WO2024007677A1 - 电光调制器 - Google Patents

电光调制器 Download PDF

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Publication number
WO2024007677A1
WO2024007677A1 PCT/CN2023/088974 CN2023088974W WO2024007677A1 WO 2024007677 A1 WO2024007677 A1 WO 2024007677A1 CN 2023088974 W CN2023088974 W CN 2023088974W WO 2024007677 A1 WO2024007677 A1 WO 2024007677A1
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WO
WIPO (PCT)
Prior art keywords
mode waveguide
waveguide
width
mode
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2023/088974
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English (en)
French (fr)
Inventor
梁寒潇
宋一品
周颖聪
巫海苍
毛文浩
宋时伟
孙维祺
俞清扬
张周宇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Lycore Technologies Co Ltd
Nanjing Lycore Technologies Co Ltd
Original Assignee
Suzhou Lycore Technologies Co Ltd
Nanjing Lycore Technologies Co Ltd
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Application filed by Suzhou Lycore Technologies Co Ltd, Nanjing Lycore Technologies Co Ltd filed Critical Suzhou Lycore Technologies Co Ltd
Priority to EP23834458.4A priority Critical patent/EP4506748A4/en
Priority to JP2024571423A priority patent/JP2025521193A/ja
Priority to US18/863,385 priority patent/US20250298284A1/en
Publication of WO2024007677A1 publication Critical patent/WO2024007677A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure

Definitions

  • the present disclosure relates to the field of optical communication technology, and in particular to an electro-optical modulator.
  • An electro-optic modulator is a modulator based on the electro-optic effect of electro-optic materials.
  • the electro-optical effect means that when a voltage is applied to an electro-optical material such as lithium niobate crystal, gallium arsenide crystal or lithium tantalate crystal, the refractive index of the electro-optical material will change, thereby causing changes in the characteristics of the light waves passing through the electro-optical material. .
  • parameters such as phase, amplitude, intensity, and polarization state of optical signals can be modulated.
  • the present disclosure provides an electro-optical modulator, which includes a light splitting element, a light combining element, two waveguide arms, and a modulation electrode, wherein the two waveguide arms are connected between the light splitting element and the light combining element, and each waveguide arm includes a first single waveguide arm.
  • any one of the first single-mode waveguide part and the second single-mode waveguide part has a width smaller than that of the multi-mode waveguide the width of the portion;
  • the first coupling portion is configured to couple light from the first single-mode waveguide portion into the multi-mode waveguide portion, and the second coupling portion is configured to couple light from the multi-mode waveguide portion into the second single-mode waveguide portion;
  • the modulation electrode A multimode waveguide portion configured to apply a modulation voltage to the two waveguide arms.
  • the first coupling part includes a first part connected to the first single-mode waveguide part and a second part connected to the multi-mode waveguide part, the first part is opposite to the second part and a width of the first part is along a direction away from the first part.
  • the direction of the single-mode waveguide portion gradually decreases.
  • the second coupling part includes a third part connected to the second single-mode waveguide part and a fourth part connected to the multi-mode waveguide part, the third part being opposite to the fourth part and having a width along The direction gradually increases toward the second single-mode waveguide portion.
  • the first coupling part includes a first part connected to the first single-mode waveguide part and a second part connected to the multi-mode waveguide part, the second part being opposite to the first part and having a width along a direction away from the first part.
  • the direction of a single-mode waveguide section gradually increases.
  • the second coupling part includes a third part connected to the second single-mode waveguide part and a fourth part connected to the multi-mode waveguide part, the fourth part being opposite to the third part and having a width along It gradually decreases toward the second single-mode waveguide portion.
  • the first coupling part is a first multi-mode interference coupling element
  • the second coupling part is a second multi-mode interference coupling element
  • the first multimode interference coupling element includes a first rectangular interference portion, and a first increased width portion and/or a first reduced width portion, wherein the first increased width portion is connected to the first single Between the mode waveguide part and the first rectangular interference part, the width of the first increasing width part gradually increases in a direction approaching the first rectangular interference part; the first decreasing width part is connected between the first rectangular interference part and the multi-mode waveguide Between the parts, the width of the first reduced width part gradually decreases in a direction away from the first rectangular interference part.
  • the second multimode interference coupling element includes a second rectangular interference portion, and a second increased width portion and/or a second reduced width portion, wherein the second increased width portion is connected to the multimode waveguide.
  • the width of the second increased width part gradually increases in the direction approaching the second rectangular interference part;
  • the second reduced width part is connected between the second rectangular interference part and the second single-mode waveguide Between the parts, the width of the second reduced width part gradually decreases in a direction away from the second rectangular interference part.
  • each waveguide arm includes a first single-mode waveguide portion, a first coupling portion, a multi-mode waveguide portion, a second coupling portion and a second single-mode waveguide portion arranged in sequence, wherein, The first single-mode waveguide parts of the two waveguide arms are respectively connected to the light splitting element, and the second single-mode waveguide parts of the two waveguide arms are respectively connected to the light combining element.
