WO2020174905A1 - Mécanisme de positionnement d'élément optique et radar laser - Google Patents

Mécanisme de positionnement d'élément optique et radar laser Download PDF

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Publication number
WO2020174905A1
WO2020174905A1 PCT/JP2020/000997 JP2020000997W WO2020174905A1 WO 2020174905 A1 WO2020174905 A1 WO 2020174905A1 JP 2020000997 W JP2020000997 W JP 2020000997W WO 2020174905 A1 WO2020174905 A1 WO 2020174905A1
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WO
WIPO (PCT)
Prior art keywords
adjusting mechanism
axis
position adjusting
screw
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/000997
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English (en)
Japanese (ja)
Inventor
一幸 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of WO2020174905A1 publication Critical patent/WO2020174905A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses

Definitions

  • the present invention relates to a position adjusting mechanism for adjusting the position of an optical element and a laser radar provided with the position adjusting mechanism.
  • laser radars that detect an object using laser light have been developed in various fields.
  • a laser beam is projected from the front of the vehicle, and it is determined whether or not an object such as a vehicle or a person exists in front of the vehicle based on the presence or absence of the reflected light.
  • the distance to the object is measured based on the projection timing of the laser light and the reception timing of the reflected light.
  • Patent Documents 1 and 2 disclose a device that scans a line beam to detect an object in front of the vehicle.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 5-2 0 5 1 9 9
  • Patent Document 2 Japanese Unexamined Patent Publication No. 20 17-1 590 9 90
  • optical elements such as a beam shaping lens are positionally adjusted in various directions in order to properly form a line beam.
  • the optical element is adhered and fixed by an adhesive, for example, after the position adjustment.
  • the present invention uses an optical element position adjusting mechanism that can fix an optical element in a predetermined position without displacement even in high temperature and low temperature environments, and uses the position adjusting mechanism.
  • An object is to provide a laser radar. Means for solving the problem
  • the first aspect of the present invention relates to a position adjusting mechanism for an optical element.
  • a position adjusting mechanism according to this aspect includes a holding portion that holds an optical element, a support portion that movably supports the holding portion, a panel that elastically biases the holding portion in one direction that is displaceable, A screw which is sandwiched between the holding portion and a panel, the front end of which is pressed against the holding portion by the bias of the panel, and which is attached to the support portion so as to be axially displaceable by turning.
  • the panel and the screw press the holding portion in opposite directions. Therefore, by rotating the screw to move it back and forth, the balance between the screw and the panel is changed, and the position of the holding portion can be changed. This allows the position of the optical element to be easily adjusted.
  • the holding portion is fixed at a position where the biasing of the panel and the pressing of the screw are balanced. Therefore, the optical element can be fixed at the adjustment position without using an adhesive. Since the optical element can be fixed without using an adhesive in this way, the optical element can be fixed at a predetermined position without displacement even in high temperature and low temperature environments.
  • a second aspect of the present invention relates to a laser radar.
  • a laser reader according to this aspect includes the position adjusting mechanism of the optical element according to the first aspect, and an optical element held by the position adjusting mechanism.
  • the laser radar since the laser radar includes the position adjusting mechanism of the first aspect, the optical element can be fixed at a predetermined position even under high temperature and low temperature environments. The characteristics of the optical system that projects the laser light onto the target area can be maintained high. Therefore, the reliability of the laser radar can be improved.
  • FIG. 1 (3) is a diagram showing a configuration of an optical system and a circuit unit of the laser radar according to the embodiment.
  • FIG. 1 ( ⁇ ) is a perspective view showing a configuration of a line beam scanning optical system according to the embodiment.
  • FIG. 2 ( 3 ) is an external perspective view showing the configuration of the projection apparatus according to the embodiment.
  • FIG. 2 ( ⁇ ) is a perspective view showing the structure of the inner part of the projection device of FIG. 2 ( 3 ) with the housing omitted.
  • FIG. 3 is an exploded perspective view showing a structure of a structure constituting a part of a position adjusting mechanism of a fast axis cylindrical lens according to the embodiment.
  • FIG. 4 ( 3 ) and ( ⁇ ) are perspective views showing the assembled state of the structure shown in FIG. 3 according to the embodiment.
  • FIG. 5 is a perspective view showing a method of adjusting the fast-axis cylindrical lens in the structure shown in FIG. 3 according to the embodiment.
  • FIG. 6 is an exploded perspective view showing a structure of a structure constituting a part of a position adjusting mechanism of the fast axis cylindrical lens according to the embodiment.
  • FIGS. 7( 3 ) and 7 are perspective views showing a state in which the structure shown in FIG. 6 is assembled according to the embodiment, respectively.
  • FIG. 8 is an exploded perspective view showing a structure of a structure constituting a part of a position adjusting mechanism of a fast axis cylindrical lens according to the embodiment.
  • FIGS. 9( 3 ) and 9( are perspective views showing a state in which the structure shown in FIG. 8 is assembled according to the embodiment, respectively.
  • FIG. 10 shows a position of a fast axis cylindrical lens according to the embodiment. ⁇ 0 2020/174 90 5 4 (: 170? 2020 /000997
  • FIG. 11 is a perspective view showing an overall configuration of a position adjusting mechanism of a fast axis cylindrical lens according to the embodiment.
  • FIG. 12 is an exploded perspective view showing a structure of a structure constituting a part of a position adjusting mechanism of a slow axis cylindrical lens according to the embodiment.
  • FIG. 13 is a perspective view and a plan view showing the assembled state of the structure shown in FIG. 12 according to the embodiment, respectively.
  • FIG. 14 ( 3 ) and ( ⁇ ) are perspective views showing the configuration of the position adjusting mechanism of the slow axis cylindrical lens according to the embodiment.
  • the X, the axis and the axis which are orthogonal to each other are added.
  • the X-axis direction and the vertical axis direction are the long side direction and the short side direction of the line beam, respectively, and the positive axis direction is the line beam projection direction.
  • FIG. 1 (3) is a diagram showing a configuration of an optical system and a circuit unit of the laser radar 1.
  • FIG. 1 ( ⁇ ) is a perspective view showing the configuration of the projection optical system 10.
  • the laser radar 1 includes a projection optical system 10 and a light receiving optical system as an optical system configuration.
  • the projection optical system 10 generates a line beam 10 which is long in one direction (X-axis direction). In addition, the projection optical system 10 scans the generated line beam mirror 10 in the direction of its short side (the direction of the vertical axis).
  • the light receiving optical system 20 receives the reflected light from the object of the laser light projected from the projection optical system 10.
  • the projection optical system 10 includes a light emitting unit 11, a fast-axis cylindrical lens 12, a slow-axis cylindrical lens 13 and an optical deflector 14. Further, the light receiving optical system 20 is provided with a light receiving lens 21 and a light receiving element 22.
  • the light emitting unit 11 is configured by integrating a plurality of laser light sources 1 13. ⁇ 0 2020/174 90 5 5 (: 170? 2020 /000997
  • the laser light source 1 13 emits laser light having a predetermined wavelength.
  • the laser light source 1 13 is an edge emitting laser diode.
  • the laser light source 1 13 may be a surface emitting laser light source.
  • each record - the emission wavelength of the laser light source 1 1 3 may be set to the infrared wavelength band (e.g. 9 0 5 n m).
  • the emission wavelength of the laser light source 1 18 can be appropriately changed according to the usage mode of the laser radar 1.
  • the laser light source 113 has a structure in which the active layer is sandwiched between the 1 ⁇ ! type cladding layer and the type cladding layer.
  • laser light is emitted from the light emitting region of the active layer.
  • the width of the light emitting region in the direction parallel to the active layer is wider than the width in the direction vertical to the active layer.
  • the axis perpendicular to the active layer is called the fast axis, and the axis parallel to the active layer is called the slow axis.
  • the laser light emitted from the light emitting region has a larger divergence angle in the fast axis direction than in the slow axis direction. Therefore, the shape of the beam emitted from the light emitting region is an elliptical shape that is long in the fast axis direction.
  • Each of the plurality of laser light sources 113 is arranged so that the slow axes thereof are parallel to the lateral axis direction. Further, the plurality of laser light sources 113 are arranged so as to be aligned in the direction parallel to the slow axis (X-axis direction).
  • the light-emitting unit 11 has, for example, a structure in which one semiconductor light-emitting element formed so that a plurality of light-emitting regions are arranged in the slow axis direction is installed on the substrate 11.
