WO2020208014A1 - Agencement et procédé de calibrage et de fonctionnement d'actionneurs capacitifs - Google Patents

Agencement et procédé de calibrage et de fonctionnement d'actionneurs capacitifs Download PDF

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Publication number
WO2020208014A1
WO2020208014A1 PCT/EP2020/059888 EP2020059888W WO2020208014A1 WO 2020208014 A1 WO2020208014 A1 WO 2020208014A1 EP 2020059888 W EP2020059888 W EP 2020059888W WO 2020208014 A1 WO2020208014 A1 WO 2020208014A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrical
actuator
measurement
constant
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2020/059888
Other languages
German (de)
English (en)
Inventor
Thomas Fröhlich
Jan Schleichert
Suren Vasilyan
Falko Hilbrunner
Rafael Ramos Marangoni
Na YAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ilmenau University of Technology
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Ilmenau University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ilmenau University of Technology filed Critical Ilmenau University of Technology
Priority to EP20718619.8A priority Critical patent/EP3954036A1/fr
Publication of WO2020208014A1 publication Critical patent/WO2020208014A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/64—Testing of capacitors

Definitions

  • the invention relates to an arrangement and a method for the traceable calibration of an electrostatic actuator.
  • a plate capacitor is an arrangement of two plane-parallel plates of the same geometry, which are electrically contacted. This arrangement is thus able to store electrical energy in the form of an electrical field caused by electrical charge carriers.
  • the measure of the capacity of a capacitor for electrical charge carriers is the capacity.
  • the capacity of a plate capacitor depends on the plate size, the plate spacing and the material between the plates, the dielectric. If the plate size, the plate spacing or the dielectric is changed with a constant electrical voltage, the resulting change in capacitance is compensated for by the flow of an electrical current.
  • US Pat. No. 4,963,829 A discloses a “tachometer” which is basically to be understood as a capacitive structure.
  • a second associated plate is attached to a shaft over one plate of a plate capacitor. The second plate is set in rotation. Both plates are coated with a DC voltage and the changes in capacitance, caused by the geometric characteristics of the second capacitor plate, result in a measurable current flow. This is the actual measured variable and allows conclusions to be drawn about the angular velocity. With the recorded signal curve of the current intensity, however, only the measured variable "speed" can be determined.
  • US 2004/0113514 A1 discloses both a method and a device for electrically damping mechanical vibrations. This is used to electrostatically compensate for unpleasant vibrations from piezo actuators.
  • a piezo actuator is an arrangement in which, by applying an electrical voltage to a so-called piezoelectric crystal, the energy of the resulting electrical field is converted into mechanical energy.
  • the speed and the position of a movable capacitor plate of a plate capacitor are measured.
  • a suitable electrical voltage signal is then applied to this same capacitor and the unpleasant movements are compensated.
  • the monitoring of the compensation is solved by a control loop.
  • US 2006/0267596 A1 describes a force standard for the measuring tips (cantilever) of an atomic force microscope.
  • the magnitude of the forces to be determined here is a few nanonewtons.
  • the disclosed force standard replaces the measurement by means of a direct comparison between the cantilever to be calibrated and a reference canti lever by a traceable calibration method.
  • the object of the present invention is to provide an arrangement and a device to simultaneously and without causing the arrangement or measurement-relevant parts of the arrangement to resonate, while the force is generated using electrical parameters to calibrate the actuator constant without resonance.
  • a first aspect of the invention relates to an arrangement for the traceable calibration of an electrostatic actuator.
  • the arrangement for traceable calibration of an electrostatic actuator has at least one frame for holding at least one movable electrode, at least one electrode fixed to the frame, at least one voltage source, at least one electrical consumer, at least two measuring devices for electrical parameters and at least one measuring device for position measurement and one measuring device for Speed measurement, the arrangement being designed to calibrate the actuator constant resonance-free.
  • the calibration at the same time as the generation of the electrostatic force is achieved when the frequency of the relative movement of the frame-side electrodes is far above the mechanical resonance frequency of the guide system connected to the actuator, so that the change in force generated due to the relative movement only leads to movements of the mechanical system leads.
  • a suitable movement frequency is, for example, above 10 times the resonance frequency.
  • Electrode In this context, the open end of an electrical conductor is understood here. If two of these conductor ends are charged with opposite polarity and placed at a geometrical distance from one another, this is a general capacitor.
  • the plate capacitor is a special and particularly simple design. In this case, the plates are the electrodes defined here. The electrodes are connected to a voltage source.
  • Constant voltage source This is the special case of a voltage source.
  • a voltage source is given over a Period of time a constant value of the electrical voltage output is set. This value of the voltage can also be measured over the specified period while the capacitor plates are moving relative to one another.
