WO2019123700A1 - Procédé et dispositif d'inspection de film, et procédé de formation de film - Google Patents

Procédé et dispositif d'inspection de film, et procédé de formation de film Download PDF

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Publication number
WO2019123700A1
WO2019123700A1 PCT/JP2018/026917 JP2018026917W WO2019123700A1 WO 2019123700 A1 WO2019123700 A1 WO 2019123700A1 JP 2018026917 W JP2018026917 W JP 2018026917W WO 2019123700 A1 WO2019123700 A1 WO 2019123700A1
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WO
WIPO (PCT)
Prior art keywords
glass film
film
light
surface roughness
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/026917
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English (en)
Japanese (ja)
Inventor
義也 福原
英貴 奥井
寺澤　正人
正範 近藤
直也 藤田
赤城　弘一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Power Ltd
Original Assignee
Mitsubishi Hitachi Power Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Hitachi Power Systems Ltd filed Critical Mitsubishi Hitachi Power Systems Ltd
Publication of WO2019123700A1 publication Critical patent/WO2019123700A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
    • F02C7/00—Features, components parts, details or accessories, not provided for in, or of interest apart form groups F02C1/00 - F02C6/00; Air intakes for jet-propulsion plants

Definitions

  • the present invention relates to a method and apparatus for inspecting a film formed on the surface of a metal member, and a method for forming a film for forming a film on the surface of a metal member.
  • a gas turbine is comprised of a compressor, a combustor and a turbine.
  • the compressor generates high-temperature high-pressure compressed air by compressing air taken in from the air intake, and the combustor supplies high-temperature high-pressure by supplying fuel to the compressed air for combustion.
  • the combustion gas is generated, and the turbine is driven by the combustion gas.
  • a coating is formed on the surfaces of moving blades and stator blades in order to ensure corrosion resistance.
  • the rotor blade and the stator blade have a corrosion-resistant metal film formed on the surface, and a glass film formed on the surface of the metal film.
  • the surface roughness of the glass film affects the performance of the blades and blades, and in order to improve the performance of the blades and blades, it is necessary to keep the surface roughness of the glass film low. is there.
  • the surface of the glass film is not sufficiently polished, the surface roughness of the glass film can not be suppressed low. If the surface of the glass film is excessively polished, the thickness of the glass film may be reduced. is there. It is also conceivable to measure the surface roughness of the glass film, but in this case, it is necessary to bring the measuring element into contact with the surface of the glass film, which may damage the surface of the glass film.
  • the present invention solves the above-mentioned problems, and an object thereof is to provide a method and an apparatus for inspecting a film which can inspect the surface roughness without damaging the surface of the glass film, and a method for forming the film. Do.
  • the inspection method of the film of the present invention for achieving the above-mentioned object comprises the steps of irradiating light to the surface of the glass film and the quality of the surface roughness based on the condition of the light image reflected on the surface of the glass film. And a determining step.
  • the surface roughness is determined based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged on the basis of the definition of the image of light reflected on the surface of the glass film.
  • the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film, the quality of the surface roughness can be determined with high accuracy.
  • the inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged by comparing the image of light reflected on the surface of the glass film with a preset judgment standard.
  • the quality of the surface roughness is determined by comparing the image of light reflected on the surface of the glass film with the determination reference, it is possible to easily determine the quality of the surface roughness.
  • the film inspection method according to the present invention is characterized in that the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
  • the surface roughness is estimated based on the state of the image of light reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness, the glass film having a predetermined surface roughness can be obtained. Good judgment can be made appropriately.
  • the inspection method of the film of the present invention is characterized in that the surface of the glass film is irradiated with light from a plurality of light sources.
  • the plurality of light sources are light emitting diodes.
  • the inspection apparatus for a film includes a light source for irradiating light to the surface of a glass film, a camera for capturing an image of light reflected on the surface of the glass film, and a rough surface based on an image captured by the camera. And a determination unit that determines whether the degree is good or bad.
  • the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film.
