WO2024253633A1 - Système d'imagerie hyperspectrale bidimensionnelle et procédé associé - Google Patents

Système d'imagerie hyperspectrale bidimensionnelle et procédé associé Download PDF

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Publication number
WO2024253633A1
WO2024253633A1 PCT/US2023/024419 US2023024419W WO2024253633A1 WO 2024253633 A1 WO2024253633 A1 WO 2024253633A1 US 2023024419 W US2023024419 W US 2023024419W WO 2024253633 A1 WO2024253633 A1 WO 2024253633A1
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Prior art keywords
optical element
light signals
hyperspectral imaging
phase difference
imaging system
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PCT/US2023/024419
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English (en)
Inventor
Wei-Chih Wang
Fiona Marie Wang
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National Tsing Hua University NTHU
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National Tsing Hua University NTHU
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Priority to PCT/US2023/024419 priority Critical patent/WO2024253633A1/fr
Publication of WO2024253633A1 publication Critical patent/WO2024253633A1/fr
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4537—Devices with refractive scan
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation

Definitions

  • the present disclosure relates to an imaging system and method thereof. More particularly, the present disclosure relates to a two-dimensional hyperspectral imaging system and method thereof for imaging light signals of a sample.
  • Imaging spectrometers have been applied to a variety of disciplines, such as the detection of defects in industrial processes, satellite imaging, and laboratory research. These instruments detect radiation from a sample and process the resulting signal to obtain and present an image of the sample that includes spectral and chemical information about the sample.
  • imaging spectrometers have been proposed that employ a variable-bandwidth filter.
  • Such spectrometers generally include dispersive elements to limit the Spectral information received by the array, or slits, apertures, or shutters to limit the spatial information received by the array.
  • the conventional imaging spectrometers have certain limitations and cannot be used variously.
  • a two-dimensional hyperspectral imaging system which includes Fabry-Perot interferometer based Fourier spectrometer system and can be incorporated into each image detector so that each spatial detector can provide both images of the target area and its spectral information.
  • a two-dimensional hyperspectral imaging system for imaging a plurality of light signals of a sample by Fourier spectroscopy includes at least one first optical element, at least one second optical element, a phase difference modulator and an image sensor. The light signals pass by the first optical element.
  • the second optical element is spaced away from and parallel to the first optical element, and the light signals pass by the second optical element.
  • the phase difference modulator is closer to the first optical element than the second optical element to the first optical element, and configured for modifying a phase difference of adjacent two of the light signals.
  • the image sensor is configured for receiving the light signals reflected from the first optical element and the second optical element, and operating Fourier transforming on the light signals.
  • the second optical element is between the first optical element and the image sensor. When the light signals pass by the first optical element, the second optical element and the image sensor in order, the adjacent two of the light signals are constructive interference by modifying the phase difference with the phase difference modulator.
  • a two-dimensional hyperspectral imaging method for imaging a plurality of light signals of a sample by Fourier spectroscopy includes emitting a light passing through the sample to generate the light signals by a light source, reflecting the light signals by at least one first optical element and at least one second optical element, wherein a phase difference between adjacent two of the light signals is modified to be constructive interference by an phase difference modulator, and receiving the light signals and operating Fourier transforming on the light signals by an image sensor.
  • a two-dimensional hyperspectral imaging method for imaging a plurality of light signals of a sample by Fourier transformation includes emitting a light passing through the sample to generate the light signals by a light source, polarizing each of the light signals by at least one first optical element orthogonally, changing a phase difference of adjacent two of the light signals which are orthogonal to each other and then polarizing each of the light signals by at least one second optical element, so that the adjacent two of the light signals which are orthogonal to each other are constructive interference, and receiving the light signals and operating Fourier transforming on the light signals by an image sensor.
  • Fig. 1A shows a schematic view of a two-dimensional hyperspectral imaging system receiving a plurality of light signals of a sample according to a first embodiment of the present disclosure.
  • Fig. 1B shows a schematic view of the light signals passing through the first optical element and the second optical element according to the first embodiment in Fig.1A.
  • Fig.2 shows a hyperspectral image analyzed in the conventional art.
