WO2017206559A1 - 压力传感器、触控基板和触控显示装置 - Google Patents

压力传感器、触控基板和触控显示装置 Download PDF

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Publication number
WO2017206559A1
WO2017206559A1 PCT/CN2017/074753 CN2017074753W WO2017206559A1 WO 2017206559 A1 WO2017206559 A1 WO 2017206559A1 CN 2017074753 W CN2017074753 W CN 2017074753W WO 2017206559 A1 WO2017206559 A1 WO 2017206559A1
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WIPO (PCT)
Prior art keywords
pressure sensor
substrate
touch
elastic layer
signal line
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Ceased
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PCT/CN2017/074753
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English (en)
French (fr)
Inventor
程鸿飞
张玉欣
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to EP17751591.3A priority Critical patent/EP3467464A4/en
Priority to US15/552,370 priority patent/US10592033B2/en
Publication of WO2017206559A1 publication Critical patent/WO2017206559A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G06F3/04144—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position using an array of force sensing means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G06F3/04146—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position using pressure sensitive conductive elements delivering a boolean signal and located between crossing sensing lines, e.g. located between X and Y sensing line layers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/047—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using sets of wires, e.g. crossed wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/136295—Materials; Compositions; Manufacture processes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • Embodiments of the present invention relate to a pressure sensor, a touch substrate, and a touch display device.
  • the touch sensing structure of the in-cell touch display device is disposed in the display panel, and the touch sensing structure covering the surface touch display device is disposed outside the display panel and disposed on a substrate included in the display panel.
  • a touch sensing structure in a touch display device is generally obtained by forming one or two conductive films on a substrate and patterning the one or two conductive films.
  • Embodiments of the present invention provide a pressure sensor, a touch substrate, and a touch display device.
  • At least one embodiment of the present invention provides a pressure sensor including: an active layer; a gate disposed in a laminated manner with the active layer and insulated from the active layer; and an elastic layer Provided between the active layer and the gate in a direction perpendicular to the active layer; and a source and a drain, which are spaced apart from each other and are electrically connected to the active layer.
  • a pressure sensor including: an active layer; a gate disposed in a laminated manner with the active layer and insulated from the active layer; and an elastic layer Provided between the active layer and the gate in a direction perpendicular to the active layer; and a source and a drain, which are spaced apart from each other and are electrically connected to the active layer.
  • the elastic layer has a percent change in thickness of at least about 5%.
  • the elastomeric layer has a thickness of from about 0.5 microns to about 5 microns without the pressure sensor being stressed.
  • the elastic layer has a Young's modulus of about 0.1 MPa to 10 MPa.
  • the material of the elastic layer includes at least one or several of rubber, polyurethane, polypropylene, and polyoxymethylene.
  • an orthographic projection of the gate on the elastic layer is located substantially within the elastic layer.
  • an orthographic projection of the active layer on the elastic layer is located substantially within the elastic layer.
  • an interlayer insulating layer is disposed between at least one of the gate electrode and the active layer and the elastic layer in the direction perpendicular to the active layer.
  • the pressure sensor further includes a substrate carrying the active layer, the elastic layer, the gate, the source, and the drain, and the elastic layer is disposed on a side of the active layer away from the substrate.
  • the at least one embodiment of the present invention further provides a touch substrate, the touch substrate includes: a carrier substrate; the pressure sensor according to any one of the above, which is disposed on the carrier substrate and spaced apart from each other; a plurality of first signal lines spaced apart from each other, disposed on the carrier substrate and electrically connected to gates of the plurality of pressure sensors respectively; a plurality of second signal lines spaced apart from each other, disposed in the The carrier substrate respectively intersects the plurality of first signal lines and is electrically connected to the sources of the plurality of pressure sensors respectively; and a plurality of third signal lines spaced apart from each other are disposed on the carrier substrate And spaced apart from the first signal line and the second signal line, and electrically connected to drains of the plurality of pressure sensors, respectively.
  • the plurality of third signal lines are parallel to the plurality of second signal lines.
  • At least one of an elastic layer of each pressure sensor and a second signal line adjacent to the pressure sensor and a third signal line adjacent to the pressure sensor An overlap.
  • At least one embodiment of the present invention provides a touch display device, wherein the touch display device includes the touch substrate of any of the above.
  • the touch display device further includes a plurality of pixel units and a plurality of transistors, and the plurality of transistors are respectively connected to the plurality of pixel units.
  • the touch display device further includes: a plurality of data lines spaced apart from each other, and disposed on the carrier substrate included in the touch substrate and with the first signal line, the second signal line, and the third signal Line spacing setting. Sources of the plurality of transistors are respectively connected to the data lines, and gates of the plurality of transistors are respectively connected to the first signal lines.
  • the touch display device further includes: a plurality of gate lines spaced apart from each other, and disposed on the carrier substrate included in the touch substrate and with the first signal line, the second signal line, and the third signal Line spacing setting.
  • the gates of the plurality of transistors are respectively connected to the gate lines, and the sources of the plurality of transistors are respectively connected to the second signal lines.
  • the touch display device further includes a plurality of data lines spaced apart from each other and a plurality of gate lines spaced apart from each other, the data lines and the gate lines being disposed on the load included in the touch substrate On the substrate and spaced apart from the first signal line, the second signal line and the third signal line, the gates of the plurality of transistors are respectively connected to the gate lines, and the sources of the plurality of transistors are respectively connected Said data line.
  • the touch display device further includes a flexible substrate disposed opposite to the carrier substrate included in the touch substrate, and the touch substrate includes a pressure sensor disposed between the carrier substrate and the flexible substrate.
  • the touch display device further includes a display panel including a first substrate and a second substrate disposed opposite to each other, the touch substrate including a pressure sensor disposed on the first substrate away from the One side of the second substrate.
  • Embodiments of the present invention provide a pressure sensor, a touch substrate, and a touch display device.
  • a pressure elastic layer is disposed between the gate of the thin film transistor and the active layer to form a pressure sensor, and the thickness of the pressure elastic layer is reduced when the thin film transistor is touched, so that the pressure signal can be changed.
  • the change in the output signal of the thin film transistor is converted, and by detecting the output signal of the thin film transistor, the magnitude of the touch pressure and/or the touch position can be determined.
  • FIG. 1 is a cross-sectional view of a pressure sensor according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of a pressure sensor according to another embodiment of the present invention.
  • FIG. 3 is a cross-sectional view of a pressure sensor according to still another embodiment of the present invention.
  • FIG. 4a and 4b are top plan views of a touch substrate according to an embodiment of the present invention.
