WO2024253334A1 - Sensing element for contact combustion-type gas sensor, and contact combustion-type gas sensor comprising same - Google Patents

Sensing element for contact combustion-type gas sensor, and contact combustion-type gas sensor comprising same Download PDF

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Publication number
WO2024253334A1
WO2024253334A1 PCT/KR2024/005846 KR2024005846W WO2024253334A1 WO 2024253334 A1 WO2024253334 A1 WO 2024253334A1 KR 2024005846 W KR2024005846 W KR 2024005846W WO 2024253334 A1 WO2024253334 A1 WO 2024253334A1
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insulating film
heat
gas sensor
type gas
contact combustion
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French (fr)
Korean (ko)
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강문식
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Inner Sensor Co Ltd
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Inner Sensor Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/30—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

Definitions

  • Embodiments of the present invention relate to a sensing element for a contact combustion type gas sensor and a contact combustion type gas sensor including the same. More specifically, embodiments of the present invention relate to a sensing element for a contact combustion type gas sensor which detects a detection gas by measuring a temperature change according to an exothermic reaction of a detection gas through a catalyst and heating, and a contact combustion type gas sensor including the sensing element.
  • a catalytic combustion gas sensor includes an insulating film on a substrate divided into a detection area and a reference area, a catalyst layer formed on the insulating film and functioning as a catalyst for a reaction of a detection gas, and a heater embedded in the insulating film and activating the catalyst layer by heating it.
  • each of the detection area and the reference area can be implemented in the form of a MEMS chip.
  • a catalyst layer can be separately formed on the upper part of the MEMS chip within the detection area.
  • the above heater has a function as a temperature sensor as well as a heating function.
  • the heater includes a first heater provided in the detection area and a second heater provided in the reference area.
  • the catalyst layer is formed on the upper surface of the insulating film at a position corresponding to the first heater.
  • the catalyst layer includes a catalyst material that reacts with a gas to be detected on the upper side of the temperature sensor on one side, such as alumina and a nano platinum material distributed inside the alumina.
  • the first heater When voltage is applied to each of the first and second heaters, the first heater generates heat, thereby activating the catalyst layer located within the detection area. At this time, the catalyst material forming the catalyst layer can function as a catalyst for the exothermic reaction of the detection gas. As a result, the temperature of the first heater can additionally increase according to the exothermic reaction.
  • the metal material forming the heater increases in resistance as the temperature increases. This causes a difference in the resistance change between the first and second heaters.
  • a Wheatstone bridge circuit is formed by interconnecting the first and second heaters and a pair of fixed resistance elements, and an output voltage value within the circuit is detected so that the concentration of the detection gas can be measured.
  • the catalyst layer is unevenly applied on the insulating film and the unevenness of the catalyst layer worsens, performance differences may occur between different sensors.
  • the catalyst layer is additionally formed only within the sensing area of the insulating film, a breakage phenomenon due to stress imbalance occurring on the upper part of the MEMS chip may occur.
  • Embodiments of the present invention provide a sensing element for a contact combustion type gas sensor capable of implementing uniform performance and excellent durability.
  • Embodiments of the present invention provide a contact combustion type gas sensor capable of implementing uniform performance and excellent durability.
  • a sensing element for a contact combustion type gas sensor comprises: a substrate; an insulating film formed on the substrate and electrically insulating the substrate; and a heating catalyst pattern portion disposed on the insulating film, the heating element generating heat by power supplied from the outside for an exothermic reaction in which a contacting sensing gas selectively reacts with oxygen gas to generate heat, and which functions as a catalyst for the exothermic reaction.
  • the heat-generating catalyst pattern portion may include a platinum-based metal including palladium or platinum, or an alloy of the platinum-based metal and copper and tin.
  • the substrate is divided into a reference region and a detection region, and the heat-generating catalyst pattern portion can be formed on the detection region.
  • the heat generating catalyst pattern portion can extend radially based on the center of the detection area.
  • a transparent insulating film covering the heat-generating catalyst pattern portion and selectively transmitting the detection gas may be additionally provided.
  • the above-mentioned transparent insulating film has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).
  • the above-mentioned transparent insulating film can partially cover the above-mentioned heat-generating catalyst pattern portion.
  • the heat generating catalyst pattern portion may include a pair of first electrode pads connected to both ends.
  • a contact combustion type gas sensor includes a substrate having a detection area and a reference area, an insulating film formed on the substrate and electrically isolating the substrate, a heating catalyst pattern portion disposed on the insulating film in the detection area and functioning as a heating element that generates heat by power supplied from an external source for an exothermic reaction in which a contacting detection gas selectively reacts with oxygen gas to generate heat, and a catalyst for the exothermic reaction, a heating temperature sensing portion disposed on the insulating film in the reference area and as a heating element that primarily generates heat by power supplied from an external source and detects a temperature change from a resistance change due to the heat generation, and a blocking insulating film formed on the insulating film to cover the heating temperature sensing portion and block the heating temperature sensing portion from the detection gas.
  • an exposure hole may be formed in the blocking insulating film to expose the upper surface of the heat-generating catalyst pattern portion.
  • a transparent insulating film that selectively transmits the detection gas may be additionally formed on the insulating film to cover the heat-generating catalyst pattern portion.
  • the above-mentioned transparent insulating film has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBT.
  • the above-mentioned transparent insulating film can partially cover the above-mentioned heat-generating catalyst pattern portion.
  • the sensing element for a contact combustion type gas sensor includes a heating catalyst pattern portion capable of simultaneously implementing a heating function and a catalytic function for an exothermic reaction of a sensing gas, so that a separate catalyst layer can be omitted. Accordingly, the phenomenon of the unevenness of the catalyst layer being worsened due to the catalyst layers formed on different elements not being uniformly applied can be suppressed. Furthermore, the phenomenon of damage due to stress imbalance occurring between the sensing area and the reference area can be suppressed due to the catalyst layer being formed only in the sensing area.
  • the sensing element since the sensing element has a MEMS chip structure, it can be mass-produced through a semiconductor manufacturing process.
  • FIG. 1 is a cross-sectional view illustrating a sensing element for a contact combustion type gas sensor according to one embodiment of the present invention.
  • Fig. 2 is a plan view for explaining an example of the heat-generating catalyst pattern portion of Fig. 1.
  • FIG. 3 is a plan view illustrating an example of the heat-generating catalyst pattern portion and the transparent insulating film of FIG. 1.
  • FIG. 4 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.
  • FIG. 5 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.
  • first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
  • the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
  • FIG. 1 is a cross-sectional view illustrating a sensing element for a contact combustion type gas sensor according to one embodiment of the present invention.
  • a sensing element (100) for a contact combustion type gas sensor includes a substrate (110), an insulating film (120), and a heat-generating catalyst pattern portion (130).
  • the substrate (110) may include a semiconductor substrate, such as a silicon substrate, a zirconium substrate, etc.
  • the substrate (110) includes a detection area (101, see FIG. 4) and a reference area (106, see FIG. 4).
  • the detection area (101) and the reference area (106) are defined to be spaced apart from each other along the horizontal direction.
  • a heat generating catalyst pattern part (130) is formed in the above detection area (101).
  • a heat generating temperature sensing part is formed in the above reference area (106), and the heat generating catalyst pattern part is omitted.
  • the substrate (110) may have a thickness of, for example, 200 to 400 ⁇ m.
  • An opening (103) is formed in the substrate (110) by removing the bottom portion to partially expose the lower surface of the insulating film (120).
  • the substrate (110) may have a membrane structure.
  • the above insulating film (120) is formed on the substrate (110). That is, the insulating film (120) is formed on the upper surface of the substrate (110).
  • the insulating film (120) electrically insulates the substrate (110).
  • the insulating film (120) can electrically insulate the substrate (110) from the heat-generating catalyst pattern portion (130) formed thereon.
  • the above insulating film (120) may have an ONO laminated structure composed of an oxide film/nitride film/oxide film.
