WO2020175236A1 - Guide d'ondes optique, circuit optique planaire et module de source de lumière - Google Patents

Guide d'ondes optique, circuit optique planaire et module de source de lumière Download PDF

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Publication number
WO2020175236A1
WO2020175236A1 PCT/JP2020/006237 JP2020006237W WO2020175236A1 WO 2020175236 A1 WO2020175236 A1 WO 2020175236A1 JP 2020006237 W JP2020006237 W JP 2020006237W WO 2020175236 A1 WO2020175236 A1 WO 2020175236A1
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WO
WIPO (PCT)
Prior art keywords
waveguide
region
optical
optical waveguide
central axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/006237
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English (en)
Japanese (ja)
Inventor
俊樹 松岡
松原　孝宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2021502017A priority Critical patent/JP7163478B2/ja
Publication of WO2020175236A1 publication Critical patent/WO2020175236A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Definitions

  • the present disclosure relates to an optical waveguide, a planar optical circuit, and a light source module.
  • the polymer optical waveguide described in Patent Document 1 includes a strip-shaped core layer.
  • the band width of the core layer is continuously reduced in the traveling direction of the guided light from the incident end to the emitted end of the guided light.
  • Patent Document 1 Patent No. 4 2 0 4 3 6
  • the optical waveguide of the present disclosure includes: a first waveguide extending from a first end portion to a second end portion; a light guide side of the first waveguide; and a light incident side of the first waveguide.
  • a plurality of second waveguides connected to the end portion and a light emitting portion located at the second end portion are provided.
  • the first waveguide has a first region in which the width increases in a direction perpendicular to the first central axis of the first waveguide as the distance from the first end portion increases, and Also has a second region that is located away from the first end and that the width decreases with increasing distance from the first region.
  • a planar optical circuit according to the present disclosure includes an optical waveguide according to the present disclosure described above, a cladding positioned so as to surround the optical waveguide, and the optical waveguide and the cladding. ⁇ 2020/175 236 2 ⁇ (: 170? 2020 /006237
  • a light source module includes the above-described planar optical circuit according to the present disclosure, a lens that faces the emitting portion, and a light incident side of the plurality of second waveguides.
  • An optical semiconductor element located opposite to the end portion, the planar optical circuit, the lens, and a container for accommodating the optical semiconductor element are provided.
  • FIG. 1 A perspective view showing an optical waveguide and a planar optical circuit according to an embodiment of the present disclosure.
  • FIG. 2 is a plan view of the optical waveguide and the planar optical circuit shown in FIG.
  • FIG. 3 is an enlarged view of the first waveguide in the optical waveguide shown in FIG.
  • FIG. 4 is an enlarged view of the first region in the first waveguide shown in FIG.
  • FIG. 5 An enlarged view of a second region in the first waveguide shown in FIG. 3.
  • FIG. 6 is a perspective view showing a light source module according to an embodiment of the present disclosure.
  • FIG. 7 is a plan view of the light source module shown in FIG. 6 with a lid omitted. MODE FOR CARRYING OUT THE INVENTION
  • the optical waveguide according to the embodiment of the present disclosure will be described in detail with reference to the drawings.
  • the optical waveguides of the present disclosure may have any configuration not shown in the referenced figures.
  • the dimensions of the components in the figure are not a faithful representation of the actual dimensions and proportions of the components.
  • the optical waveguide 1 illustrated in FIGS. 1 and 2 is surrounded by the cladding 11 but is shown by a solid line for convenience.
  • the above-mentioned points are the same in the planar optical circuit and the light source module described later.
  • the optical waveguide 1 shown in FIGS. 1 and 2 is a portion also called a core, and includes a first waveguide 2, a plurality of second waveguides 3 and a light emitting portion 4.
  • the first waveguide 2 extends from the first end 2 3 Placing in the second end portion 2 spoon.
  • the first waveguide 2 receives the light incident from the plurality of second waveguides 3. ⁇ 0 2020/175236 3 ⁇ (: 17 2020/006237
  • the first waveguide 2 can be restated as a coupling part that couples the plurality of second waveguides 3 into one.
  • plurality of second waveguides 3 than the first waveguide 2 located on the light incident side, and are connected to the first end 2 3 of the first waveguide 2.