  • FIG. 5 is a partial cross-sectional view showing a touch display device according to an embodiment of the invention.
  • FIG. 6 is a top plan view of a touch display device according to an embodiment of the invention.
  • Embodiments of the present invention provide a pressure sensor, a touch substrate, and a touch display device.
  • a pressure elastic layer is disposed between the gate of the thin film transistor and the active layer to form a pressure sensor, and the thickness of the pressure elastic layer is reduced when the thin film transistor is touched, so that the pressure signal can be changed.
  • the change in the output signal of the thin film transistor is converted, and by detecting the output signal of the thin film transistor, the magnitude of the touch pressure and/or the touch position can be determined.
  • a pressure sensor 10 (which is, for example, a thin film transistor) including an active layer 13, a source 14a, a drain 14b, an elastic layer 15, and a gate. Extreme 16.
  • the source 14a and the drain 14b are spaced apart from each other and are both electrically connected to the active layer 13.
  • the gate electrode 16 is laminated with the active layer 13 and insulated from the active layer 13.
  • the elastic layer 15 is disposed between the active layer 13 and the gate electrode 16 in a direction perpendicular to the active layer 13.
  • the elastic layer 15 may be an elastic insulating layer to pass the gate electrode 16 and the active layer 13 through the elasticity.
  • the layers 15 are insulated from each other; and, the elastic layer 15 is configured to be deformed in the case where the pressure sensor 10 is applied with pressure, that is, the thickness of the elastic layer 15 is reduced at a position where the pressure sensor 10 is applied with pressure, thereby according to the elastic layer 15 In the case of the thickness reduction, it is possible to judge whether or not the pressure sensor 10 is applied with pressure and the magnitude of the applied pressure.
  • the pressure sensor 10 may further include a substrate 11 carrying an active layer 13, an elastic layer 15, a gate 16, a source 14a, and a drain 14b, and the elastic layer 15 may be disposed on a side of the active layer 13 remote from the substrate 11. (shown on the upper side of the active layer 13 in Fig. 1).
  • the elastic layer 15 is more distant from the urging member (for example, a finger). Recently, the force applying material is more likely to deform the elastic layer 15.
  • the pressure sensor 10 is a top gate structure, that is, the gate electrode 16 is disposed on a side of the active layer 13 remote from the substrate 11.
  • the pressure sensor 10 can also adopt a bottom gate structure, that is, the gate electrode 16 is disposed between the active layer 13 and the substrate 11.
  • the direction perpendicular to the active layer 13 is also perpendicular to the plate surface of the substrate 11.
  • the substrate 11 may further be provided with an insulating layer 12 and/or a cover gate 16, an elastic layer 15, and an active layer between the substrate 11 and the active layer 13.
  • the thickness of the elastic layer 15 is reduced, so that the output current of the pressure sensor 10 (i.e., the current between the source electrode 14a and the drain electrode 14b) is increased.
  • the percentage change in the thickness of the elastic layer 15 may be at least about 5% at the position where the pressure sensor 10 is applied with pressure. .
  • the original thickness of the elastic layer 15 i.e., the thickness in the case where the pressure sensor 10 is not applied with pressure
  • the elastic layer 15 is at the original thickness, between the source 14a and the drain 14b
  • the current is I.
  • the thickness of the elastic layer 15 is reduced by about 5%, so that the thickness of the elastic layer 15 after reduction is about (1-5%) d; in this case, between the source and the drain
  • the current increase is close to about 5%, for example, the current after the increase can be about (1 + 5.263%) I.
  • the amount of current change between the source and the drain is at least about 5%, the change in the current can be reliably detected.
  • the thickness of the elastic layer 15 in the case where the pressure sensor 10 is not pressurized may be about 0.5 to 5 microns. This thickness range facilitates detecting changes in the output signal of the pressure sensor 10. This is because if the elastic layer 15 is too thick, it may be necessary to apply a higher voltage to the gate electrode 16; and if the elastic layer 15 is too thin, the deformation of the elastic layer 15 may be less noticeable.
  • the material of the elastic layer 15 may have a Young's modulus of about 0.1 MPa to 10 MPa. Young's modulus is a physical quantity that characterizes the tensile or compressive capacity of a material within elastic limits. If the Young's modulus of the elastic layer 15 is less than about 0.1 MPa, a large pressure may be required to cause the elastic layer 15 to be deformed; if the Young's modulus is greater than about 10 MPa, the elastic layer 15 is too soft, which may be lowered.
  • the elastic layer 15 may have a resetting property, and the elastic layer 15 may be automatically reset in the case where the external force applied by the pressure sensor 10 disappears.
  • the elastic layer 15 may be made of a polymer elastic material.
  • the material of the elastic layer 15 may include at least one or several of rubber, polyurethane, polypropylene, and polyoxymethylene.
  • the area of the elastic layer 15 is variable in size as long as the elastic layer 15 is provided between the gate electrode 16 and the active layer 13 and can be used to reliably detect the touch pressure.
  • the orthographic projection of the gate 16 on the elastic layer 15 can be located substantially within the elastic layer 15.
  • the pressure applied to the grid 16 can be well transmitted to the elastic layer 15, thereby facilitating the sensitivity of the pressure sensor 10 to pressure.
  • the elastic layer 15 may cover all of the source 14a and the drain 14b; or, as shown in FIG. 2, the elastic layer 15 may cover part of the source 14a and part of the drain 14b.
  • the orthographic projection of the active layer 13 on the elastic layer 15 may be located substantially within the elastic layer 15. This is advantageous in ensuring that the active layer 13 is uniformly stressed, thereby reducing the probability of the active layer 13 being broken.
  • an interlayer insulating layer 18a may be disposed between the elastic layer 15 and the active layer 13 in a direction perpendicular to the active layer 13, and an elastic layer 15 and the gate electrode 16 may be disposed.
  • only one of the interlayer insulating layers 18a and 18b may be provided.
  • the active layer 13 may be made of a semiconductor material such as amorphous silicon, polysilicon, metal oxide or the like commonly used in the art, and the gate 16, the source 14a and the drain 14b may be commonly used in the art, for example. It is made of a metal material such as aluminum, aluminum-bismuth alloy, copper, titanium, molybdenum or molybdenum-niobium alloy, and the substrate 11 may be a glass substrate, a quartz substrate or a plastic substrate.
  • At least one embodiment of the present invention also provides a touch substrate 100, as shown in FIG. 4a, the touch
  • the control substrate 100 includes a carrier substrate 20, a plurality of pressure sensors 10 provided by any of the above embodiments, a plurality of first signal lines 31, a plurality of second signal lines 32, and a plurality of third signal lines 33.