  • the heat generating catalyst pattern part (130) is placed on the insulating film (120).
  • the heat generating catalyst pattern part (130) is formed within the detection area (103). Conversely, the heat generating catalyst pattern part (130) is omitted in the reference area.
  • the above-mentioned heat-generating catalyst pattern part (130) functions as a heating element that primarily generates heat by power supplied from the outside.
  • the above-mentioned heat-generating catalyst pattern part (130) can function as a catalyst in an exothermic reaction in which a detection gas among exposed gases selectively reacts and secondarily generates heat.
  • the above-mentioned heat-generating catalyst pattern part (130) may include a platinum-based metal including palladium or platinum, or an alloy of the platinum-based metal mixed with copper and tin. Accordingly, the above-mentioned heat-generating catalyst pattern part (130) may function not only as an excellent heat-generating body but also as an excellent catalyst in the above-mentioned heat-generating reaction.
  • the exothermic catalyst pattern part (130) may have an increased temperature. At this time, the exothermic catalyst pattern part (130) may have an increased resistance value since it is made of a metal material. Therefore, by detecting a change in resistance of the exothermic catalyst pattern part (130), the detection element can measure the presence or absence of the detection gas or its concentration.
  • a detection sensor includes a heat-generating catalyst pattern portion, and the heat-generating catalyst electrode can primarily function as a heating element, a catalyst, and a resistance change element according to a temperature change. Accordingly, a catalyst layer can be omitted independently of the heating element. Accordingly, performance deviations between different detection elements due to non-uniformity of the catalyst layer can be suppressed. In particular, since the catalyst layer is additionally formed only within a detection area of an insulating film, a breakage phenomenon due to stress imbalance occurring on the upper part of a MEMS chip can be suppressed.
  • Fig. 2 is a plan view for explaining an example of the heat-generating catalyst pattern portion of Fig. 1.
  • the heat-generating catalyst pattern portion (130) can be connected continuously and extend radially based on the center of the detection area. Accordingly, the heat-generating catalyst pattern portion (130) can evenly heat the entire detection area while increasing the area exposed to the detection gas. Accordingly, the detection element (100) including the heat-generating catalyst pattern portion (130) can secure excellent sensitivity.
  • FIG. 3 is a plan view illustrating an example of the heat-generating catalyst pattern portion and the transparent insulating film of FIG. 1.
  • the sensing element (100) may further include a transparent insulating film (150).
  • the above-mentioned transparent insulating film (150) is provided to cover the above-mentioned heat-generating catalyst pattern portion (130).
  • the above-mentioned transparent insulating film (150) can cover the entire heat-generating catalyst pattern portion (130).
  • the above-mentioned transparent insulating film (150) can have a structure that selectively transmits the detection gas.
  • the above-mentioned transparent insulating film (150) can protect the heat-generating catalyst pattern portion (130) from external impact or foreign substances, while selectively transmitting the detection gas.
  • the above-mentioned transparent insulating film (150) has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).
  • the detection gas can easily permeate through the above-mentioned permeable insulating film (150).
  • the above-mentioned transparent insulating film (150) may partially cover the above-mentioned heat-generating catalyst pattern portion (130) while partially exposing the above-mentioned heat-generating catalyst pattern portion (130).
  • the heat-generating catalyst pattern portion (130) may include electrode patterns (133) and a pair of first electrode pads (131) connected to both ends of each of the electrode pattern portions (133).
  • the electrode pattern portions (133) can generate heat.
  • the heat-generating catalyst pattern portion (130) including the electrode pattern portion (133) can be activated as a catalyst.
  • FIG. 4 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.
  • a contact combustion type gas sensor (20) includes a substrate (110), an insulating film (120), a heat-generating catalyst pattern portion (130), a heat-generating temperature sensing portion (140), and a blocking insulating film (160). Since the substrate and the insulating film have been described above with reference to FIG. 1, their descriptions will be omitted.
  • the heat-generating catalyst pattern part (130) is arranged on the insulating film (120) within the detection area (101).
  • the heat-generating catalyst pattern part (130) functions as a heating element that primarily generates heat by power supplied from the outside and as a catalyst in an exothermic reaction in which a detection gas among exposed gases selectively reacts and secondarily generates heat.
  • the fever temperature sensing unit (140) is placed on the insulating film (120) within the reference area (106).
  • the above-mentioned heating temperature sensing unit (140) functions as a heating element that primarily generates heat by power supplied from the outside. In addition, the above-mentioned heating temperature sensing unit (140) detects the temperature of the above-mentioned reference area (106).
  • the above-mentioned heating temperature sensing unit (140) may have the same material or shape as the heating catalyst pattern unit (130). At this time, the heating temperature sensing unit (140) is covered with a blocking insulating film (150), unlike the heating catalyst pattern unit (130). Therefore, the blocking insulating film (150) can block the heating temperature sensing unit (140) from an external detection gas.
  • the above-mentioned blocking insulating film (160) is formed to cover the heating temperature sensing unit (140) within the above-mentioned reference area (106). Therefore, even though the heating temperature sensing unit (140) and the heating catalyst pattern unit (130) are made of the same material, the heating temperature sensing unit (140) cannot function as a catalyst because it is not exposed to the detection gas.
  • the blocking insulating film (160) may have an exposure hole (165) formed so as to partially expose the heat-generating catalyst pattern portion (130) within the detection area (101).
  • the heat-generating catalyst pattern portion (130) may include an exposed portion and a cover portion covered by the blocking insulating film (160). The exposed portion may have a larger line width than the cover portion. As a result, the heat-generating catalyst pattern portion (130) may secure relatively excellent durability.
  • a Wheatstone bridge circuit may be configured by interconnecting the above-described heat-generating catalyst pattern portion (130), the heat-generating temperature sensing portion (140), and a pair of fixed resistance elements (not shown). The output voltage value within the circuit may be detected to measure the concentration of the detection gas.
  • drift noise that changes depending on the surrounding temperature of the heat-generating catalyst pattern portion and the heat-generating temperature sensor portion or electrical noise generated in the circuit can be reduced. This is because the temperature deviation value between the heat-generating catalyst pattern portion and the heat-generating temperature sensing portion can be easily output.
  • FIG. 5 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.
  • a contact combustion type gas sensor (20) includes a substrate (110), an insulating film (120), a heat-generating catalyst pattern portion (130), a heat-generating temperature sensing portion (140), a transmission insulating film (150), and a blocking insulating film (160).
  • the substrate (110), the insulating film (120), the heat-generating catalyst pattern portion (130), and the heat-generating temperature sensing portion (140) have been described above with reference to FIGS. 1 and 4, and therefore will be omitted.
  • a transparent insulating film (150) is formed to cover the heat-generating catalyst pattern portion within the detection area.
  • the transparent insulating film (150) may have a structure that selectively transmits the detection gas.
  • the above-mentioned transparent insulating film (150) has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).
  • the detection gas can easily permeate through the above-mentioned permeable insulating film (150).
  • the above-mentioned transparent insulating film (150) may partially cover the above-mentioned heat-generating catalyst pattern portion (130) while partially exposing the above-mentioned heat-generating catalyst pattern portion (130).
  • the above-mentioned blocking insulating film (160) is formed to cover the heating temperature sensing unit (140) within the above-mentioned reference area (106). Therefore, even though the heating temperature sensing unit (140) and the heating catalyst pattern unit (130) are made of the same material, the heating temperature sensing unit (140) cannot function as a catalyst because it is not exposed to the detection gas.
  • Embodiments of the present invention can determine a sensing element for a contact combustion type gas sensor that detects a sensing gas by measuring a temperature change according to an exothermic reaction of a sensing gas through a catalyst and heating, and a contact combustion type gas sensor including the sensing element.

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Abstract

This sensing element for a contact combustion-type gas sensor comprises: a substrate; an insulating film formed on the substrate and electrically insulating the substrate; and a heat-generating catalyst pattern unit disposed on the insulating film and functioning as a heat-generating element for generating heat by means of power supplied from the outside, with respect to an exothermic reaction in which sensed gas in contact selectively reacts with oxygen gas to generate heat, the heat-generating catalyst pattern unit simultaneously functioning as a catalyst in the exothermic reaction. Accordingly, a separate catalyst layer may be omitted.