  • a step of forming a glass film on the surface of a member a step of polishing the surface of the glass film, a step of irradiating light onto the surface of the glass film after polishing, and Determining the quality of the surface roughness based on the state of the image of light reflected on the surface of the glass film.
  • a glass film is formed on the surface of the member, the surface of the glass film is polished, light is irradiated to the surface of the glass film after polishing, and the surface roughness is based on the state of the light image reflected on the surface of the glass film. Since it is possible to determine the quality of the surface roughness without measuring the surface roughness by contacting a measuring element or the like to the surface of the glass film, it is possible to determine the quality of the surface without damaging the surface of the glass film. Roughness can be checked.
  • the state of the image of light reflected on the surface of the glass film It is characterized in that the surface roughness is judged to be good or bad.
  • the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
  • the surface roughness can be inspected without damaging the surface of the glass film.
  • FIG. 1 is a flowchart showing a method of forming a film of the first embodiment.
  • FIG. 2 is a schematic view for explaining a method of forming a film.
  • FIG. 3 is a schematic view for explaining a method of inspecting a film.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the inspection method of the film according to the first embodiment includes the steps of irradiating light to the surface of the glass film formed on the surface of the moving blade, and the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film. And determining.
  • the step of forming a glass film on the surface of a moving blade (member), the step of polishing the surface of the glass film, and the irradiation of light onto the surface of the glass film after polishing And determining the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film.
  • FIG. 2 is a schematic view for explaining a method of forming a film.
  • a gas turbine is comprised of a compressor, a combustor and a turbine.
  • the compressor is configured by alternately arranging a plurality of stationary blades fixed to the casing and a plurality of moving blades fixed to the rotor.
  • the moving blade 10 is configured of a blade root 11, a platform 12, and a wing 13.
  • the blade root portion 11 can be fitted and fixed to a rotor disk integral with the rotor from the thickness direction.
  • the platform 12 is in the form of a curved plate integral with the wing root 11.
  • the wing portion 13 has a base end fixed to the platform 12 and a tip end extending to the inner wall surface side of the casing.
  • the step of forming a glass film on the surface of the moving blade 10 is formed by phosphating.
  • the blade portion 13 of the rotor blade 10 is coated with a corrosion-resistant metal (for example, zinc plating) on the surface, and then a glass film is formed on the surface of the metal plating.
  • the glass film is formed by phosphating, and in the present embodiment, is formed by a glass coating for baking and coating a phosphate glass on the surface of the wing portion 13.
  • the glass film is not limited to one formed by phosphate treatment.
  • the step of polishing the surface of the glass coating is to form the glass coating on the surface of the wing portion 13 of the moving blade 10 and then polish the surface of the glass coating.
  • the polishing tool 20 for polishing the surface of the glass film has a rotatable buff 21. The worker applies a polishing solution to the surface of the glass film of the wing portion 13 by spraying or the like, and then presses the surface of the glass film with a predetermined pressure while rotating the buff 21 of the polishing tool 20, along the arrow direction. Carry out polishing by moving.
  • the step of irradiating the surface of the glass film after polishing with light is performed using the light 30.
  • the light 30 has an irradiation unit 31.
  • the irradiation unit 31 irradiates light from the light emitting diodes 32 as a plurality of light sources to the surface of the glass film.
  • the irradiation unit 31 is configured, for example, by arranging a plurality of light emitting diodes 32 in a lattice. Although the light emitting diode 32 is used as a light source in the present embodiment, the present invention is not limited to this configuration.
  • the quality of the surface roughness is evaluated based on the definition of the image of light visually reflected on the surface of the glass film by the operator. Determine
  • the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness.
  • light is irradiated to the surface of the glass film that has been judged good, the sharpness of the image of the light reflected on the surface of the glass film at this time is photographed by a camera or the like, and stored. I assume. Then, the worker compares the image of light reflected on the surface of the glass film after polishing with the determination reference image to determine whether the surface roughness is good or bad.
  • FIG. 3 is a schematic view for explaining a method of inspecting a film.
