), or aluminum (Al).
- Y yttrium
- La lanthanum
- Al aluminum
- the crystallization tendency can be significantly reduced.
- yttrium oxide, lanthanum oxide, and aluminum oxide is used as an additional component, its content (moles) is used in order to suppress the reduction of Ag 2 O, which is the main component during glass production, and precipitation of metal Ag. %)
- Preferably satisfies the relationship of Ag 2 O + Ln 2 O 3 ⁇ 2V 2 O 5 (Ln: Y, La, Al) in terms of oxides shown below.
- Metal Ag is precipitated during glass production because the additional components Y 2 O 3 , La 2 O 3 and Al 2 O 3 are preferentially taken in between the layers of the glass layer structure rather than the main component Ag 2 O. This is because Ag 2 O that could not enter would be deposited as metal Ag.
- the content of the additional component is particularly preferably 0.3 mol% or more and 1.5 mol% or less.
- the lead-free glass composition has high chemical stability such as moisture resistance and acid resistance despite the low softening point, and also complies with the RoHS directive.
- a glass composition having a low crystallization tendency and a lower softening point In order to develop a glass composite material containing a lead-free glass composition and ceramic particles, metal particles, or a resin and a glass paste obtained by pasting the glass composite material into a sealing structure, an electric / electronic component, and a painted component, It is preferable to use a glass composition having a low crystallization tendency and a lower softening point. That is, by using a glass composition having a low crystallization tendency and a lower softening point, the softening fluidity of the glass composite material or glass paste at a low temperature is improved. However, in the conventional low melting point glass composition, lowering the softening point often involves lowering the crystallization start temperature.
- FIG. 1 is an example of a typical DTA curve unique to glass.
- DTA of glass uses glass particles having a particle size of several tens of ⁇ m, and further uses high-purity alumina ( ⁇ -Al 2 O 3 ) particles as a standard sample. Measured at temperature rate.
- the start temperature of the first endothermic peak is the transition point T g
- the endothermic peak temperature is the yield point M g
- the second endothermic peak temperature is the softening point T s
- the start of the exothermic peak due to crystallization The temperature is the crystallization start temperature T cry .
- Each characteristic temperature is generally obtained by a tangent method.
- the characteristic temperatures of T g , M g and T s are defined by the viscosity of the glass, T g is 10 13.3 poise, M g is 10 11.0 poise and T s is the temperature corresponding to 10 7.65 poise. It is. Crystallization tendency has a T cry, the size of the exothermic peak due to crystallization, i.e. be determined from the calorific value, the high temperature of T cry, i.e. a temperature difference increases between T s and T cry, a decrease in heat of crystallization It can be said that the glass is difficult to crystallize.
- the firing temperature when sealing and adhering various components and forming electrodes / wiring and conductive / heat dissipating joints is the type of ceramic particles and metal particles contained, the content and particle size, also heating rate, atmosphere, also influenced by the sintering conditions of pressure, etc., usually about 30 ⁇ 50 ° C. higher is often set than the softening point T s in.
- the low-melting glass composition has good softening fluidity without crystallization.
- the lead-free glass composition according to the present invention has a characteristic temperature at the transition point T g , yield point M g and softening point T s that is significantly lower than that of the conventional one, and the temperature difference between them is small, that is, the viscosity gradient is large. Even if the firing temperature is around the softening point T s, good softening fluidity can be obtained. Further, even if short holding time, has sufficient softening fluidity if most 20 ° C. of about a temperature higher than its T s. Since the softening point T s of the lead-free glass composition according to the present invention is as low as 200 ° C. or lower, the use temperature is equal to or lower than that of tin solder not containing lead or cadmium, specifically, the melting point of tin (231.9 ° C.). Less than, preferably 200 ° C. or lower.
- the glass composite material includes the lead-free glass composition according to the present invention and one or more of ceramic particles, metal particles, and resins.
- the glass composite material containing the ceramic particles preferably contains 40% by volume or more and less than 100% by volume of the lead-free glass composition and more than 0% by volume and 60% by volume or less of the ceramic particles.
- the lead-free glass composition preferably contains 40% by volume or more and less than 100% by volume of the lead-free glass composition and more than 0% by volume and 60% by volume or less of the ceramic particles.
- good softening fluidity can be obtained.
- ceramic particles include zirconium tungstate phosphate (Zr 2 (WO 4 ) (PO 4 ) 2 ), quartz glass (SiO 2 ), zirconium silicate (ZrSiO 4 ), alumina (Al 2 ).
- ceramic particles effective for reducing the thermal expansion of a glass composite material are zirconium tungstate phosphate (Zr 2 (WO 4 ) (PO 4 ) 2 ) or zirconium tungstate phosphate (Zr 2 (WO 4 )). It is a compound mainly composed of (PO 4 ) 2 ), and its preferred content is 30% by volume or more and 50% by volume or less.
- the glass composite material containing metal particles preferably contains 5% by volume or more and less than 100% by volume of a lead-free glass composition and more than 0% by volume and 95% by volume or less of metal particles.
- the lead-free glass composition By setting the lead-free glass composition to 5% by volume or more or the metal particles to 95% by volume or less, sintering between metal particles and adhesion to a base material are improved.
- the metal particles include gold (Au), silver (Ag), silver alloy, copper (Cu), copper alloy, aluminum (Al), aluminum alloy, tin (Sn), And at least one of tin alloys is preferred.
- the metal particles effective for improving the electrical conductivity and heat dissipation of the glass composite material are silver (Ag) and aluminum (Al), and the preferred content is 10 volume% or more and less than 90 volume%.
- the lead-free glass composition according to one embodiment of the present invention can promote the sintering of silver (Ag) particles and can remove the surface oxide film of aluminum (Al) particles.
- the glass composite material containing resin contains 5% by volume or more and less than 100% by volume of a lead-free glass composition and more than 0% by volume to 95% by volume of resin.
- the resin is preferably at least one of an epoxy resin, a phenoxy resin, a phenol resin, an acrylic resin, a urethane resin, and a fluororesin.
- the glass paste contains a glass composite material containing a lead-free glass composition and a solvent.
- a solvent ⁇ -terpineol or butyl carbitol is preferably used. This is because these solvents are difficult to crystallize for the lead-free glass composition.
- a viscosity modifier, a wetting agent, etc. can be added as needed and the stability and applicability
- the glass composite material or glass paste When sealing or adhering in a sealing structure using a glass composite material containing ceramic particles or its glass paste, the glass composite material or glass paste is used at the sealing location of the object to be sealed or the adhesive location of the object to be bonded. It was placed and coating, it is preferably baked at a temperature range of about 20 ° C. above its T s from the vicinity of the softening point T s of the Pb-free glass composition contained. Glass composite materials and glass pastes use lead-free glass compositions with a reduced tendency to crystallize and a low softening point, thereby improving softening fluidity at low temperatures and lowering the firing temperature. .
- the lead-free glass composition according to an embodiment of the present invention has good chemical stability, the reliability of the sealing structure can be ensured.
- the glass composite material or glass paste is applied to a predetermined location such as a substrate. place and coating, it is preferably baked at a temperature range of about 20 ° C. above its T s from the vicinity of the softening point T s of the Pb-free glass composition contained.
- the metal particle to be used is a metal which is easily oxidized, in order to prevent oxidation of the metal particle, it is desirable that the firing atmosphere is an inert gas or a vacuum.
- Glass composite materials and glass pastes use lead-free glass compositions with a reduced tendency to crystallize and a low softening point, thereby improving softening fluidity at low temperatures and lowering the firing temperature. .
- the formation temperature of the electrode / wiring and the conductive / heat dissipating joint, that is, the firing temperature can be lowered.
- the productivity titanium dioxide
- the lead-free glass composition according to an embodiment of the present invention has good chemical stability, the reliability of electrical and electronic parts can be ensured.
- a metal, ceramics, or glass is effective as a base material.
- a glass composite material or a glass paste is disposed or applied to a predetermined portion of the base material, and is fired in the temperature range of about 20 ° C. higher than the T s from near the softening point T s of the lead-free glass composition contained.
- Glass composite materials and glass pastes can improve softening fluidity at low temperatures and lower firing temperatures by using a lead-free glass composition having a reduced crystallization tendency and a low softening point. As a result, it is possible to improve the reliability such as coating film adhesion, heat resistance, chemical stability and the like of the coated parts while reducing the influence on the environmental load.
- a glass composite material or glass paste according to an embodiment of the present invention includes a vacuum heat insulating multilayer glass panel applied to a window glass or the like, a plasma display panel, an organic EL display panel, a display panel such as a fluorescent display tube, and a crystal. It is suitably used for sealing a package device such as a vibrator, an IC package, and a MEMS.
- a sealing structure using a glass composite material or a glass paste includes an internal space and a sealing portion that is made of a glass composite material and separates at least a part of the boundary between the internal space and the outside.
- the content of the lead-free glass composition contained in the glass composite material forming the sealing portion is preferably 50% by volume or more, and it is effective that the glass composite material contains ceramic particles.
- a glass composite material or glass paste according to an embodiment of the present invention includes a solar battery cell, an image display device, a multilayer capacitor, an inductor, a crystal resonator, a resin wiring board, a light emitting diode (LED), a multilayer circuit board, a semiconductor module, and the like. It is suitably used for forming electrodes, wirings, conductive joints and heat dissipation joints of electrical and electronic parts.
- An electric / electronic component formed of a glass composite material or a glass paste includes an electrode, a wiring, a conductive joint portion, or a heat dissipation joint portion made of a glass composite material. It is preferable that the content of the metal particles contained in the glass composite material forming the electrode, the wiring, the conductive joint or the heat radiation joint is 50% by volume or more.
- a painted part formed of a glass composite material or a glass paste includes a member and a coating film formed on the member.
- the member is a metal, ceramic, or glass substrate, and the coating film includes the glass composite material according to the present invention.
- the glass composite material forming the coating film contains a resin and the content of the resin is 50% by volume or more.
- Suitable examples of painted parts include electric wires, car bodies, airframes, washing machine tubs, toilet bowls, bathtub tiles, and the like.
- silver (Ag), tellurium (Te), and vanadium (V) oxides are the main components, and yttrium (Y), lanthanum (La), cerium (Ce), and erbium (Er) as additional components.
- Lead-free glass composition containing at least one oxide of any one of yttrium, Yb, aluminum (Al), gallium (Ga), indium (In), iron (Fe), tungsten (W), and molybdenum (Mo) The effect of the glass composition on the glass properties was examined.
- liquidity, and chemical stability were evaluated.
- Lead-free glass compositions A-01 to A-41 (Examples) shown in Table 1 described later and lead-free glass compositions B-01 to B-48 (Comparative Examples) shown in Table 2 were prepared.
- the compositions shown in Tables 1 and 2 are blended compositions at the time of glass production.
- As the starting materials of the main component Shinko Kagaku V 2 O 5, was used a powder of Kojundo Chemical Laboratory Ltd. TeO 2 and Wako Junyaku Co. Ag 2 O.
- Each starting material powder was weighed, blended and mixed to a total of about 200 g and put into a quartz glass crucible.
- a quartz glass crucible charged with the raw material mixed powder is placed in a glass melting furnace and heated to 700 to 750 ° C. at a rate of temperature increase of about 10 ° C./min to achieve a uniform composition of the melt in the quartz glass crucible.
- the mixture was held for 1 hour while stirring with an alumina rod. Thereafter, the quartz glass crucible is taken out from the glass melting furnace, and the melt is poured into a stainless steel mold heated to around 100 ° C.
- the lead-free glass compositions A-01 to A-41 of the examples and the lead-free glass of the comparative example Compositions B-01 to B-48 were prepared.
- the produced lead-free glass composition was pulverized to an under 45 ⁇ m.
- the vitrification states of the produced lead-free glass compositions A-01 to A-41 and B-01 to B-48 were evaluated based on whether or not crystals were precipitated by X-ray diffraction using the glass powder. In the case where no precipitation of crystals was observed, the vitrification state was considered good and the evaluation was “pass”. On the other hand, when precipitation of crystals was observed, the vitrification state was not a uniform amorphous state and was evaluated as “failed”.
- the characteristic temperatures of the produced lead-free glass compositions A-01 to A-41 and B-01 to B-48 were evaluated by differential thermal analysis (DTA) using the glass powder.
- DTA differential thermal analysis
- a macro cell type was used for DTA.
- About 500 mg of glass powder was placed in the macrocell and heated from room temperature to 300 ° C. at a temperature rising rate of 5 ° C./min in the atmosphere to obtain a DTA curve as shown in FIG. From the obtained DTA curve, a transition point T g , a yield point M g and a softening point T s were measured.
- DTA was not performed for the lead-free glass composition whose vitrification state was “failed”.
- the softening fluidity of the produced lead-free glass compositions A-01 to A-41 and B-01 to B-48 was evaluated by a button flow test of a green compact produced using the glass powder.
- the green compact was molded into a cylindrical shape having a diameter of about 10 mm and a height of about 5 mm under the condition of 1 ton / cm 2 using a mold and a hand press.
- the green compact formed on the alumina ceramic substrate is introduced into an electric furnace, and heated from room temperature to 180 ° C, 190 ° C, 200 ° C, 210 ° C and 220 ° C at a temperature rising rate of 10 ° C / min.
- the chemical stability of the prepared lead-free glass compositions A-01 to A-41 and B-01 to B-48 was evaluated by a moisture resistance test and an acid resistance test.
- a cullet of about 10 to 20 mm before pulverization was used as the glass test piece.
- the moisture resistance test the cullet was allowed to stand for 10 days at a temperature of 80 ° C. and a humidity of 90%.
- the acid resistance test the cullet was immersed in a 1 N aqueous nitric acid solution at room temperature for 3 days. The appearance of cullet after both tests was visually observed. If no change was observed in the appearance, the result was “accepted”, whereas if the change was observed, the result was “failed”.