  • the first single-mode waveguide portions of the two waveguide arms are curved and arranged symmetrically; the second single-mode waveguide portions of the two waveguide arms are curved and arranged symmetrically.
  • the electro-optical modulator has a folded structure, including at least one turning area; each waveguide arm includes a plurality of unit segments, and each unit segment includes a first single-mode waveguide part and a first coupling part arranged in sequence. , a multimode waveguide section, a first Two coupling parts and a second single-mode waveguide part, among any two adjacent unit segments, the second single-mode waveguide part of one unit segment is integrally connected with the first single-mode waveguide part of the other unit segment in the turning area.
  • two waveguide arms are integrally cross-connected at each turn zone.
  • two waveguide arms are vertically cross-connected at each turn zone.
  • Figure 1 is a schematic structural diagram of a traditional electro-optical modulator
  • Figure 2 is a schematic top structural view of an electro-optical modulator according to some embodiments of the present disclosure
  • Figure 3 is a schematic top structural view of an electro-optical modulator according to some embodiments of the present disclosure.
  • Figure 4 is a schematic top structural view of an electro-optical modulator according to some embodiments of the present disclosure.
  • the Mach-Zehnder Modulator is a type of electro-optical modulator. It divides the input optical signal into two branch optical signals and enters two waveguide arms respectively.
  • the two waveguide arms are made of electro-optical materials. , its refractive index changes with the change of the external modulation voltage. The refractive index change of the waveguide arm will cause the phase change of the branch optical signal. Therefore, after the two branch optical signals are combined, an interference signal whose intensity changes with the modulation voltage is output.
  • a Mach-Zehnder modulator can achieve modulation of different sidebands by controlling the modulation voltage applied to the two waveguide arms.
  • Mach-Zehnder modulator as a device that converts electrical signals into optical signals, is one of the common core devices in optical interconnection, optical computing, and optical communication systems.
  • FIG. 1 it is a schematic structural diagram of a traditional Mach-Zehnder modulator.
  • the two waveguide arms 02 of the Mach-Zehnder modulator 001 are absolutely identical.
  • the Mach-Zehnder modulator 001 is not working, no electro-optical effect occurs in the two waveguide arms 02.
  • the input light is equally divided into two branch optical signals after passing through the spectroscopic element 01.
  • the two branch optical signals each pass through a waveguide arm 02.
  • the rear phase is still the same, so a coherent enhanced signal of the two branched optical signals will be output from the light combining element 05 .
  • the modulation electrode 04 (for example, including the signal electrode 040, the first ground electrode 041 and the second ground electrode 042) Modulation voltages are applied to the two waveguide arms 02.
  • the phases of the two branch optical signals can differ by odd or even times of ⁇ .
  • the light combining element 05 outputs two Coherently enhanced signals of branch optical signals.
  • the phase difference is an odd multiple of ⁇ , the light combining element 05 outputs a coherent cancellation signal of the two branch optical signals.
  • embodiments of the present disclosure provide an electro-optic modulator, which can improve the operating performance of the electro-optic modulator and reduce its transmission loss.
  • the electro-optical modulator 100 includes a light splitting element 110, a light combining element 120, two waveguide arms 130, and a modulation electrode 140.
  • Two waveguide arms 130 are connected between the light splitting element 110 and the light combining element 120.
  • Each waveguide arm 130 includes a first single-mode waveguide part 131, a first coupling part 132, a multi-mode waveguide part 133, a second coupling part 134 and a third Two single-mode waveguide sections 135.
  • the width of any one of the first single-mode waveguide portion 131 and the second single-mode waveguide portion 135 is smaller than the width of the multi-mode waveguide portion 133 .
  • the first coupling part 132 is configured to couple light from the first single-mode waveguide part 131 into the multi-mode waveguide part 133
  • the second coupling part 134 is configured to couple light from the multi-mode waveguide part 133 into the second single-mode waveguide part 135
  • the modulation electrode 140 is configured to apply a modulation voltage to the multi-mode waveguide portions 133 of the two waveguide arms 130 .
  • the linear extension portion of any waveguide arm 130 is used as a reference, and its extension direction is defined as the length direction, which is orthogonal to the extension direction and parallel to the device substrate (Fig. (not shown in ) is the width direction.
  • the specific type of the spectroscopic element 110 is not limited. It includes at least one input port and two output ports. For example, it may be a one-input and two-output spectroscopic element.
  • the specific type of the light combining element 120 is not limited. It includes at least two input ports and one output port. For example, it can be a two-input and one-outlet light-combination element or a two-input and three-outlet light combining element.
  • the two waveguide arms 130 connect the two output ports of the light splitting element 110 and the two input ports of the light combining element 120 in one-to-one correspondence.
  • the material of the waveguide arm 130 includes electro-optical materials, such as lithium niobate, lithium tantalate, or potassium titanyl phosphate.
  • the modulation electrode 140 is configured to apply a modulation voltage to the multi-mode waveguide portions 133 of the two waveguide arms 130 .
  • the structural form of the modulation electrode 140 is not limited.
