WO2024203140A1 - Détecteur magnétique - Google Patents

Détecteur magnétique Download PDF

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Publication number
WO2024203140A1
WO2024203140A1 PCT/JP2024/008898 JP2024008898W WO2024203140A1 WO 2024203140 A1 WO2024203140 A1 WO 2024203140A1 JP 2024008898 W JP2024008898 W JP 2024008898W WO 2024203140 A1 WO2024203140 A1 WO 2024203140A1
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WO
WIPO (PCT)
Prior art keywords
substrate
diamond
magnetic detector
magnetic
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2024/008898
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English (en)
Japanese (ja)
Inventor
裕司 岸田
翔太朗 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Keio University
Original Assignee
Kyocera Corp
Keio University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp, Keio University filed Critical Kyocera Corp
Priority to JP2025510185A priority Critical patent/JP7823855B2/ja
Publication of WO2024203140A1 publication Critical patent/WO2024203140A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N24/00—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance

Definitions

  • This disclosure relates to a magnetic detector.
  • Patent Document 1 discloses a sensor that measures magnetic fields and includes a diamond having an NV center and an antenna made of a loop-shaped conductor formed on its surface. In the technology described in Patent Document 1, excitation light and its fluorescence are input and output to the NV center from the surface of the sensor opposite the surface on which the antenna is formed.
  • the magnetic detector comprises a diamond substrate having an NV center, a transparent first substrate on which the diamond substrate is disposed, an emitter formed on a surface of the first substrate or on a surface of the diamond substrate facing opposite to the surface on which the NV center is formed, and a second substrate having an opening and on which the first substrate is disposed, with at least a portion of the diamond substrate exposed from the opening.
  • FIG. 1 is a schematic diagram illustrating an example of a magnetic detector according to a first embodiment.
  • FIG. 2 is a schematic diagram illustrating an example of a substrate on which a magnetic detector is arranged.
  • FIG. 3A is a schematic diagram illustrating an example of a radiator.
  • FIG. 3-2 is a partially enlarged view of the radiator.
  • FIG. 4 is a diagram showing the S11 reflection characteristic of a loop antenna.
  • FIG. 5 is a schematic diagram illustrating an example of a magnetic detector according to the second embodiment.
  • FIG. 6 is a schematic diagram illustrating an example of a magnetic detector according to the third embodiment.
  • the magnetic detector 1 is for detecting magnetism generated in the measured sample 100.
  • Figure 1 is a schematic diagram for explaining an example of the magnetic detector according to the first embodiment.
  • the measured sample 100 is an object to be detected by the magnetic detector 1, in other words, a specimen.
  • a magnetic field is generated in the measured sample 100 when a current flows through a circuit.
  • the magnetic field generated in the measured sample 100 is detected by the magnetic detector 1.
  • the magnetic detector 1 is disposed between an objective lens of a microscope (not shown) and a measured sample 100.
  • the magnetic detector 1 includes a diamond substrate 10, a first substrate 13, a radiator 24, and a second substrate 15.
  • the diamond substrate 10 is a so-called diamond sensor.
  • the diamond substrate 10 has an NV center 11 formed in a diamond crystal.
  • An NV center 11 is formed in the diamond crystal.
  • the length of one side of the diamond crystal is, for example, 2 mm.
  • the thickness of the diamond crystal is, for example, 300 ⁇ m.
  • NV center 11 may be arranged singly on one face of the diamond crystal, or multiple NV centers 11 may be arranged in one direction. NV center 11 may be a crystal with multiple different orientations. NV center 11 is formed on the extreme surface of face 11b by, for example, CVD (Chemical Vapor Deposition) or ion implantation.
  • CVD Chemical Vapor Deposition
  • ion implantation ion implantation
  • the NV centre 11 is a complex defect in a diamond crystal where carbon would normally be present, replaced by nitrogen, with a vacancy at an adjacent position.
  • the NV centre 11 is missing a portion of the degenerate shared electron pair.
  • the strength of the external magnetic field can be detected by detecting the electron spin resonance caused by these using light waves and microwaves.
  • the electron spin resonance frequency in zero magnetic field is known to be approximately 2.87 GHz. When microwaves with the frequency of this resonance point (resonance frequency) are irradiated, the fluorescence with a wavelength of 638 nm is quenched.
  • At least a portion of surface 10a of diamond substrate 10 is exposed from opening 16 of second substrate 15, which will be described later.
  • surface 10a of diamond substrate 10 is entirely exposed from opening 16.
  • Microwaves and green light enter from the portion of diamond substrate 10 exposed from opening 16.
  • Red light exits from the portion of diamond substrate 10 exposed from opening 16.
  • FIG. 1 the direction of incidence of green light is indicated by arrow LG.
  • the direction of emission of red light is indicated by arrow LR.
  • the direction of incidence of microwaves is indicated by arrow LM.
  • Surface 10b of diamond substrate 10 is the magnetic detection surface.
  • a first substrate 13 is disposed on the surface 10a side of diamond substrate 10.
  • the first substrate 13 is an antenna substrate.
  • the first substrate 13 is a transparent substrate.
  • the first substrate 13 is a substrate that is transmissive to green light, red light, and microwaves.
  • the diamond substrate 10 is disposed on the surface 13b of the first substrate 13.
  • the second substrate 15 and the radiator 24 are disposed on the surface 13a of the first substrate 13.
  • the first substrate 13 has an outer shape larger than the opening 16 of the second substrate 15.
  • the diamond substrate 10 is bonded to the central portion of the first substrate 13 that is exposed from the opening 16.
  • the outer edge of the first substrate 13 is bonded to the inner edge of the surface 15b of the second substrate 15.
  • the first substrate 13 has an opening 16 and holds the diamond substrate 10 instead of the second substrate 15, which cannot directly hold the diamond substrate 10.