  • the structural portions that emit laser light from the respective light emitting regions correspond to the laser light sources 1 13 respectively.
  • the invention is not limited to this, and the light emitting unit 11 may be configured by arranging a plurality of laser light sources 1 13 individually formed adjacent to each other on the substrate 11.
  • the light emitting unit 11 is installed so that the emission optical axis of the laser light source 1 13 is inclined by a predetermined angle in the negative direction of the axis from the direction parallel to the vertical axis.
  • the fast axis cylindrical lens 12 converges the laser light emitted from each laser light source 1 13 of the light emitting unit 11 1 in the fast axis direction to generate a fast light. ⁇ 0 2020/174 90 5 6 (: 17 2020 /000997
  • the spread of the laser light in the axial direction is adjusted to be substantially parallel. That is, the fast axis cylindrical lens 12 has a function of collimating the laser light emitted from each laser light source 11 a of the light emitting unit 11 into parallel light only in the fast axis direction.
  • the fast-axis cylindrical lens 12 has a lens surface 12a that is curved only in a direction parallel to the fast axis.
  • the generatrix of the lens surface 1 2 a is parallel to the X axis.
  • the fast axis of each laser beam incident on the fast axis cylindrical lens 12 is perpendicular to the generatrix of the lens surface 12 a.
  • Each laser light is incident on the fast-axis cylindrical lens 1 2 along the X-axis direction.
  • Each laser beam is converged in the fast axis direction (Z-axis direction) at the lens surface 12 a and is collimated in the fast axis direction.
  • the slow-axis cylindrical lens 13 is a laser light source of the light emitting unit 11
  • the laser light emitted from 1 1 a is focused in the slow axis direction.
  • the slow-axis cylindrical lens 13 has a lens surface 13a which is curved only in a direction parallel to the slow axis.
  • the generatrix of the lens surface 1 3 a is inclined from the direction parallel to the Z axis to the direction parallel to the Y _ Z plane.
  • the generatrix of the lens surface 12a of the fast axis cylindrical lens 1 2 and the generatrix of the lens surface 1 3a of the slow axis cylindrical lens 1 3 are perpendicular to each other.
  • the laser light emitted from each laser light source 11 a is condensed in the slow axis direction by the slow axis cylindrical lens 13 and enters the mirror 14 a of the optical deflector 14.
  • the optical deflector 14 is, for example, a M E M S (M i cro Elect ro Mechan i cal l Systems) mirror using a piezoelectric actuator or an electrostatic actuator.
  • the mirror 14a has a high reflectance due to a dielectric multilayer film or a metal film.
  • the mirror 14a is located near the focal length on the Y axis positive side of the slow-axis cylindrical lens 13a.
  • the mirror 14a is driven to rotate about a rotation axis R 1 parallel to the X axis.
  • the mirror 14a has, for example, a circular shape with a diameter of about 3 mm.
  • a beam is formed by a collection of laser light from each laser light source 11a. ⁇ 0 2020/174 90 5 7 (: 170? 2020 /000997
  • the beam is focused only in the X-axis direction by the slow-axis cylindrical lens 1 3, the beam after being reflected by the mirror 1 4 3 spreads only in the X-axis direction. In this way, the line beam ridge 10 which spreads in the X-axis direction is generated.
  • Line beam Yoshimi 1 0 is, for example, the spread angle of the long side direction and a full size 1 0 ° or more, the spread angle of the short side direction is em 1 ° or less.
  • the divergence angle of the line beam head 10 in the long side direction is preferably set to a full angle of 60 ° or more.
  • optical deflector 1 4 drives the mirror 1 4 3 by a drive signal from the mirror drive circuit 3 3, to scan the beam reflected from the mirror 1 4 3 ⁇ direction.
  • the line beam mirror 10 is scanned in the lateral direction (vertical axis direction).
  • Fig. 1 (3) and ( ⁇ ) show the mirror 1 43 in the neutral position. In this state, the line beam mirror 10 travels in a direction parallel to the axis.
  • the tilt angle of the mirror 1 4 3 in the neutral position can be appropriately changed according to the layout of the projection optical system 10.
  • the line beam mirror 10 is projected in front of the vehicle such that the long side direction is horizontal.
  • the divergence angle (full angle) in the direction of the long side of the line beam 10 is, for example, 90°.
  • the upper limit of the distance at which an object can be detected is, for example, about 250.
  • the laser beams emitted from the respective laser light sources 1 18 are arranged.
  • the light is projected so as to line up along the long side direction of the line beam mirror 10.
  • the laser beams emitted from the respective laser light sources 1 13 are combined to form the line beam mirror 10.
  • the reflected light of the line beam mirror 10 reflected from the object existing in the target area is condensed on the light receiving surface of the light receiving element 22 by the light receiving lens 21.
  • the light receiving element 22 is, for example, an image sensor in which pixels are arranged vertically and horizontally in a matrix image. At the position of each pixel, for example, an avalanche photodiode is arranged.
  • the light receiving element 2 2 has, for example, a rectangular light receiving surface. ⁇ 0 2020/174 90 5 8 (: 170? 2020 /000997
  • the long side direction of the light receiving surface of the light receiving element 2 2 corresponds to the long side direction of the line beam B 10 in the target area.
  • the reflected light of the line beam B 10 is imaged on the light receiving surface of the light receiving element 22 by the light receiving lens 21 so as to extend along the long side direction of the light receiving surface.
  • the pixel position in the X-axis direction on the light-receiving surface corresponds to the position in the X-axis direction in the target region.
  • the pixel position in the Y-axis direction on the light-receiving surface corresponds to the position in the Y-axis direction in the target area. Therefore, it is possible to detect at which position in the X-axis direction and the Y-axis direction of the target area the object exists based on the position of the pixel where the received light signal is generated.
  • the light receiving element 22 may have a configuration in which a plurality of licensors in which pixels are arranged in the X-axis direction are arranged in the Y-axis direction. In this case, the position of the object to be detected in the Y-axis direction is specified in synchronization with the movement of the line beam.
  • the laser radar 1 includes a controller 31, a laser drive circuit 32, a mirror drive circuit 33, and a signal processing circuit 34 as a circuit configuration.
  • the controller 31 is provided with an arithmetic processing circuit such as a CPU (Cent ra LProcessing Unit) and a storage medium such as a ROM (Read Only Memory) and a RAM (Random Access Memory) and is preset. Control each part according to the program.
  • the laser drive circuit 3 2 causes each laser light source 1 1 a of the light emitting unit 1 1 to perform pulsed light emission under the control of the controller 3 1.
  • the mirror drive circuit 33 drives the optical deflector 14 under the control of the controller 31.
  • the optical deflector 14 rotates the mirror 14a about the rotation axis R1 to scan the line beam B10 in the direction of the short side of the line beam B10.
  • the signal processing circuit 34 controls the light reception signal of each pixel of the light receiving element 22 to the controller 3
  • the controller 31 can detect at which position in the X-axis direction of the target area the object exists, based on the position of the pixel where the light reception signal occurs. Also, the controller 3 1 sets the timing when the light emitting unit 11 is pulsed and the timing when the light receiving element 22 receives the reflected light from the target area, that is, the timing when the light receiving signal is received from the light receiving element 22. Based on the time difference between ⁇ 0 2020/174 90 5 9 (: 170? 2020 /000997
  • the distance to the object existing in the target area is acquired.
  • the controller 3 1 detects the presence or absence of an object in the target area by causing the light deflector 14 to scan the line beam mirror 10 while causing the light emitting unit 11 to emit light in pulses. , The position of the object and the distance to the object are measured. These measurement results are sent to the control unit on the vehicle side at any time.
  • the laser radar 1 is composed of a projection device 2 for projecting laser light (line beam mirror 10) and a light receiving device for receiving reflected light from the target area.
  • the structure of the light receiving device is omitted for convenience.
  • the projection device 2 and the light receiving device may be integrated with each other or may be separate bodies.
  • FIG. 2 ( 3 ) is an external perspective view showing the configuration of the projection device 2.
  • FIG. 2 ( ⁇ ) is a diagram showing the internal structure of the projection device 2 of FIG. 2( a) with the housing 100 removed.
  • the projection device 2 includes a housing 100 and a base.
  • the light emitting unit 11 shown in Fig. 1 (3), the fast axis cylindrical lens 12 and the slow axis cylindrical lens 1 3 and the optical deflector 14 are installed on the base 200.
  • a cover 300 is installed on the base 200 so as to cover the back side of the base 200.
  • the base 200 and the cover 300 are housed inside the housing 100.