Description

접촉 연소식 가스 센서용 감지 소자 및 이를 포함하는 접촉 연소식 가스 센서Sensing element for contact combustion gas sensor and contact combustion gas sensor including same

본 발명의 실시예들은 접촉 연소식 가스 센서용 감지 소자 및 이를 포함하는 접촉 연소식 가스 센서에 관한 것이다. 보다 상세하게는, 본 발명의 실시예들은, 촉매 및 가열을 통하여 검출 가스의 발열 반응에 따른 온도 변화를 측정함으로써 감지 가스를 감지하는 접촉 연소식 가스 센서용 감지 소자 및 상기 감지 소자를 포함하는 접촉 연소식 가스 센서에 관한 것이다. Embodiments of the present invention relate to a sensing element for a contact combustion type gas sensor and a contact combustion type gas sensor including the same. More specifically, embodiments of the present invention relate to a sensing element for a contact combustion type gas sensor which detects a detection gas by measuring a temperature change according to an exothermic reaction of a detection gas through a catalyst and heating, and a contact combustion type gas sensor including the sensing element.

촉매 연소식 가스 센서는 감지 영역과 참고 영역으로 구획된 기판 상에 절연막, 상기 절연막 상에 형성되고 검출 가스의 반응에 대하여 촉매로서 기능하는 촉매층, 상기 절연막 내부에 매립되고 상기 촉매층을 가열하여 활성화시키는 히터를 포함한다. 예를 들면, 상기 감지 영역 및 참고 영역 각각에 MEMS 칩의 형태로 구현될 수 있다. 이때, 상기 감지 영역 내에서 MEMS 칩의 상부에 촉매층이 별도로 형성될 수 있다.A catalytic combustion gas sensor includes an insulating film on a substrate divided into a detection area and a reference area, a catalyst layer formed on the insulating film and functioning as a catalyst for a reaction of a detection gas, and a heater embedded in the insulating film and activating the catalyst layer by heating it. For example, each of the detection area and the reference area can be implemented in the form of a MEMS chip. At this time, a catalyst layer can be separately formed on the upper part of the MEMS chip within the detection area.

상기 히터는, 발열 기능 뿐만 아니라 온도 센서로서의 기능을 가진다. 상기 히터는, 상기 감지 영역에 구비된 제1 히터 및 참고 영역에 구비된 제2 히터를 포함한다.The above heater has a function as a temperature sensor as well as a heating function. The heater includes a first heater provided in the detection area and a second heater provided in the reference area.

한편, 촉매층은, 상기 제1 히터에 대응되는 위치이며 상기 절연막의 상부 표면 상에 형성된다. 상기 촉매층은, 한쪽편 온도센서 상부에 검출하고자 하는 가스와 반응하는 촉매 물질, 예를 들면, 알루미나 및 상기 알루미나 내부에 분포되는 나노 백금 물질을 포함한다.Meanwhile, the catalyst layer is formed on the upper surface of the insulating film at a position corresponding to the first heater. The catalyst layer includes a catalyst material that reacts with a gas to be detected on the upper side of the temperature sensor on one side, such as alumina and a nano platinum material distributed inside the alumina.

상기 제1 및 제2 히터에 각각 전압이 인가될 경우 상기 제1 히터가 발열함으로써, 상기 감지 영역 내에 위치하는 촉매층이 활성화 될 수 있다. 이때, 촉매층을 이루는 촉매 물질은 감지 가스의 발열 반응에 대하여 촉매로서 기능할 수 있다. 이로써, 상기 발열 반응에 따라 제1 히터의 온도가 추가적으로 상승할 수 있다. When voltage is applied to each of the first and second heaters, the first heater generates heat, thereby activating the catalyst layer located within the detection area. At this time, the catalyst material forming the catalyst layer can function as a catalyst for the exothermic reaction of the detection gas. As a result, the temperature of the first heater can additionally increase according to the exothermic reaction.

한편, 촉매층이 형성되지는 않은 참고 영역에서는 발열 반응이 발생하지 않는다. 따라서, 상기 감지 영역 및 참고 영역에 각각 형성된 상기 제1 및 제2 히터들 간의 온도 차이가 발생하게 된다.Meanwhile, no exothermic reaction occurs in the reference area where the catalyst layer is not formed. Accordingly, a temperature difference occurs between the first and second heaters formed in the detection area and the reference area, respectively.

또한, 상기 히터를 이루는 금속 물질은 온도가 증가함에 따라 저항이 증가한다. 이로써, 상기 제1 및 제2 히터들 간의 저항 변화에 대한 차이가 발생하게 된다. 상기 제1 및 제2 히터들 및 한 쌍의 고정 저항 소자들을 상호 연결한 휘스톤 브릿지 회로가 구성되고, 상기 회로 내의 출력 전압값이 검출되어 상기 감지 가스의 농도가 측정될 수 있다.In addition, the metal material forming the heater increases in resistance as the temperature increases. This causes a difference in the resistance change between the first and second heaters. A Wheatstone bridge circuit is formed by interconnecting the first and second heaters and a pair of fixed resistance elements, and an output voltage value within the circuit is detected so that the concentration of the detection gas can be measured.

하지만, 상기 감지 영역에 촉매층을 별도로 형성하기 위하여, 촉매 물질을 합성하고, 상기 촉매 물질을 감지 영역에 도포하고 경화시키는 공정이 추가로 요구된다.However, in order to separately form a catalyst layer in the sensing area, an additional process of synthesizing a catalyst material, applying the catalyst material to the sensing area, and curing the catalyst material is required.

나아가, 상기 촉매층이 절연막 상에 불균일하게 도포되어 상기 촉매층의 불균일도가 악화될 경우, 서로 다른 센서들 간에 성능 편차가 발생할 수 있다. 특히, 촉매층이 절연막 중 감지 영역 내에만 추가적으로 형성됨에 따라 MEMS 칩 상부에 발생하는 스트레스 불균형에 의한 파손 현상이 발생할 수 있다.Furthermore, if the catalyst layer is unevenly applied on the insulating film and the unevenness of the catalyst layer worsens, performance differences may occur between different sensors. In particular, since the catalyst layer is additionally formed only within the sensing area of the insulating film, a breakage phenomenon due to stress imbalance occurring on the upper part of the MEMS chip may occur.

본 발명의 실시예들은, 균일한 성능 및 우수한 내구성을 구현할 수 있는 접촉 연소식 가스 센서용 감지 소자를 제공한다.Embodiments of the present invention provide a sensing element for a contact combustion type gas sensor capable of implementing uniform performance and excellent durability.

본 발명의 실시예들은, 균일한 성능 및 우수한 내구성을 구현할 수 있는 접촉 연소식 가스 센서를 제공한다.Embodiments of the present invention provide a contact combustion type gas sensor capable of implementing uniform performance and excellent durability.

본 발명의 실시예들에 따른 접촉 연소식 가스 센서용 감지 소자는, 기판, 상기 기판 상에 형성되고, 상기 기판을 전기적으로 절연시키는 절연막 및 상기 절연막 상에 배치되며, 접촉하는 감지 가스가 산소 가스와 선택적으로 반응하여 발열하는 발열 반응에 대하여, 외부로부터 공급되는 전원에 의하여 발열하는 발열체로서 및 상기 발열 반응에 대한 촉매로서 기능하는 발열 촉매 패턴부를 포함한다.A sensing element for a contact combustion type gas sensor according to embodiments of the present invention comprises: a substrate; an insulating film formed on the substrate and electrically insulating the substrate; and a heating catalyst pattern portion disposed on the insulating film, the heating element generating heat by power supplied from the outside for an exothermic reaction in which a contacting sensing gas selectively reacts with oxygen gas to generate heat, and which functions as a catalyst for the exothermic reaction.

본 발명의 일 실시예에 있어서, 상기 발열 촉매 패턴부는 팔라듐 또는 백금을 포함하는 백금계 금속 또는 상기 백금계 금속에 구리, 주석을 혼합한 합금을 포함할 수 있다.In one embodiment of the present invention, the heat-generating catalyst pattern portion may include a platinum-based metal including palladium or platinum, or an alloy of the platinum-based metal and copper and tin.