  • the plurality of pressure sensors 10 are disposed on the carrier substrate 20 at intervals.
  • the plurality of first signal lines 31 are disposed on the carrier substrate 20 at a distance from each other and are electrically connected to the gates 16 of the plurality of pressure sensors 10 respectively (ie, Each of the first signal lines 31 is electrically connected to the gate 16 of the corresponding pressure sensor 10, for example, may be integrally formed; the plurality of second signal lines 32 are disposed on the carrier substrate 20 at intervals from each other, and the plurality of strips A signal line 31 intersects (ie, the second signal line 32 and the extending direction of the first signal line 31 intersect) and is electrically connected to the source 14a of the plurality of pressure sensors 10 (ie, each of the second signal lines 32 and the corresponding one) The source 14a of the pressure sensor 10 is electrically connected, for example, may be integrally formed; the plurality of third signal lines 33 are disposed on the carrier substrate 20 at intervals from each other, spaced apart from the first signal line 31 and the second signal line 32, and respectively The drains 14b of the plurality of pressure sensors 10 are electrically connected (ie, each
  • the first signal line 31 and the second signal line 32 may be disposed in a direction perpendicular to the board surface of the carrier substrate 20.
  • the insulating layer is spaced apart from each other; similarly, the third signal line 33 may also pass through the insulating layer to the first signal line 31 (for example, in the case where the third signal line 33 intersects the first signal line 31, As shown in FIG. 4a or the second signal line 32 is spaced apart; for example, the touch substrate 100 includes a carrier substrate 20 and the substrate 11 included in the pressure sensor 10 may be the same substrate.
  • the first signal line 31 and the second signal line 32 intersect each other to define a plurality of regions arranged in a matrix; each region may be provided with a pressure sensor 10, and the gate 16 of the pressure sensor 10 It may be electrically connected to a first signal line 31 defining the area, and the source 14a of the pressure sensor 10 may be electrically connected to a second signal line 32 defining the area, and then the drain 14b of the pressure sensor 10 is The third signal line 33 is connected to take the output signal of the pressure sensor 10 out.
  • the touch substrate provided by the embodiment of the present invention includes, but is not limited to, the manner shown in FIG. 4a.
  • the embodiment of the present invention provides a touch sensor 100 using the pressure sensor 10 provided in any one of the above embodiments as a touch sensing structure.
  • a touch object such as a user's finger
  • the touch object applies pressure.
  • the elastic layer 15 in the pressure sensor 10 is deformed so that the current output from the third signal line 33 changes, and based on the current change, the touch position can be judged.
  • the scan signal can be applied one by one to the first signal line 31, and according to the third letter
  • the current of the line 33 changes, and the touch position is locked.
  • the touch position can also be determined in other ways.
  • the plurality of third signal lines 33 may be substantially parallel to the plurality of second signal lines 32.
  • the third signal line 33 and the second signal line 32 may be disposed in the same layer, that is, by patterning the same film.
  • the elastic layers 15 of the plurality of pressure sensors 10 included in the touch substrate may be spaced apart from each other (as shown in FIG. 4a), or may be continuously formed.
  • the elastic layer 15 of each pressure sensor 10 may be in a second signal line 32 adjacent to the pressure sensor 10, and in a third signal line 33 adjacent to the pressure sensor 10. At least one overlap.
  • the elastic layer 15 of each pressure sensor (not shown in FIG. 4b) overlaps the adjacent second signal line 32 and the adjacent third signal line 33.
  • At least one embodiment of the present invention further provides a touch display device, which includes the touch substrate 100 provided in any of the above embodiments. Description will be made below with reference to Figs. 5a to 6c.
  • the touch display device may be a surface touch display device.
  • the touch display device 1000 provided by at least one embodiment of the present invention further includes a display panel 600, which may include a first substrate 610 and a second substrate 620 disposed opposite to each other, the first substrate The touch sensor 1000 is closer to the user (compared to the second substrate 620 ) and the pressure sensor 10 included in the touch substrate 100 is disposed on a side of the first substrate 610 away from the second substrate 620 .
  • the first substrate 610 and the second substrate 620 may be any type of substrate such as a glass substrate, a quartz substrate, or a plastic substrate.
  • the first substrate 610 and the carrier substrate 20 included in the touch substrate 100 may be the same substrate.
  • the display panel 600 may be a liquid crystal panel, in which case the display panel 600 further includes a liquid crystal layer 630 as shown in FIG. 5a.
  • the display panel 600 may also be a display panel commonly used in the field such as an OLED (Organic Light Emitting Diode) display panel or an LED (Light Emitting Diode) display panel.
  • the pressure sensor 10 may also be covered with a flexible layer (not shown in FIG. 5a), which may protect the pressure sensor 10, and The flexible layer is bent after being subjected to a touch pressure, thereby deforming the elastic layer of the pressure sensor 10.
  • the flexible layer can be made of an organic insulating material.
  • the above-described insulating layer 17 included in the pressure sensor 10 may be provided as the flexible layer.
  • the touch display device may also be an in-cell touch display device.
  • the touch display device 1000 may further include a flexible substrate 700 disposed opposite to the carrier substrate 20.
  • the flexible substrate 700 and the carrier substrate 20 and a structure therebetween may form a display panel, for example,
  • the display panel can be an OLED (Organic Light Emitting Diode) display panel or an LED (Light Emitting Diode) display panel, and the like.
  • the touch panel 100 includes a pressure sensor 10 disposed between the carrier substrate 20 and the flexible substrate 700.
  • the flexible substrate 700 is bent under the contact pressure, so that the elastic layer of the pressure sensor 10 is deformed accordingly.
  • the touch display device 1000 may further include a plurality of pixel units 200 and a plurality of transistors 300 (FIG. 6a to FIG. 6c) located in the display panel. Three pixel units 200 and three transistors 300) are shown. The plurality of pixel units 200 are for displaying an image. The plurality of transistors 300 are respectively connected to the plurality of pixel units 200 (as shown in FIGS.
  • each transistor 300 is connected to one pixel unit 200) to respectively control the operating states of the plurality of pixel units 200; each transistor Each of 300 includes a gate 310, a source 321 and a drain 322, each transistor 300 being connected to a corresponding pixel unit 200 through its drain 322.
  • each of the pixel units 200 may include a light emitting device, such as an OLED device or an LED device.
  • the touch display device 1000 may be actively illuminated by an OLED touch display device or an LED touch display device.