  • the plurality of second waveguides 3 can function as a site for making light incident on the first waveguide 2.
  • the respective configurations of the plurality of second waveguides 3 may be the same or may be different.
  • the number of the second waveguides 3 may be two or more, and the upper limit value is not particularly limited.
  • the optical waveguide 1 illustrated in FIGS. 1 and 2 has a plurality of second waveguides 3 as a red ([3 ⁇ 4) waveguide 3 1, a green ( ⁇ ) waveguide 3 2 and a blue (m). It is provided with a waveguide 3 3.
  • the waveguide 3 1 and the waveguide 3 3 are curved, and the waveguide 3 2 is linear.
  • the waveguide for 3 2 is located between the waveguide for 3 1 and the waveguide for 3 3
  • the respective shapes and positions of the waveguide 3 1, the waveguide 3 2 and the waveguide 3 3 are not limited to the illustrated configurations.
  • the light emitting portion 4 is located at the second end 2 of the first waveguide 2.
  • the emission part 4 can function as a part for emitting light to the outside.
  • the cross-sectional shape of the emitting portion 4 illustrated in FIG. 3 is rectangular.
  • the cross-sectional shape of the emitting portion 4 is not limited to a rectangular shape.
  • the optical semiconductor element 10 2 illustrated in FIGS. 1 and 2 includes a red ([3 ⁇ 4) laser diode 103, a green ( ⁇ ) laser diode 10 4 and a blue (norm) laser diode 10 5 respectively.
  • Laser diode 10 3, laser diode 10 4 and laser diode 10 5 are The optical waveguide 3 1, the optical waveguide 3 2 and the optical waveguide 3 3 are located opposite to the end portion 3 3 located on the light incident side.
  • the irradiation surface is a horizontal plane and the traveling direction of light is, light from a light source whose divergence angle differs between the X direction and the vertical direction is used as a waveguide 3 1, a waveguide 3 2 and a waveguide 3 2 ⁇ 2020/175 236 4 ⁇ (: 170? 2020 /006237
  • the first waveguide 2 includes the first region.
  • the first region 2 1 the width in the direction perpendicular to the first center axis 3 of the first waveguide 2 as away is from the first end 2 3 becomes greatly.
  • the second area 22 is larger than the first area 21.
  • the width is smaller as the distance from the first region 21 is increased.
  • the incident angle 0 1 to the first waveguide 2 has the first region 2 1. It will be relatively larger than it would otherwise be. As a result, the light incident on the first waveguide 2 from the second waveguide 3 can be totally reflected without passing through the first waveguide 2, so that light leakage hardly occurs.
  • the light emitted from the light emitting section 4 reflects the irradiation angle of the light source. If the divergence angle of the light from the light source is different between the X direction and the vertical direction, the divergence also differs on the illuminated surface. As shown in FIG. 5, in the second region 22, the first angle 0 2 is the angle formed by the first central axis 3 1 and the light beam in the emitting section 4, and the second angle 0 3 is It is the angle between the central axis 3 1 and the ray. Thus, when the first waveguide 2 has the second region 22, the first angle 02 is larger than the second angle 03. On the other hand, when the first waveguide 2 does not have the second region 22, the dimension in the X direction on the irradiation surface may become narrow.
  • the first angle 0 2 at the emitting portion 4 becomes relatively large as described above, and therefore, the X direction on the irradiation surface
  • the spread angle in the side-by-side direction is less biased, and the irradiation surface can be irradiated with light at the same spread angle.
  • the first central axis 31 may be a line connecting the center of the first end portion 23 and the center of the second end portion 23.
  • the first central axis 31 is also called the optical axis.
  • the maximum width in the first region 2 1 (second region 2 2) illustrated in FIG. 3 corresponds to the total width of the plurality of second waveguides 3 It may be wider than the width of the edge 2 3 ⁇ / 2 3 .
  • the width ⁇ / 2 3 is 10 5 0 1
  • the width may be set between 1200-1600.
  • the incident angle 01 may be an angle formed by a ray and a virtual straight line !_ 1 perpendicular to the interface of the first waveguide 2 (interface 211 of the first region 21). Further, the first angle 02 and the second angle 03 may be determined according to the size of the first waveguide 2 and the refractive index of the optical waveguide 1 (core). For example, in FIG. 3, the first area 2 1
  • the maximum width of 10 5 and the first region 21 may be set to 2 60, and the width of the second end 2 sill ⁇ 2 13 may be set to 35. Further, when the incident angle 0 1 illustrated in FIG. 4 is set to 85 degrees, the second angle 0 3 illustrated in FIG. 5 may be 5 degrees. Further, when the refractive index of the optical waveguide 1 is 1.6, the first angle 02 may be 29 degrees.