- a conventional leaded low melting point glass composition (84PbO-13B 2 O 3 -2SiO 2 -1Al 2 O having a transition point T g of 313 ° C., a yield point M g of 332 ° C. and a softening point T s of 386 ° C. 3 %) was subjected to the same moisture resistance test and acid resistance test, both of which were “failed”. In evaluating the chemical stability, the above-mentioned moisture resistance test and acid resistance test were not performed on the lead-free glass composition having a vitrification state of “fail”.
- Table 1 shows the vitrification state, characteristic temperature, softening fluidity and chemical stability of the lead-free glass compositions A-01 to A-41 of the examples and Table 2 of the lead-free glass compositions B-01 to B-48 of the comparative examples. The result of having evaluated sex is shown.
- Tables 1 and 2 the unit of the values of the main component and the subcomponent is mol%.
- B-01 to B-03 and B-06 which are comparative examples, were “failed” because metal Ag or the like was deposited.
- Glass compositions other than B-01 to B-03 and B-06 (Examples A-01 to A-41 and Comparative Examples B-4, B-5 and B-7 to B-48) were vitrified. The condition was good and “pass”. Further, it was found that the lead-free glass compositions of these examples and comparative examples were “passed” in both moisture resistance and acid resistance and had excellent chemical stability.
- lead-free glass composition B-4, B-5 and B-7 ⁇ B-48 has a softening point T s was as high as 200 ° C. greater.
- B-04 was a glass composition that was easily crystallized.
- B-4, B-5, and B-7 to B-48 did not reach “flow” in the softening fluidity in the temperature range of 180 to 220 ° C., but remained “softening” at most.
- none of the lead-free glass compositions of these comparative examples “softened” at 200 ° C. or lower.
- Example A-01 a softening point T s of as low as 200 ° C. or less, were obtained good softening fluidity at 220 ° C. or less.
- the softening fluidity at 180 to 200 ° C. was “flowing”, but at 210 ° C. and 220 ° C. higher than that, surface devitrification due to crystallization hindering “flowing” was observed. . This is presumably because the content of the additional component La 2 O 3 was small.
- A-02 to A-41 such surface devitrification was not observed, and the surface had a glossy surface, and the crystallization tendency at 210 ° C. and 220 ° C.
- the softening fluidity at 210 ° C. and 220 ° C. was “flow”, which was a favorable evaluation result.
- the softening fluidity at 200 ° C. is “flow”, and among them, A-01 to A-25, A-32 to A-34, A-40 and A- No. 41 has a softening fluidity of 190 ° C. and “flow”, and A-01 to A-20 and ⁇ 23 to A-25 also have a softening fluidity of 180 ° C. and “fluid”, which is excellent even at 200 ° C. or lower. It was found to have a softening fluidity.
- the firing atmosphere is not limited, it can be heated in various atmospheres, and it can be adhered to various substances such as ceramics, glass, metal, semiconductor, and heat resistant resin.
- the effective glass composition contains Ag 2 O, TeO 2 and V 2 O 5 as main components, and further contains Y 2 O 3 , La 2 O 3 , CeO 2 , Er 2 O 3 , Yb as additional components.
- 2 O 3 , Al 2 O 3 , Ga 2 O 3 , In 2 O 3 , Fe 2 O 3 , WO 3 and MoO 3 are contained in a small amount, the main component content is mol%, Ag It was found that the content of 2 O> TeO 2 ⁇ V 2 O 5 and Ag 2 O ⁇ 2 V 2 O 5 and TeO 2 was 25 mol% or more and 37 mol% or less.
- the content of Ag 2 O was 40 mol% or more and less than 50 mol%, and the content of V 2 O 5 was 20 mol% or more and less than 30 mol%.
- content of the additional component was 0.1 mol% or more and 3.5 mol% or less in terms of the oxide.
- the additional component, Y 2 O 3, La 2 O 3 and Al 2 is preferably one or more kinds of O 3, in mole% Ag 2 O + Ln 2 O 3 ⁇ 2V 2 O 5 (Ln: Y, La, Al ) was effective.
- the content of particularly preferred additional components was 0.3 mol% or more and 1.5 mol% or less in terms of the above oxide.
- the lead-free glass composition having an effective composition range described above had a softening point T s of 200 ° C. or less, which is the second endothermic peak temperature by differential thermal analysis.
- the glass composite material, glass paste, sealing structure, electrical / electronic component, and painted component containing the lead-free glass composition according to one embodiment of the present invention will be specifically described.
- Example 2 In Example 2, using a glass composite material containing a lead-free glass composition and ceramic particles, the same kind of metal base materials, glass base materials, and ceramic base materials are joined together, and the joining state is expressed as shear stress. It was evaluated with. Two types of A-05 and A-22 shown in Table 1 were used as the lead-free glass composition, and seven types (CF-01 to CF-07) shown in Table 3 were used as the ceramic particles. Table 3 also shows the density and thermal expansion coefficient of these ceramic particles. On the other hand, the density of the lead-free glass composition shown in Table 1 was around 6 g / cm 3 and the thermal expansion coefficient was in the range of approximately 180 ⁇ 10 ⁇ 7 to 200 ⁇ 10 ⁇ 7 / ° C.
- the evaluation sample is prepared by first producing a glass paste containing lead-free glass composition particles, ceramic particles, and a solvent, and applying the coating to each substrate, drying, and pre-baking, and then bonding the substrates together and heating them. did.
- a glass paste was prepared by blending and mixing the lead-free glass composition particles, ceramic particles, and a solvent.
- the lead-free glass composition particles include A-05 and A-22 having a particle size of approximately 10 ⁇ m
- the ceramic particles include zirconium tungstate phosphate (CF-01) and iron tungstate having a particle size of approximately 10 to 30 ⁇ m.
- ⁇ -terpineol was used as a solvent and isobornylcyclohexanol was added as a viscosity modifier.
- butyl carbitol acetate was used as a solvent and ethyl cellulose was used as a resin binder.
- the blending ratio of the lead-free glass composition particles and ceramic particles is 8 by volume%: 100: 0, 90:10, 80:20, 70:30, 60:40, 50:50, 40:60 and 30:70.
- Each type of glass paste was produced.
- the content of the solid content (the total of the lead-free glass composition particles and ceramic particles) in the glass paste was about 75 to 80% by mass.
- FIG. 2 shows a method for producing an evaluation sample.
- a cylindrical substrate 1 having a diameter of 5 mm and a thickness of 2 mm having a joint surface 2 was prepared (a).
- the glass paste 3 was apply
- Nickel (Ni) is 133 ⁇ 10 ⁇ 7 / ° C.
- iron (Fe) is 127 ⁇ 10 ⁇ 7 / ° C.
- soda lime glass is 88 ⁇ 10 ⁇ 7 / ° C.
- alumina (Al 2 O 3 ) is 81 ⁇ 10 ⁇ 7 / ° C.
- the shear stress of the joined body produced using each glass paste was evaluated.
- the shear stress was evaluated as “excellent” when 30 MPa or higher, “good” when 20 to 30 MPa, “normal” when 10 to 20 MPa, and “fail” when less than 10 MPa.
- Tables 4 to 10 show the results of evaluating the shear stress of the joined body in each substrate.
- Table 4 is a joined body of aluminum (Al) base materials
- Table 5 is a joined body of silver (Ag) base materials
- Table 6 is a joined body of copper (Cu)
- Table 7 is a nickel (Ni) base material.
- Table 8 shows the evaluation results of the joined body of iron (Fe)
- Table 9 shows the joined body of soda lime glass substrates
- Table 10 shows the joined body of alumina (Al 2 O 3 ).
- CF-04, CF-05 and CF-06 of Table 3 are used as ceramic particles, and the content (blending amount) is 20 to 40% by volume.
- the lead-free glass compositions A-05 and A-22 were examined in the range of 60 to 80% by volume. Excellent results were obtained under all conditions, and similar results were obtained when either A-05 or A-22 was used.
- the content (mixing amount) of the combination with CF-04 or CF-06 increased, the adhesion and adhesion to copper (Cu) improved. This is because the thermal expansion coefficient matches that of copper (Cu).
- the reverse is true for CF-07. This is because the coefficient of thermal expansion of CF-07 is much lower than that of CF-04 or -06.
- CF-03, CF-06, and CF-07 of Table 3 are used as ceramic particles, and the content (mixing amount) thereof is 30 to 50% by volume.
- the lead-free glass compositions A-05 and A-22 were examined in the range of 50 to 70% by volume. Excellent results were obtained under all conditions, and similar results were obtained when either A-05 or A-22 was used.
- CF-03 it was found that when the content (blending amount) was 40% by volume, the shear stress was the largest, and the adhesion and adhesion to the nickel (Ni) substrate were very high.
- CF-01 to CF-03 of Table 3 are used as ceramic particles, the content (blending amount) is 30 to 50% by volume, and a lead-free glass composition
- the products A-05 and A-22 were examined in the range of 50 to 70% by volume. Excellent results were obtained under all conditions, and similar results were obtained when either A-05 or A-22 was used.
- CF-01 and CF-02 With CF-01 and CF-02, a large shear stress was obtained regardless of the content (blending amount), and it was found that the adhesion and adhesion to iron (Fe) were very high.
- CF-01 and CF-02 of Table 3 are used as the low thermal expansion ceramic particles, the content (blending amount) is 40 to 70% by volume, lead-free glass Compositions A-05 and A-22 were examined in the range of 30 to 60% by volume. In shear stress, there was almost no difference between CF-01 and CF-02, and A-05 and A-22.
- the adhesiveness and adhesion to the soda lime glass substrate deteriorated, and good shear stress was not obtained.
- the same shear stress evaluation result as that of the joined body of soda lime glass base materials was obtained. This is because the thermal expansion coefficients of alumina (Al 2 O 3 ) and soda lime glass are similar. From this, in the glass composite material, it is important that the content (blending amount) of the lead-free glass composition of the present invention is 40% by volume or more and the content (blending amount) of the ceramic particles is 60% by volume or less. It was.
- zirconium phosphate tungstate (Zr 2 (WO 4 ) (PO 4 ) 2 ), quartz glass (SiO 2 ), zirconium silicate (ZrSiO 4 ) Alumina (Al 2 O 3 ), mullite (3Al 2 O 3 .2SiO 2 ), and niobium oxide (Nb 2 O 5 ) have been described, but are not limited thereto.
- Example 3 In Example 3, using a glass composite material containing a lead-free glass composition and metal particles, the same type and different types of metal base materials are joined together, and the joining state is expressed by electrical resistance (connection resistance) between the metal base materials. evaluated.
- As the lead-free glass composition A-18 shown in Table 1, and as the metal particles, three types of silver (Ag), copper (Cu), aluminum (Al) and tin (Sn) were used. Moreover, aluminum (Al), copper (Cu), nickel (Ni), and iron (Fe) were used for the metal base material.
- a glass paste containing lead-free glass composition particles, metal particles, and a solvent is prepared, applied to an aluminum (Al) substrate, dried, pre-fired, and the same and different metal substrates are combined and resistance-welded. What was joined by this was used as the evaluation sample.
- a glass paste was prepared by blending and mixing particles of a lead-free glass composition, metal particles, and a solvent.
- the lead-free glass composition particles are A-18 with a particle size of about 3 ⁇ m
- the metal particles are spherical silver (Ag) particles with an average particle size of about 2 ⁇ m
- spherical copper (Cu) particles with a particle size of about 15 ⁇ m
- Spherical aluminum (Al) particles and about 30 ⁇ m tin (Sn) particles were used.
- ⁇ -terpineol was used as a solvent
- isobornylcyclohexanol was added as a viscosity modifier.
- the blending ratio of the lead-free glass composition particles and the metal particles is 100%, 80:20, 60:40, 40:60, 30:70, 20:80 and 10:90 in volume%, A glass paste was prepared.
- the content of the solid content (total of lead-free glass composition particles and metal particles) in the glass paste was 75 to 80% by mass.
- evaluation sample As an evaluation sample for measuring the connection resistance between metal substrates and a manufacturing method thereof, the same evaluation sample and the manufacturing method as in Example 2 were applied. That is, in this example, the evaluation sample and its manufacturing method shown in FIG. 2 were applied.
- an aluminum (Al) columnar substrate 1 ′ having a bonding surface 2 ′ having a diameter of 5 mm and a thickness of 2 mm was prepared (a).
- glass paste 3 ' was applied to the joining surface 2' of the cylindrical metal substrate 1 'by a dispenser method (b).
- the glass composite material 4 ′ is made of aluminum (Al) cylindrical metal substrate 1 ′. (C).
- This is installed on a plate-like metal substrate 5 ′ made of aluminum (Al), copper (Cu), nickel (Ni) and iron (Fe) having a thickness of about 1 mm, and a load of 100 to 150 N and an applied current in a resistance welder.
- a bonded body of Al and Al, Al and Cu, Al and Ni, and Al and Fe was produced under the conditions of 5 kA and application time of 100 to 200 msec (d).
- connection resistance between metal substrates was measured with these joined bodies.
- connection resistance electrical resistance
- a lead-free tin solder was used and joined in an inert gas (in argon) at 250 ° C. for 10 minutes.
- the connection resistance by this solder is 3.2 ⁇ 10 ⁇ 3 ⁇ / mm 2 for the Al / Al solder joint, 1.5 ⁇ 10 ⁇ 3 ⁇ / mm 2 for the Al / Cu solder joint, and Al / Ni.
- connection resistances were about three orders of magnitude larger because the connection resistance of the solder joint of Cu and Cu was 5.0 ⁇ 10 ⁇ 6 ⁇ / mm 2 . This is probably because a natural oxide film having high electrical resistance is formed on the surface of the Al base.
- FIG. 3 shows the connection resistance when Al and Al, Al and Cu, Al and Ni, and Al and Fe are joined by a glass composite material containing a lead-free glass composition A-18 and metal particles Ag, and A in the glass composite material.
- the relationship between -18 and the content ratio of Ag particles is shown.
- the connection resistance was stable and low.
