WO2022217954A1 - Procédé et dispositif de fabrication de micro-nanostructure - Google Patents

Procédé et dispositif de fabrication de micro-nanostructure Download PDF

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Publication number
WO2022217954A1
WO2022217954A1 PCT/CN2021/138020 CN2021138020W WO2022217954A1 WO 2022217954 A1 WO2022217954 A1 WO 2022217954A1 CN 2021138020 W CN2021138020 W CN 2021138020W WO 2022217954 A1 WO2022217954 A1 WO 2022217954A1
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WO
WIPO (PCT)
Prior art keywords
micro
nano structure
light
fabricating
expansion material
Prior art date
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Ceased
Application number
PCT/CN2021/138020
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English (en)
Chinese (zh)
Inventor
陈佛奎
林慧
马翠
赖厚湖
余明
朱挥
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Filing date
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Application filed by Shenzhen Institute of Advanced Technology of CAS filed Critical Shenzhen Institute of Advanced Technology of CAS
Publication of WO2022217954A1 publication Critical patent/WO2022217954A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Definitions

  • the invention belongs to the technical field of micro-nano structure fabrication, and in particular relates to a micro-nano structure fabrication method and a micro-nano structure fabrication device.
  • Micro-nano structures are fabricated on the surface of the light-transmitting member, which can often change, enhance or expand the functional properties of the light-transmitting member.
  • the window member is used to isolate the external physical environment and only allow light to pass through.
  • the sub-wavelength structure is made on the surface, which is beneficial to improve the anti-reflection property of the window.
  • micro-nano structure due to the small size of the micro-nano structure, photolithography, electron beam direct writing or ion etching are often used to fabricate the micro-nano structure on the surface of the light-transmitting member, and the micro-nano structure is fabricated on the surface of the light-transmitting member.
  • the structure process is relatively time-consuming, that is, there is a problem of low efficiency in fabricating the micro-nano structure on the surface of the light-transmitting member.
  • the purpose of the present invention is to overcome the above-mentioned deficiencies of the prior art, and to provide a micro-nano structure fabrication device, which aims to solve the problem of low efficiency in fabricating the micro-nano structure on the surface of the light-transmitting member.
  • the present invention is realized in this way:
  • a method for fabricating a micro-nano structure comprising:
  • a layer of liquid and transparent material is adhered on one side surface of the transparent blank and a functional extension material that does not flow out of the transparent blank under the action of gravity;
  • the seal structure is separated from the functional expansion material.
  • the functional extension material is an ultraviolet curing material
  • the functional extender is cured by ultraviolet rays.
  • the force with which the stamp structure imprints the functional expansion material is kept constant.
  • the light-transmitting member is a window member
  • the micro-nano structure is a sub-wavelength structure.
  • the present invention also provides a micro-nano structure manufacturing device, including a stamp structure, which can make the material appear when it is imprinted in a liquid state and will not flow away from the material of the adhered object under the action of its own gravity.
  • the resulting shape is a micro-nano structure.
  • the seal structure is a seal structure made of light-transmitting material.
  • the seal structure is made of flexible material and is in the shape of a film.
  • the micro-nano structure fabrication device further includes:
  • the stamping driving structure is used for driving the stamping structure to stamp on the functional expansion material.
  • the micro-nano structure fabrication device further includes:
  • a constant force control assembly including a pressure sensor and a detection force application member connected with the imprinting structure;
  • the detection force-applying member presses the pressure sensor when the seal structure is imprinted on the functional expansion material
  • the driving structure maintains the imprinting force on the functional expansion material when the pressure sensor detects that the pressure of the constant force detection force application member reaches a preset value.
  • the light-transmitting member is a window member
  • the micro-nano structure is a sub-wavelength structure.
  • the micro-nano structure on the surface of the light-transmitting member can be formed at one time.
  • the micro-nano structure can be gradually formed on the surface of the light-transmitting member.
  • the fabrication time is shortened, and the fabrication efficiency of fabricating the micro-nano structure on the surface of the light-transmitting member is improved.
  • FIG. 1 is a schematic diagram of the overall structure of a micro-nano structure fabrication device provided by an embodiment of the present invention
  • FIG. 2 is a schematic diagram of a partial structure of a micro-nano structure fabrication device provided by an embodiment of the present invention
  • FIG. 3 is a schematic diagram of another viewing angle of FIG. 2 .
  • an embodiment of the present invention provides a method for fabricating a micro-nano structure, and the specific fabrication steps are as follows.