  • the touch display device; for example, each of the pixel units 200 may also include a pixel electrode.
  • the touch display device 1000 may be a touch liquid crystal display device.
  • the touch display device 1000 may further include a plurality of data lines 400 spaced apart from each other and a plurality of gate lines 500 spaced apart from each other, for example, At a position where the data line 400 intersects the gate line 500, an insulating layer may be disposed between the film layer where the data line 400 is located and the film layer where the gate line 500 is located, so that the data line 400 and the gate line 500 are spaced apart from each other.
  • the gates 310 of the plurality of transistors 300 are respectively connected to the gate lines 500 (as shown, the gates 310 of each transistor 300 are connected to a gate line 500), and each gate line 500 is used.
  • Each data line 400 is used to provide a data voltage for each column of transistors 300 connected thereto.
  • the first signal line 31 connected to the gate 16 of the pressure sensor 10, the second signal line 32 connected to the source 14a, and the third signal line 33 connected to the drain 14b may both be connected to the gate line 500.
  • the data lines 400 are spaced apart.
  • the interval setting in the embodiment of the present invention may refer to a spacing between a plurality of structures located in the same film layer (for example, between gate lines, between data lines, between the same type of signal lines), or may be respectively referred to as
  • the structures located in the different film layers are spaced apart from each other by the insulating layer at positions where the structures intersect (for example, between the gate lines and the data lines, between the respective signal lines and the gate lines or the data lines).
  • the first signal line 31 may be substantially parallel to the gate line 500.
  • the two signal lines 31 may be disposed in the same layer; for example, between the film layer where the first signal line 31 and the gate line 500 are located and the film layer where the data line 400 is located.
  • An insulating layer is provided to space the first signal line 31 from the data line 400.
  • both the second signal line 32 and the third signal line 33 may be substantially parallel to the data line 400, for example, the three may be disposed in the same layer.
  • the touch display device provided in this embodiment includes, but is not limited to, these modes.
  • the display driving process and the touch driving process of the touch display device 1000 do not interfere with each other, so the display function and the touch function can be At the same time, it can also be realized in time.
  • the embodiment shown in FIG. 6a can be used for an On cell touch display device or an In cell touch display device.
  • the gate 16 of the pressure sensor 10 and the gate 310 of the transistor 300 may also be connected to the same gate line 500 (ie, connected to the same first signal line 31).
  • the data line 400 and the second signal line 32 may be spaced apart from each other (for example, the data line 400 and the second signal line 32 may be disposed in the same layer or respectively disposed in different film layers), and the source 321 of the plurality of transistors 300
  • the data lines 400 may be separately connected, and the gates 310 of the plurality of transistors 300 may be respectively connected to the first signal lines 31.