  • the casing 100 has a rectangular parallelepiped shape.
  • the housing 100 includes a bottom plate 110, a front plate 120, two side plates 130, a back plate 140, and an upper plate 150.
  • the base 200 is installed on the upper surface of the bottom plate 110.
  • An opening 1 21 is formed in the upper part of the front plate 1 2 0 for passing the line beam mirror 1 0.
  • a guard 1 2 2 is installed on the inner surface of the front plate 1 20 so as to cover the opening 1 2 1 without gaps.
  • guards 1 2 2 are configured so as to become narrower as they go deeper. Guard 1
  • a light-transmitting plate 1 2 3 for transmitting the line beam mirror 10 is installed at the innermost part of the guard 1 2 2 without a gap.
  • An intake port 1 3 1 is formed at the bottom of the plate 1 3 0. Further, an exhaust port 1 51 is formed in a region of the upper plate 150 on the negative side of the shaft.
  • the light emitting unit 11 is installed on the front surface of the base 200, and further, the circuit board 4
  • a fast axis lens block 500 holding the fast axis cylindrical lens 12 and a slow axis lens block 600 holding the slow axis cylindrical lens 13 are mounted on the base 200. ..
  • the fast axis lens block 500 and slow axis lens block 600 are arranged so that the laser light emitted from the light emitting unit 11 passes through the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13 in order. It will be installed.
  • a support plate 700 for supporting the optical deflector 14 is installed on the back surface of the base 200 so that the mirror 1143 of the optical deflector 14 is opened in the positive axial direction. After that, the cover 300 is installed on the base 200.
  • a position adjusting mechanism is provided for each of the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13. That is, the fast axis lens block 500 and the slow axis lens block 600 each include a position adjusting mechanism.
  • the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13 are fixed at the adjusted position without using an adhesive.
  • an adhesive is used to fix these lenses, the adhesive undergoes thermal expansion and contraction in high temperature and low temperature environments, and these lenses are misaligned.
  • the desired optical characteristics cannot be obtained in the projection optical system 10.
  • a fatal defect may occur due to a slight positional deviation.
  • the adhesive is not used.
  • FIG. 3 is an exploded perspective view showing a structure of a structure 5 10 which constitutes a part of a position adjusting mechanism of the fast axis cylindrical lens 12.
  • X, S, and A axes that are orthogonal to each other are newly added.
  • Laser light is emitted from the laser light source 1 13 in the positive axial direction.
  • the X axis direction is the slow axis direction, and the V axis direction is the fast axis direction.
  • X, S, and C axes are newly added.
  • the structure 5 1 0 includes an upper holder 5 1 1, a lower holder 5 1 2, a holding plate 5 1 3, a bush 5 1 4, a leaf spring 5 15 and a coil spring 5 1 6, It is provided with an adjusting screw 5 17, a support screw 5 18, a coil panel 5 19 and a shaft member 5 20.
  • the upper holder 5 11 and the lower holder 5 12 are made of, for example, aluminum. These members may be made of materials other than aluminum.
  • the adjusting screw 5 17 and the coil panel 5 19 are made of a material having a small coefficient of thermal expansion.
  • the materials for the adjusting screw 5 17 and the coil spring 5 19 are preferably metallic materials, and preferably the same materials.
  • the adjusting screw 5 17 and the coil spring 5 19 are made of, for example, stainless steel alloy (3 11 3 ).
  • the adjusting screw 5 17 and the coil spring 5 19 may be made of another metal material such as iron.
  • the upper holder 5 11 holds the fast axis cylindrical lens 1 2.
  • the upper holder 5 11 has a plate shape.
  • the upper part of the upper holder 5 1 1 is thinner than the lower part.
  • the upper holder 5 11 is provided with an opening 5 1 1 3 for allowing laser light to pass therethrough and recesses 5 11 1 provided on both sides of the opening 5 1 1 3 in the direction of the main axis.
  • Two screw holes 5 1 1 0 arranged in the X-axis direction are provided on the outside of these recesses 5 1 1 and further, a boss 5 1 1 is provided on the outside of these screw holes 5 1 1 0. There is.
  • a cylindrical surface 5 1 16 is formed at the center position of the upper holder 5 11 in the X-axis direction. ⁇ 0 2020/174 90 5 12 (: 170? 2020 /000997
  • An arc-shaped collar portion 511 is formed below the cylindrical surface 511.
  • the cylindrical surface 5 11 16 is formed only on the surface of the upper holder 5 11 on the negative side of the axial direction, and the collar portion 5 11 1 is formed on both surfaces of the upper holder 5 11 on the positive and negative sides of the axial direction. ..
  • Both the X-axis positive side surface and the X-axis positive side surface of the plate portion 5 1 1 9 are planes parallel to the X _ plane.
  • a screw hole On the lower surface of the upper holder 511 is formed a screw hole extending in parallel with the so axis at the center position in the X axis direction.
  • the cylindrical surface 5 1 1 6 and the collar 5 11 1 are concentric with the screw hole.
  • the diameter of the screw hole is smaller than the diameter of the shaft portion 520 3 of the shaft member 520.
  • the screw hole is screwed into the threaded portion 520 of the shaft member 520.
  • the lower holder 5 1 1 2 constitutes a supporting portion that rotatably supports the upper holder 5 1 1.
  • the lower holder 5 12 has a block shape.
  • the lower holder 5 1 2 has a rectangular recess 5 1 2 3 in plan view, a screw hole 5 1 2 which penetrates the recess 5 1 2 3 from the biaxial positive side, and a recess 5 1 2 from the negative axial side. 3 is provided with a screw hole 5120.
  • the central axis of the screw hole 5 1 2 and the central axis of the screw hole 5 1 2 0 are aligned with each other.
  • the concave portion 5 1 2 3 constitutes a storage area for the plate portion 5 1 1 9 of the upper holder 5 11 and the coil spring 5 16.
  • a circular hole 512 is formed at the center of the lower holder 512 so as to penetrate vertically.
  • the hole 5 1 2 is provided with a small diameter portion at an intermediate position in the vertical direction, and is divided into an upper portion and a lower portion by the small diameter portion.
  • the diameter of the upper part of the hole 5 1 2 ⁇ 1 is the same as the diameter of the lower part.
  • a cylindrical bush 5 14 is fitted in the upper part of the hole 5 12. Further, a cylindrical coil spring 5 19 is housed in the lower part of the hole 5 12 2 1.
  • the bush 5 14 is a bearing of the shaft member 5 20.
  • the bush 5 14 may be omitted. In this case, the diameter of the upper portion of the hole 5 12 2 is adjusted to be substantially the same as the diameter of the shaft portion 52 03 of the shaft member 5 20.
  • a screw hole 5 1 2 6 is formed at the front right position, and two bosses 5 1 2 6 are provided at positions where the screw hole 5 1 2 6 is sandwiched in the X-axis direction. Chi is formed. Also, at the position on the right side of the front surface of the lower holder 5 12 it projects to the negative side of the axial direction. ⁇ 0 2020/174 90 5 13 (: 170? 2020 /000997
  • the protrusion 5 1 2 9 is formed. Further, a screw hole 5 12 is formed at the center of the side surface of the lower holder 5 12 on the negative axial side, and a cylindrical surface 5 1 2 is formed at the center of the lower surface of the lower holder 5 12. The central axis of the cylindrical surface 5 1 2 is parallel to the two axes.
  • the holding plate 5 13 is for mounting the fast-axis cylindrical lens 12 on the upper holder 5 11.
  • the holding plate 5 13 is made of a metal material and has a thin plate shape.
  • the holding plate 5 1 3 has a shape with rounded corners.
  • the holding plate 5 13 has an opening 5 1 3 3 for passing laser light in the center in the X-axis direction.
  • a hook portion 5 13 is formed from the central position of the lower side of the opening 5 1 3 3 in the positive direction of the axis.
  • the hook portion 5 13 is for pressing the fast axis cylindrical lens 1 2 against the inner surface of the recess 5 11 1 of the upper holder 5 1 1.
  • the holding plate 5 1 3 is formed with holes 5 1 3 0 through which the screws 5 2 1 are inserted, at positions facing the two screw holes 5 1 1 0 of the upper holder 5 1 1. Further, on both sides in the direction of the father axis of these holes 5130, holes 513 into which the boss 511 is fitted are formed.
  • the hole 513 on the negative side of the X-axis is circular, and the hole 5131 on the positive side of the X-axis is a long hole long in the X-axis direction.