  • a layer of functional expansion material that is liquid and is a light-transmitting material and will not flow out of the light-transmitting blank under the action of gravity is adhered to one side surface of the light-transmitting blank.
  • the functional expansion material is a light-transmitting material, which can avoid affecting the realization of the basic functions of the light-transmitting member 800.
  • the functional expansion material can be a thermosetting material, that is, when the temperature of the functional expansion material reaches a predetermined temperature, a solidification phase transition will occur, from a liquid phase. It can become a solid, or it can be a UV-curable material, that is, the functional extender will undergo a solidification phase change when it is irradiated by ultraviolet rays, from a liquid phase to a solid.
  • the functional expansion material is an ultraviolet curing material. In this way, the functional expansion material will not undergo a solidification phase transition when it is not irradiated by ultraviolet rays, thereby avoiding the interference of the environmental temperature on the functional expansion material.
  • the functional expansion material is in the form of a film as a whole, and although the functional expansion material is liquid, it will not flow out of the light-transmitting blank under the action of gravity, so the viscosity of the functional expansion material is relatively high. .
  • the functional extension material can be coated on the transparent blank by a spin coater
  • the stamp structure 100 is imprinted with a function extension material, and the shape of the function extension material is a micro-nano structure 810 .
  • the side of the stamp structure 100 facing the functional expansion material has an embossing structure 110 that can be embedded with the micro-nano structure 810, so that when the stamp structure 100 imprints the functional expansion material, the shape of the functional expansion material is a micro-nano structure. 810.
  • the functional expansion material is still in liquid state, and therefore, the functional expansion material will be deformed when being stamped by the stamp structure 100 .
  • the functional expansion material is cured and attached to the light-transmitting blank, wherein the light-transmitting blank and the functional expansion material in the shape of the micro-nano structure 810 together constitute the light-transmitting member 800 .
  • the functional expansion material becomes a part of the light-transmitting member 800
  • the functional expansion material is in the shape of a micro-nano structure 810 .
  • the functional expansion material is an ultraviolet curing material (eg, epoxy acrylate)
  • the functional expansion material is cured by ultraviolet rays.
  • the fourth step is to separate the seal structure 100 from the function expansion material.
  • the functional extension material will not adhere to the stamp structure 100 to avoid damaging the micro-nano structure 810 presented by the functional extension material.
  • the micro-nano structures 810 on the surface of the light-transmitting member 800 can be formed at one time.
  • the surface is gradually formed, which significantly reduces the fabrication time and improves the fabrication efficiency of fabricating the micro-nano structure 810 on the surface of the light-transmitting member 800 .
  • the force for imprinting the functional expansion material on the stamp structure 100 is kept constant, which is beneficial to ensure the imprinting effect of the stamp structure 100 .
  • the stamp structure 100 is made of a flexible material and is in the shape of a film.
  • the seal structure 100 is a hard material, the positions between the transparent blank and the seal structure 100 need to correspond completely. Between the seal structures 100, it is difficult to make the function expansion material present the preset micro-nano structure 810, and even the light-transmitting blank may be damaged. Based on this structural design, the position between the light-transmitting blank and the seal structure 100 is not complete.
  • the stamp structure 100 when the stamp structure 100 is imprinted, the stamp structure 100 will be deformed, at least not damaging the light-transmitting blank.
  • the stamp structure 100 will The deformation can still make the functional expansion material present the preset micro-nano structure 810 shape.
  • the light-transmitting member 800 is a window member
  • the micro-nano structure 810 is a sub-wavelength structure.
  • the light-transmitting member 800 may be a screen panel, an anti-fingerprint film, an anti-peep film, or the like.
  • the present invention further provides an apparatus for fabricating a micro-nano structure.
  • the micro-nano structure manufacturing device includes a stamp structure 100 , and the stamp structure 100 can make the material present a shape of the micro-nano structure 810 when it is imprinted in a liquid state and will not flow away from the material of the adhered object under the action of its own gravity. .
  • the method for fabricating the micro-nano structure 810 in the foregoing embodiment can be performed.
  • the foregoing embodiment which will not be repeated here.
  • the micro-nano structure 810 on the surface of the light-transmitting member 800 can be formed at one time, which is relatively
  • the fabrication methods of photolithography, electron beam direct writing or ion etching are gradually formed on the surface of the transparent member 800 , which significantly reduces the fabrication time and improves the fabrication efficiency of fabricating the micro-nano structure 810 on the surface of the transparent member 800 .
