WO2024257460A1 - グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 - Google Patents
グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 Download PDFInfo
- Publication number
- WO2024257460A1 WO2024257460A1 PCT/JP2024/014497 JP2024014497W WO2024257460A1 WO 2024257460 A1 WO2024257460 A1 WO 2024257460A1 JP 2024014497 W JP2024014497 W JP 2024014497W WO 2024257460 A1 WO2024257460 A1 WO 2024257460A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plate
- inspection
- making roll
- processing
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/104—Mechano-optical scan, i.e. object and beam moving
Definitions
- the present invention relates to a fully automatic inspection system for gravure cylinders (also called gravure plate-making rolls), and more specifically, to a fully automatic inspection system for gravure cylinders that can perform unmanned operation even at night to inspect the surface condition of the plate-making roll when manufacturing gravure cylinders.
- gravure platemaking factories that manufacture gravure cylinders (also called gravure platemaking rolls) are known to include those described in Patent Documents 1 and 2.
- the fully automated gravure platemaking processing systems described in Patent Documents 1 and 2 can manufacture gravure cylinders more quickly than before, can save space, can operate unmanned even at night, and can reduce dust generation between processes.
- the surface of the gravure cylinder (before plate making is also called the plate roll) is inspected by a worker using a magnifying glass or optical microscope to visually check whether the plating has been done properly, and after plate making, the surface of the gravure cylinder is inspected by a worker to visually check whether the plate has been made correctly, or a proof print (trial print) is made and compared with the original (so-called proofreading work).
- Patent Document 4 describes a device that automatically inspects the smooth outer peripheral surface (copper plating layer) of a gravure cylinder (i.e., the roll to be plated) before platemaking (before cells are formed) for initial defects such as scratches and dents.
- Patent Documents 5 and 6 describe devices that inspect the outer peripheral surface of a gravure cylinder after platemaking.
- the present invention was made in consideration of the problems with the conventional technology described above, and aims to provide a fully automatic inspection system and inspection method for gravure cylinders that can reduce the labor required for inspecting the surface and plate surface of plate-making rolls and reduce false positives, and allows unmanned operation even at night.
- the fully automatic inspection system for gravure cylinders is a fully automatic inspection system for gravure cylinders for manufacturing gravure cylinders, and includes at least one non-traveling industrial robot equipped with a robot arm having a handling area for chucking and handling the plate-making roll and transporting it to each processing device, at least one processing device arranged in the handling area for processing the transported plate-making roll, a cylinder surface inspection device for inspecting the surface of the processed plate-making roll, a rotating table type roll stock device on which the plate-making roll is placed before or after inspection by the cylinder surface inspection device, and a clean room in which at least the cylinder surface inspection device, the industrial robot transporting the plate-making roll to the cylinder surface inspection device, and the rotating table type roll stock device are arranged, and the fully automatic inspection system for gravure cylinders is configured to inspect the surface of the processed plate-making roll in the clean room.
- the planned processing time of the plate-making roll in the processing device is compared with the planned inspection time of the plate-making roll processed in the processing device in the cylinder surface inspection device, and if the planned inspection time of the plate-making roll in the cylinder surface inspection device is longer, it is preferable to have the plate-making roll wait in the rotating table type roll stock device, thereby eliminating the backlog of the plate-making roll between the processing device and the cylinder surface inspection device.
- the processing device is a processing device selected from the group consisting of a degreasing device, a strike plating device, a copper plating device, a grinding wheel polishing device, a photosensitive film coating device, a laser exposure device, a developing device, an etching device, an ultrasonic cleaning device, a resist stripping device, a surface hardening film forming device, and a paper polishing device, and it is preferable that the surface of the plate-making roll after processing in the processing device is inspected by the cylinder surface inspection device arranged in the clean room.
- the processing device is a grindstone polishing device, a paper polishing device, or a developing device, and the surface of the plate-making roll after processing in the grindstone polishing device, the paper polishing device, or the developing device is inspected by the cylinder surface inspection device arranged in the clean room.
- the industrial robots include at least a first industrial robot and a second industrial robot, and the processing equipment is selected from a degreasing equipment, a strike plating equipment, a copper plating equipment, a grinding wheel polishing equipment, a photosensitive film coating equipment, a laser exposure equipment, a developing equipment, an etching equipment, an ultrasonic cleaning equipment, a resist stripping equipment, a surface hardening film forming equipment, and a paper polishing equipment.
- At least one of the processing equipment is arranged in the handling area of the first industrial robot, and at least one of the processing equipment that is not arranged in the handling area of the first industrial robot is arranged in the handling area of the second industrial robot.
- the plate-making process is sequentially performed by transferring the plate-making roll between the first industrial robot and the second industrial robot and transporting it to the processing equipment in sequence so that the processing is performed in the processing equipment, and the surface of the plate-making roll after processing in the processing equipment is inspected by the cylinder surface inspection device in the clean room.
- the grinding wheel polishing device, the ultrasonic cleaning device, the laser exposure device, the photosensitive film coating device, the paper polishing device, the cylinder surface inspection device, the rotary table type roll stock device, and the first industrial robot are arranged in a clean room, and the degreasing device, strike plating device, copper plating device, developing device, etching device, resist stripping device, surface hardening film forming device, and the second industrial robot are arranged in a non-clean room, and the pressure in the clean room is made higher than the pressure in the non-clean room.
- the gravure cylinder inspection method of the present invention is a gravure cylinder inspection method using the fully automatic gravure cylinder inspection system, and includes a process of transporting the plate-making roll by the industrial robot, a process of processing the plate-making roll in the processing device, and a process of inspecting the plate-making roll surface by the cylinder surface inspection device, with the inspection process being performed in the clean room.