  • the modulation electrode 140 may include a first ground electrode 141, a signal electrode 143 and a second ground electrode 142 arranged in sequence, in which one waveguide arm 130 is located at the first ground electrode 141, the signal electrode 143, and the second ground electrode 142. In the electric field formed by the ground electrode 141 and the signal electrode 143 , the other waveguide arm 130 is located in the electric field formed by the second ground electrode 142 and the signal electrode 143 .
  • the first single-mode waveguide part 131 and the second single-mode waveguide part 135 are single-mode waveguides, which are characterized by a small width size and a small refractive index difference (referring to the crystal quality of two intermediate crystal families or low-level crystal families).
  • the difference in the refractive index of a substance in different directions), suitable for transmission A mode of magnetic waves, such as TE mode magnetic waves.
  • the multi-mode waveguide part 133 can transmit multiple modes of magnetic waves, and its width is significantly larger than the width of the first single-mode waveguide part 131 and the second single-mode waveguide part 135 .
  • the transmission loss of a single-mode waveguide is greater than that of a multi-mode waveguide, but it is more suitable to be designed in a curved shape and has higher transmission stability than a curved multi-mode waveguide.
  • the two waveguide arms 130 use multi-mode waveguides for light transmission in the modulation area of the modulation electrode 140 (that is, the electric field action area of the modulation electrode 140), which can make the overall transmission loss of the electro-optical modulator relatively low.
  • the two waveguide arms 130 use single-mode waveguides for light transmission in areas outside the modulation area, which can be adapted to various shape designs (for example, designed into curved shapes) and have better transmission stability.
  • the first coupling part 132 and the second coupling part 134 they can have different coupling effects on magnetic waves of different modes, for example, allowing TE mode magnetic waves to pass through, while blocking TM mode magnetic waves.
  • the filtering effect can improve the purity of the magnetic wave mode, which is especially suitable for some scenes that require high purity of the magnetic wave mode. Therefore, embodiments of the present disclosure can improve the operating performance of the electro-optical modulator and reduce its transmission loss.
  • the first coupling part 132 may include a first part 1321 connected to the first single-mode waveguide part 131 and a second part 1322 connected to the multi-mode waveguide part 133 , and the first part 1321 is connected to the multi-mode waveguide part 133 .
  • the second portion 1322 is opposite and the width of the first portion 1321 gradually decreases in a direction away from the first single-mode waveguide portion 131 .
  • the second coupling part 134 may include a third part 1341 connected to the second single-mode waveguide part 135 and a fourth part 1342 connected to the multi-mode waveguide part 133.
  • the third part 1341 is opposite to the fourth part 1342 and the third part 1341
  • the width gradually increases along the direction approaching the second single-mode waveguide portion 135 .
  • the light After the light is guided by the first single-mode waveguide part 131 and enters the first part 1321 of the first coupling part 132, as the width of the first part 1321 gradually decreases in the direction away from the first single-mode waveguide part 131, it is forced to overflow and Entering the second opposite portion 1322, and then entering the multi-mode waveguide portion 133.
  • the light may also enter the second single-mode waveguide part 135 through the fourth part 1342 and the third part 1341 of the second coupling part 134 in sequence.
  • the width of the second portion 1322 of the multi-mode waveguide portion 133 may also gradually increase in a direction away from the first single-mode waveguide portion 131 (ie, opposite to the width variation trend of the first portion 1321); and/or , the width of the fourth portion 1342 may also gradually decrease in a direction approaching the second single-mode waveguide portion 135 (that is, opposite to the width change trend of the third portion 1341). This design can further improve the guidance effect of light transmission and further reduce transmission losses.
  • the first coupling part 132 may also be a first multi-mode interference coupling element
  • the second coupling part 134 may also be a second multi-mode interference coupling element.
  • the working principle of multi-mode interference coupling elements is based on multi-mode interference, forming self-imaging at a specific position and periodically reproducing the input light field. Through the design of multi-mode interference coupling elements, it can have different coupling effects on different modes of magnetic waves, thereby achieving the effect of improving the purity of magnetic wave modes.
  • first multi-mode interference coupling element and the second multi-mode interference coupling element are not limited.
  • the first multi-mode interference coupling element includes a first rectangular interference portion 1324, and a first increased width portion 1323 and/or a first reduced width portion (not shown in the figure). ).
  • the first increased width portion 1323 is connected between the first single-mode waveguide portion 131 and the first rectangular interference portion 1324 , and the width of the first increased width portion 1323 gradually increases in a direction approaching the first rectangular interference portion 1324 .
  • the first reduced-width portion is connected between the first rectangular interference portion 1324 and the multi-mode waveguide portion 133 , and the width of the first reduced-width portion gradually decreases in a direction away from the first rectangular interference portion 1324 .
  • the second multi-mode interference coupling element includes a second rectangular interference portion 1344, and a second width-increasing portion (not shown in the figure) and/or a second width-reducing portion 1345.
  • the second increased width portion is connected between the multi-mode waveguide portion 133 and the second rectangular interference portion 1344 , and the width of the second increased width portion gradually increases in a direction approaching the second rectangular interference portion 1344 .