  • the leaf spring 5 15 contacts the cylindrical surface 5 1 16 of the upper holder 5 11 to
  • the leaf spring 5 15 is made of a metal material and has a shape in which a thin plate is bent.
  • the plate panel 5 15 is provided with a panel portion 5 15 3 which is elastically deformable in the axial direction and a hole 5 15 for inserting the screw 5 24.
  • Holes 5 1 5 ⁇ are formed at positions where the holes 5 15 are sandwiched in the X-axis direction, into which the bosses 5 12 fit.
  • the hole on the positive side of the X-axis 5 1 500 is circular, and the hole on the negative side of the X-axis 5 1 5 Is a long hole that is long in the X-axis direction
  • the coil spring 5 16 is for biasing the upper holder 5 11 in the positive axial direction via the plate portion 5 1 19.
  • the coil spring 5 16 has a shape wound in a cylindrical shape.
  • the adjusting screw 5 17 is for adjusting the rotating position of the upper holder 5 11.
  • the adjusting screws 5 17 have a cylindrical shape.
  • the adjusting screw 5 17 is installed in the screw hole 5 12 of the lower holder 5 12 on the positive side of the axial direction.
  • the support screws 5 18 are for supporting the coil springs 5 16.
  • the support screws 5 18 are made of metallic material.
  • the support screws 5 18 are attached to the screw holes 5 12 of the lower holder 5 12 on the positive side of the axial direction.
  • the coil spring 5 19 is for biasing the upper holder 5 11 in the negative direction of the So axis through the shaft member 5 20.
  • the coil spring 519 has a shape wound in a cylindrical shape.
  • the shaft member 520 constitutes a support shaft for rotatably supporting the upper holder 511.
  • the shaft member 520 is made of a metal material.
  • the shaft member 5 2 0 includes a cylindrical shaft portion 5 2 0 3, and the threaded portion 5 2 0 spoon which extends to the distal end of the shaft portion 5 2 0 3, are formed at the base of the shaft portion 5 2 0 3 And an umbrella section 5200.
  • the structure 510 is assembled as follows.
  • the fast axis cylindrical lens 12 is inserted into the recess 5 of the upper holder 5 1 1.
  • the screws 5 21 are respectively inserted into the two holes 5 1 3 0 of the presser plate 5 13 to attach the presser plate 5 13 to the surface of the upper holder 5 11 on the negative side of the axial direction.
  • the two bosses 5 1 1 of the upper holder 5 11 are fitted into the two holes 5 1 3 of the holding plate 5 1 3.
  • the hook portion 5 13 of the holding plate 5 1 3 lifts the lower surface of the fast axis cylindrical lens 12 and presses the fast axis cylindrical lens 12 onto the upper surface of the recess 5 1 1. In this way, the first axial cylindrical lens 12 is mounted on the upper holder 5 11.
  • the bush 514 is fitted on the upper side of the hole 512 of the lower holder 512 from the positive side of the shaft. Also, the coil spring 5 19 is kneaded into the lower part of the hole 5 12 of the lower holder 5 12 from the V-axis negative side. In this state, the shaft member 520 is passed through the coil spring 519 and the bush 514 through the washer 523. Furthermore, the threaded portion 52 0 of the shaft member 5 20 is screwed into the screw hole formed on the lower surface of the upper holder 5 11 via the washer 5 2 2. At this time, the upper holder 5 ⁇ 2020/174905 15 15 (: 170? 2020/000997
  • the plate portion 5 1 1 9 of 11 is housed in the recess 5 1 2 3 of the lower holder 5 1 2. Further, the washer 5 22 is sandwiched between the upper surface of the lower holder 5 1 2 and the collar portion 5 1 1 of the upper holder 5 1 1. As a result, the upper holder 5 11 is rotatably supported by the lower holder 5 12 with the shaft member 5 20 as a support shaft.
  • the coil spring 519 is in a compressed state. Therefore, the elastic return force of the coil spring 5 19 causes the shaft member 5 20 to be biased toward the lower holder 5 12 in the negative direction of the axial direction, and the upper holder 5 11 1 It is urged in the negative direction of the 7th axis via 520. By this urging, the collar portion 5 1 1 of the upper holder 5 1 1 is pressed against the washer 5 2 2. As a result, the upper holder 511 can rotate stably without rattling in the axial direction.
  • the adjusting screw 5 17 was attached to the screw hole 5 12 from the positive side of the axial direction, and the plate 5 1 1 9 and the recess 5 1 accommodated in the recess 5 1 2 3 were also installed. Between 2 3 ⁇ axis negative side of the inner surface, is ⁇ in a state where the coil spring 5 1 6 is compressed. Further, the support screw 5 18 is mounted in the screw hole 5 120 from the negative side of the axial direction. At this time, the shaft portion of the support screw 5 18 enters the inside of the coil spring 5 16. As a result, the coil spring 516 is supported by the support screw 518.
  • the end portion of the adjusting screw 5 17 projects into the recess 5 1 2 3 and abuts on the surface of the plate portion 5 1 1 9 on the positive axial side. In this way, the plate portion 5 1 1 1 9 is sandwiched from both sides by the adjusting screw 5 1 7 and the coil spring 5 1 6. As a result, the upper holder 511 is positioned at the predetermined rotation position.
  • the washers 5 2 2 and 5 2 3 may be omitted.
  • the diameter of the cap portion 520 of the shaft member 520 is adjusted to be sufficiently larger than the inner diameter of the coil spring 515.
  • the support screws 5 18 may be omitted.
  • FIG. _ 1 is a rotation axis of the upper holder 5 11.
  • the rotation axis !_ 1 is parallel to the rotation axis.
  • the rotation axis !_ 1 is positioned at the center position of the upper holder 5 11 in the X axis direction, and is positioned at the center position of the fast axis cylindrical lens 12 in the X axis direction and the center axis direction.
  • Reference numeral 0 1 indicates the rotating direction of the upper holder 5 11.
  • the downward arrow indicates the direction of biasing by the coil spring 511 in FIG. 3, and the arrow attached to the coil spring 516 is the bias by the coil spring 516. Showing the direction of the force
  • adjust screw 5 17 is turned to adjust screw 5 1
  • the upper holder 5 11 After the rotational position adjustment, the upper holder 5 11 is fixed at a position where the bias of the coil spring 5 16 and the pressing of the adjusting screw 5 17 are in balance. Therefore, the fast axis cylindrical lens 12 can be fixed at the adjustment position without using an adhesive.
  • FIG. 6 shows a part of the position adjusting mechanism of the fast-axis cylindrical lens 1 2. ⁇ 0 2020/174 90 5 17 (: 170? 2020 /000997
  • FIG. 34 is an exploded perspective view showing the structure of a structure 5300 to be formed.
  • the structure 5300 is configured so that the structure 510 shown in Fig. 4 ( 3 ) and (b) and the structure 510 can be rotated about a rotation axis parallel to the axial direction. It is composed of a supporting portion for supporting.
  • Figure 6 shows the structure shown in Figure 4 ( 3 ), (b).
  • the structure 530 includes a support 531, a bush 532, a coil spring 533, a shaft member 534, a coil spring 5335, an adjusting screw 536, and a support. It is equipped with screws 5 3 7 and leaf springs 5 3 8.
  • the support 5 3 1 is made of, for example, aluminum.
  • Support 531 may be composed of materials other than aluminum.
  • the coil spring 5 3 5 and the adjusting screw 5 3 6 are made of a material having a small thermal expansion coefficient.
  • the materials of the coil spring 535 and the adjusting screw 536 are preferably metal materials, and preferably the same materials.
  • the coil spring 5 3 5 and the adjusting screw 5 3 6 are made of, for example, a stainless alloy (3 3).
  • the coil spring 5 3 5 and the adjusting screw 5 3 6 may be made of another metal material such as iron.
  • the support 531 rotatably supports the lower holder 512.
  • the support 5 3 1 includes a recess 5 3 1 3 with an open front surface, a screw hole 5 3 1 that penetrates the recess 5 3 1 3 from the positive side of the so axis, and a recess 5 3 1 3 from the negative side of the so axis. And a screw hole 5 3 1 0 through which The central axis of the screw hole 5 3 1 and the central axis of the screw hole 5 3 1 0 are aligned with each other.
  • the concave portion 5 3 1 3 constitutes a storage area for the protrusion 5 1 2 9 of the lower holder 5 1 2 and the coil spring 5 3 5.
  • a circular hole 531 penetrating in the front-rear direction is formed in the center of the support 531.