- the fully automatic gravure cylinder manufacturing system of the present invention is a fully automatic gravure cylinder manufacturing system incorporating the fully automatic inspection system for gravure cylinders, and is a fully automatic gravure cylinder manufacturing system that manufactures gravure cylinders by performing plate making processing with the processing device and inspecting the surface of the processed plate-making roll with the cylinder surface inspection device.
- the method for manufacturing a gravure cylinder of the present invention is a method for manufacturing a gravure cylinder using the fully automated manufacturing system for gravure cylinders, and includes a process for transporting the plate-making roll by the industrial robot, a process for processing the plate-making roll in the processing device, and a process for inspecting the plate-making roll surface by the cylinder surface inspection device, in which the inspection process is carried out in the clean room, thereby enabling the plate-making process to be carried out.
- FIG. 1 is a schematic plan view showing one embodiment of a fully automatic manufacturing system for gravure cylinders according to the present invention.
- 1 is a schematic plan view showing another embodiment of a fully automatic gravure cylinder manufacturing system according to the present invention.
- FIG. 1 is a schematic plan view showing one embodiment of a fully automatic manufacturing system for gravure cylinders according to the present invention.
- the reference numeral 10A indicates the fully automatic inspection system for gravure cylinders according to the present invention.
- the fully automatic inspection system for gravure cylinders 10A is a fully automatic inspection system for gravure cylinders for manufacturing gravure cylinders (also called gravure plate making rolls).
- the fully automatic inspection system 10A is equipped with robot arms 12, 14 having handling areas P, Q, and at least one non-traveling industrial robot 40, 42 for chucking and handling the plate making roll 16 and transporting it to each processing device 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38, and at least one of the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 is arranged in the handling areas P, Q and performs processing on the transported plate base material.
- the plate-making roll 16 can be a hollow aluminum roll, which is a cylindrical hollow plate base material, a hollow iron roll, or a hollow CFRP (Carbon Fiber Reinforced Plastics) roll.
- the fully automatic inspection system 10A for gravure cylinders also includes a clean room A in which are located at least a cylinder surface inspection device 44 that inspects the surface of the processed plate-making roll 16, an industrial robot 40 that transports the plate-making roll, and a rotating table type roll stock device 46 on which the plate-making roll 16 is placed before or after inspection by the cylinder surface inspection device 44.
- Processing devices and other industrial robots 42 that are not located in clean room A are located in non-clean room B, which is a non-clean room that is not a clean room.
- the cleanliness class of the clean room in the present invention is preferably a clean room that satisfies the US Federal Standard (Fed. Std. 209E) class of 1,000 to 100,000.
- the plate-making roll 16 is handed over by the first industrial robot 40 and the second industrial robot 42 by opening and closing the shutter 50, and goes back and forth between the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 in the clean room A and the non-clean room B to perform each plate-making process.
- the plate-making roll is handed over between the first industrial robot 40 and the second industrial robot 42, which are the industrial robots 40, 42, and transported to each processing device in sequence so that the processing can be performed in the processing device, and the plate-making process is performed sequentially in the clean room A and the non-clean room B.
- the surface of the processed plate-making roll 16 is inspected in the clean room A.
- the plate-making roll 16 is made to wait in the rotary table type roll stock device 46, thereby eliminating the retention of the plate-making roll 16 between each of the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 and the cylinder surface inspection device 44.
- This waiting state is controlled by a computer 52 or the like located outside the clean room A and non-clean room B, which automatically calculates the scheduled time.
- the plate-making roll 16 is kept waiting in the rotating table type roll stock device 46, thereby eliminating the retention of the plate-making roll between the processing devices 24, 26, 28, i.e., the grindstone polishing device 24, the paper polishing device 26 or the developing device 28, and the cylinder surface inspection device.
- the fully automatic inspection system for gravure cylinders 10A for example, depending on the peripheral surface area of the plate-made roll 16, it is also possible to compare the planned processing time (i.e., the planned time for processing to end) of the plate-made roll 16 in the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 with the planned inspection time (i.e., the planned time for inspection to end) in the cylinder surface inspection device 44 of the plate-made roll 16 processed in the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38.
- This comparison is made by automatically calculating the planned times using a computer 52 or the like located outside the clean room A and non-clean room B.
- the plate-making roll 16 in the cylinder surface inspection device 44 can be made to wait in the rotary table type roll stock device 46, thereby eliminating the retention of the plate-making roll 16 between the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 and the cylinder surface inspection device 44.
- the area of the peripheral surface of the plate-making roll 16 is calculated by the circumference of the plate-making roll 16 times the longitudinal length of the plate-making roll 16, but the calculation is performed using the plate base material in an unprocessed state.
- the processing time for the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, and 38 is about 15 minutes each, but the inspection of the cylinder surface in the cylinder surface inspection device 44 takes only about half that time.
- the plate-making roll 16 is a plate base material with a circumference of 942 mm or a plate base material with a face length exceeding 1200 mm, the inspection of the cylinder surface in the cylinder surface inspection device 44 will be longer than the processing time for the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, and 38.
- the plate-making roll 16 cannot be set in the cylinder surface inspection device 44, and the plate-making roll 16 becomes stuck between the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 and the cylinder surface inspection device 44.
- this sticking can be eliminated by adjusting the time that the plate-making roll 16 is kept waiting in the rotating table type roll stock device 46 depending on the area of the peripheral surface of the plate-making roll 16.
- the processing equipment is selected from the group consisting of a degreasing equipment 36, a strike plating equipment 114, a copper plating equipment 38, a grinding wheel polishing equipment 24, a photosensitive film coating equipment 18, a laser exposure equipment 20, a developing equipment 28, an etching equipment 30, an ultrasonic cleaning equipment 22, a resist stripping equipment 32, a surface hardening film forming equipment 34, and a paper polishing equipment 26, and the surface of the plate-making roll 16 after processing in the processing equipment is inspected by the cylinder surface inspection equipment 44 arranged in the clean room A.
