WO2022007366A1 - Broche motorisée à palier pneumatique et machine-outil - Google Patents

Broche motorisée à palier pneumatique et machine-outil Download PDF

Info

Publication number
WO2022007366A1
WO2022007366A1 PCT/CN2020/141604 CN2020141604W WO2022007366A1 WO 2022007366 A1 WO2022007366 A1 WO 2022007366A1 CN 2020141604 W CN2020141604 W CN 2020141604W WO 2022007366 A1 WO2022007366 A1 WO 2022007366A1
Authority
WO
WIPO (PCT)
Prior art keywords
assembly
air
bearing
shaft core
core assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2020/141604
Other languages
English (en)
Chinese (zh)
Inventor
赵聪
龚展宏
张翰乾
黄俊治
汤秀清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangzhou Haozhi Electromechanical Co Ltd
Original Assignee
Guangzhou Haozhi Electromechanical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangzhou Haozhi Electromechanical Co Ltd filed Critical Guangzhou Haozhi Electromechanical Co Ltd
Publication of WO2022007366A1 publication Critical patent/WO2022007366A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Definitions

  • the present application relates to the field of mechanical processing, for example, to an air-floating electric spindle and a machine tool.
  • the precision machining level could reach 3-5 ⁇ m, and the machining accuracy that ultra-precision machining could achieve could reach 1 ⁇ m.
  • the precision of precision machining can reach 1 ⁇ m, and the level of ultra-precision machining can reach 0.1 ⁇ m.
  • the machining accuracy of precision and ultra-precision machining has been improved to the nanometer level.
  • the air-floated electric spindle Because of the error homogenization phenomenon of the air-floated electric spindle, as well as low friction and low loss, the air-floated electric spindle has become one of the best carriers for ultra-precision machining.
  • the vibration of the air-flotation electric spindle has a huge impact on the machining accuracy. Excessive vibration may cause vibration and knife lines in the machining, which cannot guarantee the machining quality of ultra-precision machining.
  • the application provides an air-floating electric spindle and a machine tool, which can ensure that the spindle can still ensure extremely low vibration at high speed, and ensure the stability of the spindle during long-term and high-speed operation while ensuring nano-level processing. .
  • An embodiment provides an air-floating electric spindle, including: a body assembly; a shaft core assembly having a flying disc, the shaft core assembly is suspended on the body assembly by a thrust bearing assembly and an air bearing assembly, and the shaft core assembly is suspended on the body assembly.
  • the first end of the shaft core assembly forms a power output end
  • the second end of the shaft core assembly forms a power input end
  • a motor assembly is provided at the power input end, the motor assembly includes a stator and a copper squirrel cage, the stator and the The body assembly is connected, the copper squirrel cage is combined with the shaft core assembly, and forms a cylindrical surface coaxial with the shaft core assembly.
  • the flying disc is located at a position where the shaft core assembly is close to the motor assembly, the thrust bearing assembly is located between the flying disc and the motor assembly, and the air bearing assembly is located on the flying disc
  • the thrust bearing assembly has a first thrust surface matched with the flying disc, the first thrust surface is provided with a first axial air outlet, and the air bearing assembly
  • the second thrust surface is provided with a second axial outlet hole
  • the air bearing assembly has a support surface matched with the outer peripheral surface of the shaft core assembly
  • the bearing surface is provided with radial air outlet holes
  • the body assembly is provided with air passages connected with the first axial air outlet holes, the second axial air outlet holes and the radial air outlet holes.
  • the air bearing assembly has a first bearing surface and a second bearing surface that cooperate with the outer peripheral surface of the shaft core assembly, and the first bearing surface and the second bearing surface extend along the power input end to The direction distribution of the power output end, the first support surface and the second support surface are both provided with radial air outlet holes, and the air flotation pressure generated by the radial air outlet holes on the second support surface is greater than that of the radial air outlet holes in the first support surface. Air flotation pressure generated by a bearing surface.
  • the number of radial air outlet holes of the second support surface is greater than the number of radial air outlet holes of the first support surface.
  • the density of the radial outlet holes of the second bearing surface is greater than the density of the radial outlet holes of the first bearing surface.
  • first bearing surface and the second bearing surface are axially separated by a certain distance, and the portion of the inner wall surface of the air bearing assembly between the first bearing surface and the second bearing surface The shaft core assembly is left with a non-fit clearance.
  • the air-floating electric spindle further comprises: a vibration sensor, configured to monitor the vibration of the shaft core assembly; and a processor, according to the signal of the vibration sensor, to control the motor assembly to stop the shaft core assembly.
  • the vibration sensor is integrated into the stator.
  • the air-floating electric spindle further includes: a cylinder assembly configured to drive the shaft core assembly to enable the power output end to perform tool change.
  • An embodiment also provides a machine tool, including the above-mentioned air-floating electric spindle.
  • the motor assembly uses a copper squirrel cage as the rotor.
  • the motor assembly is located at the end of the shaft core assembly and drives the copper squirrel cage to drive the shaft core assembly to rotate at high speed.