  • the second substrate 15 is a PCB (Printed Circuit Board).
  • the second substrate 15 has an opening 16 in the center.
  • the first substrate 13 is disposed in the center of the second substrate 15.
  • the outer edge of the first substrate 13 is joined to the inner edge of the surface 15b of the second substrate 15.
  • the top view is a view along the direction of incidence of the green light.
  • the top view is a view of the magnetic detector 1 from the side opposite the magnetic detection surface.
  • the dashed line indicates the viewing angle V of the objective lens, that is, the NA (Numerical Aperture) and the working distance. If the opening 16 of the second substrate 15 is narrower than the viewing angle V, a part of the excitation light incident from the objective lens is blocked by the second substrate 15, reducing the amount of light and the detection sensitivity. Therefore, the size of the opening 16 of the second substrate 15 is set so that the excitation light incident from the objective lens is not blocked, in other words, so that the viewing angle A is not blocked. As a result, the excitation light and microwaves are appropriately incident from the surface 10a of the diamond substrate 10 through the opening 16 of the second substrate 15, and act on the NV center 11 on the surface 10b side, which is the magnetic detection surface.
  • the second substrate 15 is provided with a high-frequency transmission line that supplies microwaves to the radiator 24.
  • the high-frequency transmission line will be described later.
  • the diamond substrate 10 when measuring the magnetic field of the sample 100 to be measured, the diamond substrate 10, the first substrate 13, and the second substrate 15 are stacked in that order, starting from the substrate closest to the sample 100 to be measured.
  • the microwave power supply system supplies microwaves in the magnetic detector 1.
  • the microwave power supply system is a radiator 24.
  • the radiator 24 is provided on the surface 13a of the first substrate 13.
  • the radiator 24 applies microwaves to the NV center 11 of the diamond substrate 10.
  • the radiator 24 transmits microwaves to be irradiated to the NV center 11 of the diamond substrate 10.
  • the radiator 24 transmits microwaves from a microwave source (not shown).
  • a high-frequency transmission line provided on the second substrate 15 is connected to the radiator 24, and microwaves are supplied from the outside.
  • the radiator 24 is, for example, a micro loop antenna.
  • the frequency of the radiator 24 is, for example, 2.8 GHz or more and 2.9 GHz or less.
  • the input power of the radiator 24 is, for example, -20 dBm or more and +20 dBm or less.
  • the radiator 24 may be arranged in a comb-like shape as shown in FIG. 3-2.
  • the comb-tooth portion forms a capacitance. By adjusting the line and space of the electrode elements and the number of pairs, the comb-tooth portion can reduce the reflection of microwaves of a specific frequency that are incident on the radiator 24.
  • the optical system detects the magnetism of the measured sample 100 in the magnetic detector 1.
  • the optical system is a light-emitting element and a light-receiving element, not shown.
  • the light-emitting element and the light-receiving element are arranged, for example, on an objective lens arranged facing the diamond substrate 10.
  • the light-emitting element and the light-receiving element are focused on the NV center 11 provided on the diamond substrate 10.
  • the light-emitting element irradiates the diamond substrate 10 with green light.
  • the light-emitting element emits excitation light that irradiates the diamond crystal.
  • the light-emitting element is, for example, a laser diode.
  • the light-emitting element emits laser light with a wavelength of, for example, 527 nm.
  • the light-emitting element emits green excitation light.
  • a green light-emitting diode LED: Light Emitting Diode
  • VCSEL Vertical Cavity Surface Emitting Laser
  • LD Green Edge-emitting laser diode
  • the light receiving element receives the red light generated by inputting green light to the diamond substrate 10.
  • the light receiving element detects the fluorescence of the diamond substrate 10.
  • the light receiving element is a photodiode.
  • the light receiving element receives the fluorescence emitted from the diamond crystal by the excitation light.
  • a Si-PIN photodiode PD: Photo Diode
  • an InGaAs-PIN photodiode can be used as the light receiving element.
  • FIG. 2 is a schematic diagram illustrating an example of a substrate on which a magnetic detector is disposed.
  • Fig. 3-1 is a schematic diagram illustrating an example of a radiator.
  • Fig. 3-2 is a partially enlarged view of the radiator.
  • the magnetic detector 1 configured in this manner is disposed on a substrate 50.
  • the substrate 50 is a PCB.
  • the second substrate 15 of the magnetic detector 1 and the substrate 50 may be a single substrate or may be separate substrates.
  • a microwave power supply system including a high-frequency connector 51, a high-frequency transmission line 52, a high-frequency transmission line 53, a high-frequency transmission line 54, and a high-frequency transmission line 55 are arranged on the substrate 50.
  • the width of the end 54a of the high-frequency transmission line 54 gradually tapers toward the connection with the second substrate 15.
  • a method of detecting the magnetic field of the sample 100 to be measured in the magnetic detector 1 will be described below.
  • the sample 100 to be measured is placed close to or in close contact with the surface 10b of the diamond substrate 10 of the magnetic detector 1, which is the magnetic field acting surface.
  • the microwaves generated by the microwave source propagate to the radiator 24 through the high-frequency connector 51, high-frequency transmission line 52, high-frequency transmission line 53, high-frequency transmission line 54, and high-frequency transmission line 55.
  • the microwaves are then radiated from the radiator 24.
  • the microwaves radiated from the radiator 24 act on the NV center 11 of the diamond substrate 10, causing electron spin resonance.
  • the spatial change in the direction or magnitude of the magnetic field generated in the measured sample 100 acts on the NV center 11 of the diamond crystal of the diamond substrate 10 of the magnetic detector 1.
  • the green excitation light from the light-emitting element is incident on the diamond crystal.