- a photosensitive film coating device 18 is provided above the laser exposure device 20.
- a paper polishing device 26 is provided above the grindstone polishing device 24.
- the strike plating device 114 is a device that performs strike plating of nickel plating or alkaline copper plating. The strike plating process is performed between the degreasing process in the degreasing device 36 and the copper plating process in the copper plating device 38.
- a photosensitive film coating device 18 is installed and laser exposure is performed using a laser exposure device 20, but a method of installing an electronic engraving device and performing electronic engraving may also be used.
- the surface hardening coating forming device 34 can be a chrome plating device, a DLC (Diamond-Like Carbon) film forming device, a silicon dioxide film forming device, or the like, but in the illustrated example, a chrome plating device is shown.
- a chrome plating device a chrome plating device, a DLC (Diamond-Like Carbon) film forming device, a silicon dioxide film forming device, or the like, but in the illustrated example, a chrome plating device is shown.
- Any known processing device can be used for the processing device described above, such as the processing devices described in Patent Documents 1 and 2.
- the processing device described above is a grindstone polishing device 24, a paper polishing device 26, or a developing device 28, and that the surface of the plate-making roll 16 after processing in the grindstone polishing device 24, the paper polishing device 26, or the developing device 28 is inspected by the cylinder surface inspection device 44 arranged in the clean room.
- the grindstone polishing device 24, the ultrasonic cleaning device 22, the laser exposure device 20, the photosensitive film coating device 18, the paper polishing device 26, the cylinder surface inspection device 44, the rotary table type roll stock device 46, and the first industrial robot 40 are arranged in clean room A.
- the degreasing device 36, the strike plating device 114, the copper plating device 38, the developing device 28, the etching device 30, the resist stripping device 32, the surface hardening film forming device 34, and the second industrial robot 42 are arranged in non-clean room B.
- the pressure in the clean room A is set higher than the pressure in the non-clean room B.
- the difference in pressure between the clean room A and the non-clean room B is preferably 2 to 10 Pa, and more preferably 5 to 7 Pa. That is, the pressure in the clean room A is preferably 2 to 10 Pa higher than the pressure in the non-clean room B, and more preferably 5 to 7 Pa higher.
- the processing device is a grindstone polishing device 24
- the plate-making roll 16 on which a copper plating layer is formed by a copper plating process before the gravure cells are formed by the copper plating device 38 is inspected after being grindstone polished by the grindstone polishing device 24.
- the technology of an inspection device that detects defects by an imaging means such as those described in Patent Document 3 and Patent Document 4 can be applied.
- the processing device is a developing device 28, the surface of the plate-making roll 16 developed by the developing device 28 is inspected.
- an inspection device technology such as that described in Patent Document 5 can be applied, which compares an imaging means and the original image used in plate-making to detect cell defects.
- the processing device is a paper polishing device 26
- the surface of the plate-making roll 16 that has been subjected to the paper polishing process is inspected.
- the technology of an inspection device that detects cell defects by comparing an imaging means such as that described in Patent Document 5 with the original image used in plate-making can be applied.
- the cylinder surface inspection device 44 may be capable of inspecting the surface of the plate-making roll 16 after a copper plating layer has been formed by a copper plating process and has been grinded by a grinding wheel grinding device 24, or the surface of the plate-making roll 16 developed by a developing device 28, and/or the surface of the plate-making roll 16 after a paper grinding process has been performed.
- known cylinder surface inspection devices and cylinder surface inspection devices sold on the market can be used.
- a cylinder surface inspection device that uses known AI (Artificial Intelligence) to improve inspection accuracy can be used.
- the gravure cylinder inspection method of the present invention includes a process of transporting the plate-making roll 16 by the industrial robots 40, 42, a process of processing the plate-making roll 16 in the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38, and a process of inspecting the surface of the plate-making roll 16 by the cylinder surface inspection device 44, and the inspection process is performed in the clean room A.
- the gravure cylinder inspection method according to the present invention further includes a step of making the plate-making roll wait in the rotary table type roll stock device 46 while the surface of the plate-making roll 16 is being inspected in the cylinder surface inspection device 44, and it is preferable to eliminate the retention of the plate-making roll between the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 and the cylinder surface inspection device.
- the method includes a step of comparing the planned processing time of the plate-making roll 16 in the processing device 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 with the planned inspection time of the plate-making roll 16 processed in the processing device 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 in the cylinder surface inspection device 44 according to the area of the peripheral surface of the plate-making roll 16, and a step of making the plate-making roll 16 wait in the rotary table type roll stock device 46 if the planned inspection time of the plate-making roll 16 in the cylinder surface inspection device 44 is longer, and it is preferable to eliminate the retention of the plate-making roll 16 between the processing device 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38 and the cylinder surface inspection device 44.
- the processing equipment used in the above-mentioned gravure cylinder inspection method is the grindstone grinding equipment 24, the paper grinding equipment 26, or the developing equipment 28, and the inspection method in which the surface of the plate-making roll 16 after processing in the grindstone grinding equipment 24, the paper grinding equipment 26, or the developing equipment 28 is inspected in the cylinder surface inspection equipment 44 arranged in the clean room A is particularly preferred.
- the gravure cylinder inspection method according to the present invention further includes a step of making the plate-making roll wait in the rotating table type roll stock device 46 while the inspection of the surface of the plate-making roll 16 is being performed in the cylinder surface inspection equipment 44, and it is preferable to eliminate the retention of the plate-making roll between the processing equipment 24, 26, 28, i.e., the grindstone grinding equipment 24, the paper grinding equipment 26, or the developing equipment 28, and the cylinder surface inspection equipment.