  • Fig. 1A shows a schematic view of a two-dimensional hyperspectral imaging system receiving a plurality of light signals of a sample according to a first embodiment of the present disclosure.
  • Fig. 1B shows a schematic view of the light signals passing through the first optical element and the second optical element according to the first embodiment in Fig.1A.
  • Fig.2 shows a hyperspectral image analyzed in the conventional art.
  • FIG. 3A shows a partial enlarged view of the first optical element and the phase difference modulator according to the first embodiment in Fig.1A.
  • Fig. 3B shows a partial enlarged view of the first optical element, the second optical element and the phase difference modulator according to the first embodiment in Fig.1A.
  • Fig. 3C shows a schematic view of the phase difference modulator driving the first optical element to move along a vertical direction according to the first embodiment in Fig.3B.
  • Fig. 4 shows a schematic view of a two-dimensional hyperspectral imaging system according to a second embodiment of present disclosure.
  • Fig. 3A shows a partial enlarged view of the first optical element and the phase difference modulator according to the first embodiment in Fig.1A.
  • Fig. 3B shows a partial enlarged view of the first optical element, the second optical element and the phase difference modulator according to the first embodiment in Fig.1A.
  • Fig. 3C shows a schematic view of the phase difference modulator driving the first optical element to move
  • FIG. 5A shows a schematic view of a two-dimensional hyperspectral imaging system receiving light signals generated by a light source according to a third embodiment of the present disclosure.
  • Fig. 5B shows a schematic view of a two-dimensional hyperspectral imaging system receiving light signals generated by two light sources according to the third embodiment in Fig.5A.
  • Fig. 6 shows a schematic view of the two-dimensional hyperspectral imaging system according to the third embodiment in Fig.5A.
  • Fig. 7 shows a schematic view of a two-dimensional hyperspectral imaging system according to a fourth embodiment of present disclosure.
  • Attorney Docket No.: CP-5411-PCT PATENT [0019] Fig.
  • FIG. 8A shows an example relation between the output spectrum and wavelength of the light signals of a light source measured by a conventional spectrometer.
  • Fig. 8B shows an example relation between the output spectrum and wavelength of the light signals of the light source obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 9 shows an example relation between light intensities and wavelengths of the light signals obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 10A shows an example relation between absorbance and wavelength of the light signals of the sample obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 10A shows an example relation between absorbance and wavelength of the light signals of the sample obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • FIG. 10B shows an example relation between absorbance and wavelength of the light signals of the sample obtained by the conventional spectrometer.
  • Fig. 11A shows an example relation between absorbance and wavelength of the light signals of isopropyl alcohol obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 11B shows an example relation between absorbance and wavelength of the light signals of isopropyl alcohol obtained by the conventional spectrometer.
  • Fig. 12A shows an example relation between absorbance and wavelength of the light signals of a mixture of deionized water and isopropyl alcohol obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 12A shows an example relation between absorbance and wavelength of the light signals of a mixture of deionized water and isopropyl alcohol obtained by the two-dimensional hyperspectral imaging system according to the fourth embodiment in Fig.7.
  • Fig. 11A shows an example relation between absorbance and wavelength of the light signals of
  • Fig. 12B shows an example relation between absorbance and wavelength of the light signals of a mixture of deionized water and isopropyl alcohol obtained by the conventional spectrometer.
  • Fig. 13 shows a block diagram of a two-dimensional hyperspectral imaging method according to a fifth embodiment of the present disclosure.
  • Fig. 14 shows a block diagram of a two-dimensional hyperspectral imaging method according to a sixth embodiment of the present disclosure.
  • Fig.1A shows a schematic view of a two-dimensional hyperspectral imaging system 1000 receiving a plurality of light signals L of a sample S according to a first embodiment of the present disclosure.
  • Fig.1B shows a schematic view of the light signals passing through the first optical element 1200 and the second optical element 1300 according to the first embodiment in Fig.1A.
  • Fig.2 shows a hyperspectral image analyzed in the conventional art.
  • the two-dimensional hyperspectral imaging system 1000 is for imaging the light signals L of the sample S by Fourier spectroscopy and includes one camera lens element 1100, at least one first optical element 1200, at least one second optical element 1300, a phase difference modulator 1400 and an image sensor 1500.
