WO2020004838A1 - Microscope à interférence de lumière blanche résistant aux vibrations et procédé d'élimination d'effet de vibration de celui-ci - Google Patents

Microscope à interférence de lumière blanche résistant aux vibrations et procédé d'élimination d'effet de vibration de celui-ci Download PDF

Info

Publication number
WO2020004838A1
WO2020004838A1 PCT/KR2019/007143 KR2019007143W WO2020004838A1 WO 2020004838 A1 WO2020004838 A1 WO 2020004838A1 KR 2019007143 W KR2019007143 W KR 2019007143W WO 2020004838 A1 WO2020004838 A1 WO 2020004838A1
Authority
WO
WIPO (PCT)
Prior art keywords
white light
vibration
interference
light
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2019/007143
Other languages
English (en)
Korean (ko)
Inventor
이효진
안승엽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
K Mac Inc
Original Assignee
K Mac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K Mac Inc filed Critical K Mac Inc
Priority to CN201980003112.3A priority Critical patent/CN110869696B/zh
Publication of WO2020004838A1 publication Critical patent/WO2020004838A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements

Definitions

  • the present invention relates to a vibration resistant white light interference microscope and a method for removing the vibration effect thereof.
  • the white light interference microscope uses a semi-transparent mirror to divide the light path into two directions of the measurement sample and the reference mirror, and accordingly, the white light interference microscope generates light between the measurement light that is reflected back from the measurement surface and the reference light that is reflected back to the reference mirror. It is an apparatus which measures the level difference on the surface of a measurement object in a relatively quick time using an interference fringe.
  • the white light interference microscope overcomes the disadvantages of contact point measurement methods such as stylus without being affected by the measurement error due to 2 ⁇ ambiguity, which is a disadvantage of Phase Shift Interferometer (PSI). Therefore, it has the advantage of the non-contact area measuring method, and thus can measure the height of many points at one time.
  • PSI Phase Shift Interferometer
  • the white light interference microscope is a high-precision measurement method
  • the vibration generated from the equipment or floor affects the optical path difference (OPD) during the z-axis scan is a major cause of measurement error.
  • OPD optical path difference
  • the measurement repeatability is affected.
  • the conventional white light interference microscope sends a triggering signal to the camera every time the PZT scanner moves a certain distance (eg, 72 nm) along the z-axis to obtain an image.
  • PZT scanners are expensive components and provide very precise control of the travel distance.
  • vibration even if the PZT scanner has moved a certain distance in the z-axis direction, there is a high probability that the object has moved at a different distance from the objective lens and the sample.
  • the distance between the objective lens and the measuring sample of the measuring instrument may vary irregularly due to vibration.
  • the white light interference microscope acquires an image whenever the distance between the measurement light reciprocating the distance between the objective lens and the sample and the reference light reciprocating between the objective lens and the reflector attached to the objective lens changes at a predetermined interval.
  • the present invention adds a high coherence laser interferometer to the optical path of a conventional white light interference microscope to provide a trigger to the camera whenever the difference in the optical path of the reference light and the measurement light is changed by a certain interval irrespective of the vibration during the scanning process. It is an object to provide a white light interference microscope.
  • an object of the present invention is to provide a vibration effect removal method of the vibration-resistant white light interference microscope.
  • the vibration-resistant white light interference microscope comprises a light source unit for generating a relatively broad spectrum of white light and a relatively narrow spectrum of laser light at the same time;
  • An interference fringe generation unit including a lens unit and a scan driver for driving the lens unit, the interference fringe generation unit making an interference fringe of the white light and an interference fringe of the laser light;
  • An illumination imaging microscope optical unit separating the interference fringes of the white light and the interference fringes of the laser light;
  • a trigger generator comprising a photodiode for measuring an interference fringe of the laser light and an FPGA controller for generating a trigger by analyzing the interference fringe of the laser light measured by the photodiode;
  • a high speed camera measuring an interference fringe of the white light;
  • a controller configured to calculate and process the interference fringe measurement information of the white light measured by the high speed camera.
  • the light source unit includes a white light generator that generates the white light, and a laser light generator that generates the laser light.
  • the white light generator includes at least one white lamp, and the laser light generator includes at least one laser diode.
  • the laser light generated by the laser light generator may have a higher coherence and relatively brighter brightness than white light generated by the white light generator.
  • the illumination imaging microscope optical unit may image the interference fringes of the separated white light and the interference fringes of the laser light into the high speed camera and the photodiode.