- the fully automatic gravure cylinder manufacturing system 54A is a fully automatic gravure cylinder manufacturing system incorporating the fully automatic gravure cylinder inspection system 10A as shown in FIG. 1, and is a fully automatic gravure cylinder manufacturing system that manufactures gravure cylinders by performing plate making processing using the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, and 38 and inspecting the surface of the processed plate-making roll 16 using the cylinder surface inspection device 44.
- the method for manufacturing a gravure cylinder according to the present invention is a method for manufacturing a gravure cylinder using the fully automated manufacturing system 54A of the gravure cylinder, and includes a process for transporting the plate-made roll 16 by the industrial robots 40, 42, a process for processing the plate-made roll 16 in the processing devices 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38, and a process for inspecting the surface of the plate-made roll 16 by the cylinder surface inspection device 44, and the inspection process is carried out in the clean room A, thereby allowing the plate-making process to be carried out.
- FIG. 2 shows a fully automatic inspection system 10B for gravure cylinders according to the present invention.
- the fully automatic inspection system for gravure cylinders 10B is a fully automatic inspection system for manufacturing gravure cylinders (also called gravure plate making rolls) similar to the fully automatic inspection system 10A described above.
- the fully automatic inspection system for gravure cylinders 10A is a one-line type system in which one processing device for each process is installed, whereas the fully automatic inspection system for gravure cylinders 10B is characterized in that it is a two-line type system in which two processing devices for each process are installed.
- the fully automatic inspection system 10B includes robot arms 56, 58, 60, 62, and 64 having handling areas R, S, T, U, and V, and chucks and handles the plate-making roll 16, which is a cylindrical hollow plate base material, and transports it to each processing device 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, and 88b.
- the fully automatic inspection system 10B for gravure cylinders also includes a clean room C in which are located at least the cylinder surface inspection device 44 that inspects the surface of the processed plate-making roll 16, the industrial robots 90, 92, 94 that transport the plate-making roll 16, and the rotating table type roll stock devices 100a, 100b, 102a, 102b on which the plate-making roll 16 is placed before or after inspection by the cylinder surface inspection device 44.
- the processing devices and other industrial robots 96, 98 that are not located in the clean room C are located in a non-clean room D that is not a clean room.
- the clean room C and the non-clean room D are connected to each other and separated by a wall 104.
- the cleanliness class of the clean room in the present invention is preferably a clean room that satisfies the US Federal Standard (Fed. Std. 209E) class of 1,000 to 100,000.
- the first shutter 106 opens and closes, and the plate-making roll 16 is handed over by the first industrial robot 90 and the second industrial robot 96, moving between the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, and 88a in the clean room C and non-clean room D to perform each plate-making process (this is the first plate-making process line).
- the plate-making process is carried out sequentially in the clean room C and non-clean room D by transferring the plate-making roll 16 between the first industrial robot 90 and the second industrial robot 96 and transporting it sequentially to each processing device so that it can be processed in the processing device. Then, the third industrial robot 92 chucks the plate-making roll 16 and transports it to the cylinder surface inspection device 44. In the fully automatic inspection system 10B, the surface of the processed plate-making roll 16 is inspected in the clean room C.
- the plate-making roll 16 is handed over by the fourth industrial robot 94 and the fifth industrial robot 98 by opening and closing the second shutter 108, and moves between the processing devices 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, and 88b in the clean room C and non-clean room D to perform each plate-making process (this is the second plate-making process line).
- the plate-making process is carried out sequentially in the clean room C and non-clean room D by transferring the plate-making roll 16 between the fourth industrial robot 94 and the fifth industrial robot 98 and transporting it sequentially to each processing device so that it can be processed in the processing device. Then, the third industrial robot 92 chucks the plate-making roll 16 and transports it to the cylinder surface inspection device 44. In the fully automatic inspection system 10B, the surface of the processed plate-making roll 16 is inspected in the clean room C.
- the processing units of each of the plate-making lines is placed within the handling area S of the third industrial robot 92, and one cylinder surface inspection device 44 is installed, and the cylinder surface inspection device 44 functions as the inspection device for both of the two plate-making lines described above.
- the plate-making roll 16 is made to wait in the rotary table type roll stock devices 100a, 100b, 102a, 102b, thereby eliminating the retention of the plate-making roll 16 between each of the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b and the cylinder surface inspection device 44.
- This waiting state is controlled by computers 110, 112, etc., located outside the clean room C and non-clean room D, which automatically calculate the scheduled time.
- the plate-made roll 16 is made to wait in the rotary table type roll stock device 100a, 100b, 102a, 102b, thereby eliminating the retention of the plate-made roll 16 between the processing devices 74a, 74b, 78a, 78b, 76a, 76b, i.e., the grindstone polishing device 74a, 74b, the developing device 78a, 78b, or the paper polishing device 76a, 76b, and the cylinder surface inspection device 44.
- This waiting state is controlled by computers 110, 112, etc., located outside the clean room C and non-clean room D, which automatically calculate the scheduled time.
- the planned processing time (i.e., processing time) of the plate-making roll 16 in the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b is determined according to the area of the peripheral surface of the plate-making roll 16.
- This comparison can be configured so that the planned time is automatically calculated and compared by computers 110, 112, etc., located outside the clean room C.
- the plate-making roll 16 is kept waiting at the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b
- the processing time for each of the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b is approximately 15 minutes, but the inspection of the cylinder surface in the cylinder surface inspection device 44 takes only about half that time.
- the inspection of the cylinder surface in the cylinder surface inspection device 44 becomes longer than the processing time of the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b.
- the plate-making roll 16 cannot be set in the cylinder surface inspection device 44, and the plate-making roll 16 is stuck between the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b and the cylinder surface inspection device 44.
- this sticking can be eliminated by adjusting the time for which the plate-making roll 16 is kept waiting in the rotary table type roll stock devices 100a, 100b, 102a, 102b according to the area of the peripheral surface of the plate-making roll 16.
