WO2020185011A1 - Dispositif de maintenance pour dispositif de transfert de substrat - Google Patents

Dispositif de maintenance pour dispositif de transfert de substrat Download PDF

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Publication number
WO2020185011A1
WO2020185011A1 PCT/KR2020/003465 KR2020003465W WO2020185011A1 WO 2020185011 A1 WO2020185011 A1 WO 2020185011A1 KR 2020003465 W KR2020003465 W KR 2020003465W WO 2020185011 A1 WO2020185011 A1 WO 2020185011A1
Authority
WO
WIPO (PCT)
Prior art keywords
transfer device
substrate transfer
substrate
bearing
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2020/003465
Other languages
English (en)
Korean (ko)
Inventor
김태현
김종욱
이지원
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HD Hyundai Co Ltd
Original Assignee
Hyundai Heavy Industries Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Heavy Industries Holdings Co Ltd filed Critical Hyundai Heavy Industries Holdings Co Ltd
Publication of WO2020185011A1 publication Critical patent/WO2020185011A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3308—Vertical transfer of a single workpiece

Definitions

  • the present invention relates to a maintenance apparatus for a substrate transfer device that transfers a substrate, and in particular, a heavy component can be easily transferred during the maintenance and repair process, so that the operation is safe and convenient.
  • display devices, solar cells, semiconductor devices, etc. are manufactured through various processes.
  • This manufacturing process is performed using a substrate for manufacturing the electronic component.
  • the manufacturing process may include a deposition process for depositing a thin film such as a conductor, a semiconductor, or a dielectric on a substrate, and an etching process for forming the deposited thin film in a predetermined pattern.
  • the substrate transfer device is for transferring the substrate between the process chambers.
  • FIG. 1 is a perspective view showing a substrate transfer device.
  • the substrate transfer device 1 rotates the transfer arm 10 supporting the substrate, the lifting unit 20 for raising and lowering the transfer arm 10, and the transfer arm 10. It consists of a turning unit 30 for.
  • the transfer arm 10 transfers the substrate toward a chamber (not shown) while supporting the substrate.
  • the transfer arm 10 transfers the substrate in a horizontal direction.
  • the transfer arm 10 is coupled to the elevating part 20.
  • the elevating part 20 elevates the transfer arm 10. As the elevating part 20 elevates the transfer arm 10, the substrate is also elevated.
  • the lifting part 20 is coupled to the turning part 30.
  • the turning part 30 rotates the lifting part 20. As the pivoting part 30 pivots the lifting part 20, the transfer arm 10 and the substrate are rotated.
  • the elevating unit 20 is coupled to the turning unit 30 to move in a vertical direction along the elevating support 21 and the elevating support 21 and mounted with a transfer arm 10 It is divided into (22).
  • the transfer arm 10 mounted on the lifting moving part 22 may be configured to be vertically movable in the longitudinal direction of the lifting moving part 22, otherwise the transfer arm 10 is attached to the lifting support part 21. It may be configured to move in the longitudinal direction, that is, the vertical direction of the lifting support part 21 in a mounted state. This may vary the coupling relationship between the lifting unit 20 and the transfer arm 10 according to the capacity of the substrate transfer device 1.
  • the lifting support part 21 fixed to the turning part 30 must be positioned.
  • the substrate transfer device 1 configured as described above, maintenance must be performed through periodic inspection, or if a failure occurs or parts need to be replaced, the operator transfers the parts while the substrate transfer device 1 is stopped. Should be replaced.
  • the present invention was invented to solve the problems of the prior art as described above, and an object of the present invention is to provide a maintenance device for a substrate transfer device configured to facilitate safe and quick maintenance work by easily transferring parts, etc. have.
  • the present invention for achieving the above object is a maintenance device installed in a substrate transfer device having a transfer arm for supporting a substrate, an elevating part for elevating the transfer arm, and a turning part for rotating the transfer arm.
  • One end is fixed to the top surface of the unit and a beam extending outward from the elevating unit, a bearing fixed to one end of the beam and mounted on the upper surface of the elevating unit to support the beam so that it can be rotated, and mounted on the beam to move in the longitudinal direction of the beam
  • It is characterized in that it comprises a trolley and a chain block mounted on the trolley.
  • an upper plate is mounted on an upper surface of the elevating portion, a bearing seat is formed on the upper plate, and a bearing is mounted on the bearing seat.