  • Frequency of movement This is synonymous with the excitation frequency, or excitation frequency, of a system suitable for mechanical vibration. After a short settling phase, the oscillatory system takes on the excitation or excitation frequency and is forced to oscillate with it. Every vibratory system has a natural frequency. If the excitation frequency is the same as the natural frequency, there is a special case of resonance.
  • Resonance frequency This is the frequency at which the vibration energy of an exciter is coupled into a vibratory system without the damping being sufficient to convert the supplied energy back into heat and dissipate it. It is possible and likely that this will lead to the destruction of the oscillatory system.
  • Actuator constant k indicates at which value of an applied electrical voltage the resulting amount of force to be expected is generated. Physically, this is based on the following equations, which are valid exemplarily for the plate capacitor:
  • Plate capacitor's identity 7. can be used to obtain from Eq. 1st, 4th and 7th on
  • F (x) is the force between two capacitor plates
  • x (t) the distance between the capacitor plates
  • W the stored field energy of the capacitor
  • U the constant electrical voltage applied to the capacitor plates
  • C the capacitance of the plate capacitor
  • i (t) the electrical Current intensity
  • Q is the amount of charge stored in the capacitor
  • k (x) is the actuator constant that depends on the plate spacing.
  • An electrical consumer is able to convert electrical energy into heat and another form of energy, e.g. B. into the magnetic field of an electromagnet.
  • every consumer can be represented and described by an equivalent circuit diagram of ideally ohmic, ideally inductive and ideally capacitive components in a suitable combination.
  • This real consumer shows different behavior at different frequencies of the applied voltage or the electrical current flowing through it. Any consumer for a certain frequency range can show predominantly ohmic behavior.
  • An electrical consumer is thus a real embodiment of a physical ohmic component in accordance with its electrical parameters, which show predominantly ohmic behavior.
  • the arrangement according to the invention which is designed to calibrate the actuator constant in the range from 10 mHz to 20 kHz, with the exception of a 3 dB wide range around the resonance frequency, has a frame which is used to accommodate force-generating devices such as. B. electrostatic actuators and piezoelectric actuators is suitable. Furthermore, the frame is suitable for force-converting devices such. B. to hold mechanical or magnetic bearings or gears. Thus, in embodiments of the invention, the moving electrode is guided mechanically or magnetically.
  • the frame is also able to store energy storage devices such.
  • the frame of the arrangement has at least two electrodes of a capacitor, preferably a plate capacitor. The at least two electrodes of the capacitor can be moved relative to one another. At least one electrode is preferably designed to be positioned and the other, second electrode is movable.
  • the voltage of the voltage source applied over the measurement period is constant.
  • the electrodes are connected in an electrically conductive manner to a voltage source in order to generate an electric field between them.
  • this voltage source is a constant voltage source.
  • the voltage source or constant voltage source is preferably connected to a measuring device for electrical parameters.
  • the characteristic variable of the electrical voltage is preferably measured.
  • An electrical consumer with predominantly ohmic behavior in the desired frequency range of 10 mHz to 20 kHz is attached and electrically conductively connected to the capacitor plates in such a way that the electrical current flow resulting from the movement of the capacitor plates must flow through this consumer, in whole or in part.
  • At least one measuring device for measuring the electrical parameter is suitably connected to this consumer.
  • the parameter to be measured is preferably the electrical current intensity. Therefore, an ammeter is used to measure the amperage signal.
  • At least one fastening system for attaching an actuator is mechanically attached to the frame of the arrangement. Furthermore, at least one voltage source is connected, at least one measuring device for electrical parameters, at least one measuring device for position measurement and / or at least one measuring device for speed and an actuator for generating a relative movement of the electrodes to one another and the position or speed measuring system for measuring the relative movement of the electrodes appropriate.
  • one of the electrodes is attached to the stationary frame, the other to a movable part, the electrode mounted on the frame preferably being set in motion.
  • a structural advantage of the movement of the frame-side electrode is that, apart from a ground connection, no further electrical connections are required for the actuator located on the moving part of the system.
  • the electrical consumer shows predominantly ohmic behavior in the given frequency range.
  • the method according to the invention has the following steps for the simultaneous measurement and calibration of the actuator constant from the traceable measured variables:
  • the method is based on the generation of the electrostatic force and simultaneous measurement of the relative speed of the electrodes (capacitor plates) to one another and of the electrical current flowing in the circuit at the same time during a frame-side force generation. Knowledge of the voltage applied to the electrodes is also required for the process.