- connection resistances were about three orders of magnitude smaller than those of Al solder joints and were as good as or lower than those of Cu and Cu solder joints. This is because A-18 in the glass composite material reacts with the Al base material by softening and flowing, the natural oxide film formed on the surface of the Al base material is removed, and an alloy of Al and V such as Al 3 V is formed. It is considered that the electrical resistance at the interface was lowered by the formation of the interface portion, V from A-18, and the precipitation of metal Ag. Furthermore, the metal Ag deposited on the interface portion precipitated and grew in the direction of current application by the applied current of resistance welding.
- the glass composite material does not contain Ag particles and only A-18, it is considered that the connection resistance of each joined body achieved 10 ⁇ 6 ⁇ / mm 2 units.
- sparks were generated between the electrodes of the resistance welder. Care should be taken because this shortens the life of the electrodes of the resistance welder.
- a suitable A-18 content in the glass composite material is considered to be 40 to 20% by volume, and a suitable Ag particle content is considered to be 60 to 80% by volume.
- the content of A-18 is less than 20% by volume, the reaction with the Al base material is reduced, and the amount of metal Ag deposited from A-18 is reduced. It is considered that a slight tendency to increase the resistance was observed.
- FIG. 4 shows a connection resistance when joining Al and Al, Al and Cu, Al and Ni, and Al and Fe by a glass composite material containing a lead-free glass composition A-18 and metal particles Cu.
- grains is shown.
- any combination of Al and Al, Al and Cu, Al and Ni, and Al and Fe has a wide range of 10 ⁇ 6 ⁇ / mm in the second half. From 10 -5 ⁇ / mm, the connection resistance was in the first half of the 2 units. In particular, the connection resistance was low when the A-18 content in the glass composite material was 80 to 40% by volume and the Cu particle content was 20 to 60% by volume. However, this is higher in connection resistance than that in FIG. 3 using Ag particles, and is considered to be caused by surface oxidation of Cu particles in the glass composite material.
- FIG. 5 shows the connection resistance when Al and Al, Al and Cu, Al and Ni, and Al and Fe are joined by a glass composite material containing lead-free glass composition A-18 and metal particles Al, and A in the glass composite material.
- the relationship between -18 and the content ratio of Al particles is shown.
- the connection resistance was low when the A-18 content in the glass composite material was 40 to 20% by volume and the Al particle content was 60 to 80% by volume.
- the connection resistance was slightly higher than in FIG. 3 using Ag particles.
- Al particles have the feature that they are much cheaper than Ag particles, it is advantageous to use both Al particles and Ag particles as metal particles for reducing the resistance and cost of glass composite materials and glass pastes thereof. It was thought that there was. Accordingly, an Al / Cu bonded body in which the A-18 content in the glass composite material is constant at 30% by volume and the mixing ratio of Al particles and Ag particles is 30:40 and 40:30 in volume% is the same as described above. Each was made, and the connection resistance was evaluated. As a result, it was revealed that the connection resistance equivalent to 70% by volume of Ag particles not containing Al particles was obtained, and it was effective to use both Al particles and Ag particles.
- FIG. 6 shows a connection resistance when Al and Al, Al and Cu, Al and Ni, and Al and Fe are joined by a conductive material containing a lead-free glass composition A-18 and metal particles Sn, and A in a glass composite material.
- A-18 and metal particles Sn and A in a glass composite material.
- grains is shown.
- connection resistance was low when the A-18 content in the glass composite material was 80 to 40% by volume and the Cu particle content was 20 to 60% by volume. This has a tendency similar to that in FIG. 4 using Cu particles, and has a higher connection resistance than that in FIGS. 3 and 5 using Ag particles or Al particles, and the surface of Sn particles in the glass composite material. It is thought to be due to oxidation.
- the lead-free glass composition of the present invention is effectively developed into a glass composite material and a glass paste thereof that form a conductive joint for taking electrical conduction between metal substrates by compounding with metal particles at a low temperature. it can.
- A-18 was representatively described as the lead-free glass, but the same performance can also be achieved with the lead-free glass compositions A-1 to A-41.
- the glass composite material or its glass paste contains metal particles, Ag, Cu, Al, and Sn have been described.
- the present invention is not limited to these, and these alloys can exhibit equivalent performance. .
- Solder is often used to form conductive joints and heat-dissipating joints between metal substrates, but considering the differentiation from solder, as metal particles contained in glass composites and their glass pastes Ag particles and Al particles are effective. In addition, with solder, it is difficult to perform good conductive bonding and heat dissipation bonding on a metal base material having a natural oxide film formed on the surface like Al, but the glass composite material according to one embodiment of the present invention or In the glass paste, conductive bonding and heat dissipation bonding are possible even with such a metal substrate by the action of the lead-free glass composition contained therein.
- the glass composite material or glass paste containing metal particles can be used as the glass composite material or the glass paste as described in Example 2 when conductivity is allowed in the joint portion or the sealing portion. It is. In that case, the thermal expansion coefficient is not matched with the material to be joined or the material to be sealed as in the second embodiment, but the stress is relaxed by the size and amount of the metal particles to be contained and the low temperature joining or the low temperature sealing is performed. Will do.
- electrodes / wirings are formed on various substrates using a glass composite material containing a lead-free glass composition and metal particles, and the electrical resistance (wiring resistance) of the electrodes / wirings and adhesion to the various substrates. Sex was evaluated.
- As the lead-free glass composition A-20 shown in Table 1 was used, and as the metal particles, silver (Ag) was used.
- As the substrate an alumina (Al 2 O 3 ) substrate, a borosilicate glass substrate, a silicon (Si) substrate, a ferrite substrate, and a polyimide substrate were used.
- a glass paste containing lead-free glass composition particles, metal particles, and a solvent was prepared, and applied to various substrates, dried, and calcined to form electrodes / wirings. This was used as an evaluation sample.
- a glass paste was prepared by blending and mixing particles of a lead-free glass composition, metal particles, and a solvent.
- the lead-free glass composition particles were A-20 having a particle size of about 1 ⁇ m, and the metal particles were spherical silver (Ag) particles having an average particle size of about 1.5 ⁇ m. Further, ⁇ -terpineol was used as a solvent, and isobornylcyclohexanol was added as a viscosity modifier.
- Table 11 shows the blending ratio of the lead-free glass composition A-20 particles to the metal particles Ag. Seven types of glass pastes were prepared at the blending ratios shown in Table 11. The content of solid content (total of lead-free glass composition particles and metal particles) in the glass paste was 75 to 80% by mass.
- each electrode / wiring was formed with the wiring pattern shown in FIG.
- an alumina (Al 2 O 3 ) substrate, a borosilicate glass substrate, a silicon (Si) substrate, a ferrite substrate, and a polyimide substrate were used as the substrate 6 in FIG. 7.
- the wirings 7 to 13 correspond to DH-01 to 07 in Table 11.
- each conductive glass paste was used to apply a 2 mm ⁇ 40 mm pattern on each substrate by a screen printing method and dried at 150 ° C. in the atmosphere. The film thickness at that time was 30 to 40 ⁇ m. This was put into an electric furnace, heated to 200 ° C. at a temperature rising rate of 10 ° C./min in the atmosphere, and held for 30 minutes, whereby wirings 7 to 13 were formed on the substrate 6.
- the wiring resistance of the wirings 7 to 13 formed on each substrate was measured by the four-terminal method according to the blending ratio of the seven types of glass pastes DH-01 to 07 shown in Table 11.
- FIG. 8 shows the relationship between the wiring resistance and the content of A-20 and Ag in the conductive material in the wiring formed on each substrate by the glass composite material containing the lead-free glass composition A-20 and the metal particles Ag. Show.
- the substrates five types of A 2 O 3 substrate, borosilicate glass substrate, Si substrate, ferrite substrate and polyimide substrate were examined, but almost no difference in wiring resistance depending on the substrate was recognized.
- the Ag content increases and the A-20 content decreases, the wiring resistance decreases.
- the Ag content is 70 to 95% by volume and the A-20 content is 30 to 5% by volume, 10 ⁇ 6 ⁇ cm
- the wiring resistance of the base was achieved.
- the minimum wiring resistance was obtained when the Ag content was 80 to 90% by volume and the A-20 content was 10 to 20% by volume.
- the glass composite material according to FIG. 8 can promote necking of Ag particles by having good softening fluidity at the time of wiring formation. For this reason, an electrode / wiring having a remarkably low wiring resistance can be formed at such a low temperature, in this embodiment, at a low temperature of 200 ° C.
- five types of A 2 O 3 substrate, borosilicate glass substrate, Si substrate, ferrite substrate, and polyimide substrate were examined, but it can be easily guessed that the present invention can be applied to other substrates. . In particular, it is highly expected for development on resin substrates.
- Table 12 shows the result of the peeling test of each wiring formed on each substrate.
- the content of the lead-free glass composition A-20 is 10% by volume or more and the content of the metal particles Ag is 90% by volume or less, as shown in DH-02 to 07 of Table 12, any substrate can be used. It was a pass and good adhesion was obtained. However, when the A-20 content was 5% by volume and the Ag content was 95% by volume, the wiring was peeled off from any substrate and failed, and the adhesion was not sufficient. . This is considered to be because the content of the lead-free glass composition in the glass composite material was small. From this, it was found that the content of the lead-free glass composition is preferably 10% by volume or more as the glass composite material. However, even if the content of the lead-free glass composition is 5% by volume, there is a possibility that good adhesion can be obtained if a device such as pressurization can be applied at the time of wiring formation.
- the lead-free glass composition of the present invention can be effectively developed into a glass composite material and its glass paste that form electrodes / wirings at a low temperature.
- A-20 was representatively described as the lead-free glass, but it goes without saying that the same performance can be achieved with the lead-free glass compositions A-01 to A-41.
- Ag is described as the metal particles contained in the glass composite material and the glass paste.
- the present invention is not limited to this, and can be applied to Ag alloys, Cu, Al and Sn, or alloys thereof. It goes without saying that there is sex. It has been found that the glass composite material and its glass paste according to an embodiment of the present invention can be effectively developed for low temperature formation of electrodes / wirings in various electronic components.
- Example 5 the adhesion strength of metals, ceramics and glass to a substrate was evaluated using a glass composite material containing a lead-free glass composition and a resin.
- the lead-free glass composition A-07 shown in Table 1 was used, and as the resin, six kinds of resins such as epoxy resin, phenoxy resin, phenol resin, acrylic resin, urethane resin and fluorine resin were used.
- aluminum (Al), copper (Cu) and iron (Fe) are used for the metal substrate, alumina (Al 2 O 3 ) and magnesia (MgO) are used for the ceramic substrate, and soda lime glass and borosilicate are used for the glass substrate.
- Acid glass was used.
- a glass paste containing lead-free glass composition particles, a resin, and a solvent was used as a paint, which was applied to various substrates and baked to form an evaluation sample.
- a glass paste was prepared by blending and mixing particles of a lead-free glass composition, a resin, and a solvent.
- A-07 having a particle diameter of about 1 ⁇ m was used as the lead-free glass composition particles, and butyl carbitol acetate was used as the solvent.
- an epoxy resin, a phenoxy resin, a phenol resin, an acrylic resin, a urethane resin, and a fluororesin were each dissolved in a solvent.
- particles of the lead-free glass composition were introduced into the solution and stirred well to prepare a glass paste.
- the blending ratio of the lead-free glass composition and the resin was 0: 100 and 10:90 in volume%.
- the solid content (total of the lead-free glass composition and the resin) in the glass paste was 75 to 80% by mass.
- the mixture ratio of a lead-free glass composition and resin is 0: 100, ie, the paste which does not contain a lead-free glass composition is a comparative material.
- the prepared glass paste was applied to a metal substrate of Al, Cu and Fe, a ceramic substrate of Al 2 O 3 and MgO, and a glass substrate of soda lime glass and borosilicate glass, respectively, and 10 ° C./min in the atmosphere.
- a film was formed on each substrate by heating to 150 ° C. at a rate of temperature rise and holding for 15 minutes, then heating to 190 ° C. at a rate of 5 ° C./min and holding for 10 minutes.
- the adhesion strength of the coating film formed on each substrate was evaluated by a scratch test (peel strength).
- the blending ratio between the lead-free glass composition and the resin is 0: 100, that is, the adhesion strength of the coating film not containing the lead-free glass composition is “1”, and the adhesion strength of the coating film containing the lead-free glass composition is relatively compared. did. That is, when it exceeds “1”, the adhesion strength is improved, and when it is less than “1”, the adhesion strength is reduced.
- Table 13 shows the evaluation results of the relative adhesion strength to each substrate when containing 10% by volume of the lead-free glass composition A-07.
- Any resin such as epoxy resin, phenoxy resin, phenol resin, acrylic resin, urethane resin and fluorine resin, and any group of Al, Cu, Fe, Al 2 O 3 , MgO, soda lime glass and borosilicate glass
- the adhesion strength was improved more than twice. This is considered to be because A-07 softens and flows when forming the coating film and firmly adheres to each substrate. For this reason, it is considered that the adhesion strength of the base material to which A-07 can be strongly adhered is improved.
- the adhesion strength also varies depending on the resin to be contained, and the adhesion strength increased particularly when a phenoxy resin and a phenol resin were contained. This is presumed that the softening fluidity at A-07 in the resin was different, and the phenoxy resin and the phenol resin had good softening fluidity.
- the adhesion strength of the coating film to the base material of metal, ceramics and glass can be improved.
- A-07 was representatively described as the lead-free glass composition, but the same performance can be achieved with the lead-free glass compositions A-01 to A-41.
- a resin to contain although general epoxy resin, phenoxy resin, phenol resin, acrylic resin, urethane resin, and fluorine resin were examined, it is not restricted to these.
- the metal substrate for forming the coating film Al, Cu and Fe metal substrates, as the ceramic substrate, Al 2 O 3 and MgO, and as the glass substrate, soda lime glass and borosilicate glass However, it is not related to these substrates.