  • the bearing is a cross roller bearing, in which one of the inner and outer rings of the cross roller bearing is mounted on the bearing seat, and the horizontal beam is fixed to the other.
  • a disk-shaped flange is fixed to the bottom of one end of the horizontal beam, and the other of the inner and outer rings of the cross roller bearing is fixed to the disk-shaped flange.
  • it further comprises a locking means for locking the rotation of the beam.
  • the locking means includes a tab formed on the beam, a bolt fastened to the tab, and a tab formed on the upper surface of the elevating portion so that the bolt is screwed.
  • the maintenance apparatus of the substrate transfer apparatus is mounted on a turning unit and is in an elevating unit that can be stretched and contracted in a vertical direction, and by mounting a repair jig capable of being installed and dismantled on the upper end of the elevating support unit, the substrate
  • a repair jig capable of being installed and dismantled on the upper end of the elevating support unit
  • the maintenance device for the substrate transfer device according to the present invention is installed on the elevator unit in the state where the substrate transfer device is stopped for maintenance of the substrate transfer device and replacement of parts, and is disassembled from the elevator unit before the substrate transfer device operates normally.
  • the substrate transfer device is configured to operate smoothly.
  • FIG. 1 is a perspective view showing a substrate transfer device.
  • FIG. 2 is a perspective view showing a maintenance device installed in the substrate transfer device
  • FIG 3 is an exploded perspective view of the maintenance device shown in Figure 2
  • FIG 4 is a conceptual diagram showing the operating relationship of the maintenance device shown in Figure 2
  • FIG. 5 is a conceptual diagram showing a locking means of the maintenance device shown in FIG.
  • substrate transfer device 140 horizontal beam
  • transfer arm 141 lower flange
  • lifting part 143 disk-shaped flange
  • lifting support 150 trolley
  • lifting moving unit 160 chain block
  • Figure 2 is a perspective view showing a maintenance device installed in the substrate transfer device
  • Figure 3 is an exploded perspective view of the maintenance device shown in Figure 2
  • Figure 4 is a conceptual diagram showing the operating relationship of the maintenance device shown in Figure 2
  • 5 is a conceptual diagram showing a locking means of the maintenance device shown in FIG.
  • the substrate transfer device 1 rotates the transfer arm 10 supporting the substrate, the lifting part 20 for raising and lowering the transfer arm 10, and the transfer arm 10 It consists of a turning unit 30 for.
  • the elevating unit 20 is coupled to the turning unit 30 to move in a vertical direction along the vertically positioned elevating support portion 21 and the elevating support portion 21, and the elevating moving unit 22 equipped with a transfer arm 10
  • the transfer arm 10 mounted on the lifting moving part 22 may be configured to be vertically movable in the longitudinal direction of the lifting moving part 22, otherwise the transfer arm 10 is attached to the lifting support part 21. It may be configured to move in the longitudinal direction, that is, the vertical direction of the lifting support part 21 in a mounted state. This may vary the coupling relationship between the lifting unit 20 and the transfer arm 10 according to the capacity of the substrate transfer device 1.
  • the lifting support part 21 is mounted on the turning part 30 and is only pivoted by the turning part 30 without moving in the vertical direction.
  • the maintenance device of the substrate transfer device according to the present invention is mounted on the lifting support unit 21.
  • the maintenance device 100 of the substrate transfer device includes a bearing 130 mounted on the upper surface of the lifting support part 21, and one end is fixed to the bearing 130, and the other end is a horizontal extension extending outward of the lifting support part 21. It includes a beam 140, a trolley 150 mounted on the horizontal beam 140 and moving along the horizontal beam 140, and a chain block 160 coupled to the trolley 150.
  • the upper plate 110 is fixed to the upper surface of the lifting support part 21, and a cross roller bearing (CRB) 130 is mounted on the upper plate 110.
  • a cross roller bearing (CRB) 130 is mounted on the upper plate 110.
  • a bearing seat 120 is formed on the upper plate 110, and the outer ring of the cross roller bearing 130 in a state in which the cross roller bearing 130 is seated on the bearing seat 120 132 is fixed to the bearing seat 120.
  • the inner ring 131 of the cross roller bearing 130 is freely rotatable.