  • the illumination imaging microscope optical unit may include a plurality of beam splitters, and the plurality of beam splitters may include a first beam splitter disposed close to the light source unit and a second beam splitter disposed close to the photodiode. do.
  • the apparatus may further include a first tube lens positioned between the light source unit and the first beam splitter, and a second tube lens provided in the illumination imaging microscope optical system and positioned between the first beam splitter and the second beam splitter. do.
  • the lens unit may include at least one convex lens, a reference mirror, and at least one of a translucent mirror, and the scan driver may include a PZT piezoelectric element that moves the lens unit by applying an external voltage.
  • Vibration effect removal method of the vibration-resistant white light interference microscope (a) generates a white light and a laser light using the light source unit, the interference pattern of the white light and the laser using the interference pattern generating unit Making an interference fringe of light, and separating the interference fringe of the white light and the interference fringe of the laser light using the illumination imaging microscope optics, wherein the white light is formed on the high speed camera and the laser light is formed on the photodiode.
  • step (a-1) further comprises the step of measuring the vibration of the head and the measurement object of the white light interference microscope, and setting the driving speed of the scan driver and the shooting speed of the high-speed camera
  • the vibration of the head of the white light interference microscope and the measurement target is measured using a vibrometer, and the analysis is performed to obtain the maximum speed of the vibration, and faster than the maximum speed of the vibration. And setting the driving speed of the scan driver and the photographing speed of the high speed camera.
  • a high coherence laser interferometer is added to the optical path of a conventional white light interference microscope to provide a trigger to the camera whenever the difference in the optical path between the reference light and the measurement light is changed by a certain interval irrespective of the vibration during the scanning process.
  • the vibration effect of the white light interference microscope can be eliminated. According to this, since the trigger is observed by observing the actual distance, the specification of the scan driver does not have to be high, and thus, an excessively expensive cost is not provided, thereby providing an economically advantageous effect.
  • FIG. 1 is a conceptual diagram schematically showing a vibration-resistant white light interference microscope according to an embodiment of the present invention.
  • FIG. 2 is a graph illustrating a high coherence interference signal and a camera trigger generation point in a case where there is no vibration (a) and when there is vibration (b) in a vibration-resistant white light interference microscope according to an embodiment of the present invention. .
  • Vp 13 ⁇ m / s, 4Hz 995nm amplitude (twice the Class C) when the vibration
  • This graph shows an example of the interference waveform and its phase.
  • Vp 26 ⁇ m / s, 4Hz 995nm amplitude (twice the Class C) when the vibration
  • This graph shows an example of the interference waveform and its phase.
  • first, second, A, B, (a), and (b) can be used. These terms are only to distinguish the components from other components, and the terms are not limited in nature, order, order or number of the components. If a component is described as being “connected”, “coupled” or “connected” to another component, that component may be directly connected to or connected to that other component, but between components It is to be understood that the elements may be “interposed” or each component may be “connected”, “coupled” or “connected” through other components.
  • the white light interference microscope overcomes the disadvantages of contact point measurement methods, such as a stylus, without being affected by the measurement error due to 2 ⁇ ambiguity, which is a disadvantage of the phase shift interferometer (PSI). Area) It has the merit of measuring method.
  • PSI phase shift interferometer
  • the white light interference microscope is a high-precision measurement method, and when a vibration effect is given through the equipment or the floor, there is a problem of measuring error due to the influence on the optical path difference (OPD) during the z-axis scan. In other words, the measurement of minute vibration units may affect measurement repeatability.
  • OPD optical path difference
  • the present invention is designed to solve this problem, and adds a high coherence laser interferometer to the light path of a conventional white light interference microscope. This provides a trigger to the camera whenever the difference in the optical path between the reference and measured light changes at any interval, regardless of vibration during the scan process. As a result, the vibration influence of the white light interference microscope can be eliminated.
  • FIG. 1 is a conceptual diagram schematically showing a vibration-resistant white light interference microscope according to an embodiment of the present invention.
  • the vibration-resistant white light interference microscope 100 includes a light source unit 110, an illumination imaging microscope optical unit 130, an interference fringe generating unit 150, and a trigger generating unit 170. , And the controller 190.
  • the light source unit 110 includes a white light generator 111 and a laser light generator 113.