  • the green excitation light that is incident on the diamond crystal then diffuses widely within the diamond crystal, irradiating and exciting the NV center 11.
  • the excited NV center 11 generates red fluorescence, which enters the diamond crystal.
  • the red fluorescence then diffuses widely within the diamond crystal and enters the light receiving surface of the light receiving element.
  • the light receiving element receives the electron spin resonance signal of the NV center 11 excited by the excitation light from the diamond crystal as fluorescence.
  • Fig. 4 is a diagram showing the S11 reflection characteristic of the loop antenna.
  • the diamond substrate 10 is exposed from the opening 16 of the second substrate 15.
  • the radiator 24 is provided on the surface of the first substrate 13 or on the surface of the diamond substrate 10 facing the opposite side to the magnetic detection surface.
  • an optical system or a microwave power supply system is not arranged on the surface 10b side, which is the magnetic detection surface of the diamond substrate 10.
  • power can be supplied to the radiator 24 from the surface 10a opposite to the surface 10b, which is the magnetic detection surface, via the second substrate 15.
  • the measured sample 100 of various shapes can be brought close to the surface 10b, which is the magnetic detection surface. In this way, according to this embodiment, a magnetic field can be detected with high sensitivity.
  • the magnetic detector 1 when the magnetic detector 1 is applied to a microscope, the field of view of the objective lens is sufficiently secured, making it easier to optically bring the NV center 11 into the field of view.
  • This embodiment can be used for observing the magnetic field of a flat microcircuit, etc.
  • the diamond substrate 10, the first substrate 13, and the second substrate 15 are stacked in that order, starting from the substrate closest to the measured sample 100.
  • the measured samples 100 of various shapes can be brought close to the surface 10b, which is the magnetic detection surface.
  • the diamond substrate 10 can be placed without any restrictions on thickness.
  • the radiator 24 is disposed on the first substrate 13.
  • the antenna forming surface can be disposed along the surface of the second substrate 15. According to this embodiment, there is no need to provide a through hole or the like in the second substrate 15, and therefore the configuration can be easily performed.
  • the surface on which the antenna is formed is the magnetic detection surface.
  • the wiring that supplies power to the antenna from the outside of the diamond forms a convex portion on the magnetic detection surface side. This can make it difficult to bring the sample to be measured close to the magnetic detection surface. If the sample to be measured cannot be brought close enough to the magnetic detection surface, the detection sensitivity of the magnetic field decreases.
  • [Second embodiment] 5 is a schematic diagram for explaining an example of a magnetic detector according to the second embodiment.
  • a diamond substrate 10, a first substrate 13, and a second substrate 15 are different from those in the first embodiment.
  • the diamond substrate 10 and the second substrate 15 are disposed on the surface 13b of the first substrate 13.
  • the diamond substrate 10 is disposed inside the opening 16 of the second substrate 15.
  • the diamond substrate 10 may protrude beyond the surface 13b of the first substrate 13.
  • the emitter 24 is disposed between the diamond substrate 10 and the first substrate 13. More specifically, the emitter 24 is provided on the surface 13b of the first substrate 13 or the surface 10a of the diamond substrate 10.
  • the diamond substrate 10 and the second substrate 15 are disposed on the surface 13b of the first substrate 13.
  • the diamond substrate 10 is disposed inside the opening 16 of the second substrate 15.
  • the thickness of the magnetic detector 1 can be made thinner than in the first embodiment.
  • the objective lens can be brought closer to the NV center 11 of the diamond substrate 10.
  • the radiator 24 is disposed between the diamond substrate 10 and the first substrate 13.
  • power can be supplied to the radiator 24 from the surface 10a opposite the surface 10b, which is the magnetic detection surface.
  • the measured sample 100 when the diamond substrate 10 protrudes beyond the surface 13b of the first substrate 13, the measured sample 100 can be brought close to or in close contact with the surface 10b, which is the magnetic field acting surface of the diamond substrate 10 of the magnetic detector 1.
  • This embodiment allows the measured samples 100 of various shapes to be brought close to the surface 10b, which is the magnetic detection surface. In this way, this embodiment allows magnetic fields to be detected with high sensitivity.
  • FIG. 6 is a schematic diagram illustrating an example of a magnetic detector according to a third embodiment.
  • the magnetic detector 1 is different from the first embodiment in that it includes a magnet 30.
  • the magnet 30 applies a static magnetic field to the NV center 11 of the diamond substrate 10.
  • the magnet 30 is disposed on the first substrate 13 or the second substrate 15.
  • the magnet 30 is adjusted so that the direction AM of the magnetic field is perpendicular to the direction AD of the NV center 11.
  • the magnet 30 can be fixed onto the surface 13b of the first substrate 13. According to this embodiment, double resonance can be stably and accurately generated by the magnet 30. This embodiment can measure the magnetic field more accurately.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'invention concerne un détecteur magnétique (1) qui comprend : un substrat de diamant (10) ayant un centre NV (11) ; un premier substrat transparent (13) sur lequel le substrat de diamant est disposé ; un corps rayonnant (24) disposé sur une surface du premier substrat (13) ou sur la surface du substrat de diamant (10) qui est opposée à la surface sur laquelle le centre NV (11) est disposé ; et un second substrat (15) qui présente une ouverture (16) et sur lequel le premier substrat (13) est disposé. Le substrat de diamant (10) est au moins partiellement apparent à travers l'ouverture (16).
PCT/JP2024/008898 2023-03-29 2024-03-07 Détecteur magnétique Ceased WO2024203140A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025510185A JP7823855B2 (ja) 2023-03-29 2024-03-07 磁気検出器