  • the second reduced width portion 1345 is connected between the second rectangular interference portion 1344 and the second single-mode waveguide portion 135 , and the width of the second reduced width portion 1345 gradually decreases in a direction away from the second rectangular interference portion 1344 .
  • the disclosed design scheme can be applied not only to straight electro-optical modulators, but also to folded electro-optical modulators.
  • the electro-optical modulator shown in Figures 2 and 3 is a straight electro-optical modulator.
  • Each waveguide arm 130 thereof includes a first single-mode waveguide portion 131, a first coupling portion 132, and a multi-mode waveguide portion 132.
  • the single-mode waveguide portions 135 are respectively connected to the light combining elements 120 .
  • the first single-mode waveguide portions 131 of the two waveguide arms 130 are curved and arranged symmetrically, and the second single-mode waveguide portions 135 of the two waveguide arms 130 are curved and arranged symmetrically.
  • the first single-mode waveguide part 131 and the second single-mode waveguide part 135 have better transmission stability.
  • the electro-optic modulator is a folded electro-optic modulator.
  • the length of the waveguide arm can be designed to be increased according to requirements, which not only reduces the size of the device in the length direction, but also enables the device to obtain better performance.
  • the folded electro-optical modulator includes at least one turning area 150.
  • Each waveguide arm 130 includes a plurality of unit segments (illustrated as two unit segments in the figure), and each unit segment includes a A first single-mode waveguide part 131, a first coupling part 132, a multi-mode waveguide part 133, a second coupling part 134 and a second single-mode waveguide part 135.
  • the second single-mode waveguide part 135 of one unit section and the first single-mode waveguide part 131 of the other unit section are integrally connected in the turning area 150 .
  • single-mode waveguides are more suitable for curved shapes and have higher transmission stability.
  • the second single-mode waveguide portion 135 and the first single-mode waveguide portion 131 of one waveguide arm 130 are integrally connected to the integrally connected second single-mode waveguide portion 131 of the other waveguide arm 130.
  • the second single-mode waveguide part 135 and the first single-mode waveguide part 131 are integrally cross-connected.
  • the two waveguide arms 130 are designed to have a cross structure in the turning area 150, which can ensure that the two waveguide arms 130 are in The direction of the electric field in the modulation region remains unchanged.