  • the thrust bearing assembly and the air bearing assembly support the shaft core assembly to suspend.
  • Vibration has a huge impact on the machining accuracy. Excessive vibration may lead to vibrating knife lines in machining, which cannot guarantee the machining quality of ultra-precision machining.
  • the maximum vibration position is located at the drive position, that is, the motor position.
  • the copper squirrel cage which is more tightly closed and can ensure the shape and position tolerance, is used as the shaft core rotor to ensure the stability of the entire shaft core.
  • the rear position of the motor assembly keeps the vibration source away from the tool end to ensure that the tool is affected by minimal vibration.
  • the above can avoid the poor machining caused by vibration to the greatest extent, and also avoid the large vibration of the machining end caused by the single copper squirrel cage motor in the middle or the motor excitation caused by the poor machining of the cast aluminum rotor itself, so as to ensure the machining quality.
  • the rear-mounted copper squirrel cage makes it possible for ultra-precision machining with a surface accuracy of less than 10nm.
  • FIG. 1 is a schematic structural diagram of an air-floating electric spindle provided by an embodiment of the present application.
  • FIG. 2 is a schematic structural diagram of the motor assembly shown in FIG. 1 according to an embodiment of the present application;
  • FIG. 3 is a schematic structural diagram of the air bearing assembly shown in FIG. 1 according to an embodiment of the present application;
  • FIG. 4 is a schematic diagram of a combined state of the vibration sensor shown in FIG. 1 and the stator according to an embodiment of the present application.
  • “several” means one or more, “multiple” means two or more, “greater than”, “less than” and “exceeding” are understood as not including this number; “above”, “below” and “within” “ etc. are understood to include the original number.
  • “first” and “second” are only used for the purpose of distinguishing technical features, it should not be understood as indicating or implying relative importance or implying the number of indicated technical features or Implicitly indicates the order of the indicated technical features.
  • words such as “arrangement”, “installation” and “connection” should be understood in a broad sense.
  • it may be directly connected or indirectly connected through an intermediate medium; it may be a fixed connection or a
  • the detachable connection can also be integrally formed; it can be a mechanical connection or an electrical connection or can communicate with each other; it can be the internal communication between the two elements or the interaction relationship between the two elements.
  • FIG. 1 shows the reference direction coordinate system of the embodiment of the present application, and the following describes the embodiment of the present application with reference to the directions shown in FIG. 1 .
  • an embodiment of the present application provides an air-floating electric spindle, which includes a body assembly 1 , a shaft core assembly 2 and a motor assembly.
  • the shaft core assembly 2 has a flying disc 21 , the shaft core assembly 2 is suspended on the body assembly 1 through the thrust bearing assembly 41 and the air bearing assembly 42 , the first end of the shaft core assembly 2 forms a power output end, and the second end of the shaft core assembly 2 form the power input.
  • the power input end is located at the upper end of the shaft core assembly 2
  • the motor assembly is located at the power input end
  • the power output end is located at the lower end of the shaft core assembly 2
  • the power output end is connected to the tool to realize the transmission of the power from the power input end to the machining tool.
  • the gas enters the air bearing assembly 42 and the thrust bearing assembly 41 in turn through the body assembly 1, and a pressure gas film is formed between the shaft core assembly 2 and the air bearing assembly 42 and the thrust bearing assembly 41 respectively, supporting the shaft core.
  • the assembly 2 is in a suspended state, and the shaft core assembly 2 is driven by the motor assembly to rotate at a high speed.
  • the motor assembly includes a stator 31 and a copper squirrel cage 32 .
  • the stator 31 is connected to the body assembly 1 , and the copper squirrel cage 32 is combined with the shaft core assembly 2 to form a cylindrical surface coaxial with the shaft core assembly 2 .
  • the copper squirrel cage 32 is integrated in the shaft core assembly 2, and together with the shaft core assembly 2 forms a perfect outer circular surface.
  • the motor assembly uses a copper squirrel cage 32 as a rotor, and the motor assembly is located at the end of the shaft core assembly 2 to drive the shaft core assembly 2 to rotate at high speed by driving the copper squirrel cage 32 .
  • Vibration has a huge impact on the machining accuracy. Excessive vibration may lead to vibrating knife lines in machining, which cannot guarantee the quality of ultra-precision machining.
  • the maximum vibration position is located at the drive position, that is, the motor position.
  • the copper squirrel cage 32 which is tighter and can guarantee the geometrical tolerance, is used as the shaft core rotor to ensure the stability of the entire shaft core.
  • the rear position of the motor assembly keeps the vibration source away from the tool end, so as to ensure that the tool is affected by the least degree of vibration.
  • the combination of the two can avoid the poor machining caused by vibration to the greatest extent, and can also avoid the vibration of the machining end caused by the single copper squirrel cage motor in the middle.
  • the motor is too large or the motor is excited by the poor processing of the cast aluminum rotor itself, so as to ensure the processing quality.