Applications Claiming Priority (2)

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JP2023-054219 2023-03-29
JP2023054219 2023-03-29

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WO2024203140A1 true WO2024203140A1 (fr) 2024-10-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025187461A1 (fr) * 2024-03-07 2025-09-12 京セラ株式会社 Détecteur et microscope

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160282427A1 (en) * 2014-02-19 2016-09-29 Infinitum Solutions, Inc. Integrated optical nanoscale probe measurement of electric fields from electric charges in electronic devices
JP2021103093A (ja) * 2019-12-24 2021-07-15 スミダコーポレーション株式会社 測定装置および測定方法
WO2021200144A1 (fr) * 2020-03-31 2021-10-07 国立大学法人東京工業大学 Dispositif de mesure d'état physique
JP2022098572A (ja) * 2020-12-22 2022-07-04 矢崎総業株式会社 センサ
WO2022249995A1 (fr) * 2021-05-25 2022-12-01 京セラ株式会社 Substrat de détection, détecteur et dispositif de détection

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160282427A1 (en) * 2014-02-19 2016-09-29 Infinitum Solutions, Inc. Integrated optical nanoscale probe measurement of electric fields from electric charges in electronic devices
JP2021103093A (ja) * 2019-12-24 2021-07-15 スミダコーポレーション株式会社 測定装置および測定方法
WO2021200144A1 (fr) * 2020-03-31 2021-10-07 国立大学法人東京工業大学 Dispositif de mesure d'état physique
JP2022098572A (ja) * 2020-12-22 2022-07-04 矢崎総業株式会社 センサ
WO2022249995A1 (fr) * 2021-05-25 2022-12-01 京セラ株式会社 Substrat de détection, détecteur et dispositif de détection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025187461A1 (fr) * 2024-03-07 2025-09-12 京セラ株式会社 Détecteur et microscope

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JPWO2024203140A1 (fr) 2024-10-03
JP7823855B2 (ja) 2026-03-04

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