WO2022065528A1 - Soupape de dépression ayant un couvercle de protection pour protéger un film barrière - Google Patents

Soupape de dépression ayant un couvercle de protection pour protéger un film barrière Download PDF

Info

Publication number
WO2022065528A1
WO2022065528A1 PCT/KR2020/012773 KR2020012773W WO2022065528A1 WO 2022065528 A1 WO2022065528 A1 WO 2022065528A1 KR 2020012773 W KR2020012773 W KR 2020012773W WO 2022065528 A1 WO2022065528 A1 WO 2022065528A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
piston rod
blocking film
opening
closing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2020/012773
Other languages
English (en)
Korean (ko)
Inventor
나명수
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MST CO Ltd
Original Assignee
MST CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MST CO Ltd filed Critical MST CO Ltd
Publication of WO2022065528A1 publication Critical patent/WO2022065528A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Definitions

  • the present invention relates to a vacuum valve for semiconductor manufacturing, and relates to a vacuum valve having a protective cover for protecting the blocking film that protects the blocking film that blocks exhaust gas passing through the valve body from penetrating into the valve driving unit, thereby maximizing its lifespan will be.
  • a thin film is formed on a wafer while maintaining a vacuum state of the process chamber by supplying a material gas to the process chamber and evacuating the inside of the process chamber with a vacuum pump. It is installed between the pumps to control the exhaust speed of the process chamber.
  • the vacuum valve includes a valve body 10a having an inlet 11a connected to the process chamber and an outlet 11b connected to the vacuum pump, and a valve driving unit 10b providing driving force to the piston rod 12 .
  • the vacuum valve receives a driving force from the valve driving unit 10b and raises and lowers the opening/closing member 12a provided at the lower side of the piston rod 12 to contact or separate the valve seat 11c, thereby reducing the flow of exhaust gas. and control the vacuum in the process chamber.
  • the bellows 13 is installed in a state in which the piston rod 12 is stretched and contracted inside the valve body 11 to prevent the exhaust gas containing the reaction by-product from penetrating into the valve driving unit 10b. are doing
  • an object of the present invention is to protect a blocking film that blocks exhaust gas passing through the valve body from penetrating into the valve driving unit, thereby maximizing its lifespan.
  • An object of the present invention is to provide a vacuum valve having a protective cover for protecting the blocking film.
  • the vacuum valve is a vacuum valve installed between a process chamber for semiconductor manufacturing and a vacuum pump to control the vacuum pressure of the process chamber in the process chamber, the process chamber a valve body having an inlet connected to and an outlet connected to the vacuum pump; a piston rod having a lower end positioned in the body chamber of the valve body and an upper end positioned in the valve power unit to receive power from the valve power unit to ascend and descend in a state that the valve body passes through the valve body; It is coupled to the lower end of the piston rod in the body chamber formed inside the valve body and is in contact with or spaced apart from the valve seat formed at any one of the inlet and outlet of the valve body to control the flow of exhaust gas and to control the flow of the process chamber.
  • an opening/closing member for controlling the vacuum pressure It is installed in the body chamber to block a gap between the piston rod through-hole formed so that the piston rod passes therethrough between the valve body and the valve power unit, and the exhaust gas introduced into the body chamber passes through the piston rod through-hole gap.
  • the protective cover has a circular tube shape from the ceiling of the main body chamber and is formed long downwardly and surrounds the outer side of the blocking film to be spaced apart, and closes the lower surface of the wall portion, but in the center is a piston coupling part of the opening and closing member It may be characterized in that it consists of a lower surface portion having a through-hole formed therethrough.
  • a second heater is installed on the ceiling provided inside the main body to heat the exhaust gas powder so as not to accumulate in the protective cover.
  • the blocking film is made of a hollow cylindrical body so as to surround the piston rod, the upper end of the blocking film is coupled to the ceiling of the body chamber in a form surrounding the piston rod through hole, the lower end of the blocking film is the inner It can be characterized in that it is coupled to the upper end of the opening and closing member in a state in which the bending portion is formed and ascends and descends along the opening and closing member while displacing the bent portion when the piston rod and the opening and closing member are raised and lowered.
  • the blocking film may be characterized in that it is composed of an inclined cylindrical body having a gradually narrower width toward the lower portion so that the bent portion is smoothly displaced according to the elevation of the opening and closing member.