  • the white light generator 111 refers to a white lamp for measuring and generates light of a broad spectrum.
  • the laser light generator 113 may include a laser diode, which generates light having a relatively narrow spectrum compared to the white light generator 111.
  • the laser light generator 113 generates light having high coherence and bright brightness.
  • laser light is light used for reference confirmation.
  • the illumination imaging microscope optical unit 130 separates the interference pattern of the white light generated by the white light generator 111 and the interference pattern of the laser light generated by the laser light generator 113.
  • the illumination imaging microscope optical unit 130 may separate the interference fringes of the white light and the interference fringes of the laser light to form an image on the sensors of the high speed camera 180 and the photodiode 171, respectively.
  • the illumination imaging microscope optical unit 130 includes a plurality of beam splitters 131 and 133.
  • the one arranged on the light source unit 110 side is called the first beam splitter 131
  • the one disposed on the photodiode 171 side is called the second beam splitter 133.
  • the first and second beam splitters 131 and 133 may be semi-transparent mirrors that reflect a part of light and transmit a part of the remaining light.
  • the interference fringe generator 150 serves to make an interference fringe of white light and an interference fringe of a laser beam.
  • the interference fringe generating unit 150 includes a lens unit 151, a scan driver 153, and a PZT controller 155.
  • the lens unit 151 refers to an optical system including at least one of a convex lens, a reference mirror, and a translucent mirror.
  • the lens unit 151 may use a well-known Mirau interferometer or a Michaelson interferometer.
  • the lens unit 151 is a Mirae interferometer.
  • the convex lens is disposed at the top and focuses on the reference mirror located at the center, and the light passes the sample (ie, the measurement object S) past the translucent mirror disposed at the bottom. You are beaten and come back.
  • interference occurs due to the difference between the optical path reflected by the reference mirror and the optical path returned to the sample. The result is an interference fringe.
  • the scan driver 153 refers to a piezoelectric element that generates a voltage by receiving a force from the outside or generates a movement by receiving a voltage. Specifically, the scan driver 153 is used as a driving element that receives a voltage.
  • the scan driver 153 is used to precisely move the lens unit 151.
  • the PZT controller 155 operates the scan driver 153 by receiving a command signal from a controller (eg, a PC) 190.
  • a controller eg, a PC
  • At least one tube lens 121 and 123 may be provided in the light source unit 110 and the illumination imaging microscope optical unit 130.
  • the tube lens 121 positioned on the light source unit 110 side is referred to as a first tube lens
  • the tube lens 123 positioned on the illumination imaging microscope optical unit 130 side is referred to as a second tube lens.
  • These tube lenses 121 and 123 are lens members, and light emitted from one point may be made into parallel light, and light passing in parallel may be manufactured to be collected into one point.
  • the first tube lens 121 serves to make the light diverging at one point into parallel light
  • the second tube lens 123 may serve to collect the light passing in parallel at one point.
  • the trigger generating unit 170 may generate a trigger when analyzing the interference fringes of the laser light and confirming an accurate Z-axis value to reach a position requiring measurement.
  • the trigger generator 170 includes a photo diode 171 and an FPGA controller 173.
  • the photodiode 171 measures the interference fringe of the laser light.
  • the photodiode 171 may use a device having tens of thousands to tens of millions of fps as a single pixel device.
  • the FPGA controller 173 analyzes the interference fringes of the laser light measured from the photodiode 171 to generate a trigger.
  • the high speed camera 180 measures an interference fringe of white light.
  • the high speed camera 180 may have tens to millions of pixels, and thus may measure a large area of white light interference fringes at once.
  • the controller 190 is an apparatus for calculating and processing image processing and data, and may use a conventionally known PC or the like.
  • Vibration-resistant white light interference microscope 100 adds a high coherence interferometer using a laser diode, that is, the laser light generator 113 and the photodiode 171 to the optical path of a conventional white light interference microscope. Whenever the optical path difference between the reference light and the measurement light changes by a predetermined interval irrespective of the vibration in the scanning process, a trigger is provided to the high speed camera 180 to remove the vibration influence.
  • the vibration of the head of the white light interference microscope and the measurement target is measured using a vibrometer, and the measured vibration is analyzed to obtain the maximum speed of the vibration.
  • the driving speed of the scan driver 153 is set faster than the maximum speed of the vibration.
  • the FPS of the high speed camera 180 is set according to the driving speed of the scan driver 153. In this case, the driving speed of the scan driver 153 and the high speed camera 180 have a proportional relationship.
  • the measurement is performed at the driving speed of the set scan driver 153 and the photographing speed of the high speed camera 180. Thereafter, the scan driver 153 may move at a constant speed.