본 발명의 일 실시예에 있어서, 상기 기판은 참고 영역 및 감지 영역으로 구분되고, 상기 발열 촉매 패턴부는 상기 감지 영역 상에 형성될 수 있다.In one embodiment of the present invention, the substrate is divided into a reference region and a detection region, and the heat-generating catalyst pattern portion can be formed on the detection region.

여기서, 상기 발열 촉매 패턴부는 상기 감지 영역의 중심을 기준으로 방사형으로 연장될 수 있다.Here, the heat generating catalyst pattern portion can extend radially based on the center of the detection area.

본 발명의 일 실시예에 있어서, 상기 발열 촉매 패턴부를 덮고, 상기 감지 가스를 선택적으로 투과하는 투과 절연막이 추가적으로 구비될 수 있다.In one embodiment of the present invention, a transparent insulating film covering the heat-generating catalyst pattern portion and selectively transmitting the detection gas may be additionally provided.

여기서, 상기 투과 절연막은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBI(polybenzimidazole) 중 적어도 하나의 물질을 포함할 수 있다.Here, the above-mentioned transparent insulating film has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).

또한, 상기 투과 절연막은, 상기 발열 촉매 패턴부를 부분적으로 덮을 수 있다.Additionally, the above-mentioned transparent insulating film can partially cover the above-mentioned heat-generating catalyst pattern portion.

본 발명의 일 실시예에 있어서, 상기 발열 촉매 패턴부의 양 단부들에 연결된 한 쌍의 제1 전극 패드들을 포함할 수 있다.In one embodiment of the present invention, the heat generating catalyst pattern portion may include a pair of first electrode pads connected to both ends.

본 발명의 실시예들에 따른 접촉 연소식 가스 센서는, 감지 영역 및 참고 영역을 갖는 기판, 상기 기판 상에 형성되고, 상기 기판을 전기적으로 격리시키는 절연막, 상기 감지 영역 내 상기 절연막 상에 배치되며, 접촉하는 감지 가스가 산소 가스와 선택적으로 반응하여 발열하는 발열 반응에 대하여, 외부로부터 공급되는 전원에 의하여 발열하는 발열체로서 및 상기 발열 반응에 대한 촉매로서 복수로 기능하는 발열 촉매 패턴부, 상기 참고 영역 내 상기 절연막 상에 배치되며, 외부로부터 공급되는 전원에 의하여 일차적으로 발열하는 발열체로서 및 상기 발열에 따른 저항 변화로부터 온도 변화를 감지하는 발열 온도 센싱부 및 상기 발열 온도 센싱부를 덮도록 상기 절연막 상에 형성되고, 상기 감지 가스로부터 상기 발열 온도 센싱부를 차단시키는 차단 절연막을 포함한다.According to embodiments of the present invention, a contact combustion type gas sensor includes a substrate having a detection area and a reference area, an insulating film formed on the substrate and electrically isolating the substrate, a heating catalyst pattern portion disposed on the insulating film in the detection area and functioning as a heating element that generates heat by power supplied from an external source for an exothermic reaction in which a contacting detection gas selectively reacts with oxygen gas to generate heat, and a catalyst for the exothermic reaction, a heating temperature sensing portion disposed on the insulating film in the reference area and as a heating element that primarily generates heat by power supplied from an external source and detects a temperature change from a resistance change due to the heat generation, and a blocking insulating film formed on the insulating film to cover the heating temperature sensing portion and block the heating temperature sensing portion from the detection gas.

본 발명의 일 실시예에 있어서, 상기 차단 절연막에는 상기 발열 촉매 패턴부의 상면을 노출시키도록 노출홀이 형성될 수 있다.In one embodiment of the present invention, an exposure hole may be formed in the blocking insulating film to expose the upper surface of the heat-generating catalyst pattern portion.

본 발명의 일 실시예에 있어서, 상기 발열 촉매 패턴부를 덮도록 상기 절연막 상에 형성되고, 상기 감지 가스를 선택적으로 투과하는 투과 절연막이 추가적으로 형성될 수 있다.In one embodiment of the present invention, a transparent insulating film that selectively transmits the detection gas may be additionally formed on the insulating film to cover the heat-generating catalyst pattern portion.

여기서, 상기 투과 절연막은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBT 중 적어도 하나의 물질을 포함할 수 있다.Here, the above-mentioned transparent insulating film has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBT.

또한, 상기 투과 절연막은, 상기 발열 촉매 패턴부를 부분적으로 덮을 수 있다.Additionally, the above-mentioned transparent insulating film can partially cover the above-mentioned heat-generating catalyst pattern portion.

본 발명의 실시예들에 따른 접촉 연소식 가스 센서용 감지 소자는 발열 기능 및 감지 가스의 발열 반응에 대하여 촉매 기능을 동시에 구현할 수 있는 발열 촉매 패턴부를 포함함으로써, 별도의 촉매층이 생략될 수 있다. 이로써, 서로 다른 소자들에 각각 형성된 촉매층이 균일하게 도포되지 못하여 발생하는 촉매층의 불균일도가 악화되는 현상이 억제될 수 있다. 나아가, 감지 영역에만 형성되는 촉매층에 의해 감지 영역 및 참고 영역 사이에 생기는 스트레스 불균형에 따른 파손 현상이 억제될 수 있다. The sensing element for a contact combustion type gas sensor according to embodiments of the present invention includes a heating catalyst pattern portion capable of simultaneously implementing a heating function and a catalytic function for an exothermic reaction of a sensing gas, so that a separate catalyst layer can be omitted. Accordingly, the phenomenon of the unevenness of the catalyst layer being worsened due to the catalyst layers formed on different elements not being uniformly applied can be suppressed. Furthermore, the phenomenon of damage due to stress imbalance occurring between the sensing area and the reference area can be suppressed due to the catalyst layer being formed only in the sensing area.

나아가, 감지 소자는 멤스 칩 구조를 가짐에 따라 반도체 제조 공정을 통하여 대량으로 생산될 수 있다.Furthermore, since the sensing element has a MEMS chip structure, it can be mass-produced through a semiconductor manufacturing process.

도 1은 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서용 감지 소자를 설명하기 위한 단면도이다.FIG. 1 is a cross-sectional view illustrating a sensing element for a contact combustion type gas sensor according to one embodiment of the present invention.

도 2는 도 1의 발열 촉매 패턴부의 일 예를 설명하기 위한 평면도이다.Fig. 2 is a plan view for explaining an example of the heat-generating catalyst pattern portion of Fig. 1.

도 3은 도 1의 발열 촉매 패턴부 및 투과 절연막의 일 예를 설명하기 위한 평면도이다.FIG. 3 is a plan view illustrating an example of the heat-generating catalyst pattern portion and the transparent insulating film of FIG. 1.

도 4는 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서를 설명하기 위한 단면도이다.FIG. 4 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.

도 5는 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서를 설명하기 위한 단면도이다.FIG. 5 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.

이하, 첨부한 도면을 참조하여 본 발명의 실시예에 따른 감지 소자 및 접촉 연소식 가스 센서에 대해 상세히 설명한다. 본 발명은 다양한 변경을 가할 수 있고 여러 가지 형태를 가질 수 있는 바, 특정 실시 예들을 도면에 예시하고 본문에 상세하게 설명하고자 한다. 그러나, 이는 본 발명을 특정한 개시 형태에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다. 각 도면을 설명하면서 유사한 참조부호를 유사한 구성요소에 대해 사용하였다. 첨부된 도면에 있어서, 구조물들의 치수는 본 발명의 명확성을 기하기 위하여 실제보다 확대하여 도시한 것이다. Hereinafter, with reference to the attached drawings, a sensing element and a contact combustion type gas sensor according to embodiments of the present invention will be described in detail. The present invention may have various modifications and may have various forms, and thus specific embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to specific disclosed forms, but should be understood to include all modifications, equivalents, and substitutes included in the spirit and technical scope of the present invention. In describing each drawing, similar reference numerals are used for similar components. In the attached drawings, the dimensions of structures are illustrated larger than actual dimensions in order to ensure clarity of the present invention.