- the processing equipment is selected from the following: degreasing equipment 86a, 86b, strike plating equipment 116a, 116b, copper plating equipment 88a, 88b, grindstone polishing equipment 74a, 74b, photosensitive film coating equipment 68a, 68b, laser exposure equipment 70a, 70b, developing equipment 78a, 78b, etching equipment 80a, 80b, ultrasonic cleaning equipment 72a, 72b, resist stripping equipment 82a, 82b, surface hardening film forming equipment 84a, 84b, and paper polishing equipment 76a, 76b.
- the surface of the plate-making roll 16 after processing in the processing equipment is inspected by the cylinder surface inspection equipment 44 located in the clean room C.
- photosensitive film coating devices 68a and 68b are provided above the laser exposure devices 70a and 70b. Also, in the illustrated example, paper polishing devices 76a and 76b are provided above the grindstone polishing devices 74a and 74b.
- the strike plating devices 116a and 116b are devices that perform strike plating of nickel plating or alkaline copper plating.
- the strike plating process is performed between the degreasing process in the degreasing devices 86a and 86b and the copper plating process in the copper plating devices 88a and 88b.
- photosensitive film coating devices 68a, 68b are installed and laser exposure devices 70a, 70b are used to perform laser exposure, but an electronic engraving device may also be installed to perform electronic engraving.
- the surface hardening film forming devices 84a and 84b may be chrome plating devices, DLC (Diamond-Like Carbon) film forming devices, silicon dioxide film forming devices, etc., but in the illustrated example, a chrome plating device is shown.
- Any known processing device can be used for the processing device described above, such as the processing devices described in Patent Documents 1 and 2.
- the above-mentioned processing device is a grindstone polishing device 74a, 74b, a developing device 78a, 78b, or a paper polishing device 76a, 76b, and the surface of the plate-making roll 16 after processing in the grindstone polishing device 74a, 74b or the paper polishing device 76a, 76b is inspected by the cylinder surface inspection device 44 arranged in the clean room C.
- the grindstone polishing devices 74a, 74b, the ultrasonic cleaning devices 72a, 72b, the laser exposure devices 70a, 70b, the photosensitive film coating devices 68a, 68b, the paper polishing devices 76a, 76b, the cylinder surface inspection device 44, the rotary table type roll stock devices 100a, 100b, 102a, 102b, the first industrial robot 90, the second industrial robot 96, and the third industrial robot 92 are arranged in clean room C.
- the degreasing devices 86a, 86b, strike plating devices 116a, 116b, copper plating devices 88a, 88b, developing devices 78a, 78b, etching devices 80a, 80b, resist stripping devices 82a, 82b, surface hardening film forming devices 84a, 84b, fourth industrial robot 94, and fifth industrial robot 98 are located in non-clean room D.
- the pressure in the clean room C is set higher than the pressure in the non-clean room D.
- the difference in pressure between the clean room C and the non-clean room D is preferably 2 to 10 Pa, and more preferably 5 to 7 Pa. That is, the pressure in the clean room C is preferably 2 to 10 Pa higher than the pressure in the non-clean room D, and more preferably 5 to 7 Pa higher.
- air flows from the clean room C to the non-clean room D for example, it is preferable to pressurize the clean room C to the above pressure, and exhaust air in the non-clean room D.
- the processing device is a grindstone polishing device 74a, 74b
- the surface of the plate-making roll 16 on which a copper plating layer is formed by the copper plating process before the gravure cells are formed by the copper plating devices 88a, 88b is inspected.
- the technology of an inspection device that detects defects by an imaging means such as those described in Patent Document 3 and Patent Document 4 can be applied.
- the processing device is the developing device 78a, 78b
- the surface of the plate-making roll 16 developed by the developing device 78a, 78b is inspected.
- the technology of an inspection device that detects cell defects by comparing an imaging means and the original image used for plate-making, as described in Patent Document 5 can be applied.
- the processing device is a paper polishing device 76a or 76b
- the surface of the plate-making roll 16 that has been subjected to the paper polishing process is inspected.
- the technology of an inspection device that detects cell defects by comparing an imaging means such as that described in Patent Document 5 with the original image used in plate-making can be applied.
- the cylinder surface inspection device 44 is the same as that installed in the fully automatic inspection system 10A described above, and is capable of inspecting the surface of the plate-making roll 16 on which a copper plating layer has been formed by a copper plating process and which has been grinded by grinding stone grinding devices 74a, 74b, the surface of the plate-making roll 16 which has been developed by developing devices 78a, 78b, and/or the surface of the plate-making roll 16 which has been subjected to a paper grinding process.
- known cylinder surface inspection devices and cylinder surface inspection devices sold on the market can be applied.
- a cylinder surface inspection device which improves inspection accuracy by using known AI (Artificial Intelligence) can be applied.
- the gravure cylinder inspection method of the present invention using the fully automatic inspection system 10B includes a process of transporting the plate-making roll 16 by the industrial robots 90, 92, 94, 96, 98, a process of processing the plate-making roll 16 in the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b, and an inspection process of the surface of the plate-making roll 16 by the cylinder surface inspection device 44, and is a gravure cylinder inspection method in which the inspection process is carried out in the clean room C.
- the gravure cylinder inspection method further includes a step of having the plate-making roll 16 wait in the rotary table type roll stock device 100a, 100b, 102a, 102b while the surface of the plate-making roll 16 is being inspected in the cylinder surface inspection device 44, and it is preferable to eliminate the retention of the plate-making roll between the processing device 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b and the cylinder surface inspection device.
- the gravure cylinder inspection method of the present invention further determines, depending on the area of the peripheral surface of the plate-making roll 16, the planned processing time of the plate-making roll 16 in the processing device 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b, and the cylinder of the plate-making roll 16 processed in the processing device 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b.