  • two waveguide arms 130 are vertically cross-connected at each turn zone 150 . In this way, the transmission interference between the waveguide branches at the intersection can be further reduced.
  • first”, “second”, “third”, etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, features defined as “first”, “second”, and “third” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more than two, unless otherwise expressly and specifically limited.
  • connection In this disclosure, unless otherwise explicitly stated and limited, the terms “installation”, “connection”, “connection”, “fixing” and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, or an internal connection between two elements or an interaction between two elements .
  • fixing and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, or an internal connection between two elements or an interaction between two elements .
  • the specific meanings of the above terms in this disclosure can be understood according to specific circumstances.
  • a first feature "on” or “below” a second feature may include the first and second features in direct contact, or may include the first and second features. Not in direct contact but through additional characteristic contact between them.
  • the terms “above”, “above” and “above” a first feature on a second feature include the first feature being directly above and diagonally above the second feature, or simply mean that the first feature is higher in level than the second feature.
  • “Below”, “under” and “under” the first feature is the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature is less horizontally than the second feature.

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Abstract

一种电光调制器，包括分光元件、合光元件、两个波导臂、以及调制电极，其中，两个波导臂连接在分光元件和合光元件之间，每个波导臂包括第一单模波导部、第一耦合部、多模波导部、第二耦合部和第二单模波导部，第一单模波导部和第二单模波导部中任一的宽度小于多模波导部的宽度；第一耦合部配置为使光从第一单模波导部耦合进入多模波导部，第二耦合部配置为使光从多模波导部耦合进入第二单模波导部；调制电极配置为向两个波导臂的多模波导部施加调制电压。

Description

电光调制器
相关申请的交叉引用
本申请要求2022年07月06日提交的、申请号为202210798464.6、申请名称为“电光调制器”的发明专利申请的优先权，本申请所要求优先权的公开通过引用全文并入本文。
技术领域
本公开涉及光通信技术领域，特别是涉及一种电光调制器。
背景技术
近年来，随着物联网、无人驾驶、远程医疗、远程教育等新兴网络应用业务的飞速发展，对于高速大容量通信技术提出了更高的要求。光通信因其带宽大、可靠性高、成本低、抗干扰能力强等特点，在高速、大容量通信方向取得了飞速的发展。如何将高速电信号加载到光载波上是一项核心研究内容。
电光调制器是基于电光材料(Electro-optic materials)的电光效应制成的一种调制器。电光效应是指，当对例如铌酸锂晶体、砷化稼晶体或钽酸锂晶体等电光材料施加电压时，电光材料的折射率会发生变化，进而引起通过该电光材料的光波的特性发生变化。利用电光效应，可以实现对光信号相位、幅度、强度以及偏振状态等参数的调制。
随着人们对于高速、大容量通信技术的需求日益迫切，对于电光调制器的工作性能提出了更高的要求。
发明内容
本公开提供一种电光调制器，包括分光元件、合光元件、两个波导臂、以及调制电极，其中，两个波导臂连接在分光元件和合光元件之间，每个波导臂包括第一单模波导部、第一耦合部、多模波导部、第二耦合部和第二单模波导部，其中，第一单模波导部和第二单模波导部中任一的宽度小于多模波导部的宽度；第一耦合部配置为使光从第一单模波导部耦合进入多模波导部，第二耦合部配置为使光从多模波导部耦合进入第二单模波导部；调制电极配置为向两个波导臂的多模波导部施加调制电压。