- Example 6 evaluated the influence which the mixing
- A-07 as shown in Table 1 was used as the lead-free glass composition, and phenol resin was used as the resin.
- aluminum (Al), copper (Cu) and iron (Fe) are used for the metal substrate, alumina (Al 2 O 3 ) and magnesia (MgO) are used for the ceramic substrate, and soda lime glass and borosilicate are used for the glass substrate.
- Acid glass was used.
- a coating film was formed by applying particles of a lead-free glass composition, a resin, and a glass paste containing a solvent as a coating material, and applying and baking it onto various substrates. This was used as an evaluation sample.
- a glass paste was prepared by blending and mixing particles of a lead-free glass composition, a resin, and a solvent.
- A-07 having a particle diameter of about 1 ⁇ m was used as the lead-free glass composition particles, and butyl carbitol acetate was used as the solvent.
- Particles of a lead-free glass composition were introduced into butyl carbitol acetate in which a phenol resin was dissolved, and stirred well to prepare a glass paste.
- the blending ratio of the lead-free glass composition and the resin was 5 types by volume%: 5:95, 10:90, 30:70, 50:50, and 70:30.
- the solid content (total of the lead-free glass composition and the resin) in the glass paste was 75 to 80% by mass.
- the prepared glass paste was applied to a metal substrate of Al, Cu and Fe, a ceramic substrate of Al 2 O 3 and MgO, and a glass substrate of soda lime glass and borosilicate glass, respectively, and 10 ° C./min in the atmosphere.
- a film was formed on each substrate by heating to 150 ° C. at a rate of temperature rise and holding for 15 minutes, then heating to 190 ° C. at a rate of 5 ° C./min and holding for 10 minutes.
- the adhesion strength of the coating film formed on each substrate was evaluated by a scratch test (peel strength).
- the blending ratio between the lead-free glass composition and the resin is 0: 100, that is, the adhesion strength of the coating film not containing the lead-free glass composition is “1”, and the adhesion strength of the coating film containing the lead-free glass composition is relatively compared. did. That is, when it exceeds “1”, the adhesion strength is improved, and when it is less than “1”, the adhesion strength is reduced.
- Table 14 shows the results of evaluating the relative adhesion strength to each substrate when a phenol resin is used.
- the adhesion strength of the coating film increases with an increase in the content of the lead-free glass composition A-07, And the tendency to decrease was recognized.
- the maximum adhesion strength was in the range of 5-30% by volume of A-07 and 70-95% by volume of phenolic resin, regardless of the type of substrate.
- the content of A-07 is 50% by volume or less and the content of the phenol resin is 50% by volume or more, the coating film of only the phenolic resin not containing A-07 is “ It was over 1 ”and an improvement in adhesion strength was observed.
- the content of A-07 is more than 50% by volume and the content of the phenol resin is less than 50% by volume, it is less than “1” in most base materials, and the adhesion strength of the coating film is lowered. . This is considered to be because when the content of the lead-free glass composition is large, the thermal stress at the time of coating film formation cannot be relaxed, and the adhesion strength is lowered.
- only the Al base material and the MgO base material were more than “1” even when the blending ratio of A-07 and the phenol resin was 70% by volume.
- the adhesion strength of the coating film due to the difference in the base materials tended to be particularly large in the base materials of Al, MgO, and soda lime glass, which easily adhere firmly when A-07 softened and flows.
- the glass composite material containing the lead-free glass composition and the resin of the present invention and the glass paste thereof have a lead-free glass composition content of 50% by volume or less and a resin content of 50% by volume or more.
- the adhesion strength of the coating film to the base material of metal, ceramics and glass was improved, and it could be effectively developed as a coating material on the base material of metal, ceramics and glass.
- the content of the lead-free glass composition is 5 to 30% by volume or less and the content of the resin is in the range of 95 to 70% by volume, it has excellent coating adhesion strength, and is based on metals, ceramics and glass. It became clear that it was very effective as a paint for materials.
- the lead-free glass composition of the present invention includes a resin having a lower heat resistance than the composites with ceramic particles and metal particles described in Examples 2 to 4. Can be combined, and new developments in paints etc. have been found.
- the base material on which the coating film is formed is a metal, ceramics, or glass, it can be firmly adhered, and thus can be applied to various painted parts.
- Example 7 a multilayer glass panel for vacuum insulation was produced as one of typical examples of glass-sealed parts using two soda-lime glass substrates and the glass composite material according to one embodiment of the present invention. And demonstrated the applicability of glass composite materials.
- the glass paste was used for the glass composite material.
- FIG. 9A is a schematic plan view of the produced multilayer glass panel for vacuum insulation.
- FIG. 9B is an enlarged view of the AA cross section in the vicinity of the sealing portion.
- the multilayer glass panel for vacuum heat insulation is formed on the peripheral portion of the soda lime glass substrate 15 and a soda lime glass substrate (reference numeral 16 in FIG. 9B) arranged in a state of providing a gap therebetween. It has the sealing part 14. Between these substrates (15, 16), a plurality of spacers 18 are two-dimensionally arranged at equal intervals. An exhaust hole 20 is formed in the soda lime glass substrate (16), and the gap between the two substrates (15, 16) is exhausted from the exhaust hole 20 using a vacuum pump (not shown). It has become. A cap 21 is attached to the exhaust hole 20.
- the sealing part 14 uses the glass composite material which concerns on one Embodiment of this invention.
- This multilayer glass panel for vacuum insulation can be developed on building material window glass, vehicle window glass, commercial refrigerators, freezer doors, and the like.
- the glass composite material used for the sealing portion 14 includes ceramic particles having a small thermal expansion coefficient for matching the thermal expansion coefficients of the soda lime glass substrates 15 and 16. Contained.
- the heat resistance of the soda lime glass substrates 15 and 16 is about 500 ° C., it is necessary to form the sealing portion 14 below that temperature. Moreover, since the soda-lime glass substrates 15 and 16 are easily damaged by rapid heating and rapid cooling, it is necessary to gradually perform heating and cooling in sealing, and to improve the productivity of the multilayer glass panel for vacuum insulation. Therefore, sealing at a low temperature is required as much as possible. Further, the soda lime glass substrates 15 and 16 are frequently tempered with air cooling for crime prevention and safety. This air cooling strengthening forms a compression strengthening layer on the surfaces of the soda lime glass substrates 15 and 16, and the strengthening layer gradually decreases by heating at 300 ° C. or higher and disappears by heating at 400 ° C. or higher. . For this reason, sealing at a lower temperature is strongly required.
- a plurality of spacers 18 are installed in the space portion 17 in order to secure the space portion 17 in a vacuum state.
- the glass composite material according to the embodiment of the present invention can be used for fixing the spacer 18 similarly to the sealing portion 14.
- an exhaust hole 20 is formed in the soda lime glass substrate 16 in advance, and the space portion 17 is exhausted from the exhaust hole 20 using a vacuum pump.
- a cap 21 is attached after evacuation so that the degree of vacuum in the space 17 can be maintained.
- the heat ray reflective film 22 may be formed in advance on the inner surface of the soda lime glass substrate 15 by vapor deposition or the like.
- soda lime glass substrates 15 and 16 having a size of 900 ⁇ 600 ⁇ 3 mm were used.
- the heat ray reflective film 22 was formed in the soda-lime glass substrate 15, and the exhaust hole 20 was formed in the soda-lime glass substrate 16.
- the sealing portion 14 and the spacer 18 contained spherical beads 19 having a diameter of less than 200 ⁇ m. Soda lime glass was used for the spherical beads 19.
- the sealing part 14 a glass composite material composed of the lead-free glass composition A-08 shown in Table 1 and the ceramic particles CF-01 shown in Table 3 is used, and the blending ratio of A-08 and CF-01 is: The volume ratio was 65:35. Furthermore, the sealing part 14 contained 1% by volume of the spherical beads 19 with respect to the glass composite material, and the spacer 18 contained 20% by volume with respect to the glass composite material.
- a glass paste was prepared by blending and mixing particles of a lead-free glass composition according to an embodiment of the present invention, ceramic particles, and a solvent.
- A-08 having a particle size of about 15 ⁇ m was used for the lead-free glass composition particles, and CF-01 (zirconium tungstate phosphate) having a particle size of about 30 ⁇ m was used for the ceramic particles.
- CF-01 (zirconium tungstate phosphate) having a particle size of about 30 ⁇ m was used for the ceramic particles.
- ⁇ -terpineol was used as a solvent, and isobornylcyclohexanol was added as a viscosity modifier.
- the blending ratio of the lead-free glass composition A-08 particles and the ceramic particles CF-01 is 65:35 by volume, and the solid content (total of A-08 and CF-01) is 75 to 80 mass.
- the glass paste was produced so that it might become%. Further, the glass paste contained spherical beads made of soda lime glass having a particle size of about 180 to 200 ⁇ m. The content was 1% by volume for low-temperature sealing and 20% by volume for spacers relative to the solid content.
- FIG. 10A shows a state in which the sealing portion 14 and the spacer 18 are formed on the soda lime glass substrate 16 constituting the vacuum heat insulating multilayer glass panel shown in FIGS. 9A and 9B.
- the produced said glass paste was apply
- FIG. 10B which is a cross-sectional view taken along line AA shown in FIG. 10A, the sealing portion 14 and the spacer 18 include spherical beads 19.
- FIG. 11A shows a soda lime glass substrate 15 constituting the vacuum heat insulating multilayer glass panel shown in FIG. 9B.
- FIG. 11B is a cross-sectional view taken along the line AA in FIG. 11A.
- a heat ray reflective film 22 is formed on one side of the soda lime glass substrate 15.
- FIG. 12 shows the last step of the manufacturing method of the vacuum heat insulating multilayer glass panel shown in FIGS. 9A and 9B.
- soda-lime glass substrates 15 and 16 are opposed to each other, aligned, and fixed with a plurality of heat-resistant clips. This was heat-treated while being evacuated and sealed.
- FIG. 13 shows a sealing temperature profile in the heat treatment.
- the inside of the panel is evacuated from the exhaust hole 20 with a vacuum pump, and near the softening point T s of the lead-free glass composition used at a temperature rising rate of 5 ° C./min, here A s is Ts. It heated to 182 degreeC and hold
- the sealing portion 14 and the spacer 18 were crushed and adhered to the two soda lime glass substrates 15 and 16. Then, the cap 21 was attached to the exhaust hole 20, and the vacuum heat insulation multilayer glass panel was produced. In this example, ten vacuum heat insulating multilayer glass panels were produced.
- the sealing temperature can be remarkably lowered, and the productivity of the vacuum heat insulating double-glazed glass panel is improved and the air cooling is strengthened. This can greatly contribute to the application of soda-lime glass substrates.
- the sealing structure As one of the representative examples of the sealing structure, an example of application to a glass composite material containing the lead-free glass composition of the present invention and a vacuum heat insulating multilayer glass panel using the glass paste is used. explained. It was confirmed that the glass composite material containing the lead-free glass composition of the present invention and the glass paste thereof can be effectively applied to the sealing portion of the sealing structure, and can provide a sealing structure with excellent reliability and productivity. . Needless to say, it can also be effectively applied to sealing structures other than the vacuum heat insulating multilayer glass panel.
- Example 8 In this example, a display in which a large number of organic light emitting diodes (OLEDs) are built in between two borosilicate glass substrates is produced as one representative example of the sealing structure, and the glass composite material of the present invention is applied. The possibility was demonstrated. In this example, the glass paste was used for the glass composite material.
- OLEDs organic light emitting diodes
- FIG. 14A is a schematic plan view showing an example of an OLED display.
- 14B is a cross-sectional view taken along the line AA in FIG. 14A.
- an OLED display is mounted on the outer peripheral portion of a borosilicate glass substrate 23 and a borosilicate glass substrate (reference numeral 24 in FIG. 14B) arranged in a state of providing a gap therebetween. It has the sealing part 14 which is a glass composite material which concerns on this. An OLED 25 is built in between the borosilicate glass substrates (23, 24).
- the glass composite material used for the sealing portion 14 includes the lead-free glass composition of the present invention, and ceramic particles having a low thermal expansion coefficient in order to make the thermal expansion coefficient matching between the borosilicate glass substrates 23 and 24 as much as possible. Is contained.
- the sealing part 14 is made of a glass composite material composed of the lead-free glass composition A-19 shown in Table 1 and the ceramic particles CF-02 shown in Table 3. A-19 and CF-02 The content of was set to 60: 40% by volume.
- the glass paste was used for the glass composite material, and ⁇ -terpineol having high viscosity was used as the solvent.
- a glass paste was prepared by blending and mixing the lead-free glass composition particles, ceramic particles, and a solvent.
- the lead-free glass composition particles are A-19 with an average particle size of about 1 ⁇ m
- the ceramic particles are CF-02 (compound mainly composed of zirconium tungstate phosphate) with an average particle size of about 3 ⁇ m.
- ⁇ -terpineol was used as a solvent
- isobornylcyclohexanol was added as a viscosity modifier.
- the ceramic particles CF-02 contained iron tungstate (FeWO 4 ) in the zirconium tungstate phosphate particles so as to efficiently absorb the red semiconductor laser and easily generate heat.
- the blending ratio of the lead-free glass composition A-19 particles and the ceramic particles CF-02 is 60:40 by volume, and the solid content (total of A-19 and CF-02) is about 80% by mass.
- a glass paste for low-temperature sealing was prepared so that
- FIGS. 15A to 17 A method for manufacturing the OLED display of this example is shown in FIGS. 15A to 17.
- FIG. 15A shows one substrate of the OLED display.
- FIG. 15B is a cross-sectional view taken along the line AA in FIG. 15A.
- the produced glass paste was applied to the outer periphery of the borosilicate glass substrate 23 by a screen printing method and dried at 150 ° C. in the atmosphere. This was heated to 200 ° C. at a heating rate of 5 ° C./min in the atmosphere and held for 30 minutes. Thereby, the sealing part 14 was formed in the outer peripheral part of the borosilicate glass substrate 23.
