WO2024201760A1 - Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic - Google Patents

Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic Download PDF

Info

Publication number
WO2024201760A1
WO2024201760A1 PCT/JP2023/012720 JP2023012720W WO2024201760A1 WO 2024201760 A1 WO2024201760 A1 WO 2024201760A1 JP 2023012720 W JP2023012720 W JP 2023012720W WO 2024201760 A1 WO2024201760 A1 WO 2024201760A1
Authority
WO
WIPO (PCT)
Prior art keywords
signal
sensor
unit
self
diagnosis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/012720
Other languages
English (en)
Japanese (ja)
Inventor
伸之 大▲浜▼
幹雄 宗友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Engineering Co Ltd
Original Assignee
Mitsubishi Electric Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Engineering Co Ltd filed Critical Mitsubishi Electric Engineering Co Ltd
Priority to PCT/JP2023/012720 priority Critical patent/WO2024201760A1/fr
Publication of WO2024201760A1 publication Critical patent/WO2024201760A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/14—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object using acoustic emission techniques

Definitions

  • This disclosure relates to an equipment anomaly detection device and a self-diagnosis method.
  • AE waves acoustic emission
  • AE waves are detected by an AE sensor. If an abnormality occurs in the AE sensor, it will no longer be able to correctly detect abnormalities in the equipment. For this reason, it is necessary to diagnose the AE sensor as well.
  • the self-diagnosis sensor includes a sensor that detects tool abnormalities and a diagnostic sensor for diagnosing this sensor.
  • the sensor that detects tool abnormalities When a high-frequency signal is applied to the diagnostic sensor, the sensor that detects tool abnormalities resonates, so in addition to the vibrations of the mechanical system from the tool, the vibrations transmitted from the diagnostic sensor are also detected. This allows the self-diagnostic sensor to both detect tool abnormalities and diagnose the sensor that detects tool abnormalities.
  • the conventional technology has a problem in that a separate sensor dedicated to diagnosis must be provided in order to perform self-diagnosis of the sensor that detects an abnormality in the detection target.
  • a separate sensor dedicated to diagnosis In order to transmit vibrations from a diagnostic sensor to a sensor that detects an abnormality in a detection target, the positional relationship between the two sensors must be adequately adjusted, which makes manufacturing difficult.
  • sensors with different physical properties are used, they will be affected by differences in the environment, and it may not be possible to perform detailed self-diagnosis of the sensors.
  • the present disclosure aims to solve the above problems and provide an equipment abnormality detection device and self-diagnosis method that can perform both equipment abnormality detection and self-diagnosis with a single sensor.
  • the equipment abnormality detection device includes an AE sensor having a cantilever and outputting a sine wave signal due to the vibration of the cantilever, a switching unit that switches between the sine wave signal output by the AE sensor due to the vibration of the cantilever in response to AE waves generated in the equipment and the sine wave signal output by the AE sensor due to the vibration of the cantilever in response to a self-diagnosis signal output to the AE sensor, and a signal processing unit that performs equipment abnormality detection processing using the sine wave signal in response to the AE waves generated in the equipment and self-diagnosis processing of the AE sensor using the sine wave signal in response to the self-diagnosis signal.
  • the AE sensor has a cantilever, and outputs a sine wave signal due to the vibration of the cantilever.
  • the AE sensor switches between the sine wave signal output by the AE sensor due to the vibration of the cantilever in response to the AE waves generated in the equipment and the sine wave signal output by the AE sensor due to the vibration of the cantilever in response to a self-diagnosis signal, and performs equipment abnormality detection processing using the sine wave signal in response to the AE waves generated in the equipment, and AE sensor self-diagnosis processing using the sine wave signal in response to the self-diagnosis signal.
  • This allows a single sensor to perform both equipment abnormality detection and self-diagnosis.
  • FIG. 1 is a block diagram showing a configuration of an equipment abnormality detection device according to a first embodiment
  • FIG. 2 is a schematic diagram showing a structure of an AE sensor.
  • 3A, 3B and 3C are waveform diagrams showing a single pulse signal and an output waveform of a sensor to which the single pulse signal is applied.
  • 4 is a flowchart showing a self-diagnosis method according to the first embodiment.
  • 5A and 5B are block diagrams showing a hardware configuration for realizing the functions of the equipment anomaly detection device according to the first embodiment.
  • FIG. 11 is a block diagram showing a configuration of an equipment abnormality detection device according to a second embodiment.
  • 7A and 7B are waveform diagrams showing a pulse signal of the resonant frequency of the AE sensor and an output waveform of the sensor to which the pulse signal is applied.
  • Fig. 1 is a block diagram showing the configuration of an equipment abnormality detection device 1 according to embodiment 1.
  • the equipment abnormality detection device 1 is a device that detects abnormalities in equipment based on AE (acoustic emission) waves generated in the equipment, and includes an AE sensor unit 2, a signal processing unit 3, a display unit 4, and an operation unit 5.
  • Target equipment includes rotating machines such as motors, reducers, cutting machines, pumps, and turbines.
  • the AE sensor unit 2 is attached to the target equipment, detects AE waves generated in the equipment, and outputs a sine wave signal corresponding to the AE waves. For example, when a motor rotates, vibrations are generated in the rotating shaft, etc.
  • the AE sensor unit 2 detects AE waves corresponding to the vibrations generated in the equipment.
  • the AE sensor unit 2 comprises an AE sensor 21, a first switch section 22, a second switch section 23, and a signal inversion section 24.
  • the first switch section 22, the second switch section 23, and the signal inversion section 24 constitute the switching section 25.
  • the signal processing unit 3 performs signal processing of the sine wave signal output from the AE sensor unit 2 to detect abnormalities in the equipment and perform self-diagnosis of the AE sensor 21.
  • the signal processing unit 3 includes a control processing unit 31, a single pulse output unit 32, an A/D conversion unit 33, and an arithmetic processing unit 34.
  • the display unit 4 displays the equipment abnormality detection result or the self-diagnosis result of the AE sensor 21 output from the signal processing unit 3.
  • the display unit 4 is a display panel provided in the equipment abnormality detection device 1, but may also be a display device provided separately from the equipment abnormality detection device 1.
  • the operation unit 5 accepts user operations.
  • the operation unit 5 has a reference setting button 51 that requests the setting of a reference value for self-diagnosis of the AE sensor 21, and a diagnosis start button 52 that requests the start of self-diagnosis of the AE sensor 21.
  • the reference setting button 51 and the diagnosis start button 52 are hardware buttons provided for self-diagnosis of the AE sensor 21.
  • the operation unit 5 may be a touch panel provided on the screen of the display unit 4 and may receive operations in conjunction with the image displayed on the display unit 4 .
  • the display unit 4 displays the reference setting button 51 and the diagnosis start button 52 based on first display control information for displaying a first operation image which is the reference setting button 51 and second display control information for displaying a second operation image which is the diagnosis start button 52.
  • the operation unit 5 may accept an operation (such as a click operation) on the reference setting button 51 and the diagnosis start button 52 displayed on the display unit 4.