在一些实施例中，第一耦合部包括与第一单模波导部连接的第一部分以及与多模波导部连接的第二部分，第一部分与第二部分相对并且第一部分的宽度沿远离第一单模波导部的方向逐渐减小。
在一些实施例中，第二耦合部包括与第二单模波导部连接的第三部分以及与多模波导部连接的第四部分，第三部分与第四部分相对并且第三部分的宽度沿靠近第二单模波导部的方向逐渐增大。
在一些实施例中，第一耦合部包括与第一单模波导部连接的第一部分以及与多模波导部连接的第二部分，第二部分与第一部分相对并且第二部分的宽度沿远离第一单模波导部的方向逐渐增大。
在一些实施例中，第二耦合部包括与第二单模波导部连接的第三部分以及与多模波导部连接的第四部分，第四部分与第三部分相对并且第四部分的宽度沿靠近第二单模波导部的方向逐渐减小。
在一些实施例中，第一耦合部为第一多模干涉耦合元件，第二耦合部为第二多模干涉耦合元件。
在一些实施例中，第一多模干涉耦合元件包括第一矩形干涉部分，以及第一宽度增大部分和/或第一宽度减小部分，其中，第一宽度增大部分连接在第一单模波导部与第一矩形干涉部分之间，第一宽度增大部分的宽度沿靠近第一矩形干涉部分的方向逐渐增大；第一宽度减小部分连接在第一矩形干涉部分与多模波导部之间，第一宽度减小部分的宽度沿远离第一矩形干涉部分的方向逐渐减小。
在一些实施例中，第二多模干涉耦合元件包括第二矩形干涉部分，以及第二宽度增大部分和/或第二宽度减小部分，其中，第二宽度增大部分连接在多模波导部与第二矩形干涉部分之间，第二宽度增大部分的宽度沿靠近第二矩形干涉部分的方向逐渐增大；第二宽度减小部分连接在第二矩形干涉部分与第二单模波导部之间，第二宽度减小部分的宽度沿远离第二矩形干涉部分的方向逐渐减小。
在一些实施例中，每个波导臂包括依次设置的一个第一单模波导部、一个第一耦合部、一个多模波导部、一个第二耦合部和一个第二单模波导部，其中，两个波导臂的第一单模波导部分别与分光元件连接，两个波导臂的第二单模波导部分别与合光元件连接。
在一些实施例中，两个波导臂的第一单模波导部呈曲线弯曲状并且对称布置；两个波导臂的第二单模波导部呈曲线弯曲状并且对称布置。
在一些实施例中，电光调制器具有折叠结构，包括至少一个转弯区；每个波导臂包括多个单元段，每个单元段包括依次设置的一个第一单模波导部、一个第一耦合部、一个多模波导部、一个第 二耦合部和一个第二单模波导部，任意相邻两个单元段中，其中一个单元段的第二单模波导部与另一个单元段的第一单模波导部在转弯区一体连接。
在一些实施例中，两个波导臂在每个转弯区一体交叉连接。
在一些实施例中，两个波导臂在每个转弯区垂直交叉连接。
根据在下文中所描述的实施例，本公开的这些和其它方面将是清楚明白的，并且将参考在下文中所描述的实施例而被阐明。
附图说明
在下面结合附图对于示例性实施例的描述中，本公开的更多细节、特征和优点被公开，在附图中：
图1是传统型电光调制器的结构示意图；
图2是本公开一些实施例的电光调制器的俯视结构示意图；
图3是本公开一些实施例的电光调制器的俯视结构示意图；以及
图4是本公开一些实施例的电光调制器的俯视结构示意图。
具体实施方式
在下文中，仅简单地描述了某些示例性实施例。正如本领域技术人员可认识到的那样，在不脱离本公开的精神或范围的情况下，可通过各种不同方式修改所描述的实施例。因此，附图和描述被认为本质上是示例性的而非限制性的。
电光调制相关的技术已经得到广泛发展和应用，比如光通信、微波光电子、激光束偏转、波前调制等。马赫曾德尔调制器(Mach-Zehnder Modulator)是电光调制器的一种，其是将输入光信号等分成两个分支光信号，使之分别进入两个波导臂，这两个波导臂采用电光材料，其折射率随外加调制电压的变化而变化。波导臂的折射率变化会引起分支光信号的相位变化，因此，两个分支光信号汇合后输出的是一个强度随调制电压变化的干涉信号。简而言之，马赫曾德尔调制器通过控制施加在两个波导臂上的调制电压，可以实现不同边带的调制。马赫曾德尔调制器作为将电信号转换成光信号的器件，是光互连、光计算、光通信系统中常见的核心器件之一。
如图1所示，为一种传统型马赫曾德尔调制器的结构示意图。在理想状态下，马赫曾德尔调制器001的两个波导臂02绝对相同。马赫曾德尔调制器001不工作时，两个波导臂02均不发生电光效应，输入光经过分光元件01后被等分为两个分支光信号，两个分支光信号在各自经过一个波导臂02后相位仍然相同，因此，会从合光元件05输出两个分支光信号的相干加强信号。马赫曾德尔调制器001工作时，调制电极04(例如包括信号电极040、第一地电极041和第二地电极042) 对两个波导臂02施加调制电压，两个分支光信号在各自经过一个波导臂02后相位可以相差Π的奇数倍或偶数倍，当相位相差Π的偶数倍时，合光元件05输出两个分支光信号的相干加强信号，当相位相差Π的奇数倍时，合光元件05输出两个分支光信号的相干抵消信号。
通常，光经过光学器件的传输，磁波模式会发生一定的混合。例如，光在进入光学器件时为TE模式的磁波(在传播方向上有磁场分量但无电场分量)，从光学器件射出时虽然大部分为TE模式的磁波，但会掺杂小部分TM模式的磁波(在传播方向上有电场分量但无磁场分量)。此场景下，尽管TM模式磁波的输出比例较小，但对于一些对磁波模式纯度要求较高的光学器件，仍会对其工作性能产生较大影响，也会带来一定的光损耗。
基于此，本公开实施例提供了一种电光调制器，可以改善电光调制器的工作性能以及降低其传输损耗。
如图2所示，本公开一些实施例提供的电光调制器100，包括分光元件110、合光元件120、两个波导臂130、以及调制电极140。两个波导臂130连接在分光元件110和合光元件120之间，每个波导臂130包括第一单模波导部131、第一耦合部132、多模波导部133、第二耦合部134和第二单模波导部135。第一单模波导部131和第二单模波导部135中任一的宽度小于多模波导部133的宽度。第一耦合部132配置为使光从第一单模波导部131耦合进入多模波导部133，第二耦合部134配置为使光从多模波导部133耦合进入第二单模波导部135。调制电极140配置为向两个波导臂130的多模波导部133施加调制电压。
在本公开实施例中，如图2所示，以任一波导臂130的直线延伸部分为参照，定义其延伸方向为长度方向，定义与该延伸方向正交、并且平行于器件衬底(图中未示出)的方向为宽度方向。
