WO2021002492A1 - Dispositif d'inspection par rayons x sans contact et procédé d'inspection d'article associé - Google Patents
Dispositif d'inspection par rayons x sans contact et procédé d'inspection d'article associé Download PDFInfo
- Publication number
- WO2021002492A1 WO2021002492A1 PCT/KR2019/007979 KR2019007979W WO2021002492A1 WO 2021002492 A1 WO2021002492 A1 WO 2021002492A1 KR 2019007979 W KR2019007979 W KR 2019007979W WO 2021002492 A1 WO2021002492 A1 WO 2021002492A1
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- Prior art keywords
- inspection
- tray
- article
- ray
- contact
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
- H01M10/48—Accumulators combined with arrangements for measuring, testing or indicating the condition of cells, e.g. the level or density of the electrolyte
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Definitions
- the present invention relates to a non-contact X-ray inspection apparatus and a method for inspecting articles therefor, and in particular, non-contact X-rays capable of performing X-ray inspection in a state where there is no contact of a device for inspection of an article to be inspected during the process of moving to the inspection position and during the inspection process It relates to an inspection device and a method for inspecting articles by the same.
- Patent Registration No. 10-0978054 discloses a battery x-ray inspection apparatus in which an inspection object can be rotated at various angles.
- Patent Publication No. 10-2019-0013014 discloses an X-ray inspection apparatus capable of inspecting internal defects and joints.
- a conveying means or an alignment means must be used in a conveying process or inspection process of an article such as a battery subject to inspection.
- the inspection article must be brought into contact with these means for transport or alignment, and damage may occur to the inspection article depending on the article during the contact process. Therefore, there is a need to develop an inspection method in which there is no such contact or the inspection proceeds with minimal contact.
- the prior art does not disclose such a process.
- the present invention has the following object to solve the problems of the prior art.
- An object of the present invention is a non-contact X-ray inspection apparatus for inspecting a plurality of articles at one inspection position, while inspection is performed in a minimal contact method or without contact with the article to be inspected during the transport or inspection process It is to provide a method of inspecting goods by.
- a non-contact X-ray inspection apparatus includes at least one tray transfer path capable of transferring a tray in which at least one inspection article is loaded; An x-ray inspection module installed at an inspection position formed in the transfer path; And a position detection unit for detecting position information of the tray or inspection article, and the tray is aligned at the inspection position and inspected by the inspection module.
- At least one tray conveying path includes a pair of conveying units arranged in parallel with each other and each having an inspection position formed in the conveying path of the tray.
- it further comprises a conveying means for conveying the tray in which the inspection article is loaded.
- At least one tray is capable of vertical movement and rotation at each inspection position.
- the position sensing unit is a distance sensor or a vision unit that measures the distance between different positions of the inspection article.
- a plurality of trays includes a tray conveying means in which a plurality of trays are stacked in a vertical direction, and position information of each tray is sensed by a position sensing unit.
- the inspection article loaded in each tray is inspected by the inspection module while the tray conveying means is moved up and down.
- the test article is a battery cell or a stacked battery in which tabs are formed on both sides.
- a method of non-contact X-ray inspection includes the steps of: loading at least one battery cell into a tray and moving to a standby position; Generating location information of the battery cell at the standby location; Moving the tray to the inspection position and performing inspection by the inspection module based on the location information; And moving the tested battery cell to the discharge position.
- the tray further includes a step of aligning according to the location information.
- the non-contact X-ray inspection apparatus prevents damage to the article during the inspection process by allowing the means for loading or aligning the inspection article to be carried out without contacting the article during the transport process or inspection process. do.
- the x-ray inspection apparatus according to the present invention improves inspection efficiency by performing inspection while an inspection article is transported through two or more paths.
- the x-ray inspection apparatus according to the present invention improves inspection efficiency by simultaneously inspecting a plurality of inspection articles at each inspection position.
- the inspection efficiency is improved by generating state information on the location of the inspection article in advance and performing the inspection on the article based thereon.