  • the actuator constant of the electrostatic actuator can be determined according to the above equations, in particular according to equations (1., 4. and 8) to be determined.
  • the distance between the capacitor plates in the rest position x 0 is preferably known. In the case of an unknown distance, this can be reconstructed from the measurement data of the change in location, speed and current strength. This is preferably carried out by a computer program product using a data processing repository.
  • the exemplary embodiment relates to a force measuring system in the form of a torsion balance and is intended to describe the invention without restricting it.
  • Figure 1 The simplified model of the measuring apparatus is shown schematically in the figure.
  • the schematic illustration shows all the minimal features of the inventive arrangement. These are: a movable electrode and a frame-mounted electrode of a plate capacitor (101), a mechanical guide system for fastening an actuator (701), a voltage source (401), a measuring device for electrical parameters (601), suitable for measuring the voltage drop at the electrical consumer (501), as well as a measuring device for position measurement and a measuring device for speed (301).
  • FIG. 2 The simplified model of the measuring apparatus is shown schematically in the figure.
  • the schematic illustration shows all the minimal features of the inventive arrangement. These are: a movable electrode and a frame-fixed electrode of a plate capacitor (101), a mechanical guide system for fastening an actuator (701), a voltage source (401), a measuring device for electrical parameters (601), suitable for measuring the current strength, and a Measuring device for position measurement and a measuring device for speed (301).
  • Figure 3 The diagram shows the measurement of the relative position of the capacitor plates.
  • the frequency with which the measurement of the exemplary embodiment was carried out, of 0.06 Hz, can be taken from the diagram.
  • Figure 4 The figure shows a diagram with measurement data of the mechanical parameters speed and relative position of the capacitor plates to one another. The relative position of the capacitor plates is plotted against the speed at which the change in the position of the capacitor plates is carried out.
  • Figure 5 The figure shows a diagram which illustrates the measured values of the current intensity in relation to the measured speed of change in the position of the capacitor plates. This correlation is decisive for determining the actuator constant sought.
  • Figure 6 The figure shows the distribution of the ratio of the measured current intensity i (t) and speed over the relative position of the capacitor plates to one another.
  • the asymmetry with regard to the relative rest position can be explained by equation (2.) and by the approach and distance between the capacitor plates.
  • the arrangement in this exemplary embodiment is aimed at compensating for a force generated by a remote measurement object by generating an electrostatic counterforce.
  • the electrical voltage used for electrostatic compensation can be converted into a force if the calibration factor is known.
  • the calibration device for the resonance-free calibration of the actuator constant is attached to the frame for the measurement, a spring joint being arranged on a mounting plate.
  • a metal wheel is arranged lying on this spring joint. Lying means here that the axis of the rotational symmetry of the wheel is aligned in the direction of the gravitational acceleration.
  • the wheel is made of aluminum.
  • the wheel has four spokes arranged symmetrically and radially to the central axis.
  • the devices for force measurement on the measurement object, for position and speed measurement, for movement generation and for force generation are arranged along the spokes of the wheel.
  • the force to be measured becomes magnetic on the measuring object by generating Eddy currents exerted in a moving, electrically conductive liquid.
  • a spacer in the form of a rod is attached along the spoke on a spoke of the wheel. At the end of the rod, which is inclined towards the center of the wheel, magnets are arranged to generate force through eddy current induction.
  • a spacer is also arranged in the opposite direction, along the spoke running opposite. This serves on the one hand as a balance weight and on the other hand as a base point for a piezoelectric actuator for generating movement.
  • a plate of the force-compensating plate capacitor is also attached along this same weight-compensating holding device.
  • the bracket for the second capacitor plate, the bracket for the piezoelectric actuator and the bracket for the measuring device for measuring the position and speed of the wheel are attached to the mounting plate.
  • Both plates of the plate capacitor form the electrostatic actuator to be calibrated, since the electrical voltage applied to the plates to generate an electrostatic counterforce must be converted into the resulting force.
  • the electrical voltage is provided by an Agilent 3245A constant voltage source.
  • the actuator which is also attached to this arrangement, is supplied with its own voltage signal with suitably high frequencies to stimulate mechanical oscillation.
  • the natural frequency of the arrangement measured by means of the torsional vibration test is 0.6 Hz and the frequency of the set voltage signal is (0.06) Hz, see Figure 3.
  • the frequency of the excitation signal is only 10% of the previously measured resonance frequency of the arrangement. At this frequency, various values of the speed and the electrical current strength were measured in addition to the position.
  • the relationships from equations 1, 4 and 8 result in an actuator constant of for this exemplary embodiment