  • the source 14a of the pressure sensor 10 and the transistor The source 321 of 300 can also be connected to the same data line 400 (ie, connected to the same second signal line 32).
  • the gate line 500 and the first signal line 31 may be spaced apart from each other (for example, the gate line 500 and the first signal line 31 may be disposed in the same layer or respectively disposed in different film layers), and the gate 310 of the plurality of transistors 300
  • the gate lines 500 may be respectively connected, and the sources 321 of the plurality of transistors 300 may be connected to the second signal lines 32, respectively.
  • the touch function and the display function can be realized in a time-sharing manner.
  • the gate line 500 applies a gate scan signal to the transistor 300 connected thereto, and the data line 400 applies a data voltage to the corresponding transistor 300, and the pressure sensor 10 in the pixel in which the transistor 300 is located is turned off (ie, Inactive state); in the touch period, in the same pixel, the transistor 300 is in a closed state, the first signal line 31 applies a gate scan signal to the gate 16 of the pressure sensor 10 connected thereto and the data line 400 is connected to the pressure connected thereto
  • the sensor 10 applies a source voltage to turn the pressure sensor 10 on, so that the output current of the pressure sensor 10 is output through the third signal line 33, and the change in the touch pressure can be determined according to the magnitude of the output current.
  • Both the embodiments shown in Figures 6b and 6c can reduce the number of signal lines and can be used in an in-cell touch display device.
  • each of the pressure sensors 10 may correspond to one pixel unit 200; or, adjacent pressure sensors 10 may be spaced apart from each other by at least one pixel unit as long as the touch requirements are met.
  • one pixel unit 200 is disposed between adjacent pressure sensors 10.

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Abstract

一种压力传感器(10)、触控基板(100)和触控显示装置，该压力传感器(10)包括：有源层(13)；栅极(16)，其与所述有源层(13)层叠设置并且与所述有源层(13)相绝缘；弹性层(15)，其在垂直于所述有源层(13)的方向上设置于所述有源层(13)与所述栅极(16)之间并且其厚度在所述压力传感器(10)被施加压力的情况下减小；以及源极(14a)和漏极(14b)，其彼此间隔设置并且都与所述有源层(13)电连接。

Description

压力传感器、触控基板和触控显示装置 技术领域
本发明的实施例涉及一种压力传感器、触控基板和触控显示装置。
背景技术
内嵌式(In Cell)触控显示装置和覆盖表面式(On Cell)触控显示装置是两种常见的触控显示装置。内嵌式触控显示装置的触摸感应结构设置于显示面板之内，覆盖表面式触控显示装置的触摸感应结构设置于显示面板之外并且设置于显示面板所包括的一个基板上。
目前，触控显示装置中的触摸感应结构通常是通过在基板上形成一层或两层导电薄膜并对该一层或两层导电薄膜进行图案化处理得到的。
发明内容
本发明的实施例提供一种压力传感器、触控基板和触控显示装置。
本发明的至少一个实施例提供一种压力传感器，所述压力传感器包括：有源层；栅极，其与所述有源层层叠设置并且与所述有源层相绝缘；弹性层，其在垂直于所述有源层的方向上设置于所述有源层与所述栅极之间；以及源极和漏极，其彼此间隔设置并且都与所述有源层电连接。在所述压力传感器被施加压力的情况下，所述弹性层的厚度减小。
例如，在所述压力传感器被施加压力的位置处，所述弹性层的厚度变化百分比至少约为5％。
例如，所述弹性层在所述压力传感器未被施加压力的情况下的厚度为约0.5微米-5微米。
例如，所述弹性层的杨氏模量为约0.1MPa～10MPa。
例如，所述弹性层的材料包括橡胶、聚氨酯、聚丙烯、聚甲醛中的至少一种或几种。
例如，所述栅极在所述弹性层上的正投影大致位于所述弹性层之内。
例如，所述有源层在所述弹性层上的正投影大致位于所述弹性层之内。
例如，在所述垂直于有源层的方向上，所述栅极和所述有源层中的至少一个与所述弹性层之间设置有层间绝缘层。
例如，所述压力传感器还包括承载所述有源层、弹性层、栅极、源极和漏极的基板，所述弹性层设置于所述有源层的远离所述基板的一侧。
本发明的至少一个实施例还提供一种触控基板，所述触控基板包括：承载基板；多个以上任一项所述的压力传感器，其设置于所述承载基板上且彼此间隔设置；多条彼此间隔设置的第一信号线，其设置于所述承载基板上且分别与所述多个压力传感器的栅极电连接；多条彼此间隔设置的第二信号线，其设置于所述承载基板上、分别与所述多条第一信号线相交且分别与所述多个压力传感器的源极电连接；以及多条彼此间隔设置的第三信号线，其设置于所述承载基板上、与所述第一信号线和所述第二信号线间隔设置，并且分别与所述多个压力传感器的漏极电连接。
例如，所述多条第三信号线平行于所述多条第二信号线。
例如，在垂直于所述承载基板的方向上，每个压力传感器的弹性层与和所述压力传感器相邻的第二信号线、以及和所述压力传感器相邻的第三信号线中的至少一个交叠。