- the inspection apparatus and method according to the present invention can be applied to inspection of various articles, but can be usefully applied to inspection of batteries, and can be advantageously applied to inspection of battery cells for electric vehicles or stacked batteries having tabs formed on both sides. have.
- FIG. 1 shows an embodiment of a non-contact X-ray inspection apparatus according to the present invention.
- FIG. 2 shows an embodiment of a tray conveying means or a tray for conveying inspection articles applied to the x-ray inspection apparatus according to the present invention.
- FIG. 3 is a diagram illustrating an embodiment of a process of obtaining location information of an inspection article in an x-ray inspection apparatus according to the present invention.
- FIG. 4 is a view showing an embodiment in which a cell battery for a vehicle and a plurality of cell batteries to be inspected in an X-ray inspection apparatus according to the present invention are loaded in one tray transfer means.
- FIG. 5 illustrates an embodiment of a non-contact X-ray inspection method according to the present invention.
- FIG. 1 shows an embodiment of a non-contact X-ray inspection apparatus according to the present invention.
- the non-contact X-ray inspection apparatus includes at least one tray transfer path through which the tray 16 on which at least one inspection article (BI) is loaded; X-ray inspection modules (14a, 14b, 15a, 15b) installed in the inspection positions (IP1, IP2) formed in the transport path; And a position detection unit (AS1, AS2) for sensing the position information of the tray 16 or the inspection article (BI), and the tray 16 is aligned at the inspection positions (P1, P2), 14b, 15a, 15b).
- a position detection unit AS1, AS2
- the inspection article BI may be, for example, a battery, a battery cell, a stacked battery with tabs formed on both sides, or a similar article, and specifically, may be an article such as a battery cell for an electric vehicle.
- the appearance and internal state of the inspection article BI may be inspected by the inspection modules 14a, 14b, 15a, 15b.
- the inspection article (BI) may be loaded on the tray 16, and a plurality of inspection articles (BI) are loaded in each tray 16, or one inspection article (BI) is loaded in each tray 16 Can be.
- a plurality of trays 16 may be loaded on a tray conveying means such as conveying means movable along the input conveying unit 13a.
- the input transfer unit 13a may have a structure extending from the outside to the inside of the test chamber R having a closed structure.
- a shielding door SD1 is installed at an entrance through which the input and transfer unit 13a flows into the examination room R, so that leakage of X-rays to the outside during the inspection process may be prevented.
- the tray transfer means passes through the shield door SD1 along the input transfer unit 13a to the inspection room R Can be guided into the inside of.
- a first induction transfer unit 11a connected to the input transfer unit 13a may be disposed inside the examination room R.
- the first induction transfer unit 11a may extend in a direction perpendicular to the extension direction of the input transfer unit 13a, for example, the input transfer unit 13a may be connected to the middle part of the induction transfer unit 11a.
- One tray 16 or conveying means injected through the input conveying unit 13a may be moved in one direction of the first induction conveying unit 11. Thereafter, the tray 16 or the conveying means to be input next may be moved in a different direction of the first induction conveying unit 11a.
- first and second inspection transfer units 12a and 12b may be connected to both ends of the first induction transfer unit 11a, respectively.
- the first and second inspection transfer units 12a and 12b may be arranged in parallel and parallel and extend in a direction perpendicular to the first induction transfer unit 11a.
- a second guide transfer unit 11b extending in the same or similar direction as the first guide transfer unit 11a may be connected to each other end of the first and second inspection transfer units 12a 12b.
- a discharge transfer unit 13b having a structure similar to that of the input transfer unit 13a may be connected to an intermediate portion of the second induction transfer unit 11b so as to extend to the outside of the test room R.
- one tray 16 or a transfer means is input along the input transfer unit 13a and is moved along one direction of the first guide transfer 11a to be a first inspection transfer unit.
- the other tray 16 or the transfer means may be introduced into the test chamber R along the input transfer unit 13a to be guided in a different direction of the first guide transfer unit 11a. Thereafter, the other tray 16 or transfer means may be moved along the second inspection transfer unit 12b to move to the second inspection position IP2.