  • the camera lens element 1100 is disposed between the sample S and the first optical element 1200, and the light signals L pass by the camera lens element 1100 and the first optical element 1200.
  • the second optical element 1300 is spaced away from and parallel to the first optical element 1200, and the light signals L pass by the second optical element 1300 after passing by the camera lens element 1100 and the first optical element 1200.
  • the phase difference modulator 1400 is closer to the first optical element 1200 than the second optical element 1300 to the first optical element 1200, and is configured for modifying a phase difference of adjacent two of the light signals L.
  • the image sensor 1500 is configured for receiving the light signals L reflected from the first optical element 1200 and the second optical element 1300, and forming light interference which is transform to frequency or wavelength spectrum using Fourier transformation.
  • the second optical element 1300 is between the first optical element 1200 and the image sensor 1500.
  • the image sensor 1500 can transmit the light signals L to a processor to generate a hyperspectral image of the sample S such as the image shown in Fig.2.
  • the two-dimensional hyperspectral imaging system 1000 can provide both image and spatial information of the sample S at the same time without other additional detection system. The details of the two-dimensional hyperspectral imaging system 1000 are described in the following.
  • each number of the first optical element 1200 and the second optical element 1300 is plural, each of the first optical elements 1200 and the second optical elements 1300 is a lens element where the light signals can reflect and transmit.
  • the first optical element and the second optical element can be other element which allows the light signals to be constructive interference, such as a mirror, a transparent film and etc., and the present disclosure is not limited thereto.
  • a part of the light signals L reflects between the first optical element 1200 and the second optical element 1300, and the phase difference modulator 1400 is connected to the first optical element 1200 and configured for changing a distance d1 between the first optical element 1200 and the second Attorney Docket No.: CP-5411-PCT PATENT optical element 1300.
  • the phase difference modulator 1400 is connected to the first optical element 1200 and configured for changing a distance d1 between the first optical element 1200 and the second Attorney Docket No.: CP-5411-PCT PATENT optical element 1300.
  • the aforementioned one of the light signals L reflects partially and transmits partially by the second optical element 1300, and then reflects partially by the first optical element 1200 alternately to form lights adjacent to each other, and the two lights are the aforementioned adjacent two of the light signals L.
  • the phase difference between adjacent two of the light signals L can be represented by the following formula (1): [ 0033] Wherein the represents the phase difference, represents a wavelength of the aforementioned one of the light signals L, and the transmission intensity signals L passing by the first optical elements 1200 and the second optical elements 1300 can be represented by the following formulas (2) and (3): (3).
  • T 1 represents a transmission coefficient of the first optical elements 1200
  • R 1 represents a reflectance of the first optical elements 1200
  • T 2 represents a transmission coefficient of the second optical elements 1300
  • the phase difference modulator 1400 changes the distance Attorney Docket No.: CP-5411-PCT PATENT d1 so that the incident angle equals to zero to achieve the maximum value of the transmission intensity .
  • the first optical elements 1200, the second optical elements 1300 and the phase difference modulator 1400 form a Fabry-Perot Interferometer (FPI) to increase the intensities of the light signals L by constructive interference.
  • FPI Fabry-Perot Interferometer
  • the first optical elements 1200 are arranged and spaced away from each other to form a first optical element array 1210
  • the second optical elements 1300 are arranged and spaced away from each other to form a second optical element array
  • the first optical element array 1210 is parallel to the second optical element array.
  • the image sensor 1500 can receive the light signals L from different incident angles to further obtain a spatial information of the light signals L.
  • the image sensor 1500 is a plurality of cameras, and each of the cameras corresponds to each of the second optical elements 1300.
  • Each of the second optical elements 1300 is disposed on each of the cameras.
  • a size of each of the first optical elements 1200 and the second optical elements 1300 equals to a pixel size of each of the cameras.
  • the cameras form an array corresponding to the micro-array formed by the first optical element array 1210 and the second optical element array, and each of the cameras can obtain a pixel information of the hyperspectral image of the sample S.
  • the hyperspectral image of the sample S can be obtained via the cameras pixel by pixel.