제1, 제2 등의 용어는 다양한 구성요소들을 설명하는데 사용될 수 있지만, 상기 구성요소들은 상기 용어들에 의해 한정되어서는 안 된다. 상기 용어들은 하나의 구성요소를 다른 구성요소로부터 구별하는 목적으로만 사용된다. 예를 들어, 본 발명의 권리 범위를 벗어나지 않으면서 제1 구성요소는 제2 구성요소로 명명될 수 있고, 유사하게 제2 구성요소도 제1 구성요소로 명명될 수 있다. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

본 출원에서 사용한 용어는 단지 특정한 실시 예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서 상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부분품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부분품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terminology used in this application is only used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, it should be understood that the terms "comprises" or "has" and the like are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

다르게 정의되지 않는 한, 기술적이거나 과학적인 용어를 포함해서 여기서 사용되는 모든 용어들은 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에 의해 일반적으로 이해되는 것과 동일한 의미를 가지고 있다. 일반적으로 사용되는 사전에 정의되어 있는 것과 같은 용어들은 관련 기술의 문맥 상 가지는 의미와 일치하는 의미를 가지는 것으로 해석되어야 하며, 본 출원에서 명백하게 정의하지 않는 한, 이상적이거나 과도하게 형식적인 의미로 해석되지 않는다. Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms defined in commonly used dictionaries, such as those defined in common dictionaries, should be interpreted as having a meaning consistent with the meaning they have in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless expressly defined in this application.

도 1은 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서용 감지 소자를 설명하기 위한 단면도이다. FIG. 1 is a cross-sectional view illustrating a sensing element for a contact combustion type gas sensor according to one embodiment of the present invention.

도 1을 참고하면, 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서용 감지 소자(100)는 기판(110), 절연막(120) 및 발열 촉매 패턴부(130)를 포함한다.Referring to FIG. 1, a sensing element (100) for a contact combustion type gas sensor according to one embodiment of the present invention includes a substrate (110), an insulating film (120), and a heat-generating catalyst pattern portion (130).

기판(110)은, 실리콘 기판, 지르코늄 기판 등과 같은 반도체 기판을 포함할 수 있다. 상기 기판(110)은 감지 영역(101, 도 4 참고) 및 참고 영역(106, 도 4 참고)을 포함한다. 상기 감지 영역(101) 및 참고 영역(106)은 수평 방향을 따라 상호 이격되게 정의된다. The substrate (110) may include a semiconductor substrate, such as a silicon substrate, a zirconium substrate, etc. The substrate (110) includes a detection area (101, see FIG. 4) and a reference area (106, see FIG. 4). The detection area (101) and the reference area (106) are defined to be spaced apart from each other along the horizontal direction.

상기 감지 영역(101)에는 발열 촉매 패턴부(130)가 형성된다. 반면에, 상기 참고 영역(106)에는 발열 온도 센싱부가 형성되고, 발열 촉매 패턴부는 생략된다.In the above detection area (101), a heat generating catalyst pattern part (130) is formed. On the other hand, in the above reference area (106), a heat generating temperature sensing part is formed, and the heat generating catalyst pattern part is omitted.

상기 기판(110)은 예를 들면, 200 내지 400 μm의 두께를 가질 수 있다. 상기 기판(110)에는 바닥부가 제거되어 절연막(120)의 하면을 부분적으로 노출되는 개구(103)가 형성된다. 이로써, 상기 기판(110)은 멤브레인 구조를 가질 수 있다.The substrate (110) may have a thickness of, for example, 200 to 400 μm. An opening (103) is formed in the substrate (110) by removing the bottom portion to partially expose the lower surface of the insulating film (120). As a result, the substrate (110) may have a membrane structure.

상기 절연막(120)은 상기 기판(110) 상에 형성된다. 즉, 상기 절연막(120)은 상기 기판(110)의 상면에 형성된다. 상기 절연막(120)은 상기 기판(110)을 전기적으로 격리시킨다. 예를 들면, 상기 절연막(120)은 상기 기판(110)을 그 상부에 형성되는 발열 촉매 패턴부(130)로부터 전기적으로 절연시킬 수 있다.The above insulating film (120) is formed on the substrate (110). That is, the insulating film (120) is formed on the upper surface of the substrate (110). The insulating film (120) electrically insulates the substrate (110). For example, the insulating film (120) can electrically insulate the substrate (110) from the heat-generating catalyst pattern portion (130) formed thereon.

상기 절연막(120)은 산화막(Oxide)/질화막(Nitride)/산화막(Oxide)으로 이루어진 ONO 적층 구조를 가질 수 있다.The above insulating film (120) may have an ONO laminated structure composed of an oxide film/nitride film/oxide film.

발열 촉매 패턴부(130)는 상기 절연막(120) 상에 배치된다. 상기 발열 촉매 패턴부(130)는 감지 영역(103) 내에 형성된다. 이와 반대로, 상기 발열 촉매 패턴부(130)는 참고 영역에는 생략된다. The heat generating catalyst pattern part (130) is placed on the insulating film (120). The heat generating catalyst pattern part (130) is formed within the detection area (103). Conversely, the heat generating catalyst pattern part (130) is omitted in the reference area.

상기 발열 촉매 패턴부(130)는, 외부로부터 공급되는 전원에 의하여 일차적으로 발열하는 발열체로서 기능한다. 또한, 상기 발열 촉매 패턴부(130)은, 노출된 가스들 중 감지 가스가 선택적으로 반응하여 이차적으로 발열하는 발열 반응에서의 촉매로서 기능할 수 있다.The above-mentioned heat-generating catalyst pattern part (130) functions as a heating element that primarily generates heat by power supplied from the outside. In addition, the above-mentioned heat-generating catalyst pattern part (130) can function as a catalyst in an exothermic reaction in which a detection gas among exposed gases selectively reacts and secondarily generates heat.

상기 발열 촉매 패턴부(130)는, 팔라듐 또는 백금을 포함하는 백금계 금속 또는 상기 백금계 금속에 구리, 주석을 혼합한 합금을 포함할 수 있다. 이로써, 상기 발열 촉매 패턴부(130)는, 우수한 발열체로서 뿐만 아니라 상기 발열 반응에서 우수한 촉매로서 기능할 수 있다.The above-mentioned heat-generating catalyst pattern part (130) may include a platinum-based metal including palladium or platinum, or an alloy of the platinum-based metal mixed with copper and tin. Accordingly, the above-mentioned heat-generating catalyst pattern part (130) may function not only as an excellent heat-generating body but also as an excellent catalyst in the above-mentioned heat-generating reaction.

한편, 상기 감지 가스에 관한 발열 반응이 발생할 경우, 상기 발열 촉매 패턴부(130)는 증가된 온도를 가질 수 있다. 이때, 상기 발열 촉매 패턴부(130)는 금속 재질로 이루어짐에 따라 증가된 저항값을 가질 수 있다. 따라서, 상기 발열 촉매 패턴부(130)에 대한 저항 변화를 감지함으로써, 상기 감지 소자는 상기 감지 가스의 유무 또는 그 농도를 측정할 수 있다.Meanwhile, when an exothermic reaction occurs regarding the detection gas, the exothermic catalyst pattern part (130) may have an increased temperature. At this time, the exothermic catalyst pattern part (130) may have an increased resistance value since it is made of a metal material. Therefore, by detecting a change in resistance of the exothermic catalyst pattern part (130), the detection element can measure the presence or absence of the detection gas or its concentration.

본 발명의 실시예에 따른 감지 센서는 발열 촉매 패턴부를 포함하고, 상기 발열 촉매 전극는 일차적으로 발열체로의 기능, 촉매로서의 기능 및 온도 변화에 따른 저항 변화체로서 기능할 수 있다. 이로써, 상기 발열체와는 독립적으로 촉매층이 생략될 수 있다. 따라서, 상기 촉매층의 불균일성에 따른 서로 다른 감지 소자들 간에 성능 편차가 억제될 수 있다. 특히, 촉매층이 절연막 중 감지 영역 내에만 추가적으로 형성됨에 따라 MEMS 칩 상부에 발생하는 스트레스 불균형에 의한 파손 현상이 억제될 수 있다.A detection sensor according to an embodiment of the present invention includes a heat-generating catalyst pattern portion, and the heat-generating catalyst electrode can primarily function as a heating element, a catalyst, and a resistance change element according to a temperature change. Accordingly, a catalyst layer can be omitted independently of the heating element. Accordingly, performance deviations between different detection elements due to non-uniformity of the catalyst layer can be suppressed. In particular, since the catalyst layer is additionally formed only within a detection area of an insulating film, a breakage phenomenon due to stress imbalance occurring on the upper part of a MEMS chip can be suppressed.