- one inspection article (BI) and the other inspection article (BI) are introduced into the inspection room through the same input and transfer unit 13a, and the first and second inspection positions (IP1) disposed at positions facing each other along different paths. , IP2).
- the inspection of the inspection article BI at the first and second inspection positions IP1 and IP2 may be sequentially performed by the first and second inspection modules 14a, 14b, 15a, and 15b.
- the first and second inspection modules 14a, 14b, 15a, and 15b include first and second X-ray tubes 14a and 14b disposed to face each other based on the first and second inspection positions IP1 and IP2, and the first, 2 It may consist of first and second detectors 15a and 15b that are emitted from the x-ray tubes 14a and 14b and detect X-rays that have passed through the inspection article BI positioned at each of the inspection positions IP1 and IP2.
- the first and second X-ray tubes 14a and 14b may have a structure that can be moved back and forth along the focus setting directions MD1 and MD2 according to the inspection positions IP1 and IP2, and the first and second detectors 15a and 15b Can be fixed in a fixed position.
- the first and second X-ray tubes 14a and 14b and the first and second detectors 15a and 15b may be moved together based on a predetermined focal position. Inspection of the inspection article (BI) at each inspection position (IP1, IP2) may be made sequentially. In the process of performing the inspection at the first inspection position IP1, the other tray 16 may be transferred to the second inspection position IP2 by another transfer means.
- the inspection article (BC) is the first inspection transfer unit (12a) and the second It may be moved to the discharge transfer unit 13b through the induction transfer unit 11b and enter the discharge standby state.
- the inspection article BI may be moved to the first inspection position IP1.
- inspection of the inspection article (BI) can be sequentially performed at the first and second inspection positions (IP1, IP2), and the inspection article (BI) is moved to each inspection position (IP1, IP2) in the inspection process. Inspection efficiency can be improved by being moved
- the discharge transfer unit 13b can extend from the inside to the outside of the test room R, and a shield door SD2 is installed at the location where the discharge transfer unit 13b is discharged. Can be.
- a plurality of inspection articles (BI) may be inspected at each inspection position (IP1, IP2), and each inspection article (BI) can be inspected in a state loaded on the tray (16).
- the positioning unit may be coupled to the transfer means.
- the position adjustment unit can move the conveying means along the XYZ-axis or rotate the conveying means.
- the conveying means may be moved along the XYZ-axis or may have a rotatable structure. If, for example, the conveying means is located at an inspection station arranged at the inspection positions IP1, IP2, the conveying means in the inspection station can be moved along the XYZ-axis, or the inspection station can be rotated.
- a plurality of trays 16 may be loaded in the vertical direction in the conveying means, or a plurality of inspection articles (BI) may be loaded in one tray 16, and the conveying means may be moved along the XY-plane so that the X-ray tube 14a , 14b) can be moved to the focal position in the horizontal direction.
- the conveying means moves in the Z-axis direction, an X-ray image of the inspection article BI loaded on each tray 16 may be obtained by the detectors 15a and 15b.
- the conveying means may be rotated to align the image acquisition direction of each inspection article BI.
- position information on the inspection article BI loaded on each tray 16 is obtained in advance and transferred to the control module. Need to be transmitted.
- the conveying means can be rotated or XYZ-axis based on the positional information for the inspection article BI.
- Position information for each inspection article loaded on the conveying means may be detected by the position detection units AS1 and AS2.
- the position detection units AS1 and AS2 may be disposed at the position where the first and second inspection transfer units 12a and 12b start or other suitable positions.
- Position information for each inspection article (BI) loaded in the transport means can be obtained by the position detection unit (AS1.AS2), and the obtained position information is, for example, a control panel installed outside the inspection room (R). It can be transmitted to the control module placed in (17).
- the control module may align the conveying means according to the positional information based on the XYZ-axis direction and the R-axis direction when the conveying means is conveyed to each of the inspection objects IP1 and IP2.
- the conveying means are aligned with respect to each inspection article BI so that an X-ray image of each inspection article BI is obtained.