  • At least one of the plurality of second waveguides 3 is an imaginary line extending from the second central axis 32 of the second waveguide 3 toward the first waveguide 2.
  • _ 2 may be connected to the first end 23 so that it intersects the interface 2 11 of the first region 21.
  • the waveguide 3 1 and the waveguide 3 3 satisfy the above-mentioned configuration.
  • the second central axis 32 can be defined similarly to the first central axis 3 1. When the second waveguide 3 is curved, the second central axis 32 may be obtained by continuing the centers of the cross sections of the second waveguide 3 perpendicular to the longitudinal direction.
  • the first region 21 may be connected to the first end 23. ⁇ 2020/175236 6 ⁇ (: 170? 2020 /006237
  • the first region 21 may be located at a distance from the first end portion 23 as long as it has its function.
  • the second region 22 may be connected to the second end 2 cradle. When such a configuration is satisfied, the light is smoothly emitted from the emitting portion 4 located in the second end portion 2.
  • the second region 22 may be located at a distance from the second end portion 2 as long as it has its function.
  • the width ⁇ / 23 of the first end portion 23 may be larger than the width ⁇ / 2 tip of the second end portion 2.
  • the length !_ 2 1 of the first region 2 1 in the direction parallel to the first central axis 3 1 is the length !_ 2 1 of the second region 2 2 in the direction parallel to the first central axis 3 1. May be shorter than 2. Increasing the length !_ 22 can increase the amount of light that is totally reflected, so that light leakage is less likely to occur and stray light can be reduced.
  • the first waveguide 2 is located between the first region 2 1 and the second region 22 and has a constant width in the direction perpendicular to the first central axis 3 1. It may further have a certain third region 23. When such a configuration is satisfied, it is easy to adjust the entire length of the first waveguide 2 in the direction parallel to the first central axis 31.
  • width of the third region 23 is constant does not necessarily mean that the width is strictly constant over the entire length of the third region 23. That is, the width of the third region 23 may be substantially constant.
  • the length !_ 2 3 of the third region 23 in the direction parallel to the first central axis 3 1 is the length !_ 2 1 And shorter than length !_ 2 2 but not limited to this.
  • the total length can be shortened by shortening the length !_23.
  • length 1-23 may be, for example, longer than length 1_21 or length !_22, and is the same as length !_21 or length !_22. May be The length 1-23 may be set to, for example, 125 or more.
  • the first waveguide 2 may not have the third region 23. In other words, the second area 22 may be connected to the first area 21.
  • the number of the emitting portions 4 may be one.
  • the number of lenses in the light source module described later can be reduced to one.
  • the number of parts constituting the light source module can be reduced, and the light source module can be downsized. No other waveguide is connected to the exit section 4 illustrated in FIG.
  • Examples of the material of the above-mentioned optical waveguide 1 include transparent resin such as epoxy or acrylic, quartz glass or silicon.
  • the optical waveguide 1 can be manufactured by using, for example, photolithography technology.
  • planar optical circuit according to the embodiment of the present disclosure will be described in detail with reference to FIG. 1 and FIG. 2, taking as an example the case where the above-described optical waveguide 1 is provided.
  • planar optical circuit shown in Fig. 1 and Fig. 2 (Planar Lightwave Circuit: hereafter sometimes referred to as "PLC”.) 10 is an optical waveguide 1 and an optical waveguide 1 (core ) And a substrate 1 2 on which the optical waveguide 1 and the cladding 1 1 are mounted.
  • PLC Planar Lightwave Circuit
  • the PLC 10 is provided with an optical waveguide 1 that hardly causes light leakage and can irradiate light on the irradiation surface at the same divergence angle, so that optical loss due to light leakage can be reduced and high-quality light Can be irradiated.
  • the cladding 11 may be a member having a smaller refractive index than the optical waveguide 1.
  • the material of the cladding 11 is, for example, transparent resin such as epoxy or acrylic, quartz glass or silicon.
  • the substrate 12 is configured so that the optical waveguide 1 and the cladding 11 can be mounted on it.
  • Examples of the material of the substrate 12 include aluminum oxide sintered body, mullite sintered body, silicon carbide sintered body, aluminum nitride sintered body, silicon nitride sintered body and glass ceramic. To be ⁇ 2020/175 236 8 ⁇ (: 170? 2020 /006237
  • ?1_?10 may further include a plurality of first electrodes 13 mounted on the substrate 12. When such a configuration is satisfied, electric power from the outside can be supplied to the optical semiconductor element 102 via the plurality of first electrodes 13.