本发明的至少一个实施例还提供一种触控显示装置，所述触控显示装置包括以上任一项所述的触控基板。
例如，所述触控显示装置还包括多个像素单元以及多个晶体管，所述多个晶体管分别与所述多个像素单元连接。
例如，所述触控显示装置还包括：多条彼此间隔设置的数据线，其设置于所述触控基板包括的承载基板上且与所述第一信号线、第二信号线和第三信号线间隔设置。所述多个晶体管的源极分别连接所述数据线，并且所述多个晶体管的栅极分别连接所述第一信号线。
例如，所述触控显示装置还包括：多条彼此间隔设置的栅线，其设置于所述触控基板包括的承载基板上且与所述第一信号线、第二信号线和第三信号线间隔设置。所述多个晶体管的栅极分别连接所述栅线，并且所述多个晶体管的源极分别连接所述第二信号线。
例如，所述触控显示装置还包括多条彼此间隔设置的数据线和多条彼此间隔设置的栅线，所述数据线和所述栅线都设置于所述触控基板包括的承载 基板上且与所述第一信号线、第二信号线和第三信号线间隔设置，所述多个晶体管的栅极分别连接所述栅线，并且所述多个晶体管的源极分别连接所述数据线。
例如，所述触控显示装置还包括与所述触控基板包括的承载基板相对设置的柔性基板，所述触控基板包括的压力传感器设置于所述承载基板和所述柔性基板之间。
例如，所述触控显示装置还包括显示面板，所述显示面板包括彼此相对设置的第一基板和第二基板，所述触控基板包括的压力传感器设置于所述第一基板的远离所述第二基板的一侧。
本发明实施例提供一种压力传感器、触控基板和触控显示装置。在本发明实施例中，在薄膜晶体管的栅极和有源层之间设置有压力弹性层以形成压力传感器，该压力弹性层的厚度在薄膜晶体管被触摸时减小，从而压力信号的变化可以被转变为该薄膜晶体管输出信号的变化，通过对该薄膜晶体管的输出信号进行检测，可以确定触摸压力的大小和/或触摸位置。
附图说明
为了更清楚地说明本发明实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例，而非对本发明的限制。
图1为本发明实施例提供的压力传感器的剖视示意图；
图2为本发明另一实施例提供的压力传感器的剖视示意图；
图3为本发明再一实施例提供的压力传感器的剖视示意图；
图4a和图4b分别为本发明实施例提供的触控基板的俯视示意图；
图5a和图5b分别为本发明实施例提供的触控显示装置的局部剖视示意图；
图6a至图6c分别为本发明实施例提供的触控显示装置的俯视示意图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例的附图，对本发明实施例的技术方案进行清楚、完整地描述。显然， 所描述的实施例是本发明的一部分实施例，而不是全部的实施例。基于所描述的本发明的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。
除非另外定义，本公开使用的技术术语或者科学术语应当为本发明所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系，当被描述对象的绝对位置改变后，则该相对位置关系也可能相应地改变。
本发明实施例提供一种压力传感器、触控基板和触控显示装置。在本发明实施例中，在薄膜晶体管的栅极和有源层之间设置有压力弹性层以形成压力传感器，该压力弹性层的厚度在薄膜晶体管被触摸时减小，从而压力信号的变化可以被转变为该薄膜晶体管输出信号的变化，通过对该薄膜晶体管的输出信号进行检测，可以确定触摸压力的大小和/或触摸位置。
下面结合附图对本发明实施例提供的压力传感器、触控基板和触控显示装置进行详细说明。附图中各层薄膜厚度和形状不反映真实比例，目的只是示意说明本发明实施例的内容。
如图1所示，本发明的至少一个实施例提供一种压力传感器10(其例如为薄膜晶体管)，该压力传感器10包括有源层13、源极14a、漏极14b、弹性层15和栅极16。源极14a和漏极14b彼此间隔设置并且都与有源层13电连接。栅极16与有源层13层叠设置并且与有源层13相绝缘。弹性层15在垂直于有源层13的方向上设置于有源层13与栅极16之间，例如，弹性层15可以为弹性绝缘层，以使栅极16和有源层13通过该弹性层15彼此绝缘；并且，弹性层15被配置为在压力传感器10被施加压力的情况下发生形变，即弹性层15的厚度在压力传感器10被施加压力的位置处减小，从而根据弹性层15的厚度减小情况，可以判断出压力传感器10是否被施加压力以及被施加压力的大小。
例如，压力传感器10还可以包括承载有源层13、弹性层15、栅极16、源极14a和漏极14b的基板11，弹性层15可以设置于有源层13的远离基板11的一侧(如图1中有源层13的上侧所示)。这样，在从基板11的设置有上述结构的一侧(如图1中基板11的上侧所示)对压力传感器10施加压力的情况下，弹性层15距离施力物(例如，手指)更近，从而施力物更容易使弹性层15发生形变。
在弹性层15设置于有源层13的远离基板11的一侧的情况下，压力传感器10为顶栅结构，即栅极16设置于有源层13的远离基板11的一侧。当然，压力传感器10也可以采用底栅结构，即栅极16设置于有源层13与基板11之间。
需要说明的是，在压力传感器10包括上述基板11的情况下，上述垂直于有源层13的方向也为垂直于基板11板面的方向。当然，在基板11上还可以设置有其它结构，例如基板11上还可以设置有位于基板11与有源层13之间的绝缘层12和/或覆盖栅极16、弹性层15和有源层13的绝缘层17。
在本发明实施例中，在压力传感器10被施加压力的情况下，弹性层15的厚度减小，从而压力传感器10的输出电流(即源极14a和漏极14b之间的电流)增大。例如，为了保证弹性层15的形变引起的源、漏极之间电流的变化被可靠地检测到，在压力传感器10被施加压力的位置处，弹性层15的厚度变化百分比可以至少为约5％。
例如，假设弹性层15的原始厚度(即在压力传感器10未被施加压力的情况下的厚度)为d，并且在弹性层15处于原始厚度的情况下，源极14a和漏极14b之间的电流为I。在压力传感器10被施加压力后，弹性层15的厚度减少约5％，从而弹性层15减小之后的厚度为约(1-5％)d；在这种情况下，源、漏极之间的电流增加量接近约5％，例如，增加之后的电流可以为约(1+5.263％)I。在源、漏极之间的电流变化量至少为约5％的情况下，可以可靠地检测到该电流的变化情况。
例如，弹性层15在压力传感器10未被施加压力的情况下的厚度可以为约0.5微米至5微米。该厚度范围有利于检测压力传感器10的输出信号的变化。这是因为，如果弹性层15太厚，则可能需要对栅极16施加较高的电压；而如果弹性层15太薄，则弹性层15发生的形变可能不太明显。
例如，弹性层15的材料的杨氏模量可以为约0.1MPa～10MPa。杨氏模量是表征在弹性限度内材料抗拉或抗压能力的物理量。如果弹性层15的杨氏模量低于约0.1MPa，则可能需要较大的压力才能使弹性层15产生形变；若杨氏模量大于约10MPa，则说明弹性层15太软，这可能降低压力传感器10的电极(例如栅极16)的耐用性。
例如，弹性层15可以具有复位性，在压力传感器10被施加的外力消失的情况下，弹性层15可以自动复位。例如，弹性层15可以采用高分子弹性材料制作，例如，弹性层15的材料可以包括橡胶、聚氨酯、聚丙烯、聚甲醛中的至少一种或几种。
在本发明实施例中，弹性层15的面积大小可变，只要满足弹性层15设置在栅极16和有源层13之间且可用于可靠地检测到触摸压力即可。
例如，如图1所示，栅极16在弹性层15上的正投影可以大致位于弹性层15之内。通过将弹性层15设置得较大，可以使栅极16受到的压力很好地传递到弹性层15，从而有利于保证压力传感器10对压力的敏感度。
需要说明的是，如图1所示，弹性层15可以覆盖全部源极14a和漏极14b；或者，如图2所示，弹性层15也可以覆盖部分源极14a和部分漏极14b。
例如，如图1和图2所示，有源层13在弹性层15上的正投影可以大致位于弹性层15之内。这样有利于保证有源层13受力均匀，从而降低有源层13发生断裂的几率。