  • the irradiation unit 31 reflects light 41 from the plurality of light emitting diodes 32 in a predetermined region A of the surface of the glass film in the wing portion 13. The operator determines the quality of the surface roughness based on the definition of the plurality of lights 41.
  • the surface roughness after polishing is defined as good when the surface roughness is 0.4 Ra or less. That is, the surface roughness of the determination reference image is 0.4 Ra or less.
  • this surface roughness (maximum height roughness) Ra is defined by “JIS B 0601: 2013 product geometric characteristics specification (GPS) of the Japanese Standards Association-surface characteristics: contour curve method-terms, definition and surface characteristics parameters” It is defined as the "maximum height roughness” defined in. That is, the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
  • the surface roughness of the glass film and the film thickness are in correlation.
  • the film thickness is 5 to 7 ⁇ m
  • the film thickness Is 3 to 5 ⁇ m.
  • FIG. 1 is a flowchart showing a method of forming a film of the first embodiment.
  • step S11 a coating process for forming a glass film on the surface of the wing portion 13 of the moving blade 10 is performed. Specifically, after applying corrosion-resistant metal plating to the surface of the wing portion 13, a glass film is formed on the surface of the metal plating.
  • step S12 a glass film is formed on the surface of the wing portion 13 of the moving blade 10, and then the surface of the glass film is polished by a polishing tool 20 using a polishing liquid.
  • step S13 the glass film of the wing portion 13 of the blade 10 that has been ground is cleaned with a cleaning liquid (for example, water or the like). After the cleaning, the surface of the wing portion 13 of the moving blade 10 is dried by air blowing or the like.
  • a cleaning liquid for example, water or the like
  • step S14 the light 30 is used to irradiate the surface of the glass film of the wing portion 13 of the moving blade 10 with light. Then, the light 41 is reflected from the plurality of light emitting diodes 32 on the surface of the glass film in the wing portion 13.
  • step S ⁇ b> 15 the operator determines the quality of the surface roughness based on the plurality of lights 41 reflected on the surface of the glass film of the wing portion 13. In this case, the worker determines whether the surface roughness is good or not by comparing the plurality of light beams 41 reflected on the surface of the glass film of the polished wing portion 13 with the determination reference image prepared in advance.
  • step S16 it is determined that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 does not satisfy the definition (surface roughness) of the determination reference image (No Then, the process returns to step S12, and the glass film on the surface of the wing portion 13 of the moving blade 10 is polished again. Then, the processing of steps S13 to S15 is repeated. On the other hand, it is judged (Yes) that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 satisfies the definition (surface roughness) of the judgment standard image. Then, the glass film of the wing portion 13 is judged to be good, and in step S17, a completion inspection is performed and the process ends.
  • the step of irradiating light to the surface of the glass film formed on the wing portion 13 of the moving blade 10, and the image of the light 41 reflected on the surface of the glass film Determining the quality of the surface roughness based on the state of.
  • the surface roughness is determined based on the state of the image of the light 41. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film. Therefore, the quality of the surface roughness can be determined with high accuracy.
  • the quality of the surface roughness is judged by comparing the image of the light 41 reflected on the surface of the glass film with the judgment reference image set in advance. Therefore, the quality of the surface roughness can be easily determined.
  • the surface roughness is estimated based on the state of the image of the light 41 reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness. Therefore, it is possible to properly determine the glass film which can ensure the predetermined surface roughness.
  • the film inspection method of the first embodiment light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film. Therefore, since light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film, the quality of the predetermined region A of the glass film can be determined at one time, and the workability can be improved. Further, by using the plurality of light emitting diodes 32, the sharpness of the image of the light 41 reflected on the surface of the glass film can be determined efficiently.
  • the step of forming a glass film on the surface of the wing portion 13 of the moving blade 10 the step of polishing the surface of the glass film, and the glass film after polishing It has a process of irradiating light to the surface, and a process of determining the quality of the surface roughness based on the state of the image of the light 41 reflected on the surface of the glass film.