도 2는 도 1의 발열 촉매 패턴부의 일 예를 설명하기 위한 평면도이다.Fig. 2 is a plan view for explaining an example of the heat-generating catalyst pattern portion of Fig. 1.

도 2를 참고하면, 상기 발열 촉매 패턴부(130)는 연속적으로 연결되고 상기 감지 영역의 중심을 기준으로 방사형으로 연장될 수 있다. 이로써, 발열 촉매 패턴부(130)는 감지 영역 전체를 고르게 가열하는 한편, 상기 감지 가스에 노출되는 영역을 증가시킬 수 있다. 이로써, 상기 발열 촉매 패턴부(130)를 포함하는 감지 소자(100)는 우수한 감도를 확보할 수 있다.Referring to FIG. 2, the heat-generating catalyst pattern portion (130) can be connected continuously and extend radially based on the center of the detection area. Accordingly, the heat-generating catalyst pattern portion (130) can evenly heat the entire detection area while increasing the area exposed to the detection gas. Accordingly, the detection element (100) including the heat-generating catalyst pattern portion (130) can secure excellent sensitivity.

도 3은 도 1의 발열 촉매 패턴부 및 투과 절연막의 일 예를 설명하기 위한 평면도이다.FIG. 3 is a plan view illustrating an example of the heat-generating catalyst pattern portion and the transparent insulating film of FIG. 1.

도 1 및 도 3을 참고하면, 상기 감지 소자(100)는 투과 절연막(150)을 더 포함할 수 있다.Referring to FIGS. 1 and 3, the sensing element (100) may further include a transparent insulating film (150).

상기 투과 절연막(150)은, 상기 발열 촉매 패턴부(130)를 덮도록 구비된다. 상기 투과 절연막(150)은 발열 촉매 패턴부(130)를 전체적으로 덮을 수 있다. 이때, 상기 투과 절연막(150)은 상기 감지 가스를 선택적으로 투과시키는 구조를 가질 수 있다. 상기 투과 절연막(150)은 발열 촉매 패턴부(130)를 외부 충격이나 이물질로부터 보호하는 동시에 감지 가스를 선택적으로 투과시킬 수 있다.The above-mentioned transparent insulating film (150) is provided to cover the above-mentioned heat-generating catalyst pattern portion (130). The above-mentioned transparent insulating film (150) can cover the entire heat-generating catalyst pattern portion (130). At this time, the above-mentioned transparent insulating film (150) can have a structure that selectively transmits the detection gas. The above-mentioned transparent insulating film (150) can protect the heat-generating catalyst pattern portion (130) from external impact or foreign substances, while selectively transmitting the detection gas.

여기서, 상기 투과 절연막(150)은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBI(polybenzimidazole) 중 적어도 하나의 물질을 포함할 수 있다.Here, the above-mentioned transparent insulating film (150) has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).

상기 투과 절연막(150)이 포어(pore)를 갖는 다공성 재질을 가짐으로, 상기 투과 절연막(150)을 통하여 상기 감지 가스가 용이하게 투과할 수 있다.Since the above-mentioned permeable insulating film (150) has a porous material having pores, the detection gas can easily permeate through the above-mentioned permeable insulating film (150).

이와 다르게, 상기 투과 절연막(150)은, 상기 발열 촉매 패턴부(130)를 부분적으로 덮으면서 상기 발열 촉매 패턴부(130)를 부분적으로 노출시킬 수 있다. Alternatively, the above-mentioned transparent insulating film (150) may partially cover the above-mentioned heat-generating catalyst pattern portion (130) while partially exposing the above-mentioned heat-generating catalyst pattern portion (130).

본 발명의 일 실시예에 있어서, 상기 발열 촉매 패턴부(130)는, 전극 패턴들(133) 및 상기 전극 패턴부들(133) 각각의 양 단부들에 연결된 한 쌍의 제1 전극 패드들(131)을 포함할 수 있다.In one embodiment of the present invention, the heat-generating catalyst pattern portion (130) may include electrode patterns (133) and a pair of first electrode pads (131) connected to both ends of each of the electrode pattern portions (133).

상기 제1 전극 패드들(131)을 통하여 상기 발열 촉매 패턴부(130)에 포함된 전극 패턴들(133)에 전압이 인가됨으로써, 전극 패턴부들(133)이 발열할 수 있다. 이와 동시에 상기 전극 패턴부(133)를 포함하는 발열 촉매 패턴부(130)가 촉매로서 활성화 될 수 있다.By applying voltage to the electrode patterns (133) included in the heat-generating catalyst pattern portion (130) through the first electrode pads (131), the electrode pattern portions (133) can generate heat. At the same time, the heat-generating catalyst pattern portion (130) including the electrode pattern portion (133) can be activated as a catalyst.

도 4는 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서를 설명하기 위한 단면도이다.FIG. 4 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.

도 1 및 도 4를 참고하면, 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서(20)는, 기판(110), 절연막(120), 발열 촉매 패턴부(130), 발열 온도 센싱부(140) 및 차단 절연막(160)을 포함한다. 상기 기판 및 절연막은 도 1을 참고로 전술하였으므로 생략하기로 한다.Referring to FIGS. 1 and 4, a contact combustion type gas sensor (20) according to one embodiment of the present invention includes a substrate (110), an insulating film (120), a heat-generating catalyst pattern portion (130), a heat-generating temperature sensing portion (140), and a blocking insulating film (160). Since the substrate and the insulating film have been described above with reference to FIG. 1, their descriptions will be omitted.

발열 촉매 패턴부(130)는, 상기 감지 영역(101) 내 상기 절연막(120) 상에 배치된다. 상기 발열 촉매 패턴부(130)는, 외부로부터 공급되는 전원에 의하여 일차적으로 발열하는 발열체로서 및 노출된 가스들 중 감지 가스가 선택적으로 반응하여 이차적으로 발열하는 발열 반응에서의 촉매로서 기능한다.The heat-generating catalyst pattern part (130) is arranged on the insulating film (120) within the detection area (101). The heat-generating catalyst pattern part (130) functions as a heating element that primarily generates heat by power supplied from the outside and as a catalyst in an exothermic reaction in which a detection gas among exposed gases selectively reacts and secondarily generates heat.

발열 온도 센싱부(140)는, 상기 참고 영역(106) 내 상기 절연막(120) 상에 배치된다. The fever temperature sensing unit (140) is placed on the insulating film (120) within the reference area (106).

상기 발열 온도 센싱부(140)는, 외부로부터 공급되는 전원에 의하여 일차적으로 발열하는 발열체로서 기능한다. 또한, 상기 발열 온도 센싱부(140)는, 상기 참고 영역(106)의 온도를 감지한다. The above-mentioned heating temperature sensing unit (140) functions as a heating element that primarily generates heat by power supplied from the outside. In addition, the above-mentioned heating temperature sensing unit (140) detects the temperature of the above-mentioned reference area (106).

상기 발열 온도 센싱부(140)는 상기 발열 촉매 패턴부(130)와 동일한 물질 또는 동일한 형상을 가질 수 있다. 이때, 상기 발열 온도 센싱부(140)는 상기 발열 촉매 패턴부(130)와 다르게, 차단 절연막(150)으로 덮혀져 있다. 따라서, 상기 차단 절연막(150)은 상기 발열 온도 센싱부(140)를 외부의 감지 가스로부터 차단시킬 수 있다.The above-mentioned heating temperature sensing unit (140) may have the same material or shape as the heating catalyst pattern unit (130). At this time, the heating temperature sensing unit (140) is covered with a blocking insulating film (150), unlike the heating catalyst pattern unit (130). Therefore, the blocking insulating film (150) can block the heating temperature sensing unit (140) from an external detection gas.