例如，如图3所示，在垂直于有源层13的方向上，弹性层15与有源层13之间可以设置有层间绝缘层18a，并且弹性层15与栅极16之间可以设置有层间绝缘层18b。当然，层间绝缘层18a和18b也可以只设置一个。通过在有源层13和栅极16中的至少一个与弹性层15之间设置层间绝缘层，有利于保证压力传感器10的性能。例如，在弹性层15因发生较大的形变而变得较薄的情况下，层间绝缘层18a和/或18b可以保证压力传感器10正常工作。
在本发明实施例中，有源层13可以采用本领域常用的例如非晶硅、多晶硅、金属氧化物等半导体材料制作，栅极16、源极14a和漏极14b可以采用本领域常用的例如铝、铝钕合金、铜、钛、钼、钼铌合金等金属材料制作，基板11可以为玻璃基板、石英基板或塑料基板等。
本发明的至少一个实施例还提供一种触控基板100，如图4a所示，该触 控基板100包括承载基板20、多个以上任一实施例提供的压力传感器10、多条第一信号线31、多条第二信号线32以及多条第三信号线33。该多个压力传感器10彼此间隔地设置于承载基板20上；该多条第一信号线31彼此间隔地设置于承载基板20上且分别与该多个压力传感器10的栅极16电连接(即每条第一信号线31与对应的压力传感器10的栅极16电连接，例如可以一体形成)；该多条第二信号线32彼此间隔地设置于承载基板20上、分别与该多条第一信号线31相交(即第二信号线32和第一信号线31的延伸方向相交)且分别与该多个压力传感器10的源极14a电连接(即每条第二信号线32与对应的压力传感器10的源极14a电连接，例如可以一体形成)；该多条第三信号线33彼此间隔地设置于承载基板20上、与第一信号线31和第二信号线32间隔设置并且分别与该多个压力传感器10的漏极14b电连接(即每条第三信号线33与对应的压力传感器10的漏极14b电连接，例如可以一体形成)。
需要说明的是，在第一信号线31与第二信号线32相交的位置处，第一信号线31与第二信号线32之间在垂直于承载基板20的板面的方向上可以设置有绝缘层，以使二者彼此间隔开；类似地，第三信号线33也可以通过绝缘层与第一信号线31(例如，在第三信号线33与第一信号线31相交的情况下，如图4a所示)或第二信号线32间隔开；此外，例如，触控基板100包括的承载基板20与压力传感器10包括的基板11可以为同一基板。
例如，如图4a所示，第一信号线31与第二信号线32相互交叉可以限定多个呈矩阵排列的区域；每个区域中可以设置有压力传感器10，该压力传感器10的栅极16可以与限定该区域的一条第一信号线31电连接，该压力传感器10的源极14a可以与限定该区域的一条第二信号线32电连接，之后将该压力传感器10的漏极14b与一条第三信号线33连接以将该压力传感器10的输出信号引出。当然，本发明实施例提供的触控基板包括但不限于图4a所示的方式。
本发明实施例提供一种利用上述任一实施例提供的压力传感器10作为触摸感应结构的触控基板100，当触摸物(例如用户的手指)触摸触控基板100时，被触摸物施加压力的压力传感器10中的弹性层15发生形变，从而从第三信号线33输出的电流发生变化，根据该电流变化情况，可以判断出触摸位置。例如，可以通过对第一信号线31逐个施加扫描信号，并根据第三信 号线33的电流变化情况，锁定触摸位置。当然，也可以采用其它方式判断出触摸位置。
例如，为简化触控基板的信号线的设置，如图4a所示，上述多条第三信号线33可以大致平行于上述多条第二信号线32。在这种情况下，例如，第三信号线33和第二信号线32可以同层设置，即通过对同一薄膜进行图案化处理形成。
在本发明实施例中，触控基板包括的多个压力传感器10的弹性层15可以彼此间隔设置(如图4a所示)，也可以连续形成。
例如，在垂直于承载基板20的方向上，每个压力传感器10的弹性层15可以与和压力传感器10相邻的第二信号线32、以及和压力传感器10相邻的第三信号线33中的至少一个交叠。例如，如图4b所示，每个压力传感器(图4b中未标出)的弹性层15与相邻的第二信号线32和相邻的第三信号线33都交叠。通过这样的交叠设置，可以适当增大弹性层15的面积，从而有利于根据需要增大整个压力传感器的面积。
本发明的至少一个实施例还提供一种触控显示装置，该触控显示装置包括以上任一实施例提供的触控基板100。下面结合图5a至图6c进行说明。
例如，在本发明的至少一个实施例中，上述触控显示装置可以为覆盖表面式触控显示装置。例如，如图5a所示，本发明的至少一个实施例提供的触控显示装置1000还包括显示面板600，显示面板600可以包括彼此相对设置的第一基板610和第二基板620，第一基板610在触控显示装置1000工作时距离用户更近(与第二基板620相比)且触控基板100包括的压力传感器10设置于第一基板610的远离第二基板620的一侧。例如，第一基板610和第二基板620可以为玻璃基板、石英基板或塑料基板等任意类型的基板。例如，第一基板610与触控基板100包括的承载基板20可以为同一基板。例如，显示面板600可以为液晶面板，在这种情况下，显示面板600还包括液晶层630，如图5a所示。当然，在采用覆盖表面式触控显示装置的情况下，显示面板600也可以为OLED(有机发光二极管)显示面板或LED(发光二极管)显示面板等本领域常用的显示面板。
例如，对于如图5a所示的触控显示装置1000，压力传感器10上还可以覆盖有柔性层(图5a中未示出)，该柔性层可以保护压力传感器10，并且 该柔性层在受到触摸压力后发生弯曲，从而使压力传感器10的弹性层发生形变。例如，该柔性层可以采用有机绝缘材料制作。例如，可以将压力传感器10包括的上述绝缘层17设置为该柔性层。
例如，在本发明的至少一个实施例中，上述触控显示装置也可以为内嵌式触控显示装置。例如，如图5b所示，触控显示装置1000还可以包括与承载基板20相对设置的柔性基板700，柔性基板700与承载基板20以及位于二者之间的结构可以形成显示面板，例如，该显示面板可以为OLED(有机发光二极管)显示面板或LED(发光二极管)显示面板等本领域常用的显示面板；触控基板100包括的压力传感器10设置于承载基板20和柔性基板700之间。柔性基板700在受到触摸压力的情况下发生弯曲，从而使压力传感器10的弹性层发生相应的形变。
例如，如图6a至图6c所示，本发明的至少一个实施例提供的触控显示装置1000还可以包括位于上述显示面板中的多个像素单元200以及多个晶体管300(图6a至图6c中都示出了3个像素单元200和3个晶体管300)。该多个像素单元200用于显示图像。该多个晶体管300分别与该多个像素单元200连接(如图6a至图6c所示，每个晶体管300连接一个像素单元200)以分别控制该多个像素单元200的工作状态；每个晶体管300都包括栅极310、源极321和漏极322，每个晶体管300通过其漏极322连接对应的像素单元200。
例如，每个像素单元200可以包括发光器件，例如OLED器件或LED器件等，在这种情况下，例如，触控显示装置1000可以为OLED触控显示装置或LED触控显示装置等主动发光的触控显示装置；例如，每个像素单元200也可以包括像素电极，在这种情况下，例如，触控显示装置1000可以为触控液晶显示装置。
例如，如图6a至图6c所示，本发明的至少一个实施例提供的触控显示装置1000还可以包括多条彼此间隔设置的数据线400和多条彼此间隔设置的栅线500，例如，在数据线400与栅线500相交叉的位置处，数据线400所在的膜层与栅线500所在的膜层之间可以设置有绝缘层，以使数据线400与栅线500彼此间隔开。上述多个晶体管300的栅极310分别连接栅线500(如图所示，每个晶体管300的栅极310连接一条栅线500)，每条栅线500用 于为与其连接的每行晶体管300提供栅扫描信号；并且该多个晶体管300的源极321分别连接数据线400(如图所示，每个晶体管300的源极321连接一条数据线400)，每条数据线400用于为与其连接的每列晶体管300提供数据电压。