  • the rear-mounted copper squirrel cage 32 makes it possible for the ultra-precision machining of the surface to be less than 10nm.
  • the embodiment of the present application uses the copper squirrel cage 32 rear structure rotor, combined with the high shape and position tolerance of the copper squirrel cage 32 and the small vibration characteristics of the rotor rear, so that the main shaft can still ensure extremely low vibration at high speed, ensuring that The nano-level surface milling also ensures the stability of the spindle during long-term, high-speed operation.
  • the flying disc 21 may be located at one end or the middle of the shaft core assembly 2 , and the flying disc 21 is arranged to carry the axial force generated by the shaft core assembly 2 during the tool machining process. Referring to FIG. 1 , in some embodiments, the flying disc 21 is located at the position of the shaft core assembly 2 close to the motor assembly, and the thrust bearing assembly 41 is located between the flying disc 21 and the motor assembly. The motor and Frisbee 21 are installed at the rear to eliminate temperature interference. In one embodiment, the motor assembly is located at the end of the shaft assembly 2 to drive the shaft assembly 2 to rotate at high speed, and the thrust bearing assembly 41 and the fly disc 21 of the shaft assembly 2 are located at the end of the spindle away from the tool.
  • the amount of heat generation has a great influence on the machining accuracy, so that the main heating part of the electric spindle is far away from the shaft core tool, which can avoid the thermal elongation of the shaft core caused by the heating of the internal structure to the greatest extent, and ensure the processing quality.
  • the rear-mounted flying disc 21 and the rear-mounted motor structure make it possible to process the nanometer-level precision.
  • the air bearing assembly 42 is located on the side of the flying disc 21 away from the motor assembly, the thrust bearing assembly 41 has a first thrust surface that cooperates with the flying disc 21 , and the first thrust surface is provided with a first axial air outlet 43 , the air bearing assembly 42 has a second thrust surface that cooperates with the flying disc 21, the second thrust surface is provided with a second axial air outlet 44, and the air bearing assembly 42 has a support that cooperates with the outer peripheral surface of the shaft core assembly
  • the support surface is provided with radial air outlet holes 45
  • the body assembly 1 is provided with air passages connected to the first axial air outlet holes 43 , the second axial air outlet holes 44 and the radial air outlet holes 45 .
  • the gas enters the air bearing assembly 42 and the thrust bearing assembly 41 in turn through the air passage of the body assembly 1, between the shaft core assembly 2 and the air bearing assembly 42 and between the shaft core assembly 2 and the thrust bearing assembly 41 A pressure gas film is formed therebetween, the supporting shaft core assembly 2 is in a suspended state, and the shaft core assembly 2 is driven by the motor assembly to rotate at a high speed.
  • the air bearing assembly 42 has a first bearing surface 46 and a second bearing surface 47 that cooperate with the outer peripheral surface of the shaft core assembly 2 .
  • the first bearing surface 46 and the second bearing surface The surfaces 47 are distributed along the direction from the power input end to the power output end, that is, the first support surface 46 is located above the second support surface 47 , and the second support surface 47 is closer to the power output end than the first support surface 46 .
  • the first supporting surface 46 and the second supporting surface 47 are provided with radial air outlet holes 45 , and the air flotation pressure generated by the radial air outlet holes 45 on the second supporting surface 47 is greater than the air generated by the radial air outlet holes 45 on the first supporting surface 46 . float pressure.
  • a non-uniform pressure air bearing is formed inside the air bearing assembly 42, and the high-pressure gas enters from the body assembly 1, enters the gap between the air bearing assembly 42 and the body assembly 1 through the air passage, and passes through the diameter of the radial air outlet 45.
  • the shaft core assembly 2 is suspended toward the damping plug 49 .
  • the ultra-precision spindle is prone to vibration excitation, column vortex, cone vortex and other phenomena, which eventually lead to the rotational vibration of the spindle or the large swing of the shaft core or even lock.
  • the application uses an internal non-uniform pressure air bearing, that is, the air flotation pressure generated by the radial air outlet 45 on the second bearing surface 47 is greater than that of the radial outlet 45 on the first bearing surface 46.
  • the generated air flotation pressure causes differences in the stiffness of the air film at different positions inside the spindle.
  • the embodiment of the present application uses a brand-new internal non-uniform pressure air bearing, and through rigorous calculation, the rigidity of the entire shaft system of the main shaft is guaranteed, and the extremely high rotational accuracy requirements can still be met under the state of ultra-high rotation speed. It makes ultra-precision machining of high-speed small-diameter tools possible.
  • the radial outlet holes 45 of the bearing surface 47 are fed with a higher pressure high-pressure gas.
  • the number of the radial air outlet holes 45 of the second bearing surface 47 is greater than the number of the radial air outlet holes 45 of the first bearing surface 46 .
  • the density of the radial air outlet holes 45 of the second support surface 47 is greater than the density of the radial air outlet holes 45 of the first support surface 46 . That is, by adjusting the distance and quantity of the radial damping plugs 49 in the air bearing, the air film stiffness at different positions inside the main shaft is different.