- the position sensing units AS1 and AS2 may be various sensing means capable of obtaining positional information of each inspection article BI, such as a distance sensor or an image acquisition unit, a vision unit, or various optical sensors.
- a control panel 17 is disposed outside the test room R so that various test conditions necessary for the test can be input, and a display unit 18 that displays an X-ray image of the test article BI is installed during the test process.
- Windows (W1, W2) for observing the interior of the examination room (R) or a door for internal inspection may be installed.
- the examination room R may have various structures, and the present invention is not limited thereto.
- FIG. 2 shows an embodiment of a transfer means or tray for transferring inspection articles applied to the x-ray inspection apparatus according to the present invention.
- the x-ray inspection apparatus includes a transfer means 21 for transferring the tray 16 on which the inspection article BI is loaded.
- the conveying means 21 may have various shuttles or similar structures that are movable along a conveying unit such as, for example, a conveyor, rail or guide guide.
- the tray 16 may be loaded with an inspection article B such as a battery cell, and the inspection tray 16 may be loaded on the conveying means 21.
- the transfer means 21 may be moved to the inspection position along the transfer unit.
- At least one tray 16 can be loaded into the transfer means 21, a clamp unit 211 is installed in the transfer means 21 so that the tray 16 can be fixed at a predetermined position, and the transfer means ( A pair of alignment guides 22a and 22b may be installed on 21), and the alignment guides 22a and 22b may have a structure of a vertical member.
- the tray 16 consists of a loading tray 16a coupled to the alignment guides 22a and 22b and a fixed tray 16b disposed to be movable along the alignment guides 22a and 22b above the loading tray 16a. I can.
- the elastic means 223 may be disposed in the upper portion of the alignment guides 22a and 22b, and the fixing tray 16b may be held in a predetermined position by the elastic means 223, for example, the inspection article B Apply pressure to the upper part of) to ensure that the inspection article (B) is stably maintained in a predetermined position.
- the separating unit 23 may be coupled to the fixed tray 16b.
- the separating unit 23 may be connected to a motor or a driving means similar thereto to move up and down, and at least one separating shaft 231 may be coupled to the separating unit 23. One end of the separation shaft 231 may be coupled to the fixed tray 16b.
- the fixed tray 16b can be moved up and down along the alignment guides 22a and 22b by the vertical movement of the separation unit 23, thereby adjusting the distance between the loading tray 16a and the fixed tray 16b. Can be.
- the separating unit 23 can be moved upward for loading the inspection article (B), and is moved upward of the loading tray 16a by the loading unit 24 capable of moving the inspection article (B) to inspect The article B can be loaded on the loading tray 16a.
- the fixing tray 16b is moved downward so that the inspection article B may be fixed at a predetermined position of the loading tray 16a.
- the transfer means 21 is moved to the inspection position to perform inspection on the inspection object B, and the inspection object B, which has been inspected, may be discharged to the outside of the inspection room.
- the fixed tray 16b can be moved upward by the separating unit 23 for unloading the inspection object B, and the inspection object B is separated from the loading tray 16a by the lift unit 215 Can be. When the inspection object B is separated in this way, it may be unloaded from the loading tray 16a by the loading unit 24.
- the transfer means 21 may have various structures, and a plurality of inspection objects B may be loaded between the loading tray 16a and the fixed tray 16b.
- the inspection object B may be loaded or unloaded on the tray 16 in various ways, and is not limited to the presented embodiment.
- FIG. 3 is a diagram illustrating an embodiment of a process of obtaining location information of an inspection article in an x-ray inspection apparatus according to the present invention.
- the position sensing units AS1 and AS2 become distance sensors 31a, 31b, and 31c that measure distances of different positions of the inspection article B.
- the inspection article BI may be loaded to the tray 16 to have various directions, and the tray 16 may be coupled to the transfer means 21 to have a predetermined direction.
- the distance to three different locations of the inspection article BI may be measured by the three distance sensors 31a, 31b, and 31c before the transfer means 21 is moved to the inspection position.