  • Fig. 2 is a schematic diagram showing the structure of the AE sensor 21.
  • the AE sensor 21 is a sensor that has a cantilever 211 as shown in Fig. 2, and outputs a sine wave signal by vibration of the cantilever 211.
  • the cantilever 211 is made of a piezoelectric material with a high Q value, and has a resonant frequency included in the frequency band of the AE wave.
  • the AE sensor 21 detects an AE wave corresponding to the resonant frequency of the cantilever 211 from a wide band (several kHz to several MHz) of AE waves generated in the equipment, and outputs a sine wave signal of the detected AE wave.
  • the first switch unit 22 becomes conductive when it acquires the control digital signal inverted by the signal inverter unit 24, and becomes non-conductive when it acquires the control digital signal before inversion. In the conductive state, the first switch unit 22 outputs the self-diagnosis signal acquired from the signal processing unit 3 to the AE sensor 21.
  • the cantilever 211 of the AE sensor 21 vibrates due to the self-diagnosis signal applied from the first switch unit 22, and outputs a sine wave signal based on the self-diagnosis signal.
  • the second switch unit 23 becomes conductive when it acquires the control digital signal before it is inverted by the signal inversion unit 24, and becomes non-conductive when it acquires the inverted control digital signal. In the conductive state, the second switch unit 23 outputs to the signal processing unit 3 the sine wave signal output by the AE sensor 21 due to the vibration of the cantilever 211 in response to the AE wave or self-diagnosis signal generated in the equipment.
  • the signal inverting unit 24 receives the digital control signal output from the signal processing unit 3 , inverts the received digital control signal, and outputs the inverted signal to the first switch unit 22 .
  • the digital control signals include a digital control signal that specifies abnormality detection in the equipment and a digital control signal that specifies self-diagnosis of the AE sensor 21, and these signals have an inverted relationship.
  • the switching unit 25 switches between a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to AE waves generated in the equipment, and a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to a self-diagnosis signal output to the AE sensor 21.
  • FIG. 1 shows the equipment abnormality detection device 1 in which the AE sensor unit 2 includes the switching unit 25, the switching unit 25 may be included in the signal processing unit 3.
  • the control processing unit 31 performs equipment abnormality detection processing and self-diagnosis processing of the AE sensor 21 by outputting a digital control signal, using the voltage value data calculated by the arithmetic processing unit 34.
  • the single pulse output unit 32 is a self-diagnosis signal output unit that is controlled by the control processing unit 31 and outputs a single pulse signal to the first switch unit 22 of the AE sensor unit 2.
  • the A/D conversion unit 33 converts the sine wave signal output from the AE sensor 21 into a digital signal.
  • the calculation processing unit 34 calculates voltage value data of the sine wave signal converted into a digital signal by the A/D conversion unit 33.
  • the voltage value data of the sine wave signal is, for example, a statistical value such as an effective value, a maximum value, or an average value of the voltage value of the sine wave signal over a certain period of time.
  • the equipment abnormality detection device 1 is normally in a state in which it detects an equipment abnormality.
  • the control processing unit 31 outputs a control digital signal specifying the equipment abnormality detection to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a signal obtained by inverting the control digital signal specifying the equipment abnormality detection to the first switch unit 22.
  • the first switch unit 22 becomes non-conductive and the second switch unit 23 becomes conductive.
  • the AE sensor 21 generates AE waves in response to vibrations occurring in the target equipment (equipment to which the AE sensor 21 is attached), causing the cantilever 211 to vibrate, and outputs a sine wave signal in response to the AE waves.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the converted sine wave signal to the calculation processing unit 34.
  • the arithmetic processing unit 34 calculates voltage value data of the sine wave signal.
  • the voltage value data of the sine wave signal is, for example, an effective value or a maximum value of the voltage value of the sine wave signal.
  • the control processing unit 31 detects an abnormality in the equipment by using the voltage value data of the sine wave signal calculated by the calculation processing unit 34. For example, the control processing unit 31 determines the presence or absence of an abnormality in the equipment by comparing the voltage value data of the sine wave signal with a determination threshold value prepared in advance.
  • control processing unit 31 determines that an abnormality has occurred in the equipment, it generates display control information for notifying the abnormality that has occurred in the equipment and outputs it to the display unit 4.
  • the display unit 4 displays an alarm screen notifying the abnormality that has occurred in the equipment based on the display control information.
  • the control processing unit 31 also generates display control information for displaying the voltage value data of the sine wave signal, and outputs the generated display control information to the display unit 4, or a PC (Personal Computer) or PLC (Programmable Logic Controller) provided separately from the equipment abnormality detection device 1. This allows the display unit 4, PC, or PLC to display numerical values such as the effective value or maximum value for the sine wave signal of the AE wave based on the display control information.
  • PC Personal Computer
  • PLC Programmable Logic Controller
  • the operation unit 5 accepts an operation of the reference setting button 51, it outputs operation information of the reference setting button 51 to the control processing unit 31.
  • the control processing unit 31 inputs the operation information of the reference setting button 51, and outputs a control digital signal specifying self-diagnosis of the AE sensor 21 to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs an inverted control digital signal specifying self-diagnosis to the first switch unit 22.
  • the first switch unit 22 becomes conductive and the second switch unit 23 becomes non-conductive.
  • the control processing unit 31 controls the single pulse output unit 32 to output a single pulse signal from the single pulse output unit 32 to the first switch unit 22.
  • the first switch unit 22 outputs the single pulse signal to the AE sensor 21.
  • control processing unit 31 When the control processing unit 31 causes the AE sensor 21 to output a single pulse signal, it outputs a signal that is an inversion of the control digital signal that specifies self-diagnosis to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a signal that is an inversion of the control digital signal that specifies self-diagnosis to the first switch unit 22. As a result, the first switch unit 22 becomes non-conductive and the second switch unit 23 becomes conductive.
  • the cantilever 211 vibrates, and the AE sensor 21 outputs a sine wave signal corresponding to the single pulse signal.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the digitally converted sine wave signal to the calculation processing unit 34.
  • the calculation processing unit 34 calculates voltage value data of the sine wave signal.
  • This voltage value data is a reference value that indicates the current state of the AE sensor 21. This reference value is stored by the control processing unit 31 in a memory not shown in FIG. 1. For example, by carrying out the above series of processes assuming that the state of the AE sensor 21 at the time of attachment to the equipment is normal, a reference value for self-diagnosis is set in the equipment abnormality detection device 1 .
  • AE sensor self-diagnosis For example, when the operation unit 5 accepts the operation of the diagnosis start button 52, it outputs operation information of the diagnosis start button 52 to the control processing unit 31.
