WO2019030121A1 - Appareil de mesure pour la mesure de la pression d'un milieu dans un récipient et cellule de mesure capacitive de pression - Google Patents

Appareil de mesure pour la mesure de la pression d'un milieu dans un récipient et cellule de mesure capacitive de pression Download PDF

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Publication number
WO2019030121A1
WO2019030121A1 PCT/EP2018/071051 EP2018071051W WO2019030121A1 WO 2019030121 A1 WO2019030121 A1 WO 2019030121A1 EP 2018071051 W EP2018071051 W EP 2018071051W WO 2019030121 A1 WO2019030121 A1 WO 2019030121A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
pressure
diaphragm
medium
process connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2018/071051
Other languages
German (de)
English (en)
Inventor
Hans-Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IFM Electronic GmbH
Original Assignee
IFM Electronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IFM Electronic GmbH filed Critical IFM Electronic GmbH
Publication of WO2019030121A1 publication Critical patent/WO2019030121A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Definitions

  • Measuring device for measuring the pressure of a medium in a container and capacitive pressure measuring cell
  • the invention relates to a measuring device for measuring the pressure of a medium in a container according to the preamble of claim 1 and a capacitive pressure measuring cell for detecting the pressure of a to the pressure measuring cell
  • Capacitive pressure gauges or pressure sensors are available in many
  • Typical measuring cells consist of a compact unit with a ceramic base body and a membrane, wherein an annular joint, typically a glass solder ring, is arranged between the base body and the membrane.
  • Cavity between the body and membrane allows the longitudinal mobility of the membrane due to a pressure influence.
  • On the underside of the membrane and on the opposite upper side of the main body electrodes are provided, which together form a measuring capacitor. By pressure, it comes to a deformation of the membrane, which is a
  • the evaluation unit records the capacitance change and converts it into a pressure reading.
  • PLC higher-level control units
  • the capacitive pressure measuring cell in the process connection is usually clamped axially between a medially arranged annular sealing element, which rests on the membrane-side end face of the measuring cell and has substantially the same diameter as the glass solder ring, and a support element - often in the form of a screw-in support ring - clamped, whereby the remote from the membrane end face of the body is axially supported.
  • a medially arranged annular sealing element which rests on the membrane-side end face of the measuring cell and has substantially the same diameter as the glass solder ring, and a support element - often in the form of a screw-in support ring - clamped, whereby the remote from the membrane end face of the body is axially supported.
  • a screw-in support ring shows the German
  • Patent DE 44 16 978 It is important that the sealing element, the
  • the object of the invention is to make a particularly overload resistant pressure gauge of the type mentioned small and compact.
  • the essence of the invention is to achieve a reduction of the area on which the medium pressure acts.
  • F px A
  • the resulting force which is reduced by the weld joint with which the disk or shaped support element because of the small and compact design with the
  • the deflectable measuring membrane on its side facing the medium to be measured on an annular projection which engages around a nozzle-like, extending into the interior of the process connection extension of the channel.
  • This extension is part of the pressure channel through which the medium to be measured reaches the diaphragm of the pressure measuring cell.
  • the arcuate section can be provided both with a constant and with a variable radius, e.g. be executed elliptical.
  • socket-like extension has a circumferential groove, which is intended to at least partially receive the sealing element, which is preferably designed as an O-ring, and thus constitutes one of the two sealing surfaces. That's it
  • Sealing element fixed axially and has a defined position.
  • Pressure gauge is proposed according to a second aspect of the invention, a capacitive pressure measuring cell, wherein the measuring diaphragm in two concentric arranged areas is divided. In these concentric regions, the membrane has such a different thickness that it is deflectable only in the thinner middle region and not in the thicker outer region.
  • the pressure measuring cell is suitable for being axially fixed by means of a welded-in disk or U-shaped support element and thus to be usable in a small and compact measuring device even at short high pressure peaks.
  • the width of the thicker outer region corresponds approximately to the width of the glass solder ring.
  • FIG. 1 shows a particularly overload-resistant pressure measuring device according to the invention with a small and compact design
  • Figure 2 is a sectional view through the process connection of the invention
  • FIG. 3 shows an illustration of a process connection
  • FIG. 1 shows a pressure measuring device 1 according to the invention, which essentially consists of a metallic, rotationally symmetrical design
  • Process connection 3 includes a capacitive pressure measuring cell 10 as
  • the housing 2 comprises evaluation electronics (not shown) in order to evaluate the measurement signal generated by the pressure measuring cell 10 and to display it in a display device integrated in the housing 2 (if present) and / or to have it processed by a downstream control unit.
  • evaluation electronics not shown
  • a display device integrated in the housing 2 if present
  • a so-called. Compact device is shown, which is characterized by a very small and compact design and therefore does not have its own display device.