- the three distance sensors 31a, 31b, 31c may be a laser sensor, an ultrasonic sensor, or a near-field measurement sensor similar thereto, and may be disposed at a predetermined position based on the conveying means 21 or the tray 16. I can.
- two distance sensors 31b and 31c may be disposed along the length direction of the transfer means 21, and one distance sensor 31a may be disposed in the width direction of the transfer means 21.
- the arrangement distance (D1, D2, D3) to the inspection article (BI) can be measured by each distance sensor (31a, 31b, 31c), based on the measured arrangement distance (D1, D2, D3) XYZ-axis coordinates and rotation angles to be aligned in the direction of the alignment inspection article ABI indicated by a dotted line may be calculated.
- the moving distance and rotation angle may be transmitted to the control module.
- the conveying means 21 When the conveying means 21 is moved to the inspection position, the conveying means 21 is moved or rotated by a predetermined distance based on the reference position, and accordingly, the inspection article BI can be aligned.
- the image acquired by the X-ray tube 14a and the detector 15a may be an image of the alignment inspection article ABI, thereby enabling an accurate inspection of the inspection article BI.
- the transport means 21 When the inspection is completed, the transport means 21 may be moved or rotated to an original position, and may be moved to the discharging position in a state in which the inspection article BI for which the inspection has been completed is loaded.
- Position information on the inspection object BI by the distance sensors 31a, 31b, and 31c may be obtained for each of the plurality of inspection objects BI when they are loaded on the tray 16.
- the location information is generated by the distance sensors 31a, 31b, and 31c in the present embodiment, the location information may be a vision unit such as a camera, and the present invention is not limited by means of generating the location information.
- FIG. 4 is a diagram illustrating an embodiment in which a cell battery for a vehicle and a plurality of cell batteries to be inspected in an X-ray inspection apparatus according to the present invention are loaded in one shuttle.
- the inspection article (B) may be a plate-shaped battery cell for a vehicle or a battery of a stack structure in which tabs are formed on both sides, and the battery cell is composed of a cell body (CB) and an electrode tab (T). I can.
- the inspection article B having such a structure may be in a state in which a plurality of electrode layers are overlapped with each other, and may be damaged when pressure is applied in the lateral direction or pressure is applied partially in the vertical direction. Therefore, the inspection article needs to be handled in a non-contact manner with respect to the direction in which damage may occur.
- One loading tray (16a) and a plurality of fixed trays (16b, 16c, 16d) can be separated from each other and disposed in a vertical direction on the transfer means 21, and a plurality of fixed trays (16b, 16c, 16d) are adjustable It may have a structure capable of vertical movement with respect to the shafts 41a and 41b. At least one inspection article B may be disposed on the loading tray 16a or at least one fixed tray 16b, 16c, 16d.
- the position adjustment unit 42 may be coupled to the adjustment shafts 41a and 41b, and the rotation shaft 43 may be coupled to the position adjustment unit 42.
- the rotation shaft 43 may be formed on the yarae side of the transfer means 21.
- Each of the fixed trays (16b, 16c, 16c) can be moved up and down by the position adjustment unit (42).
- the location information of each inspection article (B1, B2, B3) can be detected by the position detection unit described above.
- the location information (PI_1, PI_2, PI_3) for each inspection article (B1, B2, B3) is sensed by the position detection unit and transmitted to the control module.
- the location information on the inspection articles B1, B2, and B3 may be obtained in various ways and is not limited to the exemplary embodiments presented.
- FIG. 5 illustrates an embodiment of a non-contact X-ray inspection method according to the present invention.
- the non-contact X-ray inspection method includes steps of loading at least one battery cell into a tray and moving to a standby position (P51); Generating location information of the battery cell at the standby position (P52); Step of moving the tray to the inspection position and performing inspection by the inspection module based on the location information (P53); And a step (P54) of moving the tested battery cell to the discharge position.
- the tray or conveying means is rotated according to the location information.