  • the cameras can be CCD, CMOS, NIR or FLIR cameras.
  • Fig. 3A shows a partial enlarged view of the first optical element 1200 and the phase difference modulator 1400 according to the first embodiment in Fig. 1A.
  • the phase difference modulator 1400 can include a frame 1410, a Attorney Docket No.: CP-5411-PCT PATENT plurality of elastic elements 1420, an actuator assembly, a plurality of spring 1440 and a supporting frame 1450.
  • the frame 1410 accommodates the first optical elements 1200.
  • the elastic elements 1420 are connected to the frame 1410.
  • the actuator assembly is connected to the elastic elements 1420 and configured for driving the first optical elements 1200 to move relatively to the second optical elements 1300 along the vertical direction.
  • the actuator assembly includes a plurality of piezoelectric driven actuators 1430 disposed at two sides of the frame 1410, respectively.
  • the frame 1410 has a plurality of holes, each of the first optical elements 1200 is disposed in each hole of the frame 1410 to form the first optical element array 1210, the piezoelectric driven actuators 1430 are disposed at the supporting frame 1450, the springs 1440 are located at the other two sides of the frame 1410 and connected between the frame 1410 and the supporting frame 1450, and the supporting frame 1450 is parallel to the second optical elements array.
  • the piezoelectric driven actuators 1430 can be bended by powering electricity to move the frame 1410 via the elastic elements 1420 such that the first optical elements 1200 can move relatively to the second optical elements 1300 along the vertical direction in order to change the distance d1 between the first optical elements 1200 and the second optical elements 1300. Therefore, the phase difference can be modified by the phase difference modulator 1400 which is used in micro electro mechanical systems (MEMS) technology for microfabrication of the two- dimensional hyperspectral imaging system 1000.
  • MEMS micro electro mechanical systems
  • one of the light signals L can transmit one of the first optical elements 1200 partially to form a transmitted light L1 and reflect between the aforementioned one of the first optical elements 1200 and corresponding one of the second optical elements 1300 partially to form a reflected light L2, and the intensity I(d1) detected by the image sensor 1500 can be simplified from the formula (2) to the following formula (4): (4).
  • I 1 represents an intensity of the transmitted light L1
  • I 2 represents an intensity of the reflected light L2
  • the intensities I 1 , I 2 of the transmitted light L1 and the reflected light L2 can be represented in the following formulas (5), (6): Attorney Docket No.: CP-5411-PCT PATENT (5); and (6).
  • I o represents an original intensity of the light signals L.
  • Fig. 4 shows a schematic view of a two-dimensional hyperspectral imaging system 2000 according to a second embodiment of present disclosure.
  • the structures and configuration of the two-dimensional hyperspectral imaging system 2000 can be similar with the two-dimensional hyperspectral imaging system 1000 of the first embodiment, and the details won’t be described herein again.
  • each of first optical elements 2200 is a flat mirror
  • each of second optical elements 2300 is a curved mirror
  • each of the first optical elements 2200 is located between adjacent two of the second optical elements 2300
  • a phase difference modulator 2400 is configured for driving each of the first optical elements 2200 to move to change distances from a center of each of the first optical elements to centers of the adjacent two of the second optical elements.
  • the phase difference modulator 2400 includes springs connected to each of the first optical elements 2200 and drives the first optical elements 2200 to move along a horizontal direction to change a reflected angle that one of light signals L reflects by one of the first optical elements 2200 after reflecting by one of the second optical elements 2300.
  • FIG. 5A shows a schematic view of a two-dimensional hyperspectral imaging system 3000 receiving light signals L generated by a light source LC according to a third embodiment of the present disclosure.
  • Fig. 5B shows a schematic view of a two-dimensional hyperspectral imaging system 3000 receiving light signals L generated by two light sources LC1, LC2 according to the third embodiment in Fig. 5A.
  • Fig. 6 shows a schematic view of the two- dimensional hyperspectral imaging system 3000 according to the third embodiment in Fig. 5A.
  • the light signals L generated by the single light source LC can be transmitted to pass through a sample S to image the sample S by the two-dimensional hyperspectral imaging Attorney Docket No.: CP-5411-PCT PATENT system 3000.