- FIG. The sealing portion 14 formed on the outer peripheral portion of the borosilicate glass substrate 23 had a line width of about 2 mm and a fired film thickness of about 15 ⁇ m.
- FIG. 16A shows the other substrate of the OLED display.
- 16B is a cross-sectional view taken along the line AA in FIG. 16A.
- a large number of OLEDs 25 corresponding to the number of pixels were formed on the borosilicate glass substrate 24.
- the borosilicate glass substrate 24 on which the OLED 25 is formed and the borosilicate glass substrate 23 on which the sealing portion 14 is formed are opposed to each other as shown in FIG. 17 and sealed from the direction of the borosilicate glass substrate 23 in a low vacuum.
- the laser 26 was irradiated toward the stop portion 14.
- the laser 26 has a red wavelength of 805 nm so that the laser wavelength is efficiently absorbed by the lead-free glass composition and the low thermal expansion ceramic particles in the glass composite material, and heat is generated and the lead-free glass composition is easy to soften and flow.
- a semiconductor laser was used. The outer peripheral portion of the laser 26 was moved at a speed of 10 mm / second, and the outer peripheral portions of the borosilicate glass substrates 23 and 24 were joined by the sealing portion 14 to produce an OLED display.
- a glass composite material containing the lead-free glass composition of the present invention or a glass paste thereof can be effectively applied to a sealing portion of a sealing structure, and a high-functionality including reliability and excellent productivity are provided. It was confirmed that it was possible. Moreover, it cannot be overemphasized that it can expand
- Example 9 a solar cell using a silicon (Si) substrate having a pn junction is produced as one of representative examples of electric and electronic parts, and the glass composite material of the present invention is applied to the electrode / wiring of the solar cell. The applicability was examined and evaluated. In this example, the glass paste was used for the glass composite material.
- FIG. 18A is a schematic view of the light receiving surface of the produced solar battery cell.
- FIG. 18B is a schematic diagram of the back surface.
- 18C is a cross-sectional view taken along the line AA in FIG. 18A.
- a light receiving surface electrode / wiring 28 and an antireflection film 31 are formed on the light receiving surface of the Si substrate 27 (silicon substrate) of the solar battery cell.
- a collecting electrode / wiring 29 and an output electrode / wiring 30 are formed on the back surface of the solar battery cell.
- a pn junction 31 is provided on the light receiving surface side of the Si substrate 27 of the solar battery cell.
- the glass composite material according to one embodiment of the present invention is used.
- the light-receiving surface electrode / wiring 28 and the output electrode / wiring 30 are formed by forming a leaded glass paste containing silver (Ag) particles and leaded low-melting glass composition particles, and a collecting electrode / wiring 29.
- a leaded glass paste containing aluminum (Al) particles and leaded low melting glass composition particles used is a leaded glass paste containing aluminum (Al) particles and leaded low melting glass composition particles, and these leaded glass pastes are respectively applied to both sides of the Si substrate 27 by a screen printing method or the like.
- the electrodes / wirings were formed on both surfaces of the Si substrate 27 by baking at 500 to 800 ° C. in the air after drying. Although containing harmful lead is also a problem, since the firing temperature for forming the electrode / wiring is high, the solar cell is greatly warped, and the Si substrate 27 is easily damaged in handling. A brittle intermetallic compound is generated by the reaction between Al in the electrode / wiring 29 and Ag in the output electrode / wiring 30, and if stress concentrates on the Si substrate 27, cracks or the like are likely to occur. There was also a problem.
- a 150 ⁇ 150 ⁇ 0.2 mm solar cell single crystal Si substrate is used for the Si substrate 27 having a pn junction, and the light receiving surface of the Si substrate 27 is an antireflection film made of silicon nitride (SiN). 31 was formed to about 100 nm.
- the light-receiving surface electrode / wiring 28 and the output electrode / wiring 30 include a glass composite containing the lead-free glass composition A-35 shown in Table 1 and spherical silver (Ag) particles having an average particle diameter of about 1.5 ⁇ m. The materials were used, and the content of A-35 and Ag particles was 20:80 by volume.
- a conductive material containing the lead-free glass composition A-38 shown in Table 1 and spherical aluminum (Al) particles having an average particle diameter of about 3 ⁇ m is used.
- the content of particles was 15: 85% by volume.
- Lead-free glass composition A-35 or A-38 particles, silver (Ag) or aluminum (Al) metal particles, and a solvent were blended and mixed to prepare a glass paste.
- A-35 particles having an average particle diameter of about 1 ⁇ m and spherical Ag particles having an average particle diameter of about 1.5 ⁇ m are used.
- the blending ratio was 20:80 by volume%.
- ⁇ -Terpineol was used as a solvent, and isobornylcyclohexanol was added as a viscosity modifier.
- the glass paste used for the collector electrode / wiring 29 A-38 particles having an average particle diameter of about 1 ⁇ m and spherical Al particles having an average particle diameter of about 3 ⁇ m are used, and the blending ratio is expressed in volume%. 15:85, ⁇ -terpineol was used as a solvent, and isobonylcyclohexanol was added as a viscosity modifier. In both glass pastes, the solid content (total of lead-free glass composition particles and metal particles) in the paste was about 80% by mass.
- the glass paste containing the A-35 particles and the Ag particles prepared above is applied by screen printing to the light receiving surface side of the Si substrate 27 (150 ⁇ 150 ⁇ 0.2 mm) having the antireflection film 31 formed on the light receiving surface, Dry at about 150 ° C. This was heated to 200 ° C. at a temperature rising rate of about 20 ° C./min in a tunnel furnace and held for 30 minutes, and a light receiving surface electrode / wiring 28 was formed on the light receiving surface of the Si substrate 27. Next, the same glass paste containing A-35 particles and Ag particles as described above was applied to the back surface of the Si substrate 27 by screen printing, and dried at about 150 ° C.
- the glass paste containing A-38 particles and Al particles prepared above was applied by screen printing and dried at about 150 ° C. This was baked under the same heating conditions as the formation of the light-receiving surface electrode / wiring 28, and the current collecting electrode / wiring 29 and the output electrode / wiring 30 were formed on the back surface of the Si substrate 27. Two heating histories are applied to the light-receiving surface electrode / wiring 28, which improves the electrical connection of the light-receiving surface electrode / wiring 28 to the Si substrate 27. In this manner, the light-receiving surface electrode / wiring 28, the collecting electrode / wiring 29, and the output electrode / wiring 30 were formed, and the solar battery cell according to this example was manufactured. In this example, ten solar cells were produced.
- the electrode / wiring is hardly corroded and the power generation is performed. No efficiency degradation was observed.
- it is considered that such a highly reliable solar battery cell can be obtained by a unique reaction between the lead-free glass composition of the present invention and Ag or Al. It is done.
- this example has a glass composite material containing a lead-free glass composition according to one embodiment of the present invention and an electrode / wiring formed using the glass paste as one of representative examples of electric and electronic parts.
- the application example to the photovoltaic cell has been described.
- the glass composite material containing the lead-free glass composition of the present invention and the glass paste thereof can be effectively applied to electrodes / wirings of various electric and electronic parts regardless of solar cells, and have high functionality and production including reliability. It is possible to provide an electrical / electronic component that is excellent in performance and yield improvement.
- Example 10 a crystal resonator package was produced as one of representative examples of electric and electronic parts, and it was examined whether the glass composite material of the present invention could be applied to the conductive joints and sealing parts of the package. .
- the glass paste was used for the glass composite material.
- FIG. 19A to 19F show a method for manufacturing a crystal resonator package.
- FIG. 19G is a schematic cross-sectional view of the manufactured crystal resonator package.
- the crystal resonator package shown in FIG. 19G has a crystal resonator 32 installed on the surface of a ceramic substrate 33 having wirings 34 via a conductive joint 35.
- the wiring 34 and the conductive joint 35 are electrically connected.
- the crystal unit 32 is electrically connected to the outside.
- the ceramic cap 36 is for protecting the crystal resonator 32 and is hermetically bonded to the outer peripheral portion of the ceramic substrate 33 by a sealing portion 37.
- a glass composite material containing the lead-free glass composition and metal particles of the present invention is used for the conductive joint portion 35, and a glass composite material containing the lead-free glass composition of the present invention and ceramic particles is used for the sealing portion 37. Yes.
- the manufacturing method of the crystal unit package is as follows.
- the ceramic substrate 33 on which the wiring 34 shown in FIG. 19A is formed is manufactured.
- a glass paste containing metal particles is applied onto the wiring 34, dried, and heated in the atmosphere to soften and flow the lead-free glass composition in the glass composite material.
- the conductive joint portion 35 is formed.
- the crystal resonator 32 is disposed in the conductive joint 35 and heated in an inert gas or vacuum to soften and flow the lead-free glass composition in the conductive joint 35 again. To make an electrical connection.
- a ceramic cap 36 shown in FIG. 19D is prepared. Then, as shown in FIG. 19E, a glass paste containing ceramic particles is applied to the outer periphery of the ceramic cap 36, dried, heated in the atmosphere, and the lead-free glass composition in the glass composite material is softened and fluidized. By doing so, the sealing portion 37 is formed.
- the ceramic substrate 33 having the crystal resonator 32 and the conductive bonding portion 35 shown in FIG. 19C and the ceramic cap 36 having the sealing portion 37 shown in FIG. 19E are aligned as shown in FIG.
- the lead-free glass composition in the sealing portion 37 is softened and fluidized again by heating at a temperature and applying a slight load 38. As a result, the crystal resonator package shown in FIG. 19G is obtained.
- A-37 having a softening point T s of 200 ° C. and a sealing portion 37 shown in Table 1 are formed as a lead-free glass composition in the glass paste used to form the conductive joint portion 35. Therefore, A-03 having a softening point T s of 177 ° C. shown in Table 1 was used as a lead-free glass composition in the glass paste used. Since the temperature difference between the softening points T s of A-37 and A-03 is 23 ° C., it seems that sealing is possible without causing problems such as peeling in the conductive joint 35. That is, it means that a good conductive joint portion 35 and a sealing portion 37 can be obtained at the same time.
- the glass paste for forming the electroconductive joint part 35 was produced by mixing and mixing the lead-free glass composition particles, metal particles, and a solvent.
- Lead-free glass composition particles are A-37 having an average particle size of about 3 ⁇ m
- metal particles are spherical silver (Ag) particles having an average particle size of about 1.5 ⁇ m
- ⁇ -terpineol is used as the solvent.
- Isobonyl cyclohexanol was added as a viscosity modifier.
- the blending ratio of the A-37 particles and the Ag particles is 30:70 by volume%, and the conductive joint 35 is adjusted so that the solid content (total of A-37 and Ag) is about 80% by mass.
- a glass paste for forming was prepared.
- the glass paste for forming the sealing part 37 was produced by blending and mixing lead-free glass composition particles, ceramic particles, and a solvent.
- the lead-free glass composition particles are A-03 having an average particle size of about 3 ⁇ m
- the ceramic particles are CF-01 (zirconium tungstate phosphate) having an average particle size of about 10 ⁇ m shown in Table 3, and a solvent.
- ⁇ -terpineol was used, and isobonylcyclohexanol was added as a viscosity modifier.
- the blending ratio of A-03 particles and CF-01 particles is 70:30 by volume, and the solid content (the total of A-03 and CF-01) is sealed to be about 80% by mass.
- a glass paste for forming the portion 37 was produced.
- the ceramic substrate 33 and the ceramic cap 36 are made of alumina ( ⁇ -Al 2 O 3 ).
- the glass paste for forming the conductive joint 35 described above was applied onto the wiring 34 formed on the ceramic substrate 33 by a dispenser method and dried at about 150 ° C. in the atmosphere. This was heated to 200 ° C. at a rate of temperature increase of 10 ° C./min in the atmosphere and held for 30 minutes to form the conductive joint 35 on the wiring 34 of the ceramic substrate 33.
- the crystal resonator 32 is disposed on the conductive joint 35 and heated to 210 ° C. at a temperature rising rate of 20 ° C./min in an inert gas (in argon) for 10 minutes.
- the crystal unit 32 was held and connected to the conductive joint 35.
- the glass paste for forming the sealing portion 37 is applied to the outer periphery of the ceramic cap 36 by a screen printing method and dried at about 150 ° C. in the atmosphere. did. This was heated to 190 ° C. at a temperature rising rate of 10 ° C./min in the atmosphere and held for 30 minutes, and the sealing portion 37 was formed on the outer peripheral portion of the ceramic cap 36.
- the ceramic cap 36 in which the sealing portion 37 was formed was aligned with the ceramic substrate 33 to which the crystal resonator 32 was connected, placed on a dedicated fixing jig, and a load was applied. This was heated to 180 ° C. in a vacuum at a temperature rising rate of 10 ° C./min and held for 15 minutes, and the ceramic cap 36 and the ceramic substrate 33 were sealed, thereby producing a crystal resonator package shown in FIG. 19G. In this example, 24 crystal resonator packages were produced.
- the glass composite material containing the lead-free glass composition of the present invention and the metal particles or ceramic particles and the glass paste thereof to the conductive joint or the sealing part.
- a highly reliable crystal resonator package can be obtained.
- an example of application to a crystal resonator package has been described as one of representative examples of electric and electronic parts and a sealing structure.
- the glass composite material and the glass paste according to the present invention include a crystal resonator.
- the present invention can be effectively applied not only to packages but also to many electrical and electronic parts and sealing structures having conductive joints and sealing parts, and heat dissipation joints.
- Example 11 In this example, the possibility of development on a resin wiring board was examined as one of representative examples of electrical and electronic parts. Elements such as capacitors and inductors are mounted and integrated on the resin wiring board. The wiring of the resin wiring board is formed on the resin board by plating or the like, and the element is electrically connected to the wiring. Since the resin substrate is inexpensive, an epoxy resin or phenoxy resin containing glass fibers is generally used. Such a resin substrate has low heat resistance, which is about 200 ° C. Therefore, conventionally, lead-based solder having a melting point of 200 ° C. or less has been applied to electrically connect the wiring of the resin substrate and the element. However, lead solder cannot be used due to environmental regulations such as the recent RoHS directive.