  • the control processing unit 31 inputs the operation information of the diagnosis start button 52, and outputs a control digital signal specifying self-diagnosis of the AE sensor 21 to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs an inverted control digital signal specifying self-diagnosis to the first switch unit 22. This puts the first switch unit 22 in a conductive state and the second switch unit 23 in a non-conductive state. In this state, the control processing unit 31 controls the single pulse output unit 32 to output a single pulse signal from the single pulse output unit 32 to the first switch unit 22. The first switch unit 22 outputs the single pulse signal to the AE sensor 21.
  • Fig. 3A is a waveform diagram showing the waveform of a single pulse signal applied to the AE sensor 21.
  • the single pulse signal in Fig. 3A is a pulse signal with a pulse width of 1 ms.
  • Fig. 3B is a waveform diagram showing the waveform of a sine wave signal output from the AE sensor 21 to which the single pulse signal of Fig. 3A is applied.
  • the AE sensor 21 to which the single pulse signal of Fig. 3A is applied outputs a sine wave signal as shown in Fig. 3B as the cantilever 211 vibrates.
  • Fig. 3C is a waveform diagram showing the waveform of a signal output from a conventional AE sensor to which the single pulse signal of Fig. 3A is applied.
  • the signal waveform shown in Fig. 3C is obtained from an equipment abnormality detection device 1 in which only the AE sensor 21 is replaced with a conventional AE sensor.
  • the conventional AE sensor is composed of a piezoelectric element that does not have an oscillation structure including a cantilever 211.
  • the AE sensor described in Patent Document 1 does not have an oscillation structure including the cantilever 211 .
  • the AE sensor 21 has a cantilever 211, which vibrates in response to the single pulse signal.
  • the vibration of the cantilever 211 is maintained even during the period from time 6 ms when the voltage of the applied single pulse signal falls to time 8 ms, and a sine wave signal continues to be output.
  • the equipment abnormality detection device 1 is able to check the output of the AE sensor 21 even for a certain period of time after the single pulse signal is applied to the AE sensor 21 .
  • control processing unit 31 When the control processing unit 31 causes the AE sensor 21 to output a single pulse signal, it outputs a signal that is an inversion of the control digital signal that specifies self-diagnosis to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a signal that is an inversion of the control digital signal that specifies self-diagnosis to the first switch unit 22. As a result, the first switch unit 22 becomes non-conductive and the second switch unit 23 becomes conductive.
  • the cantilever 211 vibrates, and the AE sensor 21 outputs a sine wave signal corresponding to the single pulse signal.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the digitally converted sine wave signal to the calculation processing unit 34.
  • the calculation processing unit 34 calculates voltage value data of the sine wave signal.
  • the control processing unit 31 determines whether or not an abnormality has occurred in the AE sensor 21 based on the result of comparing the voltage value data of the sine wave signal acquired from the calculation processing unit 34 with a reference value stored in advance. For example, the control processing unit 31 determines that an abnormality has occurred in the AE sensor 21 when the voltage value data of the sine wave signal is equal to or greater than the reference value.
  • control processing unit 31 determines that there is an abnormality in the AE sensor 21, it generates display control information for displaying that there is an abnormality in the AE sensor 21, and outputs the generated display control information to the display unit 4.
  • the display unit 4 displays the abnormality in the AE sensor 21 based on the display control information. This allows the user to visually confirm the presence or absence of an abnormality in the AE sensor 21 by visually checking the screen of the display unit 4. Furthermore, the control processing unit 31 may notify the presence or absence of an abnormality in the AE sensor 21 by turning on a warning LED.
  • FIG. 4 is a flowchart showing the self-diagnosis method according to the first embodiment, illustrating a series of processes performed by the equipment anomaly detection device 1.
  • the switching unit 25 switches between a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to AE waves generated in the equipment, and a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to a self-diagnosis signal output to the AE sensor 21.
  • the signal processing unit 3 performs an abnormality detection process for the equipment using a sine wave signal corresponding to the AE waves generated in the equipment, and a self-diagnosis process for the AE sensor 21 using a sine wave signal corresponding to the self-diagnosis signal.
  • the signal processing unit 3 determines whether the process to be executed is equipment abnormality detection or self-diagnosis of the AE sensor 21 based on the operation information received by the operation unit 5 (step ST1). For example, the signal processing unit 3 performs equipment abnormality detection until it receives operation information indicating an operation on the diagnosis start button 52, and when it obtains operation information indicating an operation on the diagnosis start button 52 from the operation unit 5, it starts self-diagnosis processing of the AE sensor 21.
  • the signal processing unit 3 determines that the process to be executed is self-diagnosis of the AE sensor 21 (step ST1; self-diagnosis), it applies a single pulse signal from the single pulse output unit 32 to the AE sensor 21 via the first switch unit 22 (step ST2).
  • the AE sensor 21 outputs a sine wave signal corresponding to the single pulse signal when the single pulse signal is applied to vibrate the cantilever 211.
  • the signal processing unit 3 acquires the sine wave signal corresponding to the single pulse signal (step ST3).
  • the signal processing unit 3 performs a self-diagnosis of the AE sensor 21 based on the result of comparing the voltage value data of the acquired sine wave signal with a reference value stored in advance (step ST4).
  • step ST1 equipment abnormality detection
  • the signal processing unit 3 enters a state of waiting for an output signal from the AE sensor 21.
  • the AE sensor 21 generates an AE wave corresponding to vibrations generated in the target equipment, and the cantilever 211 vibrates, thereby outputting a sine wave signal corresponding to the AE wave.
  • the signal processing unit 3 acquires a sine wave signal corresponding to the AE wave (step ST5).
  • the signal processing unit 3 detects an abnormality in the equipment based on a result of comparing the voltage value data of the sine wave signal corresponding to the AE wave with a previously prepared determination threshold value (step ST6).
  • the equipment abnormality detection device 1 can perform both abnormality detection and self-diagnosis of the equipment using one sensor by executing the series of processes shown in FIG.
  • the equipment abnormality detection device 1 includes a processing circuit that executes the processes from step ST1 to step ST6 in Fig. 4.
  • the processing circuit may be dedicated hardware, or may be a CPU (Central Processing Unit) that executes a program stored in a memory.
  • FIG. 5A is a block diagram showing a hardware configuration that realizes the functions of equipment abnormality detection device 1
  • FIG. 5B is a block diagram showing a hardware configuration that executes software that realizes the functions of equipment abnormality detection device 1.
  • input interface 100 relays the sine wave signal input from AE sensor 21 to equipment abnormality detection device 1.
  • Output interface 101 is an interface that relays the sine wave signal output from AE sensor 21 to switching unit 25.
  • Output interface 101 is an interface that relays the signal processing result output from signal processing unit 3 to display unit 4.
  • the processing circuit 102 is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination of these.
  • the functions of the switching unit 25 and the signal processing unit 3 provided in the equipment abnormality detection device 1 may be realized by separate processing circuits, or these functions may be realized together by a single processing circuit.