  • Fig. 5A the light signals L generated by the single light source LC can be transmitted to pass through a sample S to image the sample S by the two-dimensional hyperspectral imaging Attorney Docket No.: CP-5411-PCT PATENT system 3000.
  • a number of the light sources LC1, LC2 is two, the light signals L can be generated by the light sources LC1, LC2, a part of the light signals L can be transmitted to pass through a sample S, and the other part of the light signals L can be reflected by the sample S to pass therethrough to image the sample S by the two-dimensional hyperspectral imaging system 3000. That is, the sample S can be imaged by reflection or transmission; in other embodiments, the light signals can be generated by ambient lights to image the sample, and the present disclosure is not limited thereto. As shown in Figs.
  • each of the light sources LC, LC1, LC2 generates a plurality of the light signals L, and the light signals L pass through a sample S and enter the two-dimensional hyperspectral imaging system 3000.
  • the structures and configuration of the two-dimensional hyperspectral imaging system 3000 are similar with the two-dimensional hyperspectral imaging system 1000 of the first embodiment, and the same detail won’t be described herein again.
  • a phase difference modulator 3400 includes a plurality of liquid crystal cells with a fixed width d, each of the liquid crystal cells is disposed between each of the first optical elements 3200 and each of the second optical elements 3300, and the liquid crystal cells are configured for modifying an optical path difference of the adjacent two of the light signals L having the same polarizing direction by altering a controlled voltage.
  • Refraction index of the liquid crystal cells can be modified by changing an aligned angle ⁇ of the liquid crystal cells to modify the optical path difference of the adjacent two of the light signals L.
  • each of the first optical elements 3200 and the second optical elements 3300 is a flat mirror
  • the phase difference modulator 3400 can further include two polarizers 3610, 3620, the polarizer 3610 is disposed between the sample S and the one of the first optical elements 3200, the polarizer 3620 is disposed between one of the second optical elements 3300 correspond to the aforementioned one of the first optical elements 3200 and the image sensor 3500.
  • the polarizer 3610 can polarize the light signals L first such that the light signals L have a same polarization direction, and the polarizer 3620 polarizes the light signals L with a wanted polarization direction for the following analyzing.
  • the image sensor 3500 can include a plurality of photo diode, and each of the photo diode corresponds to each of the Attorney Docket No.: CP-5411-PCT PATENT second optical elements 3300.
  • the two-dimensional hyperspectral imaging system 3000 can further include an electronic device 3700 signally connected to the image sensor 3500.
  • the electronic device 3700 is configured for imaging the light signals L.
  • Fig. 7 shows a schematic view of a two-dimensional hyperspectral imaging system 4000 according to a fourth embodiment of present disclosure.
  • the structures and configuration of the two-dimensional hyperspectral imaging system 4000 are similar with the two- dimensional hyperspectral imaging system 3000 of the third embodiment, and the details won’t be described herein again.
  • Light signals L of a sample S pass by a lens element 4100 and enter a micro-array formed by at least one first optical element 4200, a phase difference modulator 4400, at least one second optical element 4300 and an image sensor 4500.
  • each of the first optical element 4200 and the second optical element 4300 is a polarizer film
  • the first optical element 4200 is configured for polarizing each of the light signals L orthogonally
  • the liquid crystal cell of the phase difference modulator 4400 is configured for changing refractive index of the light signals in different directions, so that the adjacent two of the light signals L are constructive interference after passing by the second optical element 4300.
  • the first optical element 4200 can polarize the light signals L with a polarization angle of 45 degrees first, and the liquid crystal cell can split one of the light signals L into an ordinary and an extraordinary light which are the adjacent two of the light signals, and a phase difference between the ordinary and the extraordinary light is modified by changing an aligned angle ⁇ of the liquid crystal cell with an extra electric field E such that the ordinary and the extraordinary light can be constructive interference after passing by the second optical element 4300.
  • the two-dimensional hyperspectral imaging systems 3000, 4000 including liquid crystal cell with a fixed width d can modify the phase difference without changing the physical distance between the first optical elements and the second optical elements to further improve the stability of the system.
  • Fig. 8A shows an example relation between the output spectrum and wavelength of the light signals L of a light source measured by a conventional spectrometer.