  • white light and laser light are generated.
  • the white light and the laser light are converted into parallel light via the first tube lens 121.
  • the white light and the laser light which have become parallel light, strike the first beam splitter 131 and are partially transmitted and disappeared, while the other is reflected and bent in the sample direction.
  • the white light and the laser light are focused past the convex lens in the lens unit 151, and the focusing position is formed in the reference mirror.
  • the white light and the laser light hit a translucent mirror, partly toward the reference mirror and partly toward the sample S.
  • the white light and the laser light directed toward the reference mirror and the sample hit the reference mirror and the sample and are reflected to the translucent mirror.
  • the white light and the laser light reflected by hitting the reference mirror hit the translucent mirror, part of which is lost after transmission, and part of which is reflected and proceeds in the direction of the high speed camera 180 and the photodiode 171.
  • the white light and the laser light reflected by the sample hit the semi-transparent mirror, part of which is reflected and lost, and part of the white light and the laser light that are transmitted through the high speed camera 180 and the photodiode 171.
  • the light traveling toward the high speed camera 180 and the photodiode 171 is combined to cause interference.
  • the intensity of the light may vary depending on the light path difference.
  • the light causing the interference passes through the convex lens inside the lens unit 151 and is converted into parallel light.
  • the light converted into parallel light hits the first beam splitter 131 of the illumination imaging microscope optical unit 130, part of which is reflected and disappeared, and part of the light is transmitted through the high speed camera 180 and the photodiode 171. Proceeds in the direction.
  • the white light and the laser light transmitted through the first beam splitter 131 are focused through the second tube lens 123, and the focusing position is formed in the sensors of the high speed camera 180 and the photodiode 171.
  • the white light and laser light focused past the second tube lens 123 hit the second beam splitter 133 of the illumination imaging microscope optics 130, some of which are reflected and directed towards the photodiode 171, some of which are transmitted.
  • the white light and the laser light are formed only on the sensors of the high speed camera 180 and the photodiode 171 by the second tube lens 123, respectively.
  • the interference fringe of the laser light measured by the photodiode 171 is analyzed by the FPGA controller 173.
  • the triggered high speed camera 180 measures the white light interference fringe at that moment.
  • the measured white light interference fringe is accumulated over the entire scan period.
  • the controller 190 may process and analyze pixel-specific information of the high speed camera 180.
  • FDA Fourier Domain Analysis
  • FDA analyzes can provide height-by-pixel height information and step information from pixel-by-pixel heights.
  • Figures 2 to 5 are graphs for explaining the vibration effect removal method of the vibration-resistant white light interference microscope according to an embodiment of the present invention.
  • the photodiode output signal of a high coherence interferometer using a laser diode is
  • z has the following values.
  • the photodiode output signal of a high coherence interferometer using a laser diode when there is finally vibration is as follows, and the vibrations are shown in (a) and (b) of FIG. do.
  • 1 fringe occurs whenever the optical path difference between the reference light and the measured light becomes n ⁇ ref , so it appears whenever the value of actual z (t) changes by ⁇ ref / 2 regardless of vibration. do.
  • the maximum frame per second (FPS) of the high speed camera 180 (refer to FIG. 1) used should be at least twice that of the FPS when there is no vibration.
  • Vp 13 ⁇ m / s, 4Hz 995nm amplitude (twice the Class C) when the vibration
  • This graph shows an example of the interference waveform and its phase.
  • phase change is changed.
  • the circuit proceeds in the reverse direction (in this case, the decreasing direction), and during the reverse direction, phases of 0, ⁇ / 2, ⁇ , and 3 ⁇ / 2 appear to generate a trigger.
  • the direction in which the scan driving unit 153 (see FIG. 1 is moved) and the distance change direction between the sample (S, FIG. 1) due to vibration are opposite and the movement speed due to vibration is faster.
  • the picture is taken again at the distance between the light and the measured light.
  • the vibration may not be removed and measured.
  • the measurement can be performed even at the higher vibration.
  • Vp 26 ⁇ m / s, 4Hz 995nm amplitude (twice the Class C) when the vibration
  • This graph shows an example of the interference waveform and its phase.
  • Vp ⁇ 50um / s it is possible to measure Class B at 4Hz and Class A at 8Hz or more, which is the case when there is no isolator in the general production line. Therefore, it can be seen that the application of this method allows accurate measurements using white light interference microscopes on all production lines.
  • a trigger can be provided to the camera to eliminate the vibration effects of a vibration-resistant white light interference microscope. According to this, since the actual distance is triggered and triggered, the specification of the PZT scanner does not have to be high, and it does not cost excessively, thus providing an economically advantageous effect.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