- the method includes a step of comparing the planned inspection time in the surface inspection device 44 with the planned inspection time in the cylinder surface inspection device 44 of the plate-making roll 16, and a step of having the plate-making roll 16 wait in the rotary table type roll stock device 100a, 100b, 102a, 102b if the planned inspection time in the cylinder surface inspection device 44 of the plate-making roll 16 is longer, and it is preferable to eliminate the retention of the plate-making roll 16 between the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b and the cylinder surface inspection device 44.
- the processing devices used in the above-mentioned gravure cylinder inspection method are grindstone polishing devices 74a, 74b, developing devices 78a, 78b or paper polishing devices 76a, 76b, and in the inspection process, an inspection method in which the surface of the plate-making roll 16 after processing in the grindstone polishing devices 74a, 74b, developing devices 78a, 78b or paper polishing devices 76a, 76b is inspected by the cylinder surface inspection device 44 arranged in the clean room is particularly preferred.
- the gravure cylinder inspection method according to the present invention further includes a step of having the plate-making roll 16 wait in the rotary table type roll stock device 100a, 100b, 102a, 102b while the surface of the plate-making roll 16 is being inspected in the cylinder surface inspection device 44, and it is preferable to eliminate the retention of the plate-making roll 16 between the processing devices 74a, 74b, 78a, 78b, 76a, 76b, such as the grindstone polishing devices 74a, 74b, paper polishing devices 76a, 76b, or developing devices 78a, 78b, and the cylinder surface inspection device 44.
- the fully automatic gravure cylinder manufacturing system 54B is a fully automatic gravure cylinder manufacturing system incorporating the fully automatic gravure cylinder inspection system 10B as shown in FIG. 2, and is a fully automatic gravure cylinder manufacturing system that manufactures gravure cylinders by performing plate making processing using the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b, and inspecting the surface of the processed plate-making roll 16 using the cylinder surface inspection device 44.
- the method for manufacturing a gravure cylinder according to the present invention is a method for manufacturing a gravure cylinder using the fully automated manufacturing system 54B of the gravure cylinder, and includes a process for transporting the plate-made roll 16 by the industrial robots 90, 92, 94, 96, 98, a process for processing the plate-made roll 16 in the processing devices 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b, 76b, 78b, 80b, 82b, 84b, 86b, 88b, and an inspection process for the surface of the plate-made roll 16 by the cylinder surface inspection device 44, and the transport process, processing process, and inspection process are performed in the clean room C, thereby making the plate-making process.
- 10A, 10B Fully automatic inspection system for gravure cylinders, 12, 14, 56, 58, 60, 62, 64: Robot arm, 16: Plate-making roll, 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38, 68a, 70a, 72a, 74a, 76a, 78a, 80a, 82a, 84a, 86a, 88a, 68b, 70b, 72b, 74b , 76b, 78b, 80b, 82b, 84b, 86b, 88b: processing devices, 18, 68a, 68b: photosensitive film coating devices, 20, 70a, 70b: laser exposure devices, 22, 72a, 72b: ultrasonic cleaning devices, 24, 74a, 74b: grindstone polishing devices, 26, 76a, 76b: paper polishing devices, 28, 78a, 78b: developing devices, 30, 80a, 80b: etching devices, 32, 82a, 82b: resist stripping device, 34, 84a,
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Abstract
Description
、本発明の技術思想から逸脱しない限り種々の変形が可能なことはいうまでもない。
Plastics)製の中空ロールなども使用できる。
Claims (12)
- グラビアシリンダを製造するためのグラビアシリンダ用全自動検査システムであり、
ハンドリングエリアを有するロボットアームを備え、被製版ロールをチャックしてハンドリングし各処理装置へと運搬するための非走行型の少なくとも一つの産業ロボットと、
前記ハンドリングエリアに少なくとも一つ配置され、前記運搬された前記被製版ロールに対して処理を行う前記処理装置と、
前記処理された被製版ロールの表面を検査するシリンダ表面検査装置と、