  • the air bearing assembly 42 has two or more air inlet areas matched with the outer peripheral surface of the shaft core assembly 2 , so as to provide multi-point support for the shaft core assembly 2 .
  • the first support surface 46 and the second support surface 47 may be distributed continuously or at intervals.
  • the first bearing surface 46 and the second bearing surface 47 are separated by a certain distance in the axial direction, and the first bearing surface 46 and the second bearing surface 47 are matched with the shaft core assembly 2 , provides two-point support for the shaft core assembly 2 in the radial direction, and is more stable for the positioning of the shaft core assembly 2 .
  • a part of the inner wall surface of the air bearing assembly 42 located between the first bearing surface 46 and the second bearing surface 47 leaves a non-fit gap 48 with the shaft core assembly 2.
  • the first bearing surface 46 and the second bearing surface The part between 47 does not provide radial support for the shaft core assembly 2, so that it is not necessary to perform high-precision machining on the part between the first bearing surface 46 and the second bearing surface 47, and only the first bearing surface 46 and the second bearing surface 47 can be processed with high precision, so that the processing cost of the air bearing assembly 42 can be greatly reduced.
  • the air-floating electric spindle further includes a vibration sensor 5 and a processor (not shown in the figure).
  • the signal from the sensor 5 controls the motor assembly to stop the shaft assembly 2 .
  • the stability and safety of the ultra-precision spindle are ensured by setting the spindle vibration monitoring device.
  • the vibration sensor 5 will forcibly terminate the operation of the main shaft to prevent damage to the main shaft or cause serious accidents.
  • Ultra-precision spindles have extremely high requirements on the environment during operation. Small temperature changes or changes in air source air pressure may cause the spindle to become unstable and lock up.
  • the air-floating spindle will not lock instantly due to the dynamic pressure effect.
  • the process of locking can often be reflected in the change of vibration.
  • the detection of temperature and air pressure cannot fully reflect whether the spindle has the risk of locking. Therefore, the vibration sensor 5 is used to detect the vibration of the position of the spindle motor, which can save processing costs and reduce the risk of spindle locking.
  • the vibration sensor 5 integrated in the spindle motor ensures that the spindle will not be locked due to unstable operation, and the spindle will be forcibly stopped at the moment of unstable operation, which ensures the life of the spindle and the safety of the operator.
  • the processor controls the motor assembly to stop or provides a reverse driving force to stop the shaft core assembly 2 according to the signal of the vibration sensor 5 .
  • the maximum vibration position is located at the drive position, that is, the motor position. Therefore, in some embodiments, referring to FIG. 4 , the vibration sensor 5 is integrated in the stator 31 .
  • the vibration sensor 5 determines the vibration state of the shaft core assembly 2 by monitoring the vibration state of the stator 31, and the structure is more concise, and the vibration sensor 5 integrated in the stator 31 can not only monitor the vibration amplitude, but also monitor the acceleration of vibration and many other vibrations. parameters to further ensure the life of the spindle and the safety of the operator.
  • the embodiment of the present application uses the vibration monitoring device integrated inside the motor for the first time to ensure that the spindle can "brake” in time when an external abnormality occurs and is about to lock up, thereby ensuring the life of the spindle and the safety of processing operators.
  • the top of the body assembly 1 is connected to the top cover assembly 6 , and the coolant enters the thrust bearing assembly 41 from the body assembly 1 and the top cover assembly 6 to the upper half of the air bearing assembly 42 and the thrust bearing assembly 41 , the flange assembly 7 and the motor are cooled.
  • a cylinder assembly 8 is connected to the top cover assembly 6, and the cylinder assembly 8 is used to drive the shaft core assembly 2 to make the power output end perform tool change.
  • the air-floating electric spindle of the embodiment of the present application can be applied to the fields of lamp mold processing, aerospace and other fields, and has the characteristics of high precision, high speed, automatic tool change, etc., the milling surface roughness can reach 20nm, the speed can reach 9W, and the automatic tool change When using the HSK tool holder. Compared with the processing in the related art, it can replace the grinding process or shorten the grinding process time. Compared with other ultra-precision spindles, it has a higher speed and has an HSK automatic tool change mechanism, which can greatly improve the work efficiency.
  • the embodiments of the present application provide a machine tool, including the air-floating electric spindle of any of the above embodiments.
  • the machine tool has the following characteristics: the copper squirrel cage 32 is used as the rotor and the copper squirrel cage 32 is placed behind to ensure the vibration stability and processing reliability of the spindle.
  • the spindle still maintains the rotation accuracy below 50nm at high speed.
  • the unique spindle vibration detection and alarm device ensures that the spindle is always monitored for abnormality during the rotation of the spindle, and the spindle can be stopped at any time to ensure that the spindle will not be locked due to external factors.
  • the automatic tool change function greatly improves the spindle Processing efficiency, the spindle milling surface accuracy can reach below 20nm.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