La présente invention concerne un microscope à interférence de lumière blanche résistant aux vibrations et un procédé d'élimination d'un effet de vibration de celui-ci. Un microscope à interférence de lumière blanche résistant aux vibrations selon un mode de réalisation de la présente invention comprend : une unité de source de lumière configurée pour générer simultanément un spectre relativement large de lumière blanche et un spectre relativement étroit de lumière laser ; une unité d'objectif ; et une unité d'entraînement de balayage configurée pour entraîner l'unité d'objectif, comprenant : une unité de génération de motif d'interférence configurée pour former un motif d'interférence de la lumière blanche et un motif d'interférence de la lumière laser ; une unité optique de microscope d'imagerie à éclairage configurée pour séparer le motif d'interférence de la lumière blanche et le motif d'interférence de la lumière laser ; une unité de génération de déclencheur comprenant une photodiode configurée pour mesurer le motif d'interférence de la lumière laser et un dispositif de commande FPGA configuré pour générer un déclencheur par analyse du motif d'interférence de la lumière laser mesurée par la photodiode ; une caméra à grande vitesse configurée pour mesurer le motif d'interférence de la lumière blanche ; et un dispositif de commande configuré pour calculer et traiter des informations de mesure concernant le motif d'interférence de la lumière blanche mesurée par la caméra à grande vitesse.
PCT/KR2019/007143 2018-06-25 2019-06-13 Microscope à interférence de lumière blanche résistant aux vibrations et procédé d'élimination d'effet de vibration de celui-ci Ceased WO2020004838A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201980003112.3A CN110869696B (zh) 2018-06-25 2019-06-13 耐振白色光干涉显微镜及其振动影响去除方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020180072933A KR102019326B1 (ko) 2018-06-25 2018-06-25 내진동 백색광 간섭현미경 및 그 진동영향 제거방법
KR10-2018-0072933 2018-06-25