상기 차단 절연막(160)은 상기 참고 영역(106) 내에 상기 발열 온도 센싱부(140)를 덮도록 형성된다. 따라서, 상기 발열 온도 센싱부(140) 및 상기 발열 촉매 패턴부(130)가 동일한 물질로 이루어짐에도 불구하고, 상기 발열 온도 센싱부(140)는 감지 가스에 노출되지 않음에 따라 촉매로서 기능할 수 없다.The above-mentioned blocking insulating film (160) is formed to cover the heating temperature sensing unit (140) within the above-mentioned reference area (106). Therefore, even though the heating temperature sensing unit (140) and the heating catalyst pattern unit (130) are made of the same material, the heating temperature sensing unit (140) cannot function as a catalyst because it is not exposed to the detection gas.

한편, 상기 차단 절연막(160)은 상기 감지 영역(101) 내에서 상기 발열 촉매 패턴부(130)를 부분적으로 노출시킬 수 있도록 노출홀(165)이 형성될 수 있다. 이때, 발열 촉매 패턴부(130)는 노출된 노출부 및 상기 차단 절연막(160)에 의하여 덮혀진 커버부를 포함할 수 있다. 상기 노출부는 상기 커버부보다 큰 선폭을 가질 수 있다. 이로써, 상기 발열 촉매 패턴부(130)는 상대적으로 우수한 내구성을 확보할 수 있다.Meanwhile, the blocking insulating film (160) may have an exposure hole (165) formed so as to partially expose the heat-generating catalyst pattern portion (130) within the detection area (101). At this time, the heat-generating catalyst pattern portion (130) may include an exposed portion and a cover portion covered by the blocking insulating film (160). The exposed portion may have a larger line width than the cover portion. As a result, the heat-generating catalyst pattern portion (130) may secure relatively excellent durability.

한편, 상기 발열 촉매 패턴부(130), 발열 온도 센싱부(140) 및 한 쌍의 고정 저항 소자들(미도시)을 상호 연결한 휘스톤 브릿지 회로가 구성될 수 있다. 상기 회로 내의 출력 전압값이 검출되어 상기 감지 가스의 농도가 측정될 수 있다. Meanwhile, a Wheatstone bridge circuit may be configured by interconnecting the above-described heat-generating catalyst pattern portion (130), the heat-generating temperature sensing portion (140), and a pair of fixed resistance elements (not shown). The output voltage value within the circuit may be detected to measure the concentration of the detection gas.

이로써, 상기 발열 촉매 패턴부 및 발열 온도 센서부가 주변 온도에 따라 변화하는 드리프트 노이즈(drift noise) 또는 상기 회로에서 발생하는 전기적 노이즈(noise)가 감소될 수 있다. 이는, 발열 촉매 패턴부 및 발열 온도 센싱부 사이의 온도편차 값이 용이하게 출력될 수 있기 때문이다. Accordingly, drift noise that changes depending on the surrounding temperature of the heat-generating catalyst pattern portion and the heat-generating temperature sensor portion or electrical noise generated in the circuit can be reduced. This is because the temperature deviation value between the heat-generating catalyst pattern portion and the heat-generating temperature sensing portion can be easily output.

도 5는 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서를 설명하기 위한 단면도이다.FIG. 5 is a cross-sectional view illustrating a contact combustion type gas sensor according to one embodiment of the present invention.

도 1 및 도 5를 참고하면, 본 발명의 일 실시예에 따른 접촉 연소식 가스 센서(20)는, 기판(110), 절연막(120), 발열 촉매 패턴부(130), 발열 온도 센싱부(140), 투과 절연막(150) 및 차단 절연막(160)을 포함한다. 상기 기판(110), 절연막(120), 발열 촉매 패턴부(130) 및 발열 온도 센싱부(140)은 도 1 및 도 4를 참고로 전술하였으므로 생략하기로 한다.Referring to FIGS. 1 and 5, a contact combustion type gas sensor (20) according to one embodiment of the present invention includes a substrate (110), an insulating film (120), a heat-generating catalyst pattern portion (130), a heat-generating temperature sensing portion (140), a transmission insulating film (150), and a blocking insulating film (160). The substrate (110), the insulating film (120), the heat-generating catalyst pattern portion (130), and the heat-generating temperature sensing portion (140) have been described above with reference to FIGS. 1 and 4, and therefore will be omitted.

투과 절연막(150)은 감지 영역 내에 상기 발열 촉매 패턴부를 덮도록 형성된다. 상기 투과 절연막(150)은 상기 감지 가스를 선택적으로 투과시키는 구조를 가질 수 있다.A transparent insulating film (150) is formed to cover the heat-generating catalyst pattern portion within the detection area. The transparent insulating film (150) may have a structure that selectively transmits the detection gas.

여기서, 상기 투과 절연막(150)은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBI(polybenzimidazole) 중 적어도 하나의 물질을 포함할 수 있다.Here, the above-mentioned transparent insulating film (150) has a porous material and may include at least one of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole).

상기 투과 절연막(150)이 포어(pore)를 갖는 다공성 재질을 가짐으로, 상기 투과 절연막(150)을 통하여 상기 감지 가스가 용이하게 투과할 수 있다.Since the above-mentioned permeable insulating film (150) has a porous material having pores, the detection gas can easily permeate through the above-mentioned permeable insulating film (150).

이와 다르게, 상기 투과 절연막(150)은, 상기 발열 촉매 패턴부(130)를 부분적으로 덮으면서 상기 발열 촉매 패턴부(130)를 부분적으로 노출시킬 수 있다. Alternatively, the above-mentioned transparent insulating film (150) may partially cover the above-mentioned heat-generating catalyst pattern portion (130) while partially exposing the above-mentioned heat-generating catalyst pattern portion (130).

상기 차단 절연막(160)은 상기 참고 영역(106) 내에 상기 발열 온도 센싱부(140)를 덮도록 형성된다. 따라서, 상기 발열 온도 센싱부(140) 및 상기 발열 촉매 패턴부(130)가 동일한 물질로 이루어짐에도 불구하고, 상기 발열 온도 센싱부(140)는 감지 가스에 노출되지 않음에 따라 촉매로서 기능할 수 없다.The above-mentioned blocking insulating film (160) is formed to cover the heating temperature sensing unit (140) within the above-mentioned reference area (106). Therefore, even though the heating temperature sensing unit (140) and the heating catalyst pattern unit (130) are made of the same material, the heating temperature sensing unit (140) cannot function as a catalyst because it is not exposed to the detection gas.

본 발명의 실시예들은 촉매 및 가열을 통하여 검출 가스의 발열 반응에 따른 온도 변화를 측정함으로써 감지 가스를 감지하는 접촉 연소식 가스 센서용 감지 소자 및 상기 감지 소자를 포함하는 접촉 연소식 가스 센서를 판정할 수 있다.Embodiments of the present invention can determine a sensing element for a contact combustion type gas sensor that detects a sensing gas by measuring a temperature change according to an exothermic reaction of a sensing gas through a catalyst and heating, and a contact combustion type gas sensor including the sensing element.

위에서 설명한 바와 같이 본 발명에 대한 구체적인 설명은 첨부된 도면을 참조한 실시예에 의해서 이루어졌지만, 상술한 실시예는 본 발명의 바람직한 예를 들어 설명하였을 뿐이기 때문에, 본 발명이 상기의 실시예에만 국한되는 것으로 이해되어져서는 아니 되며, 본 발명의 권리범위는 후술하는 청구범위 및 그 등가개념으로 이해되어져야 할 것이다.As described above, the specific description of the present invention has been made by means of embodiments with reference to the attached drawings. However, since the above-described embodiments have only described preferred examples of the present invention, the present invention should not be understood as being limited to the above-described embodiments, and the scope of the rights of the present invention should be understood by the claims described below and their equivalent concepts.