  • the hole 531 is provided with a small diameter portion at an intermediate position in the front-rear direction, and is divided into a front portion and a rear portion by the small diameter portion.
  • Hole 5 3 1 The diameter of the front part is the same as that of the rear part.
  • a cylindrical bush 532 is fitted in the front part of the hole 531. Further, a cylindrical coil spring 533 is housed in the rear portion of the hole 5331.
  • the bush 5 3 2 is a bearing of the shaft member 5 3 4.
  • the bush 532 may be omitted.
  • the diameter of the front part of hole 5 3 1 ⁇ 1 is ⁇ 0 2020/174 90 5 18 (: 170? 2020 /000997
  • the diameter is adjusted to be almost the same as 3 4 3.
  • the support 531 is provided with arms 5313 on both sides of the X axis positive and negative.
  • the front surface (the surface on the positive side of the axis) of these arms 5 3 1 ⁇ is It is a plane parallel to the plane.
  • inclined surfaces 531 which are inclined in mutually opposite directions. These two inclined planes 5 3 1 are inclined from the state parallel to the saw 2 plane by the same angle in the positive and negative directions of the X axis.
  • screw hole to which the screw 543 is fastened in the area on the negative side of the X-axis, there are a screw hole to which the screw 543 is fastened and a boss to be fitted into the two holes 5338 of the leaf spring 5338. Has been formed.
  • the shaft member 534 includes a shaft portion 5334, a screw portion 5334, and an umbrella portion 5340.
  • the configuration of the shaft member 5 34 is similar to that of the shaft member 5 20 shown in FIG.
  • the configurations of the coil springs 5 3 3 and 5 3 5 are similar to those of the coil springs 5 16 and 5 19 in FIG.
  • the panel panel 5 3 8 has a flat plate shape.
  • the plate panel 5 3 8 is provided with a spring portion 5 3 8 3 that is elastically deformable in the axial direction and a hole 5 3 8 bore for inserting the screw 5 4 3.
  • Holes 5 3 8 are formed at the positions sandwiching the holes 5 3 8 in the X-axis direction, respectively, into which bosses formed on the lower surface of the support 5 31 fit.
  • the hole 5380 on the positive side of the X-axis is circular, and the hole 5380 on the negative side of the X-axis is a long hole long in the X-axis direction.
  • the structure 5300 is assembled as follows.
  • a bush 532 is fitted in the front portion of the hole 531 of the support 531 from the biaxial positive side. Further, the coil spring 533 is kneaded into the rear portion of the hole 531 of the support 531 from the negative side of the biaxial. In this state, the shaft member 534 is passed through the coil spring 533 and the bush 532 through the washer 542. Furthermore, the threaded portion 5 3 4 of the shaft member 5 3 4 is screwed through the washer _ 5 4 1 to the screw hole 5 1 2 II (Fig. (See (a)).
  • the washer 5 4 2 is located on the negative side of the 2nd axis of the lower holder 5 1 2. ⁇ 0 2020/174905 19 ⁇ (: 170? 2020/000997
  • the lower holder 5 12 is rotatably supported on the support 5 31 by using the shaft member 5 34 as a spindle.
  • the coil spring 533 is in a compressed state. Therefore, due to the elastic return force of the coil spring 533, the shaft member 534 is biased in the negative direction of the two axes with respect to the support body 531, and along with this, the lower holder 512 moves to the shaft member 531. It is biased in the negative direction of the 2nd axis via 5 3 4. By this urging, the lower holder 5 1 2 is pressed against the washer 5 4 2. As a result, the lower holder 5 12 can be stably rotated in the biaxial directions without rattling.
  • the adjusting screws 5 3 6 were attached to the screw holes 5 3 1 from the positive side of the socket, and the projections 5 1 2 9 and the recesses 5 3 3 accommodated in the recesses 5 3 1 3 were further mounted.
  • a coil spring 5 3 5 is inserted in a compressed state between 1 3 and the inner surface on the negative side of the So axis.
  • support screws 537 are installed in the screw holes 5310 from the negative side of the So axis. At this time, the shaft portion of the support screw 5 37 enters the inside of the coil spring 5 35. As a result, the coil spring 535 is supported by the support screw 537.
  • the end of the adjusting screw 5 3 6 projects into the recess 5 3 1 3 and contacts the surface of the projection 5 1 2 9 on the positive side of the axis. In this way, the protrusion 5 1 2 9 is sandwiched from both sides by the adjusting screw 5 3 6 and the coil spring 5 3 5. As a result, the lower holder 5 12 is positioned at the predetermined rotation position.
  • the lower holder 5 12 is elastically biased in the direction perpendicular to the rotation axis at the joining position between the lower holder 5 12 and the shaft member 5 34.
  • the washers 54 1 and 542 may be omitted.
  • the diameter of the umbrella portion 534 of the shaft member 534 is adjusted to be sufficiently larger than the inner diameter of the coil spring 533. Further, when the coil panel 535 can be arranged without fail, the support screw 537 may be omitted.
  • Figs. 7(3) and 7() are perspective views showing a state in which the structure 510 shown in Fig. 6 is assembled. 7(3) and 7(13), for the sake of convenience, only the lower holder 5 12 of the structure 5 10 shown in FIGS. 4(3) and 4(3) is shown.
  • 1_2 is the rotating shaft of the lower holder 5 12.
  • the axis of rotation 1-1 is parallel to the two axes.
  • the rotation axis !_ 2 is orthogonal to the rotation axis 1_ 1 shown in FIG. 02 indicates the rotating direction of the lower holder 5 12.
  • the adjusting screw 536 is rotated to adjust the adjusting screw 53.
  • the fast axis cylindrical lens 12 can be fixed at a predetermined adjustment position in the 02 direction without using an adhesive.
  • FIG. 8 is an exploded perspective view showing a structure of a structure 550 which constitutes a part of a position adjusting mechanism of the fast axis cylindrical lens 12.
  • the structure 550 is composed of the structure 530 shown in Fig. 7 ( 3 ) and (b), and a support portion that supports the structure 530 so as to be displaceable in the V-axis direction.
  • FIG. 8 shows only the support 531 of the structure 530 shown in FIGS. 7 ( 3 ) and (b). ⁇ 0 2020/174 90 5 21 (: 170? 2020 /000997
  • the structure 5550 consists of a supporting frame 551, a pair of wall members 552, two ball plungers 553, a coil spring 554, an adjusting screw 555, and a supporting screw. 5 5 6 and a pair of shafts 5 5 7.
  • the support frame 5 51 and the wall member 5 52 are made of, for example, aluminum.
  • the support frame 5 51 and the wall member 5 52 may be made of a material other than aluminum.
  • the coil panel 554 and the adjusting screw 555 are made of a material having a small thermal expansion coefficient.
  • the material of the coil spring 5554 and the adjusting screw 5555 is preferably a metal material, and preferably the same material as each other.
  • the coil spring 5554 and the adjusting screw 5555 are made of, for example, a stainless alloy (3113).
  • the coil spring 5554 and the adjusting screw 5555 may be made of another metal material such as iron.
  • the support frame 5 51 is provided with pedestals 5 5 1 3 on both sides of the X axis positive and negative.
  • Base 5
  • the front surface of 5 18 (the surface on the positive side of the axis) is a plane parallel to the X_plane.
  • an opening 551 penetrating in the biaxial direction is formed in the back part of the support frame 551, and a concave part 551, whose front side is open, is formed below the opening 551. ..
  • the recessed portion 5 5 1 6 has a screw hole 5 5 1 penetrating therethrough in the axial direction.
  • the support frame 5 51 is formed with a collar portion 5 5 19 projecting directly above the concave portion 5 5 1 6, and this collar portion 5 5 19 has a screw hole 5 5 9 penetrating in the axial direction. 1 II is formed.
  • the central axes of the screw holes 5 51 and the central axes of the screw holes 5 51 coincide with each other.
  • inclined surfaces 551 are formed at the positive and negative ends of the X axis, respectively, which are inclined in mutually opposite directions. These two slopes 5 5 1 From the state parallel to the two planes, they are inclined by the same angle in the positive and negative directions of the X axis.
  • the support frame 5 51 has a pair of shafts 5 at the corner positions on the inner surface of the back.
  • the shuffle 5 57 is made of a metal material and has a cylindrical shape.
  • the wall member 552 is made of a plate-shaped member having a predetermined thickness.
  • the wall member 5 52 has a screw hole 5 52 3 and two holes 5 52 and 5 52, which penetrate therethrough in the two axial directions.