Publications (1)

Publication Number Publication Date
WO2020004838A1 true WO2020004838A1 (fr) 2020-01-02

Family

ID=67949936

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2019/007143 Ceased WO2020004838A1 (fr) 2018-06-25 2019-06-13 Microscope à interférence de lumière blanche résistant aux vibrations et procédé d'élimination d'effet de vibration de celui-ci

Country Status (3)

Country Link
KR (1) KR102019326B1 (fr)
CN (1) CN110869696B (fr)
WO (1) WO2020004838A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111220067A (zh) * 2020-02-27 2020-06-02 中国工程物理研究院机械制造工艺研究所 一种白光干涉仪自动对焦装置及方法
EP4617716A1 (fr) * 2024-03-13 2025-09-17 Honeywell International Inc. Ferrule avec canal source à large bande de spectre pour atténuation d'erreur d'alignement et évaluation de dynamique de système

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111473742B (zh) * 2020-05-22 2021-07-16 大连理工大学 一种白光扫描干涉测量蝠翼效应的形貌模拟和补偿方法
KR102504845B1 (ko) * 2020-12-17 2023-03-02 인천대학교 산학협력단 색상별 간섭무늬 분석을 통한 시료의 표면 지형도 측정 장치 및 방법
CN117006971A (zh) * 2023-09-25 2023-11-07 板石智能科技(深圳)有限公司 一种三维形貌测量系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007033216A (ja) * 2005-07-26 2007-02-08 Keyence Corp 白色干渉計測装置及び白色干渉計測方法
JP2007033217A (ja) * 2005-07-26 2007-02-08 Keyence Corp 干渉計測装置及び干渉計測方法
KR20080051969A (ko) * 2006-12-07 2008-06-11 한국과학기술원 매크로렌즈를 이용한 대면적 삼차원 형상측정을 위한 백색광주사간섭계 및 형상측정방법
US20100195112A1 (en) * 2009-01-30 2010-08-05 Zygo Corporation Interferometer with scan motion detection
JP2010237183A (ja) * 2009-03-31 2010-10-21 Sumitomo Osaka Cement Co Ltd 低コヒーレンス干渉計及び光学顕微鏡
KR20130049551A (ko) * 2011-11-04 2013-05-14 한국표준과학연구원 다파장을 이용한 위상 천이 간섭계

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693771B2 (ja) * 1996-11-13 2005-09-07 オリンパス株式会社 形状測定方法および装置
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
GB0900705D0 (en) * 2009-01-16 2009-03-04 Univ Huddersfield Surface measurement system
US8599383B2 (en) * 2009-05-06 2013-12-03 The Regents Of The University Of California Optical cytometry
CN101718520B (zh) * 2009-11-16 2011-01-05 浙江大学 一种快速表面质量测量系统
CN201666783U (zh) * 2010-04-23 2010-12-08 浙江大学 一种具有快速调零系统的白光干涉仪
JPWO2013084557A1 (ja) * 2011-12-07 2015-04-27 コニカミノルタ株式会社 形状測定装置
CN103471533B (zh) * 2013-09-22 2016-03-30 浙江大学 表面形貌抗振干涉测量系统
US10190867B2 (en) * 2014-02-13 2019-01-29 B. G. Negev Technologies And Applications Ltd., At Ben-Gurion University Real time dual mode full-field optical coherence microscopy with full range imaging