  • the blocking film may be made of a body made of a flexible synthetic rubber material, and a fiber for strength reinforcement is provided inside the blocking film body.
  • the ceiling portion of the main body chamber is installed across the upper portion of the main body chamber, and a support member having an opening in the center to allow the piston rod to pass therethrough and further comprising a seating groove on the upper surface of the periphery of the support member; It may be made of a ring-shaped fixing member fastened in a state of being seated in a seating groove, and the upper end of the blocking film may be interposed between the support member and the fixing member in a state in which it is bent outward.
  • an upper protrusion line protruding outwardly is formed at the upper end of the blocking film along the circumferential direction, and an upper fitting groove in which the upper protrusion line of the blocking film is fitted and fixed is formed in the seating groove of the fixing member.
  • the opening/closing member is formed in a disk shape at the lower end of the piston coupling part and the piston coupling part to which the upper end is coupled to the lower end of the piston rod, and consists of a seat contact part in contact with the valve seat when the piston rod descends, the opening and closing member
  • a male screw is formed on the outer circumferential surface of the upper end of the piston coupling part of the member and a fixing ring having a female screw is screwed, and the lower end of the blocking film is bent inward and is interposed between the upper end of the piston coupling part and the fixing ring in a state toward the upper side.
  • a first heater may be built in the lower portion of the piston coupling portion to heat the exhaust gas powder so as not to accumulate in the seat contact portion.
  • the vacuum valve according to the present invention can significantly extend the life of the blocking membrane by blocking exhaust gas from approaching the blocking membrane by having a protective cover that surrounds the blocking membrane spaced apart from the outside. It is possible to more thoroughly block the exhaust gas flowing into the body chamber from penetrating into the valve power unit by the blocking structure.
  • the present invention effectively blocks the exhaust gas passing through the valve body from penetrating into the valve driving unit by a configuration having a circular-tube bending blocking film replacing the existing bellows, while minimizing the accumulation of exhaust gas powder by a smooth surface.
  • FIG. 1 and 2 are cross-sectional views for explaining a vacuum valve according to the prior art.
  • 3 and 4 are longitudinal cross-sectional views for explaining the configuration of a vacuum valve according to an embodiment of the present invention.
  • Figure 5 is a partial cross-sectional view for explaining the configuration of the main part in the vacuum valve according to the embodiment of the present invention.
  • FIG. 6 is an enlarged view for explaining the configuration of a blocking film and a protective cover in a vacuum valve according to an embodiment of the present invention
  • 7A and 7B are a series of reference diagrams for explaining the operation and operation of the blocking membrane in the vacuum valve according to the embodiment of the present invention.
  • FIG. 8 is an exploded perspective view of the valve body in the vacuum valve according to the embodiment of the present invention.
  • FIG. 9 is a front view of a blocking membrane in a vacuum valve according to an embodiment of the present invention.
  • FIG. 10 is a longitudinal cross-sectional view of a blocking membrane in a vacuum valve according to an embodiment of the present invention.
  • FIG. 11 is a partially cut-away view for explaining the internal configuration of the body of the blocking membrane in the vacuum valve according to the embodiment of the present invention.
  • valve body part 100b valve power part
  • valve body 120 piston rod
  • opening and closing member 140 blocking film
  • first and second may be used to describe various elements, but the elements should not be limited by the terms.
  • the above terms are used only for the purpose of distinguishing one component from another.
  • a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component.
  • all terms used herein, including technical or scientific terms have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs. Terms such as commonly used dictionary definitions should be interpreted as having meanings consistent with the meanings in the context of the related art, and unless explicitly defined in the present application, they are not to be interpreted in an ideal or excessively formal meaning. .
  • FIG. 3 and 4 are longitudinal sectional views for explaining the configuration of a vacuum valve according to an embodiment of the present invention
  • Figure 5 is a partial sectional view for explaining the configuration of a main part in the vacuum valve according to an embodiment of the present invention
  • 6 is an enlarged view for explaining the configuration of the blocking film and the protective cover in the vacuum valve according to the embodiment of the present invention
  • 7A and 7B are a series of reference views for explaining the operation and operation of the blocking film in the vacuum valve according to the embodiment of the present invention.