  • the processing circuit is the processor 103 shown in FIG. 5B
  • the functions of the switching unit 25 and the signal processing unit 3 of the equipment abnormality detection device 1 are realized by software, firmware, or a combination of software and firmware.
  • the software or firmware is written as a program and stored in the memory 104.
  • the processor 103 reads out and executes the programs stored in the memory 104 to realize the functions of the switching unit 25 and the signal processing unit 3 included in the equipment abnormality detection device 1.
  • the equipment abnormality detection device 1 includes a memory 104 for storing a program that, when executed by the processor 103, results in the processing of steps ST1 to ST5 in the flowchart shown in FIG. 3 being executed. These programs cause a computer to execute the procedures or methods of the switching unit 25 and the signal processing unit 3.
  • the memory 104 may be a computer-readable storage medium that stores a program for causing a computer to function as the switching unit 25 and the signal processing unit 3.
  • Memory 104 may be, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), EEPROM (Electrically-EPROM) (registered trademark), a magnetic disk, a flexible disk, an optical disk, a compact disk, a mini disk, a DVD, etc.
  • RAM Random Access Memory
  • ROM Read Only Memory
  • flash memory EPROM (Erasable Programmable Read Only Memory)
  • EEPROM Electrical-EPROM
  • a part of the functions of the switching unit 25 and the signal processing unit 3 included in the equipment abnormality detection device 1 may be realized by dedicated hardware, and the remaining functions may be realized by software or firmware.
  • the switching unit 25 realizes its functions by a processing circuit 102 which is dedicated hardware
  • the signal processing unit 3 realizes its functions by a processor 103 reading and executing a program stored in a memory 104.
  • the processing circuit can realize the above functions by hardware, software, firmware, or a combination of these.
  • the equipment abnormality detection device 1 includes the AE sensor 21 having a cantilever 211 and outputting a sine wave signal by the vibration of the cantilever 211, the switching unit 25 switching between the sine wave signal output by the AE sensor 21 by the vibration of the cantilever 211 corresponding to the AE waves generated in the equipment and the sine wave signal output by the AE sensor 21 by the vibration of the cantilever 211 corresponding to the self-diagnosis signal output to the AE sensor 21, and the signal processing unit 3 performing equipment abnormality detection processing using the sine wave signal corresponding to the AE waves generated in the equipment and self-diagnosis processing of the AE sensor 21 using the sine wave signal corresponding to the self-diagnosis signal.
  • the equipment abnormality detection device 1 By performing equipment abnormality detection processing using the sine wave signal corresponding to the AE waves generated in the equipment and self-diagnosis processing of the AE sensor 21 using the sine wave signal corresponding to the self-diagnosis signal, the equipment abnormality detection device 1 is capable of both equipment abnormality detection and self-diagnosis with a single sensor.
  • the switching unit 25 has a signal inversion unit 24 that inverts the control digital signal output from the signal processing unit 3, a first switch unit 22 that is brought into a conductive state by the control digital signal inverted by the signal inversion unit 24 and outputs a self-diagnosis signal to the AE sensor 21 in the conductive state, and a second switch unit 23 that is brought into a conductive state by the control digital signal before being inverted by the signal inversion unit 24 and outputs to the signal processing unit 3 a sine wave signal output by the AE sensor 21 due to the vibration of the cantilever 211 in response to the AE wave generated in the equipment or the self-diagnosis signal.
  • the signal processing unit 3 has an A/D conversion unit 33 that converts the sine wave signal output by the AE sensor 21 into a digital signal, an arithmetic processing unit 34 that calculates voltage value data of the sine wave signal converted into a digital signal by the A/D conversion unit 33, a control processing unit 31 that outputs a digital signal for control and performs equipment abnormality detection processing and self-diagnosis processing of the AE sensor 21 using the voltage value data calculated by the arithmetic processing unit 34, and a single pulse output unit 32 that is controlled by the control processing unit 31 and outputs a single pulse signal as a self-diagnosis signal.
  • This enables the equipment abnormality detection device 1 to obtain a sine wave signal corresponding to the self-diagnosis signal output to the AE sensor 21.
  • the signal processing unit 3 generates first display control information for displaying a first operation image instructing the setting of a diagnostic reference value for the AE sensor 21, and second display control information for displaying a second operation image instructing diagnostic processing of the AE sensor 21, and when operation information based on the first display control information is acquired, sets the diagnostic reference value for the AE sensor 21, and when operation information based on the second display control information is acquired, starts self-diagnosis processing of the AE sensor 21.
  • the self-diagnosis method includes a step in which the switching unit 25 switches between a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to AE waves generated in the equipment and a sine wave signal output by the AE sensor 21 due to vibration of the cantilever 211 in response to a self-diagnosis signal output to the AE sensor 21, and a step in which the signal processing unit 3 performs an abnormality detection process for the equipment using the sine wave signal in response to the AE waves generated in the equipment, and a self-diagnosis process for the AE sensor 21 using the sine wave signal in response to the self-diagnosis signal.
  • the equipment abnormality detection device 1 is able to perform both abnormality detection and self-diagnosis of the equipment using a single sensor.
  • Fig. 5 is a block diagram showing the configuration of an equipment abnormality detection device 1A according to embodiment 2.
  • the equipment abnormality detection device 1A is a device that detects abnormalities in equipment based on AE waves generated in the equipment, and includes an AE sensor unit 2A, a signal processing unit 3A, a display unit 4, and an operation unit 5.
  • Target equipment includes rotating machines such as motors, reducers, cutting machines, pumps, and turbines.
  • the same components as those in Fig. 1 are given the same reference numerals, and description thereof will be omitted.
  • the AE sensor unit 2A is attached to the target equipment, detects AE waves generated in the equipment, and outputs a sine wave signal corresponding to the AE waves. For example, when a motor rotates, vibrations are generated in the rotating shaft, etc.
  • the AE sensor unit 2A detects AE waves corresponding to the vibrations generated in the equipment.
  • the AE sensor unit 2A comprises an AE sensor 21A, a first switch unit 22A, a second switch unit 23, and a signal inversion unit 24.
  • the first switch unit 22A, the second switch unit 23, and the signal inversion unit 24 make up the switching unit 25A.
  • the signal processing unit 3A performs signal processing of the sine wave signal output from the AE sensor unit 2A to detect abnormalities in the equipment and perform self-diagnosis of the AE sensor 21. As shown in FIG. 5, the signal processing unit 3A includes a control processing unit 31A, a single pulse output unit 32, an A/D conversion unit 33, and an arithmetic processing unit 34.
  • the display unit 4 displays the equipment abnormality detection result output from the signal processing unit 3A or the self-diagnosis result of the AE sensor 21.
  • the display unit 4 is a display panel provided in the equipment abnormality detection device 1A, but may also be a display device provided separately from the equipment abnormality detection device 1.
  • the operation unit 5 accepts user operations.