  • Fig. 8B shows an example relation between the output spectrum and wavelength of the light signals L of the light source obtained by the two-dimensional hyperspectral imaging system 4000 according to the fourth embodiment in Fig. 7.
  • the light source is a tungsten halogen light source, but the present disclosure is not limited thereto.
  • the photo diodes of the image sensor 4500 are silicon based detectors. As shown in Figs.
  • the output spectrum obtained by the two-dimensional hyperspectral imaging system 4000 is ranged from 600 nm to 900 nm which is enough to test various types of samples, and a drop of the spectral response above 900 nm is due to the measurement by the silicon based photo diodes.
  • the measurement is obtained by the one single photo diode of the image sensor 4500 to illustrate the intensity or the spectral information of one pixel of the two-dimensional hyperspectral imaging system 4000.
  • FIG. 9 shows an example relation between light intensities and wavelengths of the light signals L obtained by the two- dimensional hyperspectral imaging system 4000 according to the fourth embodiment in Fig. 7.
  • I1 represents a spectrum of the light signals L obtained by the two- dimensional hyperspectral imaging system 4000 without passing by the sample S
  • I2 represents a spectrum of the light signals L obtained by the two-dimensional hyperspectral imaging system 4000 with passing by the sample S
  • the sample S is deionized (DI) water.
  • Fig. 10A shows an example relation between absorbance and wavelength of the light signals L of the sample S obtained by the two-dimensional hyperspectral imaging system 4000 according to the fourth embodiment in Fig. 7.
  • Fig. 10A shows an example relation between absorbance and wavelength of the light signals L of the sample S obtained by the two-dimensional hyperspectral imaging system 4000 according to the fourth embodiment in Fig. 7.
  • FIG. 10B shows an example relation between absorbance and wavelength of the light signals L of the sample S obtained by the conventional spectrometer.
  • Fig. 11A shows an example relation between absorbance and wavelength of the light signals L of isopropyl alcohol (IPA) obtained by the two-dimensional hyperspectral imaging system 4000 according to the fourth embodiment in Fig. 7.
  • Fig. 11B shows an example relation between absorbance and wavelength of the light signals L of isopropyl alcohol obtained by the conventional spectrometer.
  • Fig. 12A shows an example relation between absorbance and wavelength of the light signals L of a mixture of deionized water and isopropyl alcohol obtained by the two-dimensional hyperspectral imaging system 4000 Attorney Docket No.: CP-5411-PCT PATENT according to the fourth embodiment in Fig.
  • Fig. 12B shows an example relation between absorbance and wavelength of the light signals L of a mixture of deionized water and isopropyl alcohol obtained by the conventional spectrometer.
  • the spectral deviation above 900 nm is mainly due to the measurement by the silicon based photo diodes, so the spectrum above 900 nm does not correspond to the sample S.
  • the absorbance of the light signals L is normalized to the input intensity, so there is no unit of the absorbance. As shown in Figs.
  • peaks of the absorbance spectrum of the light signals L obtain by the two-dimensional hyperspectral imaging system 4000 are more clear than the peaks of the absorbance spectrum obtain by the conventional spectrometer.
  • Fig. 13 shows a block diagram of a two-dimensional hyperspectral imaging method S100 according to a fifth embodiment of the present disclosure.
  • the two-dimensional hyperspectral imaging method S100 is described with the two-dimensional hyperspectral imaging system 1000 of the first embodiment, but the present disclosure is not limited thereto.
  • the two-dimensional hyperspectral imaging method S100 is for imaging a plurality of light signals L of a sample S by Fourier transformation and includes steps S110, S120, S130.
  • the step S110 is emitting a light passing through the sample S to generate the light signals L by a light source.
  • the step S120 is reflecting the light signals L between at least one first optical element 1200 and at least one second optical element 1300, wherein a phase difference between adjacent two of the light signals L is modified to be constructive interference by a phase difference modulator 1400.
  • the step S130 is receiving the light signals L and operating Fourier transforming on the light signals L by an image sensor 1500.
  • a hyperspectral image of the sample S can be obtained by a simplified method.