Broche motorisée à palier pneumatique et machine-outil. La broche motorisée à palier pneumatique comprend : un ensemble corps de machine ; un ensemble partie centrale de broche présentant un disque volant et étant supporté et suspendu sur l'ensemble corps de machine au moyen d'un ensemble palier de butée et d'un ensemble palier pneumatique, une première extrémité de l'ensemble partie centrale de broche formant une extrémité sortie de puissance, et une seconde extrémité de l'ensemble partie centrale de broche formant une extrémité entrée de puissance ; et un ensemble moteur électrique disposé sur l'extrémité entrée de puissance et comprenant un stator et une cage d'écureuil en cuivre, le stator étant relié à l'ensemble corps de machine, et la cage d'écureuil en cuivre étant combinée à l'ensemble partie centrale de broche et formant une surface cylindrique qui est coaxiale par rapport à l'ensemble partie centrale de broche.
PCT/CN2020/141604 2020-07-07 2020-12-30 Broche motorisée à palier pneumatique et machine-outil Ceased WO2022007366A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010644467.5A CN111940766B (zh) 2020-07-07 2020-07-07 一种气浮电主轴和机床
CN202010644467.5 2020-07-07

Publications (1)

Publication Number Publication Date
WO2022007366A1 true WO2022007366A1 (fr) 2022-01-13

Family

ID=73341748

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/141604 Ceased WO2022007366A1 (fr) 2020-07-07 2020-12-30 Broche motorisée à palier pneumatique et machine-outil

Country Status (2)