  • the light source module 100 shown in FIGS. 6 and 7 includes 1_ ⁇ 10, a lens 101, an optical semiconductor element 102, and a container 110.
  • the lens 10 1 is located so as to face the emitting portion 4.
  • the optical semiconductor element 102 is located so as to face the ends 33 of the plurality of second waveguides 3 located on the light incident side.
  • the container 10 6 accommodates 1_ ( 3 10), the lens 10 1 and the optical semiconductor element 10 2.
  • the light source module 100 is provided with 1_ ( 310 ) that hardly causes light leakage and includes the optical waveguide 1 that can irradiate light on the irradiation surface at the same divergence angle. It is possible to irradiate high quality light while reducing the light emission.
  • the lens 101 is also called a collimator lens, and is a member capable of collimating the light emitted from the light emitting section 4.
  • Examples of the material of the lens 101 include sapphire, amorphous glass or transparent plastic.
  • the lens 10 1 illustrated in FIGS. 6 and 7 is mounted on the container 10 6, but the lens 10 1 may be mounted on the substrate 12 of !_ ⁇ 10.
  • the number of lenses 10 1 may be one. According to such a configuration, the number of parts constituting the light source module 100 can be reduced, and the light source module 100 can be downsized.
  • the optical semiconductor element 102 is a member that can function as a light source.
  • the optical semiconductor element 102 may be, for example, a light emitting diode or a semiconductor laser diode. ⁇ 2020/175 236 9 ⁇ (: 170? 2020 /006237
  • the optical semiconductor device 102 illustrated in FIGS. 6 and 7 is Laser diode 10 3, laser diode 10 4 and laser diode 10 5. Therefore, the light source module 100 illustrated in FIG. 6 and FIG. Also called the Laser Module.
  • the optical semiconductor device 10 2 illustrated in FIGS. 6 and 7 is mounted on the substrate 12 of the PLC ⁇ 0, the optical semiconductor device 10 2 can be mounted on the container 10 6 even if it is mounted on the substrate 10 6. Good.
  • the container 106 has a !_ ⁇ 10, a lens 10 1 and an optical semiconductor element inside.
  • the container 106 It is configured to accommodate 102.
  • the material of the container 106 include various ceramic materials, metals such as copper, tungsten, iron, nickel and cobalt, alloys containing a plurality of these metals, and combinations of various ceramics and metals. Can be mentioned.
  • the container 10 6 has an opening 1 0 7 through which the lens 1 0 1, the lens 10 1 and the optical semiconductor element 10 2 can be passed. Good. When such a configuration is satisfied, the workability when accommodating !_ ( 310, lens 10 1 and optical semiconductor element 10 2 inside the container 10 6 is excellent.
  • the container 106 may further include a lid 108 that closes the opening 107.
  • the inside of the container 106 can be made airtight.
  • the lid 108 includes, for example, an aluminum oxide sintered body, a mullite sintered body, a silicon carbide sintered body, and an aluminum nitride sintered body. It may be made of a sintered body, a silicon nitride sintered body, or a ceramic such as glass ceramic.
  • a connecting member may be used. Examples of the joining member include a brazing material and solder.
  • the container 106 has a side wall portion 10 that is located on the light emission side of the lens 10 1.
  • the light source module 100 is positioned so as to close the through hole 110 from the inner part of the container 100, and is a window through which light can pass.
  • the window may be further provided.
  • light can be emitted to the outside of the container 110 through the window 1111 and the through hole 110 while maintaining the airtightness of the container 106.
  • Examples of the material of the window 1 1 1 include sapphire or glass.
  • the light source module 100 includes a plurality of second electrodes 1 mounted on the container 106.
  • the plurality of second electrodes 1 12 are electrically connected to the plurality of first electrodes 13 by bonding wires or the like, and electric power from the outside is supplied to the optical semiconductor element 1 0. 2 can be supplied.
  • the light source module 100 may further include a thermistor.
  • thermistor size include, but are not limited to, 0603.
  • the thermistor may be mounted on the container 106 or on the substrate 12 of the PLC10.
  • the light source module 100 described above can be used, for example, as a laser light source of a pico projector.
  • pico projectors include goggles for VR (Virtua l Realty: virtual reality), AR (Augmented Reality li: augmented reality), or MR (Mixed Reality) mixed reality).
  • Examples include glasses, in-vehicle displays including HUDs (Head-Up Display), projection from smartphones or tablet terminals, portable projectors or pocket PCs.
  • the usage of the light source module 100 is not limited to the illustrated usage.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)