  • the operation unit 5 has a reference setting button 51 that requests the setting of a reference value for self-diagnosis of the AE sensor 21, and a diagnosis start button 52 that requests the start of self-diagnosis of the AE sensor 21.
  • the reference setting button 51 and the diagnosis start button 52 are hardware buttons provided for self-diagnosis of the AE sensor 21.
  • the operation unit 5 may be a touch panel provided on the screen of the display unit 4 and may receive operations in conjunction with the image displayed on the display unit 4 .
  • the display unit 4 displays the reference setting button 51 and the diagnosis start button 52 based on first display control information for displaying a first operation image which is the reference setting button 51 and second display control information for displaying a second operation image which is the diagnosis start button 52.
  • the operation unit 5 may accept an operation (such as a click operation) on the reference setting button 51 and the diagnosis start button 52 displayed on the display unit 4.
  • the first switch unit 22A becomes conductive when it acquires the control digital signal inverted by the signal inverter unit 24, and becomes non-conductive when it acquires the control digital signal before inversion. In the conductive state, the first switch unit 22A outputs the self-diagnosis signal acquired from the signal processor 3A to the AE sensor 21.
  • the cantilever 211 of the AE sensor 21 vibrates due to the self-diagnosis signal applied from the first switch unit 22A, and outputs a sine wave signal based on the self-diagnosis signal.
  • the signal inverting unit 24 receives the digital control signal output from the signal processing unit 3A, inverts the received digital control signal, and outputs the inverted signal to the first switch unit 22A.
  • the digital control signals include a digital control signal that specifies abnormality detection in the equipment and a digital control signal that specifies self-diagnosis of the AE sensor 21, and these signals have an inverted relationship.
  • the switching unit 25A switches between the sine wave signal output by the AE sensor 21 due to the vibration of the cantilever 211 in response to the AE waves generated in the equipment, and the sine wave signal output by the AE sensor 21 due to the vibration of the cantilever 211 in response to the self-diagnosis signal output to the AE sensor 21.
  • FIG. 5 shows the equipment abnormality detection device 1A in which the AE sensor unit 2A is equipped with the switching unit 25A
  • the switching unit 25A may also be provided in the signal processing unit 3A.
  • the control processing unit 31A performs equipment abnormality detection processing and self-diagnosis processing of the AE sensor 21 by using the voltage value data calculated by the arithmetic processing unit 34 by outputting a control digital signal.
  • the single pulse output unit 32 is a self-diagnosis signal output unit that outputs a single pulse signal to the first switch unit 22 of the AE sensor unit 2 by being controlled by the control processing unit 31.
  • the resonant frequency output unit 35 is a self-diagnosis signal output unit that outputs a signal of the resonant frequency of the cantilever 211 of the AE sensor 21 as a self-diagnosis signal to the first switch unit 22 of the AE sensor unit 2 by being controlled by the control processing unit 31A.
  • the equipment abnormality detection device 1A is normally in a state in which it detects an equipment abnormality.
  • the control processing unit 31A outputs a control digital signal specifying the equipment abnormality detection to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a signal obtained by inverting the control digital signal specifying the equipment abnormality detection to the first switch unit 22A.
  • the first switch unit 22A becomes non-conductive and the second switch unit 23 becomes conductive.
  • the AE sensor 21 generates AE waves in response to vibrations occurring in the target equipment, causing the cantilever 211 to vibrate, thereby outputting a sine wave signal in response to the AE waves.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the converted sine wave signal to the calculation processing unit 34.
  • the arithmetic processing unit 34 calculates voltage value data of the sine wave signal.
  • the voltage value data of the sine wave signal is, for example, an effective value or a maximum value of the voltage value of the sine wave signal.
  • the control processing unit 31A detects an abnormality in the equipment by using the voltage value data of the sine wave signal calculated by the calculation processing unit 34. For example, the control processing unit 31 judges the presence or absence of an abnormality in the equipment by comparing the voltage value data of the sine wave signal with a judgment threshold value prepared in advance.
  • control processing unit 31A determines that an abnormality has occurred in the equipment, it generates display control information for notifying the user of the abnormality and outputs the information to the display unit 4.
  • the display unit 4 displays an alarm screen notifying the user of the abnormality that has occurred in the equipment based on the display control information.
  • the control processing unit 31A also generates display control information for displaying the voltage value data of the sine wave signal, and outputs the generated display control information to the display unit 4, or a PC or PLC provided separately from the equipment abnormality detection device 1A. This allows the display unit 4, PC, or PLC to display numerical values such as the effective value or maximum value of the sine wave signal of the AE wave based on the display control information.
  • (Setting the self-diagnosis reference value) For example, when the operation unit 5 accepts an operation of the reference setting button 51, it outputs operation information of the reference setting button 51 to the control processing unit 31A. By inputting the operation information of the reference setting button 51, the control processing unit 31A outputs a control digital signal specifying self-diagnosis of the AE sensor 21 to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs an inverted control digital signal specifying self-diagnosis to the first switch unit 22A. This puts the first switch unit 22A in a conductive state and the second switch unit 23 in a non-conductive state. In this state, the control processing unit 31A controls the single pulse output unit 32 to output a single pulse signal from the single pulse output unit 32 to the first switch unit 22A. The first switch unit 22A outputs the single pulse signal to the AE sensor 21.
  • control processing unit 31A When the control processing unit 31A outputs a single pulse signal to the AE sensor 21, it outputs an inverted signal of the control digital signal specifying self-diagnosis to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a further inverted signal of the control digital signal specifying self-diagnosis to the first switch unit 22A.
  • the first switch unit 22A becomes non-conductive and the second switch unit 23 becomes conductive.
  • the cantilever 211 vibrates, and the AE sensor 21 outputs a sine wave signal corresponding to the single pulse signal.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the digitally converted sine wave signal to the calculation processing unit 34.
  • the calculation processing unit 34 calculates frequency data of the sine wave signal. This frequency data is the resonant frequency of the AE sensor 21, i.e., the resonant frequency of the cantilever 211.
  • control processing section 31A outputs a control digital signal that specifies the self-diagnosis of the AE sensor 21 to the second switch section 23 and the signal inversion section 24.
  • the signal inverting unit 24 outputs a signal obtained by inverting the control digital signal specifying the self-diagnosis to the first switch unit 22A, whereby the first switch unit 22A becomes conductive and the second switch unit 23 becomes non-conductive.
  • the control processing unit 31A controls the resonance frequency output unit 35 to output a resonance frequency signal of the AE sensor 21 from the resonance frequency output unit 35 to the first switch unit 22A.
  • the first switch unit 22A outputs the resonance frequency signal to the AE sensor 21.