  • the vacuum valve includes a valve body 100a including a valve body 110 having an inlet 111a and an outlet 111b connected to a process chamber and a vacuum pump, and the It consists of a valve power unit 100b that provides power to the piston rod 120 for the opening/closing operation of the valve body 110, and is provided with a protective cover 170 for protecting the blocking film. It is possible to significantly extend the lifespan of the blocking film 140 by effectively blocking the It is possible to more thoroughly block the introduced exhaust gas from penetrating into the valve power unit 100b through the piston rod through hole H1.
  • the vacuum valve consists of a valve body part 100a and a valve power part 100b as described above, and the valve body part 100a includes a valve body 110, a piston rod 120, The opening/closing member 130, the blocking film 140, the protective cover 170, the supporting member 153 and the fixing member 154, the first heater 160a and the second heater 160b, and the protective cover 170 are included. do.
  • the valve body 110 has an inlet 111a connected to the process chamber and an outlet 111b connected to the vacuum pump, and a body chamber 110a is formed therein.
  • the piston rod 120 serves to elevate the opening/closing member 130 by receiving power from the valve power unit 100b.
  • the piston rod 120 is coupled to the opening/closing member 130 while being positioned in the body chamber 110a of the valve body 110 in a state in which the piston rod 120 penetrates the valve body 110 up and down to enable elevating, and the upper end is the valve power. It is located in the unit 100b to receive power for the lifting operation from the valve power unit 100b.
  • the valve power unit 100b is intended to provide power to the piston rod 120 in the form of pneumatic or motor driving force to enable precise control while rapidly raising and lowering the piston rod 120, but other types of It does not limit the use of power.
  • the opening/closing member 130 is coupled to the lower end of the piston rod 120 in the body chamber 110a formed inside the valve body 110 and ascends and descends among the inlet 111a and the outlet 111b of the valve body 110 .
  • the valve seat 111c formed in any one (in this embodiment, the valve seat 111c is exemplified as being formed on the inlet 111a side of the valve body 110) is in contact with or spaced apart to control the flow of exhaust gas and process chamber to control the vacuum pressure.
  • the opening and closing member 130 is formed in an inverted T-shape in cross section, and at the lower end of the piston coupling part 131 and the piston coupling part 131 in which the upper end is coupled to the lower end of the piston rod 120. It is formed in a wide disk shape and consists of seat contact portions 132a and 132b in contact with the valve seat 111c formed in the inlet 111a when the piston rod 120 descends.
  • the piston coupling part 131 of the opening and closing member 130 is formed in a rod shape having the same or similar outer diameter as the piston rod 120 and is fastened to the lower end of the piston rod 120 .
  • the lower end of the piston rod 120 is formed to have a narrower width compared to other parts, and external threads are formed on its outer circumferential surface.
  • the piston coupling part 131 of the opening/closing member 130 is hollow, and a female screw is formed on the inner circumferential surface of the upper end part, and is screwed with the male screw-formed lower end part of the piston rod 120 .
  • a male screw is formed on the outer peripheral surface of the upper end of the piston coupling part 131 of the opening/closing member 130, and the fixing ring 134 having a female screw is screwed together.
  • the lower protrusion line 141b formed at the lower end of the blocking film 140 is fitted and fixed to the lower fitting grooves 131b and 134a.
  • a guide groove (134b) opened downward in communication with the lower fitting grooves (131b and 134a) is formed. Accordingly, the lower end of the blocking film 140 is stably interposed between the upper end of the piston coupling portion 131 and the fixing ring 134 in a state in which the lower end is bent inwardly and faces upward.
  • the sheet contact parts 132a and 132b of the opening and closing member 130 are fastened to the lower surface of the sheet contact part body 132a horizontally extending from the lower end of the piston coupling part 131 and the first sheet contact part body 132a. It is made of a fixed disk (132b) for fixing the O-ring (133).
  • the blocking film 140 blocks the gap of the piston rod through hole H1 through which the piston rod 120 passes in the body chamber 110a so that the exhaust gas flowing into the body chamber 110a passes through the piston rod through hole H1. It serves to prevent penetration into the valve power unit 100b through the gap.
  • the blocking film 140 is made of a hollow cylindrical body 141 inclined to surround the piston rod 120 as shown in FIGS. 3 to 6 , and the upper end of the piston rod 120 passes through the piston rod.
  • the ball H1 is closely coupled to the ceiling portion 150 of the body chamber 110a in a form surrounding the periphery, and the lower end of the blocking film 140 is coupled to the upper end of the opening and closing member 130 in a bent inward state to thereby provide a piston rod