例如，如图6a所示，压力传感器10的栅极16连接的第一信号线31、源极14a连接的第二信号线32和漏极14b连接的第三信号线33可以都与栅线500、数据线400间隔设置。本发明实施例中的间隔设置，既可以指位于同一膜层中的多个结构之间的彼此间隔(例如栅线之间、数据线之间、同种信号线之间)，也可以指分别位于不同膜层中的结构之间在这些结构相交的位置处通过绝缘层实现的彼此间隔(例如栅线与数据线之间、各信号线与栅线或数据线之间)。例如，第一信号线31可以与栅线500大致平行，例如，二者可以同层设置；例如，第一信号线31和栅线500所在的膜层与数据线400所在的膜层之间可以设置有绝缘层，以将第一信号线31与数据线400间隔开。例如，第二信号线32和第三信号线33都可以与数据线400大致平行，例如，三者可以同层设置。当然，本实施例提供的触控显示装置包括但不限于这些方式。
通过将第一、二、三信号线都设置为与栅线和数据线间隔开，使得触控显示装置1000的显示驱动过程和触控驱动过程不会相互干扰，因此显示功能和触控功能可以同时实现，也可以分时实现。并且，图6a所示的实施例可以用于覆盖表面式(On cell)触控显示装置，也可以用于内嵌式(In cell)触控显示装置。
例如，如图6b所示，在同一行中，压力传感器10的栅极16与晶体管300的栅极310也可以连接同一条栅线500(即连接同一条第一信号线31)。另外，数据线400与第二信号线32可以彼此间隔设置(例如数据线400与第二信号线32可以同层设置或者分别设置在不同的膜层中)，上述多个晶体管300的源极321可以分别连接数据线400，并且该多个晶体管300的栅极310可以分别连接第一信号线31。这样，对每条第一信号线31施加栅扫描信号时，与该第一信号线31连接的压力传感器10和晶体管300可以同时工作，从而可以同时实现触控功能和显示功能。
例如，如图6c所示，在同一列中，压力传感器10的源极14a与晶体管 300的源极321也可以连接同一条数据线400(即连接同一条第二信号线32)。另外，栅线500与第一信号线31可以彼此间隔设置(例如栅线500与第一信号线31可以同层设置或者分别设置在不同的膜层中)，上述多个晶体管300的栅极310可以分别连接栅线500，并且该多个晶体管300的源极321可以分别连接第二信号线32。在这种情况下，触控功能和显示功能可分时实现。也就是说，在显示时段，栅线500对与其连接的晶体管300施加栅扫描信号，数据线400对相应的晶体管300施加数据电压，在该晶体管300所在像素内的压力传感器10为关闭状态(即不工作状态)；在触控时段，在同一像素内，晶体管300为关闭状态，第一信号线31对与其连接的压力传感器10的栅极16施加栅扫描信号并且数据线400对与其连接的压力传感器10施加源极电压以使压力传感器10为开启状态，从而压力传感器10的输出电流通过第三信号线33输出，根据该输出电流的大小可以确定触控压力的变化。
图6b和图6c所示的实施例都可以减少信号线的数量，并且都可以用于内嵌式触控显示装置中。
在本发明的实施例中，每个压力传感器10可以对应一个像素单元200；或者，相邻的压力传感器10之间也可以间隔至少一个像素单元，只要能满足触控要求即可。例如，如图6a至6c所示，相邻的压力传感器10之间间隔设置有一个像素单元200。
在不冲突的情况下，本发明的实施例及实施例中的特征可以相互组合。
以上所述仅是本发明的示范性实施方式，而非用于限制本发明的保护范围，本发明的保护范围由所附的权利要求确定。
本申请要求于2016年6月3日递交的第201610390259.0号中国专利申请的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。

Claims (19)

  1. 一种压力传感器，包括：
    有源层；
    栅极，其与所述有源层层叠设置并且与所述有源层相绝缘；
    弹性层，其在垂直于所述有源层的方向上设置于所述有源层与所述栅极之间；以及
    源极和漏极，其彼此间隔设置并且都与所述有源层电连接，
    其中，在所述压力传感器被施加压力的情况下，所述弹性层的厚度减小。
  2. 根据权利要求1所述的压力传感器，其中，在所述压力传感器被施加压力的位置处，所述弹性层的厚度变化百分比至少为约5％。
  3. 根据权利要求1所述的压力传感器，其中，所述弹性层在所述压力传感器未被施加压力的情况下的厚度为约0.5微米-5微米。
  4. 根据权利要求1所述的压力传感器，其中，所述弹性层的杨氏模量为约0.1MPa～10MPa。
  5. 根据权利要求1所述的压力传感器，其中，所述弹性层的材料包括橡胶、聚氨酯、聚丙烯、聚甲醛中的至少一种或几种。
  6. 根据权利要求1至5中任一项所述的压力传感器，其中，所述栅极在所述弹性层上的正投影大致位于所述弹性层之内。
  7. 根据权利要求1至5中任一项所述的压力传感器，其中，所述有源层在所述弹性层上的正投影大致位于所述弹性层之内。
  8. 根据权利要求1至5中任一项所述的压力传感器，其中，在所述垂直于有源层的方向上，所述栅极和所述有源层中的至少一个与所述弹性层之间设置有层间绝缘层。
  9. 根据权利要求1至5中任一项所述的压力传感器，还包括承载所述有源层、弹性层、栅极、源极和漏极的基板，其中，所述弹性层设置于所述有源层的远离所述基板的一侧。
  10. 一种触控基板，包括：
    承载基板；
    多个权利要求1至9中任一项所述的压力传感器，其设置于所述承载基 板上且彼此间隔设置；
    多条彼此间隔设置的第一信号线，其设置于所述承载基板上且分别与所述多个压力传感器的栅极电连接；
    多条彼此间隔设置的第二信号线，其设置于所述承载基板上、分别与所述多条第一信号线相交且分别与所述多个压力传感器的源极电连接；以及
    多条彼此间隔设置的第三信号线，其设置于所述承载基板上、与所述第一信号线和所述第二信号线间隔设置，并且分别与所述多个压力传感器的漏极电连接。
  11. 根据权利要求10所述的触控基板，其中，所述多条第三信号线平行于所述多条第二信号线。
  12. 根据权利要求10或11所述的触控基板，其中，在垂直于所述承载基板的方向上，每个压力传感器的弹性层与和所述压力传感器相邻的第二信号线、以及和所述压力传感器相邻的第三信号线中的至少一个交叠。
  13. 一种触控显示装置，包括权利要求10至12中任一项所述的触控基板。
  14. 根据权利要求13所述的触控显示装置，还包括多个像素单元以及多个晶体管，其中，所述多个晶体管分别与所述多个像素单元连接。
  15. 根据权利要求14所述的触控显示装置，还包括：
    多条彼此间隔设置的数据线，其设置于所述触控基板包括的承载基板上且与所述第一信号线、第二信号线和第三信号线间隔设置，
    其中，所述多个晶体管的源极分别连接所述数据线，并且所述多个晶体管的栅极分别连接所述第一信号线。
  16. 根据权利要求14所述的触控显示装置，还包括：
    多条彼此间隔设置的栅线，其设置于所述触控基板包括的承载基板上且与所述第一信号线、第二信号线和第三信号线间隔设置，
    其中，所述多个晶体管的栅极分别连接所述栅线，并且所述多个晶体管的源极分别连接所述第二信号线。
  17. 根据权利要求14所述的触控显示装置，还包括多条彼此间隔设置的数据线和多条彼此间隔设置的栅线，其中，
    所述数据线和所述栅线都设置于所述触控基板包括的承载基板上且与所 述第一信号线、第二信号线和第三信号线间隔设置，
    所述多个晶体管的栅极分别连接所述栅线，并且所述多个晶体管的源极分别连接所述数据线。
  18. 根据权利要求13至17中任一项所述的触控显示装置，还包括与所述触控基板包括的承载基板相对设置的柔性基板，其中，所述触控基板包括的压力传感器设置于所述承载基板和所述柔性基板之间。
  19. 根据权利要求13或14或17所述的触控显示装置，还包括显示面板，其中，所述显示面板包括彼此相对设置的第一基板和第二基板，所述触控基板包括的压力传感器设置于所述第一基板的远离所述第二基板的一侧。
PCT/CN2017/074753 2016-06-03 2017-02-24 压力传感器、触控基板和触控显示装置 Ceased WO2017206559A1 (zh)

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