  • bolt holes 131H and 132H are formed at an equal angle along the circumference of the cross roller bearing 130, and the outer ring 132 of the cross roller bearing 130 The bolt passing through the formed bolt hole 132H is fastened with a nut while being inserted into the hole 120H formed in the bearing seat 120 so that the cross roller bearing 130 is fixed to the upper plate 110.
  • the horizontal beam 140 is an H beam
  • a disk-shaped flange 143 is fixed to the bottom surface of the lower flange 141.
  • the disk-shaped flange 143 corresponds to the inner ring 131 of the cross roller bearing 130 and the bolt hole 143H corresponds to the bolt hole 131H formed in the inner ring 131 of the cross roller bearing 130. It is formed on the disk-shaped flange 143.
  • the cross roller bearing 130 Of the inner ring 131 and the disk-shaped flange 143 are fixed, the horizontal beam 140 to which the disk-shaped flange 143 is fixed is rotated based on the center point of the bearing 130 by the rotation of the inner ring 131 Is done.
  • the trolley 150 is mounted on the lower flange 141 to move the trolley 150 in the longitudinal direction of the horizontal beam 140, and the trolley 150 has a chain block ( 160) is fastened.
  • the trolley 150 is mounted on the lower flange 141 of the horizontal beam 140 and can be moved in the longitudinal direction of the horizontal beam 140, and the chain block 160 is also a horizontal beam with the movement of the trolley 150. It can be moved in the longitudinal direction of 140.
  • the operation of the substrate transfer device 1 is stopped in order to maintain the substrate transfer device 1 or to replace parts.
  • cross roller bearing 130 is located on the upper plate 110 of the lifting support part 21, and the bolt is formed in the outer ring 132 of the cross roller bearing 130 and the bolt hole 132H and the hole of the bearing seat 120 After inserting it into (120H), fasten the nut at the bottom of the bearing seat 120.
  • the disk-shaped flange 143 of the horizontal beam 140 is positioned on the upper surface of the cross roller bearing 130. Then, the bolt is inserted into the bolt hole 131H formed in the inner ring 131 of the cross roller bearing 130 and the bolt hole 143H of the disk-shaped flange 143, and then the nut is fastened to the bolt.
  • the horizontal beam 140 is horizontally positioned on the upper surface of the cross roller bearing 130, and the trolley 150 and the chain block 160 are mounted on the lower flange 141 of the horizontal beam 140.
  • the horizontal beam 140 can be rotated based on the center point of the cross roller bearing 130, and the horizontal beam 140
  • the chain block 160 is movable in the longitudinal direction of.
  • the operator hangs the replacement part on the chain block 160 and lifts it, and then rotates the horizontal beam 140 based on the center point of the cross roller bearing 130, so that the weight within the movable range of the chain block 160 You can easily move the parts and so on.
  • the horizontal beam 140 is locked between the horizontal beam 140 and the upper plate 110 so that the horizontal beam 140 does not rotate freely by the cross roller bearing 130 of the horizontal beam 140.
  • the locking means 140 is mounted.
  • the locking means 140 includes a tab 171T formed on the lower flange 141 of a portion facing the upper plate 110 in the horizontal beam 140, and a bolt 172 fastened to the tab 171T, and , In the case of locking the horizontal beam 140, the end of the bolt 172 presses the upper plate 110 by rotating the bolt 172 fastened to the tab 171T formed on the lower flange 141 to increase friction. By doing so, the turning of the horizontal beam 140 is temporarily prevented.
  • a tab 173 is formed on the upper plate 110 so that the horizontal beam 140 does not rotate even with an external impact at a point where precise work is required.
  • the maintenance device is disassembled in the opposite order of installation of the maintenance device of the substrate transfer device described above.
  • the reason for disassembling the maintenance device of the substrate transfer device is to solve the problem of being damaged by interference with the horizontal beam 140 or the like in the operation of the substrate transfer device.
  • the outer ring of the cross roller bearing 130 is mounted on the bearing seat and the horizontal beam is fixed to the inner ring of the cross roller bearing 130, but the inner ring of the cross roller bearing 130 is attached to the bearing seat. Is mounted, and even if the horizontal beam is fixed to the outer ring of the cross roller bearing 130, the horizontal beam can be rotated.
  • the maintenance device of the substrate transfer device when maintenance of the substrate transfer device and replacement of parts are required, the operator can easily lift and transfer the heavy item, so that the operator can carry the heavy component. Even if it is, there is no risk of injury. In addition, there is no difficulty in transfer due to a structure (eg, rail, etc.) interacting with the substrate transfer device.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Engineering & Computer Science (AREA)
  • Robotics (AREA)