分光元件110的具体类型不限，其至少包括一个输入口和两个输出口，例如可以为一进二出的分光元件。合光元件120的具体类型不限，其至少包括两个输入口和一个输出口，例如可以为二进一出的合光元件或者二进三出的合光元件等等。两个波导臂130一一对应地连接分光元件110的两个输出口以及合光元件120的两个输入口。
波导臂130的材料包括电光材料，例如铌酸锂、钽酸锂或者磷酸氧钛钾等。调制电极140配置为向两个波导臂130的多模波导部133施加调制电压。调制电极140的具有结构形式不限，例如，在一些实施例中，调制电极140可以包括依次设置的第一地电极141、信号电极143和第二地电极142，其中一个波导臂130位于第一地电极141和信号电极143形成的电场中，另一个波导臂130位于第二地电极142和信号电极143形成的电场中。
第一单模波导部131和第二单模波导部135作为单模波导，其特点是具有很小的宽度尺寸和很小的折射率差(指两种中级晶族或低级晶族的晶质物质的不同方向的折射率的差值)，适于传输 一种模式的磁波，例如TE模式的磁波。多模波导部133作为多模波导，可以传输多个模式的磁波，其宽度尺寸明显大于第一单模波导部131和第二单模波导部135的宽度尺寸。通常，单模波导的传输损耗大于多模波导，但其更适合设计为弯曲形状，相比弯曲形状的多模波导具有更高的传输稳定性。
在本公开实施例中，两个波导臂130在调制电极140的调制区(即调制电极140的电场作用区域)采用多模波导进行光传输，可以使得电光调制器的整体传输损耗相对较低，两个波导臂130在调制区以外的区域采用单模波导进行光传输，可以适应多样的形状设计(例如设计为曲线形状)，而且具有较佳的传输稳定性。通过对第一耦合部132和第二耦合部134进行适当的设计，可以使其对不同模式的磁波具有不同的耦合效果，例如，允许TE模式的磁波通过，而对于TM模式的磁波则具有阻止过滤效果，这样，可以提升磁波模式的纯度，尤其适用于一些对磁波模式纯度要求较高的场景。因此，本公开实施例可以改善电光调制器的工作性能以及降低其传输损耗。
第一耦合部132和第二耦合部134的具体结构形式不限。如图2所示，在一些实施例中，第一耦合部132可以包括与第一单模波导部131连接的第一部分1321以及与多模波导部133连接的第二部分1322，第一部分1321与第二部分1322相对并且第一部分1321的宽度沿远离第一单模波导部131的方向逐渐减小。第二耦合部134可以包括与第二单模波导部135连接的第三部分1341以及与多模波导部133连接的第四部分1342，第三部分1341与第四部分1342相对并且第三部分1341的宽度沿靠近第二单模波导部135的方向逐渐增大。
光经过第一单模波导部131的引导进入第一耦合部132的第一部分1321后，随着该第一部分1321的宽度沿远离第一单模波导部131的方向逐渐减小，被迫溢出并进入与之相对的第二部分1322，继而进入到多模波导部133。相应的，光经过多模波导部133后，也可以依次经过第二耦合部134的第四部分1342、第三部分1341进入到第二单模波导部135。
在一些实施例中，多模波导部133的第二部分1322的宽度也可以沿远离第一单模波导部131的方向逐渐增大(即与第一部分1321的宽度变化趋势相反)；和/或，第四部分1342的宽度也可以沿靠近第二单模波导部135的方向逐渐减小(即与第三部分1341的宽度变化趋势相反)。此设计可以进一步提升对光传输的引导效果，可以进一步减少传输损失。
如图3所示，在一些实施例中，第一耦合部132还可以为第一多模干涉耦合元件，第二耦合部134还可以为第二多模干涉耦合元件。多模干涉耦合元件的工作原理是基于多模干涉，在特定位置处形成自成像，周期性地复现输入光场。通过多模干涉耦合元件的设计，可以使其对不同模式的磁波具有不同的耦合效果，从而达到提升磁波模式纯度的效果。
第一多模干涉耦合元件和第二多模干涉耦合元件的具体结构形式不限。
在一些实施例中，如图3所示，第一多模干涉耦合元件包括第一矩形干涉部分1324，以及第一宽度增大部分1323和/或第一宽度减小部分(图中未示出)。第一宽度增大部分1323连接在第一单模波导部131与第一矩形干涉部分1324之间，第一宽度增大部分1323的宽度沿靠近第一矩形干涉部分1324的方向逐渐增大。第一宽度减小部分连接在第一矩形干涉部分1324与多模波导部133之间，第一宽度减小部分的宽度沿远离第一矩形干涉部分1324的方向逐渐减小。
相应的，第二多模干涉耦合元件包括第二矩形干涉部分1344，以及第二宽度增大部分(图中未示出)和/或第二宽度减小部分1345。第二宽度增大部分连接在多模波导部133与第二矩形干涉部分1344之间，第二宽度增大部分的宽度沿靠近第二矩形干涉部分1344的方向逐渐增大。第二宽度减小部分1345连接在第二矩形干涉部分1344与第二单模波导部135之间，第二宽度减小部分1345的宽度沿远离第二矩形干涉部分1344的方向逐渐减小。
本公开设计方案不但可以应用于直条型的电光调制器，还可以应用于折叠型的电光调制器。图2和图3所示的电光调制器即为直条型的电光调制器，其每个波导臂130包括依次设置的一个第一单模波导部131、一个第一耦合部132、一个多模波导部133、一个第二耦合部134和一个第二单模波导部135，其中，两个波导臂130的第一单模波导部131分别与分光元件110连接，两个波导臂130的第二单模波导部135分别与合光元件120连接。
如图2和图3所示，两个波导臂130的第一单模波导部131呈曲线弯曲状并且对称布置，两个波导臂130的第二单模波导部135呈曲线弯曲状并且对称布置。第一单模波导部131和第二单模波导部135在具有较佳的传输稳定性。
在本公开的一些实施例中，电光调制器为折叠型电光调制器，采用折叠设计，可以根据需求设计增加波导臂的长度，不但可以缩减器件长度方向的尺寸，还可以使器件获得更佳的性能。
如图4所示，该折叠型的电光调制器包括至少一个转弯区150，每个波导臂130包括多个单元段(图中示意为两个单元段)，每个单元段包括依次设置的一个第一单模波导部131、一个第一耦合部132、一个多模波导部133、一个第二耦合部134和一个第二单模波导部135。波导臂130的任意两个相邻单元段中，其中一个单元段的第二单模波导部135与另一个单元段的第一单模波导部131在转弯区150一体连接。如前所述，单模波导更适合设计为弯曲形状，而且具有更高的传输稳定性。