  • control processing unit 31A When the control processing unit 31A causes the AE sensor 21 to output the resonant frequency signal, it outputs an inverted control digital signal that specifies self-diagnosis to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a further inverted control digital signal that specifies self-diagnosis to the first switch unit 22A.
  • the first switch unit 22A becomes non-conductive and the second switch unit 23 becomes conductive.
  • the cantilever 211 vibrates, and the AE sensor 21 outputs a sine wave signal corresponding to the resonant frequency signal.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the digitally converted sine wave signal to the calculation processing unit 34.
  • the calculation processing unit 34 calculates voltage value data of the sine wave signal.
  • This voltage value data is a reference value that indicates the current state of the AE sensor 21. This reference value is stored in a memory, not shown in FIG. 5, by the control processing unit 31A. For example, by carrying out the above series of processes assuming that the state of the AE sensor 21 at the time of attachment to the equipment is normal, a reference value for self-diagnosis is set in the equipment abnormality detection device 1A.
  • AE sensor self-diagnosis For example, when the operation unit 5 accepts the operation of the diagnosis start button 52, it outputs operation information of the diagnosis start button 52 to the control processing unit 31.
  • the control processing unit 31A inputs the operation information of the diagnosis start button 52, and outputs a control digital signal specifying self-diagnosis of the AE sensor 21 to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs an inverted control digital signal that specifies self-diagnosis to the first switch unit 22A. This places the first switch unit 22A in a conductive state and the second switch unit 23 in a non-conductive state. In this state, the control processing unit 31A controls the resonant frequency output unit 35 to output a resonant frequency signal from the resonant frequency output unit 35 to the first switch unit 22A. The first switch unit 22A outputs the resonant frequency signal to the AE sensor 21.
  • Fig. 7A is a waveform diagram showing the waveform of the resonance frequency signal applied to the AE sensor 21.
  • the resonance frequency signal in Fig. 7A is a pulse group in which a plurality of pulse signals, each having a pulse width of approximately 0.025 ms, are arranged at a period corresponding to the resonance frequency.
  • Fig. 7B is a waveform diagram showing the waveform of a sine wave signal output from the AE sensor 21 to which the resonant frequency signal of Fig. 7A is applied.
  • the AE sensor 21 to which the resonant frequency signal of Fig. 7A is applied outputs a sine wave signal as shown in Fig. 7B as the cantilever 211 vibrates.
  • the AE sensor 21 has a cantilever 211 that resonates in response to a specific frequency, and the cantilever 211 vibrates when a resonant frequency signal is applied.
  • a sine wave signal with a voltage larger than that when a single pulse signal is applied is output.
  • the AE sensor 21 maintains the resonance of the cantilever 211 until time 8 ms, and continues to output a sine wave signal.
  • the output of the AE sensor 21 may become unstable.
  • the equipment abnormality detection device 1A identifies the resonant frequency of the cantilever 211 and applies a signal of the identified resonant frequency to the AE sensor 21, so that the cantilever 211 vibrates stably and the AE sensor 21 can output a sine wave signal stably.
  • control processing unit 31A When the control processing unit 31A causes the AE sensor 21 to output the resonant frequency signal, it outputs an inverted control digital signal that specifies self-diagnosis to the second switch unit 23 and the signal inversion unit 24.
  • the signal inversion unit 24 outputs a further inverted control digital signal that specifies self-diagnosis to the first switch unit 22A.
  • the first switch unit 22A becomes non-conductive and the second switch unit 23 becomes conductive.
  • the cantilever 211 vibrates, and the AE sensor 21 outputs a sine wave signal corresponding to the resonant frequency signal.
  • the second switch unit 23 outputs the sine wave signal from the AE sensor 21 to the A/D conversion unit 33.
  • the A/D conversion unit 33 converts the sine wave signal into a digital signal, and outputs the digitally converted sine wave signal to the calculation processing unit 34.
  • the calculation processing unit 34 calculates voltage value data of the sine wave signal.
  • the control processing unit 31A determines whether or not there is an abnormality in the AE sensor 21 based on the result of comparing the voltage value data of the sine wave signal acquired from the calculation processing unit 34 with a reference value stored in advance. For example, the control processing unit 31A determines that an abnormality has occurred in the AE sensor 21 when the voltage value data of the sine wave signal is equal to or greater than the reference value.
  • control processing unit 31A determines that there is an abnormality in the AE sensor 21, it generates display control information for displaying that there is an abnormality in the AE sensor 21, and outputs the generated display control information to the display unit 4.
  • the display unit 4 displays the abnormality in the AE sensor 21 based on the display control information. This allows the user to visually confirm the presence or absence of an abnormality in the AE sensor 21 by visually checking the screen of the display unit 4.
  • the control processing unit 31A may also notify the presence or absence of an abnormality in the AE sensor 21 by turning on a warning LED.
  • the equipment abnormality detection device 1A may not include the single pulse output unit 32 as the self-diagnosis signal output unit, and may include only the resonant frequency output unit 35.
  • the functions of the switching unit 25A and the signal processing unit 3A included in the equipment abnormality detection device 1A may be realized by a dedicated hardware processing circuit 102 shown in FIG. 5A.
  • Processing circuitry 102 may be, for example, a single circuit, multiple circuits, a programmed processor, parallel programmed processors, an ASIC, an FPGA, or any combination thereof.
  • the processing circuit is the processor 103 shown in FIG. 5B
  • the functions of the switching unit 25A and the signal processing unit 3A provided in the equipment anomaly detection device 1A are realized by software, firmware, or a combination of software and firmware.
  • the software or firmware is written as a program and stored in the memory 104.
  • the functions of the switching unit 25A and the signal processing unit 3A included in the equipment abnormality detection device 1A may be realized by separate processing circuits, or these functions may be realized together by a single processing circuit.
  • the signal processing unit 3A has an A/D conversion unit 33 that converts the sine wave signal output by the AE sensor 21 into a digital signal, an arithmetic processing unit 34 that calculates voltage value data of the sine wave signal converted into a digital signal by the A/D conversion unit 33, a control processing unit 31A that outputs a digital signal for control and performs equipment abnormality detection processing and self-diagnosis processing of the AE sensor 21 using the voltage value data calculated by the arithmetic processing unit 34, and a resonant frequency output unit 35 that is controlled by the control processing unit 31 and outputs a signal of the resonant frequency of the cantilever 211, which is a self-diagnosis signal.
  • the equipment abnormality detection device 1A By performing equipment abnormality detection processing using a sine wave signal corresponding to the AE waves generated in the equipment, and self-diagnosis processing of the AE sensor 21 using a sine wave signal corresponding to a resonant frequency signal, the equipment abnormality detection device 1A is able to perform both equipment abnormality detection and self-diagnosis with a single sensor.
  • the equipment anomaly detection device disclosed herein can be used, for example, to detect anomalies in equipment such as rotating machinery.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