  • the opening/closing member 130 moves up and down along 120 , it moves up and down along the opening/closing member 130 while displacing the bent portion G1 of the blocking film 140 .
  • the blocking film 140 is made of a sloping cylindrical body 141 having a gradually narrower width toward the bottom so as to be smoothly bent according to the elevation of the opening and closing member 130, and is made of synthetic rubber. is the subject of And a fiber 142 for strength reinforcement is provided inside the body 141 made of the synthetic rubber.
  • the fiber 142 for reinforcing strength is preferably provided in the form of a woven fabric, but may also be provided in a knit form or a plurality of fiber yarns.
  • the synthetic rubber used as the material of the barrier film 140 since the synthetic rubber used as the material of the barrier film 140 has high heat resistance and chemical resistance, it has excellent resistance to oil, fuel, lubricants, etc., and has a low compression set and excellent aging resistance.
  • Fluoropolymer Elastomer (FKM) and Perfluoro elastomer (FFKM), which are known to have chemical resistance and heat resistance that exceed the characteristics of existing fluororubbers, are mainly in mind.
  • the material of the blocking film 140 is not limited as long as it has excellent heat resistance and chemical resistance and can be smoothly bent.
  • the fiber for reinforcing the strength of the barrier film 140 may be provided with any one of polyamide, nylon (Nylon 6, nylon 66, etc.), aramid, and polyester, and preferably with heat resistance and It is provided with meta-aramid with excellent tensile strength.
  • nylon nylon 6, nylon 66, etc.
  • aramid aramid
  • polyester polyester
  • meta-aramid products sold under the brand name of Nomex by DuPont can be applied.
  • the blocking film 140 is further formed with an upper protrusion line 141a and a lower protrusion line 141b protruding to the outside of the body surface along the circumference of the upper and lower ends.
  • the upper protrusion line 141a and the lower protrusion line 141b prevent the upper end and lower end of the blocking film 140 from being separated from the ceiling 150 and the opening/closing member 130 of the body chamber 110a, respectively, in a state in which they are fitted. .
  • the support member 153 and the fixing member 154 constitute the ceiling part 150 of the main body chamber 110a and serve to isolate the main body chamber 110a and the valve power unit 100b, as well as a blocking film 140 . And serves to support the protective cover (170).
  • the support member 153 is installed across the upper portion of the body chamber 110a just below the piston rod through hole H1 through which the piston rod 120 passes, and the upper surface of the periphery of the opening 153c through which the piston rod passes. It further includes a seating groove (153a).
  • the fixing member 154 includes a flat ring-shaped fixing member 154 that is fastened while being seated in the seating groove 153a of the support member 153 .
  • the upper end of the blocking film 140 is stably interposed between the support member 153 and the fixing member 154 in a state in which it is bent outward. Furthermore, an upper fitting groove 153b in which the upper protrusion line 141a of the blocking film 140 is fitted is formed in the seating groove 153a of the fixing member 154 to be more stably fixed.
  • the first heater 160a and the second heater 160b have the most active contact with the exhaust gas in the body chamber 110a, and thus the sheet contact portions 132a and 132b of the opening and closing member 130 where the exhaust gas powder is easy to accumulate. ) and the protective cover 170 serves to heat.
  • the first heater 160a is installed in a form embedded in the lower part of the piston coupling part 131 formed with the hollow 131a of the opening/closing member 130 .
  • the first heater 160a installed in this way creates a high-temperature atmosphere in the body chamber 110a and in particular heats the sheet contact parts 132a and 132b of the opening/closing member 130 to form exhaust gas powder on the upper surface of the sheet contact parts 132a and 132b.
  • the second heater 160b is installed in the form of a disk-shaped donut in wide contact with the upper surfaces of the support member 153 and the fixing member 154 of the inner ceiling 150 of the body.
  • the second heater 160b creates a high-temperature atmosphere in the main body chamber 110a and in particular heats the protective cover 170 to suppress the accumulation of exhaust gas powder on the outer surface of the protective cover 170 .
  • the protective cover 170 is formed in a circular tube shape downward from the support member 153 constituting a part of the ceiling 150 of the body chamber 110a, and surrounds the outer side of the blocking film 140 to be spaced apart from the wall portion 171. and a lower surface portion 172 having a through hole 172a through which the piston coupling portion 131 of the opening/closing member 130 passes in the center to close the lower surface of the wall portion 171 .
  • the protective cover 170 and the blocking film 140 implement a double blocking structure to prevent the exhaust gas flowing into the body chamber 110a from penetrating into the valve power unit 100b through the piston rod through hole H1. It can be blocked more thoroughly.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)