- lead-free tin-based solder can be considered, but the solder is difficult to heat in the atmosphere, and it is necessary to raise the connection temperature to near 250 ° C. There is a problem that will be exceeded. Therefore, lead-free resin silver paste has been used for element connection portions of resin wiring boards.
- the element can be connected to the resin wiring board by the resin silver paste at about 150 ° C. in the atmosphere, and the connection part is composed of silver particles and resin. However, it was necessary to hold the resin for several hours at around 150 ° C. in order to cure the resin. Further, in the resin silver paste, since the silver particles are not necked in the resin, it cannot be said that the conductivity of the element connecting portion is high. Further, since the element connecting portion contains a resin, it cannot be said that the reliability such as moisture resistance is sufficient.
- conductive glass paste Preparation of conductive glass paste
- Devices such as capacitors and inductors were connected to the resin wiring board using a conductive glass paste of a glass composite material composed of a lead-free glass composition and metal particles.
- the Pb-free glass composition Table 1 Softening point T S shown in the using A-03 of 177 ° C., an average particle size was 2 ⁇ m or less.
- As the metal particles spherical silver (Ag) having an average particle diameter of about 1.5 ⁇ m was used. Further, ⁇ -terpineol was used as a solvent for producing the conductive glass paste.
- the mixing ratio of A-03 particles and Ag particles is 25:75 by volume, and a conductive glass paste is prepared so that the solid content (total of A-03 and Ag) is about 80% by mass. did.
- connection resistance is in the range of 10 ⁇ 6 to 10 ⁇ 5 ⁇ cm as estimated from FIG. 8, which is one order of magnitude lower than that in the case of using the resin silver paste of the comparative example, and the conductivity is very high. I found it expensive. This is because silver particles cause necking in the lead-free glass composition of the present invention.
- the glass composite material containing the lead-free glass composition and the metal particles of the present invention and the glass paste thereof can be effectively applied even when the element is electrically connected to the resin wiring board. It goes without saying that such a resin wiring board can be widely developed as various electric and electronic parts.
- Examples 7 to 11 as the sealing structure and the electric / electronic component, the vacuum heat insulating multilayer glass panel, the OLED display, the solar battery cell, the crystal resonator package, and the resin wiring substrate have been described as representative examples. Not limited to various display panels, package devices, image display devices, multilayer capacitors, inductors, light emitting diodes, multilayer circuit boards, semiconductor modules, semiconductor sensors, semiconductor sensors, etc. It is obvious that it can be applied to electronic components.
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Abstract
Description
低融点ガラス組成物において、一般には転移点、屈伏点、軟化点等の特性温度が低いガラスほど、低温での軟化流動性が良くなる。一方でその特性温度を下げすぎると、結晶化傾向が大きくなり、加熱焼成時に結晶化しやすくなる。そのため、低温での軟化流動性が悪化してしまう。また、特性温度が低いガラスほど、耐湿性、耐酸性等の化学的安定性が劣る。さらに環境負荷への影響が大きくなる傾向がある。たとえば、従来のPbO‐B2O3系低融点ガラス組成物では、有害なPbO含有量が多いほど、特性温度を低くできるが、結晶化傾向が大きく、しかも化学的安定性が低下し、さらに環境負荷への影響も大きくなる。
ガラス複合材料は、本発明に係る無鉛ガラス組成物と、セラミックス粒子、金属粒子及び樹脂のうちいずれか一種以上と、を含む。
本発明の一実施形態に係るガラス複合材料やガラスペーストは、窓ガラス等に適用されている真空断熱複層ガラスパネル、プラズマディスプレイパネル、有機ELディスプレイパネル、蛍光表示管等のディスプレイパネル、及び水晶振動子、ICパッケージ、MEMS等のパッケージデバイス等の封止に好適に用いられる。ガラス複合材料やガラスペーストを用いた封止構造体は、内部空間と、ガラス複合材料からなり、内部空間と外部との境界の少なくとも一部を隔てる封止部と、を備える。封止部を形成するガラス複合材料に含まれる無鉛ガラス組成物の含有量が50体積%以上であることが好ましく、さらにガラス複合材料には、セラミックス粒子が含まれることが有効である。
本発明の一実施形態に係るガラス複合材料やガラスペーストは、太陽電池セル、画像表示デバイス、積層コンデンサー、インダクター、水晶振動子、樹脂配線基板、発光ダイオード(LED)、多層回路基板、半導体モジュール等の電気電子部品の電極、配線、導電性接合部及び放熱性接合部の形成に好適に用いられる。ガラス複合材料やガラスペーストで形成された電気電子部品は、ガラス複合材料からなる電極、配線、導電性接合部又は放熱性接合部を備えることを特徴とする。電極、配線、導電性接合部或いは放熱性接合部を形成するガラス複合材料に含まれる金属粒子の含有量が50体積%以上であることが好ましい。
本発明の一実施形態に係るガラス複合材料やガラスペーストを塗料として用いることもできる。ガラス複合材料やガラスペーストで形成された塗装部品は、部材と、部材に形成された塗膜と、を備える。部材は金属、セラミックス、又はガラスの基材であり、塗膜は、本発明に係るガラス複合材料を含む。
本実施例では、銀(Ag)、テルル(Te)及びバナジウム(V)の酸化物を主成分とし、さらに追加成分としてイットリウム(Y)、ランタン(La)、セリウム(Ce)、エルビウム(Er)、イットリビウム(Yb)、アルミニウム(Al)、ガリウム(Ga)、インジウム(In)、鉄(Fe)、タングステン(W)及びモリブデン(Mo)のいずれかの酸化物を一種以上含有する無鉛ガラス組成物を作製し、ガラス組成がガラス特性に与える影響について検討した。なお、ガラス特性としては、作製した無鉛ガラス組成物のガラス化状態、特性温度、軟化流動性及び化学的安定性を評価した。
後述する表1に示す無鉛ガラス組成物A-01~A-41(実施例)及び表2に示す無鉛ガラス組成物B-01~B-48(比較例)を作製した。表1と表2に示した組成は、ガラス作製時の配合組成である。主成分の出発原料としては、新興化学製V2O5、高純度化学研究所製TeO2及び和光純薬製Ag2Oの粉末を用いた。また、追加成分の出発原料としては、すべてが高純度化学研究所製のY2O3、La2O3、CeO2、Er2O3、Yb2O3、Al2O3、Ga2O3、In2O3、Fe2O3、WO3、MoO3、BaCO3及びP2O5の粉末を用いた。
作製した無鉛ガラス組成物A-01~A-41とB-01~B-48のガラス化状態は、そのガラス粉末を用い、X線回折によって結晶が析出しているどうかによって評価した。結晶の析出が認められない場合には、ガラス化状態が良好と見なし「合格」と評価した。一方、結晶の析出が認められた場合には、ガラス化状態が均一な非晶質状態になっておらず、「不合格」と評価した。
作製した無鉛ガラス組成物A-01~A-41とB-01~B-48の特性温度は、そのガラス粉末を用い、示差熱分析(DTA)によって評価した。DTAには、マクロセルタイプを使用した。マクロセルに約500mgのガラス粉末を入れ、大気中5℃/分の昇温速度で室温から300℃まで加熱し、図1で示したようなDTAカーブを得た。得られたDTAカーブより転移点Tg、屈伏点Mg及び軟化点Tsを測定した。ただし、特性温度を評価するに当たっては、ガラス化状態が「不合格」の無鉛ガラス組成物に関しては、DTAを実施しなかった。
作製した無鉛ガラス組成物A-01~A-41とB-01~B-48の軟化流動性は、そのガラス粉末を用いて作製した圧粉成形体のボタンフロー試験にて評価した。その圧粉成形体は、金型とハンドプレスを用い、1トン/cm2の条件で直径10mm、高さ5mm程度の円柱形状となるように成形した。アルミナセラミックス基板上に設置した圧粉成形体を電気炉内へ導入し、大気中10℃/分の昇温速度で室温から180℃、190℃、200℃、210℃及び220℃までそれぞれ加熱し、30分間保持した後に炉冷し、それぞれの加熱温度における軟化流動性や結晶化状態を評価した。圧粉成形体が軟化流動せずに、形状をほぼ維持している場合には「×」、圧粉成形体を構成するガラス粉末が軟化、焼結、収縮し、丸みをおびてきている場合には「軟化」、融けている場合には「流動」と判定した。また、結晶化してしまった場合には「結晶化」と記載した。結晶化は、軟化流動性を阻害するものであり、好ましくはない。軟化流動性を評価するに当たっては、ガラス化状態が「不合格」の無鉛ガラス組成物に関しては、上記ボタンフロー試験を実施しなかった。
作製した無鉛ガラス組成物A-01~A-41とB-01~B-48の化学的安定性は、耐湿性試験と耐酸性試験で評価した。ガラス試験片には、粉砕前の10~20mm程度のカレットを使用した。耐湿性試験は、そのカレットを温度80℃、湿度90%の条件で10日間放置した。また、耐酸性試験は、そのカレットを室温で1規定硝酸水溶液に3日間浸漬した。両試験後のカレット外観を目視で観察して、その外観に変化が見られなかった場合には「合格」とし、一方変化が見られた場合には「不合格」とした。なお、転移点Tgが313℃、屈伏点Mgが332℃及び軟化点Tsが386℃である従来の有鉛低融点ガラス組成物(84PbO-13B2O3-2SiO2-1Al2O3質量%)を同様な耐湿性試験と耐酸性試験を実施したところ、どちらの試験とも「不合格」であった。化学的安定性を評価するに当たっては、ガラス化状態が「不合格」の無鉛ガラス組成物に関しては、上記の耐湿性試験と耐酸性試験を実施しなかった。
実施例2では、無鉛ガラス組成物とセラミックス粒子とを含むガラス複合材料を用いて、同種の金属基材同士、ガラス基材同士、及びセラミックス基材基同士を接合し、その接合状態をせん断応力で評価した。無鉛ガラス組成物としては、表1で示したA-05とA-22の2種類、セラミックス粒子としては、表3に示す7種類(CF-01~CF-07)を用いた。なお、表3には、これらのセラミックス粒子の密度及び熱膨張係数も示した。これらに対して、表1で示した無鉛ガラス組成物の密度は6g/cm3前後、熱膨張係数はおおよそ180×10-7~200×10-7/℃の範囲にあった。また、金属基材にはアルミニウム(Al)、銀(Ag)、銅(Cu)、ニッケル(Ni)及び鉄(Fe)、ガラス基材にはソーダライムガラス、セラミックス基板にはアルミナ(Al2O3)を用いた。評価試料は、先ずは無鉛ガラス組成物の粒子と、セラミックス粒子と、溶剤を含むガラスペーストを作製し、それを各基材へ塗布、乾燥、仮焼成後に同基材を合わせ加熱することによって接合した。