Abstract

Le guide d'ondes optique selon la présente invention comprend : un premier guide d'ondes qui s'étend d'une première partie d'extrémité à une seconde partie d'extrémité ; une pluralité de seconds guides d'ondes qui sont positionnés plus près d'un côté d'incidence de lumière que le premier guide d'ondes et qui sont connectés à la première partie d'extrémité ; et une partie électroluminescente qui est positionnée au niveau de la seconde partie d'extrémité Dans une vue en plan, le premier guide d'ondes comprend : une première région dans laquelle la largeur dans une direction perpendiculaire à un premier axe central du premier guide d'ondes augmente avec une augmentation de la distance à l'opposé de la première partie d'extrémité ; et une seconde région qui est positionnée plus loin de la première partie d'extrémité que la première région et dans laquelle la largeur diminue avec une augmentation de la distance à l'opposé de la première région. Le circuit optique planaire selon la présente invention est pourvu dudit guide d'ondes optique. Le module optique selon la présente invention est pourvu dudit circuit optique planaire.
PCT/JP2020/006237 2019-02-25 2020-02-18 Guide d'ondes optique, circuit optique planaire et module de source de lumière Ceased WO2020175236A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021502017A JP7163478B2 (ja) 2019-02-25 2020-02-18 光導波路、平面型光回路および光源モジュール

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-031826 2019-02-25
JP2019031826 2019-02-25

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WO2020175236A1 true WO2020175236A1 (fr) 2020-09-03

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WO (1) WO2020175236A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022153294A (ja) * 2021-03-24 2022-10-12 エフェクト フォトニクス ベーハー フォトニック集積回路およびフォトニック集積回路を含む光電子システム
JPWO2023100927A1 (fr) * 2021-11-30 2023-06-08
EP4400882A4 (fr) * 2021-09-07 2025-08-20 Seiren Kst Corp Élément de guide d'ondes optique et module de source de lumière

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JPH04319905A (ja) * 1991-04-19 1992-11-10 Nippon Telegr & Teleph Corp <Ntt> 光合分岐器
JPH08508351A (ja) * 1993-11-04 1996-09-03 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ マルチモード干渉結合器における強度特性及び位相特性の変化方法
CN101546014A (zh) * 2009-04-20 2009-09-30 浙江大学 一种基于模式渐变原理的大带宽y分支功分器

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JPH11211924A (ja) * 1998-01-21 1999-08-06 Nippon Telegr & Teleph Corp <Ntt> 波長多重通信用光回路

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JPH04319905A (ja) * 1991-04-19 1992-11-10 Nippon Telegr & Teleph Corp <Ntt> 光合分岐器
JPH08508351A (ja) * 1993-11-04 1996-09-03 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ マルチモード干渉結合器における強度特性及び位相特性の変化方法
CN101546014A (zh) * 2009-04-20 2009-09-30 浙江大学 一种基于模式渐变原理的大带宽y分支功分器

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022153294A (ja) * 2021-03-24 2022-10-12 エフェクト フォトニクス ベーハー フォトニック集積回路およびフォトニック集積回路を含む光電子システム
US11899254B2 (en) 2021-03-24 2024-02-13 Effect Photonics B.V. Photonic integrated circuit and opto-electronic system comprising the same
JP7431875B2 (ja) 2021-03-24 2024-02-15 エフェクト フォトニクス ベーハー フォトニック集積回路およびフォトニック集積回路を含む光電子システム
EP4400882A4 (fr) * 2021-09-07 2025-08-20 Seiren Kst Corp Élément de guide d'ondes optique et module de source de lumière
JPWO2023100927A1 (fr) * 2021-11-30 2023-06-08
WO2023100927A1 (fr) * 2021-11-30 2023-06-08 京セラ株式会社 Boîtier de guide d'ondes optique et module de source de lumière
US12345913B2 (en) 2021-11-30 2025-07-01 Kyocera Corporation Optical waveguide package and light source module
JP7711212B2 (ja) 2021-11-30 2025-07-22 京セラ株式会社 光導波路パッケージおよび光源モジュール

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JPWO2020175236A1 (ja) 2021-10-07

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