前記シリンダ表面検査装置での検査前又は検査後に前記被製版ロールが載置される、回転テーブル式ロールストック装置と、
少なくとも前記シリンダ表面検査装置、前記シリンダ表面検査装置へと前記被製版ロールを運搬する産業ロボット及び前記回転テーブル式ロールストック装置が配置されるクリーンルームと、
を含み、
前記クリーンルーム内で、前記処理された被製版ロールの表面の検査が行われるようにした、グラビアシリンダ用全自動検査システム。 - 前記シリンダ表面検査装置内で前記被製版ロールの表面の検査が行われている間は、前記回転テーブル式ロールストック装置で前記被製版ロールを待機させることにより、前記処理装置と前記シリンダ表面検査装置との間における前記被製版ロールの滞留を解消するようにした、請求項1記載のグラビアシリンダ用全自動検査システム。
- 前記被製版ロールの周面の面積に応じて、前記被製版ロールの前記処理装置での予定処理時間と前記処理装置で処理された前記被製版ロールの前記シリンダ表面検査装置での予定検査時間とを比較し、
前記被製版ロールの前記シリンダ表面検査装置での予定検査時間の方が長い場合には、前記回転テーブル式ロールストック装置で前記被製版ロールを待機させることにより、前記処理装置と前記シリンダ表面検査装置との間における前記被製版ロールの滞留を解消するようにした、請求項1記載のグラビアシリンダ用全自動検査システム。 - 前記処理装置が、脱脂装置、ストライクめっき装置、銅メッキ装置、砥石研磨装置、感光膜塗布装置、レーザ露光装置、現像装置、腐食装置、超音波洗浄装置、レジスト剥離装置、表面硬化被膜形成装置、ペーパー研磨装置、のいずれかから選ばれる処理装置であり、前記処理装置での処理後の被製版ロールの表面が前記クリーンルーム内に配置された前記シリンダ表面検査装置で検査されてなる、請求項1記載のグラビアシリンダ用全自動検査システム。
- 前記処理装置が、砥石研磨装置、ペーパー研磨装置又は現像装置であり、前記砥石研磨装置、ペーパー研磨装置又は現像装置での処理後の被製版ロールの表面が前記クリーンルーム内に配置された前記シリンダ表面検査装置で検査されてなる、請求項1記載のグラビアシリンダ用全自動検査システム。
- 前記産業ロボットが、少なくとも第一の産業ロボット及び第二の産業ロボットを含み、前記処理装置が、脱脂装置、ストライクめっき装置、銅メッキ装置、砥石研磨装置、感光膜塗布装置、レーザ露光装置、現像装置、腐食装置、超音波洗浄装置、レジスト剥離装置、表面硬化被膜形成装置、ペーパー研磨装置、のいずれかから選ばれる処理装置であり、前記第一の産業ロボットのハンドリングエリアに、前記処理装置の少なくとも一つを配置し、
前記第二の産業ロボットのハンドリングエリアに、前記第一の産業ロボットのハンドリングエリアに配置されなかった前記処理装置の少なくとも一つを配置し、
前記処理装置での処理が行われるように前記第一の産業ロボットと前記第二の産業ロボットとの間で被製版ロールを受け渡しながら前記処理装置へ順次運搬することにより、製版処理が順次行われ、且つ前記処理装置での処理後の被製版ロールの表面が前記クリーンルーム内の前記シリンダ表面検査装置で検査されてなる、請求項1記載のグラビアシリンダ用全自動検査システム。 - 前記砥石研磨装置、前記超音波洗浄装置、前記レーザ露光装置、前記感光膜塗布装置、ペーパー研磨装置、前記シリンダ表面検査装置、前記回転テーブル式ロールストック装置、及び前記第一の産業ロボットがクリーンルームに配置され、
前記脱脂装置、ストライクめっき装置、銅メッキ装置、現像装置、腐食装置、レジスト剥離装置、表面硬化被膜形成装置、及び前記第二の産業ロボットが非クリーンルームに配置され、
前記クリーンルーム内の圧力が、前記非クリーンルーム内の圧力よりも高くされてなる、請求項6記載のグラビアシリンダ用全自動検査システム。 - 請求項1記載のグラビアシリンダ用全自動検査システムを用いたグラビアシリンダ用検査方法であり、
前記産業ロボットによる被製版ロールの運搬工程と、
前記処理装置における被製版ロールへの処理工程と、
前記シリンダ表面検査装置による被製版ロール表面の検査工程と、
を含み、
前記クリーンルーム内で、前記検査工程が行われるようにした、グラビアシリンダ用検査方法。 - 前記シリンダ表面検査装置内で前記被製版ロールの表面の検査が行われている間は、前記回転テーブル式ロールストック装置で前記被製版ロールを待機させる工程、をさらに含み、
前記処理装置と前記シリンダ表面検査装置との間における前記被製版ロールの滞留を解消するようにした、請求項8記載のグラビアシリンダ用検査方法。 - 前記被製版ロールの周面の面積に応じて、前記被製版ロールの前記処理装置での予定処理時間と、前記処理装置で処理された前記被製版ロールの前記シリンダ表面検査装置での予定検査時間と、を比較する工程と、
前記被製版ロールの前記シリンダ表面検査装置での予定検査時間の方が長い場合には、前記回転テーブル式ロールストック装置で前記被製版ロールを待機させる工程と、
をさらに含み、
前記処理装置と前記シリンダ表面検査装置との間における前記被製版ロールの滞留を解消するようにした、請求項8記載のグラビアシリンダ用検査方法。 - 請求項1記載のグラビアシリンダ用全自動検査システムを組み込んだグラビアシリンダの全自動製造システムであり、
前記処理装置で製版処理を行い、前記シリンダ表面検査装置で前記処理された被製版ロールの表面を検査することにより、グラビアシリンダを製造するようにした、グラビアシリンダの全自動製造システム。 - 請求項11記載のグラビアシリンダの全自動製造システムを用いたグラビアシリンダの製造方法であり、
前記産業ロボットによる被製版ロールの運搬工程と、
前記処理装置における被製版ロールへの処理工程と、
前記シリンダ表面検査装置による被製版ロール表面の検査工程と、
を含み、
前記クリーンルーム内で、前記検査工程が行われることで、製版処理が行われるようにした、グラビアシリンダの製造方法。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202480036280.3A CN121219134A (zh) | 2023-06-12 | 2024-04-10 | 凹版滚筒用全自动检查系统及凹版滚筒用检查方法 |
| JP2025527498A JPWO2024257460A1 (ja) | 2023-06-12 | 2024-04-10 | |
| KR1020257041489A KR20260008813A (ko) | 2023-06-12 | 2024-04-10 | 그라비아 실린더용 전자동 검사 시스템 및 그라비아 실린더용 검사 방법 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023096151 | 2023-06-12 | ||
| JP2023-096151 | 2023-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2024257460A1 true WO2024257460A1 (ja) | 2024-12-19 |
Family
ID=93851855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2024/014497 Ceased WO2024257460A1 (ja) | 2023-06-12 | 2024-04-10 | グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024257460A1 (ja) |
| KR (1) | KR20260008813A (ja) |
| CN (1) | CN121219134A (ja) |
| TW (1) | TW202513332A (ja) |
| WO (1) | WO2024257460A1 (ja) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238456A (ja) * | 1998-02-20 | 1999-08-31 | Hirata Corp | 基板製造ラインおよび基板製造方法 |
| US20050100826A1 (en) * | 2003-11-10 | 2005-05-12 | Tsutomu Sato | Photogravure plate making method |
| DE102006050274A1 (de) * | 2006-10-23 | 2008-05-29 | Hell Gravure Systems Gmbh & Co. Kg | Verfahren und Vorrichtung zur Überprüfung der Qualität wenigstens eines Druckformzylinders und eine mit einer solchen Vorrichtung ausgerüstete Fertigungslinie |
| WO2013058151A1 (ja) * | 2011-10-18 | 2013-04-25 | 株式会社シンク・ラボラトリー | 製版消耗材の遠隔管理方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3099462B2 (ja) | 1991-09-30 | 2000-10-16 | 凸版印刷株式会社 | 円筒面検査方法及びその装置 |