無鉛ガラス組成物の粒子と、セラミックス粒子と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には、粒径が約10μmのA-05とA-22、セラミックス粒子には粒径が10~30μm程度のリン酸タングステン酸ジルコニウム(CF-01)、タングステン酸鉄を微量に含むリン酸タングステン酸ジルコニウム(CF-02)、石英ガラス(CF-03)、ケイ酸ジルコニウム(CF-04)、アルミナ(CF-05)、ムライト(CF-06)及び酸化ニオブ(CF-07)を用いた。不活性ガス中や真空中で加熱焼成する場合には、溶剤としてα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。また、大気中で焼成する場合には、溶剤としてブチルカルビトールアセテート、樹脂バインダーとしてエチルセルロースを用いた。無鉛ガラス組成物の粒子とセラミックス粒子の配合割合は、体積%で100:0、90:10、80:20、70:30、60:40、50:50、40:60及び30:70の8種類として、それぞれのガラスペーストを作製した。また、ガラスペースト中の固形分(無鉛ガラス組成物の粒子とセラミックス粒子の合計)の含有率は75~80質量%程度とした。
図2に評価試料の作製方法を示す。先ずは、接合面2を有する直径5mm、厚み2mmの円柱状基材1を用意した(a)。次に、円柱状基材1の接合面2にガラスペースト3をディスペンサー法にて塗布した(b)。
それぞれのガラスペーストを用いて作製した接合体のせん断応力を評価した。せん断応力の評価は、30MPa以上のときには「優秀」、20~30MPaのときには「良好」、10~20MPaのときには「通常」、10MPa未満のときには「不合格」と判定した。
実施例3では、無鉛ガラス組成物と金属粒子とを含むガラス複合材料を用いて、同種及び異種の金属基材同士を接合し、その接合状態を金属基材間の電気抵抗(接続抵抗)で評価した。無鉛ガラス組成物としては、表1で示したA-18、金属粒子としては、銀(Ag)、銅(Cu)、アルミニウム(Al)及び錫(Sn)の3種類を用いた。また、金属基材にはアルミニウム(Al)、銅(Cu)、ニッケル(Ni)及び鉄(Fe)を用いた。無鉛ガラス組成物の粒子と、金属粒子と、溶剤を含むガラスペーストを作製し、それをアルミニウム(Al)基材へ塗布、乾燥、仮焼成後に同種及び異種の金属基材を合わせ、抵抗溶接することによって接合したものを評価試料とした。
無鉛ガラス組成物の粒子と、金属粒子と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には、粒径が約3μmのA-18、金属粒子には平均粒径が約2μmの球状銀(Ag)粒子、約15μmの球状銅(Cu)粒子、約3μmの球状アルミニウム(Al)粒子及び約30μm程度の錫(Sn)粒子を用いた。また、溶剤としては、α‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。無鉛ガラス組成物の粒子と金属粒子の配合割合は、体積%で100:0、80:20、60:40、40:60、30:70、20:80及び10:90の7種類として、それぞれのガラスペーストを作製した。また、ガラスペースト中の固形分(無鉛ガラス組成物の粒子と金属粒子の合計)の含有率は75~80質量%とした。
金属基材間の接続抵抗を測定する評価試料及びその作製方法は、実施例2と同様な評価試料とその作製方法を適用した。すなわち、本実施例では、図2に示した評価試料とその作製方法に準じた。
作製した各接合体において、四端子法によって金属基材間の接続抵抗(電気抵抗)を測定した。また、比較のため、無鉛錫はんだを用いて不活性ガス中(アルゴン中)250℃-10分で接合してみた。このはんだによる接続抵抗は、AlとAlのはんだ接合体で3.2×10-3Ω/mm2、AlとCuのはんだ接合体で1.5×10-3Ω/mm2、AlとNiのはんだ接合体で1.7×10-3Ω/mm2、AlとFeの接合体で1.9×10-3Ω/mm2であった。これらの接続抵抗は、CuとCuのはんだ接合体の接続抵抗が5.0×10-6Ω/mm2であったことから、約3桁も大きいものであった。この原因は、Al基材表面に電気抵抗が高い自然酸化被膜が形成されているためであると考えられる。
本実施例では、無鉛ガラス組成物と金属粒子とを含むガラス複合材料を用いて、各種の基板に電極/配線を形成し、その電極/配線の電気抵抗(配線抵抗)と各種基板への密着性を評価した。無鉛ガラス組成物としては、表1で示したA-20、金属粒子としては、銀(Ag)を用いた。また、基板にはアルミナ(Al2O3)基板、ホウケイ酸ガラス基板、シリコン(Si)基板、フェライト基板及びポリイミド基板を用いた。無鉛ガラス組成物の粒子と、金属粒子と、溶剤を含むガラスペーストを作製し、それを各種の基板へ塗布、乾燥、仮焼することによって電極/配線を形成した。これを評価試料とした。
無鉛ガラス組成物の粒子と、金属粒子と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には粒径が約1μmのA-20、金属粒子には平均粒径が1.5μm程度の球状銀(Ag)粒子を用いた。また、溶剤にはα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。表11に無鉛ガラス組成物A-20の粒子と金属粒子Agの配合割合を示す。表11に示す配合割合で7種類のガラスペーストを作製した。なお、ガラスペースト中の固形分(無鉛ガラス組成物の粒子と金属粒子の合計)の含有率は75~80質量%とした。
表11で示した7種類のガラスペーストDH-01~DH-07を用いて、図7に示す配線パターンでそれぞれの電極/配線を形成した。図7の基板6には、アルミナ(Al2O3)基板、ホウケイ酸ガラス基板、シリコン(Si)基板、フェライト基板及びポリイミド基板を用いた。配線7~13は、表11のDH-01~07に対応している。先ずは、各導電性ガラスペーストを用いて、各基板上にスクリーン印刷法により2mm×40mmのパターンをそれぞれ塗布し、大気中150℃で乾燥した。その際の膜厚は30~40μmであった。これを電気炉へ投入し、大気中10℃/分の昇温速度で200℃まで加熱し30分間保持することによって、基板6にそれぞれの配線7~13を形成した。
表11に示した7種類のガラスペーストDH-01~07の配合割合によって各基板に形成した配線7~13の配線抵抗を四端子法によりそれぞれ測定した。
各基板への配線7~13の密着性は、ピーリングテストにより評価した。各基板上に形成した配線にピーリングテープを貼り付け、そのテープを剥がした時に配線が基板から剥離せずに断線しなかったものを「合格」とし、一方配線に剥離及び/又は断線が生じたものを「不合格」と評価した。
本実施例では、無鉛ガラス組成物と樹脂とを含むガラス複合材料を用いて、金属、セラミックス及びガラスの基材への密着強度を評価した。無鉛ガラス組成物としては、表1で示したA-07、樹脂としては、エポキシ樹脂、フェノキシ樹脂、フェノール樹脂、アクリル樹脂、ウレタン樹脂及びフッ素樹脂の6種類を用いた。また、金属基材にはアルミニウム(Al)、銅(Cu)及び鉄(Fe)、セラミックス基材にはアルミナ(Al2O3)とマグネシア(MgO)、ガラス基材にはソーダライムガラスとホウケイ酸ガラスを用いた。無鉛ガラス組成物の粒子と、樹脂と、溶剤を含むガラスペーストを塗料とし、それを各種の基材へ塗布、焼成することによって塗膜を形成したものを評価試料とした。
無鉛ガラス組成物の粒子と、樹脂と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には粒径が約1μmのA-07、溶剤にはブチルカルビトールアセテートを用いた。先ずは、エポキシ樹脂、フェノキシ樹脂、フェノール樹脂、アクリル樹脂、ウレタン樹脂及びフッ素樹脂をそれぞれ溶剤に溶かした。次に、その溶解液に無鉛ガラス組成物の粒子を導入し、よくかき混ぜて、ガラスペーストを作製した。無鉛ガラス組成物と樹脂との配合割合は、体積%で0:100と10:90とした。また、ガラスペースト中の固形分(無鉛ガラス組成物と樹脂の合計)の含有率は75~80質量%とした。なお、無鉛ガラス組成物と樹脂との配合割合が0:100、すなわち無鉛ガラス組成物を含まないペーストは比較材料である。
作製したガラスペーストをAl、Cu及びFeの金属基材、Al2O3とMgOのセラミックス基材及びソーダライムガラスとホウケイ酸ガラスのガラス基材にそれぞれ塗布し、大気中において10℃/分の昇温速度で150℃まで加熱し15分保持した後に、5℃/分の昇温速度で190℃まで加熱し10分間保持することによって、それぞれの基材に塗膜を形成した。
各基材へ形成した塗膜の密着強度は、引っ掻き試験(剥離強度)によって評価した。無鉛ガラス組成物と樹脂との配合割合が0:100、すなわち無鉛ガラス組成物を含まない塗膜の密着強度を「1」として、無鉛ガラス組成物を含む塗膜の密着強度を相対的に比較した。すなわち、「1」超のときには、密着強度が向上し、一方「1」未満のときには、密着強度が低減したことになる。
実施例6は、無鉛ガラス組成物と樹脂とを含むガラス複合材料を用いて、無鉛ガラス組成物と樹脂の配合割合が金属、セラミックス及びガラスの基材への密着強度に及ぼす影響を評価した。無鉛ガラス組成物としては表1で示したA-07、樹脂としてはフェノール樹を用いた。また、金属基材にはアルミニウム(Al)、銅(Cu)及び鉄(Fe)、セラミックス基材にはアルミナ(Al2O3)とマグネシア(MgO)、ガラス基材にはソーダライムガラスとホウケイ酸ガラスを用いた。無鉛ガラス組成物の粒子と、樹脂と、溶剤を含むガラスペーストを塗料とし、それを各種の基材へ塗布、焼成することによって塗膜を形成した。これを評価試料とした。
無鉛ガラス組成物の粒子と、樹脂と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には粒径が約1μmのA-07、溶剤にはブチルカルビトールアセテートを用いた。フェノール樹脂を溶かしたブチルカルビトールアセテートに無鉛ガラス組成物の粒子を導入し、よくかき混ぜて、ガラスペーストを作製した。無鉛ガラス組成物と樹脂との配合割合は、体積%で5:95、10:90、30:70、50:50及び70:30の5種類とした。また、ガラスペースト中の固形分(無鉛ガラス組成物と樹脂の合計)の含有率は75~80質量%とした。
作製したガラスペーストをAl、Cu及びFeの金属基材、Al2O3とMgOのセラミックス基材及びソーダライムガラスとホウケイ酸ガラスのガラス基材にそれぞれ塗布し、大気中において10℃/分の昇温速度で150℃まで加熱し15分保持した後に、5℃/分の昇温速度で190℃まで加熱し10分間保持することによって、それぞれの基材に塗膜を形成した。
各基材へ形成した塗膜の密着強度は、引っ掻き試験(剥離強度)によって評価した。無鉛ガラス組成物と樹脂との配合割合が0:100、すなわち無鉛ガラス組成物を含まない塗膜の密着強度を「1」として、無鉛ガラス組成物を含む塗膜の密着強度を相対的に比較した。すなわち、「1」超のときには、密着強度が向上し、一方「1」未満のときには、密着強度が低減したことになる。表14にフェノール樹脂を用いた場合の各基材への相対的な密着強度評価結果を示す。
本実施例では、2枚のソーダライムガラス基板と、本発明の一実施形態に係るガラス複合材料とを用いて、ガラス封止部品の代表例の一つとして真空断熱用複層ガラスパネルを作製し、ガラス複合材料の適用可能性を実証した。なお、本実施例では、ガラス複合材料にそのガラスペーストを用いた。
本発明の一実施形態に係る無鉛ガラス組成物の粒子と、セラミックス粒子と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には、粒径が約15μmのA-08、セラミックス粒子には、粒径が約30μm程度のCF-01(リン酸タングステン酸ジルコニウム)を用いた。また、溶剤にはα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。無鉛ガラス組成物A-08の粒子とセラミックス粒子CF-01の配合割合は、体積%で65:35として、その固形分(A-08とCF-01の合計)の含有率が75~80質量%となるようにガラスペーストを作製した。さらに、ガラスペースト中には、粒径が180~200μm程度のソーダライムガラス製球状ビーズを含有した。その含有量は、前記固形分に対して、低温封止用には1体積%、スペーサ用には20体積%とした。
本実施例の真空断熱複層ガラスパネルの作製方法について図10A~12を用いて説明する。
先ずは、本実施例において作製した真空断熱複層ガラスパネル10枚の外観検査を行った。その結果、ワレやヒビ等は認められなく、外観上の問題はなかった。また、封止部14中及びスペーサ18中の球状ビーズ19によって、ソーダライムガラス基板15と16の間隔は、ほぼ均一の厚みであった。すなわち、所定の空間部17を有する真空断熱複層ガラスパネルが得られた。さらに、ヘリウムリーク試験よりパネル内部は真空状態となっており、パネル外周部が気密に封止されていることを確認した。
本実施例では、封止構造体の代表例の一つとして2枚のホウケイ酸ガラス基板の間に有機発光ダイオード(OLED)が多数内蔵されたディスプレイを作製し、本発明のガラス複合材料の適用可能性を実証した。なお、本実施例では、ガラス複合材料にそのガラスペーストを用いた。
無鉛ガラス組成物の粒子と、セラミックス粒子と、溶剤とを配合、混合してガラスペーストを作製した。無鉛ガラス組成物の粒子には、平均粒径が約1μm程度のA-19、セラミックス粒子には、平均粒径が約3μm程度のCF-02(リン酸タングステン酸ジルコニウムを主体とする化合物)を用いた。また、溶剤にはα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。そのセラミックス粒子CF-02には、後で説明するが、赤色半導体レーザを効率的に吸収して発熱しやすいように、リン酸タングステン酸ジルコニウム粒子中にタングステン酸鉄(FeWO4)を含有した。無鉛ガラス組成物A-19の粒子とセラミックス粒子CF-02の配合割合は、体積%で60:40として、その固形分(A-19とCF-02の合計)の含有率が約80質量%となるように低温封止用ガラスペーストを作製した。
本実施例のOLEDディスプレイの作製方法を図15A~17に示す。
先ずは、作製したOLEDディスプレイの点灯試験を行った。その結果、問題なく、点灯することを確認した。また、封止部の密着性や接着性も良好であった。次にこのOLEDディスプレイを120℃-100%Rh-202kPaの条件で1日間、3日間及び7日間の高温高湿試験(飽和型プレッシャークッカー試験)を実施し、同様に点灯試験を行った。比較として樹脂のみで封止したOLEDディスプレイも入れた。なお、この樹脂封止の線幅は約5mm、厚みは約15μmとした。1日間の高温高湿試験では、どちらのOLEDディスプレイともに問題なく点灯したが、樹脂封止したOLEDディスプレイは3日間以降の点灯で大きな劣化が発生した。これは、樹脂封止部よりOLEDディスプレイ内部に水分や酸素が導入されてしまい、OLEDが劣化したためである。一方、本実施例に係るOLEDは7日間の高温高湿試験でも、OLEDの点灯には劣化が認められず、良好な試験結果となった。これは良好な気密性が維持されていることを示唆した結果である。さらに高温高湿試験後の封止部の密着性や接着性も評価した結果、樹脂で封止したような大きな低下は認められず、試験前とほぼ同等であった。
本実施例では、電気電子部品の代表例の一つとしてpn接合を有するシリコン(Si)基板を用いた太陽電池セルを作製し、本発明のガラス複合材料がその太陽電池セルの電極/配線へ適用できるかどうかを検討し、評価した。なお、本実施例では、ガラス複合材料にそのガラスペーストを用いた。