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne un agencement et un procédé pour le calibrage traçable d'un actionneur électrostatique. L'agencement comporte, outre un châssis mécanique guidé, au moins un dispositif de génération de force électrostatique. Grâce à l'agencement proposé et le procédé associé, le degré de génération de force peut être déterminé en mesurant les paramètres électriques prévalant sur les dispositifs de génération de force électrostatique simultanément et sans faire résonner l'agencement ou les parties du dispositif pertinentes pour la mesure. Ce calibrage peut avoir lieu pendant la génération d'une force.
PCT/EP2020/059888 2019-04-09 2020-04-07 Agencement et procédé de calibrage et de fonctionnement d'actionneurs capacitifs Ceased WO2020208014A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20718619.8A EP3954036A1 (fr) 2019-04-09 2020-04-07 Agencement et procédé de calibrage et de fonctionnement d'actionneurs capacitifs

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019109311.2A DE102019109311B3 (de) 2019-04-09 2019-04-09 Anordnung und Verfahren zur Kalibrierung und Betrieb von kapazitiven Aktoren
DE102019109311.2 2019-04-09

Publications (1)

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WO2020208014A1 true WO2020208014A1 (fr) 2020-10-15

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PCT/EP2020/059888 Ceased WO2020208014A1 (fr) 2019-04-09 2020-04-07 Agencement et procédé de calibrage et de fonctionnement d'actionneurs capacitifs

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EP (1) EP3954036A1 (fr)
DE (1) DE102019109311B3 (fr)
WO (1) WO2020208014A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114779147A (zh) * 2022-04-07 2022-07-22 中国工程物理研究院计量测试中心 一种远程控制非接触式静电电压表的检定方法
CN117214552A (zh) * 2023-09-22 2023-12-12 中国科学院长春光学精密机械与物理研究所 基于扭秤周期变化的导体表面电势测量方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963829A (en) 1988-03-21 1990-10-16 Wereb John A Shaft rotation analyzer using variable capacitance transducer maintained at a constant voltage
US20040113514A1 (en) 2002-12-12 2004-06-17 North Howard L. Method for electronic damping of electrostatic positioners
US20060267596A1 (en) 2003-05-21 2006-11-30 The Secretary Of State For Trade And Industry Of Her Majesty's Britannic Government Spring constant calibration device
DE102015104696B3 (de) 2015-03-27 2016-09-01 Sartorius Lab Instruments Gmbh & Co. Kg Elektrodynamische Levitationseinrichtung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753664B2 (en) * 2001-03-22 2004-06-22 Creo Products Inc. Method for linearization of an actuator via force gradient modification

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963829A (en) 1988-03-21 1990-10-16 Wereb John A Shaft rotation analyzer using variable capacitance transducer maintained at a constant voltage
US20040113514A1 (en) 2002-12-12 2004-06-17 North Howard L. Method for electronic damping of electrostatic positioners
US20060267596A1 (en) 2003-05-21 2006-11-30 The Secretary Of State For Trade And Industry Of Her Majesty's Britannic Government Spring constant calibration device
DE102015104696B3 (de) 2015-03-27 2016-09-01 Sartorius Lab Instruments Gmbh & Co. Kg Elektrodynamische Levitationseinrichtung

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A. M. THOMPSOND. G. LAMPARD: "A new theorem in electrostatics and its application to calculable standards of capacitance", NATURE, vol. 177, 1956, pages 888
NA YAN: "High Resolution Force Measurement System for Lorentz Force Velocimetry", 26 February 2019 (2019-02-26), XP055710341, Retrieved from the Internet <URL:https://www.db-thueringen.de/servlets/MCRFileNodeServlet/dbt_derivate_00044513/ilm1-2019000068.pdf> [retrieved on 20200630] *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114779147A (zh) * 2022-04-07 2022-07-22 中国工程物理研究院计量测试中心 一种远程控制非接触式静电电压表的检定方法
CN114779147B (zh) * 2022-04-07 2022-11-22 中国工程物理研究院计量测试中心 一种远程控制非接触式静电电压表的检定方法
CN117214552A (zh) * 2023-09-22 2023-12-12 中国科学院长春光学精密机械与物理研究所 基于扭秤周期变化的导体表面电势测量方法
CN117214552B (zh) * 2023-09-22 2024-03-22 中国科学院长春光学精密机械与物理研究所 基于扭秤周期变化的导体表面电势测量方法

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EP3954036A1 (fr) 2022-02-16
DE102019109311B3 (de) 2020-03-19

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