| JP3789761B2 (ja) | 2001-03-05 | 2006-06-28 | ニューリー株式会社 | グラビアシリンダー検査装置 |
| JP4528633B2 (ja) | 2005-01-12 | 2010-08-18 | 株式会社シンク・ラボラトリー | グラビアシリンダ用検査装置及び方法 |
| ES2651587T3 (es) | 2010-04-06 | 2018-01-29 | Think Laboratory Co., Ltd. | Sistema de procesamiento para preparar una placa de huecograbado de forma completamente automática |
| CN102958697B (zh) | 2010-10-01 | 2014-11-05 | 株式会社新克 | 全自动凹版制版用处理系统 |
-
2024
- 2024-04-10 JP JP2025527498A patent/JPWO2024257460A1/ja active Pending
- 2024-04-10 WO PCT/JP2024/014497 patent/WO2024257460A1/ja not_active Ceased
- 2024-04-10 KR KR1020257041489A patent/KR20260008813A/ko active Pending
- 2024-04-10 CN CN202480036280.3A patent/CN121219134A/zh active Pending
- 2024-04-23 TW TW113115053A patent/TW202513332A/zh unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238456A (ja) * | 1998-02-20 | 1999-08-31 | Hirata Corp | 基板製造ラインおよび基板製造方法 |
| US20050100826A1 (en) * | 2003-11-10 | 2005-05-12 | Tsutomu Sato | Photogravure plate making method |
| DE102006050274A1 (de) * | 2006-10-23 | 2008-05-29 | Hell Gravure Systems Gmbh & Co. Kg | Verfahren und Vorrichtung zur Überprüfung der Qualität wenigstens eines Druckformzylinders und eine mit einer solchen Vorrichtung ausgerüstete Fertigungslinie |
| WO2013058151A1 (ja) * | 2011-10-18 | 2013-04-25 | 株式会社シンク・ラボラトリー | 製版消耗材の遠隔管理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20260008813A (ko) | 2026-01-16 |
| TW202513332A (zh) | 2025-04-01 |
| JPWO2024257460A1 (ja) | 2024-12-19 |
| CN121219134A (zh) | 2025-12-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5757667B2 (ja) | 全自動グラビア製版用処理システム | |
| EP1132948A2 (en) | Substrate holding device, semiconductor manufacturing apparatus and device manufacturing device | |
| JP2005057294A (ja) | インタフェースユニット、該インタフェースユニットを含むリソグラフィ投影装置、及びデバイス製造方法 | |
| JP2007194609A (ja) | リソグラフィ装置および方法 | |
| EP1093017A3 (en) | Method and apparatus for reticle inspection using aerial imaging | |
| WO2012043515A1 (ja) | 全自動グラビア製版用処理システム | |
| CN110967924B (zh) | 光掩模基板的修正方法、制造方法和处理方法、光掩模的制造方法以及基板处理装置 | |
| CN111830779A (zh) | 相位移光罩残留缺陷处理方法、系统和相位移光罩 | |
| WO2024257460A1 (ja) | グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 | |
| US20200124994A1 (en) | Mask treating method and system thereof | |
| US20150090295A1 (en) | Apparatus and methods for a mask inverter | |
| JP3940084B2 (ja) | グラビア印刷用被製版ロールのメッキ工場 | |
| JP5649134B2 (ja) | ペリクルフレーム | |
| JP2006015279A (ja) | 感光膜塗布装置及び製版工場 | |
| JP2010147360A (ja) | 基板処理装置および基板処理方法 | |
| TWI878474B (zh) | 附銅電鍍層之鋁中空輥的全自動製造系統以及附銅電鍍層之鋁中空輥的製造方法 | |
| KR20020096086A (ko) | 노광용 파티클 제거 장치 | |
| Tsuji et al. | Development of next-generation mask inspection method by using the feature of mask image captured with 199-nm inspection optics | |
| JPH10321691A5 (ja) | ||
| US20030235764A1 (en) | Planar reticle design/fabrication method for rapid inspection and cleaning | |
| JPH11191524A (ja) | フォトリソプロセス装置 | |
| JPS62263646A (ja) | ウエハ検査装置 | |
| CN121183287A (zh) | 一种精密金属掩膜板的缺陷检测修复方法和系统 | |
| JPH11214284A (ja) | フォトリソプロセス装置 | |
| CN114563924A (zh) | 光掩模版缺陷处理设备、曝光机以及光掩模版缺陷处理方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 24823083 Country of ref document: EP Kind code of ref document: A1 |
|
| ENP | Entry into the national phase |
Ref document number: 2025527498 Country of ref document: JP Kind code of ref document: A |
|
| ENP | Entry into the national phase |
Ref document number: 1020257041489 Country of ref document: KR Free format text: ST27 STATUS EVENT CODE: A-0-1-A10-A15-NAP-PA0105 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 1020257041489 Country of ref document: KR |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 202517126121 Country of ref document: IN |
|
| WWP | Wipo information: published in national office |
Ref document number: 202517126121 Country of ref document: IN |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| WWP | Wipo information: published in national office |
Ref document number: 1020257041489 Country of ref document: KR |