無鉛ガラス組成物A-35或いはA-38の粒子と、銀(Ag)或いはアルミニウム(Al)の金属粒子と、溶剤とを配合、混合してガラスペーストを作製した。受光面電極/配線28と出力電極/配線30に使用するガラスペーストとしては、平均粒径が約1μm程度のA-35粒子と平均粒径が約1.5μm程度の球状Ag粒子とを用い、その配合割合を体積%で20:80とした。溶剤にはα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。また、集電電極/配線29に使用するガラスペーストとしては、平均粒径が約1μm程度のA-38粒子と平均粒径が約3μm程度の球状Al粒子とを用い、その配合割合を体積%で15:85とし、溶剤にはα‐テルピネオールを使用し、粘度調整剤としてイソボニルシクロヘキサノールを添加した。どちらのガラスペーストにおいても、ペースト中の固形分(無鉛ガラス組成物の粒子と金属粒子の合計)の含有量は約80質量%とした。
図18A~18Cで示した太陽電池セルの作製方法について説明する。
先ずは、本実施例において作製した太陽電池セル10枚の外観検査を行った。その結果、Si基板27やそのSi基板27に形成した受光面電極/配線28、集電電極/配線29及び出力電極/配線30には、ワレやヒビ等は観測されず、また大きなそりも認められず、外観上の問題はなかった。これは、本発明の無鉛ガラス組成物によって各種の電極/配線の形成温度を著しく低温化できた効果である。次に、作製した10枚の太陽電池セルにおいてSi基板27と受光面電極/配線28との電気的接続、Si基板27と集電電極/配線29及び出力電極/配線30との間のオーミックコンタクトが得られ、問題なきことを確認した。続いて、作製した10枚の太陽電池セルの発電効率をソーラーシュミレータによって評価したところ、作製温度を著しく低温化したにも関わらず、従来と同等の約18%が得られた。また、信頼性を確認するために、作製した太陽電池セル3枚を50℃の温水に5日間浸漬し、同様にして発電効率を測定した。従来の太陽電池セルでは、電極/配線が腐食され、発電効率が12~13%ぐらいまでに著しく劣化したが、本実施例において作製した太陽電池セルでは、電極/配線がほとんど腐食されずに発電効率の劣化は認められなかった。これは、実施例3や実施例4で説明したように本発明の無鉛ガラス組成物とAg、或いはAlとの特有な反応により、このように信頼性が高い太陽電池セルが得られるものと考えられる。
本実施例では、電気電子部品の代表例の一つとして水晶振動子のパッケージを作製し、本発明のガラス複合材料がそのパッケージの導電性接合部や封止部へ適用できるかどうかを検討した。なお、本実施例では、ガラス複合材料にそのガラスペーストを用いた。
本実施例では、導電性接合部35を形成するために使用するガラスペースト中の無鉛ガラス組成物として表1で示した軟化点Tsが200℃のA-37、封止部37を形成するために使用するガラスペースト中の無鉛ガラス組成物として表1で示した軟化点Tsが177℃のA-03を用いた。A-37とA-03の軟化点Tsの温度差は23℃あるので、導電性接合部35に剥離等の問題を来たすことなく、封止が可能と思われる。すなわち、同時に良好な導電性接合部35と封止部37が得られると言うことである。
本実施例における水晶振動子パッケージの作製方法を具体的に説明する。本実施例ではセラミックス基板33とセラミックスキャップ36には、アルミナ(α-Al2O3)製を用いた。
先ずは、本実施例において作製した水晶振動子パッケージ18個の外観検査を実体顕微鏡にて行った。その結果、封止時におけるセラミックスキャップ36のズレはほとんどなく、また封止部37には結晶化による失透、ワレやヒビ等も観察されず、外観上の問題は認められなかった。
本実施例では、電気電子部品の代表例の一つとして、樹脂配線基板への展開可能性を検討した。樹脂配線基板には、コンデンサーやインダクター等の素子が搭載及び集積される。樹脂配線基板の配線は、めっき等で樹脂基板に形成され、その配線に素子が電気的に接続される。その樹脂基板には、安価なことからガラス繊維が含有されたエポキシ系或いはフェノキシ系の樹脂が使われることが一般的である。このような樹脂基板の耐熱性は低く、約200℃程度である。このため、従来は、樹脂基板の配線と素子とを電気的に接続するために、融点が200℃以下の鉛系はんだが適用されていた。しかし、昨今のRoHS指令等の環境規制により、鉛系はんだが使用できなくなっている。その代替として鉛フリーの錫系はんだが考えられるが、そのはんだは、大気中での加熱が難しく、さらに接続温度を250℃に近いところまで上げる必要があるために、樹脂配線基板の耐熱性を超えてしまう問題がある。そこで、鉛フリーの樹脂銀ペーストが樹脂配線基板の素子接続部に使用されるようになった。樹脂銀ペーストによる樹脂配線基板への素子の接続は、大気中150℃前後で可能であり、その接続部は銀粒子と樹脂とから構成される。しかし、樹脂を硬化させるのに大気中150℃前後で数時間もの保持が必要であった。また、樹脂銀ペーストでは、銀粒子が樹脂中でネッキングする訳ではないので、その素子接続部の導電性が高いとは言えなかった。さらに、その素子接続部には、樹脂が含まれるため、耐湿性等の信頼性が十分とは言えなかった。
樹脂配線基板にコンデンサーやインダクター等の素子を無鉛ガラス組成物と金属粒子とからなるガラス複合材料の導電性ガラスペーストを用いて接続した。無鉛ガラス組成物には、表1で示した軟化点TSが177℃のA-03を使用し、その平均粒径は2μm以下とした。金属粒子には、平均粒径が約1.5μm程度の球状銀(Ag)を用いた。また、導電性ガラスペーストを作製するための溶剤には、α-テルピネオールを用いた。A-03粒子とAg粒子の配合割合は、体積%で25:75とし、その固形分(A-03とAgの合計)の含有率が約80質量%となるように導電性ガラスペーストを作製した。
作製した導電性ガラスペーストを用いて、樹脂配線基板の所定の配線上に複数の素子を接続した。その素子接続方法は、先ずは所定の配線上に導電性ガラスペーストを塗布し、その上に複数の素子を載せ、大気中において約150℃で乾燥した。その後、大気中10℃/分の昇温速度で190℃まで加熱し10分間保持し、樹脂配線基板へ複数の素子を電気的に接続した。また、比較例として、樹脂銀ペーストを用い、大気中150℃で5時間保持して複数の素子を電気的に接続した樹脂配線基板を作製した。
本実施例の導電性ガラスペーストを使用した場合には、比較例で用いた樹脂銀ペーストよりも著しく短時間で素子を樹脂配線基板へ接続することができ、生産性を向上できることが分かった。また、その接続抵抗は、図8からも推定されるように10-6~10-5Ωcmの範囲にあり、比較例の樹脂銀ペーストを用いた場合より一桁以上低く、導電性が非常に高いことが分かった。これは、本発明の無鉛ガラス組成物中で銀粒子がネッキングを起こすためである。さらに85℃-85%Rhの高温高湿試験を3日実施した結果、比較例では、素子接続部に腐食が観察され、その接続抵抗が大きくなってしまう傾向が認められたが、本実施例では、素子接続部の腐食やその接続抵抗の増大はほとんど認められず、信頼性の高い素子接続部が得られることが分かった。
Claims (26)
- 酸化銀、酸化テルル及び酸化バナジウムを含み、
さらに追加成分として酸化イットリウム、酸化ランタン、酸化セリウム、酸化エルビウム、酸化イットリビウム、酸化アルミニウム、酸化ガリウム、酸化インジウム、酸化鉄、酸化タングステン及び酸化モリブデンのうちの少なくともいずれか1つを含み、
前記酸化銀、前記酸化テルル及び前記酸化バナジウムの含有量(モル%)は、次に示す酸化物換算で、Ag2O>TeO2≧V2O5、かつAg2O≦2V2O5の関係を有し、TeO2の含有量は25モル%以上37モル%以下であることを特徴とする無鉛ガラス組成物。 - 請求項1に記載の無鉛ガラス組成物において、
酸化物換算でAg2Oの含有量は40モル%以上50モル%未満であり、V2O5の含有量は20モル%以上30モル%未満であることを特徴とする無鉛ガラス組成物。 - 請求項1又は請求項2に記載の無鉛ガラス組成物において、
前記追加成分の含有量は、酸化物換算で0.1モル%以上3.5モル%以下であることを特徴とする無鉛ガラス組成物。 - 請求項1乃至請求項3のいずれか1項に記載の無鉛ガラス組成物において、
前記追加成分は酸化イットリウム、酸化ランタン及び酸化アルミニウムのうちの少なくともいずれか1つであり、
前記追加成分の含有量(モル%)が次に示す酸化物換算で、Ag2O+Ln2O3≦2V2O5(Ln:Y、La、Al)であることを特徴とする無鉛ガラス組成物。 - 請求項4に記載の無鉛ガラス組成物において、
前記追加成分の含有量は、酸化物換算で0.3モル%以上1.5モル%以下であることを特徴とする無鉛ガラス組成物。 - 請求項1乃至請求項5のいずれか1項に記載の無鉛ガラス組成物において、
示差熱分析による第二吸熱ピーク温度は、200℃以下であることを特徴とする無鉛ガラス組成物。 - 請求項1乃至請求項6のいずれか1項に記載の無鉛ガラス組成物と、セラミックス粒子、金属粒子及び樹脂のうちの少なくともいずれか1つを含むことを特徴とするガラス複合材料。
- 請求項7に記載のガラス複合材料において、
前記無鉛ガラス組成物の含有量は40体積%以上100体積%未満であり、前記セラミックス粒子の含有量は0体積%超60体積%以下であることを特徴とするガラス複合材料。 - 請求項7又は請求項8に記載のガラス複合材料において、
前記セラミックス粒子は、リン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)、石英ガラス(SiO2)、ケイ酸ジルコニウム(ZrSiO4)、アルミナ(Al2O3)、ムライト(3Al2O3・2SiO2)及び酸化ニオブ(Nb2O5)のいずれかを含むことを特徴とするガラス複合材料。 - 請求項7乃至請求項9のいずれか1項に記載のガラス複合材料において、
前記セラミックス粒子は、リン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)又はリン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)を主体とする化合物であり、
前記セラミックス粒子の含有量は、30体積%以上50体積%以下であることを特徴とするガラス複合材料。 - 請求項7乃至請求項10のいずれか1項に記載のガラス複合材料において、
前記無鉛ガラス組成物の含有量は10体積%以上80体積%以下であり、
前記金属粒子の含有量は20体積%以上90体積%以下であることを特徴とするガラス複合材料。 - 請求項7乃至請求項11のいずれか1項に記載のガラス複合材料において、
前記金属粒子は、金(Au)、銀(Ag)、銀合金、銅(Cu)、銅合金、アルミニウム(Al)、アルミニウム合金、スズ(Sn)及びスズ合金のうちの少なくとも1つを含むことを特徴とするガラス複合材料。 - 請求項11に記載のガラス複合材料において、
前記金属粒子は、銀(Ag)又はアルミニウム(Al)を含み、前記金属粒子の含有量は、10体積%以上90体積%以下であることを特徴とするガラス複合材料。 - 請求項7に記載のガラス複合材料において、
前記無鉛ガラス組成物の含有量は5体積%以上100体積%未満であり、
前記樹脂の含有量は0体積%超95体積%以下であることを特徴とするガラス複合材料。 - 請求項7乃至請求項14のいずれか1項に記載のガラス複合材料において、
前記樹脂は、エポキシ樹脂、フェノキシ樹脂、フェノール樹脂、アクリル樹脂、ウレタン樹脂又はフッ素樹脂を含むことを特徴とするガラス複合材料。 - 請求項7乃至請求項15のいずれか1項に記載のガラス複合材料と、溶剤とを含むことを特徴とするガラスペースト。
- 請求項16に記載のガラスペーストにおいて、
前記溶剤は、α-テルピネオール又はブチルカルビトールアセテートであることを特徴とするガラスペースト。 - 内部空間と、
請求項7乃至請求項15のいずれか1項に記載のガラス複合材料からなり、前記内部空間と外部との境界の少なくとも一部を隔てる封止部と、を備えることを特徴とする封止構造体。 - 請求項18に記載の封止構造体において、
前記ガラス複合材料に含まれる無鉛ガラス組成物の含有量が50体積%以上であることを特徴とする封止構造体。 - 請求項18又は請求項19に記載の封止構造体において、
前記封止構造体が、複層ガラス、ディスプレイパネル又はパッケージデバイスであることを特徴とする封止構造体。 - 請求項11乃至請求項13のいずれか1項に記載のガラス複合材料からなる電極、配線、導電性接合部又は放熱性接合部を備えることを特徴とする電気電子部品。
- 請求項21に記載の電気電子部品において、
前記ガラス複合材料に含まる金属粒子の含有量が50体積%以上であることを特徴とする電気電子部品。 - 請求項21又は請求項22に記載の電気電子部品において、
前記電気電子部品は、太陽電池セル、画像表示デバイス、積層コンデンサー、インダクター、水晶振動子、樹脂配線基板、発光ダイオード、多層回路基板又は半導体モジュールであることを特徴とする電気電子部品。 - 部材と、前記部材に形成された塗膜と、を備える塗装部品であって、
前記部材は、金属、セラミックス又はガラスの基材であり、
前記塗膜は、請求項7乃至請求項15のいずれか1項に記載のガラス複合材料を含むことを特徴とする塗装部品。 - 請求項24に記載の塗装部品において、
前記ガラス複合材料に含まる樹脂の含有量が50体積%以上であることを特徴とする塗装部品。 - 請求項24又は請求項25に記載の塗装部品において、
前記塗装部品は、電線、車体、機体、洗濯機槽、便器又は浴槽タイルであることを特徴とする塗装部品。
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| JP2019094250A (ja) * | 2017-11-28 | 2019-06-20 | 日立化成株式会社 | 封止材料及びこれを用いた複層ガラスパネル |
| CN111556856A (zh) * | 2017-11-28 | 2020-08-18 | 日立化成株式会社 | 密封材料和使用其的多层玻璃面板 |
| WO2019107063A1 (ja) * | 2017-11-28 | 2019-06-06 | 日立化成株式会社 | 封止材料及びこれを用いた複層ガラスパネル |
| CN116553828B (zh) * | 2017-11-28 | 2026-04-14 | 株式会社力森诺科 | 密封材料和使用其的多层玻璃面板 |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6681413B2 (ja) | 2020-04-15 |
| US10913680B2 (en) | 2021-02-09 |
| EP3406574A1 (en) | 2018-11-28 |
| TWI632122B (zh) | 2018-08-11 |
| CN108463440B (zh) | 2021-09-21 |
| TW201733948A (zh) | 2017-10-01 |
| EP3406574B1 (en) | 2021-11-03 |
| JPWO2017126378A1 (ja) | 2018-09-06 |
| CN108463440A (zh) | 2018-08-28 |
| EP3406574A4 (en) | 2019-10-09 |
| US20180354843A1 (en) | 2018-12-13 |
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