  • the measuring device 1 has a plug connection 4 at an end opposite the process connection 3.
  • the measuring device 1 is connected to a power supply and / or to a data processing unit or control unit which receives and evaluates the measuring signals.
  • FIG. 2 shows a sectional view through the process connection 3 of the pressure measuring device 1 according to the invention.
  • the focus here is the capacitive
  • Pressure measuring cell 10 which consists of a ceramic measuring membrane 1 1, whose first side is at least partially in contact with the medium and facing away from the medium second side of a measuring electrode 14, and one of the second side of the measuring membrane 1 1 oppositely arranged ceramic cylindrical base body 12th is formed with at least one a measuring capacitance with the measuring electrode 14 forming counter electrode 15.
  • the measuring membrane 1 1 is by means of an annular joint 13 in the form of a glass solder with the
  • Base body 3 is connected and thus forms one for the deflection of the
  • Measuring diaphragm 1 1 necessary measuring chamber.
  • the pressure measuring cell 10 is arranged directly above the pressure channel 5, via which the medium to be measured reaches the measuring membrane 11.
  • the pressure channel 5 in this case has a nozzle-like in the direction of the measuring cell 10, in the
  • the special feature of the capacitive pressure measuring cell 10 is that the measuring diaphragm 1 1 is divided into two concentrically arranged portions 1 1 a, 1 1 b, in which it has a different thickness. As a result, the measuring diaphragm 1 1 is deflected only in the thinner middle region 1 1 b and in the thicker outer region 1 1 a, however, not. Due to the significantly different thicknesses of the measuring membrane 1 1, the thicker outer region 1 1 a can also be regarded as a ring-shaped approach. The thicker outer region 1 1 a has approximately the same
  • Diameter like the glass solder ring 13 Diameter like the glass solder ring 13.
  • the measuring membrane 1 1 Due to the special design of the measuring membrane 1 1 it surrounds the nozzle-like extension 5a of the pressure channel 5 and thus forms a
  • Pressure measuring chamber 6, which is sealed by a sealing element 7, preferably designed as an O-ring.
  • the diameter of the sealing element 7 is smaller than the glass solder ring 13, so that the sealing surfaces 8a, 8b of this sealing element 7, in contrast to conventional capacitive pressure measuring cells or
  • Pressure measuring devices are now arranged parallel to the axis of symmetry S of the process connection 3.
  • An advantage of this embodiment is u.a. also in that a self-reinforcing effect results. Because when the pressure measuring chamber 6 is filled with a medium, the sealing element 7 is pressed by the applied pressure to the sealing surfaces 8a, 8b, whereby the sealing effect is further improved.
  • a peripheral groove is provided on the outside of the nozzle-like extension 5a. This groove thus represents at the same time one of the two sealing surfaces 8b.
  • a disk-shaped support element 16 is arranged, which is laterally welded to the inner wall of the process connection 3 16a.
  • Pressure gauges smaller attack surface of the medium to be measured on the measuring diaphragm 1 1 in the pressure measuring chamber 6 acts on the weld a significantly lower force, so that their load limit is not exceeded.
  • the pressure measuring cell 10 As a result, it is now possible with the pressure measuring cell 10 according to the invention to produce a pressure gauge with a nominal pressure of 100 bar and an overload resistance in the range of 300 bar, which has a smallest possible and very compact design starting from the dimensions of the pressure measuring cell 10.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un appareil de mesure pour la mesure de la pression d'un milieu dans un récipient, présentant une cellule de mesure capacitive de pression (10) et un raccord de procédé (3) métallique, conçu de manière symétrique en rotation, la cellule de mesure de pression (10) présentant une membrane de mesure céramique (11) déformable, dont la première face est au moins partiellement en contact avec le milieu et dont la deuxième face opposée au milieu présente une électrode de mesure (14), et un corps de base (12) cylindrique, céramique, disposé à l'opposé de la deuxième face de la membrane de mesure (11) et pourvu d'au moins une contre-électrode (15) formant une capacité de mesure avec l'électrode de mesure (14). La membrane de mesure (11) est reliée au moyen d'un site de jonction annulaire (13) au corps de base (3) tout en formant une chambre de mesure. La cellule de mesure de pression (10) est fixée dans la zone interne du raccord de procédé (3). La membrane de mesure (11) et une section de paroi interne du raccord de procédé (3) ferment de manière étanche à la pression, au moyen d'un élément d'étanchéité (7), une chambre de mesure de pression (6) annulaire, reliée via un canal (5) au récipient, raison pour laquelle deux surfaces d'étanchéité (8a, 8b) opposées sont disposées au niveau de la membrane de mesure (2) et au niveau de la section de paroi interne. Selon l'invention, la membrane de mesure déformable (11) présente au niveau de sa première face un embout annulaire (11a) qui enserre un prolongement (5a) du canal (5) en forme de tubulure, pénétrant dans la chambre interne, et les surfaces d'étanchéité (8a, 8b) sont agencées parallèlement à l'axe de symétrie (S) du raccord de procédé (3). L'invention concerne également une cellule de mesure de pression correspondante.
PCT/EP2018/071051 2017-08-09 2018-08-02 Appareil de mesure pour la mesure de la pression d'un milieu dans un récipient et cellule de mesure capacitive de pression Ceased WO2019030121A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017213894.7A DE102017213894A1 (de) 2017-08-09 2017-08-09 Messgerät zur Messung des Drucks eines Mediums in einem Behältnis und kapazitive Druckmesszelle
DE102017213894.7 2017-08-09