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007033216A (ja) * 2005-07-26 2007-02-08 Keyence Corp 白色干渉計測装置及び白色干渉計測方法
JP2007033217A (ja) * 2005-07-26 2007-02-08 Keyence Corp 干渉計測装置及び干渉計測方法
KR20080051969A (ko) * 2006-12-07 2008-06-11 한국과학기술원 매크로렌즈를 이용한 대면적 삼차원 형상측정을 위한 백색광주사간섭계 및 형상측정방법
US20100195112A1 (en) * 2009-01-30 2010-08-05 Zygo Corporation Interferometer with scan motion detection
JP2010237183A (ja) * 2009-03-31 2010-10-21 Sumitomo Osaka Cement Co Ltd 低コヒーレンス干渉計及び光学顕微鏡
KR20130049551A (ko) * 2011-11-04 2013-05-14 한국표준과학연구원 다파장을 이용한 위상 천이 간섭계

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111220067A (zh) * 2020-02-27 2020-06-02 中国工程物理研究院机械制造工艺研究所 一种白光干涉仪自动对焦装置及方法
CN111220067B (zh) * 2020-02-27 2021-07-13 中国工程物理研究院机械制造工艺研究所 一种白光干涉仪自动对焦装置及方法
EP4617716A1 (fr) * 2024-03-13 2025-09-17 Honeywell International Inc. Ferrule avec canal source à large bande de spectre pour atténuation d'erreur d'alignement et évaluation de dynamique de système

Also Published As

Publication number Publication date
CN110869696B (zh) 2021-12-28
KR102019326B1 (ko) 2019-09-06
CN110869696A (zh) 2020-03-06

Similar Documents

Publication Publication Date Title
WO2020004838A1 (fr) Microscope à interférence de lumière blanche résistant aux vibrations et procédé d'élimination d'effet de vibration de celui-ci
US7545505B2 (en) Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering
WO2013036076A2 (fr) Dispositif et procédé permettant de mesurer des formes tridimensionnelles au moyen de l'amplitude d'une grille de projection
WO2017213464A1 (fr) Système de microscopie à éclairage structuré utilisant un dispositif à micromiroirs numériques et un éclairage structuré par un complexe temporel et son procédé de fonctionnement
CN111812939B (zh) 超高速拍摄装置
US20090187378A1 (en) Depth measurement apparatus and depth measurement method
JP2001241940A (ja) 基板上の特徴を測定するための測定装置及び測定方法
JPH074928A (ja) 歪測定装置
WO2019088370A1 (fr) Dispositif d'inspection d'un objet à grande vitesse sur une grande surface
CN112729135A (zh) 一种具有主动光学防抖功能的面阵扫频测距/厚的装置和方法
WO2020022786A1 (fr) Dispositif d'inspection d'échantillon et procédé d'inspection d'échantillon
CN205192445U (zh) 一种光学三维成像装置
CN107430270A (zh) 光扫描装置的扫描轨迹测定方法、扫描轨迹测定装置和图像校准方法
WO2018208018A1 (fr) Appareil de mesure de brouillage optique
KR20070042841A (ko) 영상 측정 장치 및 그 방법
US20110247107A1 (en) Method for processing output of scanning type probe microscope, and scanning type probe microscope
KR20110121497A (ko) Ｐｚｔ 스테이지를 이용한 공초점 현미경 시스템 및 그 스캔방법
CN111578844B (zh) 高抗振性电子散斑干涉测量系统和方法
Annovazzi-Lodi et al. Spot optical measurements on micromachined mirrors for photonic switching
WO2023121094A1 (fr) Dispositif de mesure de forme tridimensionnelle pour acquisition d'informations d'images multiples
WO2017142154A1 (fr) Appareil photographique et procédé de photographie
WO2025009931A1 (fr) Interféromètre en lumière blanche de type glissant
JPH09113240A (ja) 光透過物質の三次元情報の検出方法及び装置
WO2025178385A1 (fr) Dispositif de mesure optique
CN111736332A (zh) 一种光纤扫描成像装置及方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19825697

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19825697

Country of ref document: EP

Kind code of ref document: A1