L'invention concerne un dispositif de détection d'anomalie d'équipement (1) comprenant : un capteur AE (21) qui a un porte-à-faux (211) et délivre un signal d'onde sinusoïdale dû à la résonance du porte-à-faux (211) ; une unité de commutation (25) qui commute entre un signal d'onde sinusoïdale délivré par le capteur AE (21) en raison de la résonance du porte-à-faux (211) correspondant à une onde AE générée dans un équipement et un signal d'onde sinusoïdale délivré par le capteur AE (21) en raison de la résonance du porte-à-faux (211) correspondant à un signal d'auto-diagnostic délivré au capteur AE (21) ; et une unité de traitement de signal (3) qui effectue un traitement de détection d'anomalie de l'équipement en utilisant le signal d'onde sinusoïdale correspondant à l'onde AE générée dans l'équipement et un traitement d'auto-diagnostic du capteur AE (21) à l'aide du signal d'onde sinusoïdale correspondant au signal d'auto-diagnostic.
PCT/JP2023/012720 2023-03-29 2023-03-29 Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic Ceased WO2024201760A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/012720 WO2024201760A1 (fr) 2023-03-29 2023-03-29 Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/012720 WO2024201760A1 (fr) 2023-03-29 2023-03-29 Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic

Publications (1)

Publication Number Publication Date
WO2024201760A1 true WO2024201760A1 (fr) 2024-10-03