Abstract

La présente invention concerne une soupape de dépression comportant un couvercle de protection pour protéger un film barrière, lequel protège un film barrière qui empêche des gaz d'échappement passant à travers un corps principal de soupape de s'écouler dans un dispositif d'entraînement de soupape, ce qui permet de maximiser la durée de vie de la soupape de dépression. La soupape de dépression est caractérisée en ce qu'elle comprend le film barrière qui est installé dans une chambre de corps principal de façon à bloquer un espace d'un trou traversant de tige de piston formé de telle sorte qu'une tige de piston peut passer à travers le corps de soupape et une unité d'alimentation de soupape, empêchant ainsi les gaz d'échappement qui s'écoulent dans la chambre de corps principal de s'écouler dans l'unité d'alimentation de soupape à travers le trou traversant de tige de piston, et comprenant en outre le couvercle de protection destiné à protéger le film barrière, le couvercle de protection étant formé de façon à être long vers le bas à partir du plafond de la chambre de corps principal et entourant l'extérieur du film barrière avec un espace entre eux pour bloquer les gaz d'échappement afin qu'ils ne s'approchent pas du film barrière.
PCT/KR2020/012773 2020-09-22 2020-09-22 Soupape de dépression ayant un couvercle de protection pour protéger un film barrière Ceased WO2022065528A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020200122136A KR102380749B1 (ko) 2020-09-22 2020-09-22 차단막 보호용 보호커버를 구비한 진공밸브
KR10-2020-0122136 2020-09-22

Publications (1)

Publication Number Publication Date
WO2022065528A1 true WO2022065528A1 (fr) 2022-03-31