Country Link
CN (1) CN111940766B (fr)
WO (1) WO2022007366A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116276403A (zh) * 2023-02-28 2023-06-23 华海清科股份有限公司 一种基板磨削组件和基板磨削装置
CN116765439A (zh) * 2022-09-20 2023-09-19 深圳市汉锐科特精密机械有限公司 一种超精密气悬浮电主轴

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111940766B (zh) * 2020-07-07 2022-09-02 广州市昊志机电股份有限公司 一种气浮电主轴和机床

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201321618A (zh) * 2011-11-22 2013-06-01 Dar Harnq Industry Co Ltd 襯套式空氣軸承及主軸裝置
CN206882798U (zh) * 2017-06-15 2018-01-16 广州市昊志机电股份有限公司 一种气浮高速电主轴
CN109571062A (zh) * 2018-10-26 2019-04-05 广州市昊志机电股份有限公司 一种小孔-多孔质节流组合式气浮主轴
CN110340383A (zh) * 2019-05-23 2019-10-18 广州市昊志机电股份有限公司 一种自动换刀的高精度气浮电主轴
CN111940766A (zh) * 2020-07-07 2020-11-17 广州市昊志机电股份有限公司 一种气浮电主轴和机床

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005030277B4 (de) * 2005-06-21 2007-10-31 Fischer AG Präzisionsspindeln Spindelvorrichtung mit Innenkühlung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201321618A (zh) * 2011-11-22 2013-06-01 Dar Harnq Industry Co Ltd 襯套式空氣軸承及主軸裝置
CN206882798U (zh) * 2017-06-15 2018-01-16 广州市昊志机电股份有限公司 一种气浮高速电主轴
CN109571062A (zh) * 2018-10-26 2019-04-05 广州市昊志机电股份有限公司 一种小孔-多孔质节流组合式气浮主轴
CN110340383A (zh) * 2019-05-23 2019-10-18 广州市昊志机电股份有限公司 一种自动换刀的高精度气浮电主轴
CN111940766A (zh) * 2020-07-07 2020-11-17 广州市昊志机电股份有限公司 一种气浮电主轴和机床

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116765439A (zh) * 2022-09-20 2023-09-19 深圳市汉锐科特精密机械有限公司 一种超精密气悬浮电主轴
CN116276403A (zh) * 2023-02-28 2023-06-23 华海清科股份有限公司 一种基板磨削组件和基板磨削装置

Also Published As

Publication number Publication date
CN111940766B (zh) 2022-09-02
CN111940766A (zh) 2020-11-17

Similar Documents

Publication Publication Date Title
CN111408744A (zh) 一种刀柄式气浮高速电主轴
CN111842943B (zh) 一种电主轴轴芯组件、气浮电主轴和钻机
CN111842942B (zh) 一种气浮主轴和机床
CN102489726A (zh) 一种气浮高速电主轴
CN112338214B (zh) 一种车床用高速高精电主轴
CN111940766B (zh) 一种气浮电主轴和机床
CN112059902A (zh) 一种气浮电主轴和磨削机床
CN100427250C (zh) 一种气浮高速电主轴
CN107457414B (zh) 一种集成z轴的高频高速主轴装置
CN101524855B (zh) 一种高速自动换刀电主轴冷却结构
CN205148047U (zh) 一种可调式高速精密轧辊磨头
JP3113750B2 (ja) 静圧気体軸受
US7367102B2 (en) Method for mounting object and spindle device
RU2587371C1 (ru) Высокоскоростной мотор-шпиндель для металлорежущих станков
JP2007245255A (ja) 工作機械の主軸台装置
CN221559837U (zh) 一种主轴机体组件、气浮电主轴和钻机
CN212122519U (zh) 一种气浮式快刀伺服系统
CN117583629B (zh) 一种气浮高速超精密电主轴结构
CN110170910A (zh) 一种刀盘双定位的划片机气浮主轴结构
CN216326469U (zh) 一种立式精密数控回转工作台
CN101456140A (zh) 一种获取超高切削线速度的方法
CN222740942U (zh) 一种具备自适应动平衡功能的高速数控车床主轴
SE512068C2 (sv) Anordning vid verktyg
SE512067C2 (sv) För höga varvtal avsett verktyg
CN207735599U (zh) 一种集成z轴的高频高速主轴装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20944352

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20944352

Country of ref document: EP

Kind code of ref document: A1