  • a ball plunger 553 is screwed into the screw hole 5523, and a screw 559 is inserted into the hole 552.
  • the structure 550 is assembled as follows.
  • the coil spring 5 54 is housed in the recess 5 51 6 of the support frame 5 51. After that, the coil spring 554 is sandwiched between the lower surface of the support 531 and the bottom surface of the support frame 551 in a compressed state so that the support 531 is supported. It is housed inside. At this time, the support 531 is biased upward by the coil spring 554, and the upper surface of the support 531 is pressed against the lower surface of the collar portion 5515 by this bias. Further, support screws 556 are attached to the screw holes 551 from the negative side of the So axis. At this time, the shaft portion of the support screw 5 5 6 enters the inside of the coil spring 5 5 4. As a result, the coil spring 554 is supported by the support screw 556. The supporting screws 5 56 may be omitted as long as the coil spring 5 54 is not displaced.
  • the ball plunger 5 5 3 has a ball placed at the tip of the support 5 3
  • the arm 5 1 of 3 1 is brought into contact with the front surface of the arm 5 3 1 6 and screwed so that the support 5 3 1 is pressed with a predetermined load.
  • the pair of inclined surfaces 531 formed on the back surfaces of the two arms 531 are pressed against the pair of shafts 557 with a predetermined load.
  • the load exerted by the ball plunger 553 is adjusted so that the support 531 can move along the shaft 557.
  • the adjusting screw 5 5 5 is attached to the screw hole 5 5 1.
  • the end portion of the adjusting screw 5 55 projects from the lower surface of the collar portion 5 5 19 and contacts the upper surface of the support body 5 3 1.
  • the support body 5 3 1 is vertically sandwiched by the adjusting screw 5 5 5 and the coil spring 5 5 4.
  • the support 531 is positioned at a predetermined position in the vertical direction (so-axial direction).
  • FIG. 9 ( 3 ) is a perspective view showing a state in which the support 531 is attached to the support frame 551.
  • FIG. 9 ( ⁇ ) is a diagram showing a state in which the structure 5300 and the structure 5130 are attached to the support 531.
  • the mouth 1 indicates the linear movement direction of the support 531.
  • the upward arrow indicates the direction of bias by the coil spring 5 54.
  • the support 531 is fixed at a position where the bias of the coil spring 554 and the pressing of the adjustment screw 555 are balanced. Therefore, the fast-axis cylindrical lens 12 can be fixed at a predetermined adjustment position in the so-axis direction without using an adhesive.
  • Fig. 10 is an exploded perspective view showing the overall configuration of the position adjusting mechanism 5 6 0 for the fast axis cylindrical lens 12.
  • the position adjusting mechanism 5 60 is composed of the structure 5 50 shown in FIG.
  • FIG. 10 only the support frame 5 51 of the structure 5 30 shown in FIG. 9 (slung) is shown.
  • the position adjusting mechanism 5 6 0 includes a support frame 5 6 1, a pair of holding members 5 6 2, two ball plungers 5 6 3, a coil spring 5 6 4, an adjusting screw 5 6 5, It is provided with support screws 5 6 6 and a pair of shafts 5 5 7.
  • the support frame 5 61 and the holding member 5 62 are made of, for example, aluminum.
  • the support frame 5 61 and the pressing member 5 62 may be made of a material other than aluminum.
  • the coil panel 564 and the adjusting screw 565 are made of a material having a small coefficient of thermal expansion.
  • the materials of the coil spring 5 64 and the adjusting screw 5 65 are preferably metallic materials, and preferably the same materials as each other.
  • the coil spring 5 64 and the adjusting screw 5 65 are made of, for example, stainless alloy (3 11 3).
  • the coil spring 5 64 and the adjusting screw 5 65 may be made of another metal material such as iron.
  • the support frame 5 61 has a recessed part with the front side opened at the center position of the back plate part 5 61 3.
  • a 5 6 1 urn is formed, and a screw hole 5 610 that penetrates in the axial direction is formed on the back surface of this recess 5 6 1 urn.
  • a screw hole 5 61 6 is formed in the front plate portion 5 61 of the support frame 5 61 at a position facing the screw hole 5 61 0.
  • two screw holes 561 are fixed on the upper surface of the positive and negative X-axis ends of the support frame 561, and two screw holes 561 are formed on the outside of these screw holes.
  • Boss 5 6 1 9 is formed.
  • shafts 5 6 7 are installed parallel to the axis at each corner position of the X axis positive and negative. Each of these shafts 5 6 7 is locked by a screw 5 6 8 while being pressed against a corner.
  • the shaft 567 is made of a metal material and has a cylindrical shape.
  • the pressing member 5 62 is made of a hook-shaped member having a base 5 6 2 3 and a hook 5 62.
  • the hook 5 6 2 is provided with a screw hole 5 62 0 penetrating in the axial direction, and the base 5 6 2 3 is provided with two holes 5 6 2 for passing the screws 5 6 9 and a boss.
  • Two holes 5 6 2 6 are formed to fit 5 6 1. Screw ⁇ 0 2020/174905 25 ⁇ (: 170? 2020 /000997
  • a ball plunger 553 is screwed into the hole 5620.
  • the position adjusting mechanism 560 is assembled as follows.
  • the ball placed at the tip is the supporting frame 5
  • adjusting screws 5 6 5 are attached to the screw holes 5 6 1 6.
  • the end portion of the adjusting screw 565 projects from the inner side surface of the front plate portion 561 and abuts on the front upper surface of the support frame 551.
  • the support frame 5 51 is sandwiched in the front and back by the adjusting screw 5 6 5 and the coil panel 5 64.
  • the support frame 551 is positioned at a predetermined position in the front-rear direction (biaxial direction).
  • Fig. 11 is a diagram showing a state in which the position adjusting mechanism 560 is assembled. ⁇ 0 2020/174 90 5 26 (: 170? 2020 /000997
  • the mouth 2 indicates the linear movement direction of the support frame 5 51.
  • the support frame 5 5 1 pushes the adjusting screw 5 6 5 and biases the coil spring 5 6 4 (see Fig. 10).
  • the support frame 5 51 moves linearly in the 0 2 direction, and along with this, the fast-axis cylindrical lens 1 2 moves linearly in the 0 2 direction. In this way, the position of the fast axis cylindrical lens 1 2 in the 0 2 direction is adjusted.
  • the support frame 551 is fixed at a position where the bias of the coil panel 564 (see Fig. 10) and the pressing of the adjustment screw 565 are balanced. Therefore, the fast axis cylindrical lens 12 can be fixed at a predetermined adjustment position in the axial direction without using an adhesive.
  • the fast axis cylindrical lens 1 2 is moved to the 0 1 direction, the 0 2 direction, and the mouth 1. Can be displaced in any direction. Thereby, the position of the fast axis cylindrical lens 12 can be adjusted in these directions. Therefore, according to the position adjusting mechanism 560 according to the present embodiment, by rotating the adjusting screws 5 17 5, 5 3 6, 5 5 5, 5 65, the fast axis cylindrical lens 1 2 is moved to 0 1 The orientation can be adjusted in the direction, 0 2 direction, mouth 1 direction and 0 2 direction.
  • Fig. 12 is an exploded perspective view showing the structure of a structure 6 10 which constitutes a part of the position adjusting mechanism of the slow-axis cylindrical lens 13.
  • the structure 6 1 0 includes a holder 6 1 1, a support 6 1 2, a shaft 6 1 3, a bush 6 1 4, a coil spring 6 1 5, a leaf spring 6 1 6 and a coil spring 6 1. 1 7, a holding member 61 8, an adjusting screw 6 19, a supporting screw 5 18 and a supporting screw 6 20.
  • the holder 6 11, the support 6 12 and the holding member 6 18 are, for example, ⁇ 0 2020/174 90 5 27 (: 170? 2020 /000997
  • the coil panel 6 17 and the adjusting screw 6 19 are made of a material having a small coefficient of thermal expansion.
  • the material of the coil spring 6 17 and the adjusting screw 6 19 is preferably a metallic material, and preferably the same material as each other.
  • the coil spring 6 17 and the adjusting screw 6 19 are made of, for example, stainless steel alloy (3 11 3).
  • the coil spring 6 17 and the adjusting screw 6 19 may be made of another metal material such as iron.
  • the holder 61 1 includes a rod-shaped rotating portion 6 11 3 long in the X-axis direction. Rotating part
  • the back surface of 6 1 18 is a plane parallel to the X _ plane.