Family

ID=92903586

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/012720 Ceased WO2024201760A1 (fr) 2023-03-29 2023-03-29 Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic

Country Status (1)

Country Link
WO (1) WO2024201760A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156432A (ja) * 2003-11-27 2005-06-16 Taiheiyo Cement Corp 破断音センサ
US20160054271A1 (en) * 2013-03-18 2016-02-25 Aktiebolaget Skf Sensor self-test
JP2020046322A (ja) * 2018-09-19 2020-03-26 多摩川精機株式会社 Ａｅセンサ用音片アレイ構造、ａｅセンサ、およびそれらの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156432A (ja) * 2003-11-27 2005-06-16 Taiheiyo Cement Corp 破断音センサ
US20160054271A1 (en) * 2013-03-18 2016-02-25 Aktiebolaget Skf Sensor self-test
JP2020046322A (ja) * 2018-09-19 2020-03-26 多摩川精機株式会社 Ａｅセンサ用音片アレイ構造、ａｅセンサ、およびそれらの製造方法

Similar Documents

Publication Publication Date Title
CN111868644B (zh) 用于检测处理对象物的处理装置的异常的信息处理设备，信息处理方法和记录介质
WO2011067938A1 (fr) Dispositif de diagnostic ultrasonore
CN106662504A (zh) 旋转机械异常检测装置及其方法以及旋转机
US10359401B2 (en) Malfunction diagnosing apparatus, malfunction diagnosing method, and recording medium
JP2002268728A (ja) 同期診断監視システム、同期診断監視装置、および同期診断監視プログラム
US8248889B2 (en) Ultrasound diagnostic apparatus
US7558702B2 (en) Computer apparatus, start-up controlling method, and storage medium
WO2024201760A1 (fr) Dispositif de détection d'anomalie d'équipement et procédé d'auto-diagnostic
JP2021015445A (ja) 異常検知装置、情報処理方法およびプログラム
JP2002268742A (ja) 加工診断監視システム、加工診断監視装置、および加工診断監視プログラム
JP6822242B2 (ja) 診断装置、診断システム、診断方法およびプログラム
US20210293613A1 (en) Diagnostic apparatus and diagnostic method
JP7309079B2 (ja) 設備状態監視装置、異常判定システムおよび設備状態監視方法
JP6784140B2 (ja) 異常診断装置及び異常診断方法
CN112518421A (zh) 诊断装置以及诊断方法
JPH1019662A (ja) 自己診断装置
WO2022213948A1 (fr) Procédé et appareil de détection d'élasticité
JPH0610634B2 (ja) 携帯型振動診断装置
CN117178238A (zh) 数据处理系统、数据处理方法以及程序
CN116472446A (zh) 机床以及诊断方法
CN117982202B (zh) 频率跟踪方法、计算机设备及存储介质
CN114174819B (zh) 状态监视装置、状态监视系统及状态监视方法
CN112147971A (zh) 电子门控制器、及其调试方法和装置、存储介质和车辆
JPH04283840A (ja) 情報処理装置の診断方法
JP2010088698A (ja) 超音波診断装置及び超音波診断装置の故障診断方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23930400

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 23930400

Country of ref document: EP

Kind code of ref document: A1