Claims (13)

기판; substrate; 상기 기판 상에 형성되고, 상기 기판을 전기적으로 절연시키는 절연막; 및An insulating film formed on the substrate and electrically insulating the substrate; and 상기 절연막 상에 배치되며, 접촉하는 감지 가스가 산소 가스와 선택적으로 반응하여 발열하는 발열 반응에 대하여, 외부로부터 공급되는 전원에 의하여 발열하는 발열체로서 및 상기 발열 반응에 대한 촉매로서 복수로 기능하는 발열 촉매 패턴부;A heat-generating catalyst pattern portion which is arranged on the insulating film and functions as a heating element that generates heat by power supplied from the outside for an exothermic reaction in which a contacting sensing gas selectively reacts with oxygen gas and generates heat, and as a catalyst for the exothermic reaction; 를 포함하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor including: 제1항에 있어서, 상기 발열 촉매 패턴부는 팔라듐 또는 백금을 포함하는 백금계 금속 또는 상기 백금계 금속에 구리, 주석을 혼합한 합금을 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that in claim 1, the heat-generating catalyst pattern portion includes a platinum-based metal including palladium or platinum or an alloy of the platinum-based metal and copper and tin. 제1항에 있어서, 상기 기판은 참고 영역 및 감지 영역으로 구분되고,In the first paragraph, the substrate is divided into a reference area and a detection area, 상기 발열 촉매 패턴부는 상기 감지 영역 상에 형성된 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that the above-mentioned heat generating catalyst pattern portion is formed on the above-mentioned sensing area. 제3항에 있어서, 상기 발열 촉매 패턴부는 상기 감지 영역의 중심을 기준으로 방사형으로 연장된 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that in the third paragraph, the heat generating catalyst pattern portion extends radially based on the center of the sensing area. 제1항에 있어서, 상기 발열 촉매 패턴부를 덮고, 상기 감지 가스를 선택적으로 투과하는 투과 절연막을 더 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that in claim 1, further comprises a transparent insulating film covering the heat-generating catalyst pattern portion and selectively transmitting the sensing gas. 제5항에 있어서, 상기 투과 절연막은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBI(polybenzimidazole) 중 적어도 하나의 물질을 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that in claim 5, the transparent insulating film has a porous material and includes at least one material selected from the group consisting of alumina, aluminum nitride, zirconium oxide, polyimide, and PBI (polybenzimidazole). 제5항에 있어서, 상기 투과 절연막은, 상기 발열 촉매 패턴부를 부분적으로 덮는 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that in claim 5, the transparent insulating film partially covers the heat-generating catalyst pattern portion. 제1항에 있어서, 상기 발열 촉매 패턴부의 양 단부들에 연결된 한 쌍의 제1 전극 패드들을 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서용 감지 소자.A sensing element for a contact combustion type gas sensor, characterized in that it comprises a pair of first electrode pads connected to both ends of the heat generating catalyst pattern portion in the first paragraph. 감지 영역 및 참고 영역을 갖는 기판; A substrate having a sensing region and a reference region; 상기 기판 상에 형성되고, 상기 기판을 전기적으로 격리시키는 절연막;An insulating film formed on the substrate and electrically isolating the substrate; 상기 감지 영역 내 상기 절연막 상에 배치되며, 접촉하는 감지 가스가 산소 가스와 선택적으로 반응하여 발열하는 발열 반응에 대하여, 외부로부터 공급되는 전원에 의하여 발열하는 발열체로서 및 상기 발열 반응에 대한 촉매로서 복수로 기능하는 발열 촉매 패턴부;A heat-generating catalyst pattern portion which is arranged on the insulating film within the above detection area and functions as a heating element that generates heat by power supplied from the outside for an exothermic reaction in which a contacting detection gas selectively reacts with oxygen gas to generate heat, and as a catalyst for the exothermic reaction; 상기 참고 영역 내 상기 절연막 상에 배치되며, 외부로부터 공급되는 전원에 의하여 일차적으로 발열하는 발열체로서 및 상기 발열에 따른 저항 변화로부터 온도 변화를 감지하는 발열 온도 센싱부; 및A heating element that is placed on the insulating film within the above-mentioned reference area and primarily generates heat by power supplied from the outside, and a heating temperature sensing unit that detects a temperature change from a change in resistance due to the heating; and 상기 발열 온도 센싱부를 덮도록 상기 절연막 상에 형성되고, 상기 감지 가스로부터 상기 발열 온도 센싱부를 차단시키는 차단 절연막을 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서.A contact combustion type gas sensor characterized by including a blocking insulating film formed on the insulating film to cover the heating temperature sensing unit and blocking the heating temperature sensing unit from the detection gas. 제9항에 있어서, 상기 차단 절연막에는 상기 발열 촉매 패턴부의 상면을 노출시키도록 노출홀이 형성된 것을 특징으로 하는 접촉 연소식 가스 센서.A contact combustion type gas sensor, characterized in that in claim 9, an exposure hole is formed in the blocking insulating film to expose the upper surface of the heat generating catalyst pattern portion. 제9항에 있어서, 상기 발열 촉매 패턴부를 덮도록 상기 절연막 상에 형성되고, 상기 감지 가스를 선택적으로 투과하는 투과 절연막을 더 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서.A contact combustion type gas sensor, characterized in that in claim 9, further comprises a transparent insulating film formed on the insulating film to cover the heat generating catalyst pattern portion and selectively transmitting the detection gas. 제11항에 있어서, 상기 투과 절연막은 다공성 재질을 갖고, 알루미나, 질화알루미늄, 지르코늄 산화물, 폴리이미드, PBT 중 적어도 하나의 물질을 포함하는 것을 특징으로 하는 접촉 연소식 가스 센서.A contact combustion type gas sensor in claim 11, wherein the transparent insulating film has a porous material and includes at least one material selected from the group consisting of alumina, aluminum nitride, zirconium oxide, polyimide, and PBT. 제11항에 있어서, 상기 투과 절연막은, 상기 발열 촉매 패턴부를 부분적으로 덮는 것을 특징으로 하는 접촉 연소식 가스 센서.A contact combustion type gas sensor, characterized in that in claim 11, the transparent insulating film partially covers the heat-generating catalyst pattern portion.
PCT/KR2024/005846 2023-06-05 2024-04-30 Sensing element for contact combustion-type gas sensor, and contact combustion-type gas sensor comprising same Ceased WO2024253334A1 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100370694B1 (en) * 1993-09-30 2003-04-07 로베르트 보쉬 게엠베하 How to control the composition of fuel / air mixtures supplied to sensors and internal combustion engines for measuring oxygen content in gas mixtures
JP2007327806A (en) * 2006-06-07 2007-12-20 Ngk Spark Plug Co Ltd Contact combustion type gas sensor and gas detection device
JP5144090B2 (en) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 Catalytic combustion type gas sensor and manufacturing method of catalytic combustion type gas sensor
KR20140118020A (en) * 2013-03-27 2014-10-08 인텔렉추얼디스커버리 주식회사 Hydrogen gas sensor and method for manufacturing the same
KR20160012247A (en) * 2011-10-11 2016-02-02 엠케이에스 인스트루먼츠, 인코포레이티드 Pressure sensor
KR102631601B1 (en) * 2023-06-05 2024-02-02 주식회사 이너센서 Sensing device for a catalytic combustion typed gas sensor and catalytic combustion typed gas sensor including the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174928A (en) * 1974-12-25 1976-06-29 Haga Chukosho Kk Imonono oshutoritsukehoho
JP2007114039A (en) * 2005-10-20 2007-05-10 Ngk Spark Plug Co Ltd Gas sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100370694B1 (en) * 1993-09-30 2003-04-07 로베르트 보쉬 게엠베하 How to control the composition of fuel / air mixtures supplied to sensors and internal combustion engines for measuring oxygen content in gas mixtures
JP2007327806A (en) * 2006-06-07 2007-12-20 Ngk Spark Plug Co Ltd Contact combustion type gas sensor and gas detection device
JP5144090B2 (en) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 Catalytic combustion type gas sensor and manufacturing method of catalytic combustion type gas sensor
KR20160012247A (en) * 2011-10-11 2016-02-02 엠케이에스 인스트루먼츠, 인코포레이티드 Pressure sensor
KR20140118020A (en) * 2013-03-27 2014-10-08 인텔렉추얼디스커버리 주식회사 Hydrogen gas sensor and method for manufacturing the same
KR102631601B1 (en) * 2023-06-05 2024-02-02 주식회사 이너센서 Sensing device for a catalytic combustion typed gas sensor and catalytic combustion typed gas sensor including the same

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