  • An opening 611 1 13 penetrating in the axial direction is formed at the central position of the rotating portion 6 1 18 in the direction of the main axis.
  • the slow axis cylindrical lens 1 3 is fitted into the opening 6 1 1 13 and mounted.
  • a holding plate for pressing the slow axis cylindrical lens 13 against the inner side surface of the opening 6 1 1 13 may be attached to the holder 6 1 1.
  • the holder 611 is provided with a rectangular parallelepiped bearing portion 611 at the end on the positive side of the X axis.
  • the bearing 611 is formed with a circular hole 611 penetrating in the two axial directions.
  • a cylindrical bushing 6 1 4 is fitted into the hole 6 1 1.
  • the bush 6 14 is a bearing for the shaft 6 13.
  • the bush 6 14 may be omitted.
  • the diameter of the hole 6 11 is adjusted to be approximately the same as the diameter of the shaft 6 13.
  • a cylindrical surface 611 16 is formed on the upper surface of the bearing 611.
  • the central axis of the cylindrical surface 6 11 ⁇ is parallel to the outer axis.
  • the support 6 1 2 has an inner surface With a rear wall 6 1 2 3 parallel to.
  • the rear wall 6 1 2 3 is provided with a rectangular opening 6 1 2 which penetrates in the axial direction.
  • the openings 6 1 2 13 are for passing laser light.
  • the support 6 12 has two front walls 6 1 2 0 facing the back wall 6 1 2 3 .
  • the inner surface of the front wall 6 1 2 0 is a plane parallel to the X_so plane.
  • the rear wall 6 1 2 8 and the two front walls 6 1 2 0 form an accommodating portion 6 1 2 for accommodating the rotating portion 6 1 1 3 of the holder 6 1 1.
  • the accommodating portion 6 1 2 has a screw hole that penetrates vertically in the end portion on the negative side of the X axis. ⁇ 0 2020/174 90 5 28 (: 170? 2020 /000997
  • the support 6 12 is provided with a recess 6 1 2 6 at the end on the positive side of the X axis for accommodating the bearing 6 1 1 0 of the holder 6 11.
  • the recessed portion 6 1 2 6 is larger than the bearing portion 6 1 1 0 in the X-axis direction and the axial direction.
  • the recess 6 1 2 6 is connected to the accommodating portion 6 1 2.
  • the cutout 6 1 2 extends in the axial direction.
  • the width of the notch 6 1 2 ⁇ is approximately the same as the diameter of the shaft 6 1 3.
  • a screw hole 6 1 2 9 for locking the shaft 6 1 3 with a screw 6 2 4 is formed on the outer side of the recess 6 1 2 6. Further, screw holes 612, 612" and bosses 612I, 61211 ⁇ are formed on the upper surface of the support 612.
  • Inclined surfaces 6 1 2 are formed on the front surfaces of the two front walls 6 1 2 0, respectively. These slopes 6 1 2 It is tilted in the negative direction by the same angle from the state parallel to the plane. Further, an inclined surface 6 1 2 is also formed on the rear surface of the rear wall 6 1 2 3. The inclination direction of the inclined surface 6 1 2 is opposite to the inclination direction of the inclined surface 6 1 2.
  • the panel panel 6 16 has a flat plate shape.
  • the plate panel 6 16 is provided with a spring portion 6 16 3 that is elastically deformable in the axial direction and a hole 6 16 for receiving the screw 6 25.
  • a hole 6116 is formed on the biaxial negative side of the hole 6116, into which the two bosses 612 formed on the upper surface of the support 612 fit.
  • the hole 610 on the positive side of the axis is circular, and the hole 610 on the side of the negative axis is a long hole that is long in the axial direction.
  • the pressing member 618 is a plate-shaped member having a predetermined thickness. Holding member
  • 6 18 has a hole 6 1 8 3 penetrating therethrough in the axial direction, a screw hole 6 18 and a hole 6 18 0.
  • a screw 6 2 6 is inserted into the hole 6 1 8 3 and a support screw 6 2 0 is screwed into the screw hole 6 18 3.
  • the boss 6 1 2 1 ⁇ of the support member 6 1 2 is fitted into this.
  • the structure 610 is assembled as follows.
  • the coil spring 6 1 5 is in a compressed state, and the rotating part 6 1 1 3 of the holder 6 1 1 is attached to the support 6 1. It is accommodated in the storage part 6 1 2 of 2.
  • the washers 6 2 1, 6 2 2 and 6 2 3 may be omitted.
  • the screw 6 2 5 is passed through the hole 6 1 6 of the leaf spring 6 16 and the leaf spring 6 1 6 is screwed into the screw hole 6 1 2 on the upper surface of the support body 6 1 2. ..
  • the two bosses 6 1 2 1 are fitted into the two holes 6 1 6 0 of the leaf spring 6 1 6 respectively, and the leaf panel 6 1 6 is positioned.
  • the spring portion 6 1 6 3 of the leaf spring 6 16 is bent in the positive direction of the axis, the cylindrical surface 6 1 1 6 of the holder 6 11 is pressed. As a result, the rotation of the holder 6 11 about the shaft 6 13 is stabilized.
  • the screws 6 2 6 are passed through the holes 6 1 8 3 of the holding member 6 1 8, and the holding member 6 1 8 is screwed into the screw holes 6 1 2" on the upper surface of the support 6 1 2. It At this time, the two bosses 6 1 2 on the upper surface of the support member 6 1 2 are fitted into the two holes 6 1 8 0 of the holding member 6 1 8, respectively, and the holding member 6 1 8 is positioned.
  • the coil spring 617 is kneaded between the upper surface of the holder 611 and the lower surface of the pressing member 618 in a compressed state.
  • the support screw 620 is attached to the screw hole 618 from the positive side of the shaft.
  • the shaft portion of the support screw 620 enters the inside of the coil spring 617.
  • the coil spring 617 is supported by the support screw 620. Misalignment of coil springs 6 1 7 ⁇ 0 2020/174 905 30 ⁇ (: 170? 2020 /000997
  • the support screw 620 may be omitted.
  • the adjusting screw 6 1 9 is attached to the screw hole formed at the end of the accommodating portion 6 12 on the negative side of the shaft from the negative side of the shaft.
  • the end portion of the adjusting screw 619 projects into the accommodating portion 612 and abuts the lower surface of the rotating portion 611-3 of the holder 611.
  • the holder 6 11 is vertically sandwiched by the adjusting screw 6 19 and the coil spring 6 17.
  • the holder 611 is positioned at a predetermined rotation position in the vertical direction (so-axial direction).
  • Fig. 13 (3) and ( ⁇ ) are a perspective view and a plan view showing the assembled state of the structural body 610 shown in Fig. 12.
  • 1_3 is the rotation axis of the holder 6 11.
  • the rotation axes 1-3 are parallel to the outer axis.
  • the rotation axis 1_3 coincides with the central axis of the shaft 613.
  • Reference numeral 03 indicates the rotation direction of the holder 611.
  • the holder 6 1 1 In the state after the rotational position is adjusted, the holder 6 1 1 is fixed at a position where the bias of the coil spring 6 17 and the pressing of the adjusting screw 6 19 are balanced. Therefore, the slow-axis cylindrical lens 13 can be fixed at a predetermined adjustment position in the 0 3 direction without using an adhesive.
  • FIGS. 14(3) and 14() are perspective views showing the configuration of the position adjusting mechanism 6300 of the slow-axis cylindrical lens 13.
  • the position adjusting mechanism 630 has the structure 610 shown in Fig. 13 ( 3 ) and (b),
  • the structure 6 10 is housed in the support member.
  • two shafts 631, 632, a coil spring 633, an adjusting screw 634, and two ball plungers 635 are mounted on the support member.
  • the support member may be configured by a single support frame, or may be configured by combining a plurality of members.
  • the coil panel 633 and the adjusting screw 634 are made of a material having a small thermal expansion coefficient.
  • the materials of the coil spring 633 and the adjusting screw 634 are preferably metallic materials, and preferably the same materials as each other.
  • the coil spring 633 and the adjusting screw 634 are made of, for example, a stainless alloy (3113).
  • the coil panel 633 and the adjusting screw 634 may be made of another metal material such as iron.
  • the support member is made of, for example, aluminum.
  • the support member may be made of a material other than aluminum.
  • the structure 610 is housed in the support member so that the inclined surfaces 612 and 612n contact the shafts 631 and 632, respectively.