Publications (1)

Publication Number Publication Date
WO2019030121A1 true WO2019030121A1 (fr) 2019-02-14

Family

ID=63143127

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/071051 Ceased WO2019030121A1 (fr) 2017-08-09 2018-08-02 Appareil de mesure pour la mesure de la pression d'un milieu dans un récipient et cellule de mesure capacitive de pression

Country Status (2)

Country Link
DE (1) DE102017213894A1 (fr)
WO (1) WO2019030121A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11346698B2 (en) * 2019-06-21 2022-05-31 Sporian Microsystems, Inc. Compact pressure and flow sensors for very high temperature and corrosive fluids
CN116380187A (zh) * 2023-04-13 2023-07-04 西南石油大学 一种可实时确定流体体积和压力的高温高压中间容器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4416978A1 (de) 1994-05-13 1995-11-16 Ifm Electronic Gmbh Druckmeßgerät
DE19628551A1 (de) 1995-08-04 1997-02-20 Ifm Electronic Gmbh Druckmeßgerät und Druckmeßanordnung
EP1016573A2 (fr) * 1998-12-28 2000-07-05 Kelsey-Hayes Company Capteur de pression intégré dans une unité de commande électro-hydraulique
DE10133066A1 (de) * 2001-07-07 2003-01-16 Endress & Hauser Gmbh & Co Kg Druckmeßzelle
DE102013213857A1 (de) 2013-04-18 2014-10-23 Ifm Electronic Gmbh Drucksensor
EP3002572A2 (fr) * 2014-09-30 2016-04-06 Nagano Keiki Co., Ltd. Dispositif de mesure de quantité physique

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10065390A1 (de) * 2000-10-09 2002-04-11 Bernhard Trier Drucksensor sowie Verfahren zur Herstellung dieses Drucksensors
DE102011088044A1 (de) * 2011-12-08 2013-06-13 Robert Bosch Gmbh Drucksensoranordnung zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4416978A1 (de) 1994-05-13 1995-11-16 Ifm Electronic Gmbh Druckmeßgerät
DE19628551A1 (de) 1995-08-04 1997-02-20 Ifm Electronic Gmbh Druckmeßgerät und Druckmeßanordnung
EP1016573A2 (fr) * 1998-12-28 2000-07-05 Kelsey-Hayes Company Capteur de pression intégré dans une unité de commande électro-hydraulique
DE10133066A1 (de) * 2001-07-07 2003-01-16 Endress & Hauser Gmbh & Co Kg Druckmeßzelle
DE102013213857A1 (de) 2013-04-18 2014-10-23 Ifm Electronic Gmbh Drucksensor
EP3002572A2 (fr) * 2014-09-30 2016-04-06 Nagano Keiki Co., Ltd. Dispositif de mesure de quantité physique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11346698B2 (en) * 2019-06-21 2022-05-31 Sporian Microsystems, Inc. Compact pressure and flow sensors for very high temperature and corrosive fluids
CN116380187A (zh) * 2023-04-13 2023-07-04 西南石油大学 一种可实时确定流体体积和压力的高温高压中间容器

Also Published As

Publication number Publication date
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