  • a glass film is formed on the surface of the wing portion 13 of the moving blade 10, the surface of the glass film is polished, light is irradiated on the surface of the glass film after polishing, and an image of light 41 reflected on the surface of the glass film Since the quality of the surface roughness is determined based on the state, the quality of the surface roughness can be determined without measuring the surface roughness by contacting a measuring element or the like on the surface of the glass film. Surface roughness can be inspected without damaging the surface.
  • the film forming method of the first embodiment when the judgment result of the surface roughness of the glass film is negative, after the surface of the glass film is polished again, it is based on the state of the image of the light 41 reflected on the surface of the glass film. It is judged whether the surface roughness is good or bad. Therefore, when the judgment result of the surface roughness of the glass film is negative, the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the members having the same functions as those in the above-described embodiment are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the film inspection apparatus 50 includes a polishing apparatus 51, an irradiation apparatus 52, an imaging apparatus 53, and a control apparatus 54.
  • a step of forming a glass film on the surface of the moving blade (member) 10 a step of polishing the surface of the glass film, and light on the surface of the glass film after polishing
  • the process of irradiating and the process of determining the quality of surface roughness based on the state of the image of the light reflected to the surface of a glass film are included.
  • the polishing apparatus 51 is configured such that the polishing tool 62 is attached to the tip of the robot arm 61.
  • the polishing tool 62 has a rotatable buff, and the robot arm 61 moves while pressing the surface of the glass film of the wing portion 13 coated with the polishing fluid with a predetermined pressure while rotating the buff in the polishing tool 62 Carry out the polishing.
  • the irradiation device 52 is configured such that the light 64 is attached to the tip of the robot arm 63.
  • the light 64 has an irradiation unit, and the irradiation unit irradiates light from light emitting diodes as a plurality of light sources to the surface of the glass film.
  • the irradiation unit is configured, for example, by arranging a plurality of light emitting diodes in a lattice.
  • the imaging device 53 includes, for example, a camera (for example, a CCD camera) 65, and captures an image of light reflected on the surface of the glass film of the wing portion 13.
  • the control device 54 can control the operation of the polishing device 51 and the irradiation device 52, and receives an image captured by the imaging device 53.
  • the control device 54 includes a determination unit 66 that determines the surface roughness of the wing portion 13 of the moving blade 10 based on the image captured by the camera 65 of the imaging device 53.
  • the determination unit 66 determines whether the surface roughness is good or not based on the definition of the image of light reflected on the surface of the glass film in the wing portion 13.
  • a storage unit 67 is connected to the control device 54, and the storage unit 67 stores a determination reference image.
  • the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness. Then, light is irradiated on the surface of the glass film that has been judged to be good, and an image of the sharpness of the image of the light reflected on the surface of the glass film at this time is used as a judgment reference image.
  • the determination unit 66 compares the light sharpness of the light emitting diode reflected on the surface of the glass film in the wing portion 13 with the determination reference image stored in the storage unit 67 to determine whether the surface roughness is good or bad.
  • an irradiation device 52 for irradiating light to the surface of the glass film in the moving blade 10 and a camera 65 for capturing an image of light reflected on the surface of the glass film in the moving blade 10
  • a control unit 54 having a determination unit 66 that determines whether the surface roughness is good or not based on the image captured by the imaging unit 53.
  • the determination unit 66 determines whether the surface roughness is good or bad based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the method and apparatus for inspecting a film and the method for forming a film according to the present invention are applied to the moving blade 10 of a compressor in a gas turbine, but components such as a stationary blade and a casing of the compressor It may apply to Further, the present invention may be applied to various components of axial flow compressors such as steam turbines, turbochargers, and gas compressors, as well as gas turbines.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L'invention concerne un procédé et un dispositif d'inspection d'un film, ainsi qu'un procédé de formation d'un film, le procédé d'inspection comprenant : une étape de rayonnement de lumière sur une surface d'un film de verre formé sur une partie de lame (13) d'une lame mobile (10) ; et une étape de détermination de la qualité de la rugosité de surface du film de verre en fonction de l'état d'une image de lumière (41) réfléchie par la surface du film de verre.
PCT/JP2018/026917 2017-12-20 2018-07-18 Procédé et dispositif d'inspection de film, et procédé de formation de film Ceased WO2019123700A1 (fr)