- the battery cells are loaded on the tray, and the tray is loaded on the transfer means and can be moved to the standby position along the transfer unit (P51).
- position information on the inspection article may be acquired by, for example, three laser sensors or a vision unit and transmitted to the control module (P52).
- the conveying means is moved to the inspection position, and the conveying means is rotated based on the position information at the inspection position, so that the inspection article may be aligned in a predetermined direction.
- an X-ray image of the inspection article may be obtained by the X-ray tube and the detector (P53).
- the transfer means is moved to the discharge position along the transfer unit so that the inspection article can be unloaded.
- the test article may be, for example, a battery cell for an automobile, but the present invention is not limited thereto.
- the inspection apparatus and method according to the present invention can be applied to inspection of various articles, but can be usefully applied to inspection of batteries, and can be advantageously applied to inspection of battery cells for electric vehicles or stacked batteries having tabs formed on both sides. .
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Abstract
La présente invention concerne un dispositif d'inspection par rayons X sans contact et un procédé d'inspection d'article associé. Le dispositif d'inspection par rayons X sans contact comprend : au moins une voie de transport de plateau sur laquelle un plateau (16) doté d'au moins un article (BI) à inspecter chargé sur ce dernier peut être transporté ; des modules d'inspection par rayons X (14a, 14b, 15a, 15b) situés à des emplacements d'inspection (IP1, IP2) formés sur la voie de transport ; et des unités de détection de position (AS1, AS2) permettant de détecter des informations de position du plateau (16) ou de l'article (BI) à inspecter, l'inspection étant effectuée par les modules d'inspection (14a, 14b, 15a, 15b) lorsque le plateau (16) est aligné aux emplacements d'inspection (IP1, IP2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/KR2019/007979 WO2021002492A1 (fr) | 2019-07-01 | 2019-07-01 | Dispositif d'inspection par rayons x sans contact et procédé d'inspection d'article associé |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/KR2019/007979 WO2021002492A1 (fr) | 2019-07-01 | 2019-07-01 | Dispositif d'inspection par rayons x sans contact et procédé d'inspection d'article associé |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2021002492A1 true WO2021002492A1 (fr) | 2021-01-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2019/007979 Ceased WO2021002492A1 (fr) | 2019-07-01 | 2019-07-01 | Dispositif d'inspection par rayons x sans contact et procédé d'inspection d'article associé |
Country Status (1)
| Country | Link |
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| WO (1) | WO2021002492A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023161329A1 (fr) * | 2022-02-24 | 2023-08-31 | Körber Technologies Gmbh | Dispositif de mesure pour mesurer l'alignement et/ou l'orientation de segments dans l'industrie de production de cellules d'énergie, et procédé de production de segments |
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|---|---|---|---|---|
| KR20040067908A (ko) * | 2003-01-20 | 2004-07-30 | 오에누 덴시 가부시키가이샤 | 기판 검사 장치 |
| KR20160068414A (ko) * | 2014-12-05 | 2016-06-15 | (주)자비스 | 엑스레이 검사를 위한 이동 스테이지 및 이를 가진 엑스레이 검사 장치 |
| JP2017142217A (ja) * | 2016-02-12 | 2017-08-17 | 国立大学法人京都工芸繊維大学 | 撮影装置、及び、撮影方法 |
| KR20180000504A (ko) * | 2016-06-23 | 2018-01-03 | 대우조선해양 주식회사 | 비파괴 검사 자동화 장치 및 자동화 방법 |
| KR20180111428A (ko) * | 2017-03-31 | 2018-10-11 | 세메스 주식회사 | X선 검사 장치 |
| KR20190013014A (ko) * | 2017-07-31 | 2019-02-11 | (주)자비스 | 내부 결함 및 접합 부위의 검사가 가능한 엑스레이 검사 장치 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023161329A1 (fr) * | 2022-02-24 | 2023-08-31 | Körber Technologies Gmbh | Dispositif de mesure pour mesurer l'alignement et/ou l'orientation de segments dans l'industrie de production de cellules d'énergie, et procédé de production de segments |
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