Family

ID=80845633

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2020/012773 Ceased WO2022065528A1 (fr) 2020-09-22 2020-09-22 Soupape de dépression ayant un couvercle de protection pour protéger un film barrière

Country Status (2)

Country Link
KR (1) KR102380749B1 (fr)
WO (1) WO2022065528A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030055103A (ko) * 2001-12-25 2003-07-02 에스엠시 가부시키가이샤 히터가 부착된 포핏밸브
KR20090023146A (ko) * 2007-08-29 2009-03-04 씨케이디 가부시키 가이샤 진공개폐밸브
JP2015068438A (ja) * 2013-09-30 2015-04-13 Ckd株式会社 流体駆動式遮断弁
KR20150074114A (ko) * 2012-10-23 2015-07-01 엠케이에스 인스트루먼츠, 인코포레이티드 부식 및 증착 보호 밸브 기기 및 방법
US20190271410A1 (en) * 2016-04-11 2019-09-05 Mks Instruments, Inc. Actively cooled vacuum isolation valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5243201B2 (ja) 2008-11-21 2013-07-24 Ｃｋｄ株式会社 真空弁

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030055103A (ko) * 2001-12-25 2003-07-02 에스엠시 가부시키가이샤 히터가 부착된 포핏밸브
KR20090023146A (ko) * 2007-08-29 2009-03-04 씨케이디 가부시키 가이샤 진공개폐밸브
KR20150074114A (ko) * 2012-10-23 2015-07-01 엠케이에스 인스트루먼츠, 인코포레이티드 부식 및 증착 보호 밸브 기기 및 방법
JP2015068438A (ja) * 2013-09-30 2015-04-13 Ckd株式会社 流体駆動式遮断弁
US20190271410A1 (en) * 2016-04-11 2019-09-05 Mks Instruments, Inc. Actively cooled vacuum isolation valve

Also Published As

Publication number Publication date
KR102380749B1 (ko) 2022-04-05
KR20220039948A (ko) 2022-03-30

Similar Documents

Publication Publication Date Title
AU658516B2 (en) Improved battery refill system
WO2022065527A1 (fr) Soupape de dépression équipée d'un film barrière infléchi de type tube circulaire
CN106461335B (zh) 用于电炉电极的套筒密封件
WO2022065528A1 (fr) Soupape de dépression ayant un couvercle de protection pour protéger un film barrière
CA2095628A1 (fr) Configuration de dispositif d'extension
EP3286437B1 (fr) Ensemble actionneur à fluide
US6648167B1 (en) Ducting passages for a polymeric lining
WO2012091194A1 (fr) Soupape de retenue pour équipement de chantier
US9377137B2 (en) Bonded high-pressure rubber hose, particularly for conveying gaseous media
CN214197774U (zh) 一种芳纶编织增强层橡胶软管
WO2016056859A1 (fr) Soupape de commande de pompe à huile
US20030167917A1 (en) Pneumatic actuator with a nested diaphragm assembly
EP3390823B1 (fr) Palier à soufflet interne
GB2186658A (en) Flexible elongate tubular article
EP3390827B1 (fr) Pompe à piston avec soufflet d'étanchéité et soupape de surpression
WO2019216613A1 (fr) Soupape d'ouverture/fermeture pour gaz à haute pression
US20250155041A1 (en) Novel Fuel Pump Flow Passage Structure
KR20180086275A (ko) 벨로우즈 설치 및 보유 방법
CN210686955U (zh) 一种抗老化的橡胶密封圈
CN222254854U (zh) 空气弹簧活塞结构
WO2012157860A2 (fr) Séparateur de vapeur pour chaudière à gaz
WO2026035129A1 (fr) Récipient sous pression
WO2017007128A1 (fr) Ensemble de pompe à diaphragme
CN221120919U (zh) 一种真空推拉阀
WO2021162223A1 (fr) Joint d'étanchéité

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20955326

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20955326

Country of ref document: EP

Kind code of ref document: A1