Applications Claiming Priority (2)

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JP2017244360A JP2019113312A (ja) 2017-12-20 2017-12-20 皮膜の検査方法及び装置並びに皮膜の形成方法
JP2017-244360 2017-12-20

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WO2019123700A1 true WO2019123700A1 (fr) 2019-06-27

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024113525A (ja) * 2023-02-09 2024-08-22 Ｊｆｅスチール株式会社 表面粗さ評価方法、及び表面粗さ評価装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6491009A (en) * 1987-10-02 1989-04-10 Hitachi Ltd Apparatus for evaluating flatness of thin film
JPH05164696A (ja) * 1991-12-11 1993-06-29 Nissan Motor Co Ltd 塗装面評価装置
JPH07249599A (ja) * 1994-03-14 1995-09-26 Mitsubishi Materials Corp 張り合わせ用半導体ウェーハの研磨表面粗さの管理方法
JPH109836A (ja) * 1996-06-20 1998-01-16 Asahi Glass Co Ltd 物体の表面性状、ガラスの表面の粗度およびガラス成形型の評価方法
JP2000346642A (ja) * 1999-06-09 2000-12-15 Toto Ltd 施釉製品表面の平滑性評価方法並びにその評価に使用するための鉛筆及び／又は油性筆記具、濃淡見本
JP2001099632A (ja) * 1999-10-01 2001-04-13 Arc Harima Kk Ｃｃｄカメラによる正反射式表面性状測定方法及びその装置
JP2011117793A (ja) * 2009-12-02 2011-06-16 Arc Harima Kk 表面性状測定方法および表面性状測定装置
JP2011241800A (ja) * 2010-05-21 2011-12-01 Ihi Corp 高温耐食性コーティング
US20130321805A1 (en) * 2010-07-09 2013-12-05 K-Space Associates, Inc. Real-time temperature, optical band gap, film thickness, and surface roughness measurement for thin films applied to transparent substrates

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6491009A (en) * 1987-10-02 1989-04-10 Hitachi Ltd Apparatus for evaluating flatness of thin film
JPH05164696A (ja) * 1991-12-11 1993-06-29 Nissan Motor Co Ltd 塗装面評価装置
JPH07249599A (ja) * 1994-03-14 1995-09-26 Mitsubishi Materials Corp 張り合わせ用半導体ウェーハの研磨表面粗さの管理方法
JPH109836A (ja) * 1996-06-20 1998-01-16 Asahi Glass Co Ltd 物体の表面性状、ガラスの表面の粗度およびガラス成形型の評価方法
JP2000346642A (ja) * 1999-06-09 2000-12-15 Toto Ltd 施釉製品表面の平滑性評価方法並びにその評価に使用するための鉛筆及び／又は油性筆記具、濃淡見本
JP2001099632A (ja) * 1999-10-01 2001-04-13 Arc Harima Kk Ｃｃｄカメラによる正反射式表面性状測定方法及びその装置
JP2011117793A (ja) * 2009-12-02 2011-06-16 Arc Harima Kk 表面性状測定方法および表面性状測定装置
JP2011241800A (ja) * 2010-05-21 2011-12-01 Ihi Corp 高温耐食性コーティング
US20130321805A1 (en) * 2010-07-09 2013-12-05 K-Space Associates, Inc. Real-time temperature, optical band gap, film thickness, and surface roughness measurement for thin films applied to transparent substrates

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