  • the stamp structure 100 is a stamp structure 100 made of a light-transmitting material. Based on this, first, when the stamp structure 100 imprints the function expansion material, the stamp structure 100 will cover the function expansion material, and based on this structure design, the staff can intuitively observe whether the imprinting position of the stamp structure 100 has obvious deviation. Next, when the functional expansion material is an ultraviolet curing material, it is convenient for the ultraviolet rays to pass through the stamp structure 100 to be irradiated to the functional expansion material.
  • the seal structure 100 is made of a flexible material and is in the shape of a film.
  • the side surface of the transparent blank adhering the function extension material is a curved surface
  • the seal structure 100 is a hard material, the positions between the transparent blank and the seal structure 100 need to correspond completely. Between the seal structures 100, it is difficult to make the function expansion material present the preset micro-nano structure 810, and even the light-transmitting blank may be damaged. Based on this structural design, the position between the light-transmitting blank and the seal structure 100 is not complete.
  • the stamp structure 100 when the stamp structure 100 is imprinted, the stamp structure 100 will be deformed, at least the light-transmitting blank will not be damaged. In addition, when the position between the light-transmitting blank and the stamp structure 100 is slightly misaligned, the stamp structure 100 will The deformation can still make the functional expansion material present the preset micro-nano structure 810 shape.
  • a hard connecting ring is connected around the seal structure 100, and is connected with other structural components through the connecting ring.
  • the micro-nano structure fabrication device further includes:
  • the stamping driving structure 200 is used for driving the stamping structure 100 to stamp on the function expansion material.
  • the use of machinery to drive the stamp structure 100 to emboss the functional expansion material is beneficial to ensure the consistency of stamping of the stamp structure 100 .
  • the imprinting driving structure 200 can also be connected to a robotic arm 300 , and through the robotic arm 300 , the movable range of the imprinting driving structure 200 can be expanded, so that the imprinting driving structure 200 can finish imprinting a Before the light-transmitting member 800, the light-transmitting member 800 can be continuously imprinted at another location, thereby reducing the waiting time of the imprinting driving structure 200 and improving the imprinting efficiency.
  • the micro-nano structure fabrication device further includes:
  • the constant force control assembly 400 includes a pressure sensor 410 and a detection force application member 420 connected with the imprinting structure;
  • the driving structure maintains the pressing force on the functional expansion material when the pressure sensor 410 detects that the pressure of the constant force detecting force applying member 420 reaches a preset value.
  • the force of the stamp structure 100 to imprint the functional expansion material remains constant, which is beneficial to ensure the imprint effect of the stamp structure 100 .
  • the micro-nano structure fabrication apparatus further includes a worktable 500 and a blank holder 600 .
  • the blank holder 600 is placed on the worktable 500 and is provided with a transparent blank on the upper side. the placement slot 601.
  • the pressure sensor 410 is installed on the workbench 500 .
  • the apparatus for fabricating the micro-nano structure further includes an ultraviolet generator 700, and the ultraviolet generator 700 is used for generating ultraviolet rays.
  • the detection force member 420 has an installation through hole 4201
  • the seal structure 100 is installed at the opening of the installation through hole 4201
  • the ultraviolet generator 700 is installed in the installation through hole 4201 .
  • the light-transmitting member 800 is a window member
  • the micro-nano structure 810 is a sub-wavelength structure.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un procédé et un dispositif de fabrication d'une micro-nanostructure (810). Le procédé de fabrication d'une micro-nanostructure (810) comporte les étapes consistant à: faire adhérer une couche de matériau liquide d'extension fonctionnelle, qui est un matériau transmettant la lumière et qui ne s'écoule pas à l'écart d'une ébauche transmettant la lumière sous l'action de la gravité, à une surface d'un côté de l'ébauche transmettant la lumière; emboutir le matériau d'extension fonctionnelle avec une structure (100) de poinçon, de telle façon que le matériau d'extension fonctionnelle prenne la forme d'une micro-nanostructure (810); faire durcir le matériau d'extension fonctionnelle et fixer le matériau d'extension fonctionnelle durci à l'ébauche transmettant la lumière, l'ébauche transmettant la lumière et le matériau d'extension fonctionnelle formant conjointement un élément (800) transmettant la lumière; et séparer la structure (100) de poinçon du matériau d'extension fonctionnelle. Le rendement de fabrication de la fabrication de la micro-nanostructure (810) sur la surface de l'élément (800) transmettant la lumière est amélioré.
PCT/CN2021/138020 2021-04-16 2021-12-14 Procédé et dispositif de fabrication de micro-nanostructure Ceased WO2022217954A1 (fr)

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CN202110414515.6A CN113189840A (zh) 2021-04-16 2021-04-16 微纳结构制作方法及微纳结构制作装置
CN202110414515.6 2021-04-16

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CN115894090B (zh) * 2022-11-17 2024-03-22 中国工程物理研究院激光聚变研究中心 一种在脆硬材料表面制备高增透亚波长结构的方法

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