  • the two ball plungers 635 are screwed to the support member.
  • the ball arranged at the tip of the ball plunger 635 comes into contact with the surface of the support member 6 1 2 on the negative 7- axis side.
  • the surface of the support 6 12 on the negative side in the so-axis direction is a plane parallel to the X-plane.
  • the ball plunger 635 is screwed to the support member so that a predetermined load is applied to the support body 6 12.
  • the structure 610 is supported by the support member so as to be able to move linearly in the direction of the port 3 parallel to the X-axis direction.
  • the coil panel is adjusted so that the support 6 12 is elastically biased in the positive direction of the X axis.
  • the support 6 12 is sandwiched in the X-axis direction by the adjusting screw 6 34 and the coil spring 6 33. As a result, the support body 6 12 is positioned at a predetermined position in the X-axis direction.
  • the support body 6 1 2 is fixed at a position where the bias of the coil panel 6 3 3 and the pressing of the adjustment screw 6 3 4 are in balance with each other. Therefore, the slow axis cylindrical lens 13 can be fixed at a predetermined adjustment position in the 0 3 direction (X axis direction) without using an adhesive.
  • the slow axis cylindrical lens 13 can be displaced in the 0 3 direction by turning the adjusting screw 6 19. Therefore, according to the position adjusting mechanism 630 according to the present embodiment, the slow axis cylindrical lens 1 3 is moved in the 0 3 direction and the mouth 3 by turning the adjusting screws 6 1 9 and 6 3 4. The position can be adjusted in any direction.
  • the holding part is fixed. Therefore, the optical elements (the fast axial cylindrical lens 12 and the slow axial cylindrical lens 13) can be fixed at the adjusting position without using an adhesive. In this way, the optical elements (fast axis cylindrical lens 12 and slow axis cylindrical lens 13) can be fixed without using an adhesive, so that the optical element can be positioned at the prescribed position without misalignment even in high temperature and low temperature environments. Can be fixed to.
  • an optical element with high positional shift sensitivity (fast-axis cylindrical lens 1
  • Slow-axis cylindrical lens 1 3) can be stably positioned at a predetermined adjustment position without displacement. As a result, the reliability of the laser radar 1 can be maintained high.
  • the optical elements (the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13) can be stably positioned at a predetermined adjustment position even in a high temperature or low temperature environment.
  • the optical element (the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13) can be stably positioned at a predetermined adjustment position even in a high temperature or low temperature environment.
  • the holding parts (upper holder 511, lower holder 512, holder 611) are rotatably supported by the supporting parts (lower holder 512, supports 531,6112).
  • the biasing members coil springs 5 1 9, 5 3 3, 6 1 5) that elastically press the holding portion against the support portion are arranged in a direction parallel to the rotation axis of the holding portion. As a result, the holding portion can be stably rotated without rattling.
  • the holding part support The body 531, the supporting frame 551, and the support body 612) are supported so as to be linearly displaceable.
  • a pair of inclined surfaces inclined surface 5 3 1 ⁇ , inclined surface 5 5 1 ⁇ , inclined surface 6 1) that are inclined in a direction perpendicular to the direction of linear displacement and the inclination directions are different from each other. 2
  • the position adjustment mechanisms 5 60 and 6 30 adjust the positions of the fast axis cylindrical lens 12 and the slow axis cylindrical lens 13;
  • the optical element to be adjusted is not limited to this.
  • the receiving lens 2 1 on the receiving optical system 20 side ⁇ 0 2020/174 90 5 35 (: 170? 2020 /000997
  • the optical element whose position is adjusted is not limited to the optical element arranged in the projection optical system 10 of the laser radar 1, but may be an optical element arranged in another device.
  • the panel sandwiching the holding portion with the adjusting screw is a coil panel, but this panel does not necessarily have to be a coil panel.
  • a board panel may be used as this panel.
  • the part and structure of the holding part sandwiched by the adjusting screw and the panel are not limited to those shown in the above embodiment, and various modifications can be made. Further, the shape and structure of each member are not limited to those shown in the above embodiment, and various changes can be made.
  • the projection optical system 10 is configured to scan the line beam mirror 10 in the short side direction.
  • the projection optical system 10 is configured by another method. May be.
  • the projection optical system 10 may be a flash type configuration that projects light onto the entire target area at once.
  • the number of laser light sources 11 13 is not limited to the number in the above embodiment, and various changes can be made.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

L'invention concerne un mécanisme de positionnement comprenant : une partie de retenue (support supérieur (511)) pour retenir un élément optique (lentille cylindrique à axe rapide (12)) ; une partie de support (support inférieur (512)) pour supporter la partie de retenue de manière à pouvoir être déplacée ; un ressort (ressort hélicoïdal (516)) pour solliciter élastiquement la partie de retenue dans une direction dans laquelle la partie de retenue peut être déplacée ; et une vis (517) qui, en coopération avec le ressort (ressort hélicoïdal (516)), serre la partie de retenue La vis (517) est, au niveau de son extrémité avant, pressée contre une section de plaque (511g) de la partie de retenue (support supérieur (511)) lorsqu'elle est sollicitée par le ressort (ressort hélicoïdal (516)), et est monté sur la partie de support (support inférieur (512)) de manière à pouvoir être déplacé dans une direction axiale par rotation.
PCT/JP2020/000997 2019-02-28 2020-01-15 Mécanisme de positionnement d'élément optique et radar laser Ceased WO2020174905A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-035289 2019-02-28
JP2019035289 2019-02-28

Publications (1)

Publication Number Publication Date
WO2020174905A1 true WO2020174905A1 (fr) 2020-09-03

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Country Link
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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120680U (fr) * 1975-03-26 1976-09-30
JPH04124243U (ja) * 1991-04-25 1992-11-12 シヤープ株式会社 液晶プロジエクター装置
JPH0684294A (ja) * 1992-07-29 1994-03-25 Teac Corp 記録再生装置
JP2000292651A (ja) * 1999-04-08 2000-10-20 Koshin Giken Kk 光ファイバーコネクター用部品及びその製造方法
JP2002169196A (ja) * 2000-12-01 2002-06-14 Asahi Optical Co Ltd レンズ調整機構
KR20040027181A (ko) * 2002-09-27 2004-04-01 한국과학기술원 광픽업 구동기
JP2012173342A (ja) * 2011-02-17 2012-09-10 Mitsubishi Electric Corp 光学素子の角度調整機構及び投写型画像表示装置
JP2016009109A (ja) * 2014-06-25 2016-01-18 株式会社リコー 光学ユニット、及び画像表示装置
CN205120965U (zh) * 2015-11-13 2016-03-30 武汉理工大学 一种基于mems微镜的激光雷达
JP3203580U (ja) * 2016-01-26 2016-04-07 株式会社島津製作所 光学素子保持機構
JP2017090488A (ja) * 2015-11-02 2017-05-25 株式会社リコー 照明装置および画像投射装置
CN207372462U (zh) * 2017-10-24 2018-05-18 北京控制工程研究所 一种铝材电火花线切割加工弹性顶尖送电装置

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120680U (fr) * 1975-03-26 1976-09-30
JPH04124243U (ja) * 1991-04-25 1992-11-12 シヤープ株式会社 液晶プロジエクター装置
JPH0684294A (ja) * 1992-07-29 1994-03-25 Teac Corp 記録再生装置
JP2000292651A (ja) * 1999-04-08 2000-10-20 Koshin Giken Kk 光ファイバーコネクター用部品及びその製造方法
JP2002169196A (ja) * 2000-12-01 2002-06-14 Asahi Optical Co Ltd レンズ調整機構
KR20040027181A (ko) * 2002-09-27 2004-04-01 한국과학기술원 광픽업 구동기
JP2012173342A (ja) * 2011-02-17 2012-09-10 Mitsubishi Electric Corp 光学素子の角度調整機構及び投写型画像表示装置
JP2016009109A (ja) * 2014-06-25 2016-01-18 株式会社リコー 光学ユニット、及び画像表示装置
JP2017090488A (ja) * 2015-11-02 2017-05-25 株式会社リコー 照明装置および画像投射装置
CN205120965U (zh) * 2015-11-13 2016-03-30 武汉理工大学 一种基于mems微镜的激光雷达
JP3203580U (ja) * 2016-01-26 2016-04-07 株式会社島津製作所 光学素子保持機構
CN207372462U (zh) * 2017-10-24 2018-05-18 北京控制工程研究所 一种铝材电火花线切割加工弹性顶尖送电装置

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