在该实施例中，在每个转弯区150，其中一个波导臂130的呈一体连接的第二单模波导部135和第一单模波导部131，与另一个波导臂130的呈一体连接的第二单模波导部135和第一单模波导部131一体交叉连接。两个波导臂130在转弯区150设计为交叉结构，可以保证两个波导臂130在 调制区所处电场的方向不变。在一些实施例中，两个波导臂130在每个转弯区150垂直交叉连接。这样，可以将交叉处波导分支之间的传输干扰进一步降低。
应当理解的是，在本说明书中，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系或尺寸为基于附图所示的方位或位置关系或尺寸，使用这些术语仅是为了便于描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，并且因此不能理解为对本公开的保护范围的限制。
此外，术语“第一”、“第二”、“第三”等仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”、“第三”的特征可以明示或者隐含地包括一个或者更多个该特征。在本公开的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本公开中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接，还可以是通信；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本公开中的具体含义。
在本公开中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
本说明书提供了能够用于实现本公开的许多不同的实施方式或例子。应当理解的是，这些不同的实施方式或例子完全是示例性的，并且不用于以任何方式限制本公开的保护范围。本领域技术人员在本公开的说明书的公开内容的基础上，能够想到各种变化或替换，这些都应涵盖在本公开的保护范围之内。因此，本公开的保护范围应以所附权利要求所限定的保护范围为准。

Claims (13)

  1. 一种电光调制器，包括分光元件、合光元件、两个波导臂、以及调制电极，其中，
    两个波导臂连接在分光元件和合光元件之间，每个波导臂包括第一单模波导部、第一耦合部、多模波导部、第二耦合部和第二单模波导部，其中，
    第一单模波导部和第二单模波导部中任一的宽度小于多模波导部的宽度；
    第一耦合部配置为使光从第一单模波导部耦合进入多模波导部，第二耦合部配置为使光从多模波导部耦合进入第二单模波导部；
    调制电极配置为向两个波导臂的多模波导部施加调制电压。
  2. 根据权利要求1所述的电光调制器，其中，
    第一耦合部包括与第一单模波导部连接的第一部分以及与多模波导部连接的第二部分，第一部分与第二部分相对并且第一部分的宽度沿远离第一单模波导部的方向逐渐减小。
  3. 根据权利要求1所述的电光调制器，其中，
    第二耦合部包括与第二单模波导部连接的第三部分以及与多模波导部连接的第四部分，第三部分与第四部分相对并且第三部分的宽度沿靠近第二单模波导部的方向逐渐增大。
  4. 根据权利要求1所述的电光调制器，其中，
    第一耦合部包括与第一单模波导部连接的第一部分以及与多模波导部连接的第二部分，第二部分与第一部分相对并且第二部分的宽度沿远离第一单模波导部的方向逐渐增大。
  5. 根据权利要求1所述的电光调制器，其中，
    第二耦合部包括与第二单模波导部连接的第三部分以及与多模波导部连接的第四部分，第四部分与第三部分相对并且第四部分的宽度沿靠近第二单模波导部的方向逐渐减小。
  6. 根据权利要求1所述的电光调制器，其中，
    第一耦合部为第一多模干涉耦合元件，第二耦合部为第二多模干涉耦合元件。
  7. 根据权利要求6所述的电光调制器，其中，
    第一多模干涉耦合元件包括第一矩形干涉部分，以及第一宽度增大部分和/或第一宽度减小部分，其中，
    第一宽度增大部分连接在第一单模波导部与第一矩形干涉部分之间，第一宽度增大部分的宽度沿靠近第一矩形干涉部分的方向逐渐增大；
    第一宽度减小部分连接在第一矩形干涉部分与多模波导部之间，第一宽度减小部分的宽度沿远离第一矩形干涉部分的方向逐渐减小。
  8. 根据权利要求6所述的电光调制器，其中，
    第二多模干涉耦合元件包括第二矩形干涉部分，以及第二宽度增大部分和/或第二宽度减小部分，其中，
    第二宽度增大部分连接在多模波导部与第二矩形干涉部分之间，第二宽度增大部分的宽度沿靠近第二矩形干涉部分的方向逐渐增大；
    第二宽度减小部分连接在第二矩形干涉部分与第二单模波导部之间，第二宽度减小部分的宽度沿远离第二矩形干涉部分的方向逐渐减小。
  9. 根据权利要求1至8中任一项所述的电光调制器，其中，
    每个波导臂包括依次设置的一个第一单模波导部、一个第一耦合部、一个多模波导部、一个第二耦合部和一个第二单模波导部，其中，
    两个波导臂的第一单模波导部分别与分光元件连接，两个波导臂的第二单模波导部分别与合光元件连接。
  10. 根据权利要求9所述的电光调制器，其中，
    两个波导臂的第一单模波导部呈曲线弯曲状并且对称布置；
    两个波导臂的第二单模波导部呈曲线弯曲状并且对称布置。
  11. 根据权利要求1至8中任一项所述的电光调制器，其中，
    电光调制器具有折叠结构，包括至少一个转弯区；
    每个波导臂包括多个单元段，每个单元段包括依次设置的一个第一单模波导部、一个第一耦合部、一个多模波导部、一个第二耦合部和一个第二单模波导部，任意相邻两个单元段中，其中一个单元段的第二单模波导部与另一个单元段的第一单模波导部在转弯区一体连接。
  12. 根据权利要求11所述的电光调制器，其中，
    两个波导臂在每个转弯区一体交叉连接。
  13. 根据权利要求11所述的电光调制器，其中，
    两个波导臂在每个转弯区垂直交叉连接。
PCT/CN2023/088974 2022-07-06 2023-04-18 电光调制器 Ceased WO2024007677A1 (zh)

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