Abstract

La présente invention concerne un dispositif de maintenance pour un dispositif de transfert de substrat pour transférer un substrat, le dispositif de transfert de substrat comprenant : un bras de transfert supportant le substrat ; une unité d'élévation pour déplacer vers le haut et vers le bas le bras de transfert ; et une unité de rotation pour faire tourner le bras de transfert, le dispositif de maintenance étant disposé au niveau du dispositif de transfert de substrat et comprenant : une poutre qui a une extrémité fixée à une surface d'extrémité supérieure de l'unité d'élévation et s'étend vers l'extérieur de l'unité d'élévation ; un palier qui est fixé sur l'extrémité de la poutre et qui est monté sur la surface d'extrémité supérieure de l'unité d'élévation de façon à supporter la poutre à tourner ; un chariot qui est monté sur la poutre pour se déplacer dans la direction longitudinale de la poutre ; et un bloc de chaîne qui est monté sur le chariot.
PCT/KR2020/003465 2019-03-12 2020-03-12 Dispositif de maintenance pour dispositif de transfert de substrat Ceased WO2020185011A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2019-0028072 2019-03-12
KR1020190028072A KR102196755B1 (ko) 2019-03-12 2019-03-12 기판 이송장치의 정비장치

Publications (1)

Publication Number Publication Date
WO2020185011A1 true WO2020185011A1 (fr) 2020-09-17

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Application Number Title Priority Date Filing Date
PCT/KR2020/003465 Ceased WO2020185011A1 (fr) 2019-03-12 2020-03-12 Dispositif de maintenance pour dispositif de transfert de substrat

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KR (1) KR102196755B1 (fr)
WO (1) WO2020185011A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081294Y2 (ja) * 1989-10-21 1996-01-17 博 寺町 旋回用クロスローラーベアリング
KR20060075254A (ko) * 2004-12-28 2006-07-04 주식회사 고려호이스트 방폭 및 로우헤드형 체인 호이스트
KR20150080749A (ko) * 2014-01-02 2015-07-10 현대중공업 주식회사 기판 이송장치용 승강장치 및 이를 포함하는 기판 이송장치
KR20160033273A (ko) * 2014-09-17 2016-03-28 삼성디스플레이 주식회사 크로스 롤러 베어링
KR20170107406A (ko) * 2016-03-15 2017-09-25 인티그레이티드 다이나믹스 엔지니어링 게엠베하 유지보수 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429256B2 (ja) * 2011-10-03 2014-02-26 株式会社安川電機 ロボットシステム
KR20150008297A (ko) * 2013-07-12 2015-01-22 현대중공업 주식회사 승강장치 및 이를 포함하는 기판 이송장치
KR20180029535A (ko) 2016-09-12 2018-03-21 현대로보틱스주식회사 기판이송장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081294Y2 (ja) * 1989-10-21 1996-01-17 博 寺町 旋回用クロスローラーベアリング
KR20060075254A (ko) * 2004-12-28 2006-07-04 주식회사 고려호이스트 방폭 및 로우헤드형 체인 호이스트
KR20150080749A (ko) * 2014-01-02 2015-07-10 현대중공업 주식회사 기판 이송장치용 승강장치 및 이를 포함하는 기판 이송장치
KR20160033273A (ko) * 2014-09-17 2016-03-28 삼성디스플레이 주식회사 크로스 롤러 베어링
KR20170107406A (ko) * 2016-03-15 2017-09-25 인티그레이티드 다이나믹스 엔지니어링 게엠베하 유지보수 장치

Also Published As

Publication number Publication date
KR102196755B1 (ko) 2020-12-30
KR20200109055A (ko) 2020-09-22

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