  • the phase difference between the adjacent two of the light signals L can be modified by changing a distance between the first optical element 1200 and the second optical element 1300 along a vertical direction or other directions.
  • Fig. 14 shows a block diagram of a two-dimensional hyperspectral imaging method S200 according to a sixth embodiment of the present disclosure.
  • the two-dimensional hyperspectral imaging method S200 is described with the two-dimensional hyperspectral Attorney Docket No.: CP-5411-PCT PATENT imaging system 4000 of the fourth embodiment, but the present disclosure is not limited thereto.
  • Fig. 14 shows a block diagram of a two-dimensional hyperspectral imaging method S200 according to a sixth embodiment of the present disclosure.
  • the two-dimensional hyperspectral imaging method S200 is described with the two-dimensional hyperspectral Attorney Docket No.: CP-5411-PCT PATENT imaging system 4000 of the fourth embodiment, but the present disclosure is not limited thereto.
  • Fig. 14 shows a block diagram of a two-dimensional hyperspectral imaging method S200 according to a sixth embodiment of the present disclosure.
  • the two-dimensional hyperspectral imaging method S200 is described with the two-dimensional hyperspectral Attorney Docket No.:
  • the two-dimensional hyperspectral imaging method S200 is for imaging a plurality of light signals L of a sample S by Fourier transformation and includes steps S210, S220, S230.
  • the step S210 is emitting a light passing through the sample S to generate the light signals L by a light source.
  • the step S220 is polarizing each of the light signals L by at least one first optical element 4200 orthogonally, changing a phase difference of adjacent two of the light signals L which are orthogonal to each other and then polarizing each of the light signals L by at least one second optical element 4300, so that the adjacent two of the light signals L which are orthogonal to each other are constructive interference.
  • the step S230 is receiving the light signals L and operating Fourier transforming on the light signals L by an image sensor 4500.

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  • Spectrometry And Color Measurement (AREA)

Abstract

L'invention concerne un système d'imagerie hyperspectrale bidimensionnelle pour l'imagerie d'une pluralité de signaux lumineux d'un échantillon par spectroscopie de Fourier, comprenant un premier élément optique, un second élément optique, un modulateur de différence de phase et un capteur d'image. Les signaux lumineux passent par le premier élément optique. Le second élément optique est éloigné du premier élément optique et parallèle à celui-ci, et les signaux lumineux passent par le second élément optique. Le modulateur de différence de phase est plus proche du premier élément optique que le second élément optique par rapport au premier élément optique, et est configuré pour modifier une différence de phase entre deux signaux lumineux adjacents. Le capteur d'image est configuré pour recevoir les signaux lumineux réfléchis par les premier et second éléments optiques, et pour effectuer une transformation de Fourier sur les signaux lumineux. Le second élément optique se trouve entre le premier élément optique et le capteur d'image.
PCT/US2023/024419 2023-06-05 2023-06-05 Système d'imagerie hyperspectrale bidimensionnelle et procédé associé Ceased WO2024253633A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100231817A1 (en) * 2009-03-11 2010-09-16 Citizen Holdings Co., Ltd. Phase modulator and optical modulation device
US20160062112A1 (en) * 2012-10-12 2016-03-03 Thorlabs, Inc. Compact, low dispersion, and low aberration adaptive optics scanning system and method
US20170241766A1 (en) * 2014-08-12 2017-08-24 Adom, Advanced Optical Technologies Ltd. System for analyzing optical properties of an object
US20210181022A1 (en) * 2018-08-23 2021-06-17 Politecnico Di Milano Fourier-transform hyperspectral imaging system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100231817A1 (en) * 2009-03-11 2010-09-16 Citizen Holdings Co., Ltd. Phase modulator and optical modulation device
US20160062112A1 (en) * 2012-10-12 2016-03-03 Thorlabs, Inc. Compact, low dispersion, and low aberration adaptive optics scanning system and method
US20170241766A1 (en) * 2014-08-12 2017-08-24 Adom, Advanced Optical Technologies Ltd. System for analyzing optical properties of an object
US20210181022A1 (en) * 2018-08-23 2021-06-17 Politecnico Di Milano Fourier-transform hyperspectral imaging system

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